CN107661571A - Sandwich construction flexibility artificial hearing Neural stimulation electrodes and preparation method - Google Patents
Sandwich construction flexibility artificial hearing Neural stimulation electrodes and preparation method Download PDFInfo
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- 238000010276 construction Methods 0.000 title claims abstract description 26
- 238000002360 preparation method Methods 0.000 title claims abstract description 16
- 230000000638 stimulation Effects 0.000 title abstract description 8
- 230000001537 neural effect Effects 0.000 title abstract description 6
- 239000000463 material Substances 0.000 claims abstract description 43
- 210000000860 cochlear nerve Anatomy 0.000 claims abstract description 23
- 238000013461 design Methods 0.000 claims abstract description 21
- 238000000465 moulding Methods 0.000 claims abstract description 12
- 238000004078 waterproofing Methods 0.000 claims abstract description 6
- 239000002184 metal Substances 0.000 claims description 74
- 229910052751 metal Inorganic materials 0.000 claims description 74
- 239000000758 substrate Substances 0.000 claims description 23
- 230000004936 stimulating effect Effects 0.000 claims description 16
- 238000004528 spin coating Methods 0.000 claims description 13
- 238000000034 method Methods 0.000 claims description 11
- 241000251468 Actinopterygii Species 0.000 claims description 3
- 238000005553 drilling Methods 0.000 claims description 2
- 238000009413 insulation Methods 0.000 claims description 2
- 238000007711 solidification Methods 0.000 claims 2
- 230000008023 solidification Effects 0.000 claims 2
- 230000005611 electricity Effects 0.000 claims 1
- 238000010422 painting Methods 0.000 claims 1
- 239000010408 film Substances 0.000 abstract description 31
- 210000003477 cochlea Anatomy 0.000 abstract description 16
- 238000009826 distribution Methods 0.000 abstract description 6
- 239000010409 thin film Substances 0.000 abstract description 4
- 239000004205 dimethyl polysiloxane Substances 0.000 description 7
- 235000013870 dimethyl polysiloxane Nutrition 0.000 description 7
- CXQXSVUQTKDNFP-UHFFFAOYSA-N octamethyltrisiloxane Chemical compound C[Si](C)(C)O[Si](C)(C)O[Si](C)(C)C CXQXSVUQTKDNFP-UHFFFAOYSA-N 0.000 description 7
- 238000004987 plasma desorption mass spectroscopy Methods 0.000 description 7
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 description 7
- 238000003672 processing method Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 241000237858 Gastropoda Species 0.000 description 3
- 230000002146 bilateral effect Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 239000007943 implant Substances 0.000 description 3
- 238000002513 implantation Methods 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000005566 electron beam evaporation Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000002085 irritant Substances 0.000 description 2
- 231100000021 irritant Toxicity 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 230000004913 activation Effects 0.000 description 1
- 230000003044 adaptive effect Effects 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 210000004556 brain Anatomy 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000001149 cognitive effect Effects 0.000 description 1
- 238000002788 crimping Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 125000000118 dimethyl group Chemical group [H]C([H])([H])* 0.000 description 1
- 235000013399 edible fruits Nutrition 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004070 electrodeposition Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000013507 mapping Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 210000005036 nerve Anatomy 0.000 description 1
- 230000007830 nerve conduction Effects 0.000 description 1
- 210000001640 nerve ending Anatomy 0.000 description 1
- 230000007433 nerve pathway Effects 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 230000008447 perception Effects 0.000 description 1
- 230000010412 perfusion Effects 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 229920005573 silicon-containing polymer Polymers 0.000 description 1
- 230000005236 sound signal Effects 0.000 description 1
Classifications
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61N—ELECTROTHERAPY; MAGNETOTHERAPY; RADIATION THERAPY; ULTRASOUND THERAPY
- A61N1/00—Electrotherapy; Circuits therefor
- A61N1/02—Details
- A61N1/04—Electrodes
- A61N1/05—Electrodes for implantation or insertion into the body, e.g. heart electrode
- A61N1/0526—Head electrodes
- A61N1/0541—Cochlear electrodes
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- Health & Medical Sciences (AREA)
- Otolaryngology (AREA)
- Cardiology (AREA)
- Heart & Thoracic Surgery (AREA)
- Engineering & Computer Science (AREA)
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- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Radiology & Medical Imaging (AREA)
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Abstract
The invention discloses a kind of sandwich construction flexibility artificial hearing Neural stimulation electrodes and preparation method, the present invention is according to the cochlea auditory nerve end occupy-place regularity of distribution, using the flexible dielectric films material with biocompatibility, with the step such as sandwich construction, via, wiring, moulding, design and produce flexible artificial cochlea electrode array component, step specific as follows:(1) flexible thin-film material's ad-hoc location via (2) electrode layer electrode points occupy-place designs and produces each electrode connecting line of (3) electrode layer water-proofing treatment (4) trace layer, draws pin design (5) electrode connecting line layer water-proofing treatment (6) deformation, form, and needle electrode is made.The electrode design preparation method, have the characteristics that sandwich construction, electrode are firm, sensing electrode frequency resolution is high, customizable, electrode needle is very thin, the disabled treatment of individuation, the precision sense of hearing can be met, various types of acoustic coding processors can be docked.
Description
Technical field
The present invention relates to a kind of sandwich construction flexibility artificial hearing Neural stimulation electrodes and preparation method.
Background technology
Opsition dependent is dispersed with the nerve endings that can largely receive external irritant inside cochlea, and external voice signal can pass through sound
Signal acquisition, analysis, coding, with appropriate stimulating electrical signal, these teleneurons are docked, auditory nerve conduction path is activated, controls
The incompleteness of some auditory systems is treated, recovers Auditory Perception, such as cochlear implant or artificial cochlea.
Current artificial cochlea electrode negligible amounts, are generally less than 30, and these electrodes are with a kind of relatively coarse mapping
Auditory nerve end in relation pair lug snail, external irritant signal activation these nerve pathways conduction, recovers human auditory system and perceives.By
In the voice acoustical signal the characteristics of, these rough distribution of electrodes can preferably transmit language message, can reach more than 95%
The intelligibility of speech, but still there is much abundant acoustic intelligence to be difficult to normally perceive, the tone of such as music, Chinese perceives, artitificial ear
The phonosensitive effect of snail implantation person has much room for improvement.Wherein, make full use of cochlea itself auditory nerve conducting structure and accurately electrode-
Frequency coding opposite joining relation, increase electrode number, in the case where meeting that electrod-array entirety bore is very thin, more implantation are electric as far as possible
Pole contact, be precision treatment, improve artificial cochlea sound resolution capability it is highly important.On this basis, recycling is listened
Feel nerve and the very strong self study of brain cognitive system, adaptive ability, can reach closer to normal good hearing and debate audio fruit.
However, being helical form warp architecture inside cochlea, membranous cochlea is narrow, and the sensing electrode stimulated for auditory nerve should have
Good flexibility, and there is long-term biocompatibility.Meanwhile individual patient cochlea shape, size, auditory nerve distribution etc. may tool
There is certain specificity, the electrode structure of individuation should be easy to design, it is also extremely important to customize;But current cochlear implant electrode
Design and making exist be not easy to increase number of electrodes, not enough firmly easy to fall off, individuation electrode design is not easy to realize electrode sometimes
The problems such as.
The content of the invention
In order to solve technical problem present in prior art, the invention discloses a kind of sandwich construction flexibility auditory nerve
Stimulating electrode array and preparation method.The present invention is according to the cochlea auditory nerve end occupy-place regularity of distribution, using flexible, bio-compatible
Property thin-film material, the step such as punch, connect up, be moulding with sandwich construction, designing and producing flexible stimulating electrode array, this is designed and produced
Method, have the characteristics that electrode firmly, contact can gather, customizability, electrode entirety caliber it is very thin, individuation, essence can be met
Standardization is treated.
The technical solution adopted by the present invention is as follows:
The invention provides a kind of sandwich construction flexibility auditory nerve stimulating electrode array, including a flexible dielectric films
Material layer, it is conductive metal layer on the upper strata of the flexible dielectric films material layer, in the lower floor of flexible dielectric films material layer
And conductive metal layer;One of conductive metal layer makes electrode layer, and another conductive metal layer makes trace layer;Described
The electrode that electrode layer makes connects with the lead that trace layer makes.
Further, there is fish tail and waterproof layer on the surface of the conductive metal layer described in two.
Further, every flexible dielectric films material surface with organizing to contact in described electrode layer and trace layer
All plus apply one layer of waterproofing protection film.
Further, between flexible dielectric films material layer and conductive metal layer, to improve the adhesive force of metal, can add
Enter one layer of binding material.
Further, in described trace layer design, multilayer trace layer can be used to design as needed;Described multilayer
The Different electrodes of trace layer connection electrode layer.
Present invention also offers a kind of preparation method of sandwich construction flexibility auditory nerve stimulating electrode array, (one side adds
Work), specific step is as follows:
Step 1 provides substrate;In the upper spin coating first layer flexible dielectric films material layer of the substrate, standing treats that it is solid
Change;
Step 2. deposits first layer conductive metal layer in first layer flexible dielectric films material surface, and etches metal
Pattern;
Step 3. spin coating second layer flexible dielectric films material layer on described first layer conductive metal layer;
Step 4. sets via on the part that step 3 obtains;
Step 5. deposits second layer conductive metal layer on the surface of second layer flexible dielectric films material layer, and etches gold
Metal patterns;Via in step 4 connects the pattern of the first conductive metal layer and the second conductive metal layer;
Step 6 is peeled off from hard substrate produces the part that step 5 obtains;
Step 7 is moulding.
Further;Using first layer conductive metal layer as trace layer, then the second conductive metal layer is as electrode layer;Electrode
The conductive metal electrode array layout of layer, is designed by printed circuit mode, made;The conductive metal film line of trace layer, draw
Pin is laid out, and is also designed, made using printed circuit mode;
Further, method moulding in step 7 is:Form is crimped by axle of flexible metal wire stent, is formed
Similar long taper of the electrode layer outside, including trace layer, wherein there is the wire stent that can be extracted out.
Present invention also offers a kind of preparation method of sandwich construction flexibility auditory nerve stimulating electrode array, (bilateral adds
Work), specific step is as follows:
Step 1 provides substrate;In the upper spin coating first layer flexible dielectric films material layer of the substrate, standing treats that it is solid
Change;
Step 2. set hole site, and drilling in described first layer flexible dielectric films material layer;
Step 3. deposits first layer conductive metal layer in first layer flexible dielectric films material surface, and etches metal
Pattern;;
One layer of (i.e. the second layer) flexible dielectric films material of spin coating again on the surface for the part that step 4. obtains in step 3
Layer;
Step 5 peels off the sample made from hard substrate, and sample is turned into (i.e. bottom surface is reversed to above),
And the sample bottom surface that suitably protecting is machined, then be fixed on hard substrate;
Step 5. deposits second layer conductive metal layer in sample upper surface again, and etches metal pattern;Wherein
Via connect the pattern of the first conductive metal layer and the second conductive metal layer.
Step 6 peels off above-mentioned making sample from hard substrate.
Step 7;It is moulding.
Further;Using first layer conductive metal layer as trace layer, then the second conductive metal layer is as electrode layer;Electrode
The conductive metal electrode array layout of layer, is designed by printed circuit mode, made;The conductive metal film line of trace layer, draw
Pin is laid out, and is also designed, made using printed circuit mode;
Further, method moulding in step 7 is:Form is crimped by axle of flexible metal wire stent, is formed
Similar long taper of the electrode layer outside, including trace layer, wherein there is the wire stent that can be extracted out.
Beneficial effects of the present invention:
1st, implantable electrode and number of leads are more:Number of leads increase is crucial in electrode fabrication, using above-mentioned making side
Method, can make electrode number can be far more than existing cochlear electrode preparation method.For example, when oeil de boeuf radius is 0.5mm, snail bottom
Zhou Changyue 3mm, when wire widths are 20um, lead at intervals of 20um, can cloth go out about 70 leads, and existing artificial cochlea is electric
Pole lead is generally less than 30.
2nd, electrode is firm:Electrode using electron beam evaporation, deposit manufacture " growing " is more firm, difficult for drop-off;And show
Somebody's work cochlear electrode pours fixed electrode using mould more, and operation implantation process is easily fallen off.
3rd, Individual design is more convenient:Cochlea circle window aperture varies with each individual, about 0.6mm to 5mm, in use
State design and processing method so that electrode entirety caliber is very thin, and can according to individual patients cochlear structures, impaired hearing situation,
Custom stimulation electrode position, selection different-thickness membrane structure, structure individuation, the electrode product of precision.
Brief description of the drawings
The Figure of description for forming the part of the application is used for providing further understanding of the present application, and the application's shows
Meaning property embodiment and its illustrate be used for explain the application, do not form the improper restriction to the application.
The sandwich construction of Fig. 1 present invention, wherein:1-1 electrode layers, 1-2 flexible dielectric films material layers, 1-3 trace layers;
The curling, shaping procedure chart of Fig. 2 present invention, wherein:2-1 is electrode, and 2-2 is lead, and 2-3 is that via irrigates metal
Position.
Embodiment
It is noted that described further below is all exemplary, it is intended to provides further instruction to the application.It is unless another
Indicate, all technologies used herein and scientific terminology are with usual with the application person of an ordinary skill in the technical field
The identical meanings of understanding.
It should be noted that term used herein above is merely to describe embodiment, and be not intended to restricted root
According to the illustrative embodiments of the application.As used herein, unless the context clearly indicates otherwise, otherwise singulative
It is also intended to include plural form, additionally, it should be understood that, when in this manual using term "comprising" and/or " bag
Include " when, it indicates existing characteristics, step, operation, device, component and/or combinations thereof.
As background technology is introduced, the design of cochlear implant electrode in the prior art be present and make to exist and be not easy to increase
Power-up number of poles, sometimes electrode not enough firm easy to fall off, individuation electrode design the problems such as being not easy to realize, the present invention is in order to solve
As above technical problem, present applicant proposes a kind of sandwich construction flexibility artificial hearing Neural stimulation electrodes and preparation method;
In a kind of typical embodiment of the application, as shown in Figure 1, there is provided a kind of sandwich construction flexibility artificial hearing
Neural stimulation electrodes;Including a flexible dielectric films material layer 1-2, on described flexible dielectric films material layer 1-2 upper stratas
It is conductive metal layer, is also conductive metal layer in the lower floor of flexible dielectric films material layer;One of conductive metal layer makes
Electrode layer 1-1, another conductive metal layer make trace layer 1-3;The electrode that described electrode layer makes makes with trace layer
Lead connects;The mode specifically connected is by setting via, electrode layer 1-1 is connected with trace layer 1-3.
Further, it is additionally provided with fish tail and waterproof layer on the surface of the conductive metal layer described in two.
Further, every flexible dielectric films material surface with organizing to contact in described electrode layer and trace layer
All plus apply one layer of waterproofing protection film.
Further, between flexible dielectric films material layer and conductive metal layer, to improve the adhesive force of metal, can add
Enter one layer of binding material.
Further, in described trace layer design, multilayer trace layer can be used to design as needed;Described multilayer
The Different electrodes of trace layer connection electrode layer.
Electrode 2-1 is carved out in electrode layer;Trace layer carves out lead 2-2;Passed through between electrode 2-1 and lead 2-2
Hole 2-3 is connected.
The present invention is according to the cochlea auditory nerve end occupy-place regularity of distribution, using flexible, non-biocompatible thin film's material, with more
The step such as Rotating fields punching, wiring, moulding, designs and produces flexible electric stimulation electrode array, the designing and manufacturing method, has electrode
Firmly, contact can gather, customizability, very thin electrode entirety caliber the features such as, can meet individuation, precision treatment.Specifically
Preparation method include two kinds, one kind is unilateral processing method;One kind is bilateral processing method, specific as follows,
1 unilateral processing method of embodiment:
Hard substrate (being used to provide support for whole device in making) is provided
Step 1:One layer of PDMS of spin coating, thickness is optional, is such as 100um.
Step 2:Layer of metal film is being deposited thereon, and thickness is optional, is such as 75nm.
Step 3:Required pattern, such as trace layer are etched again.
Step 4:Again in one layer of PDMS of said structure surface spin coating, thickness is optional, is such as 100um.
Step 5:Hole site was designed on step 4PDMS layers again, and was punched.
Step 6:Redeposited layer of metal film, thickness is optional, is such as 75nm.
Step 7:Required pattern, such as electrode layer are etched again.
Step 8:Peeled off from hard substrate and make sample.
Step 9:Using flexible metal wire stent as axle crimp form, formed electrode layer outside, including trace layer
Similar long taper, wherein there is the wire stent that can be extracted out;Specific method is shown in accompanying drawing 2 that crimping it in the direction of the arrow can obtain
To flexible conical cochlear electrode.
The bilateral processing method of embodiment 2
Hard substrate (being used to provide support for whole device in making) is provided
Step 1;One layer of PDMS of spin coating, thickness can be set, and be such as 100um.
Step 2:Hole site was designed on PDMS layer, and was punched.
Step 3:Layer of metal film is deposited on surface again, thickness is optional, such as:For 75nm
Step 4:Required pattern, such as trace layer are etched again.
Step 5:One layer of PDMS of spin coating, thickness can be set again, be such as 100um.
Step 6:The sample made is peeled off from hard substrate, and sample another side is flipped up, suitably protecting is
Processed sample bottom surface, then be fixed on hard substrate.
Step 7:Layer of metal film is deposited in upper surface again, thickness is optional, is such as 75nm.
Step 8:Etch required pattern, such as electrode layer.
Step 9:Peeled off from hard substrate and make sample.
Step 10:Using flexible metal wire stent as axle crimp form, formed electrode layer outside, including trace layer
Similar long taper, wherein there is the wire stent that can be extracted out.
Flexible dielectric films material described in two of which embodiment is dimethyl silicone polymer (PDMS), certainly, is also had
Other flexible thin-film materials with similar performance can also use;First precoated before spin coating flexible insulating material layer, on substrate anti-stick
Even layer, facilitates the later stage to peel off;Deposited metal film uses electron beam evaporation, and selected metal material is answered conductive good, biological
Stability is good, the performance such as soft, is, for example, gold;Etching smithcraft uses ultraviolet photolithographic;Etching conductive patterning method is divided into rotation
Resist coating, exposure, development, deposited metal, wash away photoresist.
Via perfusion conducting metal in two embodiments can be gold.
Above-mentioned waterproofing protection layer material can use PDMS.
Electrode layer can use ultraviolet photolithographic technique, expose electrode.
Each electrode contacts shape can be determined by amount of crimp, can be customized by actual requirement, such as annular, u-shaped, rectangular
Deng.
The present invention is according to the cochlea auditory nerve end occupy-place regularity of distribution, using the insulation flexible film with biocompatibility
Material, with the step such as sandwich construction, via, wiring, moulding, design and produce flexible artificial cochlea electrode array component, the electrode
Designing and manufacturing method, there is the spies such as sandwich construction, electrode are firm, sensing electrode frequency resolution is high, customizable, electrode needle is very thin
Point, the disabled treatment of individuation, the precision sense of hearing can be met, various types of acoustic coding processors can be docked.
Although above-mentioned the embodiment of the present invention is described with reference to accompanying drawing, model not is protected to the present invention
The limitation enclosed, one of ordinary skill in the art should be understood that on the basis of technical scheme those skilled in the art are not
Need to pay various modifications or deformation that creative work can make still within protection scope of the present invention.
Claims (10)
1. sandwich construction flexibility auditory nerve stimulating electrode array, it is characterised in that including a flexible dielectric films material layer,
It is conductive metal layer on the upper strata of the flexible dielectric films material layer, is also conductive in the lower floor of flexible dielectric films material layer
Metal level;One of conductive metal layer makes electrode layer, and another conductive metal layer makes trace layer;Described electrode layer system
The lead that the electrode of work makes with trace layer connects.
2. sandwich construction flexibility auditory nerve stimulating electrode array as claimed in claim 1, it is characterised in that described in two
The surface of conductive metal layer be additionally provided with fish tail and waterproof layer.
3. sandwich construction flexibility auditory nerve stimulating electrode array as claimed in claim 1, it is characterised in that in described electricity
It is every in pole layer and trace layer all to add one layer of waterproofing protection film of painting with the flexible dielectric films material surface for organizing to contact.
4. sandwich construction flexibility auditory nerve stimulating electrode array as claimed in claim 1, it is characterised in that in flexible insulation
Between film material plies and conductive metal layer, one layer of binding material is added.
5. sandwich construction flexibility auditory nerve stimulating electrode array as claimed in claim 1, it is characterised in that draw in described
In the design of line layer, multilayer trace layer can be used to design as needed;The Different electrodes of described multilayer trace layer connection electrode layer.
6. a kind of preparation method of sandwich construction flexibility auditory nerve stimulating electrode array, it is characterised in that specific step is such as
Under:
Step 1 provides substrate;In the upper spin coating first layer flexible dielectric films material layer of the substrate, standing treats its solidification;
Step 2. deposits first layer conductive metal layer in first layer flexible dielectric films material surface, and etches metal figure
Case;
Step 3. spin coating second layer flexible dielectric films material layer on described first layer conductive metal layer;
Step 4. sets via on the part that step 3 obtains;
Step 5. deposits second layer conductive metal layer on the surface of second layer flexible dielectric films material layer, and etches metal figure
Case;Via in step 4 connects the pattern of the first conductive metal layer and the second conductive metal layer;
Step 6 is peeled off from hard substrate produces the part that step 5 obtains;
Step 7 is moulding.
7. a kind of preparation method of sandwich construction flexibility auditory nerve stimulating electrode array as claimed in claim 6, its feature
It is, using first layer conductive metal layer as trace layer, then the second conductive metal layer is as electrode layer;The conducting metal of electrode layer
Electrode array layout, design, make by printed circuit mode;The conductive metal film line of trace layer, pin layout, are also used
Printed circuit mode is designed, made.
8. a kind of preparation method of sandwich construction flexibility auditory nerve stimulating electrode array as claimed in claim 6, its feature
It is, moulding method is in step 7:Using flexible metal wire stent as axle crimp form, formed electrode layer outside, draw
Similar long taper including line layer, wherein there is the wire stent that can be extracted out.
9. a kind of preparation method of sandwich construction flexibility auditory nerve stimulating electrode array, it is characterised in that specific step is such as
Under:
Step 1 provides substrate;In the upper spin coating first layer flexible dielectric films material layer of the substrate, standing treats its solidification;
Step 2. set hole site, and drilling in described first layer flexible dielectric films material layer;
Step 3. deposits first layer metal layer in described first layer flexible dielectric films material layer;And in first layer metal layer
On etch required pattern;
One layer of flexible dielectric films material layer of spin coating again on the surface for the part that step 4. obtains in step 3;
Step 5 peels off the sample made from hard substrate, and sample another side is flipped up, the machined sample of suitably protecting
Product bottom surface, then be fixed on hard substrate;
Step 6. deposits second layer conductive metal layer in sample upper surface again, and etches metal pattern;
Step 7 peels off above-mentioned making sample from hard substrate;
Step 8 is moulding.
10. a kind of preparation method of sandwich construction flexibility auditory nerve stimulating electrode array as claimed in claim 9, its feature
It is, using first layer conductive metal layer as trace layer, then the second conductive metal layer is as electrode layer;The conducting metal of electrode layer
Electrode array layout, design, make by printed circuit mode;The conductive metal film line of trace layer, pin layout, are also used
Printed circuit mode is designed, made;
Moulding method is in step 7:Using flexible metal wire stent as axle crimp form, formed electrode layer outside, draw
Similar long taper including line layer, wherein there is the wire stent that can be extracted out.
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