CN107587133B - A kind of tungsten tipped probe composite diamond coating and preparation method thereof - Google Patents
A kind of tungsten tipped probe composite diamond coating and preparation method thereof Download PDFInfo
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- CN107587133B CN107587133B CN201710794130.0A CN201710794130A CN107587133B CN 107587133 B CN107587133 B CN 107587133B CN 201710794130 A CN201710794130 A CN 201710794130A CN 107587133 B CN107587133 B CN 107587133B
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Abstract
The invention discloses a kind of tungsten tipped probe composite diamond coating, which is successively made of tungsten tipped probe matrix, bottom adhesive layer and surface layer, and the bottom adhesive layer is Titanium, and the surface layer is diamond-like coating.Preparation method uses cathode filtered arc technology, ion beam technology and vacuum sputtering technique combine, composite diamond coating deposition is realized on sample substrate, the composite diamond coating that the present invention obtains has high film substrate bond strength, low internal stress, low-friction coefficient, good uniformity and long antiwear characteristic.
Description
Technical field
The present invention relates to diamond-like coating more particularly to a kind of tungsten tipped probe composite diamond coating and its preparation sides
Method.
Background technique
The features such as diamond-like coating is with its high rigidity, ultralow friction coefficient, high-wearing feature and corrosion resistance, it is mechanical,
The fields such as electronics, biomedicine show wide application prospect.However, diamond-like coating the shortcomings that there is also itself,
It limits its application.
Currently, the main problem that puzzlement researcher prepares composite diamond coating is:
1, the binding force on the sample substrates such as diamond-like coating and stainless steel, aluminium alloy, titanium alloy, copper and ceramics surface compared with
Difference easily falls off and fails under abrasion or corrosive conditions；
2, generally internal stress with higher is (sometime up to for the diamond-like coating obtained by various preparation methods
10GPa), when coating reaches certain thickness, big compression makes coating be prone to cracking peeling, limits diamond-like painting
The deposition thickness of layer.
Summary of the invention
The present invention is to provide a kind of tungsten tipped probe composite diamond coating and its preparation side to solve above-mentioned deficiency
Method.
Above-mentioned purpose of the invention is realized by technical solution below: a kind of tungsten tipped probe composite diamond coating,
It is characterized by: the coating is successively made of tungsten tipped probe matrix, bottom adhesive layer and surface layer, the bottom adhesive layer is Titanium
(Ti) layer, the surface layer are diamond-like coating.
The bottom thickness of adhibited layer is 0.3~0.5 micron；The skin depth is 0.8~1.2 micron.
A kind of preparation method of tungsten tipped probe composite diamond coating, it is characterised in that: will be after conventional pre-treatment
Tungsten tipped probe is placed in cathode filtered arc-compound vapor deposition vacuum system of ion source-magnetron sputtering, is sequentially depositing following multilayer
Gradient Film:
(1) magnetron sputtering titanium (Ti) adhesive layer, workpiece is placed in magnetron sputtered vacuum system, is with Titanium (Ti) target
Cathode, working gas be argon gas (Ar), sedimentation time 5~15 minutes；In technical process, argon gas is ionized into argon ion, high energy
The titanium atom on surface layer is banged from target material surface, is then deposited on workpiece by the argon ion bombardment titanium target material surface of amount；
(2) filtering cathode arc source deposits soft, low stress diamond-like rock layers, graphite target, vacuum degree 10- 4Pa, time are 15~30 minutes；Using high impulse bias voltage 2000V, the appropriate chopped pulse time and increase voltage value, from
And the diamond-like coating of low stress can be obtained, the cohesive force of entire coating and workpiece substrate can be improved；
(3) filtering cathode arc source deposits higher hardness, the diamond-like rock layers of appropriate stress；Graphite target, vacuum degree
It is 5 × 10-4The negative pulse bias of Pa, 1000~1500V, the process time 100~200 minutes；The appropriate voltage value and longer of reducing
Process time, so as to obtain the diamond-like coating of higher hardness, appropriate stress；
By step (1), step (2) and step (3), finally, obtaining composite diamond coating on tungsten tipped probe.
Tungsten tipped probe diamond-like composite coating of the present invention, dry friction coefficient is lower than 0. 12, tests through associated mechanisms, resistance to
Mill performance can extend six to 20 times.
Compared with the prior art, the advantages of the invention are
1, it is firmly combined using tungsten tipped probe diamond-like composite coating produced by the present invention and matrix, with excellent wear-resistant
With self-lubricating property.It is characterized in that multilayered structure provides good support and interface cohesion, conventional diamond-like is overcome
The disadvantages of stress in thin films height, poor adhesive force, weak bearing capacity.
2, tungsten tipped probe coat processing method of the invention belongs to vacuum plasma scope, environmentally protective, will not make to environment
At pollution.Used combination process is stable, it can be achieved that batch production, has good application value.
Detailed description of the invention
Fig. 1 is structural schematic diagram of the invention.
Specific embodiment
The present invention is described in further detail below with reference to embodiment.
As shown in Figure 1, a kind of tungsten tipped probe composite diamond coating, it is characterised in that: the coating is successively by tungsten tipped probe base
Body 1, bottom adhesive layer 2 and surface layer 3 are constituted, and the bottom adhesive layer 2 is Titanium (Ti) layer, and the surface layer 3 is compound Buddha's warrior attendant
Stone coating.
The bottom adhesive layer 2 is with a thickness of 0.3~0.5 micron；The surface layer 3 is with a thickness of 0.8~1.2 micron.
A kind of preparation method of tungsten tipped probe composite diamond coating, it is characterised in that: will be after conventional pre-treatment
Tungsten tipped probe is placed in cathode filtered arc-compound vapor deposition vacuum system of ion source-magnetron sputtering, is sequentially depositing following multilayer
Gradient Film:
(1) magnetron sputtering titanium (Ti) adhesive layer, workpiece is placed in magnetron sputtered vacuum system, is with Titanium (Ti) target
Cathode, working gas be argon gas (Ar), sedimentation time 5~15 minutes；In technical process, argon gas is ionized into argon ion, high energy
The titanium atom on surface layer is banged from target material surface, is then deposited on workpiece by the argon ion bombardment titanium target material surface of amount；
(2) filtering cathode arc source deposits soft, low stress diamond-like rock layers, graphite target, vacuum degree 10- 4Pa, time are 15~30 minutes；Using high impulse bias voltage 2000V, the appropriate chopped pulse time and increase voltage value, from
And the diamond-like coating of low stress can be obtained, the cohesive force of entire coating and workpiece substrate can be improved；
(3) filtering cathode arc source deposits higher hardness, the diamond-like rock layers of appropriate stress；Graphite target, vacuum degree
It is 5 × 10-4The negative pulse bias of Pa, 1000~1500V, the process time 100~200 minutes；The appropriate voltage value and longer of reducing
Process time, so as to obtain the diamond-like coating of higher hardness, appropriate stress；
By step (1), step (2) and step (3), finally, obtaining composite diamond coating on tungsten tipped probe.
The above description is only an embodiment of the present invention, is not intended to limit the scope of the invention, all to utilize this hair
Equivalent structure or equivalent flow shift made by bright specification and embodiment content, it is relevant to be applied directly or indirectly in other
Technical field is included within the scope of the present invention.
Claims (3)
1. a kind of tungsten tipped probe composite diamond coating, it is characterised in that: the coating is successively by tungsten tipped probe matrix, bottom adhesive layer
It is constituted with surface layer, the bottom adhesive layer is Titanium (Ti) layer, and the surface layer is diamond-like coating；The skin depth is
0.8 micron；
Tungsten tipped probe after conventional pre-treatment is placed in cathode filtering electricity by the preparation method of the composite diamond coating
In the compound vapor deposition vacuum system of arc-ion source-magnetron sputtering, it is sequentially depositing following multi-gradient film:
(1) magnetron sputtering titanium (Ti) adhesive layer, workpiece is placed in magnetron sputtered vacuum system, is yin with Titanium (Ti) target
Pole, working gas be argon gas (Ar), sedimentation time 5 ~ 15 minutes；In technical process, argon gas is ionized into argon ion, high-energy
The titanium atom on surface layer is banged from target material surface, is then deposited on workpiece by argon ion bombardment titanium target material surface；
(2) filtering cathode arc source deposits soft, low stress diamond-like rock layers, graphite target, vacuum degree 10-4Pa, when
Between be 15 ~ 30 minutes；Using high impulse bias voltage 2000V, the appropriate chopped pulse time and increase voltage value, so as to obtain
The diamond-like coating for obtaining low stress, can be improved the cohesive force of entire coating and workpiece substrate；
(3) filtering cathode arc source deposits higher hardness, the diamond-like rock layers of appropriate stress；Graphite target, vacuum degree be 5 ×
10-4The negative pulse bias of Pa, 1000 ~ 1500V, the process time 100 ~ 200 minutes；When appropriate reduction voltage value and longer technique
Between, so as to obtain the diamond-like coating of higher hardness, appropriate stress；
By step (1), step (2) and step (3), finally, obtaining composite diamond coating on tungsten tipped probe.
2. a kind of composite diamond coating according to claim 1, it is characterised in that: the bottom thickness of adhibited layer is
0.3 ~ 0.5 micron.
3. a kind of preparation method of composite diamond coating, it is characterised in that: set the tungsten tipped probe after conventional pre-treatment
In cathode filtered arc-compound vapor deposition vacuum system of ion source-magnetron sputtering, it is sequentially depositing following multi-gradient film:
(1) magnetron sputtering titanium (Ti) adhesive layer, workpiece is placed in magnetron sputtered vacuum system, is yin with Titanium (Ti) target
Pole, working gas be argon gas (Ar), sedimentation time 5 ~ 15 minutes；In technical process, argon gas is ionized into argon ion, high-energy
The titanium atom on surface layer is banged from target material surface, is then deposited on workpiece by argon ion bombardment titanium target material surface；
(2) filtering cathode arc source deposits soft, low stress diamond-like rock layers, graphite target, vacuum degree 10-4Pa, when
Between be 15 ~ 30 minutes；Using high impulse bias voltage 2000V, the appropriate chopped pulse time and increase voltage value, so as to obtain
The diamond-like coating for obtaining low stress, can be improved the cohesive force of entire coating and workpiece substrate；
(3) filtering cathode arc source deposits higher hardness, the diamond-like rock layers of appropriate stress；Graphite target, vacuum degree be 5 ×
10-4The negative pulse bias of Pa, 1000 ~ 1500V, the process time 100 ~ 200 minutes；When appropriate reduction voltage value and longer technique
Between, so as to obtain the diamond-like coating of higher hardness, appropriate stress；
By step (1), step (2) and step (3), finally, obtaining composite diamond coating on tungsten tipped probe.
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Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111088478A (en) * | 2019-12-27 | 2020-05-01 | 季华实验室 | Superhard DLC coating, aluminum alloy, preparation equipment and preparation method |
| CN112481582B (en) * | 2020-12-22 | 2024-04-05 | 珠海拓优电子有限公司 | Nano-coating probe and preparation method thereof |
| CN112858730A (en) * | 2020-12-29 | 2021-05-28 | 杭州电子科技大学 | Diamond-like coated atomic force microscope probe and preparation method thereof |
| CN114099328A (en) * | 2021-10-09 | 2022-03-01 | 苏州医疗用品厂有限公司 | Process for manufacturing needle tip of acupuncture needle with diamond-like carbon film coating |
| CN114774845A (en) * | 2022-04-11 | 2022-07-22 | 渭南木王智能科技股份有限公司 | Surface treatment process for probe needle head |
| CN115110031A (en) * | 2022-07-11 | 2022-09-27 | 超微中程纳米科技（苏州）有限公司 | Method for preparing superhard diamond coating |
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| CN102092166A (en) * | 2009-12-09 | 2011-06-15 | 中国科学院兰州化学物理研究所 | Multilayered gradient diamond like nano composite coating for aluminum alloy piston and preparation method thereof |
| CN102198927A (en) * | 2011-04-22 | 2011-09-28 | 河南大学 | Method for etching nanometer pattern on surface of crystalline silicon |
| CN104294230A (en) * | 2014-10-09 | 2015-01-21 | 中国科学院宁波材料技术与工程研究所 | High-hardness and low-stress multi-element composite diamond-like coating and preparation method thereof |
| CN107022740A (en) * | 2016-01-29 | 2017-08-08 | 广东耐信镀膜科技有限公司 | A kind of superhard MULTILAYER COMPOSITE diamond-like coating and preparation method thereof |
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102092166A (en) * | 2009-12-09 | 2011-06-15 | 中国科学院兰州化学物理研究所 | Multilayered gradient diamond like nano composite coating for aluminum alloy piston and preparation method thereof |
| CN102198927A (en) * | 2011-04-22 | 2011-09-28 | 河南大学 | Method for etching nanometer pattern on surface of crystalline silicon |
| CN104294230A (en) * | 2014-10-09 | 2015-01-21 | 中国科学院宁波材料技术与工程研究所 | High-hardness and low-stress multi-element composite diamond-like coating and preparation method thereof |
| CN107022740A (en) * | 2016-01-29 | 2017-08-08 | 广东耐信镀膜科技有限公司 | A kind of superhard MULTILAYER COMPOSITE diamond-like coating and preparation method thereof |
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