CN107326155B - A kind of rare earth permanent magnet vacuum-sintering heat treatment method and vacuum heat treatment equipment - Google Patents
A kind of rare earth permanent magnet vacuum-sintering heat treatment method and vacuum heat treatment equipment Download PDFInfo
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- CN107326155B CN107326155B CN201610275465.7A CN201610275465A CN107326155B CN 107326155 B CN107326155 B CN 107326155B CN 201610275465 A CN201610275465 A CN 201610275465A CN 107326155 B CN107326155 B CN 107326155B
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- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
- C21D1/74—Methods of treatment in inert gas, controlled atmosphere, vacuum or pulverulent material
- C21D1/773—Methods of treatment in inert gas, controlled atmosphere, vacuum or pulverulent material under reduced pressure or vacuum
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
- B22F3/10—Sintering only
- B22F3/1003—Use of special medium during sintering, e.g. sintering aid
- B22F3/1007—Atmosphere
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F2999/00—Aspects linked to processes or compositions used in powder metallurgy
Abstract
The present invention provides a kind of rare earth permanent magnet vacuum-sintering heat treatment method and vacuum heat treatment equipment, the equipment are provided with vacuum furnace body, vacuum heat-insulation room, heater, vacuum gas cooling system；It is provided with heat-insulated gear air valve on two sides of vacuum heat-insulation room, vacuum gas cooling system is provided with heat exchanger and vacuum blower；The gas outlet of heat exchanger is connected with the air entry of vacuum blower, and the air inlet of heat exchanger is communicated by the adapter tube on vacuum furnace body one side with the cooled gas path of vacuum heat-insulation room the same side；The exhaust outlet of vacuum blower is communicated by the adapter tube on vacuum furnace body another side with the cooled gas path of the vacuum heat-insulation room other side.The vacuum-sintering heat treatment method includes: that rare earth permanent magnet blank is put into vacuum heat treatment equipment, is heated after vacuumizing；It is filled with argon gas while cooling, opens the heat-insulated gear air valve of vacuum heat-insulation room two sides, alternately starts two cooling blowers, be then either alternatively or simultaneously opened and closed the heat-insulated gear air valve of two sides.
Description
Technical field
The present invention relates to a kind of rare earth permanent magnet vacuum-sintering heat treatment method and its vacuum heat treatment equipments used, belong to
Rare earth permanent magnet manufacturing technology field.The vacuum heat treatment equipment is in addition to for rare earth permanent-magnetic material sintering or timeliness, it may also be used for
Vacuum-sintering, heat treatment, soldering of other metal materials etc..
Background technique
Nd-Fe-B rare earth permanent magnetic material is the new rare-earth permanent magnetic material of nineteen eighty-three discovery, is obtained with the magnetic property that its is excellent
More and more applications, are widely used in the Magnetic resonance imaging of medical treatment, computer hard disc driver, the vibrating motor of mobile phone,
Electroacoustic apparatus, motor of hybrid power automobile, wind-driven generator etc..
The vacuum drying oven for being widely used in neodymium iron boron vacuum-sintering and heat treatment at home at present is adopted more in the arrangement of heater
With three-zone heating before, during and after along uniform temperature zone length direction.It is set using the vacuum heat treatment of this heater arrangement
Standby, when heating under vacuum conditions, in-furnace temperature uniformity is fine, but when according to the needs of heat treatment process to vacuum drying oven
When being inside filled with process gas or protective atmosphere, since gas can generate convection current, hot gas is flowed up, and can be made in furnace
The temperature on top increases, and the temperature uniformity in uniform temperature zone is made to be deteriorated.
On the other hand, for using gas-cooled vacuum heat treatment equipment, cooling uniformity is to determine heat treatment
The key of product quality.In existing ventilation type vacuum heat treatment equipment, air hose array gas cooling mode is generally used,
It is difficult to ensure that the cooling uniformity of workpiece in technical process, it is difficult to meet the process requirements of high-quality heat treated article.
Summary of the invention
The present invention provides a kind of rare earth permanent magnet vacuum heat treatment equipment, specifically includes that vacuum fire door, vacuum furnace body, vacuum
Heat-insulating room, vacuum heat-insulation door, the rear cover with thermal insulation layer, heater, vacuum gas cooling system and vacuum pump set；The vacuum
Observation window is provided on fire door；Vacuum furnace body is horizontal Double water-cooled wall construction, and front end is provided with forward flange, and rear end is welded with envelope
Head；Vacuum fire door is in contact with the forward flange of vacuum furnace body；Rear cover with thermal insulation layer, vacuum heat-insulation room and the vacuum heat-insulation
Door is arranged in the airtight vacuum container that the vacuum furnace body and vacuum fire door are constituted；Vacuum heat-insulation room is horizontal box-shaped knot
Structure, front end are contacted with vacuum heat-insulation door, and rear end is connected with the rear cover with thermal insulation layer；Vacuum heat-insulation room is provided with frame and heat preservation
Layer；The inside of frame is arranged in insulating layer；1 or more heat-insulated gear gas is respectively arranged on two sides of vacuum heat-insulation room
Valve is respectively arranged with cooled gas path on two sides of frame, and it is logical that the heat-insulated gear air valve is enclosed in cooling gas
In road；In a preferred embodiment, the heat-insulated gear air valve is respectively set on each side of vacuum heat-insulation room
There are 2；The heater is arranged on the inner wall of vacuum heat-insulation room；The vacuum gas cooling system is provided with heat exchanger
And vacuum blower；The gas outlet of heat exchanger is connected with the air entry of vacuum blower, the air inlet of heat exchanger and vacuum furnace body side
Adapter tube on face is connected, and adapter tube is communicated across vacuum furnace body with the cooled gas path of vacuum heat-insulation room the same side；Vacuum blower
Exhaust outlet be connected with the adapter tube on vacuum furnace body another side, take over across the cold of vacuum furnace body and the vacuum heat-insulation room other side
But gas passage communicates；The vacuum pump set is connected by vacuumizing interface with vacuum furnace body.
The hinge for vacuum stove door switch and the tooth for vacuum drying oven door locking are additionally provided on the vacuum fire door
Circle, is additionally provided with sealing ring between the forward flange of the vacuum fire door and vacuum furnace body；Vacuum heat-insulation door and vacuum fire door
It is connected, is switched together with vacuum fire door.
The vacuum gas cooling system is gone back between the adapter tube on the air inlet and vacuum furnace body one side of heat exchanger
It is provided with another vacuum blower, the exhaust outlet of another vacuum blower is connected with the adapter tube on vacuum furnace body one side, adapter tube
It is communicated across vacuum furnace body with the cooled gas path of vacuum heat-insulation room the same side.
The hinge for vacuum stove door switch and the tooth for vacuum drying oven door locking are additionally provided on the vacuum fire door
Circle is provided with the cylinder of driven gear ring rotation between gear ring and vacuum furnace body, also sets between vacuum fire door and vacuum furnace body
It is equipped with the cylinder of driving vacuum fire door rotation, is additionally provided with sealing between the forward flange of the vacuum fire door and vacuum furnace body
Circle；Vacuum heat-insulation door is connected with vacuum fire door, switchs together with vacuum fire door.
It is additionally provided with temperature thermocouple in the vacuum furnace body and heater power source introduces electrode, the thermometric thermoelectricity
Occasionally there are 3 or more；The heater power source introduces in electrode and is connected with cooling water.
The vacuum heat-insulation room is horizontal symmetrical octagon cabinet, and upper and lower and two sides side length is greater than 4 tiltedly
The side length on side；Gusset is welded on the outside of the frame of vacuum heat-insulation room, the height of gusset is less than 200mm.
It is provided with insulating layer on the inside of the frame of the vacuum heat-insulation room, is provided with molybdenum sheet on the inside of insulating layer, passes through
Molybdenum rod links together frame, insulating layer and molybdenum sheet；The material of the insulating layer be ceramic fibre and carbon fiber one kind with
On.
Insulating layer is provided on the inside of the frame of the vacuum heat-insulation room；The material of the insulating layer is hard carbon
Felt.
The heater is made of preceding heater, post-heater, upper heater, lower heater and 2 side heaters, preceding
Heater and post-heater are all ring structure, are separately positioned on the front-end and back-end of vacuum heat-insulation room, upper heater, lower heating
Device and 2 side heaters are separately positioned on the upside, downside and two sides of vacuum heat-insulation room；The heater material is molybdenum
Or graphite.
Inside is provided with siege below the vacuum heat-insulation room, and column is connected with below siege, and column, which passes through, to be protected
Warm layer is supported on the inner wall of vacuum furnace body；The top of siege be uniform temperature zone, uniform temperature zone be located at by upper heater, lower heater and
In the space that 2 side heaters are constituted；The workpiece for being sintered or being heat-treated is placed on siege, is placed in uniform temperature zone；Described
The width of uniform temperature zone is within the scope of 400-1200mm, and highly within the scope of 400-1200mm, length is within the scope of 800-3500mm；
The maximum temperature of the uniform temperature zone is within the scope of 500-1400 DEG C.
The vacuum pump set includes oily diffusion vacuum pump, Roots vaccum pump and oil-sealed rotary pump；Final vacuum is higher than 5
×10-1Pa。
A kind of rare earth permanent magnet vacuum-sintering heat treatment method, it is characterised in that: at the rare earth permanent magnet vacuum-sintering heat
Reason method is first turned on the vacuum fire door of rare earth permanent magnet vacuum heat treatment equipment, and rare earth permanent magnet blank is sent in vacuum heat-insulation room
Siege on, close vacuum drying oven be evacuated to vacuum degree 5 × 10 behind the door-1Pa or more continues to vacuumize and begin to warm up, when heating
Between 1-30 hours, maximum heating temperature within the scope of 450-1100 DEG C, later stop heating, close vacuum-pumping valve, be filled with argon
Gas, heat-insulated gear air valve and the alternating starting two for opening vacuum heat-insulation room two sides respectively after gas pressure is more than 4000KPa are cold
But blower either alternatively or simultaneously opens or closes the heat-insulated gear air valve of two sides later；Stop cooling blower later.
Further, heating time 1-30 hour, maximum heating temperature exist first within the scope of 450-1100 DEG C
Blank heating to 400-600 DEG C and is kept the temperature in 1-9 hours, is then heated to blank from 400-600 DEG C in 1-9 hours
It 800-900 DEG C and keeps the temperature, blank is then heated to 1010-1090 DEG C from 800-900 DEG C in 1-5 hours and keeps the temperature, then
Stop heating, is filled with one cooling blower of starting and the heat-insulated gear air valve for alternately opening vacuum heat-insulation room two sides after argon gas, later
3-15 minute, two cooling blower alternation switches were primary.
In another embodiment, heating time 1-30 hour, maximum heating temperature is in 450-1100 DEG C of model
In enclosing, blank heating to 1010-1090 DEG C and is kept the temperature in 1-19 hours first；Then stop heating and cool the temperature to 800
DEG C hereinafter, blank heating to 800-950 DEG C and is kept the temperature again later；Then stop heating, start a cooling after being filled with argon gas
Blower and alternating open the heat-insulated gear air valve of vacuum heat-insulation room two sides, later two cooling blower alternation switches one of 3-15 minute
It is secondary, stop cooling down with ShiShimonoseki cooling blower until temperature is cooled to 400 DEG C, continues to heat after then vacuumizing, at 1-9 hours
It is interior to 460-640 DEG C and to keep the temperature blank heating, stop heating later again, starts a cooling blower and alternating after being filled with argon gas
The heat-insulated gear air valve of vacuum heat-insulation room two sides is opened, two cooling blower alternation switches of 3-15 minute are primary later, until will be warm
Degree is cooled to 100 DEG C to be stopped cooling down with ShiShimonoseki cooling blower.
In yet another embodiment, heating time 1-30 hour, maximum heating temperature is in 450-1100 DEG C of model
In enclosing, blank heating to 300-600 DEG C and is kept the temperature in 1-9 hour first, then at 1-20 hours it is interior by blank from 300-
600 DEG C are heated to 1010-1090 DEG C and keep the temperature；Then stop heating and cool the temperature to 800 DEG C hereinafter, later again by blank heating
To 800-950 DEG C and keep the temperature；Then stop heating, start a cooling blower after being filled with argon gas and alternately open vacuum heat-insulation room
The heat-insulated gear air valve of two sides, two cooling blower alternation switches of 3-15 minute are primary later, until by temperature be cooled to 400 DEG C with
ShiShimonoseki cooling blower stops cooling, continues to heat after then vacuumizing, at 1-9 hour it is interior by blank heating to 460-640 DEG C simultaneously
Heat preservation, stops heating later again, starts a cooling blower after being filled with argon gas and alternately opens the heat-insulated of vacuum heat-insulation room two sides
Air valve is kept off, two cooling blower alternation switches of 3-15 minute are primary later, until temperature is cooled to 100 DEG C with ShiShimonoseki cooling wind
Machine stops cooling.
In another preferred embodiment, heating time 1-30 hour, maximum heating temperature is in 450-
Within the scope of 1100 DEG C, blank heating to 800-950 DEG C and is kept the temperature in 1-20 hours first；Then stop heating, be filled with argon
Start a cooling blower after gas and alternately opens the heat-insulated gear air valve of vacuum heat-insulation room two sides, later two coolings of 3-15 minute
Blower alternation switch is primary, stops cooling down with ShiShimonoseki cooling blower until temperature is cooled to 400 DEG C, continue after then vacuumizing
Blank heating to 460-640 DEG C and is kept the temperature in 1-9 hours, stops heating later again by heating, starts one after being filled with argon gas
Cooling blower and alternating open the heat-insulated gear air valve of vacuum heat-insulation room two sides, later two cooling blower alternation switches of 3-15 minute
Once, stop cooling down with ShiShimonoseki cooling blower until temperature is cooled to 100 DEG C.
Beneficial effects of the present invention:
1. heater divides 3rd area of upper, middle and lower to arrange that the both ends of uniform temperature zone are respectively arranged with independent heater, make vacuum
Heat-treatment furnace heating temperature in the case where loading is uniform, overcome existing equipment load after, especially temperature is equal after inflation
The shortcomings that even property declines.
2, by the way that multiple heat-insulated gear air valves, multiple heat-insulated gear air valves are respectively set in the two side walls of vacuum heat-insulation room
Door alternation switch allows gas to generate uniform vortex cyclone in uniform temperature zone, realizes the uniform cooling to workpiece, overcome existing set
Standby disadvantage；Heat-insulated gear air valve is closed when heated, homogeneous heating, leaks hot few high-efficient, energy conservation；Heat-insulated gear air valve when cooling
Door alternation switch reduces windage, improves cooling efficiency and cooling velocity.
3, two fans realize the positive and negative flowing of air-flow, solve the cooling uniformity in width of the workpiece direction.
Detailed description of the invention
Fig. 1 is a kind of schematic front view of embodiment of rare earth permanent magnet vacuum heat treatment equipment in the present invention.
Fig. 2 is a kind of schematic top plan view of embodiment of rare earth permanent magnet vacuum heat treatment equipment in the present invention.
Specific embodiment
The present invention will be further described with reference to the accompanying drawings and examples.
As depicted in figs. 1 and 2, a kind of rare earth permanent magnet vacuum heat treatment equipment of the invention, specifically include that vacuum fire door 1,
Vacuum furnace body 2, vacuum heat-insulation room 3, vacuum heat-insulation door 16, the rear cover 27 with thermal insulation layer, heater, vacuum gas cooling system 21
With vacuum pump set 7；Observation window 15 is provided on vacuum fire door 1；Vacuum furnace body 2 is horizontal Double water-cooled wall construction, front end setting
There is forward flange 19, rear end is welded with end socket 28；Vacuum fire door 1 is in contact with the forward flange 19 of vacuum furnace body 2；After thermal insulation layer
In the airtight vacuum container that vacuum furnace body 2 is arranged in lid 27, vacuum heat-insulation room 3 and vacuum heat-insulation door 16 and vacuum fire door 1 is constituted；
Vacuum heat-insulation room 3 is horizontal box structure, and front end is contacted with vacuum heat-insulation door 16, and rear end is connected with the rear cover 27 with thermal insulation layer；
Vacuum heat-insulation room 16 is provided with frame 4 and insulating layer 5；The inside of frame 4 is arranged in insulating layer 5；At two of vacuum heat-insulation room 3
It is respectively arranged with 1 or more heat-insulated gear air valve 11 on side, it is logical that cooling gas is respectively arranged on two sides of frame 4
Road 29,6, heat-insulated gear air valve 11 are enclosed in cooled gas path 29,6.In a preferred embodiment of the invention, every
Heat gear air valve 11 is respectively arranged with 2 on each side of vacuum heat-insulation room 3.Vacuum gas cooling system 21 is provided with heat exchange
Device 22 and vacuum blower 23；The gas outlet of heat exchanger 22 is connected with the air entry of vacuum blower 23, the air inlet of heat exchanger 22 with
Adapter tube 31 on 2 one side of vacuum furnace body is connected, and adapter tube 31 passes through the cooling air of vacuum furnace body 2 and 3 the same side of vacuum heat-insulation room
Body channel 29 communicates；The exhaust outlet of vacuum blower 23 is connected with the adapter tube 32 on 2 another side of vacuum furnace body, and adapter tube 32 passes through true
Empty furnace body 2 is communicated with the cooled gas path 6 of 3 other side of vacuum heat-insulation room；Vacuum pump set 7 is by vacuumizing interface and vacuum drying oven
Body 2 is connected；Heater is arranged on the inner wall of vacuum heat-insulation room 3.In one embodiment of the invention, the heater
It is made of preceding heater 24, post-heater 26, upper heater 10, lower heater 14 and 2 side heater 25, preceding 24 He of heater
Post-heater 26 is all ring structure, is separately positioned on the front-end and back-end of vacuum heat-insulation room 3, upper heater 10, lower heater
14 and 2 side heaters 25 are separately positioned on the upside, downside and two sides of vacuum heat-insulation room 3.It is also set up on vacuum fire door 1
There is the hinge 17 switched for vacuum drying oven door 1 and for the gear ring 18 of vacuum drying oven door locking, in vacuum fire door 1 and vacuum furnace body
Sealing ring 20 is additionally provided between forward flange 19；Vacuum heat-insulation door 16 is connected with vacuum fire door 1, switchs together with vacuum fire door 1.
The cylinder of the rotation of driven gear ring 18 is provided between gear ring 18 and vacuum furnace body 2, between vacuum fire door 1 and vacuum furnace body 2
It is also equipped with the cylinder that driving vacuum fire door 1 rotates.It is additionally provided with temperature thermocouple 9 in vacuum furnace body 2 and heater power source draws
Enter electrode 8, the temperature thermocouple 9 there are 3 or more；Heater power source introduces in electrode 8 and is connected with cooling water.Vacuum heat-insulation room
Inside is provided with siege 12 below 3, and column 13 is connected with below siege 12, and column 13 passes through insulating layer 5 and is supported on vacuum
On the inner wall of furnace body 2；The top of siege 12 is uniform temperature zone, and uniform temperature zone is located at and is added by upper heater 10, lower heater 14 and 2 side
In the space that hot device 25 is constituted；The workpiece for being sintered or being heat-treated is placed on siege 12, is placed in uniform temperature zone.
In another embodiment of the invention, air inlet and vacuum drying oven of the vacuum gas cooling system 21 in heat exchanger 22
It is additionally provided with another vacuum blower 30 between adapter tube 31 on 2 one side of body, the exhaust outlet of another vacuum blower 30 and true
Adapter tube 31 on empty 2 one side of furnace body is connected, and adapter tube 31 passes through the cooling gas of vacuum furnace body 2 and 3 the same side of vacuum heat-insulation room
Channel 29 communicates.
Embodiment 1
Permanent-magnet rare-earth NdFeB alloy is prepared first, and alloy is milled into alloy powder by hydrogen breaking and air-flow, is made
Molding is carried out to alloy powder with press, rare earth permanent magnet blank is made, is then sent to rare earth permanent magnet blank of the present invention true
In empty heat-treatment furnace, following vacuum-sintering process is carried out:
It is evacuated to vacuum degree 5 × 10-1Begun to warm up when Pa or more, first with 1 hour by blank heating to 440 DEG C, protect
Temperature 2 hours, then with 3 hours by blank heating to 850 DEG C, heat preservation 2 hours, then with 2.5 hours by blank heating to 1070
DEG C, 2.5 hours are kept the temperature, then stops heating, is filled with argon gas, when furnace pressure is more than 4000Pa, starts a vacuum blower
With the heat-insulated gear air valve for replacing opening vacuum heat-insulation room two sides, two vacuum blower alternation switches are primary within 5 minutes later, until inciting somebody to action
Temperature is cooled to 100 DEG C and stops cooling down with ShiShimonoseki vacuum blower.
After the completion of sintering, sintering briquette is taken out from vacuum heat treatment furnace, is put into common vacuum heat treatment furnace (before heater
3rd area Zhong Hou, wind pipe type are air-cooled) middle 900 DEG C of progress heat preservation 2 hours and 500 DEG C heat preservation vacuum aging processing in 3 hours, at 900 DEG C
The air-cooled step of applying argon gas is carried out respectively after heat preservation and after 500 DEG C of heat preservations, and Nd-Fe-B rare earth permanent magnetic material P1 is made.
Embodiment 2
Permanent-magnet rare-earth NdFeB alloy is prepared first, and alloy is milled into alloy powder by hydrogen breaking and air-flow, is made
Molding is carried out to alloy powder with press, rare earth permanent magnet blank is made, is then sent to rare earth permanent magnet blank of the present invention true
In empty heat-treatment furnace, following vacuum-sintering and heat treatment procedure are carried out:
It is evacuated to vacuum degree 5 × 10-1Begun to warm up when Pa or more, first with 1 hour by blank heating to 440 DEG C, protect
Temperature 2 hours, then with 2.5 hours by blank heating to 1070 DEG C, keep the temperature 5 hours, then stop heat cool the temperature to 800 DEG C
Hereinafter, keeping the temperature 2 hours later again by blank heating to 900 DEG C, then stops heating, argon gas is filled with, when furnace pressure is more than
When 4000Pa, start a vacuum blower and alternately open the heat-insulated gear air valve of vacuum heat-insulation room two sides, 5 minutes later two it is true
Empty blower alternation switch is primary, and vacuum blower is closed when temperature is cooled to 300 DEG C and stops cooling, is continued after then vacuumizing
Heating keeps the temperature 3 hours, stops heating later again by blank heating to 500 DEG C, be filled with after argon gas one vacuum blower of starting and
The heat-insulated gear air valve of vacuum heat-insulation room two sides is alternately opened, two vacuum blower alternation switches are primary within 5 minutes later, until will be warm
Degree is cooled to 100 DEG C to be stopped cooling down with ShiShimonoseki vacuum blower, and Nd-Fe-B rare earth permanent magnetic material P2 is made.
Embodiment 3
Permanent-magnet rare-earth NdFeB alloy is prepared first, and alloy is milled into alloy powder by hydrogen breaking and air-flow, is made
Molding is carried out to alloy powder with press, rare earth permanent magnet blank is made, then rare earth permanent magnet blank is sent to and is put into common vacuum
In sintering furnace (3rd area Zhong Hou, wind pipe type are air-cooled before heater), following vacuum-sintering process is carried out:
It is evacuated to vacuum degree 5 × 10-1Begun to warm up when Pa or more, first with 1 hour by blank heating to 440 DEG C, protect
Temperature 2 hours, then with 2.5 hours by blank heating to 1070 DEG C, keep the temperature 5 hours, it is air-cooled to be filled with argon gas, cools down until by temperature
Stop cooling down with ShiShimonoseki vacuum blower to 100 DEG C.
Then sintering briquette taking-up is put into progress vacuum aging processing in vacuum heat treatment furnace of the invention: extremely by blank heating
900 DEG C, 2 hours are kept the temperature, then stops heating, is filled with argon gas, when furnace pressure is more than 4000Pa, starts a vacuum blower
With the heat-insulated gear air valve for replacing opening vacuum heat-insulation room two sides, two vacuum blower alternation switches are primary within 5 minutes later, until inciting somebody to action
Temperature closes vacuum blower when being cooled to 300 DEG C and stops cooling, continues to heat after then vacuumizing, and by blank heating to 500 DEG C, protects
Temperature 3 hours, stops heating later again, be filled with one vacuum blower of starting after argon gas and alternately open vacuum heat-insulation room two sides every
Heat gear air valve, two vacuum blower alternation switches are primary within 5 minutes later, until temperature is cooled to 100 DEG C with ShiShimonoseki vacuum wind
Machine stops cooling, and Nd-Fe-B rare earth permanent magnetic material P3 is made.
Comparative example:
Permanent-magnet rare-earth NdFeB alloy is prepared first, and alloy is milled into alloy powder by hydrogen breaking and air-flow, is made
Molding is carried out to alloy powder with press, rare earth permanent magnet blank is made, then rare earth permanent magnet blank is sent to and is put into common vacuum
In sintering furnace (3rd area Zhong Hou, wind pipe type are air-cooled before heater), following vacuum-sintering process is carried out:
It is evacuated to vacuum degree 5 × 10-1Begun to warm up when Pa or more, first with 1 hour by blank heating to 440 DEG C, protect
Temperature 2 hours, then with 2.5 hours by blank heating to 1070 DEG C, keep the temperature 5 hours, then stop heat cool the temperature to 800 DEG C
Hereinafter, later again by blank heating to 900 DEG C, 2 hours are kept the temperature, then stops heating, it is air-cooled to be filled with argon gas, until temperature is cold
But stop cooling down with ShiShimonoseki vacuum blower to 100 DEG C.
Then sintering briquette taking-up is put into common vacuum heat treatment furnace and be heated to 500 DEG C of heat preservations 3 hours, then filled
The air-cooled vacuum aging processing of argon gas, is made Nd-Fe-B rare earth permanent magnetic material C1.
Through detecting, under the premise of alloying component is identical, grasped in P2, P3 coercivity respectively than C1 high 940Oe and
560Oe, for maximum magnetic energy product respectively than C1 high 2MGOe and 0.8MGOe, the interior of P1 grasps coercivity ratio C1 high 300Oe, maximum magnetic energy product
Than C1 high 1.2MGOe, and the performance for the P2 that completion vacuum-sintering and vacuum aging are handled in vacuum heat treatment equipment of the present invention
Consistency will be significantly better than C1, P1 and P3.
Claims (13)
1. a kind of vacuum heat treatment equipment, comprising: vacuum fire door, vacuum furnace body, vacuum heat-insulation room, vacuum heat-insulation door, with heat-insulated
Rear cover, heater, vacuum gas cooling system and the vacuum pump set of layer；Observation window is provided on the vacuum fire door；Vacuum
Furnace body is horizontal Double water-cooled wall construction, and front end is provided with forward flange, and rear end is welded with end socket；Vacuum fire door and vacuum furnace body
Forward flange is in contact；The vacuum furnace body is arranged in rear cover with thermal insulation layer, vacuum heat-insulation room and the vacuum heat-insulation door
In the airtight vacuum container constituted with vacuum fire door；Vacuum heat-insulation room is horizontal box structure, and front end is contacted with vacuum heat-insulation door,
Rear end is connected with the rear cover with thermal insulation layer；Vacuum heat-insulation room is provided with frame and insulating layer；The inside of frame is arranged in insulating layer；
2 or more heat-insulated gear air valves are respectively arranged on two sides of vacuum heat-insulation room, on two sides of frame respectively
It is provided with cooled gas path, the heat-insulated gear air valve is enclosed in cooled gas path；The heater is arranged true
On the inner wall of empty heat-insulating room；The vacuum gas cooling system is provided with heat exchanger and vacuum blower；The gas outlet of heat exchanger
It is connected with the air entry of vacuum blower, the air inlet of heat exchanger is connected with the adapter tube on vacuum furnace body one side, takes over across true
Empty furnace body is communicated with the cooled gas path of vacuum heat-insulation room the same side；The exhaust outlet of vacuum blower and vacuum furnace body another side
On adapter tube be connected, adapter tube communicated across vacuum furnace body with the cooled gas path of the vacuum heat-insulation room other side；The vacuum
Unit is connected by vacuumizing interface with vacuum furnace body；Air inlet and vacuum furnace body one of the vacuum gas cooling system in heat exchanger
Another vacuum blower is additionally provided between adapter tube on side；
The heater is made of preceding heater, post-heater, upper heater, lower heater and 2 side heaters, preceding heating
Device and post-heater are all ring structure, are separately positioned on the front-end and back-end of vacuum heat-insulation room, upper heater, lower heater and
2 side heaters are separately positioned on the upside, downside and two sides of vacuum heat-insulation room；The heater material is molybdenum or stone
Ink.
2. a kind of vacuum heat treatment equipment according to claim 1, it is characterised in that: also set up on the vacuum fire door
There are the hinge for vacuum drying oven door switch and the gear ring for vacuum drying oven door locking, in the vacuum fire door and vacuum furnace body
Sealing ring is additionally provided between forward flange；Vacuum heat-insulation door is connected with vacuum fire door, switchs together with vacuum fire door.
3. a kind of vacuum heat treatment equipment according to claim 1, it is characterised in that: the heat-insulated gear air valve is in vacuum
2 are respectively arranged on each side of heat-insulating room.
4. a kind of vacuum heat treatment equipment according to claim 1, it is characterised in that: also set up in the vacuum furnace body
There are temperature thermocouple and heater power source to introduce electrode, the temperature thermocouple there are 3 or more；The heater power source draws
Enter and is connected with cooling water in electrode.
5. a kind of vacuum heat treatment equipment according to claim 1, it is characterised in that: the vacuum heat-insulation room is horizontal
Symmetrical octagon cabinet, upper and lower and two sides side length are greater than the side length of 4 bevel edges；On the outside of the frame of vacuum heat-insulation room
It is welded with gusset, the height of gusset is less than 200mm.
6. a kind of vacuum heat treatment equipment according to claim 1, it is characterised in that: the frame of the vacuum heat-insulation room
Inside be provided with insulating layer, be provided with molybdenum sheet on the inside of insulating layer, frame, insulating layer and molybdenum sheet be connected to one by molybdenum rod
It rises；The material of the insulating layer be ceramic fibre and carbon fiber more than one.
7. a kind of vacuum heat treatment equipment according to claim 1, it is characterised in that: the frame of the vacuum heat-insulation room
Inside be provided with insulating layer；The material of the insulating layer is hard carbon felt.
8. a kind of vacuum heat treatment equipment according to claim 1, it is characterised in that: below the vacuum heat-insulation room
Inside is provided with siege, is connected with column below siege；The top of siege be uniform temperature zone, uniform temperature zone be located at by upper heater,
In the space that lower heater and 2 side heaters are constituted；The workpiece for being sintered or being heat-treated is placed on siege, is placed in uniform temperature zone
It is interior；The width of the uniform temperature zone is within the scope of 400-1200mm, and highly within the scope of 400-1200mm, length is in 800-
Within the scope of 3500mm；The maximum temperature of the uniform temperature zone is within the scope of 500-1400 DEG C.
9. a kind of rare earth permanent magnet vacuum-sintering heat treatment method, using vacuum heat treatment equipment as described in claim 1, including
Following steps:
Heating process: the vacuum fire door of rare earth permanent magnet vacuum heat treatment equipment is opened, rare earth permanent magnet blank is sent to vacuum heat-insulation
On the siege of room, closes vacuum drying oven and be evacuated to vacuum degree 5 × 10 behind the door-1Pa or more continues to vacuumize and begin to warm up, heating
Then time 1-30 hour, maximum heating temperature stop heating within the scope of 450-1100 DEG C；
Cooling process: being filled with argon gas, when gas pressure is more than 4000Pa, opens the multiple heat-insulated of vacuum heat-insulation room two sides respectively
Air valve is kept off, two cooling blowers are alternately started, is then either alternatively or simultaneously opened and closed multiple heat-insulated gear air valves of two sides.
10. a kind of rare earth permanent magnet vacuum-sintering heat treatment method according to claim 9, it is characterised in that: described
In heating process, blank heating to 400-600 DEG C and is kept the temperature first in 1-9 hours, then at 1-9 hour it is interior by blank from
400-600 DEG C is heated to 800-900 DEG C and keeps the temperature, and blank is then heated to 1010- from 800-900 DEG C in 1-5 hours
It 1090 DEG C and keeps the temperature, then stops heating；It in the cooling process, is filled with after argon gas and first starts a cooling blower, hand over
For the heat-insulated gear air valve for opening vacuum heat-insulation room two sides, then every two cooling blower alternation switches of 3-15 minute are primary.
11. a kind of rare earth permanent magnet vacuum-sintering heat treatment method according to claim 9, it is characterised in that: described
In heating process, blank heating to 1010-1090 DEG C and is kept the temperature in 1-19 hours first；Then stop heating dropping temperature
To 800 DEG C hereinafter, later again to 800-950 DEG C and keeping the temperature blank heating, then stop heating；In the cooling process
In, it is filled with after argon gas and first starts a cooling blower, alternately open the heat-insulated gear air valve of vacuum heat-insulation room two sides, later every 3-15
Minute, two cooling blower alternation switches were primary, and cooling blowers are closed after temperature is cooled to 400 DEG C or less and stop cooling；
Then it heats after vacuumizing again, to 460-640 DEG C and keeps the temperature blank heating in 1-9 hours, stop adding later again
Heat is filled with after argon gas and first starts a cooling blower, alternately opens the heat-insulated gear air valve of vacuum heat-insulation room two sides, later every 3-15
Minute, two cooling blower alternation switches were primary, and cooling blowers are closed after temperature is cooled to 100 DEG C or less and stop cooling.
12. a kind of rare earth permanent magnet vacuum-sintering heat treatment method according to claim 9, it is characterised in that: described
In heating process, blank heating to 300-600 DEG C and is kept the temperature in 1-9 hours first, then by blank in 1-20 hours
It is heated to 1010-1090 DEG C from 300-600 DEG C and keeps the temperature, then stops heating and cools the temperature to 800 DEG C hereinafter, later again by base
Material is heated to 800-950 DEG C and keeps the temperature, and then stops heating；In the cooling process, it is filled with after argon gas and first starts one
Cooling blower alternately opens the heat-insulated gear air valve of vacuum heat-insulation room two sides, and two cooling blowers of every 3-15 minute are alternately opened later
It closes once, stops cooling down with ShiShimonoseki cooling blower until temperature is cooled to 400 DEG C；
Then it heats after vacuumizing again, to 460-640 DEG C and keeps the temperature blank heating in 1-9 hours, stop adding later again
Heat is filled with after argon gas and first starts a cooling blower, alternately opens the heat-insulated gear air valve of vacuum heat-insulation room two sides, later every 3-15
Minute, two cooling blower alternation switches were primary, stopped cooling down with ShiShimonoseki cooling blower until temperature is cooled to 100 DEG C.
13. a kind of rare earth permanent magnet vacuum-sintering heat treatment method according to claim 9, it is characterised in that: described
In heating process, blank heating to 800-950 DEG C and is kept the temperature in 1-20 hours first, then stops heating；Described
It in cooling process, is filled with after argon gas and first starts a cooling blower, alternately open the heat-insulated gear air valve of vacuum heat-insulation room two sides, it
Every two cooling blower alternation switches of 3-15 minute are primary afterwards, until temperature is cooled to 400 DEG C with the stopping of ShiShimonoseki cooling blower
It is cooling；
Then it heats after vacuumizing again, to 460-640 DEG C and keeps the temperature blank heating in 1-9 hours, stop adding later again
Heat is filled with after argon gas and first starts a cooling blower, alternately opens the heat-insulated gear air valve of vacuum heat-insulation room two sides, later every 3-15
Minute, two cooling blower alternation switches were primary, stopped cooling down with ShiShimonoseki cooling blower until temperature is cooled to 100 DEG C.
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| GB2621369A (en) * | 2022-08-10 | 2024-02-14 | Vacuum Furnace Eng Ltd | A vacuum furnace device |
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| CN109014191B (en) * | 2018-07-23 | 2021-02-02 | 沈阳中北真空技术有限公司 | Rare earth permanent magnet vacuum heat treatment furnace and rare earth permanent magnet heat treatment method |
| CN109097540B (en) * | 2018-07-23 | 2020-08-04 | 沈阳中北真空技术有限公司 | Parallel vacuum heat treatment equipment and vacuum heat treatment method |
| CN109273230B (en) * | 2018-07-23 | 2020-06-23 | 沈阳中北真空技术有限公司 | Intelligent rare earth permanent magnet sintering production line and sintering method |
| CN110094967B (en) * | 2019-05-07 | 2020-02-07 | 株洲瑞德尔冶金设备制造有限公司 | Vacuum furnace using dry screw pump |
| JP7338818B2 (en) * | 2019-11-28 | 2023-09-05 | 島津産機システムズ株式会社 | heat treatment furnace |
| CN111471953B (en) * | 2020-05-20 | 2022-01-28 | 威势特(上海)技术服务有限公司 | Crystallizer copper plate thermal treatment equipment after thermal spraying coating |
| CN114373972A (en) * | 2022-01-14 | 2022-04-19 | 东莞富瑟尔科技有限公司 | Molten salt diffusion compounding device and method |
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