CN107339931B - Air pressure adjustment without motion part interferometer - Google Patents
Air pressure adjustment without motion part interferometer Download PDFInfo
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- CN107339931B CN107339931B CN201710513509.XA CN201710513509A CN107339931B CN 107339931 B CN107339931 B CN 107339931B CN 201710513509 A CN201710513509 A CN 201710513509A CN 107339931 B CN107339931 B CN 107339931B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02015—Interferometers characterised by the beam path configuration
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Abstract
The invention discloses a kind of air pressure adjustment without motion part interferometers, including semi-transparent semi-reflecting lens, 2 pieces of reflecting mirrors, light path chamber, compensated cavity, pressure regulation system.Light path chamber and compensated cavity are placed in two optical paths of interferometer.Pressure regulation system is connected on light path chamber and compensated cavity, including barostat, air pressure control module and connecting pipe and valve.The present invention increases light path chamber and compensation length in traditional Michelson interferometer optical path, substitutes index glass movement by air pressure change to generate change in optical path length.To realize the target of without motion part on interferometer light path, processing request and manufacturing cost are reduced.
Description
Technical field
The present invention relates to interferometer field, specifically a kind of air pressure adjustment without motion part interferometer.
Background technique
Interferometer is common equipment in non-dispersed optical detection, is the core component of Fourier's infrared equipment.Interferometer
Chemical analysis, identification, Precision Machining detection, real-time monitoring and in terms of have a wide range of applications.
Conventional interferometers have two kinds of fundamental types of Michelson and Fabry-Perot, wherein with Michelson's type interferometer
It is most commonly seen.Basic model Michelson interferometer mechanically changes light path, to realize the regulation and control to interference.
The position precisions of the reflecting optics of basic model Michelson interferometer needs to control the order of magnitude in optical wavelength, thus its volume and
Weight is all bigger.The interference of light requires the trajectory height of two-way light to be overlapped, so the angle of reflecting mirror is also required to proper calibration.This
It is a little to require all to limit the manufacture and application of interferometer.There is the interferometer structure using pyramid mirror the nineties in last century, it should
Structure solves the problems, such as interferometer reflection angle, but the position precision of its movement parts still relies on the quality of machining.
Since position precision of the interferometer to optical path is very sensitive, and conventional dry interferometer all certainly exists crucial movement portion
Part, this causes the machining accuracy of optical interdferometer and mechanical stability requirements higher, remains high to cause cost of manufacture,
Difficulty is brought to the application of the optical detection based on interferometer.It is done currently, the precision of moving component has become restriction
One significant difficulty of interferometer manufacturing cost.
Summary of the invention
The object of the present invention is to provide a kind of to realize the air pressure adjustment without motion that interference controls independent of moving component
Part interferometer, with the machine error for reducing interferometer production difficulty, abatement device is generated because rubbing or rotating.In interferometer core
The inadequate natural endowment of mechanical moving element is avoided on heart position.
In order to achieve the above object, the technical scheme adopted by the invention is as follows:
Air pressure adjustment without motion part interferometer, including the semi-transparent semi-reflecting lens in Michelson's interferometer routine light channel structure,
And it is located at semi-transparent semi-reflecting lens reflected light path, the reflecting mirror on transmitted light path, it is characterised in that: in the saturating of semi-transparent semi-reflecting lens
It penetrates in optical path, common optical axis is provided with light path chamber between semi-transparent semi-reflecting lens and corresponding reflecting mirror, as saturating where light path chamber
It penetrates optical path and forms adjustable optical path, light path chamber side wall has the venthole being connected to for barometer and leading to for barostat connection
Stomata, the barometer monitor light path chamber air pressure inside, and barometer and an air pressure control module by corresponding venthole
Connection, the pressure signal of barometric surveying is received by air pressure control module, and air pressure control module obtains accordingly according to pressure signal
Pressure control signal and pressure control signal is sent to barostat, the barostat is according to pressure control signal
Light path chamber air pressure inside is adjusted by corresponding venthole, changes adjusting Michael by adjusting light path chamber air pressure inside
The light path of inferior interferometer.
The air pressure adjustment without motion part interferometer, it is characterised in that: the light path chamber is tubular housing, and cavity two is managed
End is separately installed with quartz window sheet, and cavity side is connected with a pair of of venthole, and two ventholes are respectively perpendicular to chamber central axis,
In a venthole be connected to barometer, another venthole is connected to barostat.
The air pressure adjustment without motion part interferometer, it is characterised in that: the barostat by several sectional areas not
Same piston cylinder is constituted, and each piston cylinder is driven by corresponding driving motor respectively, and each piston cylinder is respectively equipped with just
Property lock, corresponding with the light path chamber venthole connection respectively of the venthole of multiple piston cylinders, the air pressure control module respectively with
The driving motor of each piston cylinder and rigid lockhole control connection.
The air pressure adjustment without motion part interferometer, it is characterised in that: further include structure compensation identical with light path chamber
Chamber, compensated cavity inside optical path length are less than light path chamber, and two pipe end of compensated cavity is separately installed with quartz window sheet, and quartzy in compensated cavity
Window is identical with the quartz window sheet of light path chamber, and concentrically axis is arranged on the reflected light path of semi-transparent semi-reflecting lens the compensated cavity
And between semi-transparent semi-reflecting lens and corresponding reflecting mirror, compensated cavity side wall is equipped with a pair of of venthole, and two ventholes are respectively perpendicular
In compensated cavity central axis, one of venthole is deflated by blow valve to outside, the air pressure control module and vent valve control
System connection forms fixed optical path as the reflected light path where compensated cavity, and by the quartz window sheet of compensated cavity compensation light path chamber quartz
The chromatic dispersion effects of window, to evade influence of the dispersion to interference.
The air pressure adjustment without motion part interferometer, it is characterised in that: another venthole of the compensated cavity can also lead to
It crosses between communicating valve connection access barostat venthole corresponding with light path chamber, the air pressure control module and communicating valve control
System connection is connected to compensated cavity and light path chamber by communicating valve, at this time compensated cavity when the high-precision for needing to carry out optical path difference is adjusted
The reflected light path at place is no longer fixed optical path.
The air pressure adjustment without motion part interferometer, it is characterised in that: the light path chamber, compensated cavity are by high-intensitive material
Material is made, and can bear higher air pressure to realize large-scale variation.
The operation principle of the present invention is that:
When air pressure is near normal atmosphere (An), refractive index is substantial linear related to air pressure.In Michelson
Increase the identical light path chamber of structure and compensated cavity in two optical paths of interferometer, wherein light path chamber can changing by air pressure inside
Modified tone section light path, when air pressure increases, light path increases, otherwise light path reduces.The effective member of compensated cavity is two pieces of quartz window sheets,
It acts as the chromatic dispersion effects for offsetting light path chamber window can not use compensated cavity for using the interferometer of monochromatic source.
For the change in optical path length for accurately controlling light path chamber, need accurately to control its air pressure inside, light path chamber is external
Air pressure control module can realize dynamic regulation by instant test chamber air pressure inside, and then realize to light path chamber air pressure/light
The accurate control of journey.Sensitivity, under the premise of guaranteeing mechanical strength, the length of the intracavitary portion's air column of light path are adjusted to increase light path
Degree should be thin as far as possible.Typically, since the thickness change for the quartz window sheet that pressure change generates should be much smaller than operation wavelength.
Air refraction is 1.00027652 under normal pressure, close with vacuum, in this way, every millimeter of vacuum and air exist
The optical path difference of 276.52nm, about half of visible wavelength.Air pressure-light path coefficient k of air, k=can be defined accordingly
276.52nm/(atm.mm).For the optical path of long L (mm), the relationship of barometric fluctuation dP (atm) and optical path fluctuations dL (nm) are as follows:
DL=k × L × dP
Calculated relationship accordingly, length of the optical path in light path chamber determine precision, and for same optical path fluctuations, optical path is got over
It is short, it is lower to the control accuracy requirement of air pressure.By taking the visible light of 500nm wavelength as an example, when light path control precision is 10nm, do
Interferometer is enough accurately to control its light interference state, uses 1mm light path chamber at this time, and round-trip optical path length is 2mm, the light path of 10nm
It is 0.018 atmospheric pressure, about 1832Pa that difference control, which needs barometric fluctuation,.Actually current pressure sensor is easily achieved
The measurement of 1500Pa precision, therefore for the light path chamber of 1mm thickness, the control precision of light path can be easily reached within 10nm.
For shorter wavelength ultraviolet light, the light path control precision needed is also higher, for what be can be used normally in air
Ultraviolet limiting wave length 185nm wants accurately control interference, need to control optical path fluctuations about 4nm (2% wavelength), needs under above situation
Realize the air pressure precision of about 700Pa, requirement of this precision to pressure measurement is excessively high, therefore the present invention devises compensated cavity and light path
The mode that chamber is used in conjunction realizes the requirement of reduction pressure control precision that is reducing optical path length.
For hollow workpiece, the inner space of compensated cavity and light path chamber certainly exists certain difference, in low cost
Under processing conditions, 1mm cavity can have the mismachining tolerance of 0.1mm.So when light path chamber is connected to compensated cavity and to outer closure,
Actually active light path cavity length will be no more than 0.1mm in optical path, at this point, according to calculating noted earlier, the pressure control of 2kPa
Precision can bring the light path less than 1nm to control precision, after calibration, it is sufficient to it is dry to complete ultraviolet-visible-infrared full-wave section
Relate to accurate control.
The pollution for needing to avoid gas and extraneous frequent exchange in cavity when interferometer work and generating, what the present invention designed
More combination barostats are adjusted on different air pressure levels step by step using the piston cylinder of different bores, are realized to closed-loop
The control with a wide range of precise of domestic air pressure.Such as: 3 piston cylinder bores are respectively 5:3:1, then the micro movement of its piston shift-in row
When, the air pressure change of generation is then 25:9:1, can according to need the air pressure adjustment carried out from coarse adjustment to fine tuning step by step.
The present invention is a kind of Michelson interferometer that can not use optical movement component, and each optical path component part is equal
No moving part and use rigid connection, to guarantee that it has extremely strong repellence to vibration.Since its each optical component is fastening
Part, the interferometer require also to be significantly lower than traditional interferometer convenient for production and assembling to the processing technology of component.
Detailed description of the invention
Fig. 1 is structure of the invention schematic diagram.
Fig. 2 is light path chamber and compensated cavity diagrammatic cross-section.
Fig. 3 is pressure controller structural schematic diagram.
Specific embodiment
As shown in Figure 1, air pressure adjustment without motion part interferometer, including half in Michelson's interferometer routine light channel structure
Saturating semi-reflective mirror 5, and it is located at 5 reflected light path 10 of semi-transparent semi-reflecting lens, the reflecting mirror 2 and 1 on transmitted light path 11, semi-transparent half
On the transmitted light path 11 of anti-mirror 5, common optical axis is provided with light path chamber 3 between semi-transparent semi-reflecting lens 5 and corresponding reflecting mirror 1, by
Transmitted light path 11 where light path chamber 3 forms adjustable optical path, 3 side wall of light path chamber have the venthole 32 that is connected to for barometer 6 with
And for the venthole 33 that barostat 7 is connected to, barometer 6 monitors 3 air pressure inside of light path chamber by corresponding venthole 32, and
Barometer 6 is connect with an air pressure control module 8, receives the pressure signal that barometer 6 measures, air pressure by air pressure control module 8
Control module 8 obtains corresponding pressure control signal according to pressure signal and pressure control signal is sent to barostat 7,
Barostat 7 is adjusted light path chamber air pressure inside by corresponding venthole 33 according to pressure control signal, passes through tune
It saves 3 air pressure inside of light path chamber and changes the light path for adjusting Michelson's interferometer.
As shown in Fig. 2, light path chamber 3 is tubular housing, two pipe end of cavity is separately installed with quartz window sheet 34,35, cavity one
Side is connected with a pair of of venthole 32,33, and two ventholes 32,33 are respectively perpendicular to chamber central axis, one of venthole 32 with
Barometer 6 is connected to, another venthole 33 is connected to barostat 7.
As shown in figure 3, barostat 7 is made of the different piston cylinder 71 of several sectional areas, each piston cylinder respectively by
Corresponding driving motor 73 drives, and each piston cylinder 71 is respectively equipped with rigidity lock 74, the outlet of multiple piston cylinders 71
Corresponding with light path chamber 3 venthole 33 is connected to respectively in hole, the driving motor 73 with each piston cylinder 71 respectively of air pressure control module 8
It controls and connects with rigid lockhole 74.
As shown in Figure 1, further including structure compensated cavity 4 identical with light path chamber 3,4 inside optical path length of compensated cavity is less than light
Journey chamber 3,4 liang of pipe ends of compensated cavity are separately installed with quartz window sheet 44,45, and quartz window sheet 44,45 and light path chamber 3 in compensated cavity 4
Quartz window sheet 34,35 it is identical, concentrically axis is arranged on the reflected light path 10 of semi-transparent semi-reflecting lens 5 and is located at compensated cavity 4
Between semi-transparent semi-reflecting lens 5 and corresponding reflecting mirror 2,4 side wall of compensated cavity is equipped with a pair of of venthole 42,43, two 42,43 points of ventholes
Not perpendicular to 4 central axis of compensated cavity, one of venthole 43 is deflated by blow valve 14 to outside, air pressure control module 8 with
The control connection of vent valve 14, forms fixed optical path by the reflected light path 10 where compensated cavity 4, and by the quartz window sheet of compensated cavity 4
34, the chromatic dispersion effects of 35 compensation 3 quartz window sheets 34,35 of light path chamber, to evade influence of the dispersion to interference.
It is corresponding with light path chamber 3 that another venthole 42 of compensated cavity 4 can also be connected to access barostat 7 by communicating valve 13
Venthole 33 between, air pressure control module 8 and communicating valve 13 control connect, when need to carry out optical path difference high-precision adjust
When, compensated cavity 4 and light path chamber 3 are connected to by communicating valve 13, the reflected light path where compensated cavity 4 is no longer fixed optical path at this time.
Light path chamber 3, compensated cavity 4 are made of high-strength material, can bear higher air pressure to realize large-scale variation.
As shown in Figure 1, air pressure adjustment without motion part infrared interferometer, including reflecting mirror 1,2, light path chamber 3, compensated cavity 4, half
Saturating semi-reflective mirror 5, barometer 6, barostat 7 and air pressure control module 8, wherein reflecting mirror 1,2 is Michelson interferometer
The reflecting mirror of two-way light can be conventional plane mirror, or pyramid mirror.When using interferometer, incident light 9 is by semi-transparent half
Anti- mirror beam splitting, two-way light arrives reflecting mirror 1 and 2 through light path chamber 3 and compensated cavity 4 respectively along optical path 10,11, then respectively along optical path
10,11 semi-transparent semi-reflecting lens 5 are returned to, and closes beam on emitting light path 12 and forms interference.Communicating valve 13 controls light path chamber 3 and compensated cavity
Connection between 4, blow valve 14 control the connection between compensated cavity 4 and air vent 15.
As shown in Fig. 2, light path chamber 3 and compensated cavity 4 are core of the invention component, light path chamber 3 is by cavity 31, venthole
32,33 and quartz window sheet 34,35 form.Barometer 6 monitors the air pressure inside light path chamber 3 by venthole 32, inside light path chamber 3
Air pressure is adjusted by barostat 7 by venthole 33, and air pressure control module 8 receives the pressure signal that barometer 6 measures
81, and give pressure control signal 82 to barostat 7 as needed.The structure of compensated cavity 4 is identical with light path chamber 3,
Internal optical path length is slightly less than light path chamber 3, is made of cavity 41, venthole 42,43 and quartz window sheet 44,45.Compensated cavity 4 it is interior
Portion and atmosphere pass through venthole 42 and connect valve, pass through venthole 43 and connect blow valve 14.Under normal circumstances, communicating valve 13 closes
Disconnected, blow valve 14 is opened, to keep in compensated cavity air pressure as normal pressure.The function of compensated cavity 4 has a two o'clock: first, the stone of compensated cavity 4
English window 44,45 is identical with the quartz window sheet 34,35 of light path chamber 3, can produce the chromatic dispersion effects of same degree, to advise
Keep away influence of the dispersion to interference；Second, when operation wavelength is too short to be caused to be difficult to control accurately air pressure, blow valve 14 can be turned off
Communicating valve 13 is then opened, to reduce the effective optical path length of light path chamber 3, reduces pressure controling precision requirement.For Single wavelength
Interference, due to not having to consider dispersion factor, therefore compensated cavity 4 can not used, but when operation wavelength is too small, it is still desirable to
Use the second function of compensated cavity 4.
As shown in figure 3, barostat 7 is connect by venthole 33 with light path chamber 3, it is at a closed connection parallel
System 70, barostat 7 is linked together by the different piston cylinder 71 of several sectional areas, and each piston is by corresponding driving motor
73 drivings, and it is equipped with corresponding rigidity lock 74.The working condition of driving motor 72 passes through pressure control by air pressure control module 8
Signal 82 determines.The open and-shut mode of lock 74 is also determined by air pressure control module 8 by pressure control signal 82.Different bores
When piston cylinder 71 and piston 72 move, different degrees of influence can be generated to the air pressure of connected system 70.For example, when needing to adjust
When air pressure is to 421kPa, air pressure can be made to be located at 420kPa attachment with pioneer piston 72.a, locking lock 74.a then drives
Piston 72.b, makes air pressure further approach 421kPa, and locking lock 74.b finally drives piston 72.c, keeps air pressure precise and stable
In the position 421.00kPa, locking lock 74.c, to complete to accurately control the air pressure of light path chamber 3.
When using interferometer, the air pressure in light path chamber 3 can be adjusted, can be obtained required according to the needs of interference condition
The interference effect wanted.For static interference, it is only necessary to adjust air pressure, for dynamic interference, driving motor 73 can be allowed
Process movement as required, to generate the dynamic air pressure in light path chamber 3 --- change in optical path length.
Claims (6)
1. air pressure adjustment without motion part interferometer, including the semi-transparent semi-reflecting lens in Michelson's interferometer routine light channel structure, with
And it is located at semi-transparent semi-reflecting lens reflected light path, the reflecting mirror on transmitted light path, it is characterised in that: in the transmission of semi-transparent semi-reflecting lens
In optical path, common optical axis is provided with light path chamber between semi-transparent semi-reflecting lens and corresponding reflecting mirror, as the transmission where light path chamber
Optical path forms adjustable optical path, and light path chamber side wall is with the venthole being connected to for barometer and for the ventilation of barostat connection
Hole, the barometer monitors light path chamber air pressure inside by corresponding venthole, and barometer and an air pressure control module connect
It connects, the pressure signal of barometric surveying is received by air pressure control module, air pressure control module obtains accordingly according to pressure signal
Pressure control signal is simultaneously sent to barostat by pressure control signal, and the barostat is logical according to pressure control signal
It crosses corresponding venthole light path chamber air pressure inside is adjusted, changes adjusting Michelson by adjusting light path chamber air pressure inside
The light path of interferometer.
2. air pressure adjustment without motion part interferometer according to claim 1, it is characterised in that: the light path chamber is tubular cavity
Body, two pipe end of cavity are separately installed with quartz window sheet, and cavity side is connected with a pair of of venthole, and two ventholes are respectively perpendicular to chamber
Body central axis, one of venthole are connected to barometer, another venthole is connected to barostat.
3. air pressure adjustment without motion part interferometer according to claim 1, it is characterised in that: if the barostat by
The different piston cylinder of dry sectional area is constituted, and each piston cylinder is driven by corresponding driving motor respectively, each piston cylinder point
Not equipped with rigid lock, the venthole connection corresponding with light path chamber respectively of the venthole of multiple piston cylinders, the pressure control
Module is connected with the driving motor of each piston cylinder and rigid lockhole control respectively.
4. air pressure adjustment without motion part interferometer according to claim 1, it is characterised in that: further include structure and light path chamber
Identical compensated cavity, compensated cavity inside optical path length are less than light path chamber, and two pipe end of compensated cavity is separately installed with quartz window sheet, and mends
It is identical with the quartz window sheet of light path chamber to repay quartz window sheet in chamber, concentrically semi-transparent semi-reflecting lens are arranged in axis to the compensated cavity
On reflected light path and between semi-transparent semi-reflecting lens and corresponding reflecting mirror, compensated cavity side wall is equipped with a pair of of venthole, two ventilations
Hole is respectively perpendicular to compensated cavity central axis, and one of venthole is deflated by blow valve to outside, the air pressure control module
It controls and connects with vent valve, fixed optical path is formed as the reflected light path where compensated cavity, and compensated by the quartz window sheet of compensated cavity
The chromatic dispersion effects of light path chamber quartz window sheet, to evade influence of the dispersion to interference.
5. air pressure adjustment without motion part interferometer according to claim 4, it is characterised in that: another is logical for the compensated cavity
Stomata can be also connected between access barostat venthole corresponding with light path chamber by communicating valve, the air pressure control module
It controls and connects with communicating valve, when the high-precision for needing to carry out optical path difference is adjusted, compensated cavity and light path chamber are connected to by communicating valve,
The reflected light path where compensated cavity is no longer fixed optical path at this time.
6. air pressure adjustment without motion part interferometer according to claim 1 or 4, it is characterised in that: the light path chamber, compensation
Chamber is made of high-strength material, can bear higher air pressure to realize large-scale variation.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201710513509.XA CN107339931B (en) | 2017-06-29 | 2017-06-29 | Air pressure adjustment without motion part interferometer |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201710513509.XA CN107339931B (en) | 2017-06-29 | 2017-06-29 | Air pressure adjustment without motion part interferometer |
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| CN107339931A CN107339931A (en) | 2017-11-10 |
| CN107339931B true CN107339931B (en) | 2019-04-16 |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN87208603U (en) * | 1987-05-25 | 1988-05-11 | 南京工学院 | Semiconductor laser radial width testing instrument using pressure scanning |
| JPH10281716A (en) * | 1997-04-08 | 1998-10-23 | Nikon Corp | Laser interferometer |
| CN101868688A (en) * | 2007-11-21 | 2010-10-20 | 约翰尼斯海登海恩博士股份有限公司 | Interferometer arrangement and method for the operation thereof |
| CN202119712U (en) * | 2011-04-27 | 2012-01-18 | 广东外语外贸大学 | System for measuring air refractive index |
| CN103698300A (en) * | 2013-12-30 | 2014-04-02 | 四川大学 | Air chamber optical path regulator |
| CN205749282U (en) * | 2016-05-11 | 2016-11-30 | 黄河科技学院 | A kind of experimental provision utilizing michelson interferometer optical path to measure air refraction |
-
2017
- 2017-06-29 CN CN201710513509.XA patent/CN107339931B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN87208603U (en) * | 1987-05-25 | 1988-05-11 | 南京工学院 | Semiconductor laser radial width testing instrument using pressure scanning |
| JPH10281716A (en) * | 1997-04-08 | 1998-10-23 | Nikon Corp | Laser interferometer |
| CN101868688A (en) * | 2007-11-21 | 2010-10-20 | 约翰尼斯海登海恩博士股份有限公司 | Interferometer arrangement and method for the operation thereof |
| CN202119712U (en) * | 2011-04-27 | 2012-01-18 | 广东外语外贸大学 | System for measuring air refractive index |
| CN103698300A (en) * | 2013-12-30 | 2014-04-02 | 四川大学 | Air chamber optical path regulator |
| CN205749282U (en) * | 2016-05-11 | 2016-11-30 | 黄河科技学院 | A kind of experimental provision utilizing michelson interferometer optical path to measure air refraction |
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| CN107339931A (en) | 2017-11-10 |
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Address after: High tech Zone Wenqu 230088 Hefei Road, Anhui province No. 8 Patentee after: ANHUI WANYI SCIENCE & TECHNOLOGY Co.,Ltd. Address before: Tianda high tech Zone 230088 Hefei Road, Anhui province No. 71 Huayi Science Park building B building Anhui instrument Patentee before: ANHUI WANYI SCIENCE & TECHNOLOGY Co.,Ltd. |