CN107331590B - Plesiochronous laser package system and method - Google Patents
Plesiochronous laser package system and method Download PDFInfo
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- CN107331590B CN107331590B CN201610284183.3A CN201610284183A CN107331590B CN 107331590 B CN107331590 B CN 107331590B CN 201610284183 A CN201610284183 A CN 201610284183A CN 107331590 B CN107331590 B CN 107331590B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/24—Manufacture or joining of vessels, leading-in conductors or bases
- H01J9/26—Sealing together parts of vessels
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/24—Manufacture or joining of vessels, leading-in conductors or bases
- H01J9/241—Manufacture or joining of vessels, leading-in conductors or bases the vessel being for a flat panel display
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Abstract
The present invention provides a kind of plesiochronous laser package system and method, the system comprises: controller module, laser module, laser scanning module, Temperature Measure Control module and host computer；It is modified by the laser power control signal that controller module exports Temperature Measure Control module in the single scan period, the hermetically sealed requirement of OLED display can not only be met, and the change of laser output power can be controlled within the single sweep operation period, improve the temperature uniformity of seal line corner, enable the more uniform Synchronous Heating of frit, realizes the accurate control of frit temperature curve.
Description
Technical field
The present invention relates to technical field of semiconductors, and in particular to a kind of plesiochronous laser dress body system and method.
Background technique
Optoelectronic semiconductor component is widely used to the every field of life.Wherein, OLED due to its good color ratio,
The features such as wide viewing angle, high response speed, becomes the hot spot of research, has a good application prospect.However, in OLED display
Electrode and organic layer it is very sensitive to oxygen and moisture, infiltrate through the oxygen of OLED device from external environment and moisture can serious curtailment
The service life of OLED device.Therefore, providing effective hermetically sealing for OLED device seems extremely important.
And the factor for influencing OLED device hermetically sealing mainly has:
Hermetically sealing should be provided to oxygen (10-3Centimetre3/ rice2/ day) and water (10-6Grams m2/ day) barrier；
The size of hermetically sealing answers (for example, being less than 2mm) as small as possible, so that so that it will not the rulers to OLED display
It is very little to have a adverse impact；
The temperature generated in seal process should not destroy the material (for example, electrode and organic layer) in OLED display.Example
Such as, the first pixel in OLED display apart from about 1-2 millimeters of seal of OLED should not be heated to height in seal process
In 100 DEG C of temperature；
The gas discharged in seal process should not generate pollution to the substance in OLED display；
Hermetically sealing should be able to make a connecting component (such as thin-film chromium electrodes) to enter OLED display.
In recent years, a kind of encapsulating method heated using frit auxiliary laser is applied to the sealing of OLED display.
Wherein frit doping is the material for having high-absorbility to specific wavelength of light, the characteristic with low melting point.Using
High-energy laser heats and softens frit, makes the cover-plate glass for having frit thereon and has between the base plate glass of OLED thereon
Form hermetically sealing, frit normally about 0.7 millimeter~1 mm wide, 6 millimeters~100 microns thickness.Laser quasi is used a kind of
The method of synchronization seals in the method for OLED display, and laser exports controllable laser energy and successively irradiates coating glass material at a high speed
Seal line, and repeat several scan periods, make the frit almost while heating and softening, formation hermetically sealing.At this
In kind scanning mode, if increasing pyrometer acquires the temperature fixed in every scan cycle and a little or done, so that it may which realization is pressed
The package temperature control of scan period variation.The mode of this plesiochronous heated frit of closed loop, is limited by temperature sampling and control
The frequency of system cannot achieve and control under high-speed condition the complete temperature of packaging line, therefore can not change between temperature sampling point
Become laser controlling power, i.e., can form non-uniform Temperature Distribution in the corner part of seal line.Inside frit it is this not
Uniform temperature is distributed the generation that will lead to crackle, residual stress or delamination problems, interferes or weaken cover-plate glass and base plate glass
Between air-tightness connection.
Base this, how to improve inside frit in the prior art uneven temperature distribution the problem of have become this field
The technical issues of technical staff's urgent need to resolve.
Summary of the invention
The purpose of the present invention is to provide a kind of plesiochronous laser package system and methods, and it is quasi- to solve above-mentioned frit closed loop
Thermo parameters method non-uniform problem when synchronous encapsulation is conducive to the package quality for improving OLED display.
In order to achieve the above objects and other related objects, the present invention provides a kind of plesiochronous laser package system, for close
Glass packages are sealed, the glass packages include cover-plate glass, frit, base plate glass, oled layer and electrode, the laser
Package system includes: controller module, laser module, laser scanning module, Temperature Measure Control module and host computer；Its
In,
The laser module is for issuing laser beam and being transmitted to the laser scanning module；
The laser scanning module is used for the laser beam projects in the frit, and along described in seal line scanning
Frit；
The Temperature Measure Control module corresponds to frit at one or more moment laser facula irradiations for measuring
Temperature, output laser power control signal to the controller module；
The controller module is used for laser module and laser scanning module described in synchronously control, and to the laser function
Output realizes laser power adjustment operation and laser motion scan behaviour to the laser module after rate control signal is modified
It synchronizes, output realizes laser scanning speed to the laser scanning module after being modified to laser scanning speed control signal
Degree adjustment operation operates synchronous with laser motion scan.
Optionally, the controller module is single controller or the control system that multiple controller combinations are formed, or collection
At the Control card being installed in the host computer.
Optionally, the laser scanning module includes servo movement mechanism, for changing the direction of the laser beam, is made
The laser beam deflects an angle on the basis of a fixing axle, along any direction.
Optionally, the deflection direction of the laser beam and deflection angle are sent to the laser by the controller module and sweep
Retouch the control signal control of module.
Optionally, the opening and closing of the output power of the laser beam and the laser module are by the controller
Module is sent to the control signal control of the laser module.
Optionally, the controller module by the unlatching of the output power of the laser beam and the laser module and
The movement with the servo movement mechanism is closed to match.
The present invention also provides a kind of plesiochronous laser package methods, comprising the following steps:
Step 1: providing on a laser beam projects to frit, the laser beam is made to scan the frit along seal line
One week, while the temperature that frit is corresponded at one or more moment laser facula irradiations is acquired, described one week is a scanning
Period；
Step 2: obtaining laser power control by the way that the temperature value of acquisition to be compared and calculate with set temperature value
Signal adjusts the laser beam according to the laser power control signal, the laser beam is made to exist within next scan period
Predetermined variation occurs for predetermined position, realizes that each point obtains uniform temperature rise within a scan period in the seal line, scans
While acquire the temperature that frit is corresponded at one or more moment laser facula irradiations；
Step 3: repeating step 2 until making the frit obtain enough energy, by cover-plate glass and base plate glass
It links together, forms hermetically sealing.
Optionally, the predetermined position includes fixed position and non-fixed position, and the fixed position includes positioned at described
The corner of electrode district and the seal line on base plate glass, the non-fixed position are the straightway in the seal line.
Optionally, corresponding temperature acquisition point of one or more moment is fixation position or the scan path on scan path
On non-fixed position.
Optionally, the laser beam is adjusted according to the laser power control signal, makes the laser beam in predetermined position
Predetermined variation occurs, specifically:
Keep the laser power control signal synchronous with the operation of laser motion scan, for non-solid in the scan path
Positioning is set, and controls laser function of the laser beam at the non-fixed position with the laser power control signal of acquisition
Rate；For the fixation position in the scan path, the laser power control signal is corrected according to scheduled power curve, is made
The laser power control signal generation linearly or nonlinearly changes, and controls the laser beam with revised laser power signal
In the laser power of the fixed position.
Optionally, the laser beam is adjusted according to the laser power control signal, makes the laser beam in predetermined position
Predetermined variation occurs, specifically:
Keep the scanning speed of the laser power control signal, laser beam synchronous with the operation of laser motion scan, with acquisition
Laser power of laser power control signal when controlling the laser beam flying, when scanning the fixed position, with
On the basis of the laser power control signal, according to the scanning speed of laser beam described in speed-scanning TRAJECTORY CONTROL curve amendment,
Change the scanning speed generation linearly or nonlinearly, the laser beam is controlled in the fixation with revised scanning speed
The scanning speed of position.
Optionally, the laser beam is adjusted according to the laser power control signal, makes the laser beam in predetermined position
Predetermined variation occurs, specifically:
Keep the scanning speed of the laser power control signal, laser beam synchronous with the operation of laser motion scan, for institute
The non-fixed position in scan path is stated, the laser beam is controlled described non-solid with the laser power control signal of acquisition
Position the laser power set；For the fixation position in the scan path, the laser is corrected according to scheduled power curve
Power control signal changes the laser power control signal generation linearly or nonlinearly, with revised laser power letter
Number control laser beam the fixed position laser power, while on the basis of the laser power control signal, root
According to the scanning speed of laser beam described in speed-scanning TRAJECTORY CONTROL curve amendment, the scanning speed occurs linear or non-thread
Property variation, the laser beam is controlled in the scanning speed of the fixed position with revised scanning speed.
Optionally, selecting the scan period starting point to the last period region is the start region of laser scanning, is being scanned
When the start region, on the basis of the laser power control signal, according to preset start region temperature curve, institute is corrected
Laser beam is stated in the scanning speed of the start region, makes the velocity variations phase of the raising and scanning of start region frit temperature
Matching.
Optionally, end region of the scan period end point to latter section of region for laser scanning is selected, is being scanned
When the end region, on the basis of the laser power control signal, according to preset end region temperature curve, institute is corrected
Laser beam is stated in the scanning speed of the end region, makes the velocity variations phase of the reduction and scanning of end region frit temperature
Matching.
Compared with prior art, plesiochronous laser package system and method provided by the present invention has below beneficial to effect
Fruit:
1, the laser power that the present invention exports temperature acquisition control module in the single scan period by controller module
Control signal is modified, and can not only meet the hermetically sealed requirement of OLED display, and can be in the single sweep operation period
The change of interior control laser output power, improves the temperature uniformity of seal line corner, enables frit more uniform
Synchronous Heating realizes the accurate control of frit temperature curve；
2, predetermined temperature profile is arranged with end region by starting in laser scanning in the present invention, so that start region and knot
The velocity variations of the variation and scanning of beam region frit temperature match, so as to improve laser in closed loop encapsulation process
The Temperature Distribution of opening point and halt, prevents burn-off phenomenon.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of plesiochronous laser package system provided by the embodiment of the present invention one.
Fig. 2 is frit-sealed OLED display top view provided by the embodiment of the present invention one.
Fig. 3 is the method flow diagram of plesiochronous laser package provided by the embodiment of the present invention one.
Fig. 4 is the structural schematic diagram of plesiochronous laser package system provided by the embodiment of the present invention two.
Fig. 5 is OLED display frit pattern schematic diagram provided by the embodiment of the present invention two.
Fig. 6 is revised power-scanning geometric locus schematic diagram provided by the embodiment of the present invention two.
Fig. 7 is revised power-scanning geometric locus schematic diagram provided by the embodiment of the present invention two.
Fig. 8 is power-scanning geometric locus schematic diagram in the Multiple-Scan period provided by the embodiment of the present invention two.
Fig. 9 is the laser power control curve synoptic diagram of the output of pyrometer controller provided by the embodiment of the present invention two.
Figure 10 is corrected output controlling curve schematic diagram provided by the embodiment of the present invention two.
Figure 11 is control system block diagram provided by the embodiment of the present invention two.
Figure 12 is scheduled speed-scanning TRAJECTORY CONTROL curve synoptic diagram provided by the embodiment of the present invention two.
Specific embodiment
To keep the contents of the present invention more clear and easy to understand, below in conjunction with Figure of description, the contents of the present invention are done into one
Walk explanation.Certainly the invention is not limited to the specific embodiment, and general replacement well known to those skilled in the art is also contained
Lid is within the scope of the present invention.
Secondly, the present invention has carried out detailed statement using schematic diagram, in detail that example of the present invention, for the ease of saying
Bright, schematic diagram is not partially enlarged in proportion to the general scale, should not be to this as restriction of the invention.
Core of the invention thought is: being exported by controller module to Temperature Measure Control module in the single scan period
Laser power control signal be modified, the hermetically sealed requirement of OLED display can not only be met, and can be in list
The change of control laser output power, improves the temperature uniformity of seal line corner in the secondary scan period, enables frit
Enough more uniform Synchronous Heatings, realize the accurate control of frit temperature curve.
[embodiment one]
Referring to FIG. 1, its structural schematic diagram for plesiochronous laser package system provided by the embodiment of the present invention one.Institute
Plesiochronous laser package system is stated for seal glass packaging body, as shown in Figure 1, the plesiochronous laser package system includes:
Controller module 110, laser module 111, laser scanning module 112, Temperature Measure Control module 113 and host computer 114；Its
In, the laser module 111 is for issuing laser beam 103 and being transmitted to the laser scanning module 112；The laser scanning
Module 112 is used to for the laser beam 103 being projeced into frit 122, and scans the frit along seal line；The temperature
Measurement control module 113 swashs for measuring the temperature for corresponding to frit 122 at one or more moment laser facula irradiations, output
Optical power control signal 104 is to the controller module 110；The controller module 110 is for laser described in synchronously control
Module 111 and laser scanning module 112, and export after being modified to the laser power control signal 104 to the laser
Device module 111, realize laser power adjustment operation it is synchronous with the operation of laser motion scan, to laser scanning speed control signal into
Output realizes laser scanning speed adjustment operation and the operation of laser motion scan to the laser scanning module 112 after row amendment
Synchronization.
The controller module 110 is single controller or the control system that multiple controller combinations are formed, or integrated peace
Loaded on the Control card in the host computer.The laser scanning module 112 includes servo movement mechanism, is had described in changing
The function in 103 direction of laser beam makes the laser beam 103 on the basis of a certain fixing axle in space, deflects one jiao along any direction
Spend θ.The deflection direction of the laser beam 103 and polarizing angle be it is controllable, changing rule is sent out by the controller module 110
It send to the control of control signal 101 of the laser scanning module 112.The servo movement mechanism can fast and accurately change institute
The deflection posture of laser beam 103 is stated, and the laser scanning module 112 can be sent to according to the controller module 110
Control the yaw motion feature that signal 101 controls laser beam 103 during the change, such as angular speed, angular acceleration.
The laser module 111 can generate the laser of specific wavelength, and light energy is sent to institute with certain power
State laser scanning module 112.The laser energy of above-mentioned certain power is real-time, tunable.Laser output power is excited optical power control
Signal control processed, the laser module 111 can control signal by responding power in a relatively short period of time, change output laser
Power.The opening and closing of the output power and the laser module 111 of the laser beam 103 are by the controller module
The 110 control signals 102 for being sent to the laser module 111 control.
Laser beam 103 is projeced on frit 122 by the laser scanning module 112.The laser beam 103 is in frit
122 surfaces form the hot spot 105 with specific morphology and size.The frit 122 is located at the cover board glass of glass packages 120
On glass 121.The representative instance of the glass packages 120 is OLED display, and primary structure includes cover-plate glass 121, glass
Glass material 122, base plate glass 123, oled layer 125 and electrode 124 form.Its cross-sectional view is as shown in Figure 1, top view such as Fig. 2 institute
Show.Through silk-screen printing, pre-sintering step precuring on the cover-plate glass 121, formed has centainly the frit 122
The round rectangle seal line of thickness.Oled layer 125 on the glass substrate 123 is located at the inside of frit-sealed line, simultaneously
There is the electrode 124 of connection OLED display inside and outside on the glass substrate 123, as shown in Figure 1.
The Temperature Measure Control module 113 can it is non-contacting, the light is measured with limited time/spatial resolution
The temperature of the frit of 105 position of spot, and with laser power control signal 104 constitute close loop control circuit, and by its
The controller module 110 is fed back to, realizes the closed-loop control of target temperature.
The controller module 110 can laser module 111 and the laser scanning module 112 described in synchronously control,
It realizes the open and close of the laser module 111, the control of beam output power, and the laser module can be made
111 open and close, the adjusting of laser power and the movement phase of servo movement mechanism in the laser scanning module 112
Match.Alternatively, the controller module 110 can be come with the high-resolution for being higher than the laser scanning module 112 control resolution ratio
The laser power control signal of the laser module 111 is controlled, and the control of the two is made to match.The controller module
110 can handle the laser power control signal that the Temperature Measure Control module 113 exports with enough resolution acquisitions, and
With scheduled rule and resolution changing laser power control signal, the control high resolution is in temperature acquisition control point
Resolution；The controller module 110 can control the laser with the control resolution ratio for being higher than temperature scaling factor circuit simultaneously
Scan module 112 and laser module 111.The controller module 110 can control 113 He of Temperature Measure Control module
Laser scanning module 112, to realize the matching of temperature sampling point and laser scanning track.
Referring to FIG. 3, its flow chart for plesiochronous laser package method provided by the embodiment of the present invention one.Such as Fig. 3
It is shown, the plesiochronous laser package method the following steps are included:
Step 1: providing on a laser beam projects to frit, the laser beam is made to scan the frit along seal line
One week, while the temperature that frit is corresponded at one or more moment laser facula irradiations is acquired, described one week is a scanning
Period；
Step 2: obtaining laser power control by the way that the temperature value of acquisition to be compared and calculate with set temperature value
Signal adjusts the laser beam according to the laser power control signal, the laser beam is made to exist within next scan period
Predetermined variation occurs for predetermined position, realizes that each point obtains uniform temperature rise within a scan period in the seal line, scans
While acquire the temperature that frit is corresponded at one or more moment laser facula irradiations；
Step 3: repeat step 2 until
The frit obtains enough energy, and cover-plate glass and base plate glass are linked together, and it is close to form air hermetic
Envelope.
Referring to FIG. 3, simultaneously as shown in connection with fig. 1, a kind of plesiochronous laser package method that the present invention will be described in detail proposes:
In step 1: controller module 110 controls laser module 111 and laser scanning module 112, by laser beam
103 are projected on frit 122, and the laser beam 103 is made to scan the frit along seal line.It is projected to from laser beam 103
The starting point of frit 122 starts, until laser beam 103, which returns to the point along seal line run-down, to be terminated, completes a scanning week
Phase.Within a scan period, by Temperature Measure Control module 113, acquires one or more moment laser faculas 105 and irradiate
The temperature of the corresponding frit 122 in place.
In step 2, the Temperature Measure Control module 113 passes through the temperature value that will be acquired and set temperature value carries out
Compare and calculate, obtain laser power control signal 104, within next scan period, is believed according to the laser power control
Numbers 104 adjustment laser beams 103, make the laser beam 103 that predetermined variation occur in predetermined position, realize in the seal line
Each point obtains uniform temperature rise within a scan period, and scanning while acquires at one or more moment laser facula irradiations
The temperature of corresponding frit 122.
Within a scan period, the frit 122 is successively heated after absorbing laser energy.Due to scanning speed
Comparatively fast, the frit 122 that can be approximately considered in seal line is subsequently heated.One or more moment, corresponding temperature was adopted
Collection point is the fixation position on scan path or the non-fixed position on scan path.The predetermined position include fixed position and
Non-fixed position, the fixed position include the corner of the electrode district and the seal line on the base plate glass, institute
Stating non-fixed position is the straightway in the seal line.
The Temperature Measure Control module 113 by the way that the temperature value of acquisition to be compared and calculate with set temperature value,
Obtain specific laser power control signal 1.The controller module 110 repairs the laser power control signal 103
It is just exporting afterwards to the laser module 111, the laser module 111 adjusts the laser beam 103, so that the laser beam
103 occur predetermined variation in predetermined position, realize that each point obtains uniform temperature rise within a scan period in the seal line,
The temperature that frit is corresponded at one or more moment laser facula irradiations is acquired while scanning.Within a scan period,
The controller module 110 obtains 1 or several laser power control signals, according to the laser power control signal 104
The laser beam 103 is adjusted, makes the laser beam 103 that predetermined variation occur in predetermined position, specifically: make the laser power
It is synchronous with the operation of laser motion scan to control signal 104, for the non-fixed position in the scan path, with what is currently acquired
Laser power control signal 104 controls laser power of the laser beam at the non-fixed position；For the scanning road
Fixation position in diameter corrects the laser power control signal 104 according to scheduled power control profile, makes the laser function
The rate control generation of signal 104 linearly or nonlinearly changes, and controls the laser beam described with revised laser power signal
The laser power of fixed position realizes laser power adjustment, so that the frit 122 in seal line be enable to obtain relatively
Relatively uniform temperature rise occurs for even energy, realizes the accurate control of frit temperature curve.The controller module 110
Laser power control signal and laser scanning module relative motion timing are controlled, laser power adjustment operation and laser movement are swept
Operation is retouched to synchronize.
In step 3, the controller module 110 controls the laser module 111 and laser scanning module 112, makes
The laser beam 103 repeats the above-mentioned scan period, using the laser scanning of multiple scan periods, obtains frit 122 enough
Energy, cover-plate glass 121 and base plate glass 123 are linked together, formed hermetically sealing.Enough energy, can
Its softening point (fusing point) is met and exceeded to show as frit temperature.The laser scanning of multiple scan periods, be
Under the control mode of temperature feedback, heats frit with preset temperature curve, be finally reached target temperature.
Beginning and stop area for laser scanning, using the control method of optimization.Such as: select the scan period
Starting point to the last period region be laser scanning start region, when scanning the start region, with the laser power control
On the basis of signal 104 processed, according to preset start region temperature curve, the laser beam is corrected in the scanning of the start region
Speed makes the velocity variations of the raising and scanning of start region frit temperature match；Select the scan period end point
It is the end region of laser scanning to latter section of region, when scanning the end region, with the laser power control signal
On the basis of, according to preset end region temperature curve, the laser beam is corrected in the scanning speed of the end region, makes to tie
The velocity variations of the reduction and scanning of beam region frit temperature match.So as to improve laser in closed loop encapsulation process
The Temperature Distribution of opening point and halt, prevents burn-off phenomenon.
In another embodiment provided by the invention, the controller module 110 receives the laser power control signal
It after 104, exports after can also being modified to scanning speed to the laser scanning module 112, and realizes that scanning speed adjusts
It operates synchronous with the operation of laser motion scan.Likewise, can also by the way of revising scanning speed and scan power simultaneously,
To reach same purpose.
Such as: the laser beam is adjusted according to the laser power control signal, sends out the laser beam in predetermined position
Raw predetermined variation, specifically: make the laser power control signal 104, the scanning speed of laser beam 103 and laser motion scan
Operation synchronizes, and the laser power when laser beam flying is controlled with the laser power control signal 104 of acquisition, is being scanned
When the fixed position, on the basis of the laser power control signal 104, according to speed-scanning TRAJECTORY CONTROL curve amendment
The scanning speed of the laser beam 103 changes the scanning speed generation linearly or nonlinearly, with revised scanning speed
The laser beam is controlled in the scanning speed of the fixed position.
Alternatively, adjust the laser beam 103 according to the laser power control signal 104, make the laser beam 103 pre-
Generation predetermined variation is set in positioning, specifically: make the scanning speed and laser of the laser power control signal 104, laser beam 103
Motion scan operation synchronizes, for the non-fixed position in the scan path, with the laser power control signal of acquisition
Laser power of the 104 control laser beams 103 in the non-fixed position；For the fixation position in the scan path,
The laser power control signal 104 is corrected according to scheduled power curve, makes the laser power control signal 104 that line occur
Property or nonlinear change control the laser beam in the laser power of the fixed position with revised laser power signal,
Simultaneously on the basis of the laser power control signal 104, according to laser beam described in speed-scanning TRAJECTORY CONTROL curve amendment
103 scanning speed changes the scanning speed generation linearly or nonlinearly, swashs so that the control of revised scanning speed is described
Scanning speed of the light beam in the fixed position.
[embodiment two]
On the basis of example 1, the present embodiment provides a kind of more specifically plesiochronous laser package system and sides
Method.
Referring to FIG. 4, its structural schematic diagram for plesiochronous laser package system provided by the embodiment of the present invention two.Such as
Shown in Fig. 4, the plesiochronous laser package system includes: scanning monitor 10, laser 11, pyrometer 12, pyrometer control
Device 13, scanning galvanometer 14 and computer (PC) 15.Wherein, the scanning monitor 10, laser 11, pyrometer 12, pyrometer control
Device 13, scanning galvanometer 14 and computer (PC) 15 processed are respectively equivalent to controller module described in embodiment one, laser module, temperature
The subordinate concept of degree measurement control module, laser scanning module and host computer 114.The laser 11 is connected to institute by optical fiber
State scanning galvanometer 14, the pyrometer 12 and laser emission path are coupled in the scanning galvanometer 14 by special optical texture
In, so that the pyrometer 12 is able to detect the temperature at laser beam irradiation hot spot.The laser 11 is directly connected by optical fiber
It is connected to the scanning galvanometer 14.The glass packages 120 sealed are by taking OLED display as an example, and sectional view is as shown in Figure 1, bow
View is as shown in Figure 2.Frit-sealed cable architecture schematic diagram in OLED display is as shown in Figure 5.
The plesiochronous laser package method that embodiment two described further below provides, comprising the following steps:
Firstly, the parameters such as target temperature or temperature curve, temperature acquisition and control frequency are handed down to by the PC15
The parameters such as scanning speed, track are handed down to the scanning monitor 10 by the pyrometer controller 13.
Secondly, control the laser 11 and scanning galvanometer 14 makes laser beam with spy on laser beam projects to frit
Fixed power and higher speed (for example, 3m/s) is moved along frit pattern；Control the laser 11 make laser beam with
The hot spot of certain morphology and size is radiated on the point frit of the a2 in Fig. 5, is started to export, along seal line run-down, be returned to
A2 point.A2 point is example points, it is to be understood that laser output starting point is not limited to the position.Within a scan period, institute
It states after frit absorbs laser energy and is successively heated.Since scanning speed is very fast, the glass that can be approximately considered in seal line
Material is subsequently heated.
Within an above-mentioned scan period, a kind of scan control mode is that the temperature of the pyrometer controller 13 is arranged
Degree acquisition and control frequency match with Current Scan speed, are a particular value.The temperature acquisition and control frequency can be real
A fixation of frit or the temperature of on-fixed point on acquisition scans track in a present scan period, such as Fig. 5 point s1.Root
According to the temperature and target temperature currently acquired, the pyrometer controller 13 calculates in a relatively short period of time and exports subsequent time
Laser power control signal.
In present scanning cycle, the scanning monitor 10 acquires the laser power that the pyrometer controller 13 exports
Control signal.On the basis of the signal, laser power control signal is modified in corner, is brought it about linear or non-thread
Property variation.Practical laser changed power occurs after temperature acquisition point s1, revised power-scanning geometric locus such as Fig. 6, figure
Shown in 7.Revised laser power control curve is not limited to diagramatic curve.The scanning monitor 10 exports modified laser function
Rate controls signal to the laser 11, and utilizes internal synchronization mechanism, moves modified laser power control signal and laser
Dynamic scan operation is synchronous, makes laser power that predetermined variation occur in predetermined position, so that each point in seal line be made to scan at one
More uniform temperature rise is obtained in period.
Finally, controlling the laser 11 and scanning galvanometer 14, laser beam is made to repeat the above-mentioned scan period, utilization is multiple
The laser scanning of scan period makes frit obtain enough energy, the cover-plate glass 121 is connect with base plate glass 123
Together, hermetically sealing is formed.Power-scanning geometric locus in the Multiple-Scan period is as shown in figure 8, but be not limited to Fig. 8.
The Multiple-Scan mode can be the setting pyrometer controller 13, make the frit in seal line with scheduled temperature
Curve heating and cooling.
Beginning and stop area to laser scanning, using the control method of optimization.A kind of optimization method is to start area
The predetermined temperature profile of the pyrometer controller 13 is arranged such as the a1 point in Fig. 4 in domain, makes a1 point to a2 point frit temperature
Raising the phenomenon that matching with the velocity variations of the 14 inner scanning mechanism of scanning galvanometer, being unlikely to generation burning；Work as institute
After the completion of having the scan period, the predetermined temperature profile of the pyrometer controller 13 is set, makes a2 point to a3 point frit temperature
Reduction and the velocity variations of the 14 inner scanning mechanism of scanning galvanometer match, not to the Uniformity of Temperature Field of stop area
It impacts, so as to improve the Temperature Distribution of laser opening point and halt in closed loop encapsulation process, prevented
Burn phenomenon.
Revised power-scanning geometric locus of the present invention can regard feedback control curve and feedforward control as
Curves compilation and obtain, traditional temperature closed loop feedback control, control frequency only up to reach 5kHz, when hot spot motion scan
When speed reaches 3m/s or more, the corresponding spatial resolution of closed-loop control is 1/5000*3=0.6mm, the encapsulation of practical application
The effect is unsatisfactory for scanning.In the present embodiment, temperature scaling factor frequency can be set as to >=1/t1, t1For beam spot scans glass
Time used in glass material pattern one week.When closed-loop control frequency is set as 1/t1When, laser power within each scan period only
Temperature at the primary current hot spot of acquisition, the pyrometer controller 13 compared with target temperature, adjust and change according to the temperature
Become laser power control signal, the laser power control signal curve Pc that the pyrometer controller 13 exports is as shown in Figure 9.It should
Signal is received by the scanning monitor 10, in the scanning monitor 10, according to the movement position of current hot spot and is made a reservation for
Specific position information (such as corner regions, electrode district), generated and stored corrected output controlling curve Po, as shown in Figure 10.It repairs
The numerical value of positive controlling curve generally takes negative value.Two controlling curves are corresponded to the number at current time by the scanning monitor 10
Value is added to arrive power as described in Figure 8-scanning TRAJECTORY CONTROL curve Pset, and the scanning monitor 10 is by curve obtained
The numerical value at corresponding current time is exported to the 11 output power end of laser, controls 11 output power of laser
Variation, so that frit is relatively uniform after the equal energy in each position, enough temperature rises ultimately form fine and close encapsulation.This
Control system block diagram described in embodiment please refers to shown in Figure 11.
Likewise, can also be swept using changing for specific position scheduled on frit pattern (such as corner regions, electrode district)
The mode of speed is retouched, so that special area obtains and the consistent temperature rise in other regions.Alternatively, using simultaneously revise scanning speed with
The mode of scan power, to reach same purpose.The mode of the change beam spot scans speed, is using scheduled speed
Degree-scanning TRAJECTORY CONTROL curve, as shown in figure 12.
In conclusion plesiochronous laser package system and method provided by the invention, by controller module to individually sweeping
It retouches the laser power control signal that Temperature Measure Control module exports in the period to be modified, OLED display can not only be met
Hermetically sealed requirement, and the change of laser output power can be controlled within the single sweep operation period, improve seal line turning
The temperature uniformity at place, enables the more uniform Synchronous Heating of frit, realizes the accurate control of frit temperature curve；
By starting that predetermined temperature profile is arranged with end region in laser scanning, so that start region and end region frit temperature
The velocity variations of variation and scanning match, so as to improvement laser opening point and halt in closed loop encapsulation process
Temperature Distribution prevents burn-off phenomenon.
Foregoing description is only the description to present pre-ferred embodiments, not to any restriction of the scope of the invention, this hair
Any change, the modification that the those of ordinary skill in bright field does according to the disclosure above content, belong to the protection of claims
Range.
Claims (14)
1. a kind of plesiochronous laser package system is used for seal glass packaging body, the glass packages include cover-plate glass, glass
Glass material, base plate glass, oled layer and electrode, which is characterized in that the laser package system includes: controller module, laser
Module, laser scanning module, Temperature Measure Control module and host computer；Wherein,
The laser module is for issuing laser beam and being transmitted to the laser scanning module；
The laser scanning module is used for the laser beam projects in the frit, and scans the glass along seal line
Material；
The Temperature Measure Control module is used to measure the temperature for corresponding to frit at one or more moment laser facula irradiations,
Laser power control signal is exported to the controller module；
The controller module is for laser module and laser scanning module described in synchronously control, with the laser function currently acquired
Rate control signal is modified the laser power control signal according to scheduled power control profile, and with revised
Laser power control signal is exported to the laser module, realizes that laser power adjustment operation and the operation of laser motion scan are same
Step, the controller module are also used to generate laser scanning speed control signal, and with the revised laser power control
On the basis of signal, laser scanning speed control signal is modified, and controlled and believed with revised laser scanning speed
It is synchronous to realize that laser scanning speed adjustment operation is operated with laser motion scan to the laser scanning module for number output.
2. plesiochronous laser package system as described in claim 1, which is characterized in that the controller module is individually to control
Control card of the control system or integrated installation that device or multiple controller combinations are formed in the host computer.
3. plesiochronous laser package system as described in claim 1, which is characterized in that the laser scanning module includes to watch
Movement mechanism is taken, for changing the direction of the laser beam, makes the laser beam on the basis of a fixing axle, it is inclined along any direction
Turn an angle.
4. plesiochronous laser package system as claimed in claim 3, which is characterized in that the deflection direction of the laser beam and partially
Gyration is controlled by the control signal that the controller module is sent to the laser scanning module.
5. plesiochronous laser package system as claimed in claim 3, which is characterized in that the output power of the laser beam and
The opening and closing of the laser module are controlled by the control signal that the controller module is sent to the laser module.
6. plesiochronous laser package system as claimed in claim 5, which is characterized in that the controller module is by the laser
The opening and closing of the output power of beam and the laser module and the movement of the servo movement mechanism match.
7. a kind of plesiochronous laser package method, which comprises the following steps:
Step 1: providing on a laser beam projects to frit, scan the laser beam frit one week along seal line,
The temperature that frit is corresponded at one or more moment laser facula irradiations is acquired simultaneously, and described one week is a scan period；
Step 2:, by the way that the temperature value of acquisition to be compared and calculate with set temperature value, being obtained within a scan period
Laser power control signal, according to the laser power control signal or according to scheduled power control profile to the laser function
Rate control signal is modified, and adjusts the laser beam with revised laser power control signal, realizes laser power tune
Whole operation is synchronous with the operation of laser motion scan, on the basis of the revised laser power control signal, to laser scanning
Speed control signal is modified, and adjusts the laser beam with revised laser scanning speed control signal, realizes laser
Scanning speed adjustment operation operated with laser motion scan it is synchronous, within next scan period, with revised laser function
Rate controls signal and adjusts the laser beam with revised laser scanning speed control signal, is being pre-positioned the laser beam
Generation predetermined variation is set, realizes in the seal line that each point obtains uniform temperature rise within a scan period, while scanning
Acquire the temperature that frit is corresponded at one or more moment laser facula irradiations；
Step 3: repeating step 2 until the enough energy of frit acquisition, cover-plate glass and base plate glass are connected to
Together, hermetically sealing is formed.
8. plesiochronous laser package method as claimed in claim 7, which is characterized in that the predetermined position includes fixed position
And non-fixed position, the fixed position include the corner of the electrode district and the seal line on the base plate glass,
The non-fixed position is the straightway in the seal line.
9. plesiochronous laser package method as claimed in claim 8, which is characterized in that one or more moment corresponding temperature
Collection point is the fixation position on scan path or the non-fixed position on scan path.
10. plesiochronous laser package method as claimed in claim 9, which is characterized in that believed according to the laser power control
Number adjustment laser beam, makes the laser beam that predetermined variation occur in predetermined position, specifically:
Keep the laser power control signal synchronous with the operation of laser motion scan, for the on-fixed position in the scan path
It sets, laser power of the laser beam at the non-fixed position is controlled with the laser power control signal of acquisition；It is right
The laser power control signal is corrected according to scheduled power curve in fixation position in the scan path, makes described
Laser power control signal generation linearly or nonlinearly changes, and controls the laser beam with revised laser power control signal
In the laser power of the fixed position.
11. plesiochronous laser package method as claimed in claim 8, which is characterized in that believed according to the laser power control
Number adjustment laser beam, makes the laser beam that predetermined variation occur in predetermined position, specifically:
Keep the scanning speed of the laser power control signal, laser beam synchronous with the operation of laser motion scan, with the institute of acquisition
Laser power when laser power control signal controls the laser beam flying is stated, when scanning the fixed position, with described
On the basis of laser power control signal, according to the scanning speed of laser beam described in speed-scanning TRAJECTORY CONTROL curve amendment, make institute
It states scanning speed generation linearly or nonlinearly to change, the laser beam is controlled in the fixed position with revised scanning speed
Scanning speed.
12. plesiochronous laser package method as claimed in claim 9, which is characterized in that believed according to the laser power control
Number adjustment laser beam, makes the laser beam that predetermined variation occur in predetermined position, specifically:
Keep the scanning speed of the laser power control signal, laser beam synchronous with the operation of laser motion scan, is swept for described
The non-fixed position in path is retouched, the laser beam is controlled in the on-fixed position with the laser power control signal of acquisition
The laser power set；For the fixation position in the scan path, the laser power is corrected according to scheduled power curve
Signal is controlled, changes the laser power control signal generation linearly or nonlinearly, with revised laser power control letter
Number control laser beam the fixed position laser power, while on the basis of the laser power control signal, root
According to the scanning speed of laser beam described in speed-scanning TRAJECTORY CONTROL curve amendment, the scanning speed occurs linear or non-thread
Property variation, the laser beam is controlled in the scanning speed of the fixed position with revised scanning speed.
13. plesiochronous laser package method as claimed in claim 7, which is characterized in that select the scan period starting point
It is the start region of laser scanning to the last period region, when scanning the start region, with the laser power control signal
On the basis of, according to preset start region temperature curve, the laser beam is corrected in the scanning speed of the start region, is made out
The velocity variations of the raising and scanning of beginning region frit temperature match.
14. the plesiochronous laser package method as described in claim 7 or 13, which is characterized in that the scan period is selected to tie
Beam spot is the end region of laser scanning to latter section of region, when scanning the end region, with the laser power control
On the basis of signal, according to preset end region temperature curve, the laser beam is corrected in the scanning speed of the end region,
The velocity variations of the reduction and scanning of end region frit temperature are made to match.
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| CN110018668A (en) * | 2019-04-11 | 2019-07-16 | 湖北三江航天红峰控制有限公司 | A kind of laser power follow-up control method |
| CN112018269B (en) * | 2019-05-31 | 2021-11-12 | 上海微电子装备（集团）股份有限公司 | Laser packaging method |
| CN115446455B (en) * | 2022-09-22 | 2023-07-28 | 山东大学 | Corner laser welding method based on power follow-up control |
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| CN101501808A (en) * | 2005-12-06 | 2009-08-05 | 康宁股份有限公司 | System and method for frit sealing glass packages |
| CN104838079A (en) * | 2012-09-27 | 2015-08-12 | 佳殿工业公司 | Low temperature hermetic sealing via laser |
| CN103474588A (en) * | 2013-09-30 | 2013-12-25 | 上海大学 | OLED packaging device and OLED packaging method |
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