CN107661571A - Sandwich construction flexibility artificial hearing Neural stimulation electrodes and preparation method - Google Patents

Sandwich construction flexibility artificial hearing Neural stimulation electrodes and preparation method Download PDF

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Publication number
CN107661571A
CN107661571A CN201710812115.4A CN201710812115A CN107661571A CN 107661571 A CN107661571 A CN 107661571A CN 201710812115 A CN201710812115 A CN 201710812115A CN 107661571 A CN107661571 A CN 107661571A
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layer
electrode
conductive metal
sandwich construction
dielectric films
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CN107661571B (en
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田岚
韩琳
吴瑞安
马发江
霍新宇
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Shandong University
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Shandong University
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    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61NELECTROTHERAPY; MAGNETOTHERAPY; RADIATION THERAPY; ULTRASOUND THERAPY
    • A61N1/00Electrotherapy; Circuits therefor
    • A61N1/02Details
    • A61N1/04Electrodes
    • A61N1/05Electrodes for implantation or insertion into the body, e.g. heart electrode
    • A61N1/0526Head electrodes
    • A61N1/0541Cochlear electrodes

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  • Health & Medical Sciences (AREA)
  • Otolaryngology (AREA)
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  • Heart & Thoracic Surgery (AREA)
  • Engineering & Computer Science (AREA)
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  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Life Sciences & Earth Sciences (AREA)
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  • General Health & Medical Sciences (AREA)
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Abstract

The invention discloses a kind of sandwich construction flexibility artificial hearing Neural stimulation electrodes and preparation method, the present invention is according to the cochlea auditory nerve end occupy-place regularity of distribution, using the flexible dielectric films material with biocompatibility, with the step such as sandwich construction, via, wiring, moulding, design and produce flexible artificial cochlea electrode array component, step specific as follows:(1) flexible thin-film material's ad-hoc location via (2) electrode layer electrode points occupy-place designs and produces each electrode connecting line of (3) electrode layer water-proofing treatment (4) trace layer, draws pin design (5) electrode connecting line layer water-proofing treatment (6) deformation, form, and needle electrode is made.The electrode design preparation method, have the characteristics that sandwich construction, electrode are firm, sensing electrode frequency resolution is high, customizable, electrode needle is very thin, the disabled treatment of individuation, the precision sense of hearing can be met, various types of acoustic coding processors can be docked.

Description

Sandwich construction flexibility artificial hearing Neural stimulation electrodes and preparation method
Technical field
The present invention relates to a kind of sandwich construction flexibility artificial hearing Neural stimulation electrodes and preparation method.
Background technology
Opsition dependent is dispersed with the nerve endings that can largely receive external irritant inside cochlea, and external voice signal can pass through sound Signal acquisition, analysis, coding, with appropriate stimulating electrical signal, these teleneurons are docked, auditory nerve conduction path is activated, controls The incompleteness of some auditory systems is treated, recovers Auditory Perception, such as cochlear implant or artificial cochlea.
Current artificial cochlea electrode negligible amounts, are generally less than 30, and these electrodes are with a kind of relatively coarse mapping Auditory nerve end in relation pair lug snail, external irritant signal activation these nerve pathways conduction, recovers human auditory system and perceives.By In the voice acoustical signal the characteristics of, these rough distribution of electrodes can preferably transmit language message, can reach more than 95% The intelligibility of speech, but still there is much abundant acoustic intelligence to be difficult to normally perceive, the tone of such as music, Chinese perceives, artitificial ear The phonosensitive effect of snail implantation person has much room for improvement.Wherein, make full use of cochlea itself auditory nerve conducting structure and accurately electrode- Frequency coding opposite joining relation, increase electrode number, in the case where meeting that electrod-array entirety bore is very thin, more implantation are electric as far as possible Pole contact, be precision treatment, improve artificial cochlea sound resolution capability it is highly important.On this basis, recycling is listened Feel nerve and the very strong self study of brain cognitive system, adaptive ability, can reach closer to normal good hearing and debate audio fruit.
However, being helical form warp architecture inside cochlea, membranous cochlea is narrow, and the sensing electrode stimulated for auditory nerve should have Good flexibility, and there is long-term biocompatibility.Meanwhile individual patient cochlea shape, size, auditory nerve distribution etc. may tool There is certain specificity, the electrode structure of individuation should be easy to design, it is also extremely important to customize;But current cochlear implant electrode Design and making exist be not easy to increase number of electrodes, not enough firmly easy to fall off, individuation electrode design is not easy to realize electrode sometimes The problems such as.
The content of the invention
In order to solve technical problem present in prior art, the invention discloses a kind of sandwich construction flexibility auditory nerve Stimulating electrode array and preparation method.The present invention is according to the cochlea auditory nerve end occupy-place regularity of distribution, using flexible, bio-compatible Property thin-film material, the step such as punch, connect up, be moulding with sandwich construction, designing and producing flexible stimulating electrode array, this is designed and produced Method, have the characteristics that electrode firmly, contact can gather, customizability, electrode entirety caliber it is very thin, individuation, essence can be met Standardization is treated.
The technical solution adopted by the present invention is as follows:
The invention provides a kind of sandwich construction flexibility auditory nerve stimulating electrode array, including a flexible dielectric films Material layer, it is conductive metal layer on the upper strata of the flexible dielectric films material layer, in the lower floor of flexible dielectric films material layer And conductive metal layer;One of conductive metal layer makes electrode layer, and another conductive metal layer makes trace layer;Described The electrode that electrode layer makes connects with the lead that trace layer makes.
Further, there is fish tail and waterproof layer on the surface of the conductive metal layer described in two.
Further, every flexible dielectric films material surface with organizing to contact in described electrode layer and trace layer All plus apply one layer of waterproofing protection film.
Further, between flexible dielectric films material layer and conductive metal layer, to improve the adhesive force of metal, can add Enter one layer of binding material.
Further, in described trace layer design, multilayer trace layer can be used to design as needed;Described multilayer The Different electrodes of trace layer connection electrode layer.
Present invention also offers a kind of preparation method of sandwich construction flexibility auditory nerve stimulating electrode array, (one side adds Work), specific step is as follows:
Step 1 provides substrate;In the upper spin coating first layer flexible dielectric films material layer of the substrate, standing treats that it is solid Change;
Step 2. deposits first layer conductive metal layer in first layer flexible dielectric films material surface, and etches metal Pattern;
Step 3. spin coating second layer flexible dielectric films material layer on described first layer conductive metal layer;
Step 4. sets via on the part that step 3 obtains;
Step 5. deposits second layer conductive metal layer on the surface of second layer flexible dielectric films material layer, and etches gold Metal patterns;Via in step 4 connects the pattern of the first conductive metal layer and the second conductive metal layer;
Step 6 is peeled off from hard substrate produces the part that step 5 obtains;
Step 7 is moulding.
Further;Using first layer conductive metal layer as trace layer, then the second conductive metal layer is as electrode layer;Electrode The conductive metal electrode array layout of layer, is designed by printed circuit mode, made;The conductive metal film line of trace layer, draw Pin is laid out, and is also designed, made using printed circuit mode;
Further, method moulding in step 7 is:Form is crimped by axle of flexible metal wire stent, is formed Similar long taper of the electrode layer outside, including trace layer, wherein there is the wire stent that can be extracted out.
Present invention also offers a kind of preparation method of sandwich construction flexibility auditory nerve stimulating electrode array, (bilateral adds Work), specific step is as follows:
Step 1 provides substrate;In the upper spin coating first layer flexible dielectric films material layer of the substrate, standing treats that it is solid Change;
Step 2. set hole site, and drilling in described first layer flexible dielectric films material layer;
Step 3. deposits first layer conductive metal layer in first layer flexible dielectric films material surface, and etches metal Pattern;;
One layer of (i.e. the second layer) flexible dielectric films material of spin coating again on the surface for the part that step 4. obtains in step 3 Layer;
Step 5 peels off the sample made from hard substrate, and sample is turned into (i.e. bottom surface is reversed to above), And the sample bottom surface that suitably protecting is machined, then be fixed on hard substrate;
Step 5. deposits second layer conductive metal layer in sample upper surface again, and etches metal pattern;Wherein
Via connect the pattern of the first conductive metal layer and the second conductive metal layer.
Step 6 peels off above-mentioned making sample from hard substrate.
Step 7;It is moulding.
Further;Using first layer conductive metal layer as trace layer, then the second conductive metal layer is as electrode layer;Electrode The conductive metal electrode array layout of layer, is designed by printed circuit mode, made;The conductive metal film line of trace layer, draw Pin is laid out, and is also designed, made using printed circuit mode;
Further, method moulding in step 7 is:Form is crimped by axle of flexible metal wire stent, is formed Similar long taper of the electrode layer outside, including trace layer, wherein there is the wire stent that can be extracted out.
Beneficial effects of the present invention:
1st, implantable electrode and number of leads are more:Number of leads increase is crucial in electrode fabrication, using above-mentioned making side Method, can make electrode number can be far more than existing cochlear electrode preparation method.For example, when oeil de boeuf radius is 0.5mm, snail bottom Zhou Changyue 3mm, when wire widths are 20um, lead at intervals of 20um, can cloth go out about 70 leads, and existing artificial cochlea is electric Pole lead is generally less than 30.
2nd, electrode is firm:Electrode using electron beam evaporation, deposit manufacture " growing " is more firm, difficult for drop-off;And show Somebody's work cochlear electrode pours fixed electrode using mould more, and operation implantation process is easily fallen off.
3rd, Individual design is more convenient:Cochlea circle window aperture varies with each individual, about 0.6mm to 5mm, in use State design and processing method so that electrode entirety caliber is very thin, and can according to individual patients cochlear structures, impaired hearing situation, Custom stimulation electrode position, selection different-thickness membrane structure, structure individuation, the electrode product of precision.
Brief description of the drawings
The Figure of description for forming the part of the application is used for providing further understanding of the present application, and the application's shows Meaning property embodiment and its illustrate be used for explain the application, do not form the improper restriction to the application.
The sandwich construction of Fig. 1 present invention, wherein:1-1 electrode layers, 1-2 flexible dielectric films material layers, 1-3 trace layers;
The curling, shaping procedure chart of Fig. 2 present invention, wherein:2-1 is electrode, and 2-2 is lead, and 2-3 is that via irrigates metal Position.
Embodiment
It is noted that described further below is all exemplary, it is intended to provides further instruction to the application.It is unless another Indicate, all technologies used herein and scientific terminology are with usual with the application person of an ordinary skill in the technical field The identical meanings of understanding.
It should be noted that term used herein above is merely to describe embodiment, and be not intended to restricted root According to the illustrative embodiments of the application.As used herein, unless the context clearly indicates otherwise, otherwise singulative It is also intended to include plural form, additionally, it should be understood that, when in this manual using term "comprising" and/or " bag Include " when, it indicates existing characteristics, step, operation, device, component and/or combinations thereof.
As background technology is introduced, the design of cochlear implant electrode in the prior art be present and make to exist and be not easy to increase Power-up number of poles, sometimes electrode not enough firm easy to fall off, individuation electrode design the problems such as being not easy to realize, the present invention is in order to solve As above technical problem, present applicant proposes a kind of sandwich construction flexibility artificial hearing Neural stimulation electrodes and preparation method;
In a kind of typical embodiment of the application, as shown in Figure 1, there is provided a kind of sandwich construction flexibility artificial hearing Neural stimulation electrodes;Including a flexible dielectric films material layer 1-2, on described flexible dielectric films material layer 1-2 upper stratas It is conductive metal layer, is also conductive metal layer in the lower floor of flexible dielectric films material layer;One of conductive metal layer makes Electrode layer 1-1, another conductive metal layer make trace layer 1-3;The electrode that described electrode layer makes makes with trace layer Lead connects;The mode specifically connected is by setting via, electrode layer 1-1 is connected with trace layer 1-3.
Further, it is additionally provided with fish tail and waterproof layer on the surface of the conductive metal layer described in two.
Further, every flexible dielectric films material surface with organizing to contact in described electrode layer and trace layer All plus apply one layer of waterproofing protection film.
Further, between flexible dielectric films material layer and conductive metal layer, to improve the adhesive force of metal, can add Enter one layer of binding material.
Further, in described trace layer design, multilayer trace layer can be used to design as needed;Described multilayer The Different electrodes of trace layer connection electrode layer.
Electrode 2-1 is carved out in electrode layer;Trace layer carves out lead 2-2;Passed through between electrode 2-1 and lead 2-2 Hole 2-3 is connected.
The present invention is according to the cochlea auditory nerve end occupy-place regularity of distribution, using flexible, non-biocompatible thin film's material, with more The step such as Rotating fields punching, wiring, moulding, designs and produces flexible electric stimulation electrode array, the designing and manufacturing method, has electrode Firmly, contact can gather, customizability, very thin electrode entirety caliber the features such as, can meet individuation, precision treatment.Specifically Preparation method include two kinds, one kind is unilateral processing method;One kind is bilateral processing method, specific as follows,
1 unilateral processing method of embodiment:
Hard substrate (being used to provide support for whole device in making) is provided
Step 1:One layer of PDMS of spin coating, thickness is optional, is such as 100um.
Step 2:Layer of metal film is being deposited thereon, and thickness is optional, is such as 75nm.
Step 3:Required pattern, such as trace layer are etched again.
Step 4:Again in one layer of PDMS of said structure surface spin coating, thickness is optional, is such as 100um.
Step 5:Hole site was designed on step 4PDMS layers again, and was punched.
Step 6:Redeposited layer of metal film, thickness is optional, is such as 75nm.
Step 7:Required pattern, such as electrode layer are etched again.
Step 8:Peeled off from hard substrate and make sample.
Step 9:Using flexible metal wire stent as axle crimp form, formed electrode layer outside, including trace layer Similar long taper, wherein there is the wire stent that can be extracted out;Specific method is shown in accompanying drawing 2 that crimping it in the direction of the arrow can obtain To flexible conical cochlear electrode.
The bilateral processing method of embodiment 2
Hard substrate (being used to provide support for whole device in making) is provided
Step 1;One layer of PDMS of spin coating, thickness can be set, and be such as 100um.
Step 2:Hole site was designed on PDMS layer, and was punched.
Step 3:Layer of metal film is deposited on surface again, thickness is optional, such as:For 75nm
Step 4:Required pattern, such as trace layer are etched again.
Step 5:One layer of PDMS of spin coating, thickness can be set again, be such as 100um.
Step 6:The sample made is peeled off from hard substrate, and sample another side is flipped up, suitably protecting is Processed sample bottom surface, then be fixed on hard substrate.
Step 7:Layer of metal film is deposited in upper surface again, thickness is optional, is such as 75nm.
Step 8:Etch required pattern, such as electrode layer.
Step 9:Peeled off from hard substrate and make sample.
Step 10:Using flexible metal wire stent as axle crimp form, formed electrode layer outside, including trace layer Similar long taper, wherein there is the wire stent that can be extracted out.
Flexible dielectric films material described in two of which embodiment is dimethyl silicone polymer (PDMS), certainly, is also had Other flexible thin-film materials with similar performance can also use;First precoated before spin coating flexible insulating material layer, on substrate anti-stick Even layer, facilitates the later stage to peel off;Deposited metal film uses electron beam evaporation, and selected metal material is answered conductive good, biological Stability is good, the performance such as soft, is, for example, gold;Etching smithcraft uses ultraviolet photolithographic;Etching conductive patterning method is divided into rotation Resist coating, exposure, development, deposited metal, wash away photoresist.
Via perfusion conducting metal in two embodiments can be gold.
Above-mentioned waterproofing protection layer material can use PDMS.
Electrode layer can use ultraviolet photolithographic technique, expose electrode.
Each electrode contacts shape can be determined by amount of crimp, can be customized by actual requirement, such as annular, u-shaped, rectangular Deng.
The present invention is according to the cochlea auditory nerve end occupy-place regularity of distribution, using the insulation flexible film with biocompatibility Material, with the step such as sandwich construction, via, wiring, moulding, design and produce flexible artificial cochlea electrode array component, the electrode Designing and manufacturing method, there is the spies such as sandwich construction, electrode are firm, sensing electrode frequency resolution is high, customizable, electrode needle is very thin Point, the disabled treatment of individuation, the precision sense of hearing can be met, various types of acoustic coding processors can be docked.
Although above-mentioned the embodiment of the present invention is described with reference to accompanying drawing, model not is protected to the present invention The limitation enclosed, one of ordinary skill in the art should be understood that on the basis of technical scheme those skilled in the art are not Need to pay various modifications or deformation that creative work can make still within protection scope of the present invention.

Claims (10)

1. sandwich construction flexibility auditory nerve stimulating electrode array, it is characterised in that including a flexible dielectric films material layer, It is conductive metal layer on the upper strata of the flexible dielectric films material layer, is also conductive in the lower floor of flexible dielectric films material layer Metal level;One of conductive metal layer makes electrode layer, and another conductive metal layer makes trace layer;Described electrode layer system The lead that the electrode of work makes with trace layer connects.
2. sandwich construction flexibility auditory nerve stimulating electrode array as claimed in claim 1, it is characterised in that described in two The surface of conductive metal layer be additionally provided with fish tail and waterproof layer.
3. sandwich construction flexibility auditory nerve stimulating electrode array as claimed in claim 1, it is characterised in that in described electricity It is every in pole layer and trace layer all to add one layer of waterproofing protection film of painting with the flexible dielectric films material surface for organizing to contact.
4. sandwich construction flexibility auditory nerve stimulating electrode array as claimed in claim 1, it is characterised in that in flexible insulation Between film material plies and conductive metal layer, one layer of binding material is added.
5. sandwich construction flexibility auditory nerve stimulating electrode array as claimed in claim 1, it is characterised in that draw in described In the design of line layer, multilayer trace layer can be used to design as needed;The Different electrodes of described multilayer trace layer connection electrode layer.
6. a kind of preparation method of sandwich construction flexibility auditory nerve stimulating electrode array, it is characterised in that specific step is such as Under:
Step 1 provides substrate;In the upper spin coating first layer flexible dielectric films material layer of the substrate, standing treats its solidification;
Step 2. deposits first layer conductive metal layer in first layer flexible dielectric films material surface, and etches metal figure Case;
Step 3. spin coating second layer flexible dielectric films material layer on described first layer conductive metal layer;
Step 4. sets via on the part that step 3 obtains;
Step 5. deposits second layer conductive metal layer on the surface of second layer flexible dielectric films material layer, and etches metal figure Case;Via in step 4 connects the pattern of the first conductive metal layer and the second conductive metal layer;
Step 6 is peeled off from hard substrate produces the part that step 5 obtains;
Step 7 is moulding.
7. a kind of preparation method of sandwich construction flexibility auditory nerve stimulating electrode array as claimed in claim 6, its feature It is, using first layer conductive metal layer as trace layer, then the second conductive metal layer is as electrode layer;The conducting metal of electrode layer Electrode array layout, design, make by printed circuit mode;The conductive metal film line of trace layer, pin layout, are also used Printed circuit mode is designed, made.
8. a kind of preparation method of sandwich construction flexibility auditory nerve stimulating electrode array as claimed in claim 6, its feature It is, moulding method is in step 7:Using flexible metal wire stent as axle crimp form, formed electrode layer outside, draw Similar long taper including line layer, wherein there is the wire stent that can be extracted out.
9. a kind of preparation method of sandwich construction flexibility auditory nerve stimulating electrode array, it is characterised in that specific step is such as Under:
Step 1 provides substrate;In the upper spin coating first layer flexible dielectric films material layer of the substrate, standing treats its solidification;
Step 2. set hole site, and drilling in described first layer flexible dielectric films material layer;
Step 3. deposits first layer metal layer in described first layer flexible dielectric films material layer;And in first layer metal layer On etch required pattern;
One layer of flexible dielectric films material layer of spin coating again on the surface for the part that step 4. obtains in step 3;
Step 5 peels off the sample made from hard substrate, and sample another side is flipped up, the machined sample of suitably protecting Product bottom surface, then be fixed on hard substrate;
Step 6. deposits second layer conductive metal layer in sample upper surface again, and etches metal pattern;
Step 7 peels off above-mentioned making sample from hard substrate;
Step 8 is moulding.
10. a kind of preparation method of sandwich construction flexibility auditory nerve stimulating electrode array as claimed in claim 9, its feature It is, using first layer conductive metal layer as trace layer, then the second conductive metal layer is as electrode layer;The conducting metal of electrode layer Electrode array layout, design, make by printed circuit mode;The conductive metal film line of trace layer, pin layout, are also used Printed circuit mode is designed, made;
Moulding method is in step 7:Using flexible metal wire stent as axle crimp form, formed electrode layer outside, draw Similar long taper including line layer, wherein there is the wire stent that can be extracted out.
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CN111202518A (en) * 2020-01-15 2020-05-29 清华大学 Multi-layer flexible high-density brain electrode and preparation method thereof
CN111569259A (en) * 2019-11-29 2020-08-25 广东艾诗凯奇智能科技有限公司 Heating band, massage assembly and neck massager
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CN108261605B (en) * 2018-02-13 2021-07-30 山东大学 Flexible single-layer conductive microstructure artificial cochlea electrode and manufacturing method thereof
CN111569259A (en) * 2019-11-29 2020-08-25 广东艾诗凯奇智能科技有限公司 Heating band, massage assembly and neck massager
CN111202518A (en) * 2020-01-15 2020-05-29 清华大学 Multi-layer flexible high-density brain electrode and preparation method thereof
CN111202518B (en) * 2020-01-15 2021-04-13 清华大学 Multi-layer flexible high-density brain electrode and preparation method thereof
CN111588372A (en) * 2020-04-20 2020-08-28 北京邮电大学 Method for preparing flexible Electrocardiogram (ECG) electrode
CN112587094A (en) * 2020-12-10 2021-04-02 微智医疗器械有限公司 Circuit board, manufacturing method thereof and electronic equipment
CN112604153A (en) * 2020-12-10 2021-04-06 微智医疗器械有限公司 Electrode, circuit board and electronic equipment
CN112604153B (en) * 2020-12-10 2024-06-07 微智医疗器械有限公司 Electrode, circuit board and electronic equipment
CN113262900A (en) * 2021-05-12 2021-08-17 上海大学 Hollowed-out clamping die for spraying medicine on ear electrode and using method of hollowed-out clamping die

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