CN107121694A - A kind of method and system for monitoring pulse gas cluster ions beam on-line - Google Patents
A kind of method and system for monitoring pulse gas cluster ions beam on-line Download PDFInfo
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- CN107121694A CN107121694A CN201710382696.2A CN201710382696A CN107121694A CN 107121694 A CN107121694 A CN 107121694A CN 201710382696 A CN201710382696 A CN 201710382696A CN 107121694 A CN107121694 A CN 107121694A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/29—Measurement performed on radiation beams, e.g. position or section of the beam; Measurement of spatial distribution of radiation
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
- H01J49/0422—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components for gaseous samples
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Abstract
The invention provides a kind of method for monitoring pulse gas cluster ions beam on-line, first all cluster ions in cluster ions beam are applied with the cluster ions of different charge-mass ratios in identical voltage, diplomatic corps's ion beam has each different speed；Cluster ions are screened by velocity selector, and a portion cluster ions deviate, and another part cluster ions maintain former direction to be sprayed from velocity selector outlet；The cluster ions beam sprayed is measured with Faraday cup, cluster ions quantity is determined, and utilize the Real time vision ion beam current count results being connected with Faraday cup.Invention also provides a kind of monitoring system, including with air inlet pipe, pulse valve, nozzle, beam splitter, electro-dissociator, accelerator, velocity selector, diaphragm and Faraday cup.The present invention realizes the quality selection of pulse cluster ions using the magnetic field of continuously adjustabe, judges presence and the quantity of weight cluster ions, realizes ion isolation, on-line measurement and monitoring.
Description
Technical field
The present invention relates to a kind of method and system for monitoring pulse gas cluster ions beam on-line, belong to gas-cluster ion
Beam field.
Background technology
As computer, mobile communication equipment are to device miniaturization, the demand of information magnanimity, integrated circuit is already nowhere
Do not exist, broken through that 22nm device gates are long, this is accomplished by an ultra shallow doping that 10~7nm is carried out to Silicon Wafer, and it is researched and developed and produced
Necessarily it be unable to do without ion implantation technology.Ion implantation technology is weighed because concentration controllability, the accuracy of injection depth and stabilization
Renaturation, gains great popularity in advanced semiconductor devices manufacture.In injection process, monatomic ion channelling effect, which is easily caused, drags
Tail phenomenon, deeper doping depth is difficult to avoid that.To meet junction depth more and more shallow requirement, in reduction injection ion energy, change
While becoming incident inclination angle, practicable method is also turned into using multi-atomic ion, therefore cluster ions beam technology is obtained
Pay attention to.
Gas cluster ion beam equipment can produce atomicity from several to thousands of, or even the cluster ions of up to ten thousand, and
The charge number of each cluster ions is still an electron charge e.In the gentle pressure of normal temperature, raw material is gas, passes through taper
After nozzle, gas material expansion and adiabatic cooling are condensed into neutral cluster, then ionized in the collision with electronics, shape
Into gas cluster ion beam.In actual process, when weight cluster ions are acted on silicon face, with high-energy-density, high-quality lotus
Than, the property such as horizontal splash effect, multiple scattering, more polyatom can be transported under the conditions of identical line, thus more meets ion
Inject the requirement of doping.Because weight cluster ions size is big, these effects all occur in very shallow surface region, so cluster
There is wide spectrum in terms of the modification of surface, such as prepared by an ultra shallow doping, sub- nano thin-film, surface superhigh precision planarization process
Deng.
It is currently available that the cluster ions size that ion cluster source is produced is distributed more widely, while producing cluster, also has
Monatomic ion, and accelerate in the lump with cluster, transmit to sample surfaces.Thus need to distinguish weight cluster and monatomic ion,
Determine the presence of cluster ions beam and determine its quantity, be then the important prerequisite that cluster ions beam technology is able to apply.
The content of the invention
In order to solve the deficiencies in the prior art, the invention provides a kind of side for monitoring pulse gas cluster ions beam on-line
Method and system, can isolate monatomic ion and light cluster from pulse cluster beam, and cluster Mass Distribution be carried out qualitative
Quantitative analysis, total beam is controlled using pulse gas supplying valve, and different cluster ions, profit are separated with crossed electric and magnetic field velocity selector
Realized with the magnetic field of continuously adjustabe cluster ions quality selection so that judge weight cluster ions presence and quantity, realize from
Son separation, on-line measurement and monitoring.
The present invention is for the technical scheme that is used of its technical problem of solution：There is provided one kind on-line monitoring pulse gas group
The method of ion beam, comprises the following steps：
(1) all cluster ions in cluster ions beam are applied with different lotus matter in identical voltage, diplomatic corps's ion beam
The cluster ions of ratio have each different speed；
(2) cluster ions are screened by velocity selector, and wherein monatomic ion and atomicity is light less than or equal to 100
Cluster ions deviate, and the heavy cluster ions that atomicity is more than 100 maintain former direction to be sprayed from velocity selector outlet；
(3) the cluster ions beam sprayed is measured with Faraday cup, cluster ions quantity is determined, and utilize and Faraday cup
The Real time vision ion beam current count results of connection.
Step (1) described cluster ions are produced by procedure below：Gases at high pressure spray from the nozzle of pulse valve, in nozzle
Neutral cluster is produced in the presence of the separator in front, while producing electronics by electro-dissociator, and makes neutrality with neutral cluster collision
Cluster is powered, forms cluster ions.
In step (1), identical voltage is applied to all cluster ions in cluster ions beam using accelerator.
During step (1), (2) and (3), with the form and envelope of camera captured in real-time cluster ions beam, and
Ion beam envelope movement situation is shown on computer.
Invention also provides a kind of pulse gas cluster ions beam on-line monitoring system based on the above method, including
The pulse valve and the nozzle of the pulse valve port of export connected with air inlet pipe, and arranged successively on nozzle emission direction straight line
Beam splitter, electro-dissociator, accelerator, velocity selector, diaphragm (are barrier with holes, limitation deflection cluster passes through, only allows to roll into a ball again
Cluster ion reaches terminal) and Faraday cup.
Each gas pulses that the pulse valve sprays are 5~20ms.
A diameter of 0.15~0.25mm of the nozzle.
The velocity selector uses one kind in parallel electric field, quadrature field, and orthogonal electromagnetic field three.
The velocity selector uses orthogonal electromagnetic field, and its adjustable range is 0~100mT.
The negative electrode connection negative electrode power supply U of the electro-dissociatorf, the anode jointed anode power supply U of electro-dissociatora, ionization
The anode of device passes through high-voltage suppling power U simultaneouslyHVWith load resistance R in parallelLConnected with one end of oscillograph, load resistance RL
It is connected with the other end of oscillograph with Faraday cup；The high-voltage suppling power UHVWith connect after resistance Rd1With resistance Rd2And
It is connected after connection with accelerator, for providing voltage for accelerator；The oscillograph is connected by RS232 cables with computer.
The present invention is had advantageous effect in that based on its technical scheme：The present invention utilizes weight cluster and light cluster ions
With this feature of different charge-mass ratios, identical accelerating potential is applied by giving it, and in regulating magnet magnetic field size,
The cluster ions beam direction of motion can be changed so that weight cluster and light cluster deflection is not of uniform size to be caused, thus reach it is monatomic from
The purpose that sub and light cluster ions are separated, and the ion beam current for reaching Faraday cup is accurately measured, obtain cluster
The size of ion beam current and the quantity of ion.
Brief description of the drawings
Fig. 1 is the schematic diagram of pulse gas cluster ions beam on-line monitoring system of the present invention.
Fig. 2 is that source gas pressure intensity is certain, the ion beam current curve under different magnetic field effect.
Fig. 3 is change source gas pressure intensity, the ion beam current curve under different magnetic field effect.
In figure：1- air inlet pipe, 2- pulse valves, 3- nozzles, 4- beam splitters, 5- electro-dissociators, 6- accelerators, 7- cluster ions,
8- velocity selectors, 9- monatomic ions and light cluster ions, 10- diaphragms, 11- Faraday cups, 12- oscillographs.
Embodiment
The invention will be further described with reference to the accompanying drawings and examples.
The invention provides a kind of method for monitoring pulse gas cluster ions beam on-line, comprise the following steps：
(1) all cluster ions in cluster ions beam are applied with different lotus matter in identical voltage, diplomatic corps's ion beam
The cluster ions of ratio have each different speed；
(2) cluster ions are screened by velocity selector, and wherein monatomic ion and atomicity is light less than or equal to 100
Cluster ions deviate, and the heavy cluster ions that atomicity is more than 100 maintain former direction to be sprayed from velocity selector outlet；
(3) the cluster ions beam sprayed is measured with Faraday cup, cluster ions quantity is determined, and utilize and Faraday cup
The Real time vision ion beam current count results of connection.
Step (1) described cluster ions are produced by procedure below：Gases at high pressure spray from the nozzle of pulse valve, in nozzle
Neutral cluster is produced in the presence of the separator in front, while producing electronics by electro-dissociator, and makes neutrality with neutral cluster collision
Cluster is powered, forms cluster ions.
In step (1), identical voltage is applied to all cluster ions in cluster ions beam using accelerator.
During step (1), (2) and (3), with the form and envelope of camera captured in real-time cluster ions beam, and
Ion beam envelope movement situation is shown on computer.
During actually detected, the presence of cluster ions can be confirmed using control variate method, method of comparison.Initial time is zero
Field state, then increases magnetic field successively, and the ion beam current under different magnetic field is measured with Faraday cup.As shown in Fig. 2 using argon gas as
Example, it can be seen that：Square wave is the switching pulse signal of pulse valve, is opened after pulse valve, current signal is gradually increased, and closes pulse
After valve, signal weakens, and illustrates that cluster ions are successfully formed during pulse valve is opened；When being not added with magnetic field, the electric current measured is most
Greatly, 20 μ A are reached；With the increase in magnetic field, electric current is gradually reduced, and peak value is moved to the left (time reduces i.e. at peak value).This
Show, the presence in magnetic field, separated the light cluster ions in part.Magnetic field is bigger so that increasing cluster shifts, so that
Obtained beam current signal increases with magnetic field and further reduced.In addition, moving to left for peak, illustrates weight cluster ions than light group
Cluster ion produces earlier, because being closed in pulse valve in latter short time, still suffers from residual gas, it is sufficient to form a small amount of light
Cluster particle.
Introduce another variable --- source gas pressure intensity, still by taking argon gas as an example, select three air pressure：3atm、5atm、
7atm, carries out cluster ions beam to the source gas under each air pressure and draws experiment, horizontal deflection processing is then entered in 0-40mT magnetic fields,
The beam current signal measured is as shown in Figure 3.When whetheing there is magnetic fields for convenience of contrast in the drift condition of signal peak, the big figures of Fig. 3
The three bars curves obtained under 40mT magnetic fields, not homologous air pressure have made normalized, and actual signal is strong and weak such as Fig. 3 upper right corner
Small figure.Obtained signal is consistent still with Fig. 2 conclusion, that is, when increasing magnetic field intensity, beam current signal weakens.It can see simultaneously
Go out, under identical magnetic field intensity, source gas pressure intensity is bigger, and obtained line is stronger, because the bigger source gas of pressure,
More weight cluster ions can be produced.In addition, the knots modification of line peak increases and reduced also with pressure, because going out
More heavy cluster ions are showed, although used magnetic deflection field, separated number of ions is still reduced, therefore peak displacement subtracts
It is small.Thus achieve the on-line monitoring of line.
Invention also provides a kind of pulse gas cluster ions beam on-line monitoring system based on the above method, reference
Fig. 1, including the pulse valve 2 and the nozzle 3 of the port of export of pulse valve 2 connected with air inlet pipe 1, and it is straight positioned at the emission direction of nozzle 3
Beam splitter 4, electro-dissociator 5, accelerator 6, velocity selector 8, diaphragm 10 and the Faraday cup 11 arranged successively on line.Wherein produce
Device is made up of air inlet pipe, pulse valve, nozzle, beam splitter, electro-dissociator, and measurement apparatus is by accelerator, velocity selector, faraday
Cup composition.The negative electrode connection negative electrode power supply U of the electro-dissociatorf, the anode jointed anode power supply U of electro-dissociatora, ionization
The anode of device passes through high-voltage suppling power U simultaneouslyHVWith load resistance R in parallelLConnected with one end of oscillograph, load resistance RL
It is connected with the other end of oscillograph 12 with Faraday cup；The high-voltage suppling power UHVWith connect after resistance Rd1With resistance Rd2
It is connected after parallel connection with accelerator, for providing voltage for accelerator；The oscillograph is connected by RS232 cables with computer.
The pulse valve is connected with high-pressure pipe, and each gas pulses that pulse valve sprays are 5~20ms, nozzle and arteries and veins
Valve is rushed to be connected, and beam splitter collective effect produces neutral cluster, the diameter of nozzle is only 0.15~0.25mm, can specifically be used
0.20mm, electro-dissociator can produce 0-300eV electronics, and make its powered with neutral cluster collision, form cluster ions 7.
The cluster ions beam is under accelerator, velocity selector effect, and cluster ions are screened by velocity selector, its
Middle monatomic ion deviates with light cluster ions 9, and weight cluster ions maintain former direction to export ejection from velocity selector, meet bar
The cluster ions of part reach Faraday cup 11 by diaphragm 10, are counted using Faraday cup, and show signal on oscillograph, show
Ripple device is connected with computer, therefore computer simultaneous display signal, completes measurement.
The accelerator is used to apply identical voltage to all cluster ions, each cluster is had respective speed, is easy to
Separation below, this experiment accelerating potential is between 2-12kV.
The Faraday cup is signal supervisory instrument, measures electric current, judges incident ion quantity.
The velocity selector uses one kind in parallel electric field, quadrature field, and orthogonal electromagnetic field three.This reality
A velocity selector is applied using orthogonal electromagnetic field, magnetic field can freely be adjusted from zero to 100mT, isolate monatomic ion and light
Cluster, relies primarily on lorentz equation：
F=q (u × B)
WhereinThe speed produced for ion in accelerator, UaccFor accelerator voltage, q is cluster
Carried charge, m is cluster quality.
Compared to monatomic ion and light cluster ions, weight cluster ions have bigger quality m, and electric charge q is identical, thus
Carried out by same high voltage after accelerator, weight cluster ions speed is smaller, and Lorentz force is also smaller in magnetic field, so roll into a ball again
Cluster ion reaches Faraday cup almost with straight-line pass velocity selector.
The method and system for a kind of on-line monitoring pulse gas cluster ions beam that the present invention is provided, using weight cluster and gently
Cluster ions have this feature of different charge-mass ratios, by applying identical accelerating potential to them, and adjust increase electromagnetism
The size in magnetic field in selection device, can change the direction of motion of cluster ions so that weight cluster deflects not of uniform size with light cluster
Cause, so as to isolate monatomic ion and light cluster from pulse cluster beam, and quantitative analysis is carried out to cluster Mass Distribution, from
And determine presence and the quantity of weight cluster ions.
Claims (10)
1. a kind of method for monitoring pulse gas cluster ions beam on-line, it is characterised in that comprise the following steps：
(1) all cluster ions in cluster ions beam are applied with different charge-mass ratios in identical voltage, diplomatic corps's ion beam
Cluster ions have each different speed；
(2) cluster ions are screened by velocity selector, and wherein monatomic ion is less than or equal to 100 light cluster with atomicity
Ion deflection, the heavy cluster ions that atomicity is more than 100 maintain former direction to export ejection from velocity selector；
(3) the cluster ions beam sprayed is measured with Faraday cup, cluster ions quantity is determined, and utilization is connected with Faraday cup
Real time vision ion beam current count results.
2. the method for on-line monitoring pulse gas cluster ions beam according to claim 1, it is characterised in that：Step (1)
The cluster ions are produced by procedure below：Gases at high pressure spray from the nozzle of pulse valve, the separator in front of nozzle
Effect is lower to produce neutral cluster, while producing electronics by electro-dissociator, and makes neutral cluster powered with neutral cluster collision, the group of being formed
Cluster ion.
3. the method for on-line monitoring pulse gas cluster ions beam according to claim 1, it is characterised in that：Step (1)
In, identical voltage is applied to all cluster ions in cluster ions beam using accelerator.
4. the method for on-line monitoring pulse gas cluster ions beam according to claim 1, it is characterised in that：Step (1),
(2) and during (3), with the form and envelope of camera captured in real-time cluster ions beam, and ion is shown on computers
Beam envelope movement situation.
5. a kind of pulse gas cluster ions beam on-line monitoring system based on claim 1 methods described, it is characterised in that：Bag
The nozzle of the pulse valve connected with air inlet pipe and the pulse valve port of export is included, and is arranged successively on nozzle emission direction straight line
Beam splitter, electro-dissociator, accelerator, velocity selector, diaphragm and Faraday cup.
6. pulse gas cluster ions beam on-line monitoring system according to claim 5, it is characterised in that：The pulse valve
The each gas pulses sprayed are 5~20ms.
7. pulse gas cluster ions beam on-line monitoring system according to claim 5, it is characterised in that：The nozzle
A diameter of 0.15~0.25mm.
8. pulse gas cluster ions beam on-line monitoring system according to claim 5, it is characterised in that：The speed choosing
Device is selected using parallel electric field, quadrature field, and one kind in orthogonal electromagnetic field three.
9. pulse gas cluster ions beam on-line monitoring system according to claim 8, it is characterised in that：The speed choosing
Device is selected using orthogonal electromagnetic field, its adjustable range is 0~100mT.
10. pulse gas cluster ions beam on-line monitoring system according to claim 5, it is characterised in that：The ionization
The negative electrode connection negative electrode power supply U of devicef, the anode jointed anode power supply U of electro-dissociatora, the anode of electro-dissociator passes through simultaneously
High-voltage suppling power UHVWith load resistance R in parallelLConnected with one end of oscillograph, load resistance RLWith the other end of oscillograph
It is connected with Faraday cup；The high-voltage suppling power UHVWith connect after resistance Rd1With resistance Rd2It is connected after parallel connection with accelerator,
For providing voltage for accelerator；The oscillograph is connected by RS232 cables with computer.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109115660A (en) * | 2018-08-23 | 2019-01-01 | 金华职业技术学院 | A kind of particle imaging method |
| CN109256322A (en) * | 2018-10-08 | 2019-01-22 | 武汉大学 | A kind of method and apparatus for the mixed gas cluster ions beam generating single charge state |
| CN110018220A (en) * | 2019-03-02 | 2019-07-16 | 金华职业技术学院 | A kind of preparation and test method of the metal cluster of chemical modification |
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| CN110018220A (en) * | 2019-03-02 | 2019-07-16 | 金华职业技术学院 | A kind of preparation and test method of the metal cluster of chemical modification |
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Application publication date: 20170901 |