CN102288173A - Static-driving capacitance-detection micro solid modal gyroscope - Google Patents
Static-driving capacitance-detection micro solid modal gyroscope Download PDFInfo
- Publication number
- CN102288173A CN102288173A CN2011102069417A CN201110206941A CN102288173A CN 102288173 A CN102288173 A CN 102288173A CN 2011102069417 A CN2011102069417 A CN 2011102069417A CN 201110206941 A CN201110206941 A CN 201110206941A CN 102288173 A CN102288173 A CN 102288173A
- Authority
- CN
- China
- Prior art keywords
- micro
- vibration
- oscillator
- gyroscope
- elasticity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Abstract
The invention discloses a static-driving capacitance-detection micro solid modal gyroscope belong to the technical field of micro electro mechanical systems, which comprises an elastic micro vibrator, and a reference vibration driving electrode, a reference vibration induction electrode, a Coriolis force induction electrode which are positioned at the periphery of the elastic micro vibrator, wherein two consolidated special vibration modes, i.e. a reference vibration mode and a sensing vibration mode, of the elastic micro vibrator are used for working, static power is adopted for driving, and variable capacitance mechanism is used for detecting the reference vibration and Coriolis force induction vibration. The gyroscope has no independent mass spring structure so as to have the anti-impact and anti-vibration capability, can be used in the severe environment; the gyroscope has high working efficiency so as to be beneficial to enlarge the measurement bandwidth of the gyroscope and reduce noise, the gyroscope can work under the atmospheric environment so as to reduce the packaging difficulty and has improved reliability and reduced production cost; and the static exciting and the capacitance detection are adopted, so that the micro solid modal gyroscope and a CMOS (Complementary Metal-Oxide-Semiconductor Transistor) measurement and control circuit can be integrated, the batched production is easy, and simultaneously, the influence to the parasitic resistance or the capacitance can be reduced.
Description
Technical field
What the present invention relates to is a kind of little gyro of field of micro electromechanical technology, specifically is that a kind of static electricity driving capacitor detects micro-solid mode gyroscope.
Background technology
In the century in the past, the gyro technology has experienced a series of revolutionary development course.20 beginnings of the century, Elmer Sperry has invented gyrocompass, and it is applied in the marine navigation.The 1950's, realized adopting restrained gyroscope and accelerometer system to respond to the six-freedom motion of aircraft.These early stage gyrosystems only are used for direction reference, therefore they are not had higher accuracy requirement.Because the high complexity and the high cost of frame gyroscope system begin to rise development Strapdown Inertial Units frame of reference the seventies in 20th century.Seek out sufficiently high performance, strapped-down system requires to have higher precision, and its Gyro Precision drift will be lower than 0.01deg/h.In order to satisfy such accuracy requirement, people have developed the optical gyroscope based on the Sagnac effect with superhigh precision and high reliability.The optical gyroscope volume is big, cost an arm and a leg, and therefore is mainly used in space flight, navigation and the aviation field.In in the past more than 30 year, along with the appearance of MEMS technology and progressively development, both at home and abroad the scientific research personnel is being devoted to the exploitation of micro-inertia sensor always, makes every effort to produce that volume is little, low price, the little gyro of high-performance MEMS low in energy consumption.
Find through literature search prior art, the people such as K.Maenaka of Japan Kobe university have delivered one piece of paper in the 19th the IEEE MEMS meeting in 2006 Istanbul, be entitled as " novel solid-state micro gyroscope ", this paper is incorporated in the 634th page to the 637th page.They have proposed a kind of all solid state little gyro based on the special mode of oscillation of piezoelectrics.They discover rectangle piezoelectrics mode of oscillation, under certain high frequent vibration mode, each particle on the piezoelectrics is substantially along same axial vibration (as the x axle), and the particle vibration direction around adjacent two seamed edges is opposite, be that some seamed edges are when being extensional motion, then adjacent seamed edge is a compression movement, they vibrate (resonant frequency is about hundreds of KHz) with the vibration of piezoelectrics under this special mode of oscillation as driving, when the angular speed input was arranged on (as the y axle) along certain specific axis, going up induction vibration in piezoelectrics polarised direction (as the z axle) can detect by the induced voltage on piezoelectrics surface.Through preliminary research, they have verified the feasibility of this little gyro scheme.Owing to do not adopt traditional spring-mass vibrational system, do not have the flexible structure of resiliency supported in this special all solid state little gyro, so can bear higher foreign impacts, shock resistance anti-vibration ability is strong, and it does not have specific (special) requirements to Vacuum Package, can be operated under the normal pressure.Owing to be operated under the higher frequency of operation, help improving the measurement bandwidth of little gyro.
The vibrating mass of all solid state little gyro of piezo-electric type is piezoelectrics, and the available stronger piezoelectrics material of piezoelectric effect is the PZT piezoelectric ceramics usually.But the elasticity of piezoelectric ceramics and microfabrication performance are limited, and the material of piezoelectric ceramics and electrology characteristic are responsive to temperature, this has limited the raising of the manufacturing accuracy of this little gyro, and its material selectivity is limited, and the feasibility that the microfabrication mass is made is not high.
Summary of the invention
The objective of the invention is to overcome deficiency of the prior art, a kind of micro-solid mode gyroscope based on elastic matrix is provided.Micro-solid mode gyroscope is a kind of novel MEMS angular rate sensor, this micro-solid mode gyroscope utilizes the special mode of oscillation of elastic matrix to carry out work, this novel little gyro utilizes electrostatic force to carry out elastomeric operational vibration mode exciting, utilizes electric capacity to detect the induction vibration that is encouraged by coriolis force.It is the driving and the detection method of widespread use in MEMS (micro electro mechanical system) that electrostatic force drives capacitance detecting, especially in little gyro the technology of development comparative maturity, it can obtain bigger driving force and higher detection precision, and carried out integrated in cmos circuit, be convenient to mass production, reduce the manufacturing cost of the little gyro of this type.The oscillator of micro-solid mode gyroscope can adopt the structural damping materials with smaller to make, and helps improving the quality factor of oscillator, thereby further improves the accuracy of detection of micro-solid mode gyroscope.
The present invention is achieved by the following technical solutions, the present invention includes: elasticity micro-oscillator, with reference to the vibratory drive electrode, with reference to vibration induction electrode, coriolis force induction electrode, wherein the elasticity micro-oscillator, all be to fix with reference to the vibratory drive electrode, with reference to vibration induction electrode, coriolis force induction electrode by lower surface; With reference to the vibratory drive electrode, with reference to vibration induction electrode, coriolis force induction electrode be positioned at the elasticity micro-oscillator around, and between sidewall and the elasticity micro-oscillator sidewall small gap is arranged, form and drive the die opening variable capacitance that vibrational excitation and induction vibration detect.
Described elasticity micro-oscillator is a square structure, and it is the vibrating mass of whole micro-solid mode gyroscope.The lower surface of elasticity oscillator is fixed, four sides and reference vibratory drive electrode on every side, form with reference to vibration induction electrode, coriolis force induction electrode and to drive electric capacity and to detect electric capacity, these electric capacity are finished the excitation that reference of micro-solid mode gyroscope vibrate and the detection of induction vibration.Elasticity micro-oscillator employing elastic property material preferably forms, and the structural damping of this resilient material is less, and it has the high quality of vibration factor, and this specific character helps improving the detection sensitivity of micro-solid mode gyroscope.
Describedly have two with reference to the vibratory drive electrode, fix by lower surface, be distributed in the relative both sides of elasticity micro-oscillator, side that they are adjacent with the elasticity micro-oscillator and elasticity micro-oscillator form and drive electric capacity, when at the elasticity micro-oscillator with when applying the alternation driving voltage of certain frequency between with reference to vibrating electrode, will motivate vibration on the elasticity micro-oscillator with reference to mode of oscillation.
Describedly have two with reference to the vibration induction electrode, they are fixed by lower surface, be distributed in with reference to the identical both sides of vibratory drive electrode, side that they are adjacent with the elasticity micro-oscillator and elasticity micro-oscillator form and detect electric capacity.Be used for detecting the state of the reference vibration of elasticity micro-oscillator with reference to the vibration induction electrode.Be used to drive the closed-loop control of vibration with reference to the vibration induction electrode, make elasticity micro-oscillator steady operation at reference vibration modal frequency point, and keep constant vibration frequency.
Described coriolis force induction electrode has four, they are fixed by lower surface, be distributed in with reference to the adjacent both sides of vibratory drive electrode, side that they are adjacent with the elasticity micro-oscillator and elasticity micro-oscillator form the coriolis force induction vibration and detect electric capacity, detect by rotation excitation and go out the De Geshi acceleration, and then obtain the extraneous angular velocity of rotation of on sensitive direction, importing.Four coriolis force induction electrodes form two pairs of differential capacitors, and they carry out difference processing, help eliminating the interference of extraneous common mode vibration, also help improving simultaneously the detection sensitivity of micro-solid mode gyroscope.
The present invention finds by the vibration-mode analysis to above-mentioned elasticity micro-oscillator, under the special mode of oscillation in certain rank, when limit of elasticity micro-oscillator upper surface is extensional motion, then relative with it that limit is a compression movement, and under this special mode of oscillation, each particle is substantially all along identical axially-movable on the elasticity micro-oscillator.For square elasticity micro-oscillator, this special mode of oscillation also has the identical degeneracy mode of resonant frequency.A pair of degeneracy mode like this can be used as the reference mode of oscillation and the induction vibration mode of micro-solid mode gyroscope.
The present invention adopts electrostatic force to encourage with reference to mode of oscillation, utilizes change gap variable electric capacity to detect induction vibration mode.Static driven and capacitance detecting are the driving and the detection methods of widespread use in the MEMS (micro electro mechanical system), and this driving detection technique is easy to adopt little processing structure to realize, and are fit to and cmos circuit carries out integrated.
The static electricity driving capacitor that the present invention proposes detects micro-solid mode gyroscope, utilize the special mode of oscillation of two mergers of elasticity micro-oscillator to carry out work, one of them mode of oscillation is with reference to vibration, another mode of oscillation is an induction vibration, adopt electrostatic force to drive, variable capacitance mechanism detects with reference to vibration and coriolis force induction vibration.Owing to adopt the special mode of oscillation of resilient material oscillator to carry out work, and be not piezoelectrics, this has increased the selection degree of freedom of little gyro manufacturing materials on the one hand, allow matrix to utilize the bigger material of elasticity to make, and can obtain the great quality of vibration factor, adopt micro fabrication can realize extremely small electric capacity spacing on the other hand, this helps improving the driving force of elasticity micro-oscillator under same drive voltage, also helps improving the detection sensitivity that detects electric capacity simultaneously.Form affixedly between the core component of micro-solid mode gyroscope and the carrier, this structure more helps the installation of GYROCHIP.The proposition of micro-solid mode gyroscope has overcome the deficiency of all solid state little gyro of piezo-electric type in the background technology, helps obtaining shock resistance, the anti-vibration ability is strong, Vacuum Package is not had the full-solid-state minisize MEMS gyro of specific (special) requirements.
Description of drawings
Fig. 1 is for general structure of the present invention and drive detection electric capacity synoptic diagram;
Fig. 2 is the structure three-dimensional view of micro-solid mode gyroscope of the present invention;
Fig. 3 is the 3-D view of micro-solid mode gyroscope elasticity micro-oscillator of the present invention;
Fig. 4 is the 3-D view of micro-solid mode gyroscope driving of the present invention and detecting electrode;
Fig. 5 is the driving mode of oscillation of micro-solid mode gyroscope elasticity micro-oscillator of the present invention and the 3-D view of induction vibration mode.
Embodiment
Below in conjunction with accompanying drawing embodiments of the invention are elaborated: present embodiment has provided detailed embodiment and process being to implement under the prerequisite with the technical solution of the present invention, but protection scope of the present invention is not limited to following embodiment.
As depicted in figs. 1 and 2, present embodiment comprises: elasticity micro-oscillator 1, with reference to vibratory drive electrode 5 and 9, with reference to vibration induction electrode 4 and 8, coriolis force induction electrode 2,3,6 and 7, wherein the elasticity micro-oscillator 1, with reference to vibratory drive electrode 5 and 9, with reference to vibration induction electrode 4 and 8, coriolis force induction electrode 2,3,6 and 7 all is to fix by lower surface, they all are separate, with reference to vibratory drive electrode 5 and 9, with reference to vibration induction electrode 4 and 8, coriolis force induction electrode 2,3,6 and 7 and the side of elasticity micro-oscillator 1 between small gap is arranged, as preferably, for the sensitivity that improves static driven power and detect electric capacity, these small gaps are all less than 1 micron.
As shown in Figure 1, between reference vibratory drive electrode 5 and elasticity micro-oscillator 1, be applied with DC stacked alternating voltage V
D1
, with reference to being applied with DC stacked alternating voltage V between vibratory drive electrode 9 and the elasticity micro-oscillator 1
D2
, alternating voltage V
D1
And V
D2
Between phase differential 180 degree, voltage V
D1
And V
D2
The alternative frequency and the reference vibration modal frequency of elasticity micro-oscillator identical, at voltage V
D1
And V
D2
Under the excitation, the elasticity micro-oscillator vibrates with the reference mode of oscillation.
Shown in Fig. 1, with reference to forming with reference to the vibration detection capacitor C between vibration induction electrode 4 and the elasticity micro-oscillator 1
R2
, with reference to forming with reference to the vibration detection capacitor C between vibration induction electrode 8 and the elasticity micro-oscillator 1
R1
, the vibration detection capacitor C
R2
With reference vibration detection capacitor C
R1
Be used for monitoring amplitude and frequency, be used for elasticity oscillator 1 with reference to the fixed ampllitude of vibration and the closed-loop control and the tracking of resonant frequency point with reference to vibration.
As shown in Figure 1, coriolis force induction electrode 2,3,6 and 7 forms induction vibration respectively and between the elasticity micro-oscillator 1 and detects capacitor C
S3
, C
S4
, C
S2
, C
S1
, when micro-solid mode gyroscope had the rotation input on the sensitive axes direction, the induction vibration of being responded to by Coriolis influence can detect capacitor C by induction vibration
S3
, C
S4
, C
S2
, C
S1
Detect, under induction vibration mode, induction vibration detects capacitor C
S3
, C
S4
Form pair of differential electric capacity, induction vibration detects capacitor C
S1
, C
S2
Form other pair of differential electric capacity, these two pairs of differential capacitors sum up processing, to improve the detection sensitivity of micro-solid mode gyroscope.
As shown in Figure 3, elasticity micro-oscillator 1 is a long and wide measure-alike square block, its length and wide size are between 400 microns to 1 millimeter, it highly is 400 microns to 800 millimeters, elasticity micro-oscillator 1 adopts the resilient material of conduction to be made, as nickel or copper, also can use nonconducting resilient material, as monocrystalline silicon or quartz, when elasticity micro-oscillator 1 body material is non-conductive, its surface need make the metallic film of skim conduction, and the body material of elasticity micro-oscillator 1 has the little characteristic of structural damping, can obtain high modal vibration quality factor.
As shown in Figure 4, with reference to vibratory drive electrode 5 and 9, fix with reference to the lower surface of vibration induction electrode 4 and 8, coriolis force induction electrode 2,3,6 and 7, their height is identical with the height of elasticity micro-oscillator 1, they adopt conductive material to be made, as nickel or copper, also can adopt electrically non-conductive material, as monocrystalline silicon or quartz, when adopting electrically non-conductive material to make, the surface of these electrodes all needs to make the metallic film of skim conduction.
As shown in Figure 5, elasticity micro-oscillator 1 has the operational vibration mode of two degeneracys, and the resonant frequency of these two operational vibration mode is identical, and the modal vibration direction of a certain particle is vertical mutually in two operational vibration mode on the elasticity micro-oscillator 1.In the present embodiment, the mode of oscillation on the left side is with reference to mode of oscillation, and the mode of oscillation on the right is an induction vibration mode, and except the particle vibration direction was perpendicular, their vibration shape was identical.At a certain mode of oscillation, sometime, when a seamed edge of elasticity micro-oscillator 1 was extensional motion, then relative with it seamed edge was a compression movement.
Micro-solid mode gyroscope structure illustrated in figures 1 and 2 adopts micro-processing technology to make, if employing silicon material structure, can adopt photoetching process and ICP-DRIE technology microstructure to be carried out graphically, utilize the high-aspect-ratio process technology of ICP-DRIE to realize the processing in small capacitance gap in conjunction with sacrificial layer technology.If the employing metal structure can adopt UV-LiGA or LiGA technology to make.
Present embodiment has following characteristics: micro-solid mode gyroscope adopts structure of whole solid state, different with general little oscillation gyro is, there is not independently quality spring structure in the micro-solid mode gyroscope, its quality and spring are to merge in the middle of elasticity micro-oscillator 1, this structure has high shock resistance, anti-vibration ability, can be applied in some abominable working environments, in the military weapon as high overload.The frequency of operation height of micro-solid mode gyroscope is generally hundreds of KHz to several MHz, and than high 2 to 3 orders of magnitude of frequency of operation of general little oscillation gyro, high frequency of operation helps increasing the measurement bandwidth and the noise reduction of little gyro.Because the Oscillation Amplitude of little oscillation gyro oscillator is minimum, therefore air-damped influence is also very little, can be operated under the atmospheric environment, and this has reduced the difficulty that encapsulates, and has improved the reliability of little gyrosystem, has reduced production cost.Adopt static excitation and capacitance detecting, be convenient to micro-solid mode gyroscope and CMOS telemetry circuit and carry out integratedly, be easy to mass production, also reduced the influence of dead resistance or electric capacity simultaneously.The micro-solid mode gyroscope that static electricity driving capacitor detects is expected to realize a kind of minitype inertial angular rate sensor of high precision high reliability.
Claims (10)
1. the micro-solid mode gyroscope that detects of a static electricity driving capacitor, comprise: elasticity micro-oscillator, with reference to the vibratory drive electrode, with reference to vibration induction electrode, coriolis force induction electrode, wherein the elasticity micro-oscillator, all be to fix with reference to the vibratory drive electrode, with reference to vibration induction electrode, coriolis force induction electrode by lower surface, they all are separate; With reference to the vibratory drive electrode, with reference to vibration induction electrode and coriolis force induction electrode be positioned at the elasticity micro-oscillator around, and gapped between sidewall and the elasticity micro-oscillator sidewall, form and drive the die opening variable capacitance that vibrational excitation and induction vibration detect.
2. the micro-solid mode gyroscope that static electricity driving capacitor according to claim 1 detects is characterized in that, described with reference to the vibratory drive electrode, with reference to the gap between the side of vibration induction electrode, coriolis force induction electrode and elasticity micro-oscillator all less than 1 micron.
3. the micro-solid mode gyroscope that static electricity driving capacitor according to claim 1 and 2 detects, it is characterized in that, described elasticity micro-oscillator is a square structure, it is the vibrating mass of whole micro-solid mode gyroscope, the lower surface of elasticity oscillator is fixed, four sides and reference vibratory drive electrode on every side, form with reference to vibration induction electrode, coriolis force induction electrode and to drive electric capacity and to detect electric capacity, these electric capacity are finished the excitation that reference of micro-solid mode gyroscope vibrate and the detection of induction vibration.
4. the micro-solid mode gyroscope that static electricity driving capacitor according to claim 1 and 2 detects, it is characterized in that, described elasticity micro-oscillator adopts resilient material or nonconducting resilient material of conduction, and when adopting non-conductive resilient material, its surface makes the metallic film of skim conduction.
5. the micro-solid mode gyroscope that static electricity driving capacitor according to claim 1 and 2 detects, it is characterized in that, described with reference to being applied with DC stacked alternating voltage between vibratory drive electrode and the elasticity micro-oscillator, under the driving voltage excitation, the elasticity micro-oscillator vibrates with the reference mode of oscillation; Describedly have two with reference to the vibration induction electrode, they are fixed by lower surface, be distributed in with reference to the identical both sides of vibratory drive electrode, side that they are adjacent with the elasticity micro-oscillator and elasticity micro-oscillator form and detect electric capacity, be used for detecting the state of the reference vibration of elasticity micro-oscillator with reference to the vibration induction electrode, be used to drive the closed-loop control of vibration with reference to the vibration induction electrode, make elasticity micro-oscillator steady operation at reference vibration modal frequency point, and keep constant vibration frequency.
6. the micro-solid mode gyroscope that static electricity driving capacitor according to claim 1 and 2 detects, it is characterized in that, described height with reference to vibratory drive electrode and induction electrode is identical with the height of elasticity micro-oscillator, the employing conductive material is made, or adopt electrically non-conductive material to make, when adopting electrically non-conductive material to make, the surface of these electrodes all makes the metallic film of skim conduction.
7. the micro-solid mode gyroscope that static electricity driving capacitor according to claim 1 and 2 detects, it is characterized in that, described coriolis force induction electrode forms induction vibration respectively and between the elasticity micro-oscillator and detects electric capacity, when micro-solid mode gyroscope has the rotation input on the sensitive axes direction, induction vibration by the Coriolis influence induction comes out by induction vibration detection capacitance detecting, under induction vibration mode, induction vibration detects electric capacity and forms two pairs of differential capacitors in twos, and these two pairs of differential capacitors sum up processing.
8. the micro-solid mode gyroscope that static electricity driving capacitor according to claim 1 and 2 detects, it is characterized in that, described elasticity micro-oscillator has the operational vibration mode of two degeneracys, the resonant frequency of these two operational vibration mode is identical, the modal vibration direction of a certain particle is vertical mutually in two operational vibration mode on the elasticity micro-oscillator, one of them mode of oscillation is with reference to mode of oscillation, another mode of oscillation is an induction vibration mode, except the particle vibration direction is perpendicular, the vibration shape of two mode of oscillations is that same needle is concerning a certain mode of oscillation, sometime, when a seamed edge of elasticity micro-oscillator was extensional motion, then relative with it seamed edge was a compression movement.
9. the micro-solid mode gyroscope that static electricity driving capacitor according to claim 1 detects, it is characterized in that, described micro-solid mode gyroscope is a silicon material structure, adopt photoetching process and ICP-DRIE technology microstructure to be carried out graphically, utilize the high-aspect-ratio process technology of ICP-DRIE to realize the processing in small capacitance gap in conjunction with sacrificial layer technology.
10. the micro-solid mode gyroscope that static electricity driving capacitor according to claim 1 detects is characterized in that described micro-solid mode gyroscope is a metal structure, adopts UV-LiGA or LiGA technology to make.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201110206941 CN102288173B (en) | 2011-07-22 | 2011-07-22 | Static-driving capacitance-detection micro solid modal gyroscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201110206941 CN102288173B (en) | 2011-07-22 | 2011-07-22 | Static-driving capacitance-detection micro solid modal gyroscope |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102288173A true CN102288173A (en) | 2011-12-21 |
| CN102288173B CN102288173B (en) | 2013-02-27 |
Family
ID=45334797
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201110206941 Expired - Fee Related CN102288173B (en) | 2011-07-22 | 2011-07-22 | Static-driving capacitance-detection micro solid modal gyroscope |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102288173B (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103697876A (en) * | 2013-12-13 | 2014-04-02 | 上海交通大学 | Electrostatic drive bulk acoustic wave solid fluctuating micro gyroscope based on silicon plane processing craft |
| CN105021176A (en) * | 2014-04-24 | 2015-11-04 | 苏州圣赛诺尔传感器技术有限公司 | Mems gyroscope measurement and control circuit |
| CN107346354A (en) * | 2017-06-21 | 2017-11-14 | 中国电子产品可靠性与环境试验研究所 | The driving voltage Forecasting Methodology and system of the stepped micro- clamped beam of electrostatic drive |
| CN107607130A (en) * | 2017-09-14 | 2018-01-19 | 中国电子科技集团公司第二十六研究所 | One kind is without plated film quartz hemispherical resonator detection means and method |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1120630A1 (en) * | 2000-01-27 | 2001-08-01 | British Aerospace Public Limited Company | Micromachined angular rate sensor |
| US20070240508A1 (en) * | 2006-04-18 | 2007-10-18 | Watson William S | Vibrating inertial rate sensor utilizing skewed drive or sense elements |
| CN101398305A (en) * | 2008-10-30 | 2009-04-01 | 上海交通大学 | Piezo-electricity micro-solid mode gyroscope with concentrated mass blocks |
| CN101476887A (en) * | 2009-02-05 | 2009-07-08 | 上海交通大学 | Inverse magnetic suspension vibrating micro-gyroscope |
| CN101614544A (en) * | 2009-07-30 | 2009-12-30 | 上海交通大学 | The micro electro mechanical system solid-state gyroscope of composite denseness and rigidity |
-
2011
- 2011-07-22 CN CN 201110206941 patent/CN102288173B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1120630A1 (en) * | 2000-01-27 | 2001-08-01 | British Aerospace Public Limited Company | Micromachined angular rate sensor |
| US20070240508A1 (en) * | 2006-04-18 | 2007-10-18 | Watson William S | Vibrating inertial rate sensor utilizing skewed drive or sense elements |
| CN101398305A (en) * | 2008-10-30 | 2009-04-01 | 上海交通大学 | Piezo-electricity micro-solid mode gyroscope with concentrated mass blocks |
| CN101476887A (en) * | 2009-02-05 | 2009-07-08 | 上海交通大学 | Inverse magnetic suspension vibrating micro-gyroscope |
| CN101614544A (en) * | 2009-07-30 | 2009-12-30 | 上海交通大学 | The micro electro mechanical system solid-state gyroscope of composite denseness and rigidity |
Non-Patent Citations (4)
| Title |
|---|
| XIAOSHENG WU ET AL.: "Modeling Analysis of Piezoelectric Micromachined Modal Gyroscope (PMMG)", 《PROCEEDINGS OF THE 2009 4TH IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS》 * |
| YIPENG LU ET AL.: "Optimization and analysis of novel piezoelectric solid micro-gyroscope with high resistance to shock", 《MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS》 * |
| 何程鹄等: "压电型微固体模态陀螺的相位差检测", 《传感技术学报》 * |
| 吴校生等: "压电型微固体模态陀螺的模态及谐振分析", 《传感技术学报》 * |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103697876A (en) * | 2013-12-13 | 2014-04-02 | 上海交通大学 | Electrostatic drive bulk acoustic wave solid fluctuating micro gyroscope based on silicon plane processing craft |
| CN103697876B (en) * | 2013-12-13 | 2016-06-01 | 上海交通大学 | Based on the static driven formula bulk acoustic wave solid fluctuation microthrust test of silicon surface manufacturing process |
| CN105021176A (en) * | 2014-04-24 | 2015-11-04 | 苏州圣赛诺尔传感器技术有限公司 | Mems gyroscope measurement and control circuit |
| CN107346354A (en) * | 2017-06-21 | 2017-11-14 | 中国电子产品可靠性与环境试验研究所 | The driving voltage Forecasting Methodology and system of the stepped micro- clamped beam of electrostatic drive |
| CN107346354B (en) * | 2017-06-21 | 2020-12-08 | 中国电子产品可靠性与环境试验研究所 | Driving voltage prediction method and system for electrostatic driving stepped micro clamped beam |
| CN107607130A (en) * | 2017-09-14 | 2018-01-19 | 中国电子科技集团公司第二十六研究所 | One kind is without plated film quartz hemispherical resonator detection means and method |
| CN107607130B (en) * | 2017-09-14 | 2019-07-26 | 中国电子科技集团公司第二十六研究所 | A kind of no plated film quartz hemispherical resonator detection device and method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102288173B (en) | 2013-02-27 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US7093486B2 (en) | Isolated resonator gyroscope with a drive and sense plate | |
| EP2339293B1 (en) | Integrated microelectromechanical gyroscope with improved driving structure | |
| CN101368826B (en) | Vibration isolation frame work decoupled silicon micro-gyroscope | |
| US8555718B2 (en) | Piezoelectric transducers | |
| CN101261126B (en) | Micro- solid mode gyroscope | |
| WO2011158348A1 (en) | Composite sensor | |
| WO2007145113A1 (en) | Inertial sensor | |
| CN102353370B (en) | Piezoelectric driven capacitance detection of micro-solid modal gyroscope | |
| CN101441081B (en) | Vibration type micro-mechanical gyroscope | |
| CN102175236B (en) | Micro gyroscope capable of regulating and reducing quadrature errors | |
| CN102288173B (en) | Static-driving capacitance-detection micro solid modal gyroscope | |
| CN102980565A (en) | Circular ring fluctuation micromechanical gyroscope and preparation method thereof | |
| CN101759136B (en) | Fully-decoupled vibrating micromechanical gyroscope | |
| CN101746708B (en) | Fully-decoupled capacitance type micromachined gyroscope | |
| CN102297689B (en) | Electrostatically driven piezoelectric detection closed loop controlled micro-solid modal gyro | |
| CN101398305B (en) | Piezo-electricity micro-solid mode gyroscope with concentrated mass blocks | |
| CN116907466B (en) | Microelectromechanical triaxial gyroscope and electronic device | |
| CN101514897A (en) | Improved sonic type micro mechanical scopperil | |
| CN102064021A (en) | Comb tooth capacitor of micromachine | |
| CN102679967B (en) | Piezoelectric biaxial micro gyroscope with rocking mass block | |
| CN201352121Y (en) | Vibratory micromachined gyroscope | |
| CN106441260B (en) | Silicon-on-silicon piezoelectric film multi-supporting-beam MEMS gyroscope and preparation method thereof | |
| CN201561983U (en) | Full-decoupling capacitor-type micro mechanical gyro for measuring angular speed | |
| CN103697873B (en) | Prop drawing shape micromechanics solid fluctuation mode vectors correlation gyro | |
| CN201561758U (en) | Full decoupling vibration type micromechanical gyroscope for measuring angular speed |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130227 Termination date: 20150722 |
|
| EXPY | Termination of patent right or utility model |