CN107623404B - Direct rotary actuator - Google Patents

Direct rotary actuator Download PDF

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Publication number
CN107623404B
CN107623404B CN201610559688.6A CN201610559688A CN107623404B CN 107623404 B CN107623404 B CN 107623404B CN 201610559688 A CN201610559688 A CN 201610559688A CN 107623404 B CN107623404 B CN 107623404B
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China
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linear
back plate
base
magnet back
screw
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CN107623404A (en
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鐘啓闻
陈柏孜
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Delta Electronics Inc
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Delta Electronics Inc
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Priority to CN202010107038.4A priority Critical patent/CN111509903B/en
Priority to CN201610559688.6A priority patent/CN107623404B/en
Publication of CN107623404A publication Critical patent/CN107623404A/en
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    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02KDYNAMO-ELECTRIC MACHINES
    • H02K7/00Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
    • H02K7/10Structural association with clutches, brakes, gears, pulleys or mechanical starters
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02KDYNAMO-ELECTRIC MACHINES
    • H02K16/00Machines with more than one rotor or stator
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02KDYNAMO-ELECTRIC MACHINES
    • H02K7/00Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
    • H02K7/10Structural association with clutches, brakes, gears, pulleys or mechanical starters
    • H02K7/116Structural association with clutches, brakes, gears, pulleys or mechanical starters with gears
    • H02K7/1163Structural association with clutches, brakes, gears, pulleys or mechanical starters with gears where at least two gears have non-parallel axes without having orbital motion
    • H02K7/1166Structural association with clutches, brakes, gears, pulleys or mechanical starters with gears where at least two gears have non-parallel axes without having orbital motion comprising worm and worm-wheel

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Transmission Devices (AREA)
  • Linear Motors (AREA)

Abstract

A direct rotary actuator includes a base. The first linear motor is arranged on the base and comprises a fixed first coil group and a movable first magnet back plate. The second linear motor is arranged on the base and comprises a fixed second coil group and a movable second magnet back plate. The first linear rail is fixed on the base. The ball screw comprises a screw and a nut, the screw is connected with the first magnet back plate and coupled with the first linear track, and the nut is connected with the second magnet back plate and coupled with the first linear track. The actuator provides a linear motion output when the screw and nut are driven by the first and second linear motors to move in a synchronized manner along the first linear track. The actuator provides a rotational motion output when the nut is driven by the second linear motor to move along the first linear track in an asynchronous manner relative to the screw.

Description

Direct rotary actuator
Technical Field
The present invention relates to a direct rotary actuator; more particularly, to a linear actuator that provides linear and rotary motion output using two sets of linear motors and a ball screw.
Background
The linear motor is used as an actuator, and linear motion output can be provided without an additional conversion mechanism, but in many applications, such as article taking and placing or detecting and positioning processes, the linear motion is not enough, and the linear motion and the rotational motion are matched to meet the requirement.
In the conventional linear actuator capable of providing linear and rotational motion outputs, a linear motor is mainly used for linear motion, and a servo rotary motor is additionally arranged for rotary motion. However, the linear motor and the servo rotary motor have very different mechanisms, so many additional mechanism conversion parts are required to integrate the two. In addition, since the servo rotary motor is mounted on the moving part of the linear motor, the power cable and the encoder cable of the servo rotary motor must move along with the servo rotary motor, which may cause a problem in reliability.
Disclosure of Invention
The present invention provides a direct rotary actuator, which mainly uses two sets of linear motors and a ball screw to provide linear and rotary motion output. The problem of the prior art can be improved because it is not necessary to additionally mount a servo rotary motor.
According to an embodiment of the present invention, there is provided a direct rotary actuator including: a base; the first linear motor is arranged on the base and comprises a fixed first coil group and a movable first magnet back plate; the second linear motor is arranged on the base and comprises a fixed second coil group and a movable second magnet back plate; a first linear rail fixed on the base, wherein the first linear motor, the second linear motor and the first linear rail are arranged in parallel; the ball screw comprises a screw and a nut which are mutually screwed, the screw is connected with the first magnet back plate and coupled to the first linear track, and the nut is connected with the second magnet back plate and coupled to the first linear track; the linear actuator provides a linear motion output when the screw and nut are driven by the first and second linear motors to move in a synchronous manner along the first linear track, and provides a rotary motion output when the nut is driven by the second linear motor to move in an asynchronous manner relative to the screw along the first linear track.
According to an embodiment of the present invention, the base has a first side and a second side opposite to each other, the first coil set and the second coil set are fixed to the first side and the second side, the first magnet back plate is disposed on the first side and is movable with respect to the first coil set, the second magnet back plate is disposed on the second side and is movable with respect to the second coil set, the base further has a third side between the first side and the second side, and the first linear track is fixed to the third side.
According to an embodiment of the present invention, the linear actuator further includes a first linear slider and a second linear slider, the screw and the first magnet back plate are coupled to the first linear track through the first linear slider, and the nut and the second magnet back plate are coupled to the first linear track through the second linear slider.
According to an embodiment of the present invention, the actuator further includes a second linear rail, a third linear slider and a fourth linear slider, the second linear rail and the third linear rail are respectively fixed on the first side and the second side of the base, the first magnet back plate is coupled to the second linear rail through the third linear slider, and the second magnet back plate is coupled to the third linear rail through the fourth linear slider.
According to an embodiment of the present invention, the direct rotary actuator further includes a fourth linear track, a fifth linear slider and a sixth linear slider, the fourth linear track is fixed on a fourth side of the base, the fourth side is between the first side and the second side of the base and is opposite to the third side of the base, the first magnet back plate is coupled to the fourth linear track through the fifth linear slider, and the second magnet back plate is coupled to the fourth linear track through the sixth linear slider.
According to an embodiment of the present invention, the first coil assembly and the second coil assembly are commonly fixed to a first side of the base, the first magnet back plate is disposed on the first side of the base and is movable relative to the first coil assembly, the second magnet back plate is disposed on the first side of the base and is movable relative to the second coil assembly, and the first linear track is fixed to the first side of the base and is disposed between the first coil assembly and the second coil assembly.
According to an embodiment of the present invention, the linear actuator further includes a first linear slider and a second linear slider, the screw and the first magnet back plate are coupled to the first linear track through the first linear slider, and the nut and the second magnet back plate are coupled to the first linear track through the second linear slider.
According to an embodiment of the present invention, the actuator further includes a second linear track, a third linear slider and a fourth linear slider, the second linear track is fixed to the first side of the base and located on the opposite side of the first coil set from the first linear track, the third linear track is fixed to the first side of the base and located on the opposite side of the second coil set from the first linear track, the first magnet back plate is coupled to the second linear track via the third linear slider, and the second magnet back plate is coupled to the third linear track via the fourth linear slider.
According to an embodiment of the present invention, there is provided a direct rotary actuator including: a first base and a second base arranged in parallel; the first linear motor is arranged on a first side, adjacent to the second base, of the first base and comprises a fixed first coil group and a movable first magnet back plate; the second linear motor is arranged on the second base and is adjacent to a second side of the first base, and comprises a fixed second coil group and a movable second magnet back plate; a first linear rail fixed to a first side of the first base; a second linear rail fixed to a second side of the second base, wherein the first linear motor, the second linear motor, the first linear rail and the second linear rail are disposed in parallel; the ball screw is arranged between the first linear motor and the second linear motor and comprises a screw and a nut which are mutually screwed, the screw is connected with the first magnet back plate and coupled to the first linear track, and the nut is connected with the second magnet back plate and coupled to the second linear track; the linear actuator provides a linear motion output when the screw and nut are driven by the first and second linear motors to move in a synchronous manner along the first and second linear tracks, respectively, and a rotary motion output when the nut is driven by the second linear motor to move in an asynchronous manner relative to the screw along the second linear track.
According to an embodiment of the present invention, the first coil assembly is fixed to the first side of the first base, the first magnet back plate is disposed on the first side of the first base and is movable relative to the first coil assembly, the second coil assembly is fixed to the second side of the second base, and the second magnet back plate is disposed on the second side of the second base and is movable relative to the second coil assembly.
According to an embodiment of the present invention, the linear actuator further includes a first linear slider and a second linear slider, the screw and the first magnet back plate are coupled to the first linear rail through the first linear slider, and the nut and the second magnet back plate are coupled to the second linear rail through the second linear slider.
According to an embodiment of the present invention, the actuator further includes a third linear track, a fourth linear track, a third linear slider and a fourth linear slider, the third linear track and the fourth linear track are respectively fixed to the first side of the first base and the second side of the second base and are parallel to each other, the third linear track is located on the side of the first coil set opposite to the first linear track, the fourth linear track is located on the side of the second coil set opposite to the second linear track, the first magnet back plate is coupled to the third linear track through the third linear slider, and the second magnet back plate is coupled to the fourth linear track through the fourth linear slider
According to an embodiment of the present invention, there is provided a direct rotary actuator including: a base having a first side; the first linear motor is arranged on the first side of the base and comprises a fixed first coil group and a movable first magnet back plate, the first magnet back plate is provided with a first side and a second side which are opposite, and the first side of the first magnet back plate faces the first side of the base; the second linear motor is arranged on the second side of the first magnet back plate and comprises a fixed second coil group and a movable second magnet back plate; a first linear rail fixed to a first side of the base; a second linear rail fixed to a second side of the first magnet back plate, wherein the first linear motor, the second linear motor, the first linear rail and the second linear rail are disposed in parallel; the ball screw is arranged on the second side of the first magnet back plate and comprises a screw and a nut which are mutually screwed, the screw is connected with the first magnet back plate, the first magnet back plate is coupled to the first linear track, and the nut is connected with the second magnet back plate and is coupled to the second linear track; the linear actuator provides a linear motion output when the screw is driven by the first linear motor to move along the first linear track, and provides a rotational motion output when the nut is driven by the second linear motor to move along the second linear track.
According to an embodiment of the present invention, the first coil assembly is fixed to the first side of the base, the first magnet back plate is disposed on the first side of the base and is movable relative to the first coil assembly, the second coil assembly is fixed to the second side of the first magnet back plate, and the second magnet back plate is disposed on the second side of the first magnet back plate and is movable relative to the second coil assembly.
According to an embodiment of the present invention, the linear actuator further includes a first linear slider and a second linear slider, the first magnet back plate is coupled to the first linear rail through the first linear slider, and the nut and the second magnet back plate are coupled to the second linear rail through the second linear slider.
According to an embodiment of the present invention, the actuator further includes a third linear track, a fourth linear track, a third linear slider and a fourth linear slider, the third linear track and the fourth linear track are respectively fixed to the first side of the first base and the second side of the first magnet back plate and are parallel to each other, the third linear track is located on a side of the first coil set opposite to the first linear track, the fourth linear track is located on a side of the second coil set opposite to the second linear track, the first magnet back plate is coupled to the third linear track through the third linear slider, and the second magnet back plate is coupled to the fourth linear track through the fourth linear slider.
In order to make the aforementioned and other objects, features and advantages of the present invention comprehensible, preferred embodiments accompanied with figures are described in detail below.
Drawings
Fig. 1 shows a schematic perspective view of a direct rotary actuator according to a first embodiment of the present invention.
Fig. 2 to 4 are schematic side views of the direct rotary actuator of fig. 1 from different viewing angles.
Fig. 5 is a schematic view illustrating an installation manner of the direct rotary actuator in fig. 1 at different viewing angles.
Fig. 6 shows a perspective view of a direct rotary actuator according to a second embodiment of the present invention.
Fig. 7 to 9 are schematic side views of the linear actuator in fig. 6 from different viewing angles.
Fig. 10 is a schematic view illustrating an installation manner of the direct rotary actuator in fig. 6 at different viewing angles.
Fig. 11 shows a perspective view of a direct rotary actuator according to a third embodiment of the present invention.
Fig. 12-14 are schematic side views of the direct rotary actuator of fig. 11 from different viewing angles.
Fig. 15 is a schematic view illustrating an installation manner of the direct rotary actuator in fig. 11 from different viewing angles.
Fig. 16 is a perspective view schematically showing a linear actuator according to a fourth embodiment of the present invention.
Fig. 17-18 are schematic side views of the linear actuator of fig. 16 from different viewing angles.
Fig. 19 shows a schematic perspective view of a direct rotary actuator according to a fifth embodiment of the present invention.
Fig. 20-21 are schematic side views of the direct rotary actuator of fig. 19 from different viewing angles.
Fig. 22 is a perspective view schematically showing a direct rotary actuator according to a sixth embodiment of the present invention.
Fig. 23 to 24 are schematic side views of the linear actuator in fig. 22 from different viewing angles.
Wherein the reference numerals are:
1. 2, 3, 4, 5, 6-straight rotary actuator;
10-base, first base;
10' to a second pedestal;
10A to the first side;
10B to a second side;
10C to a third side;
10D to the fourth side;
10E to the fifth side;
10F to the sixth side;
20-a first linear motor;
22-a first coil group;
24-a first magnet back plate;
24A to a first magnet;
242 to a first side;
243 to the second side;
30-second linear motor;
32-second coil group;
34-a second magnet back plate;
34A to a second magnet;
41-a first linear track;
42-a second linear track;
43 to a third linear track;
44-fourth linear track;
50-ball screw;
52-screw rod;
52A to a support seat;
54-screw cap;
54A-a base;
61-a first linear slide;
62-second linear slide block;
63-third linear sliding blocks;
64 to a fourth linear slider;
65 to fifth linear sliders;
66 to a sixth linear slider;
d1-arrow;
d2-arrow;
m-a fixed part;
r-long space.
Detailed Description
The present invention will be described with reference to the following examples, which are illustrative of various embodiments and are provided in the accompanying drawings. In the drawings or description, the same reference numerals are used for similar or identical parts, and the shape or thickness of the embodiments may be enlarged and conveniently and simply indicated in the drawings.
(first embodiment)
Referring to fig. 1 to 4, a direct rotary actuator 1 according to a first embodiment of the present invention includes a base 10, a first linear motor 20, a second linear motor 30, a first linear rail 41, a ball screw 50, two first linear slides 61, and a second linear slide 62.
In the present embodiment, the base 10 is an elongated member. More specifically, the base 10 has a first side 10A and a second side 10B parallel and opposite to each other, wherein the long axes of the first and second sides 10A and 10B are parallel to the Z axis defined in the figure, and a recessed elongated space R is formed on each of the first and second sides 10A and 10B, and the long axes thereof extend in the Z axis direction, and the base 10 also has a third side 10C and a fourth side 10D parallel and opposite to each other, and a fifth side 10E and a sixth side 10F parallel and opposite to each other, wherein the third to sixth sides 10C to 10F are respectively disposed between the first and second sides 10A and 10B and perpendicular to the first and second sides 10A and 10B. As shown in fig. 4, the base 10 is in an I-shape when viewed in the Z-axis direction. Further, the base 10 may be made of a material having a high magnetic permeability (e.g., nickel, steel, or iron-nickel alloy).
The first linear motor 20 includes a first coil assembly 22 and a first magnet back plate 24. The first coil group 22 is fixed in the elongated space R on the first side 10A of the base 10 along the Z-axis direction. The first magnet back plate 24 is movably disposed on the first side 10A of the base 10, and has a first magnet 24A (fig. 4) fixed on a side of the first magnet back plate 24 adjacent to the base 10 and corresponding to the first coil set 22. Thus, a linear driving force is generated by an electromagnetic effect between the first coil assembly 22 and the first magnet back plate 24 (the first magnet 24A) to drive the first magnet back plate 24 to move linearly along the Z-axis direction relative to the first coil assembly 22 (as shown by the arrow in fig. 2).
Similarly, the second linear motor 30 includes a second coil assembly 32 and a second magnet back plate 34. The second coil group 32 is fixed in the elongated space R on the second side 10B of the base 10 in the Z-axis direction. The second magnet back plate 34 is movably disposed on the second side 10B of the base 10, and has a second magnet 34A (fig. 4) fixed on a side of the second magnet back plate 34 adjacent to the base 10 and corresponding to the second coil group 32. Thus, a linear driving force is generated by the electromagnetic effect between the second coil assembly 32 and the second magnet back plate 34 (the second magnet 34A) to drive the second magnet back plate 34 to move linearly along the Z-axis direction relative to the second coil assembly 32 (as shown by the arrow in fig. 3).
The first linear rail 41 is fixed to the third side 10C of the base 10 along the Z-axis direction. It should be noted that the first linear motor 20, the second linear motor 30 and the first linear rail 41 are disposed in parallel with each other (all parallel to the Z axis).
The ball screw 50 includes a screw 52 and a nut 54. Specifically, the screw 52 has at least one supporting seat 52A (two supporting seats 52A in the embodiment) for supporting the body of the screw 52 and allowing the body of the screw 52 to rotate around its axis, and the nut 54 is screwed on the screw 52 and has a base 54A.
As shown in fig. 1 to 4, the ball screw 50 is disposed on the third side 10C of the base 10, wherein two supporting seats 52A of the screw 52 are connected to the first magnet back plate 24 and coupled to the first linear rail 41 through the first linear slider 61, and a base 54A of the nut 54 is connected to the second magnet back plate 34 and coupled to the first linear rail 41 through the second linear slider 62. It should be understood that the first and second magnet back plates 24 and 34 are connected to the screw 52 (the support seat 52A) and the nut 54 (the base 54A) and have the shapes as disclosed in the drawings, but the invention is not limited thereto, and the shapes of the first and second magnet back plates 24 and 34 can be designed according to the actual requirements.
With the above-mentioned structure, the screw 52 can be driven by the first linear motor 20 (i.e., when the first magnet back plate 24 moves linearly relative to the first coil set 22) to move along the first linear track 41, and the nut 54 can be driven by the second linear motor 30 (i.e., when the second magnet back plate 34 moves linearly relative to the second coil set 32) to move along the first linear track 41.
It should be noted that when the screw 52 and the nut 54 are driven by the first and second linear motors 20 and 30 to move along the first linear track 41 in a synchronous manner (i.e., the screw 52 and the nut 54 move along the first linear track 41 in a constant and same direction), the direct rotary actuator 1 can provide a linear motion output (as indicated by an arrow D1 in fig. 1), and on the other hand, when the nut 54 is driven by the second linear motor 30 to move along the first linear track 41 in an asynchronous manner with respect to the screw 52 (which includes the case where the screw 52 and the nut 54 are driven by the first and second linear motors 20 and 30 to move along the first linear track 41 in a non-constant or opposite direction), or only the nut 54 is driven by the second linear motor 30 (but the screw 52 is not driven by the first linear motor 20) to move along the first linear track 41 with respect to the screw 52), the nut 54 drives the screw 52 to rotate, and the linear actuator 1 can provide a rotational motion output (as indicated by an arrow D2 in fig. 1).
The linear actuator 1 of the present embodiment can provide linear and/or rotational motion output, so it is suitable for various applications, and it is not necessary to additionally mount a servo rotary motor, so as to improve the problems of the conventional linear actuator using a servo rotary motor. Referring again to FIG. 5, the linear actuator 1 is mounted on a fixture M of a processing tool parallel to the Z-axis through the fourth side 10D of the base, and provides linear and rotational motion output along or about the Z-axis.
(second embodiment)
Referring to fig. 6 to 9, a direct rotary actuator 2 according to a second embodiment of the present invention includes a base 10, a first linear motor 20, a second linear motor 30, a first linear rail 41, a second linear rail 42, a third linear rail 43, a ball screw 50, two first linear slides 61, a second linear slide 62, two third linear slides 63, and a fourth linear slide 64.
It should be noted that the difference between the linear actuator 2 of the present embodiment and the linear actuator 1 (fig. 1 to 5) of the first embodiment is that the linear actuator further includes components such as the second linear rail 42, the third linear rail 43, the third linear slider 63, and the fourth linear slider 64, and therefore only the components will be further described below.
As shown in fig. 6 to 9, the second and third linear rails 42 and 43 are fixed to the first and second sides 10A and 10B of the base 10 and are close to the fourth side 10D of the base 10 along the Z-axis direction, respectively, i.e., the second and third linear rails 42 and 43 and the first linear motor 20, the second linear motor 30 and the first linear rail 41 may be parallel to each other.
Further, the first magnet back plate 24 of the first linear motor 20 is further coupled to the second linear rail 42 through a third linear slider 63, and the second magnet back plate 34 of the second linear motor 30 is further coupled to the third linear rail 43 through a fourth linear slider 64. This further improves the stability and smoothness of the linear movement of the first and second magnet back plates 24 and 34. It should be understood that the first and second magnet back plates 24 and 34 have the shapes as disclosed in the drawings for connecting the screw rod 52 (the support seat 52A), the nut 54 (the base 54A), the third linear slider 63 and the fourth linear slider 64, but the invention is not limited thereto, and the shapes of the first and second magnet back plates 24 and 34 can be designed according to the actual requirements.
By the above structure design, the linear actuator 2 of the present embodiment can also provide linear and/or rotational motion output, so that it is suitable for various applications, and it is not necessary to additionally mount a servo rotary motor, thereby improving the problems generated by the servo rotary motor used in the conventional linear actuator. Referring again to FIG. 10, the linear actuator 2, when in use, is mounted to a fixture M of a processing tool parallel to the Z-axis through the fourth side 10D of the base, and provides linear and rotational motion output along or about the Z-axis.
(third embodiment)
Referring to fig. 11 to 14, a direct rotary actuator 3 according to a third embodiment of the present invention includes a base 10, a first linear motor 20, a second linear motor 30, a first linear rail 41, a fourth linear rail 44, a ball screw 50, two first linear sliders 61, a second linear slider 62, two fifth linear sliders 65, and a sixth linear slider 66.
It should be noted that the linear actuator 3 of the present embodiment is different from the linear actuator 1 of the first embodiment (the difference between fig. 1 to 5 is that the linear actuator further includes the fourth linear rail 44, the fifth linear slider 65, and the sixth linear slider 66, and therefore only these components will be further described below.
As shown in fig. 11 to 14, the fourth linear rail 44 is fixed to the fourth side 10D of the base 10 along the Z-axis direction, that is, the fourth linear rail 44 and the first linear motor 20, the second linear motor 30 and the first linear rail 41 may be parallel to each other.
Further, a portion of the first magnet back plate 24 of the first linear motor 20 may extend to the fourth side 10D of the base 10 and be further coupled to the fourth linear rail 44 by the fifth linear slider 65, and a portion of the second magnet back plate 34 of the second linear motor 30 may also extend to the fourth side 10D of the base 10 and be further coupled to the fourth linear rail 44 by the sixth linear slider 66. This further improves the stability and smoothness of the linear movement of the first and second magnet back plates 24 and 34. It should be understood that the first and second magnet back plates 24 and 34 are connected to the screw 52 (the support seat 52A), the nut 54 (the base 54A) and the sixth linear slider 66 and have the shapes as shown in the drawings, but the invention is not limited thereto, and the shapes of the first and second magnet back plates 24 and 34 can be designed according to the actual requirements.
By the above structure design, the linear actuator 3 of the present embodiment can also provide linear and/or rotational motion output, so that it is suitable for various applications, and it is not necessary to additionally mount a servo rotary motor, thereby improving the problems of the conventional linear actuator using a servo rotary motor. Referring again to FIG. 15, the linear actuator 3, when in use, is mounted to a fixture M of a processing tool perpendicular to the Z-axis through the fifth side 10E of the base, and provides linear and rotational motion output along or about the Z-axis.
(fourth embodiment)
Referring to fig. 16 to 18, a direct rotary actuator 4 according to a fourth embodiment of the present invention includes a base 10, a first linear motor 20, a second linear motor 30, a first linear rail 41, a second linear rail 42, a third linear rail 43, a ball screw 50, two first linear slides 61, a second linear slide 62, two third linear slides 63, and a fourth linear slide 64.
In the present embodiment, the base 10 is a flat plate member. In more detail, a first side 10A of the base 10 is formed with two recessed elongated spaces R, the long axes of which extend in the Z-axis direction defined in the drawing. Further, the base 10 may be made of a material having a high magnetic permeability (e.g., nickel, steel, or iron-nickel alloy).
The first linear motor 20 includes a first coil assembly 22 and a first magnet back plate 24. The first coil group 22 is fixed in an elongated space R on the first side 10A of the base 10 along the Z-axis direction. The first magnet back plate 24 is movably disposed on the first side 10A of the base 10, and has a first magnet 24A (fig. 18) fixed on a side of the first magnet back plate 24 adjacent to the base 10 and corresponding to the first coil set 22. As described in the foregoing embodiment, the first magnet back plate 24 is linearly movable in the Z-axis direction relative to the first coil group 22 (as indicated by the arrow in fig. 17).
Similarly, the second linear motor 30 includes a second coil assembly 32 and a second magnet back plate 34. The second coil group 32 is fixed in the other elongated space R on the first side 10A of the base 10 in the Z-axis direction. The second magnet back plate 34 is movably disposed on the first side 10A of the base 10, and has a second magnet 34A (fig. 18) fixed on a side of the second magnet back plate 34 adjacent to the base 10 and corresponding to the second coil group 32. As described in the foregoing embodiment, the second magnet back plate 34 is linearly movable in the Z-axis direction with respect to the second coil assembly 32 (as indicated by the arrow in fig. 17).
The first linear rail 41 is fixed to the first side 10A of the base 10 along the Z-axis direction and is interposed between the first coil assembly 22 and the second coil assembly 32. The second linear rail 42 is fixed to the first side 10A of the base 10 along the Z-axis direction and is located on the opposite side of the first coil group 22 from the first linear rail 41. The third linear rail 43 is fixed to the first side 10A of the susceptor 10 along the Z-axis direction and is located on the opposite side of the second coil group 32 from the first linear rail 41. It is worth mentioning that the first linear motor 20, the second linear motor 30, the first linear rail 41, the second linear rail 42 and the third linear rail 43 are disposed in parallel to each other (all parallel to the Z axis).
The ball screw 50 includes a screw 52 and a nut 54. Specifically, the screw 52 has at least one supporting seat 52A (two supporting seats 52A in the embodiment) for supporting the body of the screw 52 and allowing the body of the screw 52 to rotate around its axis, and the nut 54 is screwed on the screw 52 and has a base 54A.
As shown in fig. 16 to 18, the ball screw 50 is also disposed on the first side 10A of the base 10, wherein two supporting seats 52A of the screw 52 are connected to the first magnet back plate 24 and coupled to the first linear rail 41 through the first linear slider 61 (in the present embodiment, the first magnet back plate 24 is located between the supporting seat 52A and the first linear slider 61), and the base 54A of the nut 54 is connected to the second magnet back plate 34 and coupled to the first linear rail 41 through the second linear slider 62 (in the present embodiment, the second magnet back plate 34 is located between the base 54A and the second linear slider 62).
Further, the first magnet back plate 24 is further coupled to the second linear rail 42 through a third linear slider 63, and the second magnet back plate 34 is further coupled to the third linear rail 43 through a fourth linear slider 64. This further improves the stability and smoothness of the linear movement of the first and second magnet back plates 24 and 34. It should be understood that the first and second magnet back plates 24 and 34 have the shapes as disclosed in the drawings for connecting the screw rod 52 (the support seat 52A), the nut 54 (the base 54A), the third linear slider 63 and the fourth linear slider 64, but the invention is not limited thereto, and the shapes of the first and second magnet back plates 24 and 34 can be designed according to the actual requirements.
With the above-described structure, when the screw 52 and the nut 54 are driven by the first and second linear motors 20 and 30 to move along the first linear rail 41 in a synchronous manner (i.e., the screw 52 and the nut 54 move along the first linear rail 41 in a constant and same direction), the linear actuator 4 can provide a linear motion output (as indicated by an arrow D1 in fig. 16), and on the other hand, when the nut 54 is driven by the second linear motor 30 to move along the first linear rail 41 in an asynchronous manner with respect to the screw 52 (which includes a case where the screw 52 and the nut 54 are driven by the first and second linear motors 20 and 30 to move along the first linear rail 41 in a non-constant or opposite direction), or when only the nut 54 is driven by the second linear motor 30 (but the screw 52 is not driven by the first linear motor 20) to move along the first linear rail 41 with respect to the screw 52), the nut 54 drives the screw 52 to rotate, and the linear actuator 4 can provide a rotational motion output (as shown by arrow D2 in fig. 16).
The linear actuator 4 of the present embodiment can also provide linear and/or rotational motion output, so that it is suitable for various applications, and it is not necessary to additionally mount a servo rotary motor, thereby improving the problems of the conventional linear actuator using a servo rotary motor.
(fifth embodiment)
Referring to fig. 19 to 21, a direct rotary actuator 5 according to a fifth embodiment of the present invention includes a first base 10, a second base 10', a first linear motor 20, a second linear motor 30, a first linear rail 41, a second linear rail 42, a third linear rail 43, a fourth linear rail 44, a ball screw 50, two first linear sliders 61, a second linear slider 62, two third linear sliders 63, and a fourth linear slider 64.
In the present embodiment, the first base 10 and the second base 10' are both flat plate members and are disposed in parallel with each other. More specifically, the first base 10 has a first side 10A adjacent to the second base 10 ', and the second base 10' has a second side 10B adjacent to the first base 10 (i.e., the first side 10A of the first base 10 and the second side 10B of the second base 10 'are opposite to each other), wherein a concave elongated space R is formed on the first side 10A of the first base 10 and the second side 10B of the second base 10', respectively, and the long axes thereof extend in the Z-axis direction defined in the figure, and the two elongated spaces R are located correspondingly to each other. Furthermore, the first base 10 and the second base 10' may be made of a material with high magnetic permeability (e.g., nickel, steel, or iron-nickel alloy).
The first linear motor 20 includes a first coil assembly 22 and a first magnet back plate 24. The first coil group 22 is fixed in the elongated space R on the first side 10A of the first base 10 along the Z-axis direction. The first magnet back plate 24 is movably disposed on the first side 10A of the first base 10 and has a first magnet 24A (FIG. 21, fixed on a side of the first magnet back plate 24 adjacent to the first base 10 and corresponding to the first coil set 22. like the previous embodiments, the first magnet back plate 24 can move linearly along the Z-axis direction relative to the first coil set 22 (as shown by the arrow in FIG. 20).
Similarly, the second linear motor 30 includes a second coil assembly 32 and a second magnet back plate 34. The second coil group 32 is fixed in the elongated space R on the second side 10B of the second base 10' along the Z-axis direction. The second magnet back plate 34 is movably disposed on the second side 10B of the second base 10 ', and has a second magnet 34A (fig. 4) fixed on a side of the second magnet back plate 34 adjacent to the second base 10' and corresponding to the second coil assembly 32. As described in the foregoing embodiment, the second magnet back plate 34 is linearly movable in the Z-axis direction with respect to the second coil assembly 32 (as indicated by the arrow in fig. 20).
The first linear rail 41 and the second linear rail 42 are fixed to the first side 10A of the first base 10 and the second side 10B of the second base 10' along the Z-axis direction, respectively, and the positions of the first linear rail 41 and the second linear rail 42 correspond to each other. On the other hand, a third linear track 43 and a fourth linear track 44 are also fixed to the first side 10A of the first base 10 and the second side 10B of the second base 10' along the Z-axis direction, respectively, wherein the third linear track 43 is located on the opposite side of the first coil group 22 from the first linear track 41, the fourth linear track 44 is located on the opposite side of the second coil group 32 from the second linear track 42, and the positions of the third linear track 43 and the fourth linear track 44 correspond to each other. It is worth mentioning that the first linear motor 20, the second linear motor 30, the first linear rail 41, the second linear rail 42, the third linear rail 43 and the fourth linear rail 44 are arranged in parallel to each other (all parallel to the Z axis).
The ball screw 50 includes a screw 52 and a nut 54. Specifically, the screw 52 has at least one supporting seat 52A (two supporting seats 52A in the embodiment) for supporting the body of the screw 52 and allowing the body of the screw 52 to rotate around its axis, and the nut 54 is screwed on the screw 52 and has a base 54A.
As shown in fig. 19 to 21, the ball screw 50 is disposed between the first linear motor 20 and the second linear motor 30, wherein two supporting seats 52A of the screw 52 are connected to the first magnet back plate 24 and coupled to the first linear rail 41 through a first linear slider 61, and a base 54A of the nut 54 is connected to the second magnet back plate 34 and coupled to the second linear rail 42 through a second linear slider 62.
Further, the first magnet back plate 24 is further coupled to the third linear rail 43 through a third linear slider 63, and the second magnet back plate 34 is further coupled to the fourth linear rail 44 through a fourth linear slider 64. This further improves the stability and smoothness of the linear movement of the first and second magnet back plates 24 and 34. It should be understood that the first and second magnet back plates 24 and 34 in the present embodiment are connected to the screw 52 (support seat 52A), the nut 54 (base 54A), the third linear slider 63 and the fourth linear slider 64, and can have the shapes as disclosed in the fourth embodiment (fig. 17), but the present invention is not limited thereto, and the shapes of the first and second magnet back plates 24 and 34 can be designed according to the actual requirements.
With the above-mentioned structure, the screw 52 can be driven by the first linear motor 20 (i.e., when the first magnet back plate 24 moves linearly relative to the first coil set 22) to move along the first linear track 41, and the nut 54 can be driven by the second linear motor 30 (i.e., when the second magnet back plate 34 moves linearly relative to the second coil set 32) to move along the second linear track 42.
It should be noted that when the screw 52 and the nut 54 are driven by the first and second linear motors 20 and 30 to move along the first and second linear rails 41 and 42 in a synchronous manner (i.e., the screw 52 and the nut 54 move along the first and second linear rails 41 and 42 in a constant speed and in the same direction), respectively, the linear actuator 5 can provide a linear motion output (as indicated by arrow D1 in fig. 19), and on the other hand, when the nut 54 is driven by the second linear motor 30 to move along the second linear rail 42 in an asynchronous manner with respect to the screw 52 (which includes the case where the screw 52 and the nut 54 are driven by the first and second linear motors 20 and 30 to move along the first and second linear rails 41 and 42 in a non-constant speed or in a reverse manner), or only the nut 54 is driven by the second linear motor 30 (but the screw 52 is not driven by the first linear motor 20) to move along the second linear rail 42 with respect to the screw 52), the nut 54 drives the screw 52 to rotate, and the linear actuator 5 can provide a rotational motion output (as indicated by arrow D2 in fig. 19).
The linear actuator 5 of the present embodiment can also provide linear and/or rotational motion output, so that it is suitable for various applications, and it is not necessary to additionally mount a servo rotary motor, thereby improving the problems of the conventional linear actuator using a servo rotary motor.
(sixth embodiment)
Referring to fig. 22 to 24, a direct rotary actuator 6 according to a sixth embodiment of the present invention includes a base 10, a first linear motor 20, a second linear motor 30, a first linear rail 41, a second linear rail 42, a third linear rail 43, a fourth linear rail 44, a ball screw 50, three first linear sliders 61 (only two first linear sliders 61 are visible in the drawings due to the perspective), a second linear slider 62, three third linear sliders 63, and a fourth linear slider 64.
In the present embodiment, the base 10 is a flat plate member. More specifically, a first side 10A of the base 10 is formed with a recessed elongated space R, the long axis of which extends in the Z-axis direction defined in the drawing. Further, the base 10 may be made of a material having a high magnetic permeability (e.g., nickel, steel, or iron-nickel alloy).
The first linear motor 20 includes a first coil assembly 22 and a first magnet back plate 24. The first coil group 22 is fixed in the elongated space R on the first side 10A of the base 10 along the Z-axis direction. The first magnet back plate 24 is movably disposed on the first side 10A of the base 10, and has a first magnet 24A (fig. 24) fixed on a first side 242 of the first magnet back plate 2 facing the first side 10A of the base 10 and corresponding to the first coil set 22. As described in the foregoing embodiment, the first magnet back plate 24 is linearly movable in the Z-axis direction relative to the first coil group 22 (as indicated by the arrow in fig. 23). It should be noted that the widths of the first magnet back plate 24 and the base 10 in the Y-axis direction defined in the drawing are substantially the same, and a second side 243 of the first magnet back plate 24 opposite to the first side 242 is also formed with a recessed long space R, the long axis of which extends in the Z-axis direction, and the positions of the long spaces R on the first magnet back plate 24 and the base 10 correspond to each other.
The second linear motor 30 includes a second coil assembly 32 and a second magnet back plate 34. The second coil group 32 is fixed in the elongated space R on the second side 243 of the first magnet back plate 24 along the Z-axis direction. The second magnet back plate 34 is movably disposed on the second side 243 of the first magnet back plate 24, and has a second magnet 34A (fig. 24) fixed on a side of the second magnet back plate 34 adjacent to the first magnet back plate 24 and corresponding to the second coil assembly 32. As described in the foregoing embodiment, the second magnet back plate 34 is linearly movable in the Z-axis direction with respect to the second coil group 32 (as indicated by the arrow in fig. 23).
The first linear rail 41 and the second linear rail 42 are fixed to the first side 10A of the base 10 and the second side 243 of the first magnet back plate 24, respectively, along the Z-axis direction, and the positions of the first linear rail 41 and the second linear rail 42 correspond to each other. On the other hand, the third linear track 43 and the fourth linear track 44 are also fixed to the first side 10A of the base 10 and the second side 243 of the first magnet back plate 24, respectively, along the Z-axis direction, wherein the third linear track 43 is located on the side of the first coil group 22 opposite to the first linear track 41, the fourth linear track 44 is located on the side of the second coil group 32 opposite to the second linear track 42, and the positions of the third linear track 43 and the fourth linear track 44 correspond to each other. It is worth mentioning that the first linear motor 20, the second linear motor 30, the first linear rail 41, the second linear rail 42, the third linear rail 43 and the fourth linear rail 44 are arranged in parallel to each other (all parallel to the Z axis).
The ball screw 50 includes a screw 52 and a nut 54. Specifically, the screw 52 has at least one supporting seat 52A (two supporting seats 52A in the embodiment) for supporting the body of the screw 52 and allowing the body of the screw 52 to rotate around its axis, and the nut 54 is screwed on the screw 52 and has a base 54A.
As shown in fig. 22 to 24, the ball screw 50 is disposed on the second side 243 of the first magnet back plate 24, wherein two supporting seats 52A of the screw 52 are connected to the first magnet back plate 24, the first magnet back plate 24 is coupled to the first linear rail 41 through the first linear slider 61 (in the embodiment, the first magnet back plate 24 is located between the supporting seats 52A and the first linear slider 61), and the base 54A of the nut 54 is connected to the second magnet back plate 34 and is coupled to the second linear rail 42 through the second linear slider 62.
Further, the first magnet back plate 24 is further coupled to the third linear rail 43 through a third linear slider 63, and the second magnet back plate 34 is further coupled to the fourth linear rail 44 through a fourth linear slider 64. This further improves the stability and smoothness of the linear movement of the first and second magnet back plates 24 and 34. It should be understood that the first and second magnet back plates 24 and 34 in the present embodiment can have the shapes disclosed in the figures, such as the connecting screw 52 (the supporting seat 52A), the nut 54 (the base 54A), the first linear slider 61, the third linear slider 63 and the fourth linear slider 64, but the present invention is not limited thereto, and the shapes of the first and second magnet back plates 24 and 34 can be designed according to the requirements.
With the above-mentioned structure, the screw 52 can be driven by the first linear motor 20 (i.e., when the first magnet back plate 24 moves linearly relative to the first coil set 22) to move along the first linear track 41 (and the third linear track 43), so that the direct-rotary actuator 6 can provide a linear motion output (as shown by an arrow D1 in fig. 22), and in the other direction, the nut 54 can be driven by the second linear motor 30 (i.e., when the second magnet back plate 34 moves linearly relative to the second coil set 32) to move along the second linear track 42 and drive the screw 52 to rotate, so that the direct-rotary actuator 6 can also provide a rotary motion output (as shown by an arrow D2 in fig. 22).
The linear actuator 6 of the present embodiment can also provide linear and/or rotational motion output, so that it is suitable for various applications, and it is not necessary to additionally mount a servo rotary motor, thereby improving the problems of the conventional linear actuator using a servo rotary motor.
Although the present invention has been described with reference to the above embodiments, it is not intended to limit the invention. Those skilled in the art can make various changes and modifications without departing from the spirit and scope of the invention. Therefore, the protection scope of the present invention should be determined by the appended claims.

Claims (5)

1. A direct rotary actuator, comprising:
a base;
the first linear motor is arranged on the base and comprises a fixed first coil group and a movable first magnet back plate;
the second linear motor is arranged on the base and comprises a fixed second coil group and a movable second magnet back plate;
a first linear rail fixed on the base, wherein the first linear motor, the second linear motor and the first linear rail are arranged in parallel; and
a ball screw including a screw and a nut screwed together, the screw being connected to the first magnet back plate and coupled to the first linear track, the nut being connected to the second magnet back plate and coupled to the first linear track;
the base is provided with a first side and a second side which are opposite, the first coil group and the second coil group are respectively fixed on the first side and the second side, the first magnet back plate is arranged on the first side and can move relative to the first coil group, the second magnet back plate is arranged on the second side and can move relative to the second coil group, and the first coil group and the second coil group are positioned between the first magnet back plate and the second magnet back plate;
the linear actuator provides linear motion output when the screw and the nut are driven by the first and second linear motors to move in a synchronous manner along the first linear track, and provides rotational motion output when the nut is driven by the second linear motor to move in an asynchronous manner relative to the screw along the first linear track.
2. The direct rotary actuator of claim 1 wherein the base further comprises a third side between the first side and the second side, the first linear track being secured to the third side.
3. The direct rotary actuator of claim 2, further comprising a first linear slider and a second linear slider, wherein the screw and the first magnet back plate are coupled to the first linear track via the first linear slider, and the nut and the second magnet back plate are coupled to the first linear track via the second linear slider.
4. The direct rotary actuator of claim 3, further comprising a second linear track, a third linear slider, and a fourth linear slider, the second and third linear tracks being fixed to the first and second sides of the base, respectively, and the first magneto back plate being coupled to the second linear track via the third linear slider and the second magneto back plate being coupled to the third linear track via the fourth linear slider.
5. The direct rotary actuator of claim 3, further comprising a fourth linear track fixed to a fourth side of the base between the first side and the second side of the base and opposite the third side of the base, wherein the first magneto back plate is coupled to the fourth linear track via the fifth linear track, and the second magneto back plate is coupled to the fourth linear track via the sixth linear track.
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