CN107282948A - A kind of Three Degree Of Freedom device processed applied to ultra-precise cutting - Google Patents
A kind of Three Degree Of Freedom device processed applied to ultra-precise cutting Download PDFInfo
- Publication number
- CN107282948A CN107282948A CN201610230549.9A CN201610230549A CN107282948A CN 107282948 A CN107282948 A CN 107282948A CN 201610230549 A CN201610230549 A CN 201610230549A CN 107282948 A CN107282948 A CN 107282948A
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- screws
- plate
- guide pad
- drive component
- flexible hinge
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B5/00—Turning-machines or devices specially adapted for particular work; Accessories specially adapted therefor
- B23B5/36—Turning-machines or devices specially adapted for particular work; Accessories specially adapted therefor for turning specially-shaped surfaces by making use of relative movement of the tool and work produced by geometrical mechanisms, i.e. forming-lathes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q5/00—Driving or feeding mechanisms; Control arrangements therefor
- B23Q5/22—Feeding members carrying tools or work
- B23Q5/28—Electric drives
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
Abstract
The invention discloses a kind of Three Degree Of Freedom device processed applied to ultra-precise cutting, including shell, cutter assembly, Z-direction drive component, X are to drive component, Y-direction drive component, frame；The Z-direction drive component constitutes parallel-connection structure with Y-direction drive component, and the parallel-connection structure constitutes cascaded structure then at X to drive component；Piezoelectric actuator is used in tri- direction type of drive of X, Y, Z, guidance mode uses flexible hinge, realize linear high frequency on tri- directions of X, Y, Z and come and go servo motion.Simple in construction, cost of the invention is low, instant effect, improves positioning precision and driving precision.
Description
【Technical field】
The invention belongs to the technical field such as ultra-precise cutting and optical precision component turnery processing, it is related to one kind
The Three Degree Of Freedom device processed applied to ultra-precise cutting.
【Background technology】
Compared with traditional optical part, freeform optics surface element has to be provided more certainly for optical designers
By the design space flexibly more innovated, Performance of Optical System can be maximized, can be used less curved surface real
Now more preferable optical property, reduces overall dimensions and weight, and achievable function is integrated, therefore is shone in LED
Bright, green energy resource, medical treatment, the military field such as remotely sensed image and semiconductor lithography of space flight and aviation infrared ray are obtained
Extensive use.Existing freeform optics surface ultraprecise processing method includes：Processing and forming and machining skill
Art.Mechanical manufacturing technology mainly includes attrition process and machining, and the former includes grinding and polished；The latter
Including：Based on fast tool servo or slide plate servo diamond turning at a slow speed, diamond fly-cutting, micro- milling and
Diamond microscopic carvings.Diamond turning based on fast tool servo has that machining accuracy is high, surface quality is good,
High in machining efficiency, cost is low, can clamped one time the advantages of be molded, it is universal by international academic community and industrial quarters
It is considered that most promising freeform optics surface creates into method.
Chinese patent (CN201310278229.7) proposes a kind of big linear fast tool of stroke Three Degree Of Freedom
Servomechanism installation, flexible hinge is driven using three additional X of voice coil motor to decoupling device and Z-direction decoupling device
Chain apparatus realizes that diamond cutter is moved in the high frequency linear of X-direction, Y direction and Z-direction, and
Main flexible hinge is an integral frame-type structure, and X is oriented to guiding mechanism, Y-direction guiding mechanism, Z-direction
Mechanism constitutes a train.
The above-mentioned linear fast tool servo of Three Degree Of Freedom uses X to decoupling device and Z-direction decoupling device
The decoupling function of motion is played, the independence of three direction motions is realized, but this method adds additional two
Individual decoupling mechanism causes overall complicated, production cost to rise；Using main flexible hinge general frame integral type knot
Structure, a train, structure mistake are constituted by X to guiding mechanism, Y-direction guiding mechanism, Z-direction guiding mechanism
In complexity, it is difficult in the production and processing production of main flexible hinge.
【The content of the invention】
It is an object of the invention to provide a kind of Three Degree Of Freedom device processed applied to ultra-precise cutting, three are realized
The free movement in individual direction and decoupling device is not needed, and overall structure is simple, is easy to manufacture.
To achieve the above object, the present invention proposes a kind of Three Degree Of Freedom dress processed applied to ultra-precise cutting
Put, including shell, cutter assembly, Z-direction drive component, X are to drive component, Y-direction drive component, frame；
The Z-direction drive component and Y-direction drive component constitute parallel-connection structure, and the parallel-connection structure is again with X to driving group
Part constitutes cascaded structure；The frame include U-shaped plate, first connecting rod, X-direction guide pad, second connecting rod,
Fixed plate, bottom plate, guide pad, the secondary flexible hinge of translation, two-freedom flexible hinge；The fixed plate is left
The right side is distributed on bottom plate, with bottom plate integrally connected；Described second connecting rod or so is distributed in above fixed plate, is led to
The secondary flexible hinge of former and later two translations is crossed to be connected with fixed plate；The X-direction guide pad above second connecting rod,
It is connected by the secondary flexible hinge of former and later two translations with second connecting rod；Described first connecting rod or so is distributed in X side
Above to guide pad, it is connected by the secondary flexible hinge of two translations with X-direction guide pad；The U-shaped plate with
First connecting rod is connected by the secondary flexible hinge of two translations；The guide pad is located in the middle of frame, with two freely
Spend the connection of flexible hinge one end；The two-freedom flexible hinge is symmetrically distributed in guide pad all around；Institute
The other end for stating two-freedom flexible hinge is connected with X-direction guide pad；The shell include left plate, cover plate,
Back plate, right panel, foreboard, window, M5 screws；The left plate, right panel are left in bottom plate by M5 mode connects for screw
Right both sides；The foreboard, the back plate front and rear sides on bottom plate by M5 mode connects for screw；The cover plate passes through M5
Screw is connected with U-shaped plate；The window is located on foreboard；The cutter assembly includes knife rest, diamond tool
Tool, M4 screws, M2 screws；The knife rest is by M4 mode connects for screw on guide pad；The diamond tool
Tool is by M2 mode connects for screw on knife rest；The Z-direction drive component includes supporting plate, M6 screws, M3 spiral shells
Nail, Z-direction piezoelectric ceramic actuator, Z-direction capacitance sensor；The supporting plate is by M5 mode connects for screw in X
On the guide pad of direction；The Z-direction piezoelectric ceramic actuator is located in the middle of supporting plate, passes through M6 screws and support
Plate is connected；The Z-direction capacitance sensor is fixed on supporting plate by M3 screws；The X is to drive component bag
Column, L shaped plate, M8 screws, X are included to piezoelectric actuator, X to capacitance sensor；The column passes through M8
Mode connects for screw is on bottom plate；The L shaped plate is by M8 mode connects for screw on column；The X is to Piezoelectric Driving
Device is fixed on column by M6 screws；The X is fixed on L shaped plate to capacitance sensor by M3 screws
On；The Y-direction drive component includes Y-direction piezoelectric actuator, Y-direction capacitance sensor；The Y-direction piezoelectricity drives
Dynamic device is fixed on X-direction guide pad by M6 screws；The Y-direction capacitance sensor is solid by M3 screws
It is scheduled on X-direction guide pad.
Beneficial effects of the present invention：The present invention realizes fast tool servo in tri- directions of X, Y, Z
Linear motion, it is adaptable to the free optical surface of turnery processing；The present invention is simple in construction, compact simultaneously, raw
Produce manufacturing cost low.
【Brief description of the drawings】
Fig. 1 is the present invention applied to the overall decomposition texture schematic diagram of Three Degree Of Freedom device that ultra-precise cutting is processed；
Fig. 2 is shell decomposition texture schematic diagram of the present invention；
Fig. 3 is rack construction schematic diagram of the present invention；
Fig. 4 is X of the present invention to drive component structural representation；
Fig. 5 is Z-direction drive component structural representation of the present invention；
Fig. 6 is cutter assembly and Y-direction drive component structural representation.
In figure shell 1, cutter assembly 2, Z-direction drive component 3, X to drive component 4, Y-direction drive component 5,
Frame 6, left plate 1.0, cover plate 1.1, back plate 1.2, right panel 1.3, foreboard 1.4, window 1.40, M5
Screw 1.5, M4 screws 2.0, knife rest 2.1, diamond cutter 2.2, M2 screws 2.3, supporting plate 3.0,
It is M6 screws 3.1, M3 screws 3.2, Z-direction piezoelectric ceramic actuator 3.3, Z-direction capacitance sensor 3.4, vertical
Post 4.0, L shaped plate 4.1, M8 screws 4.2, X are to piezoelectric actuator 4.3, X to capacitance sensor 4.4, Y
Led to piezoelectric actuator 5.0, Y-direction capacitance sensor 5.1, U-shaped plate 6.0, first connecting rod 6.1, X-direction
To block 6.2, second connecting rod 6.3, fixed plate 6.4, bottom plate 6.5, guide pad 6.6, the secondary flexible hinge of translation
6.7th, two-freedom flexible hinge 6.8.
【Embodiment】
Refering to Fig. 1, Fig. 2, Fig. 3, Fig. 4, Fig. 5, Fig. 6, the present invention applied to ultra-precise cutting process three from
Include shell 1, cutter assembly 2, Z-direction drive component 3, X from degree device to drive to drive component 4, Y-direction
Component 5, frame 6；The Z-direction drive component 3 constitutes parallel-connection structure, the parallel connection with Y-direction drive component 5
Structure constitutes cascaded structure with X to drive component 4 again；The frame 6 includes U-shaped plate 6.0, first connecting rod
6.1st, X-direction guide pad 6.2, second connecting rod 6.3, fixed plate 6.4, bottom plate 6.5, guide pad 6.6,
The secondary flexible hinge 6.7 of translation, two-freedom flexible hinge 6.8；The fixed plate 6.4 or so is distributed in bottom plate
On 6.5, with the integrally connected of bottom plate 6.5；The second connecting rod 6.3 or so is distributed in the top of fixed plate 6.4,
It is connected by the secondary flexible hinge 6.7 of front and rear two translations with fixed plate 6.4；The X-direction guide pad 6.2 exists
The top of second connecting rod 6.3, is connected by the secondary flexible hinge 6.7 of front and rear two translations with second connecting rod 6.3；Institute
State first connecting rod 6.1 or so and be distributed in the top of X-direction guide pad 6.2, pass through the secondary flexible hinge 6.7 of two translations
It is connected with X-direction guide pad 6.2；The U-shaped plate 6.0 is secondary flexible by two translations with first connecting rod 6.1
Hinge 6.7 is connected；The guide pad 6.6 is located in the middle of frame 6, with two-freedom flexible hinge 6.8 1
End connection；The two-freedom flexible hinge 6.8 is symmetrically distributed in guide pad 6.6 all around；Described two
The other end of free degree flexible hinge 6.8 is connected with X-direction guide pad 6.2；The shell 1 includes left plate
1.0th, cover plate 1.1, back plate 1.2, right panel 1.3, foreboard 1.4, window 1.40, M5 screws 1.5；It is described
Left plate 1.0, right panel 1.2 are connected to the left and right sides of bottom plate 6.5 by M5 screws 1.5；The foreboard 1.4,
Back plate 1.3 is connected to the front and rear sides of bottom plate 6.5 by M5 screws 1.5；The cover plate 1.1 passes through M5 spiral shells
Nail 1.5 is connected with U-shaped plate 6.0；The window 1.40 is located on foreboard 1.4；The cutter assembly 2 is wrapped
Include knife rest 2.1, diamond cutter 2.2, M4 screws 2.0, M2 screws 2.3；The knife rest 2.1 passes through M4
Screw 2.0 is connected on guide pad 6.6；The diamond cutter 2.2 is connected to knife by M2 screws 2.3
On frame 2.1；The Z-direction drive component 3 includes supporting plate 3.0, M6 screws 3.1, M3 screws 3.2, Z
To piezoelectric ceramic actuator 3.3, Z-direction capacitance sensor 3.4；The supporting plate 3.0 passes through M5 screws 1.5
It is connected on X-direction guide pad 6.2；The Z-direction piezoelectric ceramic actuator 3.3 is located in supporting plate 3.0
Between, it is connected by M6 screws 3.1 with supporting plate 3.0；The Z-direction capacitance sensor 3.4 passes through M3 spiral shells
Nail 3.2 is fixed on supporting plate 3.0；The X includes column 4.0, L shaped plate 4.1, M8 to drive component 4
Screw 4.2, X are to piezoelectric actuator 4.3, X to capacitance sensor 4.4；The column 4.0 passes through M8 spiral shells
Nail 4.2 is connected on bottom plate 6.5；The L shaped plate 4.1 is connected on column 4.0 by M8 screws 4.2；
The X is fixed on column 4.0 to piezoelectric actuator 4.3 by M6 screws 3.1；The X is passed to electric capacity
Sensor 4.4 is fixed in L shaped plate 4.1 by M3 screws 3.2；The Y-direction drive component 5 includes Y-direction
Piezoelectric actuator 5.0, Y-direction capacitance sensor 5.1；The Y-direction piezoelectric actuator 5.0 passes through M6 screws
3.1 are fixed on X-direction guide pad 6.2；The Y-direction capacitance sensor 5.1 is solid by M3 screws 3.2
It is scheduled on X-direction guide pad 6.2.
The course of work of the present invention：X drives the edge of X-direction guide pad 6.2 to the input voltage of piezoelectric actuator 4.3
X horizontal direction translations, make Z-direction drive component 3, the Y-direction drive component being located on X-direction guide pad 6.2
5 along X horizontal direction translations；The input voltage of Z-direction piezoelectric ceramic actuator 3.3, driving guide pad 6.6 along
Z vertical directions are moved；The input voltage of Y-direction piezoelectric actuator 5.0, driving guide pad 6.6 is transported along the Y direction
It is dynamic；It is achieved thereby that the linear motion in three directions.During turning freeform optics surface, according to
The Curvature varying of free form surface, adjusts the parameter in tri- directions of X, Y, Z accordingly.
Above-described embodiment is the explanation to invention, is not limitation of the invention, any change simple to the present invention
Scheme after changing belongs to protection scope of the present invention.
Claims (1)
1. a kind of Three Degree Of Freedom device processed applied to ultra-precise cutting, it is characterised in that：Including shell (1),
Cutter assembly (2), Z-direction drive component (3), X to drive component (4), Y-direction drive component (5),
Frame (6)；The Z-direction drive component (3) constitutes parallel-connection structure with Y-direction drive component (5), should
Parallel-connection structure constitutes cascaded structure then at X to drive component (4)；The frame (6) includes U-shaped plate
(6.0), first connecting rod (6.1), X-direction guide pad (6.2), second connecting rod (6.3), fixed plate
(6.4), bottom plate (6.5), guide pad (6.6), the secondary flexible hinge (6.7) of translation, two-freedom are soft
Property hinge (6.8)；Fixed plate (6.4) left and right is distributed on bottom plate (6.5), with bottom plate (6.5)
Integrally connected；Second connecting rod (6.3) left and right is distributed in above fixed plate (6.4), by front and rear
The secondary flexible hinge (6.7) of two translations is connected with fixed plate (6.4)；The X-direction guide pad (6.2)
Above second connecting rod (6.3), pass through the secondary flexible hinge (6.7) of former and later two translations and second connecting rod
(6.3) connect；First connecting rod (6.1) left and right is distributed in above X-direction guide pad (6.2),
It is connected by the secondary flexible hinge (6.7) of two translations with X-direction guide pad (6.2)；The U-shaped plate
(6.0) it is connected with first connecting rod (6.1) by the secondary flexible hinge (6.7) of two translations；It is described to lead
It is located to block (6.6) in the middle of frame (6), is connected with two-freedom flexible hinge (6.8) one end；
The two-freedom flexible hinge (6.8) is symmetrically distributed in guide pad (6.6) all around；Described two
The other end of free degree flexible hinge (6.8) is connected with X-direction guide pad (6.2)；The shell (1)
Including left plate (1.0), cover plate (1.1), back plate (1.2), right panel (1.3), foreboard (1.4), window
Mouth (1.40), M5 screws (1.5)；The left plate (1.0), right panel (1.2) pass through M5 screws (1.5)
It is connected to bottom plate (6.5) left and right sides；The foreboard (1.4), back plate (1.3) pass through M5 screws
(1.5) bottom plate (6.5) front and rear sides are connected to；The cover plate (1.1) passes through M5 screws (1.5)
It is connected with U-shaped plate (6.0)；The window (1.40) is located on foreboard (1.4)；The cutting group
Part (2) includes knife rest (2.1), diamond cutter (2.2), M4 screws (2.0), M2 screws (2.3)；
The knife rest (2.1) is connected on guide pad (6.6) by M4 screws (2.0)；The diamond
Cutter (2.2) is connected on knife rest (2.1) by M2 screws (2.3)；The Z-direction drive component
(3) include supporting plate (3.0), M6 screws (3.1), M3 screws (3.2), Z-direction piezoelectric ceramics to drive
Dynamic device (3.3), Z-direction capacitance sensor (3.4)；The supporting plate (3.0) passes through M5 screws (1.5)
It is connected on X-direction guide pad (6.2)；The Z-direction piezoelectric ceramic actuator (3.3) is located at support
In the middle of plate (3.0), it is connected by M6 screws (3.1) with supporting plate (3.0)；The Z-direction electric capacity
Sensor (3.4) is fixed on supporting plate (3.0) by M3 screws (3.2)；The X is to driving group
Part (4) include column (4.0), L shaped plate (4.1), M8 screws (4.2), X to piezoelectric actuator (4.3),
X is to capacitance sensor (4.4)；The column (4.0) is connected to bottom plate (6.5) by M8 screws (4.2)
On；The L shaped plate (4.1) is connected on column (4.0) by M8 screws (4.2)；The X to
Piezoelectric actuator (4.3) is fixed on column (4.0) by M6 screws (3.1)；The X is to electric capacity
Sensor (4.4) is fixed in L shaped plate (4.1) by M3 screws (3.2)；The Y-direction driving
Component (5) includes Y-direction piezoelectric actuator (5.0), Y-direction capacitance sensor (5.1)；The Y-direction pressure
Electric drive (5.0) is fixed on X-direction guide pad (6.2) by M6 screws (3.1)；It is described
Y-direction capacitance sensor (5.1) is fixed on X-direction guide pad (6.2) by M3 screws (3.2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610230549.9A CN107282948B (en) | 2016-04-12 | 2016-04-12 | A kind of Three Degree Of Freedom device applied to ultra-precise cutting processing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610230549.9A CN107282948B (en) | 2016-04-12 | 2016-04-12 | A kind of Three Degree Of Freedom device applied to ultra-precise cutting processing |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107282948A true CN107282948A (en) | 2017-10-24 |
| CN107282948B CN107282948B (en) | 2019-03-29 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610230549.9A Expired - Fee Related CN107282948B (en) | 2016-04-12 | 2016-04-12 | A kind of Three Degree Of Freedom device applied to ultra-precise cutting processing |
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| Country | Link |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN108262629A (en) * | 2018-03-21 | 2018-07-10 | 吉林大学 | A kind of large stroke and high precision two-freedom fast tool servo |
| CN109877628A (en) * | 2019-03-29 | 2019-06-14 | 南京理工大学 | A kind of big stroke cutter servo device and its control method based on combination drive |
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| CN109877628B (en) * | 2019-03-29 | 2023-09-26 | 南京理工大学 | Large-stroke cutter servo device based on hybrid drive and control method thereof |
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| Publication number | Publication date |
|---|---|
| CN107282948B (en) | 2019-03-29 |
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