CN107532893A - The method for calibrating dimension measuring apparatus - Google Patents
The method for calibrating dimension measuring apparatus Download PDFInfo
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- CN107532893A CN107532893A CN201680025491.2A CN201680025491A CN107532893A CN 107532893 A CN107532893 A CN 107532893A CN 201680025491 A CN201680025491 A CN 201680025491A CN 107532893 A CN107532893 A CN 107532893A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
- G01B21/045—Correction of measurements
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- Length Measuring Devices With Unspecified Measuring Means (AREA)
- A Measuring Device Byusing Mechanical Method (AREA)
Abstract
A kind of dimension measuring apparatus is further calibrated to improve the mapping of the initial error of the equipment or error function.Measure calibrated production workpiece (14) in the equipment (10), and by measured value compared with calibration value (44,90) to produce error.From some or all of these error amounts with producing (46,92) one or more updated error maps or function in initial error mapping or all or part of combination of function.Then determine whether (48,94) updated mapping or function can produce more preferable correction, and if it does, select the updated mapping or function for measuring in the future.By selecting combining and having determined that based on new error amount and existing error amount to provide the error map more preferably corrected or function, the intelligently improved mapping of acquistion or function during the process of normal production measurement.
Description
Technical field
The present invention relates to the method for calibration dimension measuring apparatus.The present invention can be used for calibrating coordinate measurment instrument, such as sit
Mark measuring instrument (CMM), comparing measuring apparatus, lathe, manual co-ordinate measuring arm and inspection machine people.
Background technology
After workpiece generation, it is known that workpiece can be checked on coordinate measurment instrument (such as CMM or comparing measuring apparatus), sat
Mark measuring apparatus has movable part, the spy that movable part support can drive in the three-dimensional swept volume of the machine
Pin.
CMM (or other coordinate measurment instruments) can be so-called Descartes (Cartesian) instrument, wherein supporting probe
Movable part is installed via three slides being connected in series, and this three slides being connected in series respectively can be in three orthogonal sides
Moved on to X, Y, Z.This is the example of " serial kinematic " kinematic system.Or measuring apparatus can be for example with " in parallel
The non-Cartesian instrument of kinematics " kinematic system, being somebody's turn to do " stamp identification " kinematic system includes three or six extensible pillars, often
Individual extensible pillar is connected in parallel between movable part and relatively-stationary substrate parts or framework.Then by coordinating three
Individual or six pillars corresponding stretching, extension controls movement of the movable part (therefore and probe) in X, Y, Z swept volume.
The example of non-Cartesian instrument is shown in international application WO 03/006837 and WO 2004/063579.
The known measurement error by producing experience at the diverse location in X, Y, Z swept volume with coordinate measurment instrument
Related error map or error function calibrate such coordinate measurment instrument.This error map or error function are then used in school
The measurement that face workpiece is carried out.
Our international application WO 2013/140118 describes a kind of method, wherein in the normal production and application phase
Between, such error map or error function progressively accumulate with the nominally identical workpiece series of measuring apparatus measurement.
In WO 2013/140118, the nominally identical workpiece of First Series includes a calibrated workpiece.By comparing this
The measured value of workpiece determines error amount with its respective alignment value.These error amounts are used not only for correcting in identical series in addition
Workpiece measured value.These error amounts are used for the error map or error function for filling measuring apparatus, the error map or mistake
Difference function can then use when measuring other different workpieces.
In addition, also include calibrated workpiece different from the follow-up nominally identical workpiece series of First Series.After coming from
The error amount for continuing the measured value of these calibrated workpiece of series is also used for the error map or error of filling measuring apparatus in addition
Function.
One advantage of the method described in WO 2013/140118 is, it is not necessary to performs the general calibration of equipment to produce
Error map in the whole swept volume of equipment, the generation process are typically a time-consuming operation, may take some days.It is real
On border, equipment is normal day by day for being elapsed and " acquistion " its error map over time during measuring workpiece at it.Often
When the workpiece that measurement is further calibrated, the error amount drawn from it is used for the mapping of further charging error or error function.This changes
The calibration of measuring apparatus is entered.Nevertheless, it is of problems further to improve calibration.
The content of the invention
The present invention provides a kind of further calibration by the dimension measuring apparatus of initial error mapping or error function calibration
Method,
This method includes：
Measure the production workpiece in the measuring apparatus；
Compare the measured value of the production workpiece and the school for the production workpiece obtained from the source outside the measuring apparatus
Quasi- value, to produce one or more error amounts；
It is determined that one or more updated error maps or error function, this or such error map or error function will
Some or all of error amount combines with all or part in initial error mapping or function；
It is characterized in that：
Determine one in such updated error map or error function whether than initial error mapping or error letter
Number preferably corrects measurement error；And
If it is determined that error map or error function can provide more preferable correction, the error map or error letter are selected with that
Count for the measured value of the one or more other workpiece of correction.
At least in a preferred embodiment, therefore method of the invention selects the error map or mistake of the combination based on error amount
Difference function, rather than blindly whole error amounts are incorporated in error map or error function.Have determined that the combination of error amount can ratio
Possible other better offs ground correction error.
It can be by one in the nominally identical workpiece of First Series caused by production process to produce workpiece.Initial error
Mapping or error function may perform in a usual manner, or may by the measured value of more calibrated workpiece with it is corresponding
Calibration value and produce.Or it may be produced repeatedly by the previous of the method according to the invention.Therefore, equipment can be at it just
Normal is used to elapse and " acquistion " its error map over time during measuring workpiece day by day.
The other workpiece of measurable one or more, and can be used selected error map or error function come correct this or
The measured value of such workpiece.One or more other workpiece can include the production work from the nominally identical workpiece of First Series
Part.And/or the other workpiece of the one or more can be included from passing through the nominally identical work of second series caused by production process
The production workpiece of part, it is different from the workpiece of First Series.
The present invention, which also provides, performs the software program of the above method and have such software program be used for dimension measuring apparatus
Controller, and be programmed with the dimension measuring apparatus of such software program.Software program is recordable in such as CD or storage
On the machine-readable mediums such as device device, or storage is on the remote server for download.
" error map " as discussed in this specification can be included for example for the lookup for the value for correcting subsequent measurement
Table.
Brief description of the drawings
Let us now refer to the figures and describe the preferred embodiments of the present invention by way of example, in accompanying drawing：
Fig. 1 shows the operable portion of the comparing measuring apparatus with the kinematic system using stamp identification；
Fig. 2 and Fig. 3 is the flow chart of two preferable calibration methods of Fig. 1 machine；And
Fig. 4 is the flow chart in greater detail of the part for the method for providing Fig. 2 and Fig. 3.
Embodiment
Fig. 1 shows the part of coordinate measurment instrument.The equipment is the applicant Renishaw PLC (Renishaw plc)
The comparing measuring apparatus 10 sold under trade mark EQUATOR.The comparing measuring apparatus includes connecting by stamp identification kinematic system
To the fixed platform 30 of moveable platform 32.In this example, stamp identification kinematic system be included in fixed platform with it is removable
Three pillars 34 in parallel to work between moving platform.Three pillars 34 pass through three associated actuators 36, and such pillar can be with
Stretch and bounce back by such actuator.One end of each pillar 34 is installed to removable flat by comprehensive pivotably fastener
Platform 32, and actuator 36 is equally pivotally installed to fixed platform 30 with comprehensive.
Each actuator 36 includes being used to stretch and the motor for the pillar that bounces back, and the stretching, extension of measurement respective strut 34
Converter.In each actuator 36, converter can be the encoder for including scale and read head, and it has for read head
The counter of output.Each motor and converter form the part of the corresponding servo loop controlled by controller or computer 8.
Stamp identification kinematic system also includes also three to work in parallel between fixed platform and moveable platform
Passive counter rotation device 38,39.Each counter rotation device includes being hinged to the rigid plate 39 of fixed platform 30, and with it is comprehensive can
It is pivotally connected a pair of bars 38 that the parallel interval between rigid plate 39 and moveable platform 32 is opened.Counter rotation device cooperates
To limit movement of the moveable platform 32 in all three rotary freedoms.Therefore, moveable platform 32 be restricted to only with
Three translation freedoms X, Y, Z movements.By requiring the suitable stretching, extension of pillar 34, controller/computer 8 can produce any institute
X, Y, Z displacement or X, Y, Z positioning of moveable platform needed.
Such parallel connection described in our No. 5,813,287 United States Patent (USP) (McMurtry (McMurtry) et al.)
The operating principle of kinematic motion system.This is the example of (having three stretching, extension pillars 34) tripod mechanism.It can use
Such as other kinematic systems with three pin or six pin stamp identification mechanisms.
The converter of three actuators is combined together to form position measuring system.Here controller or computer 8 are passed through
In suitable calculating determine X, Y, Z location of the moveable platform 32 relative to fixed platform 30.These known meters of technical staff
Calculate.However, such as all measuring apparatus, error is had by the such defined location of position measuring system.It is discussed herein below and is used for pin
To the method for these position measuring systems that calibrate for error.
Generally, analogue probe 16 is arranged on the moveable platform 32 of machine, and the analogue probe has to be contacted with workpiece
The deflectable stylus 20 at tip 22, but other types of probe can be used (comprising contact trigger-type probe).Machine is relative
In the traveling probe 16 of workpiece 14 on workbench 12, to carry out the measurement to workpiece features.By in servo-drive system
The output of the calculations incorporated analogue probe 16 of converter draws X, Y, the Z location of the point on workpiece surface.This is entirely by controller/meter
Calculation machine 8 controls.Or by contacting trigger-type probe, the signal that instruction probe has contacted workpiece surface makes basis carry out transformation into itself
The output of device and X, Y for calculating, Z location value are fixed, and computer is read out to the coordinate of workpiece surface.If necessary,
Operated for the measurement during normal production and application, such as the automatic component such as robot (not shown) can will come from production fortune
At least nominally identical position and fixed of each placement in capable a succession of substantially the same workpiece on the table
Xiang Zhong.
Fig. 1 stamp identification measuring apparatus is only an example of the measurement machine type available for the present invention.It is other
Example includes the measuring apparatus with serial kinematic kinematic system, such as with can be three of orthogonal movement on XYZ directions
The conventional Descartes CMM for the slide being connected in series.This can be controlled by computer or manually operated.Another possible serial kinematic
It is inspection machine people or manual articulated type arm to learn machine, and plurality of articulated type arm member is connected by multiple rotary junction surface series connection
Connect.No matter the machine of which type is used, and it is generally positioned in workshop condition, to check from automated manufacturing process
Produce workpiece.
In use, the controller in Fig. 1 or computer 8 contain the program on the surface for making probe 16 scan workpiece 14.Or
Person, for contacting trigger-type probe, the program makes contact trigger-type probe be enough to obtain needed for the workpiece of required inspection operation
All sizes and form multiple differences at contact workpiece surface.This controller/computer can be also used for running control
The program for the calibration method being described below.
Comparing measuring apparatus 10 with reference to figure 1 is described into calibration method, but can be to serial kinematic for example referred to above
Other measuring apparatus such as machine perform identical method.
Fig. 2 shows the first example of such calibration method.There is machine 10 initial error drawn by initial calibration to reflect
Penetrate or error function, the initial calibration perform in a usual manner in step 40.This can be arranged on user site in machine
The basic step performed before or during place by machine builder.Because the step may not be the portion for the method that user performs
Point, therefore step 40 is shown in broken lines.However, it is also possible to perform this initial calibration after machine is installed by user.
For the conventional initial calibration in step 40, the usual machine is used for multiple positions in the swept volume of machine
Place takes multiple measurements to normative reference calibrated in size.Preferably so that suitable national standard or ISO can be traced back to
The mode of standard calibrates normative reference.These standards gauge such as can be ring gauge, reference sphere, such as length bar or step gage
Block, ruler etc..Or another calibration processed goods can be used, such as several spheroids of the bottom plate fixture including being installed on bar or handle
" ball woods ".These spheroids are accurate spheres, have known size, and they are mounted to known exactly exactly
Correlation is spaced intermediate in three dimensions.Fixture is placed in the swept volume of coordinate measurment instrument, and use is set
Standby traveling probe measures spheroid.By the comparison at the known dimensions with spheroid and interval, this is produced in the portion for interspersing among machine
Point or whole X, Y, Z swept volumes in point net at occur measurement error rough mapping.It is also possible to it is used conventionally
Scalable ball bar or laser interferometer measure as normative reference.
Initial error mapping in step 40 includes the such of the various opening positions in the swept volume by comparing machine
The first error amount that measured value is drawn with corresponding normative reference known calibration value.Or it can be drawn from such error amount just
Beginning error function.Initial error mapping (and the other error maps discussed in this specification) can be produced as look-up table, the lookup
Error on X, Y and/or Z-direction of given X, Y, Z coordinate position in the swept volume of table instruction machine.For example, by mistake
Difference function can be that by the multinomial of the calculating to the error in given X, Y, X, Y of Z coordinate position and/or Z-direction
Function.
Initial calibration need not reach pinpoint accuracy, and the initial calibration may not cover the institute in the swept volume of machine
There is position.The purpose of following steps is further calibration machine, so as to improve error map or error function.
In step 42, calibrated workpiece is placed on the workbench 12 of machine 10, as shown in 14 in Fig. 1.Should
Calibrated workpiece is that the First Series are using as the portion of checking process from one in the nominally identical workpiece of First Series of reception
Divide and measured on machine.For example, the workpiece in First Series is probably the connecting rod (connecting rod) for car combustion engine.
Suitably, the calibration to the calibrated workpiece (such as connecting rod) of First Series may be all required by measuring its
Size and performed, its it is all needed for sizes for example individually more will checked on accurate coordinates measuring instrument (CMM).This
Produce one group of calibration value for workpiece.More accurate CMM can be located in laboratory environment, and Fig. 1 machine 10 is likely located at
Production scene, lathe or other production machines close to manufacture workpiece.
During measurement in step 42, on machine 10 again in a usual manner by make probe 16 around workpiece movement come
Measure all sizes to be checked of calibrated workpiece (such as connecting rod).So produce one group of original measurement corresponding to calibration value
Value.In step 44, by original measurement value compared with corresponding calibration value, so as to produce the second set of error values.Original measurement value
(stored from step 42) and the second error amount (step 44) by computer or controller 8.
It will be appreciated that the calibration of workpiece can after the workpiece is measured on machine 10 in step 42 rather than before send out
It is raw.Calibration value is so still produced, the calibration value is compared with the original measurement value in step 44, so as to produce the second set of error values.
In step 46, the second error map or error function are produced from the first He stored in step 40 and step 44
The combination of some or all of second error amount.Or if initial calibration produces error function and mapped without initial error
It can use, then error amount can is synthesized from error function and combined with some or all of the second error amount.Such as technology people
What member had fully understood, it can remove the outlier in error amount with algorithm or some values are averaged or weighted.
In practice, it may be necessary to produce not exclusively such second error map or the single item of error function, also
Produce multiple other error maps or error function.These are in step 46 from some or all of available error amount
Multiple various combinations produce.
In practice, the second error map or error function may provide than step 40 initial error mapping or function more
Good or worse result.That is, as a result may be than using first when using the second error map or error function correction measured value
Error map or error function timing are more accurately or be not as accurate as its.Equally, if there is multiple other error maps or
Error function, an error map or error function may be provided than another more preferable result.
Therefore, in step 48, determine which of error map or error function (which error amount combination) provide most
Good result.This is more fully described below with reference to Fig. 4.
Selection it is thus determined that error map or error function for subsequent use in measurement produce workpiece (step 50).Citing comes
Say, the other workpiece from the nominally identical production workpiece (such as connecting rod) of First Series is placed on to the workbench 12 of machine 10
Upper (Fig. 1).These workpiece are not calibrated, but its size to be checked measures using only probe 16, so as to provide corresponding original
Beginning measured value.Then original measurement value is corrected by the selected error map of application or error function.It is also possible to use choosing
Fixed error map or error function correct the measured value of the different workpieces such as the piston for car combustion engine.
As indicated in step 52, when need manufacture and check some different series nominally identical workpiece (such as
The piston or bent axle of car combustion engine) when, then repeat step 42 arrives step 50.As in step 42, calibrating and measuring new system
A workpiece in row, and original measurement value is stored in computer 8.By comparing these original measurement values and calibration value
(step 44), produce other error amount.By by some or all of these error amounts with being reflected from any previous error
Penetrate or the error amount of function combines, produce other error map or error function (step 46).In step 48, make on
Which error map or error function should be used for the selection of the further inspection to producing workpiece, be retouched below with reference to Fig. 4
State.This selection can be selected from any available error map or function, include initial mapping or letter from step 40
Number, and mapping or function caused by the combination of the error amount from various workpiece are used in step 46.
It should be noted that other error map or error function will preferably combine the error amount from each position or orientation
Some or all of, so as to the coverage of the swept volume of maximum machine.Then it is other that this is tested in step 48
Whether whether error map or error function provide more preferable result to check it and should select for further use.
The method of figure 2 above (step 40) since the conventional initial calibration of machine., now need not by description with reference to figure 3
The method of conventional initial calibration.This method also can be with Fig. 2 Combination of Methods using to realize error map or error letter to machine
Several follow-up improvement.
Fig. 3 step 80 Fig. 2 similar with step 82 step 42 and step 44.In step 80, by calibrated workpiece (example
Such as connecting rod) it is placed on the workbench 12 of machine 10.As described by above for Fig. 2, the workpiece (such as connecting rod) is calibrated, existing
The workpiece is measured on machine 10, so as to provide original measurement value.In step 82 by these original measurement values and corresponding school
Quasi- value compares, so as to produce the first set of error values.Original measurement value (step 80) and the first error amount (step 82) are by calculating
Machine or controller 8 store.
In step 84, the first error map or error function of machine 10 are produced from the combination of the first set of error values.This
Initial error mapping or error function can be subsequently formed, it is by with the suitable side of the error map of the step 40 with Fig. 2 or function
Formula uses.If this is the first time calibration of machine, then all error amounts can use.If previously normal be present
Advise initial calibration, then the combination of some that can be from using only error amount forms the first error map or function, such as Fig. 2
Step 46., can be with algorithm to remove the outlier in error amount as previous, or some values are averaged or weighted.
Then, in step 86, with the manufacture of workpiece, method proceed to the nominally identical workpiece of First Series (such as
Connecting rod) remainder carry out normal production measurement.These workpiece are not calibrated, but its size to be checked is only in Fig. 1 machine
Measured on device 10, so as to provide corresponding original measurement value.Then by applying the error map caused by 84 in step
Or error function corrects these original measurement values.
In a certain future time, it is necessary to measure the nominally identical production workpiece of different second series using machine 10.Example
Such as, the workpiece of second series is probably the piston for car combustion engine.Calibrated workpiece from second series is (such as living
Plug) it is placed on the workbench 12 of machine 10.In the same manner as above, stayed in by measurement for example individually more accurate
Checked on CMM it is all needed for sizes calibrate the workpiece, so as to producing one group of calibration value.
In step 88, all to be checked of the calibrated workpiece (such as piston) of second series is measured again on machine 10
Size is looked into, so as to produce one group of original measurement value corresponding to calibration value.In step 90, by original measurement value and corresponding school
Quasi- value compares, so as to produce the second set of error values.As previously, original measurement value (step 88) and error amount (step 90) are by meter
Calculation machine or controller 8 store.Again as previously, to workpiece (such as piston) calibration can after the measurement on machine 10 rather than
Occur before.
In step 92, the second error map or error function are produced from the error amount stored in step 82 and step 90
Some or all of combination., if necessary, such as in step 82 in the case of non-memory error value, can be from by mistake as previous
Difference function resultant error value.Again, can be with algorithm to remove the outlier in error amount, or some values are averaged or added
Power.As in Fig. 2 step 46, it may be necessary to can use multiple various combinations of error amount to produce from some or all multiple another
Outer error map or error function.
As in fig. 2, in practice, these second or other error map or error function can provide than in step
First error map caused by rapid 84 is more preferable or worse result.That is, as a result may be than using the first error map or error
More accurately or be not as accurate as its during function correction.
Therefore, in step 94, determine which of error map or error function can provide more preferable result.For Fig. 2
The step 48 of middle correspondence, this is described in more detail below with reference to Fig. 4.Selection it is thus determined that error map or error function
Workpiece is produced for subsequent use in measurement.
Then, in step 96, with the manufacture of workpiece, method proceed to the nominally identical workpiece of second series (such as
Piston) remainder carry out normal production measurement.As above, these workpiece are not calibrated, but its size to be checked is only in Fig. 1
Machine 10 on measure, so as to provide corresponding original measurement value.Then by applying the 94 selected error in step
Mapping or error function correct these original measurement values.
As indicated in step 98, when needs manufacture and check the nominally identical work of some different the 3rd or subsequent serials
During part (such as bent axle for car combustion engine), then repeat step 88 arrives step 96.So produce other error map or
Error function.In step 94, making should be used for the further of production workpiece on which error map or error function
The selection of inspection, below with reference to described by Fig. 4.
At Fig. 2 step 52 and Fig. 3 step 98, recommend using different calibrated workpiece come repetitive routine.However,
It is possible to and the different calibrated workpiece of the non-measured nominally identical workpiece from new range, but repeats to previous calibrated work
The measurement of some or all of part size to be checked, but this previously diverse location for being positioned on machine 10 of calibrated workpiece and/
Or orientation.For example, can diverse location or orientation again to step 42 (Fig. 2) or step 80 (Fig. 3) in it is previously used
Calibrated connecting rod measures.So caused other error amount is stored in step 44 or step 90, and it connects
And can be used for producing other error map or error function (step 46 or step 92).It should be noted that other error map or
Error function will preferably combine some or all of error amount from each position or orientation, so as to maximum machine
The coverage of swept volume.Then this other error map or error function are tested in step 48 or step 94 to check
Whether whether it provide more preferable result and should select for further use.
In step 46 (Fig. 2) and step 84 and step 92 (Fig. 3), from step 40 and step 44 or step 82 and step
The combination (may include the error amount from error function synthesis) of some or all error amounts stored in 90 is reflected to produce error
Penetrate or error function.It would be possible to produce the error map only combined by all available error amounts or error function.However, step
48 or the purpose of determination at step 94 place be to find the error amount for producing good result (the more accurate correction to original measurement value)
Combination, may also remove the outlier in multigroup error amount.On the other hand, it is expected to produce from multiple various combinations of available error amount
Multiple error maps or error function.For each error map or function, from difference for only including some available error amounts
Collection is combined.The error amount of initial or the first error map (or from the synthesis of initial or the first error function) can only with step 44
Or some combinations in the second error amount caused by step 90.Or the mistake from initially/first only a part of error map
Difference can combine with some or all of the second error amount.
Therefore, the determination occurred in step 48 or step 94 can from caused by multiple various combinations as error amount it is multiple this
Selected in class error map or error function.If enough computing capabilitys and time are available, it would be possible to from by mistake
The combination that is possible to of difference produces the enforcement of going forward side by side of error map or error function and used.Or in order to save computing resource, can be with
Optionally selection combination, for example, it is preferable to have in the center for occurring largely to measure in the swept volume of machine closeer
Collect the combination of error Distribution value (and/or relatively low error amount).
Fig. 4 shows the method that can be used at Fig. 2 step 48 or in Fig. 3 step 94, to determine two or more
Which of individual error map or error function should select to be used to further produce to measure.
In a step 60, this method is obtained in step 42 (Fig. 2) or the school stored in step 80 and step 88 (Fig. 3)
The original measurement value of quasi- workpiece.This method also obtains the first error map or error function, i.e. initial error maps or error letter
Number (Fig. 2) or caused error map or error function in step 84 (Fig. 3).This method uses this error map or error
Function corrects original measurement value.In the conceived case, it is preferable that to the original survey from more than one calibrated workpiece
Value is operated.Or, if original measurement value comes from a specific calibrated workpiece, can use completely or partially from
Error map that different calibrated workpiece is drawn or error function correct such original measurement value.
In step 62, the accuracy of the correction performed in a step 60 is assessed.This can by calculate correction result with it is right
One group of residual error between the calibration value answered is completed.
In step 64 and step 66, in caused error map in step 46 and step 92 or error function is used
2nd, different error maps or error function come repeat step 60 and step 62.So provide and assess the second error map or error
One group of residual error of the accuracy of function.
, can be for caused other error maps in step 46 and step 92 or function come weight as indicated in step 68
Multiple step 64 and step 66, so as to provide corresponding multigroup residual error in addition.
Then, in step 70, making can provide most on which of the error map of all tests or error function
The decision-making of good result.This can be by computer or controller 8 be based in step 62,66 which error map or error function to
The automatic decision for going out minimum residual error and making.For example, (that is, it can determine which group residual error has by least squares calculation
Minimum quadratic sum) come each error map of comparison or the residual error group of function.If necessary, weighted least squares can be used, such as
Greater weight is given to the residual error in the center (carrying out most of measurement in the central region) in the swept volume of machine.
Or the residual error calculated in step 62,66 for example can be presented to by step 70 as the display on computer screen
There is the operator of technology, and invite him/her to select preferable one from the error map or error function tested.This makes
Operator can consider other factorses in Select Error mapping or function.For example, in error map or error function
Slightly poor residual error in one whole swept volume that may provide machine, but may be chosen, because the error map
Or error function has preferable residual error in the center largely measured.It is possible to store multiple error maps or letter
Number, and then depend on the measurement request of specific workpiece to be measured or workpiece series and select a wherein suitable error
Mapping or function.
If residual error will be presented to operator, can by the residual noise reduction be suitable form with the selection of auxiliary operator.
For example, residual error can be rendered as " thermal map " (2D or 3D figures represent, wherein individual residual values are expressed as color, such as red
Color table shows that larger residual error, yellow/orange represent that medium residual error, green represent smaller residual error).
May from the ad-hoc location in the swept volume of machine specific workpiece (for example, connecting rod in a position,
The valve shell in piston and the 3rd position in the second place) measured value draw error map or error function.In this situation
Under, the coloring figure that its thermal map can be rendered as the associated workpiece in relevant position represents.If operator knows that machine will be
It is used to measure both piston and valve shell in the recent period, he/her may decide that selection provides the error of both acceptable half-way houses
Mapping or error function, Optimal Error mapping/function not for piston or Optimal Error mapping/letter for valve shell
Number.
Finally, in step 72, error map determined by selection or error function are in step 50 (Fig. 2) or step
In the production measurement in future occurred in rapid 86,96 (Fig. 3).
Therefore, in method for optimizing as described above, equipment is normal day by day for during measuring workpiece at it
Elapse and " acquistion " its potential error map or error function over time.Error map or error function are to be based on having determined that
For the combination of the error amount of correction error than possible other better offs.As during comparing measuring apparatus, to specific work
The comparison of part and corresponding calibrated workpiece occurs on the basis of potential error map/function herein.Finally, operator can be to latent
There is enough confidence in the accuracy of error map/function, so as to determine to use machine with the traditional approach of coordinate measuring apparatus
To measure absolute coordinate and size, rather than only obtain the measured value of comparative measurement.
Method for optimizing as described above can be with us international application WO 2013/021157, WO 2013/
Technical combinations described in 140118 or WO 2014/181134.Those technologies produce the error map or error of temperature dependent
Function.Equally, figure 2 above caused error map or function into Fig. 4 may depend on temperature.For example, in step 42, step
Rapid 80 and step 88 in, the temperature of calibrated workpiece is measured when can measure calibrated workpiece in Fig. 1 equipment.This temperature value exists
Stored in step 44, step 82 and step 90 with together with corresponding error amount.Then, in step 46, step 84 and step 92,
Selection is related to the combination of the error amount of same or similar temperature (in predetermined temperature tolerance limit).So produce and be related to corresponding temperature
A grouping error mapping or function.When measurement produces workpiece, its temperature is monitored, and use suitable error map or function
Correct measured value.
Claims (15)
1. a kind of method of further calibration dimension measuring apparatus, the dimension measuring apparatus is mapped by initial error or error
Function is calibrated,
Methods described includes：
The production workpiece in the measuring apparatus is measured, the production workpiece is nominal by First Series caused by production process
One in identical workpiece；
The measured value for comparing the production workpiece is used for the production workpiece with what is obtained from source outside the measuring apparatus
Calibration value, to produce one or more error amounts；
It is determined that one or more updated error maps or error function, the updated error map or error function will
Some or all of described error amount and all or part of group in initial error mapping or the initial error function
Close；
It is characterized in that：
Determine one or more of the updated error map or error function whether than the initial error mapping or
Error function preferably corrects measurement error；And
If it is determined that error map or error function can provide more preferable correction, the error map or error function are selected with that
For the measured value of the one or more other workpiece of correction.
2. according to the method for claim 1, wherein, by by more only being reflected with the initial error in the error amount
The all or part penetrated or with the initial error combination of function, or by the way that the error amount and the initial error mapped
Only a part combines, to determine one or more updated error maps or error function.
3. the method according to claim 1 or claim 2, comprising the one or more other workpiece of measurement, and make
The measured value of one or more of other workpiece is corrected with the selected error map or error function.
4. according to the method described in any one of preceding claims claim, wherein, one or more of other works
Part includes the production workpiece from the nominally identical workpiece of the First Series.
5. according to the method described in any one of preceding claims claim, wherein, one or more of other works
Part is included from the production workpiece by the nominally identical workpiece of second series caused by production process, and it is different from first system
The workpiece of row.
6. according to the method described in any one of preceding claims claim, further include：
The production workpiece from the nominally identical workpiece of second series is measured in the measuring apparatus；
Compare the measured value of the production workpiece from the second series and obtained from the source outside the measuring apparatus
For the calibration value of the production workpiece, to produce one or more other error amounts；
It is determined that one or more other updated error maps or error function, one or more described other is updated over
Error map or error function by some or all of described other error amount and previously determined error map or letter
All or part of combination in number；
Determine whether one or more of the other updated error map or error function can be provided than previously true
Fixed error map or the error function preferably correction to measurement error；And
If it is determined that error map or error function can provide more preferable correction, the error map or error function are selected with that
For the measured value of the one or more other workpiece of correction.
7. according to the method for claim 6, wherein, the workpiece of the second series is different from the First Series
The workpiece.
8. according to the method for claim 6, wherein, the workpiece of the second series is described with the First Series
Workpiece is located at the diverse location in the equipment.
9. according to the method described in any one of preceding claims claim, wherein, produce in the following manner described first
Beginning error map or error function：The measurement production workpiece in the measuring apparatus；And the measurement of the production workpiece
Value and the calibration value for being used for the production workpiece obtained from the source outside the measuring apparatus.
10. the method according to claim 11, wherein, for producing described in the initial error mapping or error function
Production workpiece is one in the nominally identical workpiece of the First Series.
11. the method according to claim 11, wherein, for producing described in the initial error mapping or error function
Production workpiece is one in a series of nominally identical workpiece, and it is different from the workpiece of the First Series.
12. a kind of software program for dimension measuring apparatus, the software program is configured to perform the measuring apparatus
According to the method described in any one of preceding claims claim.
13. the software program according to claim 12 for dimension measuring apparatus, it is configured to set the measurement
It is standby to perform following steps：By the way that the information on the error map or error function is presented into operator to determine and select
One in the updated error map or error function, and received from the operator to error map or error letter
Several selections.
It is soft described in itself and with good grounds claim 12 or claim 13 14. a kind of controller for dimension measuring apparatus
Part program.
15. a kind of dimension measuring apparatus, it is programmed with the software program according to claim 12 or claim 13.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB1503490.3 | 2015-03-02 | ||
| GB201503490A GB201503490D0 (en) | 2015-03-02 | 2015-03-02 | Calibration of dimensional measuring apparatus |
| PCT/GB2016/050528 WO2016139458A1 (en) | 2015-03-02 | 2016-03-01 | Calibration of dimensional measuring apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107532893A true CN107532893A (en) | 2018-01-02 |
Family
ID=52876355
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201680025491.2A Pending CN107532893A (en) | 2015-03-02 | 2016-03-01 | The method for calibrating dimension measuring apparatus |
Country Status (5)
| Country | Link |
|---|---|
| EP (1) | EP3265749A1 (en) |
| JP (1) | JP2018511046A (en) |
| CN (1) | CN107532893A (en) |
| GB (1) | GB201503490D0 (en) |
| WO (1) | WO2016139458A1 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114111515A (en) * | 2022-01-26 | 2022-03-01 | 建研院检测中心有限公司 | Protective layer thickness measuring method and system adopting steel bar protective layer thickness structure standard sample |
| CN115060179A (en) * | 2022-03-31 | 2022-09-16 | 苏州维嘉科技股份有限公司 | Tool diameter detection system and method, machining equipment and computer storage medium |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL2021673B1 (en) | 2018-09-20 | 2020-05-07 | Prodim Int B V | A method of calibrating an apparatus for pointing spatial coordinates as well as a corresponding apparatus. |
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| CN1666085A (en) * | 2002-07-04 | 2005-09-07 | 瑞尼斯豪公司 | Method of calibrating a scannig system |
| CN1856690A (en) * | 2003-09-22 | 2006-11-01 | 瑞尼斯豪公司 | Method of error compensation in a coordinate measuring machine |
| US7712224B2 (en) * | 2007-10-03 | 2010-05-11 | Hexagon Metrology Ab | Validating the error map of CMM using calibrated probe |
| CN101861510A (en) * | 2007-09-14 | 2010-10-13 | 海克斯康测量技术有限公司 | Method of aligning arm reference systems of a multiple- arm measuring machine |
| WO2013140118A2 (en) * | 2012-03-21 | 2013-09-26 | Renishaw Plc | Method and apparatus for inspecting workpieces |
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2015
- 2015-03-02 GB GB201503490A patent/GB201503490D0/en not_active Ceased
-
2016
- 2016-03-01 WO PCT/GB2016/050528 patent/WO2016139458A1/en active Application Filing
- 2016-03-01 JP JP2017546705A patent/JP2018511046A/en active Pending
- 2016-03-01 EP EP16707556.3A patent/EP3265749A1/en not_active Withdrawn
- 2016-03-01 CN CN201680025491.2A patent/CN107532893A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1666085A (en) * | 2002-07-04 | 2005-09-07 | 瑞尼斯豪公司 | Method of calibrating a scannig system |
| CN1856690A (en) * | 2003-09-22 | 2006-11-01 | 瑞尼斯豪公司 | Method of error compensation in a coordinate measuring machine |
| CN101861510A (en) * | 2007-09-14 | 2010-10-13 | 海克斯康测量技术有限公司 | Method of aligning arm reference systems of a multiple- arm measuring machine |
| US7712224B2 (en) * | 2007-10-03 | 2010-05-11 | Hexagon Metrology Ab | Validating the error map of CMM using calibrated probe |
| WO2013140118A2 (en) * | 2012-03-21 | 2013-09-26 | Renishaw Plc | Method and apparatus for inspecting workpieces |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114111515A (en) * | 2022-01-26 | 2022-03-01 | 建研院检测中心有限公司 | Protective layer thickness measuring method and system adopting steel bar protective layer thickness structure standard sample |
| CN114111515B (en) * | 2022-01-26 | 2022-05-20 | 建研院检测中心有限公司 | Protective layer thickness measuring method and system adopting steel bar protective layer thickness structure standard sample |
| CN115060179A (en) * | 2022-03-31 | 2022-09-16 | 苏州维嘉科技股份有限公司 | Tool diameter detection system and method, machining equipment and computer storage medium |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2018511046A (en) | 2018-04-19 |
| GB201503490D0 (en) | 2015-04-15 |
| EP3265749A1 (en) | 2018-01-10 |
| WO2016139458A1 (en) | 2016-09-09 |
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