CN102903591A - Ultrafast lens-free coherent electron diffraction imaging method and device - Google Patents
Ultrafast lens-free coherent electron diffraction imaging method and device Download PDFInfo
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- CN102903591A CN102903591A CN2012103857012A CN201210385701A CN102903591A CN 102903591 A CN102903591 A CN 102903591A CN 2012103857012 A CN2012103857012 A CN 2012103857012A CN 201210385701 A CN201210385701 A CN 201210385701A CN 102903591 A CN102903591 A CN 102903591A
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Abstract
The invention discloses an ultrafast lens-free coherent electron diffraction imaging method and device. The method is combined with the electronic pulse which is in precise synchronization with process exciting sources (such as femtosecond laser pulses) and a lens-free coherent electron diffraction imaging technology, and comprises the steps of analyzing the strength distribution of the diffracted coherent electronic pulses, and carrying out back calculation to determine the electronic scattering phase, so as to achieve the reconstruction of the structure and the appearance of three-dimensional transient atomic scale. By adopting the method and device disclosed by the invention, the technical problem that the conventional electronic microimaging method has no high time resolution or the existing ultrafast electronic imaging time and space resolution are limited can be solved.
Description
Technical field
The present invention relates to time-resolved electron microscopic imaging, particularly a kind of have be better than 1 Picosecond rate and be better than 1 nano-space resolution ultrafast without the relevant electronic diffraction formation method of lens and possible related device thereof.
Background technology
The background technology that the present invention relates to is divided into two aspects;
One, the time of electron microscope and spatial resolution problem: traditional electron microscopic imaging is by improving three main directions of quality of electron accelerating voltage, use electromagnetic lens, raising electron source, and the raising of its spatial resolution is several near limits.Because traditional electron microscopic imaging generally is the pattern imaging of accumulated time, can't carry out the high time resolution imaging to the process in each field such as physics, chemistry, biology.Therefore, introducing time resolution in traditional electron microscopic imaging technique, is the forward position of world today's development in science and technology.In the existing time resolution electronic imaging system, ultrafast electron microscope (the ultrafast electron microscopy that Zewail seminar of California Inst Tech USA (Caltech) is more typically arranged, UEM), the dynamic transmission electron microscope of U.S. Lao Lunsi livermore national laboratory (LLNL) Campbell seminar (dynamic transmission electron microscope, DTEM).
In these time resolution electronic imaging systems, electronic imaging from diffraction space (namely between the turned letter) to the real space is to realize by the leading Fourier transform of electromagnetism object lens, because electronics is through using the electromagnetism object lens to carry out imaging behind the sample, lost the phase information of electronics, so these systems are all limited in the raising of spatial resolution and temporal resolution.On the one hand, the spatial resolution of the electromagnetic lens imaging of electron beam improves two great technical difficulties: the one, and the aberration of requirement lens is minimum, otherwise phase error will be incorporated in the diffracted wave, can't obtain sharply defined image, for electron lens imaging and the imaging of X ray zone plate, realize that this point is exceedingly difficult; The 2nd, whole experimental provision must be enough stable, thereby the wide-angle electronics that is positioned at the diffraction plane edge still can be at picture plane coherent interference.So even by complicated aberration correction, the available angular range of general electron lens is also only at the 1-2 degree, the restriction of this momentum space (in other words, lens can be admitted the maximum scattering scope of incident beam) has seriously affected spatial resolution.On the other hand, owing to electronics can repel mutually as charged particle, through in the long-distance flight process of electromagnetic lens, electronic impulse width meeting broadening, thus cause temporal resolution to reduce.
Two, relevant without the lens diffraction imaging: it solves the phase problem of diffraction in cycle and the aperiodic structure sample by means of theoretical method and computerized algorithm, be called as relevant X-ray diffraction imaging (coherent x-ray diffractive imaging, CXDI) in the X ray field.People recognize the phase problem in visible light field very early, and Rayleigh commented on once that if there is not the symmetric relevant information of data, the phase problem in the interference was insurmountable in giving the envelope letter of Michelson-.Phase problem successfully solves gives the credit to D. Sayre, and he points out consider sampling theory and the relation between Bragg's equation [Acta Crystallogr. 5,843 (1952)] of Shannon in nineteen fifty-two.Thereafter, Gerchberg and Saxton have write out the algorithm [Optik 35,237 (1972)] that recovers phase place for the first time.This algorithm often is called as hybrid input – output (HIO) algorithm [Appl. Opt. 21,2758 (1982)]: an original function is iterated in the real space and Fourier space, and iteration all adds the border condition to the real space or Fourier space each time.This field is rapidly developed beginning around the nineteen ninety, and wherein seedling is built the big people of grade and carried out experimental verification [Nature 400,342 (1999)] at the soft x ray wave band first in 1999; With rear left build bright wait the people to take the lead in delivering the relevant experimental research achievements without the lens diffraction imaging of electronics in 2003 [Science 300,1419 (2003)], the people such as Zhu Yi eyebrow in 2008 propose " position sensing diffraction imaging " (position-sensitive diffractive imaging, PSDI) and are used for the relevant without the lens diffraction imaging of electronics.Between in the past 20 years, this technology is extended to high-resolution imaging to amorphous sample and be used widely [Adv. Phys. 59,1 (2010)] from crystallography.
The basic principle of relevant electronic diffraction imaging is to utilize the diffracted intensity of match electronic diffraction, gives for change owing to lack the sample phase information that object lens are lost by reverse calculation.Relevant without lens imaging based on electronic diffraction, to the requirement of the high stability of device with can fall apart to incident beam that requirement is relative to be loosened.Coherent imaging need not object lens, directly utilizes the intensity of photo-conductive film or charge coupled cell (CCD) detector record diffraction pattern.The advantage of diffraction imaging is whether interference condition satisfies the scattering that only is decided by sample interior itself, does not require electronic beam current again interference after the drift of transmission system middle and long distance.Yet similar with the conditional electronic micro-imaging, the method does not also have time resolution.
So traditional electron microscopic imaging technique, mainly there is following technical problem:
1. limited without time resolution or temporal resolution.
2. spatial resolution is low: the spatial resolution of real space image is subjected to the quality of object lens (such as aberration and aberration etc.) restriction, improves the cost height of spatial resolution by adopting high-quality electromagnetism object lens.
3. the cost that improves temporal resolution is high: although can suppress broadening problem in the electronic impulse flight course by adopting the million-electron-volt electronic impulse, thereby raising temporal resolution, but the cost of electromagnetism object lens and the energy of focused beam be proportional (approximately RMB is 40 yuan every electron-volt) generally, will increase dramatically cost.
Summary of the invention
The object of the invention is to overcome above-mentioned the deficiencies in the prior art, provide a kind of ultrafast without the relevant electronic diffraction formation method of lens and device.Ultrafast finger has high time resolution with respect to traditional electron microscopic imaging technique, refers in particular to the temporal resolution that can realize being better than 1 psec.It is by combining with the electronic impulse of process excitaton source (such as the femtosecond laser pulse) precise synchronization with without lens coherent diffraction imaging technology, analyze the intensity distributions of diffracted relevant electronic impulse, Inversion Calculation is determined the electron scattering phase place, realize structure and the pattern reconstruct of Three dimensional transient atomic scale, solve traditional electron microscopic formation method and do not have high time resolution ability or present ultrafast electronic imaging time and the limited technological fix of spatial resolution.
Technical solution of the present invention is as follows:
A kind of ultrafast without the relevant electronic diffraction formation method of lens, its characteristics are: the method is in conjunction with the pumping-detection technology with without the relevant electronic diffraction imaging of lens, to realize simultaneously the transient state imaging of ultrahigh time resolution and superelevation spatial discrimination; The method adopts with the relevant electronic impulse of the high brightness of process excitation pulse precise synchronization as detection source; Without any electron-optical system (being electromagnetic lens), directly collect relevant electronic diffraction imaging pattern by detection system behind the detection electronics process sample, thereby keep the scattering phase information of electronics; The method utilizes existing Inversion Calculation method to calculate the scattering phase information of electronics from described relevant electronic diffraction imaging by data processing and three-dimensional reconfiguration system, realizes structure and the pattern reconstruct of Three dimensional transient atomic scale.
Implement above-mentioned ultrafast ultrafast without the relevant electronic diffraction imaging device of lens without the relevant electronic diffraction formation method of lens, be comprised of process excitaton source, pulsed electron system, pulsed electron control system, sample, detection system, data processing and three-dimensional reconfiguration system and high vacuum sample target chamber, function and the position relationship of above-mentioned component are as follows:
Described pulsed electron system, pulsed electron control system, sample and detection system place in the described high vacuum sample target chamber, sample places on the dimension of five in the high vacuum sample target chamber adjustment racks, and wherein said pulsed electron system is comprised of Pulse Electric component and acceleration thereof, shaping element; The excitation pulse of described process excitaton source production process is inputted described high vacuum sample target chamber and is excited the sample that is positioned on the described five dimension adjustment racks.
Described Pulse Electric component produces the electronic impulse with described process excitation pulse precise synchronization, this pulsed electron becomes the relevant pulsed electron beam of high brightness through acceleration, shaping, wherein Spatially coherent length is better than 50 nanometers, and temporal coherent length is better than 50 nanometers; Be radiated at the sample area that is excited by the process excitation pulse that is in the high vacuum sample target chamber through described pulsed electron control system focusing, behind described sample diffraction, form a series of that intercouple or overlapped diffraction patterns; This diffraction pattern is received by described detection system, comprises the interference information between Bragg diffraction peak and bragg peak; Input described data and process and three-dimensional reconfiguration system, by online fast Fourier method, from diffraction pattern, give phase place for change.
The first changeable optical path that described process excitaton source comprises femtosecond laser light source, beam splitter, be made of the first laser servo speculum, the second laser servo speculum and the first translation stage postpones regulating system, the 3rd laser servo speculum, optical parameter amplifying laser conversion system, the 4th laser servo speculum, condenser lens and consists of.
Metal film and multistage microwave accelerator in the second optical path delayed regulating system, the 8th laser servo speculum, femtosecond laser frequency tripling device, ultraviolet condenser lens and the high vacuum sample target chamber that described pulsed electron system consists of by the 5th outer laser servo speculum of high vacuum sample target chamber, by the 6th laser servo speculum, the 7th laser servo speculum and the second translation stage consist of.
Described pulsed electron control system is by being positioned at successively the first deflector, the second deflector of high vacuum sample target chamber, being made of the first electromagnetic lens, the first aperture, the second electromagnetic lens and the second aperture.
Laser direction of advance along described femtosecond laser light source is described beam splitter, and this beam splitter is divided into folded light beam and transmitted light beam with the femto-second laser pulse of femtosecond laser light source output; Along the direction of advance of described folded light beam successively through described the first laser servo speculum, the second laser servo speculum, the 3rd laser servo speculum, optical parameter amplifying laser conversion system, the 4th laser servo mirror reflects, after described condenser lens focuses on, pass described high vacuum sample target chamber and shine the sample that is positioned on the five axle sample adjusting brackets; Direction of advance along described transmitted light beam is converted into the 266nm laser pulse after described the 5th laser servo speculum of process, the 6th laser servo speculum, the 7th laser servo speculum, the 8th laser servo speculum, femtosecond laser frequency tripling device and the focusing of ultraviolet condenser lens successively.
Described 266nm laser pulses irradiate is positioned at the metal film of described high vacuum sample target chamber, and by photoelectric effect generation pulsed electron, this electronic impulse is through multistage microwave accelerator, the first deflector, the second deflector, by the first electromagnetic lens, the first aperture, the second electromagnetic lens, behind the electron focusing colimated light system that the second aperture consists of, form about 50 nanometers or less relevant electron beam spot, be radiated in the described sample area, the diffraction pattern of interference information between the Bragg diffraction peak of diffracted formation and bragg peak, this diffraction pattern is received by described detection system, carrying out data by described data processing and three-dimensional reconfiguration system processes, utilize " position sensing diffraction imaging " (PSDI) technology, parse the scattering phase information of sample.
Described process excitation pulse and described electronic impulse are by pumping-detection technology precise synchronization.
About described five axle sample adjusting brackets have, all around, rotation and tilt adjustments attitude.
Described the first laser servo speculum and the second laser servo speculum are arranged at the first changeable optical path that consists of on the first translation stage and postpone regulating system, and described the 6th laser servo speculum and the 7th laser servo speculum are arranged at the second optical path delayed regulating system that consists of on the second translation stage.
The principle of the technology of the present invention solution:
1. solve without time resolution or the limited problem of temporal resolution: adopt electronic impulse, particularly can adopt the electronic impulse of million-electron-volt femtosecond, this electronic impulse and process excitaton source (such as femtosecond laser) precise synchronization.
2. solve the quality restriction problem that spatial resolution is subjected to object lens: adopt without the relevant electronic diffraction imaging of lens, do not use object lens (namely defocusing electromagnetic lens), and shorten the electronic flight distance.
3. solve by adopting the million-electron-volt electronic impulse to improve the expensive problem of temporal resolution: adopt without the relevant electronic diffraction imaging of lens, do not use object lens, the decrease cost.
4. realize the superelevation spatial resolution: (Spatially coherent length is better than 50 nanometers owing to the coherent electron beam that adopts high brightness, temporal coherent length is better than 50 nanometers) and tight focused electron optics (the focused electron spot is less than 50 nanometers), guarantee the inverting of electron scattering phase place, thereby make this technology can realize being better than the spatial resolution of 1 nanometer.
5. realize the ultrahigh time resolution rate: ultrafast (being to differentiate the time) electron microscopic imaging can be by the time delay between the excitation pulse of fine adjustment process and the detection electronic impulse, and then survey each relatively constantly without the relevant electron diffraction pattern of lens, and carry out the inverting in this moment and the three-dimensionalreconstruction of sample, finally obtain the transient buildup information of pump excitation sample area front and back.By the control procedure excitation pulse, survey electronic impulse width and synchronization accuracy between the two all below 1 psec, can realize being better than the temporal resolution of 1 psec.
Compared with prior art, the invention has the beneficial effects as follows:
1. realize the transient state imaging of ultrahigh time resolution and superelevation spatial discrimination: it has utilized the high energy electron pulse with process excitaton source (such as laser) precise synchronization, in conjunction with the pumping-detection method, can realize simultaneously the transient state imaging capability of ultrahigh time resolution (being better than 1 psec) and superelevation spatial discrimination (being better than 1 nanometer).
2. avoid electromagnetic lens to improving the restriction of temporal resolution: it without Lens Design, avoided femtosecond to survey electronic impulse through the pulse stretching behind the electron lens, kept the electronic impulse width, guaranteed the temporal resolution of the method.
3. greatly reduce cost: it without Lens Design, simple in structure, avoid adopting the expensive electromagnetic lens that defocuses.
4. the important local transient buildup information that provides the time resolution electronic diffraction to lack.
Description of drawings
Fig. 1 is the ultrafast structure diagram without the relevant electronic diffraction imaging device of lens of the present invention.
Fig. 2 is the structural representation of an embodiment of apparatus of the present invention.
Embodiment
The invention will be further described below in conjunction with embodiment and accompanying drawing, but should not limit protection scope of the present invention with this.
Of the present invention ultrafastly have without the relevant electronic diffraction formation method of lens that the pulsed electron control system is simple, spatial resolution is not defocused the advantages such as object lens restriction, only need one group of strong-focusing magnetic lens that pulsed electron is focused on the sample, need not to defocus electromagnetic lens, just can be implemented in superelevation time and the superelevation spatial discrimination of the real space.The method very easily combines with the million-electron-volt ultrafast electric diffraction, but the coherence of this method paired pulses electron beam has high requirement.The coherence of pulsed electron beam and focused electron spot size determine spatial resolution of the present invention.
The ultrafast electronic impulse of adopting without the relevant electronic diffraction formation method of lens of the present invention is and process excitaton source precise synchronization; The time resolution that the synchronization accuracy of the pulse duration of detection electronic impulse, pulse duration, electronic impulse and the process excitaton source of process excitation pulse etc. has determined the method can realize 1 psec even more excellent temporal resolution.
See also first Fig. 1, Fig. 1 is the ultrafast structure diagram without the relevant electronic diffraction imaging device of lens of the present invention.The present invention is ultrafast without the relevant electronic diffraction imaging device of lens, be comprised of process excitaton source 01, pulsed electron system 02, pulsed electron control system 03, sample 04, detection system 05, data processing and three-dimensional reconfiguration system 06 and high vacuum sample target chamber 07, function and the position relationship of above-mentioned component are as follows:
Described pulsed electron system 02, pulsed electron control system 03, sample 04 and detection system 05 place described high vacuum sample target chamber 07, sample 04 places on the five dimension adjustment racks in the high vacuum sample target chamber 07, and wherein said pulsed electron system 02 is comprised of Pulse Electric component and acceleration thereof, shaping element; Described process excitaton source 01 production process excitation pulse is inputted described high vacuum sample target chamber 07 and is excited the sample 04 that is positioned on the described five dimension adjustment racks.
Described Pulse Electric component produces the electronic impulse with described process excitation pulse precise synchronization, this pulsed electron becomes the relevant pulsed electron beam of high brightness through acceleration, shaping, be radiated at the sample area that is excited by the process excitation pulse that is in the high vacuum sample target chamber 07 through described pulsed electron control system 03 focusing, behind described sample diffraction, form a series of that intercouple or overlapped diffraction patterns; This diffraction pattern has described detection system 05 to receive, and comprises the interference information between Bragg diffraction peak and bragg peak; Input described data and process and three-dimensional reconfiguration system 06, by online fast Fourier method, from diffraction pattern, give phase place for change.
See also Fig. 2, Fig. 2 is the structural representation of an embodiment of apparatus of the present invention.Embodiment is take the device of femtosecond pulse as the process excitaton source, as seen from the figure, and the ultrafast formation without the relevant electronic diffraction imaging device of lens of the present invention:
The first changeable optical path that described process excitaton source 01 comprises femtosecond laser light source 1, beam splitter 2, be made of the first laser servo speculum 3, the second laser servo speculum 4 and the first translation stage 5 postpones regulating system, the 3rd laser servo speculum 6, optical parameter amplifying laser conversion system 7, the 4th laser servo speculum 8, condenser lens 9 and consists of.
Described pulsed electron system 02 is made of the second optical path delayed regulating system, the 8th laser servo speculum 28, femtosecond laser frequency tripling device 14, the ultraviolet condenser lens 15 that are positioned at the 5th outer laser servo speculum 10 of high vacuum sample target chamber 24, are made of the 6th laser servo speculum 11, the 7th laser servo speculum 12 and the second translation stage 13 and metal film 16 and the multistage microwave accelerator 17 that is positioned at high vacuum sample target chamber 24.
Pulsed electron control system 03 is by being positioned at successively the first deflector 18, the second deflector 19 of high vacuum sample target chamber 24, being made of the first electromagnetic lens 20, the first aperture 21, the second electromagnetic lens 22, the second aperture 23.
Laser direction of advance along described femtosecond laser light source 1 is described beam splitter 2, and this beam splitter 2 is divided into folded light beam A and transmitted light beam B with the femto-second laser pulse of femtosecond laser light source 1 output; Direction of advance along described folded light beam A reflects through described the first laser servo speculum 3, the second laser servo speculum 4, the 3rd laser servo speculum 6, optical parameter amplifying laser conversion system 7, the 4th laser servo speculum 8 successively, after described condenser lens 9 focuses on, pass described high vacuum sample target chamber and shine the sample that is positioned on the five axle sample adjusting brackets 25; Along the direction of advance of described transmitted light beam B successively through described the 5th laser servo speculum 10, be converted into the 266nm laser pulse after being focused on by the 6th laser servo speculum 11, the 7th laser servo speculum 12, the 8th laser servo speculum 28, femtosecond laser frequency tripling device 14 and ultraviolet condenser lens 15.
Described 266nm laser pulses irradiate is positioned on the metal film 16 of described high vacuum sample target chamber 24, and by photoelectric effect generation pulsed electron, this pulsed electron is through multistage microwave accelerator 17, the first deflector 18, the second deflector 19, by the first electromagnetic lens 20, the first aperture 21, the second electromagnetic lens 22, be radiated in the described sample area behind the electron focusing colimated light system that the second aperture 23 consists of, the diffraction pattern of interference information between the Bragg diffraction peak of diffracted formation and bragg peak, this diffraction pattern is received by described detection system 26, send into described data processing and three-dimensional reconfiguration system 27 and carry out the data processing, utilize " position sensing diffraction imaging " (PSDI) technology, parse the scattering phase information of sample.
Described process excitation pulse and described electronic impulse are by pumping-detection technology precise synchronization.
About described five axle sample adjusting brackets have, all around, rotation and tilt adjustments attitude.
Described the first laser servo speculum 3 and the second laser servo speculum 4 are arranged at the first changeable optical path that consists of on the first translation stage 5 and postpone regulating system, and described the 6th laser servo speculum 11 and the 7th laser servo speculum 12 are arranged at the second optical path delayed regulating system that consists of on the second translation stage 13.
Wherein place the high vacuum sample target chamber of sample, the chamber of Pulse Electric component, the chamber of pulsed electron control system and the chamber of detection system and all be in high vacuum or ultra-high vacuum environment, can be evacuated to 10 by prime mechanical pump and molecular pump
-7Below the Pa, keep ultra-high vacuum state by ionic pump and sublimation pump again.
Ultrafast (namely time-resolved) of the present invention can be by the time delay between fine adjustment the first translation stage 5 or the 13 adjusting pumping pulses of the second translation stage and the detection electronics without the relevant electronic diffraction imaging (being the electron microscopic imaging) of lens, and then survey each relatively constantly without the relevant electron diffraction pattern of lens, and carry out the inverting in this moment and the three-dimensionalreconstruction of sample, finally obtain the transient buildup information of pump excitation sample area front and back.Because the process excitation pulse is in the femtosecond magnitude, process excitation pulse and detection electronic impulse homology (can realize that precise synchronization is to the femtosecond magnitude), as long as survey the electronic impulse width below 1 psec by control, and the mobile accuracy of translation stage is better than 150 microns, just can realize being better than the temporal resolution of 1 psec.
The electronic impulse of generation coherent diffraction of the present invention requires to have certain room and time coherence.The spatial coherence of electronic impulse and temporal coherence have determined operability and the spatial resolution of the method.Based on the present ultrashort electron source of existing 3 MeV, Spatially coherent length can reach 30 nanometers, and temporal coherent length can reach 0.5 nanometer, can satisfy the demand of femtosecond electronic diffraction.Ultrafast without the relevant electronic diffraction imaging of lens for realizing, needs further be optimized ultrashort million-electron-volt electronic impulse, enable to fall apart from 10
-3Be down to 10
-5Thereby improve two orders of magnitude of temporal coherent length of electronics, reduce simultaneously the electrons diverge angle to improve Spatially coherent length more than 3 times, thereby by double focus lens and the focus lamp aperture that imports, ultrafast beam spot can focus on the 30-50 nanometer, nano particle, ultra-thin sample all are expected to realize the spatial discrimination of 1 nanometer, thereby realize obtaining simultaneously ultrahigh time resolution and superelevation spatial resolving power.
Claims (8)
- One kind ultrafast without the relevant electronic diffraction formation method of lens, it is characterized in that: the method is in conjunction with the pumping-detection technology with without the relevant electronic diffraction imaging of lens, to realize simultaneously the transient state imaging of ultrahigh time resolution and superelevation spatial discrimination; The method adopts with the relevant electronic impulse of the high brightness of process excitation pulse precise synchronization as detection source; Directly collect relevant electronic diffraction imaging pattern by detection system after surveying electronics process sample, thereby keep the scattering phase information of electronics; The method utilizes existing Inversion Calculation method to calculate the scattering phase information of electronics from described relevant electronic diffraction imaging by data processing and three-dimensional reconfiguration system, realizes structure and the pattern reconstruct of Three dimensional transient atomic scale.
- 2. according to claim 1 ultrafast without the relevant electronic diffraction formation method of lens, it is characterized in that adopting the coherent electron beam of high brightness, its Spatially coherent length is better than 50 nanometers, temporal coherent length is better than 50 nanometers, as detection source and tight focused electron optics, guarantee the inverting of electron scattering phase place, thereby make this technology can realize being better than the spatial resolution of 1 nanometer.
- 3. according to claim 1 ultrafast without the relevant electronic diffraction formation method of lens, it is characterized in that the ultrashort electronic impulse of employing and process excitation pulse precise synchronization is as detection source; By the control procedure excitation pulse, survey electronic impulse width and synchronization accuracy between the two all below 1 psec, can realize being better than the temporal resolution of 1 psec.
- 4. the pulse duration of electronic impulse, the pulse duration of process excitaton source, electronic impulse are the temporal resolutions that synchronization accuracy etc. with the process excitaton source has determined the method.
- 5. implement each described ultrafast ultrafast without the relevant electronic diffraction imaging device of lens without the relevant electronic diffraction formation method of lens of claim 1-3, it is characterized in that, this device is comprised of process excitaton source (01), pulsed electron system (02), pulsed electron control system (03), sample (04), detection system (05), data processing and three-dimensional reconfiguration system (06) and high vacuum sample target chamber (07), and function and the position relationship of above-mentioned component are as follows:Described pulsed electron system (02), pulsed electron control system (03), sample (04) and detection system (05) place in the described high vacuum sample target chamber (07), sample (04) places five in the high vacuum sample target chamber (07) to tie up on the adjustment racks, described pulsed electron system (02) is comprised of Pulse Electric component and acceleration thereof, reshaping device, described process excitaton source (01) production process excitation pulse is inputted described high vacuum sample target chamber (07) and is excited the sample (04) that is positioned on the described five dimension adjustment racks;Described Pulse Electric component produces the electronic impulse with described process excitation pulse precise synchronization, this pulsed electron becomes the relevant pulsed electron beam of high brightness through acceleration, shaping, focusing is radiated at the sample area that is excited by the process excitation pulse that is in the high vacuum sample target chamber (07) through described pulsed electron control system (03), behind described sample diffraction, form a series of that intercouple or overlapped diffraction patterns; This diffraction pattern is received by described detection system (05), comprises the interference information between Bragg diffraction peak and bragg peak; Input described data and process and three-dimensional reconfiguration system (06), by online fast Fourier method, from diffraction pattern, give phase place for change.
- 6. according to claim 2 ultrafast without the relevant electronic diffraction imaging device of lens, it is characterized in that described process excitaton source (01) comprises that femtosecond laser light source (1), beam splitter (2), the first changeable optical path that is made of the first laser servo speculum (3), the second laser servo speculum (4) and the first translation stage (5) postpone regulating system, the 3rd laser servo speculum (6), optical parameter amplifying laser conversion system (7), the 4th laser servo speculum (8), condenser lens (9) formation;The second optical path delayed regulating system, the 8th laser servo speculum (28), femtosecond laser frequency tripling device (14), ultraviolet condenser lens (15) that described pulsed electron system (02) consists of by the 5th outer laser servo speculum (10) of high vacuum sample target chamber (24), by the 6th laser servo speculum (11), the 7th laser servo speculum (12) and the second translation stage (13), and be positioned at high vacuum sample target chamber (24) metal film (16) and multistage microwave accelerator (17) formation successively;Described pulsed electron control system (03) is by being positioned at successively the first deflector (18) of high vacuum sample target chamber (24), the second deflector (19), being made of the first electromagnetic lens (20), the first aperture (21), the second electromagnetic lens (22), the second aperture (23);Laser direction of advance along described femtosecond laser light source (1) is described beam splitter (2), and this beam splitter (2) is divided into folded light beam (A) and transmitted light beam (B) with the femto-second laser pulse of femtosecond laser light source (1) output; Direction of advance along described folded light beam (A) reflects through described the first laser servo speculum (3), the second laser servo speculum (4), the 3rd laser servo speculum (6), optical parameter amplifying laser conversion system (7), the 4th laser servo speculum (8) successively, after described condenser lens (9) focuses on, pass described high vacuum sample target chamber and shine the sample that is positioned on the five axle sample adjusting brackets (25); Pass through successively described the 5th laser servo speculum (10), be converted into the 266nm laser pulse after being focused on by the 6th laser servo speculum (11), the 7th laser servo speculum (12), the 8th laser servo speculum (28), femtosecond laser frequency tripling device (14) and ultraviolet condenser lens (15) along the direction of advance of described transmitted light beam (B);Described 266nm laser pulses irradiate is positioned on the metal film (16) of described high vacuum sample target chamber (24), and by photoelectric effect generation pulsed electron, this electronic impulse is through multistage microwave accelerator (17), the first deflector (18), the second deflector (19), by the first electromagnetic lens (20), the first aperture (21), the second electromagnetic lens (22), be radiated in the described sample area behind the electron focusing colimated light system that the second aperture (23) consists of, the diffraction pattern of interference information between the Bragg diffraction peak of diffracted formation and bragg peak, this diffraction pattern is received by described detection system (26), send into described data processing and three-dimensional reconfiguration system (27) and carry out the data processing, parse the scattering phase information of sample.
- 7. according to claim 3 ultrafastly it is characterized in that without the relevant electronic diffraction imaging device of lens is about described five axle sample adjusting brackets have, all around, rotation and tilt adjustments attitude.
- 8. according to claim 3 ultrafast without the relevant electronic diffraction imaging device of lens, it is characterized in that, described the first laser servo speculum (3) and the second laser servo speculum (4) are arranged at upper the first changeable optical path that consists of of the first translation stage (5) and postpone regulating system, and described the 6th laser servo speculum (11) and the 7th laser servo speculum (12) are arranged at upper the second optical path delayed regulating system that consists of of the second translation stage (13).
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| CN104766776B (en) * | 2014-01-07 | 2016-09-28 | 中国科学院物理研究所 | Multi-functional ultra-fast transmission electron microscope electron gun |
| CN107481914B (en) * | 2016-06-08 | 2023-06-06 | 清华大学 | Transmission type low-energy electron microscope system |
| CN106384704A (en) * | 2016-10-31 | 2017-02-08 | 中国科学院西安光学精密机械研究所 | Terahertz-driven electronic pulse accelerating femtosecond electron diffraction device |
| CN107101974A (en) * | 2017-07-03 | 2017-08-29 | 西京学院 | A kind of new three step is without lens coherent diffraction imaging method |
| CN109782508A (en) * | 2018-12-17 | 2019-05-21 | 复旦大学 | A kind of method of nonlinear effect amplification and detection electronics ultrafast process |
| CN109782508B (en) * | 2018-12-17 | 2022-01-28 | 复旦大学 | Method for amplifying and detecting electron ultrafast process by nonlinear effect |
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