CN107152922A - A kind of method of on-position measure annular plane form error - Google Patents

A kind of method of on-position measure annular plane form error Download PDF

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CN107152922A
CN107152922A CN201710298345.3A CN201710298345A CN107152922A CN 107152922 A CN107152922 A CN 107152922A CN 201710298345 A CN201710298345 A CN 201710298345A CN 107152922 A CN107152922 A CN 107152922A
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mrow
sensor
circular index
error
posture adjustment
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CN107152922B (en
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孙清超
刘鑫
王珏
孙伟
姜英杰
索嘉琪
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Dalian University of Technology
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/20Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring contours or curvatures, e.g. determining profile
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/30Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring roughness or irregularity of surfaces

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  • General Physics & Mathematics (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)

Abstract

The invention provides a kind of method of on-position measure annular plane form error, realized based on a kind of large-scale anchor ring form error on-position measure system.On-position measure system includes posture adjustment part, rotating part and measurement part;Posture adjustment part includes posture adjustment platform, posture adjustment motor and pinboard;Rotating part is tried to get to the heart of a matter seat and high accuracy point circular index disk including circular index;Measurement portion point includes clamp of sensor, sensor holder, touch sensor and its corollary equipment.The present invention realizes application of the line-of-sight course on measurement anchor ring flat form error, the algorithm improvement of on-position measure anchor ring flat form error can be realized to line-of-sight course by realizing simultaneously, the on-position measure to anchor ring flat form error can be realized, the part processing duration can be greatly reduced, reduces influence of the multiple clamping for element precision.

Description

A kind of method of on-position measure annular plane form error
Technical field
The invention belongs to flatness error on-position measure method, it can be widely applied to such as aero-engine, centrifugal compressor The measurement of planeness for the ring-shape accessory equipped etc. Important Project.
Background technology
When machine components are assembled, the form error of assembly interface is extremely important, and form error often influences to connect Rigidity and assembly precision are touched, in order to accurately control assembly performance, it is necessary to the form error of test part.At present, China is very High pressure in large-scale annular plane, such as aero-engine, low-pressure turbine shaft are widely present in many Grand Equipments, high pressure is calmed the anger Substantial amounts of annular plane, the inspection of the assembly problem and form error of these high precision parts are there is in the parts such as machine disk drum Survey relation is very close, and workpiece tends not to random rotation in assembling process, thus for the dress of these high precision parts With problem, on-position measure is carried out most important.
Gradually two point method is a kind of important method applied to measuring straightness error, passes through the place to multiple row test data Reason, can obtain the flatness error of rectangle plane, but its Processing Algorithm can eliminate the not concordant error of transducer probe assembly, but The support corners error in sensor installation process can not be isolated, while the also more difficult plane applied to narrow planar annular Spend in error-detecting;Line-of-sight course is gradually the extension of two point method, when detecting flatness error using anchor ring as measurement object, Because line-of-sight course can separate Initial Alignment Error, thus with higher measurement accuracy, but it may not apply to Position measurement, i.e., sensor is fixed and make it that workpiece rotates in measurement process, is not suitable for the shape in assembling process Position tolerance measurement.
This paper presents a kind of on-position measure method based on line-of-sight course, this method can be realized in assembling process to large-scale The flatness error measurement of annular plane, and the influence of zero error can be effectively eliminated by algorithm, show with important Sincere justice.
The content of the invention
For having the component assembly problem of large-scale annular plane in aero-engine, the present invention is based on line-of-sight course measurement The general principle of annular plane, a kind of incorporation engineering practice, it is proposed that survey in place for annular plane flatness error Amount method.
The technical scheme of this method:
A kind of anchor ring flatness on-line system, the flatness applied to aero-engine reel and cone wall end face is surveyed Measuring appratus structure includes posture adjustment part, rotating part and measurement part;
Posture adjustment part includes posture adjustment platform 5, posture adjustment platform motor 4 and pinboard 6;Posture adjustment platform 5 is used to adjust along z-axis and x-axis Angle of revolution, is controlled by posture adjustment platform motor 4, and posture adjustment platform motor 4 is by controller control;Z-axis is perpendicular to the plane of posture adjustment platform 5 Axle, adjustment angle is 0 °~360 °;X-axis is the axle of the vertical direction of principal axis of posture adjustment platform motor 4, and adjustment angle is -30 °~30 °;Switching The lower surface of plate 6 is connected on the table top of posture adjustment platform 5, and its upper surface side is connected with circular index and tried to get to the heart of a matter seat 7;
Rotating part is tried to get to the heart of a matter seat 7 and a point circular index disk 1 including circular index;Circular index tries to get to the heart of a matter the main body of seat 7 for cube Frame structure, both side surface and bottom surface are provided with T-slot, and T-slot is connected with pinboard 6 by bolt and nut;Circular index Gear on disk 1 and the circular index gear on seat 7 of trying to get to the heart of a matter are engaged;Circular index tries to get to the heart of a matter the top surface of seat 7 provided with spanner, and spanner is forward Pull, drive circular index disk 1 to travel forward, nibble gear on circular index disk 1 and the circular index gear on seat 7 of trying to get to the heart of a matter Close, can rotate required angle manually, spanner is pulled to returning, and circular index disk 1 is taken off with the gear that circular index is tried to get to the heart of a matter on seat 7 From engagement, and it is stuck with fixation;
The minimum angle of revolution of circular index disk 1 be 1 °, rotating accuracy be provided with 10``, the table top of circular index disk 1 it is T-shaped Groove and centre bore;The side of circular index disk 1 is positioned by the heart axle of centre bore and clamp of sensor 10, passes through T-slot and bolt Nut 2, which coordinates, to be fixed, and opposite side is engaged by gear and the circular index gear on seat 7 of trying to get to the heart of a matter;
Measurement portion point includes clamp of sensor 10, sensor holder 9 and touch sensor 8;Clamp of sensor 10 is Disc structure, is disposed with 4 groups of sensor jacks altogether on clamp of sensor 10, wherein two groups are single sensor jack, quantity For 3, another two groups are double sensor jack, often arrange 3, totally 6;Often the center hub position of row's sensor jack is set to 0 °, 90 °, 180 ° and 270 °, the sensor jack of central sensor jack both sides and the angle at center are 10 °;Own in often arranging Sensor jack is equal with the distance in the center of circle, unequal between row and row, the distance of center circle of sensor jack and clamp of sensor 10 From for 100mm~300mm;Single sensor jack is used for measuring the form error on flange face on centerline hole, double sensing Device jack is used for the form error of measured hole radially opposite sides;A sensor holder 9 is installed in each sensor jack to be used for Fixed touch sensor 8;The data that touch sensor 8 is measured are by RS232 bus transfers to host computer, in host computer Write Labview programs and carry out digital independent and analysis.
Because on-position measure to be realized, i.e. workpiece are motionless, measuring instrument is rotated, and now measuring instrument and anchor ring is coaxial The influence spent to measured value is very big, and the equipment can realize the leveling to axiality so that on-position measure circular planes degree is reliable Property is greatly improved.
Beneficial effects of the present invention:The present invention realizes application of the line-of-sight course on measurement anchor ring flat form error, The algorithm improvement of on-position measure anchor ring flat form error can be realized to line-of-sight course by realizing simultaneously, can be realized to annulus The on-position measure of facial plane form error, can greatly reduce the part processing duration, reduce multiple clamping for element precision Influence.
Brief description of the drawings
Fig. 1 is the structural representation of the present invention.
Fig. 2 is sensor leveling schematic diagram.
Fig. 3 is measurement error schematic diagram.
In figure:1 circular index disk;2 bolt and nuts;3T type bolt and nuts;4 posture adjustment platform motors;5 posture adjustment platforms;6 pinboards;7 Circular index is tried to get to the heart of a matter seat;8 touch sensors;9 sensor holders;10 clamp of sensor;11 spanners.
Embodiment
Below in conjunction with accompanying drawing and technical scheme, the embodiment of the present invention is further illustrated.
Embodiment
A kind of method of on-position measure annular plane form error, step is as follows:
Step A:Five touch sensors 8 are at least installed on clamp of sensor 10, wherein, three touch sensors 8V1、V2And V3It is measurement sensor, is mountable in any socket hole in any group, but be necessarily mounted at same row;The Four touch sensor 8V4It is installed on and V2During angle is 90 ° of jack, and positioned at center hub;5th contact-sensing Device 8V5It is installed on and V2During angle is 90 ° of jack, and positioned at center hub, itself and V4Symmetrically;Wherein V1、V2Folded central angle For α1, V2、V3Folded central angle is α2, wherein;α12=α, andN is the measurement point quantity on part to be measured;
Step B:If the inclination angle of part to be measured and the axle of the card of clamp of sensor 10 is θ, corner during measurement is α every time, if V1, V2, V3Three touch sensors 8 are respectively d in the distance of y-axis direction and part to be measured1, d2, d3, due to alignment error it is difficult to Complete leveling, therefore have unevenness error delta1=d2-d1, δ2=d3-d1, then for k-th of measurement point, have:
δ′11+Rθ{cos(kα)-cos[(k+1)α]} (1)
δ′22+Rθ{cos(kα)-cos[(k+2)α]} (2)
Above formula shows:Workpiece is in on-position measure, zero error δ '1With δ '2Not definite value, but corner α function, but We can make δ by leveling process1> > R θ, thus δ ' can be approximately considered11, δ '22
To V2, V4, V5Three gauge heads of touch sensor 8 carry out leveling processing, and leveling is realized by posture adjustment platform 5, posture adjustment platform 5 With two frees degree, the rotation in x-axis direction and z-axis direction can be adjusted by posture adjustment platform motor 4;Z-axis direction is adjusted first Rotation so that V4And V5The reading of two sensorses is identical, then adjusts the rotation in x-axis direction so that V2Reading and V4And V5's Reading is identical;
Step C:After Levelling operation, V2, V4, V5Determine a basal plane;V1, V3Two touch sensors 8 and this basal plane Certain sensor alignment error is had in the y-axis direction, and the reduction that can be tried one's best by adjusting clamp of sensor 10 repeatedly is poor Value, alignment error δ1、δ2It is difficult to which leveling completely, leveling can only make δ1、δ2Reduce as far as possible;
Step D:Complete after step B and step C, read V1, V2, V3Numerical value simultaneously records the first group number-reading;Then pull forward Spanner 11 rotates circular index disk 1, and circular index disk 1 is rotated clockwise or counterclockwise afterwards, and corner is α, is pulled backward Wrench 11 fixes circular index disk 1, records the second group number-reading, by that analogy, reads N group number-readings;
If S (k) is the component of part kth to be measured time measurement point flatness error in the y-axis direction, R (k) is clamp of sensor The component of 10 kth time measurement point on the y axis, tan γ (k) are angles caused by clamp of sensor plane error.V1(k)、V2(k)、 V3(k) it is respectively sensor V1、V2、V3Same group of measured value, Δ l be two adjacent measurement points between interval, then have:
V1(k)=S (k)+R (k) (3)
V2(k)=S (k+1)+R (k)+Δ ltan γ (k) (4)
V3(k)=S (k+2) Δ ltan γ of+R (k)+2 (k) (5)
R (1)=0 is made, then has S (1)=V1(1), S (2)=V2(1), so as to try to achieve recurrence formula:
S (k+2)=V1(k)-2V2(k)+V3(k)-S(k)+2S(k+1) (6)
Have when considering that peace turns the unevenness error caused:
V1(k)=S (k)+R (k) (7)
V2(k)=S (k+ Δ l)+R (k)+Δ ltan γ (k)+δ1 (8)
V3(k)=S (Δs of k+2 Δ l)+R (k)+2 ltan γ (k)+δ2 (9)
It is so as to the error term for obtaining S (k+2) using induction:
Step E:Circular index disk 1 is rotated further after reading N group number-readings, N+1 groups and N+2 group data are read, used To eliminate initial value error.Because tested surface is annulus, have againTherefore N+1 points and the 1st point coincidence, N+2 points and 2nd point of coincidence, order
A=S (N+2)-S (2), b=S (N+1)-S (1), (11)
δ can be solved1And δ2Value be respectively:
Solve, δ1And δ2In substitution formula (6), the value Δ s (k+2) of S (k+2) error term is can obtain, then error separate formula For

Claims (1)

1. a kind of a kind of method of on-position measure annular plane form error, it is characterised in that described on-position measure annulus The method of shape flat form error carries out on-line measurement with a kind of anchor ring flatness on-line system;
Described anchor ring flatness on-line system includes posture adjustment part, rotating part and measurement part;
Posture adjustment part includes posture adjustment platform (5), posture adjustment platform motor (4) and pinboard (6);Posture adjustment platform (5) is used to adjust along z-axis and x The angle of revolution of axle, is controlled, posture adjustment platform motor (4) is by controller control by posture adjustment platform motor (4);Z-axis is perpendicular to posture adjustment platform (5) axle of plane, adjustment angle is 0 °~360 °;X-axis be vertical posture adjustment platform motor (4) direction of principal axis axle, adjustment angle for- 30 °~30 °;The lower surface of pinboard (6) is connected on posture adjustment platform (5) table top, and its upper surface side is connected with circular index disk Base (7);
Rotating part is tried to get to the heart of a matter seat (7) and point circular index disk (1) including circular index;Circular index tries to get to the heart of a matter seat (7) main body for just Body frame structure, both side surface and bottom surface are provided with T-slot, and T-slot is connected with pinboard (6) by bolt and nut;Revolution Gear on index dial (1) and the circular index gear on seat (7) of trying to get to the heart of a matter are engaged;Circular index tries to get to the heart of a matter seat (7) top surface provided with pulling Hand, spanner is pulled forward, drives circular index disk (1) to travel forward, and makes the gear and circular index disk on circular index disk (1) On base (7) gear engagement, manually rotate needed for angle, spanner to return pull, make circular index disk (1) and circular index disk Gear on base (7) is disengaged from, and stuck with fixation;
The minimum angle of revolution of circular index disk (1) be 1 °, rotating accuracy be provided with 10``, circular index disk (1) table top it is T-shaped Groove and centre bore;Circular index disk (1) side is positioned by the heart axle of centre bore and clamp of sensor (10), by T-slot and Bolt and nut (2), which coordinates, to be fixed, and opposite side is engaged by gear and the circular index gear on seat (7) of trying to get to the heart of a matter;
Measurement portion point includes clamp of sensor (10), sensor holder (9) and touch sensor (8);Clamp of sensor (10) it is disc structure, is disposed with 4 groups of sensor jacks altogether on clamp of sensor (10), wherein two groups is single sensor and inserts Hole, quantity is 3, and another two groups are double sensor jack, often arrange 3, totally 6;Often arrange the center hub position of sensor jack Install as 0 °, 90 °, 180 ° and 270 °, the sensor jack of central sensor jack both sides and the angle at center are 10 °;Often arrange Middle all the sensors jack is equal with the distance in the center of circle, unequal between row and row, sensor jack and clamp of sensor (10) Circle center distance be 100mm~300mm;Single sensor jack is used for measuring the flatness on flange face on centerline hole, double Arrange the flatness that sensor jack is used for measured hole radially opposite sides;A sensor holder is installed in each sensor jack (9) it is used for fixing touch sensor (8);The data of touch sensor (8) measurement are by RS232 bus transfers to upper Machine, Labview programs are write in host computer and carry out digital independent and analysis;
Step is as follows:
Step A:Five touch sensors (8) are at least installed on clamp of sensor (10), wherein, three touch sensors (8)V1、V2And V3It is measurement sensor, is installed in any socket hole in any group, but be necessarily mounted at same row;The Four touch sensor (8) V4It is installed on and V2During angle is 90 ° of jack, and positioned at center hub;5th contact is passed Sensor (8) V5It is installed on and V2During angle is 90 ° of jack, and positioned at center hub, itself and V4Symmetrically;Wherein V1、V2Folded circle Heart angle is α1, V2、V3Folded central angle is α2, wherein:α12=α, andN is the measurement point quantity on part to be measured;
Step B:If the inclination angle of part to be measured and the axle of clamp of sensor (10) card is θ, corner during measurement is α every time, if V1, V2, V3Three touch sensors (8) are respectively d in the distance of y-axis direction and part to be measured1, d2, d3, due to alignment error it is difficult to Complete leveling, therefore have unevenness error delta1=d2-d1, δ2=d3-d1, then for k-th of measurement point, have:
δ1'=δ1+Rθ{cos(kα)-cos[(k+1)α]} (1)
δ2'=δ2+Rθ{cos(kα)-cos[(k+2)α]} (2)
Above formula shows:Part to be measured is in on-position measure, zero error δ1' and δ2' not definite value, but corner α function, pass through Leveling process makes δ1>>R θ, it is thus regarded that δ1'=δ1, δ2'=δ2
To V2, V4, V5Three touch sensor (8) gauge heads carry out leveling processing, and leveling is realized by posture adjustment platform (5), posture adjustment platform (5) there are two frees degree, the rotation in x-axis direction and z-axis direction is adjusted by posture adjustment platform motor (4);Z-axis direction is adjusted first Rotation so that V4And V5The reading of two sensorses is identical, then adjusts the rotation in x-axis direction so that V2Reading and V4And V5's Reading is identical;
Step C:After Levelling operation, V2, V4, V5Determine a basal plane;V1, V3Two touch sensors (8) are with this basal plane in y There is alignment error on direction of principal axis, reduce difference to try one's best by adjusting clamp of sensor (10) repeatedly, make δ1、δ2Subtract as far as possible It is small;
Step D:Complete after step B and step C, read V1, V2, V3Numerical value simultaneously records the first group number-reading;Then spanner is pulled forward (11) rotate circular index disk (1), circular index disk (1) is rotated clockwise or counterclockwise afterwards, corner is α, is pulled backward Spanner (11) makes circular index disk (1) fixed, records the second group number-reading, by that analogy, reads N group number-readings;
If S (k) is the component of part kth to be measured time measurement point flatness error in the y-axis direction, R (k) is clamp of sensor (10) The component of kth time measurement point on the y axis, tan γ (k) are angles caused by clamp of sensor plane error;V1(k)、V2(k)、V3 (k) it is respectively sensor V1、V2、V3Same group of measured value, Δ l be two adjacent measurement points between interval, then have:
V1(k)=S (k)+R (k) (3)
V2(k)=S (k+1)+R (k)+Δ ltan γ (k) (4)
V3(k)=S (k+2) Δ ltan γ of+R (k)+2 (k) (5)
R (1)=0 is made, then has S (1)=V1(1), S (2)=V2(1), so as to try to achieve recurrence formula:
S (k+2)=V1(k)-2V2(k)+V3(k)-S(k)+2S(k+1) (6)
Have when considering that peace turns the unevenness error caused:
V1(k)=S (k)+R (k) (7)
V2(k)=S (k+ Δ l)+R (k)+Δ ltan γ (k)+δ1 (8)
V3(k)=S (Δs of k+2 Δ l)+R (k)+2 ltan γ (k)+δ2 (9)
Using induction, so that the error term for obtaining S (k+2) is:
<mrow> <mi>&amp;Delta;</mi> <mi>s</mi> <mrow> <mo>(</mo> <mi>k</mi> <mo>+</mo> <mn>2</mn> <mo>)</mo> </mrow> <mo>=</mo> <mo>-</mo> <mrow> <mo>(</mo> <mi>k</mi> <mo>-</mo> <mn>1</mn> <mo>)</mo> </mrow> <mrow> <mo>(</mo> <mi>k</mi> <mo>+</mo> <mn>1</mn> <mo>)</mo> </mrow> <msub> <mi>&amp;delta;</mi> <mn>1</mn> </msub> <mo>+</mo> <mfrac> <mn>1</mn> <mn>2</mn> </mfrac> <mi>k</mi> <mrow> <mo>(</mo> <mi>k</mi> <mo>+</mo> <mn>1</mn> <mo>)</mo> </mrow> <msub> <mi>&amp;delta;</mi> <mn>2</mn> </msub> <mo>,</mo> <mi>k</mi> <mo>=</mo> <mn>1</mn> <mo>,</mo> <mn>2</mn> <mo>,</mo> <mn>...</mn> <mo>,</mo> <mi>N</mi> <mo>-</mo> <mo>-</mo> <mo>-</mo> <mrow> <mo>(</mo> <mn>10</mn> <mo>)</mo> </mrow> </mrow>
Step E:Circular index disk (1) is rotated further after reading N group number-readings, N+1 groups and N+2 group data is read, is used to Eliminate initial value error;Because tested surface is annulus, have againTherefore N+1 points and the 1st point of coincidence, N+2 points and the 2nd Point is overlapped, order
A=S (N+2)-S (2), b=S (N+1)-S (1), (11)
Solve δ1And δ2Value be respectively:
<mrow> <msub> <mi>&amp;delta;</mi> <mn>1</mn> </msub> <mo>=</mo> <mfrac> <mrow> <mo>(</mo> <mi>N</mi> <mo>+</mo> <mn>1</mn> <mo>)</mo> <mi>b</mi> <mo>-</mo> <mo>(</mo> <mi>N</mi> <mo>-</mo> <mn>1</mn> <mo>)</mo> <mi>a</mi> </mrow> <mrow> <msup> <mi>N</mi> <mn>2</mn> </msup> <mo>+</mo> <mn>1</mn> </mrow> </mfrac> <mo>,</mo> <msub> <mi>&amp;delta;</mi> <mn>2</mn> </msub> <mo>=</mo> <mfrac> <mrow> <mn>4</mn> <mo>-</mo> <mn>2</mn> <mi>N</mi> </mrow> <mrow> <msup> <mi>N</mi> <mn>2</mn> </msup> <mo>+</mo> <mn>1</mn> </mrow> </mfrac> <mi>&amp;alpha;</mi> <mo>+</mo> <mfrac> <mrow> <mn>2</mn> <mrow> <mo>(</mo> <msup> <mi>N</mi> <mn>2</mn> </msup> <mo>+</mo> <mi>N</mi> <mo>-</mo> <mn>1</mn> <mo>)</mo> </mrow> <mi>b</mi> </mrow> <mrow> <msup> <mi>N</mi> <mn>3</mn> </msup> <mo>+</mo> <mi>N</mi> </mrow> </mfrac> <mo>-</mo> <mo>-</mo> <mo>-</mo> <mrow> <mo>(</mo> <mn>12</mn> <mo>)</mo> </mrow> </mrow>
Solve, δ1And δ2In substitution formula (6), the value Δ s (k+2) of S (k+2) error term is can obtain, then error separate formula is
<mrow> <mover> <mi>S</mi> <mo>&amp;OverBar;</mo> </mover> <mrow> <mo>(</mo> <mi>k</mi> <mo>+</mo> <mn>2</mn> <mo>)</mo> </mrow> <mo>=</mo> <mi>S</mi> <mrow> <mo>(</mo> <mi>k</mi> <mo>+</mo> <mn>2</mn> <mo>)</mo> </mrow> <mo>-</mo> <mi>&amp;Delta;</mi> <mi>s</mi> <mrow> <mo>(</mo> <mi>k</mi> <mo>+</mo> <mn>2</mn> <mo>)</mo> </mrow> <mo>,</mo> <mrow> <mo>(</mo> <mi>k</mi> <mo>=</mo> <mn>1</mn> <mo>,</mo> <mn>2</mn> <mo>,</mo> <mn>...</mn> <mo>,</mo> <mi>N</mi> <mo>)</mo> </mrow> <mo>-</mo> <mo>-</mo> <mo>-</mo> <mrow> <mo>(</mo> <mn>13</mn> <mo>)</mo> </mrow> <mo>.</mo> </mrow> 2
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CN111189379A (en) * 2020-01-14 2020-05-22 大连理工大学 Inner cavity surface roughness in-situ detection method based on double-point rotational friction
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CN114001632B (en) * 2021-11-02 2023-09-19 中国科学院光电技术研究所 Flatness detection device and detection method for large ultra-precise annular plane
CN117596536A (en) * 2024-01-18 2024-02-23 杭州爱华仪器有限公司 Device and method for switching incident angle during microphone frequency weighting test
CN117596536B (en) * 2024-01-18 2024-04-09 杭州爱华仪器有限公司 Device and method for switching incident angle during microphone frequency weighting test

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