CN107629701B - Polishing solution and preparation method thereof - Google Patents
Polishing solution and preparation method thereof Download PDFInfo
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- CN107629701B CN107629701B CN201711062417.0A CN201711062417A CN107629701B CN 107629701 B CN107629701 B CN 107629701B CN 201711062417 A CN201711062417 A CN 201711062417A CN 107629701 B CN107629701 B CN 107629701B
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- polishing solution
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- Surface Treatment Of Glass (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
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Claims (4)
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CN201711062417.0A CN107629701B (en) | 2017-11-02 | 2017-11-02 | Polishing solution and preparation method thereof |
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CN201711062417.0A CN107629701B (en) | 2017-11-02 | 2017-11-02 | Polishing solution and preparation method thereof |
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CN107629701A CN107629701A (en) | 2018-01-26 |
CN107629701B true CN107629701B (en) | 2021-04-13 |
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CN201711062417.0A Active CN107629701B (en) | 2017-11-02 | 2017-11-02 | Polishing solution and preparation method thereof |
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Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108587479B (en) * | 2018-07-04 | 2021-01-15 | 江西汇诺科技有限公司 | Sapphire polishing solution |
CN113292928A (en) * | 2021-05-20 | 2021-08-24 | 内蒙古大学 | Preparation method of nano cerium dioxide polishing solution (powder) |
CN114479676B (en) * | 2022-03-08 | 2023-04-21 | 机械科学研究总院海西(福建)分院有限公司 | Low-abrasive content and weak-acidity polishing solution for ultra-precise processing of optical glass and preparation method thereof |
CN115433520B (en) * | 2022-08-29 | 2023-11-21 | 内蒙古广禾元纳米高科技有限公司 | Green and environment-friendly chemical mechanical polishing solution for quartz glass and preparation method and application thereof |
Citations (6)
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WO2003054096A1 (en) * | 2001-12-20 | 2003-07-03 | Akzo Nobel N.V. | Cerium oxide coated silica particles and method for production thereof |
EP2011765A1 (en) * | 2006-04-27 | 2009-01-07 | Asahi Glass Company, Limited | Oxide crystal fine particle and polishing slurry including the fine particle |
KR20100080074A (en) * | 2008-12-31 | 2010-07-08 | 제일모직주식회사 | Cmp slurry composition for polishing metal wiring and polishing method using the same |
CN102352186A (en) * | 2011-06-24 | 2012-02-15 | 安徽工业大学 | Nanometer polishing solution used for microcrystalline glass and preparation method thereof |
CN103917332A (en) * | 2011-11-01 | 2014-07-09 | 旭硝子株式会社 | Method for producing glass substrate |
CN107129762A (en) * | 2017-05-12 | 2017-09-05 | 江南大学 | A kind of polishing fluid of carborundum chemically mechanical polishing and preparation method thereof |
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MY133305A (en) * | 2001-08-21 | 2007-11-30 | Kao Corp | Polishing composition |
JP2004331852A (en) * | 2003-05-09 | 2004-11-25 | Tama Kagaku Kogyo Kk | Abrasive slurry excellent in dispersion stability, and manufacturing method for substrate |
CN101568615B (en) * | 2006-12-28 | 2013-02-06 | 花王株式会社 | Polishing liquid composition |
CN101302404A (en) * | 2008-07-01 | 2008-11-12 | 上海大学 | Preparation of nano-cerium oxide composite abrasive grain polishing solution |
DE112012002344T5 (en) * | 2011-06-03 | 2014-02-27 | Asahi Glass Co., Ltd. | Polish and polishing process |
CN102516874A (en) * | 2011-11-09 | 2012-06-27 | 大连理工大学 | Polishing liquid for ultra-precision sharpening of diamond cutting tool and preparation method thereof |
CN104178033A (en) * | 2013-05-27 | 2014-12-03 | 天津西美半导体材料有限公司 | Nano cerium oxide polishing liquid composition |
KR20150019008A (en) * | 2013-08-12 | 2015-02-25 | 주식회사 동진쎄미켐 | Chemical mechanical polishing slurry composition for polishing metal layer and polishing method for metal layer |
JP2015229750A (en) * | 2014-06-06 | 2015-12-21 | コニカミノルタ株式会社 | Cmp polishing liquid |
CN104385116A (en) * | 2014-09-24 | 2015-03-04 | 尹涛 | Polishing method of SiC semiconductor material |
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2017
- 2017-11-02 CN CN201711062417.0A patent/CN107629701B/en active Active
Patent Citations (6)
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WO2003054096A1 (en) * | 2001-12-20 | 2003-07-03 | Akzo Nobel N.V. | Cerium oxide coated silica particles and method for production thereof |
EP2011765A1 (en) * | 2006-04-27 | 2009-01-07 | Asahi Glass Company, Limited | Oxide crystal fine particle and polishing slurry including the fine particle |
KR20100080074A (en) * | 2008-12-31 | 2010-07-08 | 제일모직주식회사 | Cmp slurry composition for polishing metal wiring and polishing method using the same |
CN102352186A (en) * | 2011-06-24 | 2012-02-15 | 安徽工业大学 | Nanometer polishing solution used for microcrystalline glass and preparation method thereof |
CN103917332A (en) * | 2011-11-01 | 2014-07-09 | 旭硝子株式会社 | Method for producing glass substrate |
CN107129762A (en) * | 2017-05-12 | 2017-09-05 | 江南大学 | A kind of polishing fluid of carborundum chemically mechanical polishing and preparation method thereof |
Non-Patent Citations (4)
Title |
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CeO2 纳米粒子抛光液分散稳定性及其化学机械抛光特性研究;陈广林等;《表面技术》;20161120;第45卷(第11期);187-193 * |
包覆型纳米CeO_2@SiO_2复合磨料的制备、表征及其抛光性能;隆仁伟等;《摩擦学学报》;20090915;第29卷(第05期);412-417 * |
直接沉淀法制备纳米氧化铈及其抛光硅晶片的性能与影响因素;李艳花等;《中国稀土学报》;20100615;第28卷(第03期);316-321 * |
纳米氧化铈抛光液对钌的化学机械抛光;王婕等;《金刚石与磨料磨具工程》;20130220;第33卷(第01期);60-64 * |
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Publication number | Publication date |
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CN107629701A (en) | 2018-01-26 |
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Effective date of registration: 20200911 Address after: 050035 No. 9, the Yellow River Avenue, hi tech Zone, Hebei, Shijiazhuang Applicant after: DONGXU OPTOELECTRONIC TECHNOLOGY Co.,Ltd. Address before: The 100075 Beijing Seahawks Fengtai District Science City Road No. 9 Building No. 2 room 266 (Park) Applicant before: TUNGHSU TECHNOLOGY GROUP Co.,Ltd. Applicant before: TUNGHSU GROUP Co.,Ltd. |
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Application publication date: 20180126 Assignee: Sichuan Jiangwei Technology Co.,Ltd. Assignor: DONGXU OPTOELECTRONIC TECHNOLOGY Co.,Ltd. Contract record no.: X2021110000049 Denomination of invention: Polishing liquid and its preparation method Granted publication date: 20210413 License type: Common License Record date: 20211125 |
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EE01 | Entry into force of recordation of patent licensing contract |
Application publication date: 20180126 Assignee: Xinjiang Huiguang Photoelectric Technology Co.,Ltd. Assignor: DONGXU OPTOELECTRONIC TECHNOLOGY Co.,Ltd. Contract record no.: X2022990000483 Denomination of invention: Polishing liquid and preparation method thereof Granted publication date: 20210413 License type: Common License Record date: 20220815 |
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