CN107139345B - The complex-curved ultra-precise cutting forming method of fragile material - Google Patents
The complex-curved ultra-precise cutting forming method of fragile material Download PDFInfo
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- CN107139345B CN107139345B CN201710427481.8A CN201710427481A CN107139345B CN 107139345 B CN107139345 B CN 107139345B CN 201710427481 A CN201710427481 A CN 201710427481A CN 107139345 B CN107139345 B CN 107139345B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
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Abstract
The present invention relates to a kind of complex-curved ultra-precise cutting forming methods of fragile material, include: according to optical property principle of optimality optimization design fragile material closely turn round it is complex-curved, shape decomposition in face is carried out according to rotating part and non-rotating part to design curved surface, calculates the non-rotating degree for decomposing the non-rotating face obtained；Fast tool servo turnery processing system is built, process tool is mounted on formation fast tool servo mechanism on fast tool servo；According to the cutting ability of fast tool servo Tutrning Process characteristic and material, suitable cutting parameter and tool geometrical parameter are designed；Rotating part is carried out based on machined parameters and tool geometrical parameter and non-rotating part machining path generates, and carries out path compensation before processing, and cutter profile is after forming finished surface behind the path after compensation；Workpiece to be machined is assemblied in machine tool chief axis, carries out fast tool servo turnery processing.
Description
Technical field
The present invention relates to a kind of method for turning.
Background technique
It is non-rotational symmetric optical surface that surface freely changes that optics is complex-curved.The complex-curved application field of optics
It is extremely wide, cover multiple interdisciplinary fields such as new energy, aerospace, illumination imaging, bioengineering.Compare traditional optical table
Face, optics is complex-curved to have more superior performance, and curved surface freedom degree can propagate light control effectively greatly, can have
Conducive to expansion field angle and reduce difference and distortion, simultaneously for more light optic systems, addition is complex-curved to can be reduced system
Volume and weight, while improving the image quality of system.
Fragile material (such as semiconductor material, optical crystal material) has superior ultraviolet or infrared transmittivity, high damage
Hurt the characteristics such as threshold value, high refractive index, complex-curved application demand is gradually increasing, however is limited by material property, real
Existing fragile material processing still has numerous difficulties.Since optical crystal enbrittles greatly, breaking strength and yield strength
It is closer to, currently, general superfine grinding is to process the complex-curved important method of fragile material.However, grinding side
Method is to be ground optical device molding repeatedly by small abrasive grain, and processing efficiency is lower, and for soft-brittle material, abrasive material
The easy portion of being embedded within forms impurity and defect, in turn results in the failure of optical function.And Ultra-precision machining method is to pass through
The processing of diamond single-point is particularly suitable for carrying out complex-curved optical device stable and controllable processing.And fragile material is being cut
During cutting, material easily receives stress and generates the surface damages such as brittle fracture.To guarantee that material is in no embrittlement in cutting process
Under the conditions of carry out, need to control single removal amount material crisp modeling transformation depth bounds within.It is complicated for fragile material bent
For face, single cutting removal amount need to be controlled during high-speed turning.Therefore, the complex-curved height of fragile material ultraprecise is studied
Fast turning forming method has important practical significance for the deep application for promoting fragile material optics complex-curved.
Summary of the invention
The present invention provides a kind of brittleness that can avoid excessively free face shape design while guaranteeing optical property to greatest extent
The complex-curved ultra-precise cutting forming method of material.Technical solution is as follows:
A kind of complex-curved ultra-precise cutting forming method of fragile material, including the following steps:
1) foundation optical property principle of optimality optimization design fragile material closely turns round complex-curved, to asymmetric item in design
Coefficient carry out numerical definiteness constraint, thus restricted curved surface variation freedom degree；
2) shape decomposition in face is carried out according to rotating part and non-rotating part to design curved surface, calculates and decomposes the non-rotating of acquisition
The non-rotating degree in face determines the index within the scope of fast tool servo working ability；
3) fast tool servo turnery processing system is built, process tool is mounted on fast tool servo and forms fast tool servo
Mechanism；
4) according to the cutting ability of fast tool servo Tutrning Process characteristic and material, suitable cutting parameter and cutter are designed
Geometric parameter, to guarantee machined surface quality；
5) rotating part is carried out based on machined parameters and tool geometrical parameter and non-rotating part machining path generates, and
Path compensation is carried out before processing, cutter profile is after forming finished surface behind the path after compensation；
6) workpiece to be machined is assemblied in machine tool chief axis, carries out fast tool servo turnery processing, when processing, main shaft rotation is driven
Workpiece rotation, the guide rail of lathe provides laterally and cutting-in direction is fed and the high frequency for combining fast tool servo mechanism to generate small size is past
Multiple movement, forms complex-curved face shape.
The fragile material can be monocrystalline germanium, the range of non-rotating degree determined by step 2) be [- 27.841,
27.839] μm, within the scope of fast tool servo working ability.Designed cutting parameter and tool geometrical parameter is as follows: main shaft
Revolving speed is 2500rpm, nose radius 0.5mm, is 1mm/min in cutter transverse direction feed rate, back engagement of the cutting edge is 1 μm
When, the control of single removal amount is in 30nm hereinafter, being removed with reaching in the crisp modeling transformation range of monocrystalline germanium.
The present invention realizes the complex-curved processing of fragile material using fast tool servo turnery processing mode, and it is crisp to avoid cutting
Property materials process in easy embrittlement the problem of, realize high efficiency, great surface quality processing.Have compared with prior art following excellent
Point:
(1) it is moved back and forth by the fast response servo of cutter and is coupled with ultra-precise cutting mode, realized to material fast and stable
Cutting, the difficulty having taken into account the contradiction of cutting fragile material and complex surface machining, while both having reduced guarantees well
Fragile material complex-curved surface quality and optical property.
(2) mentality of designing of the nearly surface of revolution is used, it can be using smooth complex-curved or containing micro-structure song
Face.This method, similarly can High-speed machining other materials other than being suitable for cutting fragile material.Turn round the mode of cutting not
The complex-curved of round bore can be only processed, the complex-curved of processing other shapes bore is equally applicable to.
Detailed description of the invention
Fig. 1 fast tool servo movement auxiliary turning schematic diagram
Fig. 2 closely turns round complex-curved composition and non-rotating degree schematic diagram
Fig. 3 actual cut thickness schematic diagram
Fig. 4 tool geometry compensation relationship figure
Specific embodiment
For fragile material complex surface machining formation problems, the present invention proposes fast tool servo method for turning, in traditional vehicle
Fast response servo movement is added on the basis of cutting, and increases one-dimensional quick movement for tool motion, i.e. cutter can be along rise direction (Z-direction)
The high-frequency reciprocating movement of small stroke is carried out, this mode is also referred to as fast tool servo.Fast tool servo auxiliary is added in turning process
Processing can add corresponding non-rotating amount, to generate the complexity with non-rotational symmetric on the basis of surface of revolution is processed
Curved surface.In the case that there is fast tool servo system higher-frequency to ring, it is adapted to high-speed main spindle revolving speed, to guarantee complex-curved
Quick cutting forming.
Specific embodiment is as follows:
1. according to optical property principle of optimality optimization design fragile material closely turn round it is complex-curved, to asymmetric item in design
Coefficient carry out numerical definiteness constraint, thus restricted curved surface variation freedom degree；
2. pair design curved surface carries out the decomposition of face shape according to rotating part and non-rotating part, calculates and decompose the non-rotating of acquisition
The non-rotating degree in face determines the index within the scope of fast tool servo working ability；
3. building fast tool servo turnery processing system, including turning main shaft, traverse feed guide rail, cutting depth feeding is led
Process tool is mounted on formation fast tool servo mechanism on fast tool servo by rail；
4. designing suitable cutting parameter and cutter according to the cutting ability of fast tool servo Tutrning Process characteristic and material
Geometric parameter, to guarantee machined surface quality；
5. rotating part is carried out based on machined parameters and tool geometrical parameter and non-rotating part machining path generates, and
Path compensation is carried out before processing, cutter profile is after forming finished surface behind the path after compensation；
6. workpiece to be machined is assemblied in machine tool chief axis, fast tool servo turnery processing is carried out.When processing, main shaft rotation is driven
Workpiece rotation, the guide rail of lathe provides laterally and cutting-in direction is fed and the high frequency for combining fast tool servo mechanism to generate small size is past
Multiple movement, forms complex-curved face shape.
Fragile material workpiece is installed on the main shaft (C axis) of super precision lathe specific processing method as shown in Figure 1:, main shaft
Rotary shaft and complex-curved face shape central coaxial.Main shaft rotates a circle in process, and diamond cutter is in quick motion control
Under system SERVO CONTROL, change the motion control for carrying out the direction Z' according to surface radius in different rotary angle.Therefore, whole
A complex-curved upper carry out continuous cutting, thickness of cutting is by tool geometry and the cutter wheel on turning radial direction
Wide spacing is determined.One week cutter of every processing is fed under X-axis control, realizes entire complex-curved helix processing,
Until surface processing is complete.The advantages of revolution cutting is utilized in this processing method, resolves into a revolution pair for complex-curved
Claim surface and a non-rotating face, as shown in Figure 2.Rotationally symmetrical surface is traversed using the X-axis and Z axis of lathe, and fast tool servo
The main shaft rotation for reciprocating through coupling lathe itself of mechanism offer and the non-rotating face of guide rail linear motion traversal, therefore,
It may be implemented to complex-curved continuously quick cutting, high in machining efficiency and processing quality is good.
Fast tool servo stroke and frequency response are considered in the design, have carried out the nearly complex-curved design of the surface of revolution, the song
Face curved surface uses XY polynomial expression, and equation is as follows,
Wherein c, k are respectively aspherical curvature and circular cone coefficient, AmnFor multinomial coefficient.According to the above analysis, the table
It should be formed up to formula to add the variable quantity of very little on rotationally symmetrical curved surface (aspherical for one herein), i.e.,
Z (x, y)=zrot(r)+δ(r,θ) (2)
Wherein, δ (r, θ) is the variable quantity for the very little added on rotationally symmetrical curved surface, the rotating part source in (2) formula
The rotationally symmetrical part in conic section expression formula and multinomial in (1) formula, and variable quantity δ (r, θ) is in sagitta of arc direction
The minor change for providing rise finally obtains nearly surface of revolution to eventually become non-rotating ingredient.
In a particular embodiment, by taking the continuous complex-curved processing of typical fragile material monocrystalline germanium as an example.Closely returned
The parameter in XY polynomial surface expression formula (1) after turning the complex-curved design in face is as shown in table 1.Its surface of revolution is non-by even
Spherical surface expression, i.e.,
Design parameter is as shown in table 2.Corresponding non-rotating face is expressed as simple XY multinomial, i.e.,
Design parameter is as shown in table 3.The range of non-rotating degree is that [- 27.841,27.839] μm is closely turned round due to using
Face can guarantee the higher rotation speed of turning main shaft in fast tool servo turnery processing, be advantageously implemented fragile material high-efficiency low-damage and add
Work.
Needed in the above process concern machined parameters select permeability, that is, select the suitable speed of mainshaft, feed rate with
And tool geometry, because corresponding actual cut thickness is answered under Cutting parameters for the fragile material processed
Crisp modeling transformation thickness in the material is hereinafter, the size of thickness of cutting is as shown in Figure 3.The speed of mainshaft exists in specific embodiment
2500rpm, nose radius 0.5mm, when cutter X-direction feed rate is 1mm/min, and back engagement of the cutting edge is 1 μm, single removal
Amount control is removed in the crisp modeling transformation range of monocrystalline germanium in 30nm hereinafter, can reach, and ensure that the fragile material without fragmentation
Processing.
Each position minimum point and ideal surfaced to guarantee tool motion is tangent, need to be in the motion path for generating tool sharpening
When, it needs to compensate the geometry of cutter, the compensation of tool position is as shown in Figure 4.For Circular Nose Cutting Edge cutter, work as cutter
When positioned at workpiece along the radial profile f (r) of assigned direction, before machining path compensation, center cutter P0Positioned at contour line
On, it needs cutter moving specific range along Z axis at this time, which should be equal to the maximum of contour line and cutter profile rise difference
Value, i.e.,
Δ z=max { Li} (5)
After compensation, center cutter is located at Pt, cutter profile and surface are tangent along the contour line of radial direction, point of contact Pc, change
Point is also actual cut point.At this point, effectively avoiding the over-cutting in actual processing by the compensation to tool geometry.
After choosing suitable machined parameters and path compensation, ideal finished surface should be cutter profile line and transports along machining path reality
Surface is formed by after dynamic.
Complex-curved parameter is closely turned round in 1 embodiment of table
Complex-curved surface of revolution partial parameters are closely turned round in 2 embodiment of table
Complex-curved non-rotating face partial parameters are closely turned round in 3 embodiment of table
Claims (3)
1. a kind of complex-curved ultra-precise cutting forming method of fragile material, including the following steps:
1) foundation optical property principle of optimality optimization design fragile material closely turns round complex-curved, to asymmetric item system in design
Number carries out numerical definiteness constraint, thus the freedom degree of restricted curved surface variation；
2) shape decomposition in face is carried out according to rotating part and non-rotating part to design curved surface, calculates and decomposes the non-rotating face obtained
Non-rotating degree determines the index within the scope of fast tool servo working ability；
3) fast tool servo turnery processing system is built, process tool is mounted on formation fast tool servo machine on fast tool servo
Structure；
4) according to the cutting ability of fast tool servo Tutrning Process characteristic and material, suitable cutting parameter and cutter geometry are designed
Parameter, to guarantee machined surface quality；
5) rotating part is carried out based on cutting parameter and tool geometrical parameter and non-rotating part machining path generates, and processed
Preceding carry out path compensation, cutter profile is after forming finished surface behind the path after compensation；
6) workpiece to be machined is assemblied in machine tool chief axis, carries out fast tool servo turnery processing, when processing, main shaft rotation drives workpiece
Rotation, the guide rail of lathe, which provides, laterally to be fed with cutting-in direction and combines the high-frequency reciprocating fortune of fast tool servo mechanism generation small size
It is dynamic, form complex-curved face shape.
2. turning forming method according to claim 1, which is characterized in that the fragile material is monocrystalline germanium, step 2)
The range of identified non-rotating degree is [- 27.841,27.839] μm, within the scope of fast tool servo working ability.
3. turning forming method according to claim 2, which is characterized in that cutting parameter designed by step 4) and cutter
Geometric parameter is as follows: speed of mainshaft 2500rpm, nose radius 0.5mm, is 1mm/ in cutter transverse direction feed rate
Min, when back engagement of the cutting edge is 1 μm, the control of single removal amount is in 30nm hereinafter, being carried out with reaching in the crisp modeling transformation range of monocrystalline germanium
Removal.
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| CN110039665B (en) * | 2019-05-14 | 2020-12-04 | 湖南大学 | Device for dynamically monitoring removal of ultra-precision machining toughness and brittleness of ceramic material |
| CN112496353B (en) * | 2020-11-18 | 2022-03-29 | 中国科学院上海技术物理研究所 | Diamond turning free-form surface rough turning process method |
| CN114137904B (en) * | 2021-12-08 | 2023-07-14 | 北京精雕科技集团有限公司 | Path generation method for curved surface turning |
| CN114952425B (en) * | 2022-05-27 | 2023-06-27 | 南方科技大学 | Method for processing aspheric surface by linear blade |
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