CN107101974A - A kind of new three step is without lens coherent diffraction imaging method - Google Patents

A kind of new three step is without lens coherent diffraction imaging method Download PDF

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CN107101974A
CN107101974A CN201710530777.2A CN201710530777A CN107101974A CN 107101974 A CN107101974 A CN 107101974A CN 201710530777 A CN201710530777 A CN 201710530777A CN 107101974 A CN107101974 A CN 107101974A
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mrow
msub
msubsup
msup
diffraction
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CN107101974B (en
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李拓
刘丹
刘辉
代饶
张芝琳
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Xijing University
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Xijing University
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    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
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    • G01N21/4788Diffraction

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Abstract

A kind of new method of three steps without lens coherent diffraction imaging.Object under test is illuminated using collimated and laser beam that is expanding, is recorded respectively in CCD front ends without optical parallel, the three width diffraction patterns for having one piece of optical parallel and there are two pieces of optical parallels;Three width diffraction patterns of collection are handled with filtering proposed by the invention with the algorithm that coherent diffraction diffraction imaging is combined, the complex amplitude image of testing sample is rebuild.The need that the invention effectively solves traditional coherent diffraction imaging method presence repeatedly move the bottleneck problem of CCD or testing sample, while also solving the random error in moving process and the operability problems of experiment.Experimental implementation simple and fast of the present invention, it is workable, and coherent diffraction imaging algorithm and effective combination of filtering, improve convergence rate and the recovery effects of sample.

Description

A kind of new three step is without lens coherent diffraction imaging method
Technical field
The present invention relates to optical diffraction technical field of imaging, and in particular to a kind of new three step is without lens coherent diffraction imaging Method.
Background technology
There is the development of many in recent years without lens coherent diffraction imaging, party's law technology is typically calculated using iteration Method.Reappear the complex amplitude information of object from the diffracted intensity pattern of object without reference light, with very broad The wavelength scope of application, be widely used in X-ray and electron beam without in lens coherent diffraction imaging.Referring to (Opt.Lett.31,3095-3097 (2006);J.Opt.Soc.Am.A25,416-422 (2008);Nat.Phys., 4,394- 398(2008);Appl.Opt.21,2758-2769 (1982);J.Opt.Soc.Am.A 23,1179-1200 (2006)) by one After beam coherent light irradiating sample, the diffraction pattern produced by sample is received on CCD.In order to obtain more accurate amplitude with Phase information, by constantly changing CCD and sample relative distance to obtain the diffraction pattern of more different diffraction distances.Ginseng See (Opt.Lett.30 (8), 833-5 (2005)) but these upper technical schemes, they have following technological deficiency:Need to obtain many The diffraction surfaces of individual different distance, take mobile example or CCD mode to change distance, this method needs in implementation process The change sample or CCD putting position constantly repeated is, it is necessary to which substantial amounts of repeated work, at the same time introduces and directly affect reality The random error of result is tested, it is not high to obtain sampling pattern precision, and needs over-sampling, experimental implementation cycle length and operable Property is weak, imaging it is ageing very poor.
The content of the invention
In order to overcome the above mentioned problem of prior art, it is concerned with it is an object of the invention to provide new three step of one kind without lens and spreads out Penetrate imaging method.The present invention has been improved into the ageing and operability as system, simplifies the step of implementing operation, and improving needs Change the method for relative distance between them by changing CCD or sample putting position, overcome and a large amount of change relative distances Repetitive operation, reduce by the random error of experimental implementation institute band, it is to avoid over-sampling, complex amplitude type object can be accomplished soon The restoration and reconstruction of speed and good imaging quality, make specific experiment easy realization simple to operate.
The purpose of the present invention can be achieved through the following technical solutions, a kind of new side of three steps without lens coherent diffraction imaging Method, comprises the following steps:
1) light path of three steps without lens coherent diffraction imaging system is built, testing sample is added;
2) with a branch of visible collimated light beam irradiation testing sample, the first width diffraction pattern is collected using CCD;
3) first piece of optical parallel is added between testing sample and CCD, the second width diffraction pattern is collected using CCD;
4) second piece of optical parallel is added between testing sample and CCD, the 3rd width diffraction pattern is collected using CCD;
5) using step 2)~the diffraction pattern of three width different distances that 4) obtains, with coherent diffraction algorithm and having for filtering The method for imitating fusion, rebuilds to the image amplitude and phase recovery of testing sample, obtains lensless coherent diffraction imaging image;
Wherein, the step 5) in coherent diffraction algorithm and the effective integration of filtering method, it is initial on object plane COMPLEX AMPLITUDE be g0(x0,y0) arbitrary COMPLEX AMPLITUDE.
The testing sample is net amplitude type, COMPLEX AMPLITUDE such as formula (2) institute after+1 iteration of kth on object plane Show:
g(k+1)(x0,y0)=| g(k)(x0,y0)| (1)。
The testing sample is COMPLEX AMPLITUDE such as formula (3) institute on object plane after complex amplitude type ,+1 iteration of kth Show:
g(k+1)(x0,y0)=g(k)(x0,y0) (2)。
The g(k)(x0,y0) represent the COMPLEX AMPLITUDE of the thing function that kth time iteration is obtained, g(k)(x0,y0) by formula (4)-formula (14) iteration is obtained:
In formula, FrT represents Fresel diffraction direct transform, and IFrT represents Fresel diffraction inverse transformation,Respectively the 1st, the 2nd, answering after kth time iteration is shaken on the 3rd diffraction plane Width is distributed, | F1(x1, y1)|2、|F2(x2, y2)|2、|F3(x3, y3)|2Respectively actually surveyed on the 1st, the 2nd, the 3rd diffraction plane The distribution of amplitudes obtained, φ1(x,y)、φ2(x,y)、φ3(x, y) represents the 1st respectively, the 2nd, kth time iteration on the 3rd diffraction plane Phase distribution afterwards, G1 (k)'(x1,y1)、G2 (k)'(x2,y2)、G3 (k)'(x3,y3) it is respectively on the 1st, the 2nd, the 3rd diffraction plane The corrected COMPLEX AMPLITUDE of k iteration amplitude components.Wherein (4)-(14) are a circulation, initial k=0.With circulation Number of times k increase, until the complex amplitude for exporting preferable object rebuilds pattern.
The light path without lens coherent diffraction imaging system, including He-Ne laser, the first optical parallel and second are flat Optical parallel, the light source of He-Ne laser is produced after laser, and after the collimated beam-expanding system of light is expanded, directional light is successively through treating test sample Residing for the second diffraction plane residing for the first diffraction plane, the first optical parallel and the second optical parallel residing for product After three diffraction planes, image is recorded by ccd image sensor and image is transferred to computer, computer is to CCD The image of image recording sensor is handled.
The light source of the He-Ne laser produces the feux rouges that wavelength is 632nm.
It is of the invention to there is following beneficial effect compared with existing technical scheme:
1) " it will want to obtain many different diffraction patterns on diffraction surfaces, and the mobile CCD or movement that need to repeat are to be measured Experimental implementation mode has carried out basic no-load voltage ratio as the relative distance of sample " so that experiment implementation obtains the lifting of matter.
2) diffraction pattern on the diffraction surfaces of different distance is obtained by inserting optical parallel, it is to avoid in moving process institute The random error brought, experimental implementation is ageing to be substantially improved very much, the operability of Enhancement test.
3) filtering process is introduced in the algorithm, and filtering and coherent diffraction algorithm have been subjected to effective fusion so that In image recovery process, convergence rate is significantly lifted with accuracy.
4) testing sample described in, can be net amplitude or complex amplitude pattern product, and to the recovery effects of complex amplitude sample It is more advantageous.
Due to taking the method proposed by the present invention for sequentially adding optical parallel so that random error caused by artificial subtracts It is small, it is not necessary to over-sampling, utilize three width diffraction patterns, the restoration and reconstruction of the pattern of complete paired samples, using being carried for the present invention Three steps gone out greatly simplify laboratory operating procedures without lens coherent diffraction imaging system.
Brief description of the drawings
Fig. 1 is new three step of the present invention without lens coherent diffraction imaging method schematic diagram;
Fig. 2 is new light path principle figure of three steps without lens coherent diffraction imaging method of the present invention;
Fig. 3 be the present invention without optical parallel when image acquisition device CCD receive the first width diffraction pattern;
Fig. 4 is image acquisition device CCD the second width diffraction patterns of reception after the present invention one piece of optical parallel of insertion;
Fig. 5 is image acquisition device CCD the 3rd width diffraction patterns of reception after the present invention two pieces of optical parallels of insertion;
Fig. 6 is emulation experiment series of drawing of the present invention to net amplitude pattern product;
Fig. 7 is emulation experiment series of drawing of the present invention to complex amplitude pattern product.
In figure, 1 is He-Ne laser;2 be collimating and beam expanding system;3 be testing sample;4 be the first optical parallel;5 be Two optical parallels;6 be ccd image sensor;7 be computer.
Embodiment
In order to be better understood from the particular content and implementation process of the present invention, below in conjunction with Figure of description, to implementing New detailed process of three steps without lens coherent diffraction imaging method is described in detail.
1~Fig. 5 of reference picture, a kind of new three light path systems without lens coherent diffraction imaging method, including He-Ne swash Light device, the first optical parallel and the second optical parallel, the light source of He-Ne laser are produced after laser, the collimated beam-expanding system of light After expanding, directional light successively through the first diffraction plane residing for testing sample, the second diffraction plane residing for the first optical parallel, And after the second the 3rd diffraction plane residing for optical parallel, image is recorded and by image by ccd image sensor Computer is transferred to, the image that computer is recorded to ccd image sensor is handled.
Reference picture 2, builds experiment index path, uses, and He-Ne laser wavelength is 632nm feux rouges, installs collimator and extender System, then puts testing sample, prepares the sample of net amplitude type and complex amplitude type respectively to form sample in an experiment Product are contrasted, standoff distance Z0After put ccd image sensor, and ccd image sensor is connected to computer, and prepare reality Two pieces of optical parallels required for testing, to be used in experimentation.
Reference picture 3, puts up after index path, the first step, opens image acquisition device CCD and gathers the first width sample diffraction figure Sample, and preserve.
As shown in figure 4, second step, is being Z with the distance of sample1First piece of optical parallel of place's insertion, CCD collections second Width diffraction pattern, and preserve.
As shown in figure 5, the 3rd step, is being Z with the distance of optical parallel2Second piece of optical parallel of place's insertion, CCD collections the Three width diffraction patterns, and preserve.Implement specific operating procedure by said process, pattern then is arrived to collection using computer Handled.
The present invention implements used algorithm:IfRespectively the 1st, 2nd, the COMPLEX AMPLITUDE on the 3rd diffraction plane after kth time iteration, | F1(x1, y1)|2、|F2(x2, y2)|2、|F3(x3, y3)|2Respectively For actually measured distribution of amplitudes on the 1st, the 2nd, the 3rd diffraction plane, φ1(x,y)、φ2(x,y)、φ3(x, y) is represented respectively 1st, the 2nd, the phase distribution on the 3rd diffraction plane after kth time iteration, G1 (k)'(x1,y1)、G2 (k)'(x2,y2)、G3 (k)'(x3, y3) be respectively the 1st, the 2nd, the corrected COMPLEX AMPLITUDE of kth time iteration amplitude components on the 3rd diffraction plane.Wherein (4)- (14) it is a circulation, initial k=0.With cycle-index k increase, until the complex amplitude for exporting preferable object rebuilds figure Sample:
If object is net amplitude type, g(k+1)(x0,y0)=| g(k)(x0,y0) |, if object is complex amplitude type, g(k+1) (x0,y0)=g(k)(x0,y0)。
Beam of laser places testing sample after collimating and beam expanding system behind probe, is having a segment distance with sample Position on CCD is installed, then keep the distance and position of CCD and sample constant, step by step between CCD and testing sample, Using technical method proposed by the present invention:Two pieces of optical parallels are sequentially added, the first width, the second width, the 3rd are received on CCD Width, three width sample diffraction patterns are finally realized to sample restoration and reconstruction.
Embodiment 1
The imaging effects of net amplitude pattern product as shown in fig. 6, in Fig. 6 series of drawing, 6a is net amplitude type pattern to be measured, 6b is the diffraction pattern on the 1st diffraction plane at sample 300mm, and 6c is the diffraction plane 50mm of distance the 1st the 2nd diffraction Diffraction pattern in plane, 6d is diffraction pattern on the 3rd diffraction plane at the diffraction plane 50mm of distance the 2nd, and 6e is three step diffraction The restoration result that iterative algorithm iteration is 100 times.6a and 6e coefficient correlation is 0.9991, illustrates that this method can be to net amplitude thing Body realizes good imaging effect.
Embodiment 2
The imaging effect of complex amplitude pattern product is as shown in fig. 7, in Fig. 7 series of drawing, 7a is shaking for former complex amplitude type object Width part, 7b is the phase bit position of former complex amplitude type object, and 7c is diffraction pattern on the 1st diffraction plane at object 300mm Sample, 7d is diffraction pattern on the 2nd diffraction plane at the diffraction plane 50mm of distance the 1st, and 7e is at the diffraction plane 50mm of distance the 2nd The 3rd diffraction plane on diffraction pattern, 7f and 7g be respectively three step coherent diffraction algorithm iterations, 100 reconstructions amplitude components and Phase bit position.The coefficient correlation that 7a and 7f coefficient correlation is 0.9982,7b and 7g is 0.9763.Illustrate that this method can be to multiple Amplitude object realizes good imaging effect.
The above method and embodiment are all, without lens coherent diffraction imaging method, to lead to by new three step proposed by the present invention Cross and be sequentially inserted into the method for optical parallel and obtain three width diffraction patterns of different distance, it is final realize to the amplitude of testing sample and The purpose of phase information restoration and reconstruction.The implementation of the present invention is not limited to above-mentioned specific embodiment.As long as it is flat by insertion Optical parallel obtains diffraction imaging method, device and the system of different diffraction distance, and the latter is calculated using recovery proposed by the invention Method, belongs to the protection domain of invention.

Claims (6)

1. a kind of new method of three steps without lens coherent diffraction imaging, it is characterised in that comprise the following steps:
1) light path of three steps without lens coherent diffraction imaging system is built, testing sample is added;
2) with a branch of visible collimated light beam irradiation testing sample, the first width diffraction pattern is collected using CCD;
3) first piece of optical parallel is added between testing sample and CCD, the second width diffraction pattern is collected using CCD;
4) second piece of optical parallel is added between testing sample and CCD, the 3rd width diffraction pattern is collected using CCD;
5) using step 2)~the diffraction pattern of three width different distances that 4) obtains, is melted with coherent diffraction algorithm with the effective of filtering The method of conjunction, rebuilds to the image amplitude and phase recovery of testing sample, obtains lensless coherent diffraction imaging image;
Wherein, the step 5) in coherent diffraction algorithm and the effective integration of filtering method, initial on object plane answer Distribution of amplitudes g(0)(x0,y0) it is arbitrary COMPLEX AMPLITUDE.
2. a kind of new method of three steps without lens coherent diffraction imaging according to claim 1, it is characterised in that described g(k)(x0,y0) represent object plane on COMPLEX AMPLITUDE, the initial COMPLEX AMPLITUDE formula g on the object plane arbitrarily chosen(0) (x0,y0), the k rear calculating of substitution (4)~(14) iteration obtains iteration and obtained (primary iteration number of times k=0):
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<mrow> <msup> <msubsup> <mi>G</mi> <mn>2</mn> <mrow> <mo>(</mo> <mi>k</mi> <mo>)</mo> </mrow> </msubsup> <mo>&amp;prime;</mo> </msup> <mrow> <mo>(</mo> <msub> <mi>x</mi> <mn>1</mn> </msub> <mo>,</mo> <msub> <mi>y</mi> <mn>1</mn> </msub> <mo>)</mo> </mrow> <mo>=</mo> <mo>|</mo> <msub> <mi>F</mi> <mn>1</mn> </msub> <mrow> <mo>(</mo> <msub> <mi>x</mi> <mn>1</mn> </msub> <mo>,</mo> <msub> <mi>y</mi> <mn>1</mn> </msub> <mo>)</mo> </mrow> <mo>|</mo> <mi>exp</mi> <mrow> <mo>(</mo> <msubsup> <mi>i&amp;phi;</mi> <mn>2</mn> <mi>k</mi> </msubsup> <mo>(</mo> <mrow> <msub> <mi>x</mi> <mn>1</mn> </msub> <mo>,</mo> <msub> <mi>y</mi> <mn>1</mn> </msub> </mrow> <mo>)</mo> <mo>)</mo> </mrow> <mo>-</mo> <mo>-</mo> <mo>-</mo> <mrow> <mo>(</mo> <mn>5</mn> <mo>)</mo> </mrow> </mrow>
<mrow> <msup> <mi>g</mi> <mrow> <mo>(</mo> <mi>k</mi> <mo>)</mo> </mrow> </msup> <mrow> <mo>(</mo> <msub> <mi>x</mi> <mn>0</mn> </msub> <mo>,</mo> <msub> <mi>y</mi> <mn>0</mn> </msub> <mo>)</mo> </mrow> <mo>=</mo> <mi>I</mi> <mi>F</mi> <mi>r</mi> <mi>T</mi> <mo>{</mo> <msup> <msubsup> <mi>G</mi> <mn>2</mn> <mrow> <mo>(</mo> <mi>k</mi> <mo>)</mo> </mrow> </msubsup> <mo>&amp;prime;</mo> </msup> <mrow> <mo>(</mo> <msub> <mi>x</mi> <mn>2</mn> </msub> <mo>,</mo> <msub> <mi>y</mi> <mn>2</mn> </msub> <mo>)</mo> </mrow> <mo>}</mo> <msub> <mo>|</mo> <mrow> <msub> <mi>z</mi> <mn>1</mn> </msub> <mo>+</mo> <msub> <mi>z</mi> <mn>2</mn> </msub> <mo>,</mo> <mi>&amp;lambda;</mi> </mrow> </msub> <mo>-</mo> <mo>-</mo> <mo>-</mo> <mrow> <mo>(</mo> <mn>6</mn> <mo>)</mo> </mrow> </mrow>
<mrow> <msubsup> <mi>G</mi> <mn>3</mn> <mrow> <mo>(</mo> <mi>k</mi> <mo>)</mo> </mrow> </msubsup> <mrow> <mo>(</mo> <msub> <mi>x</mi> <mn>1</mn> </msub> <mo>,</mo> <msub> <mi>y</mi> <mn>1</mn> </msub> <mo>)</mo> </mrow> <mo>=</mo> <mi>F</mi> <mi>r</mi> <mi>T</mi> <mo>{</mo> <msup> <mi>g</mi> <mrow> <mo>(</mo> <mi>k</mi> <mo>)</mo> </mrow> </msup> <mrow> <mo>(</mo> <msub> <mi>x</mi> <mn>0</mn> </msub> <mo>,</mo> <msub> <mi>y</mi> <mn>0</mn> </msub> <mo>)</mo> </mrow> <mo>}</mo> <msub> <mo>|</mo> <mrow> <msub> <mi>z</mi> <mn>1</mn> </msub> <mo>+</mo> <msub> <mi>z</mi> <mn>2</mn> </msub> <mo>+</mo> <msub> <mi>z</mi> <mn>3</mn> </msub> <mo>,</mo> <mi>&amp;lambda;</mi> </mrow> </msub> <mo>=</mo> <mo>|</mo> <msubsup> <mi>G</mi> <mn>3</mn> <mrow> <mo>(</mo> <mi>k</mi> <mo>)</mo> </mrow> </msubsup> <mrow> <mo>(</mo> <msub> <mi>x</mi> <mn>1</mn> </msub> <mo>,</mo> <msub> <mi>y</mi> <mn>1</mn> </msub> <mo>)</mo> </mrow> <mo>|</mo> <mi>exp</mi> <mrow> <mo>(</mo> <msubsup> <mi>i&amp;phi;</mi> <mn>3</mn> <mrow> <mo>(</mo> <mi>k</mi> <mo>)</mo> </mrow> </msubsup> <mo>(</mo> <mrow> <msub> <mi>x</mi> <mn>1</mn> </msub> <mo>,</mo> <msub> <mi>y</mi> <mn>1</mn> </msub> </mrow> <mo>)</mo> <mo>)</mo> </mrow> <mo>-</mo> <mo>-</mo> <mo>-</mo> <mrow> <mo>(</mo> <mn>7</mn> <mo>)</mo> </mrow> </mrow>
<mrow> <msup> <msubsup> <mi>G</mi> <mn>2</mn> <mrow> <mo>(</mo> <mi>k</mi> <mo>)</mo> </mrow> </msubsup> <mo>&amp;prime;</mo> </msup> <mrow> <mo>(</mo> <msub> <mi>x</mi> <mn>1</mn> </msub> <mo>,</mo> <msub> <mi>y</mi> <mn>1</mn> </msub> <mo>)</mo> </mrow> <mo>=</mo> <mo>|</mo> <msub> <mi>F</mi> <mn>1</mn> </msub> <mrow> <mo>(</mo> <msub> <mi>x</mi> <mn>1</mn> </msub> <mo>,</mo> <msub> <mi>y</mi> <mn>1</mn> </msub> <mo>)</mo> </mrow> <mo>|</mo> <mi>exp</mi> <mrow> <mo>(</mo> <msubsup> <mi>i&amp;phi;</mi> <mn>3</mn> <mi>k</mi> </msubsup> <mo>(</mo> <mrow> <msub> <mi>x</mi> <mn>1</mn> </msub> <mo>,</mo> <msub> <mi>y</mi> <mn>1</mn> </msub> </mrow> <mo>)</mo> <mo>)</mo> </mrow> <mo>-</mo> <mo>-</mo> <mo>-</mo> <mrow> <mo>(</mo> <mn>8</mn> <mo>)</mo> </mrow> </mrow>
<mrow> <msup> <mi>g</mi> <mrow> <mo>(</mo> <mi>k</mi> <mo>)</mo> </mrow> </msup> <mrow> <mo>(</mo> <msub> <mi>x</mi> <mn>0</mn> </msub> <mo>,</mo> <msub> <mi>y</mi> <mn>0</mn> </msub> <mo>)</mo> </mrow> <mo>=</mo> <mi>I</mi> <mi>F</mi> <mi>r</mi> <mi>T</mi> <mo>{</mo> <msup> <msubsup> <mi>G</mi> <mn>2</mn> <mrow> <mo>(</mo> <mi>k</mi> <mo>)</mo> </mrow> </msubsup> <mo>&amp;prime;</mo> </msup> <mrow> <mo>(</mo> <msub> <mi>x</mi> <mn>1</mn> </msub> <mo>,</mo> <msub> <mi>y</mi> <mn>1</mn> </msub> <mo>)</mo> </mrow> <mo>}</mo> <msub> <mo>|</mo> <mrow> <msub> <mi>z</mi> <mn>1</mn> </msub> <mo>+</mo> <msub> <mi>z</mi> <mn>2</mn> </msub> <mo>+</mo> <msub> <mi>z</mi> <mn>3</mn> </msub> <mo>,</mo> <mi>&amp;lambda;</mi> </mrow> </msub> <mo>-</mo> <mo>-</mo> <mo>-</mo> <mrow> <mo>(</mo> <mn>9</mn> <mo>)</mo> </mrow> </mrow>
In formula, FrT represents Fresel diffraction direct transform, and IFrT represents Fresel diffraction inverse transformation, Respectively the 1st, the 2nd, the COMPLEX AMPLITUDE on the 3rd diffraction plane after kth time iteration, | F1(x1,y1)|2、|F2(x2,y2)2、|F3 (x3,y3)|2Respectively distribution of amplitudes actually measured on the 1st, the 2nd, the 3rd diffraction plane, φ1(x,y)、φ2(x,y)、φ3 (x, y) represents the 1st respectively, the 2nd, the phase distribution on the 3rd diffraction plane after kth time iteration, G1 (k)'(x1,y1)、G2 (k)'(x2, y2)、G3 (k)'(x3,y3) be respectively the 1st, the 2nd, the corrected complex amplitude point of kth time iteration amplitude components on the 3rd diffraction plane Cloth.Wherein (4)-(14) are a circulation, initial k=0.With cycle-index k increase, shaken again until exporting preferable object Width rebuilds pattern.
3. a kind of new method of three steps without lens coherent diffraction imaging according to claim 2, it is characterised in that described Testing sample is net amplitude type, and COMPLEX AMPLITUDE such as the formula (2) after+1 iteration of kth on object plane is shown:
g(k+1)(x0,y0)=| g(k)(x0,y0)| (10)。
4. a kind of new method of three steps without lens coherent diffraction imaging according to claim 2, it is characterised in that described Testing sample is shown in the COMPLEX AMPLITUDE such as formula (3) after complex amplitude type ,+1 iteration of kth on object plane:
g(k+1)(x0,y0)=g(k)(x0,y0) (11)。
5. a kind of new method of three steps without lens coherent diffraction imaging according to claim 1, it is characterised in that described Light path without lens coherent diffraction imaging system, including laser (1), the first optical parallel (4) and the second optical parallel (5), The light source of He-Ne laser (1) is produced after laser, and after the collimated beam-expanding system of light (2) is expanded, directional light is successively through treating test sample After the 3rd diffraction plane residing for product (3), the first optical parallel (4) and the second optical parallel (5), by ccd image sensor (6) record image and image is transferred to computer (7), computer (7) is recorded to ccd image sensor (6) Image is handled.
6. a kind of new method of three steps without lens coherent diffraction imaging according to claim 1, it is characterised in that described The light source of He-Ne laser (1) is not limited to He-Ne laser, and lighting source can use other any types lasers.As long as Using the system and algorithm of the present invention, the protection category of the present invention is belonged to.
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