CN107316863A - 瞬态电压抑制器及其制作方法 - Google Patents
瞬态电压抑制器及其制作方法 Download PDFInfo
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- CN107316863A CN107316863A CN201710564685.6A CN201710564685A CN107316863A CN 107316863 A CN107316863 A CN 107316863A CN 201710564685 A CN201710564685 A CN 201710564685A CN 107316863 A CN107316863 A CN 107316863A
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- 230000001052 transient effect Effects 0.000 title claims abstract description 42
- 238000002360 preparation method Methods 0.000 title claims abstract description 16
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims abstract description 54
- 238000000407 epitaxy Methods 0.000 claims abstract description 26
- 239000000758 substrate Substances 0.000 claims abstract description 26
- 238000002347 injection Methods 0.000 claims description 14
- 239000007924 injection Substances 0.000 claims description 14
- 238000000034 method Methods 0.000 claims description 13
- 238000001312 dry etching Methods 0.000 claims description 9
- 230000015572 biosynthetic process Effects 0.000 claims description 7
- 238000001259 photo etching Methods 0.000 claims description 7
- 239000002184 metal Substances 0.000 claims description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 5
- 229910052710 silicon Inorganic materials 0.000 claims description 5
- 239000010703 silicon Substances 0.000 claims description 5
- 238000000137 annealing Methods 0.000 claims description 3
- 238000009792 diffusion process Methods 0.000 claims description 3
- 238000004151 rapid thermal annealing Methods 0.000 claims description 2
- 238000001039 wet etching Methods 0.000 claims description 2
- 150000002500 ions Chemical class 0.000 claims 3
- 239000010410 layer Substances 0.000 description 35
- 238000004519 manufacturing process Methods 0.000 description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 239000013078 crystal Substances 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 230000015556 catabolic process Effects 0.000 description 2
- 230000006378 damage Effects 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- 230000001629 suppression Effects 0.000 description 2
- 208000027418 Wounds and injury Diseases 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 208000014674 injury Diseases 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/0203—Particular design considerations for integrated circuits
- H01L27/0248—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
- H01L21/26506—Bombardment with radiation with high-energy radiation producing ion implantation in group IV semiconductors
- H01L21/26513—Bombardment with radiation with high-energy radiation producing ion implantation in group IV semiconductors of electrically active species
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
- H01L21/266—Bombardment with radiation with high-energy radiation producing ion implantation using masks
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8222—Bipolar technology
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/08—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind
- H01L27/0814—Diodes only
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0684—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by the shape, relative sizes or dispositions of the semiconductor regions or junctions between the regions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66083—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by variation of the electric current supplied or the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched, e.g. two-terminal devices
- H01L29/6609—Diodes
- H01L29/66098—Breakdown diodes
- H01L29/66106—Zener diodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/86—Types of semiconductor device ; Multistep manufacturing processes therefor controllable only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
- H01L29/861—Diodes
- H01L29/866—Zener diodes
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- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- High Energy & Nuclear Physics (AREA)
- Ceramic Engineering (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Semiconductor Integrated Circuits (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
Abstract
Description
Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201710564685.6A CN107316863B (zh) | 2017-07-12 | 2017-07-12 | 瞬态电压抑制器及其制作方法 |
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CN201710564685.6A CN107316863B (zh) | 2017-07-12 | 2017-07-12 | 瞬态电压抑制器及其制作方法 |
Publications (2)
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CN107316863A true CN107316863A (zh) | 2017-11-03 |
CN107316863B CN107316863B (zh) | 2019-05-07 |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109360823A (zh) * | 2018-10-08 | 2019-02-19 | 深圳市南硕明泰科技有限公司 | 沟槽型瞬态电压抑制器及其制作方法 |
CN109950326A (zh) * | 2019-04-15 | 2019-06-28 | 深圳市槟城电子有限公司 | 一种双向二极管及其制作方法、过电压保护装置 |
CN113690232A (zh) * | 2021-08-24 | 2021-11-23 | 安芯半导体技术(深圳)有限公司 | 一种双向静电防护芯片及其制备方法 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5818084A (en) * | 1996-05-15 | 1998-10-06 | Siliconix Incorporated | Pseudo-Schottky diode |
CN101506974A (zh) * | 2006-11-30 | 2009-08-12 | 万国半导体股份有限公司 | 利用沟槽隔离形成的无闭锁垂直瞬态电压抑制二极管阵列结构 |
CN101536189A (zh) * | 2006-11-16 | 2009-09-16 | 万国半导体股份有限公司 | 具有电磁干扰滤波器的垂直瞬态电压抑制器(tvs)的电路结构及制造方法 |
CN101557103A (zh) * | 2008-04-11 | 2009-10-14 | 上海韦尔半导体股份有限公司 | 瞬态电压抑制器二极管及其制造方法 |
US20100025809A1 (en) * | 2008-07-30 | 2010-02-04 | Trion Technology, Inc. | Integrated Circuit and Method of Forming Sealed Trench Junction Termination |
CN103354236A (zh) * | 2013-07-12 | 2013-10-16 | 江苏艾伦摩尔微电子科技有限公司 | 内嵌齐纳二极管结构的可控硅瞬态电压抑制器 |
CN103579366A (zh) * | 2012-08-03 | 2014-02-12 | 上海华虹Nec电子有限公司 | Tvs器件及制造方法 |
-
2017
- 2017-07-12 CN CN201710564685.6A patent/CN107316863B/zh active Active
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5818084A (en) * | 1996-05-15 | 1998-10-06 | Siliconix Incorporated | Pseudo-Schottky diode |
CN101536189A (zh) * | 2006-11-16 | 2009-09-16 | 万国半导体股份有限公司 | 具有电磁干扰滤波器的垂直瞬态电压抑制器(tvs)的电路结构及制造方法 |
CN101506974A (zh) * | 2006-11-30 | 2009-08-12 | 万国半导体股份有限公司 | 利用沟槽隔离形成的无闭锁垂直瞬态电压抑制二极管阵列结构 |
CN101557103A (zh) * | 2008-04-11 | 2009-10-14 | 上海韦尔半导体股份有限公司 | 瞬态电压抑制器二极管及其制造方法 |
US20100025809A1 (en) * | 2008-07-30 | 2010-02-04 | Trion Technology, Inc. | Integrated Circuit and Method of Forming Sealed Trench Junction Termination |
CN103579366A (zh) * | 2012-08-03 | 2014-02-12 | 上海华虹Nec电子有限公司 | Tvs器件及制造方法 |
CN103354236A (zh) * | 2013-07-12 | 2013-10-16 | 江苏艾伦摩尔微电子科技有限公司 | 内嵌齐纳二极管结构的可控硅瞬态电压抑制器 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109360823A (zh) * | 2018-10-08 | 2019-02-19 | 深圳市南硕明泰科技有限公司 | 沟槽型瞬态电压抑制器及其制作方法 |
CN109950326A (zh) * | 2019-04-15 | 2019-06-28 | 深圳市槟城电子有限公司 | 一种双向二极管及其制作方法、过电压保护装置 |
CN109950326B (zh) * | 2019-04-15 | 2024-05-17 | 马鞍山市槟城电子有限公司 | 一种双向二极管及其制作方法、过电压保护装置 |
CN113690232A (zh) * | 2021-08-24 | 2021-11-23 | 安芯半导体技术(深圳)有限公司 | 一种双向静电防护芯片及其制备方法 |
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CN107316863B (zh) | 2019-05-07 |
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Effective date of registration: 20190412 Address after: 312500 Shaoxing, Zhejiang Xinchang County Qixing street, Wulong Ao village, 583 Applicant after: Xinchang Jia Liang refrigeration and accessories factory Address before: 330000 East Beijing Road 427, Qingshan Lake District, Nanchang City, Jiangxi Province Applicant before: Wang Kai |
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Effective date of registration: 20220322 Address after: 214200 Ding Shu Zhen Da Pu Nan Cun, Yixing City, Wuxi City, Jiangsu Province Patentee after: Yixing Huanhu Electric Appliance Co.,Ltd. Address before: 312500 Shaoxing, Zhejiang Xinchang County Qixing street, Wulong Ao village, 583 Patentee before: XINCHANG JIALIANG REFRIGERATION FITTINGS FACTORY |
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