CN107587101A - 一种浮动连接装置及便于拆装该浮动连接装置的维护工装 - Google Patents
一种浮动连接装置及便于拆装该浮动连接装置的维护工装 Download PDFInfo
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Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100601988B1 (ko) * | 2005-02-05 | 2006-07-18 | 삼성전자주식회사 | 웨이퍼 가열 장비 |
CN1825535A (zh) * | 2005-02-25 | 2006-08-30 | Ips有限公司 | 真空处理装置 |
CN101660143A (zh) * | 2008-08-28 | 2010-03-03 | 北京北方微电子基地设备工艺研究中心有限责任公司 | 平板加热器及等离子体加工设备 |
CN102418087A (zh) * | 2011-12-20 | 2012-04-18 | 汉能科技有限公司 | 一种加热板支撑定位装置 |
DE102011001160A1 (de) * | 2011-03-09 | 2012-09-13 | Fortuna Maschinenbau Holding Ag | Verriegelungseinrichtung zum Verriegeln und Entriegeln eines in einer Teigteilkammer eines Teigteilkammerträgers einer Teigteilmaschine aufgenommenen Innenelements |
CN203228041U (zh) * | 2013-04-25 | 2013-10-09 | 中国北车集团大同电力机车有限责任公司 | 辅助支撑装置和工装 |
CN205527537U (zh) * | 2016-03-24 | 2016-08-31 | 滁州学院 | 一种快速拆装气压式升降台 |
CN205927920U (zh) * | 2016-07-01 | 2017-02-08 | 天津众达精密机械有限公司 | 一种快速拆装工件的压紧工作台 |
CN106475720A (zh) * | 2016-11-30 | 2017-03-08 | 中国航天科技集团公司长征机械厂 | 内弧型面可拆式多自由度托架 |
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- 2017-08-31 CN CN201710773443.8A patent/CN107587101A/zh active Pending
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100601988B1 (ko) * | 2005-02-05 | 2006-07-18 | 삼성전자주식회사 | 웨이퍼 가열 장비 |
CN1825535A (zh) * | 2005-02-25 | 2006-08-30 | Ips有限公司 | 真空处理装置 |
CN101660143A (zh) * | 2008-08-28 | 2010-03-03 | 北京北方微电子基地设备工艺研究中心有限责任公司 | 平板加热器及等离子体加工设备 |
DE102011001160A1 (de) * | 2011-03-09 | 2012-09-13 | Fortuna Maschinenbau Holding Ag | Verriegelungseinrichtung zum Verriegeln und Entriegeln eines in einer Teigteilkammer eines Teigteilkammerträgers einer Teigteilmaschine aufgenommenen Innenelements |
CN102418087A (zh) * | 2011-12-20 | 2012-04-18 | 汉能科技有限公司 | 一种加热板支撑定位装置 |
CN203228041U (zh) * | 2013-04-25 | 2013-10-09 | 中国北车集团大同电力机车有限责任公司 | 辅助支撑装置和工装 |
CN205527537U (zh) * | 2016-03-24 | 2016-08-31 | 滁州学院 | 一种快速拆装气压式升降台 |
CN205927920U (zh) * | 2016-07-01 | 2017-02-08 | 天津众达精密机械有限公司 | 一种快速拆装工件的压紧工作台 |
CN106475720A (zh) * | 2016-11-30 | 2017-03-08 | 中国航天科技集团公司长征机械厂 | 内弧型面可拆式多自由度托架 |
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