CN107086192A - Semi-finished product semiconductor chip processes special slicer - Google Patents
Semi-finished product semiconductor chip processes special slicer Download PDFInfo
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- CN107086192A CN107086192A CN201710279423.5A CN201710279423A CN107086192A CN 107086192 A CN107086192 A CN 107086192A CN 201710279423 A CN201710279423 A CN 201710279423A CN 107086192 A CN107086192 A CN 107086192A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
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- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Robotics (AREA)
- Manipulator (AREA)
- Warehouses Or Storage Devices (AREA)
Abstract
A kind of semi-finished product semiconductor chip processes special slicer, including frame, frame is provided with workbench, workbench both sides are arranged with material storing box, in frame track mobile device is additionally provided with above workbench, track mobile device is connected with manipulator, automatic pusher is sequentially provided with workbench, automatic cutoff device, track mobile device includes installing plate, installing plate is provided with the first telescoping cylinder, link is fixed with first telescoping cylinder, two groups of lowering or hoisting gears are fixed with link, manipulator is respectively connected with every group of lowering or hoisting gear, the distance of two manipulators corresponds to the distance at the feeding of material storing box and between the blowing of workbench, manipulator includes fixed plate, fixed plate both sides are arranged with the claw for capturing semi-finished product semiconductor chip.
Description
Technical field
The present invention relates to a kind of slicer, more particularly to a kind of semi-finished product semiconductor chip processes special slicer.
Background technology
Mould molding being used the production of semi-finished product semiconductor chip, semi-finished product semiconductor chip such as Fig. 1 institutes after shaping more
Show and be linked to be row's tabular, adjacent semi-finished product semiconductor chip 100 need to be separated by special equipment, partly be led with obtaining single semi-finished product
Body chip 100, so as to facilitate the processing of subsequent handling.It is general in the prior art partly to be led using the rows of semi-finished product of tablet press machine separation
Body chip 100, cardinal principle pushes rows of semi-finished product half to be used as power using oil cylinder using the pressing plate equipped with blade or tabletting
In conductor chip 100, cut-out Fig. 1 at dotted line position, to separate adjacent semi-finished product semiconductor chip 100, to expose pin 101.
The said equipment automaticity is relatively low, needs workman that rows of semi-finished product semiconductor chip is placed in into equipment work manually
Make the fixed position on platform, then the both hands button of presses starts oil cylinder and pushes pressing plate, pressing plate is by rows of semi-finished product
Semiconductor chip needs workman to empty workbench manually after being separated into single semi-finished product semiconductor chip, then continues to put rows of
Semi-finished product semiconductor chip, then more than circulation is operated, and processing efficiency is relatively low, and there is the potential safety hazard for weighing hand wounded.
With the development of technology, manipulator is widely used in production and processing, now replaces artificial loading and unloading using manipulator,
Rhythm of production can not only be accelerated, unnecessary personal injury can be also avoided.Grabbed in material storing box by manipulator slave unit workbench
Take the bottom being laminated with from top to bottom in semi-finished product semiconductor chip, material storing box in multiple rows of semi-finished product semiconductor chip, material storing box
Provided with the hydraulic stem for pushing up semi-finished product semiconductor chip upwards, the semi-finished product semiconductor chip of top in material storing box can be made to begin
Final position is at level altitude, to facilitate manipulator to capture.Due to manipulator loading and unloading speed, production efficiency is greatly carried
Rise, correspondingly due to material storing box finite capacity, so needing continually partly to lead the semi-finished product in material storing box in actual production
Body chip is supplemented, or directly changes fully charged material storing box, it is common practice that is first closed down manipulator, then is carried out feed supplement or change
Material operation, and continually shut down to reload and waste a large amount of man-hours, it have impact on production efficiency.
The content of the invention
Special slicer is processed it is an object of the invention to provide a kind of semi-finished product semiconductor chip, can substantially reduce and reload
The harmful effect produced to slicer processing efficiency.
The present invention above-mentioned purpose technical scheme is that：A kind of semi-finished product semiconductor chip processing
Special slicer, including frame, frame are provided with workbench, and workbench both sides are arranged with material storing box, frame in workbench
Top is additionally provided with track mobile device, and track mobile device, which is connected with manipulator, workbench, is sequentially provided with automatic stocking dress
Put, automatic cutoff device, track mobile device includes installing plate, and installing plate is provided with the first telescoping cylinder, solid under the first telescoping cylinder
Surely have and two groups of lowering or hoisting gears are fixed with link, link, manipulator, two manipulators are respectively connected with every group of lowering or hoisting gear
Distance correspond to material storing box feeding at and the blowing of workbench between distance, manipulator include fixed plate, fixed plate
Both sides are arranged with the claw for capturing semi-finished product semiconductor chip.
By using above-mentioned technical proposal, two manipulators are driven by with a track mobile device and with a telescoping cylinder,
The action of i.e. two manipulators is synchronous, while left side mechanical hand feeding at the material storing box of left side, and right side mechanical hand is in work
Blowing on platform, and when right side mechanical hand is at the material storing box of right side while feeding, left side mechanical hand on the table blowing, letter and
Yan Zhi：Two manipulators take semi-finished product semiconductor chip at the material storing box of workbench both sides respectively, then in turn by semi-finished product half
Conductor chip is positioned on workbench, keeps the storing amount in two material storing box different, so that stagger two material storing box reload
Time, when one of material storing box needs to reload, control lowering or hoisting gear lifts the manipulator of respective side, will so as to safety
The material storing box is not taken out with being influenceed by manipulator out of frame, and another fully charged material storing box is fixed in frame, then
Secondary control lowering or hoisting gear hands down the machinery lifted, you can return to normal production, and machinery need not be closed down during entirely reloading
Hand, equipment may continue to production and processing, it is to avoid is wasted in a large amount of man-hours and reloads in link, greatly reduces and reload to equipment
The harmful effect that production efficiency is produced.
It is preferred that, material storing box, which is provided with towards the side outside frame in the baffle plate that can be laid flat, material storing box, is provided with storing bracket, storage
Hopper bottom is provided with the second telescoping cylinder for being used for above pushing away storing bracket, and baffle plate is provided with towards the side in material storing box and supplies storing bracket
Slide the baffle limiting device being additionally provided with the rail structure of turnover material storing box, frame for stopping baffle plate.
By above-mentioned technical proposal, by setting the baffle plate that can be laid flat in material storing box side, further set in material storing box
Storing bracket is put, the expansion link of material storing box inner bottom part, which directly pushes storing bracket base, during normal production rises it, when reloading,
At the baffle plate upper surface flush that storing bracket is down to and be laid flat by expansion link, then directly storing bracket is drawn out of material storing box
Go out, and change on another fully charged storing bracket, baffle plate design that rail structure can accelerate storing bracket be moved into and out storage
Hopper, so as to improve efficiency of reloading.
It is preferred that, track mobile device also includes the horizontal rail in frame, and installing plate coordinates with horizontal rail and connected
Connect, installing plate is provided with vertical rail, and the slide plate coordinated with vertical rail, the first telescoping cylinder is fixed on slide plate, the
One telescoping cylinder includes the first expansion link, and the first expansion link is fixed at the top of installing plate, is fixed with by slide plate on limited block, installing plate
The stroke two ends moved in limited block are fixed with travel switch.
, can be by when installing plate does the reciprocating motion of horizontal direction in horizontal rail by using above-mentioned technical proposal
Left side mechanical hand is moved repeatedly between left side material storing box and workbench, by right side mechanical hand right side material storing box and workbench it
Between move repeatedly；Because two manipulators are fixed on on a telescoping cylinder, so when slide plate is done on vertical rail by link
During the reciprocating motion of vertical direction, it can decline the upper lift simultaneously of two manipulators or simultaneously, when two manipulators are simultaneously upper to be lifted,
Wherein one manipulator completes feeding at material storing box, and another manipulator completes blowing at workbench, and when two machineries
Hand declines simultaneously when, wherein a manipulator is intended to the feeding out of material storing box, and another manipulator is intended to blowing on workbench；Limit
Position block does the motion on vertical direction with slide plate, and when limited block touches the travel switch of top, telescoping cylinder stopping is up, and two
Position is lifted on manipulator to stop, when limited block touches the travel switch of lower section, telescoping cylinder stops descending, two manipulators
Decline and stop in place.
It is preferred that, fixed plate both sides are provided with rotating shaft, and claw is fixed in rotating shaft, and both sides claw is symmetrical arranged, link
On be additionally provided with drive shaft rotation claw control device.
By using above-mentioned technical proposal, two rotating shaft synchronous backwards are rotated by claw control device, is fixed on and turns
A pair of claws on axle can realize clamping or loosening up, thus capture semi-finished product semiconductor chip in material storing box or will half into
Product semiconductor chip is positioned on workbench.
It is preferred that, claw control device includes the 3rd telescoping cylinder, and the 3rd telescoping cylinder includes the 3rd expansion link, the 3rd expansion link
On be fixed with spur rack, rotating shaft and be fixed with and spur rack meshed gears.
By using above-mentioned technical proposal, when the piston rod of cylinder is flexible, the gear in spur rack drive rotating shaft thereon
Rotation, that is, drive rotating shaft, claw to rotate, by by the phase of spur rack and two piston rod gears on two cylinder piston rods
Offside coordinates, and two rotating shafts can be achieved and rotate round about simultaneously, thus using a pair of claws relative rotation or opposite turn
Move to realize material folding or blowing action.
It is preferred that, baffle limiting device, which includes being rotatably connected on the hinged seat by baffle plate, hinged seat, block, machine
The controlling switch touched when being pushed for block is additionally provided with frame；Lowering or hoisting gear includes electric cylinders, and vertically drive connection is mechanical for electric cylinders
Hand, controlling switch and the electric cylinders of homonymy are electrically connected.
By using above-mentioned technical proposal, when block, which is in, intercepts damper status, block is pressed in controlling switch, and is worked as
When block is pushed aside, block is separated with controlling switch, and the on off state of controlling switch changes, and is electrically connected with controlling switch
Homonymy electric cylinders lift the manipulator of the side after must electrically activating, and the side manipulator is departed from station, so as to safety, without any interference
Ground removes storing bracket out of material storing box, and electric cylinders carry travel switch, stops so manipulator can be risen to after level altitude；
And change after storing bracket is finished to stop baffle plate, workman can smoothly overturn baffle plate, and the baffle plate after upset is pressed on control again
On switch, now electric cylinders connect inverse current, and manipulator is down at former station by electric cylinders, to resume production；The opening of controlling switch,
Off status control electric current is positive, be reversely passed through electric cylinders, is easily achieved, does not repeat herein in circuit.
It is preferred that, material storing box bottom is provided with opening, and the second telescoping cylinder is below opening, and the second telescoping cylinder includes stretching into storage
The second expansion link in hopper, storing bracket frame is in opening, and storing bracket includes lifting bottom plate, and lifting bottom plate Corner Strapped is set
Have at sliding block, storing bracket interior angle provided with the guide rail agreed with sliding block.
By using above-mentioned technical proposal, the expansion link of the first telescoping cylinder promotes the lifting bottom plate of storing bracket to rise, can
Storing bracket is avoided to rise overally, it is relatively low hence for the height constraints of storing bracket, therefore higher storing can be made
Bracket, the more high then open ended semi-finished product semiconductor chip number of plies of storing bracket is more, can reduce the number of times that reloads, improve indirectly
Production efficiency.
It is preferred that, automatic pusher includes push pedal, and workbench has the linear moving mechanism of driving push pedal, workbench
Bar hole is provided with, push pedal inserts in bar hole and protrudes from worktable upper surface, and the fixed plate bottom of manipulator is provided with projection,
Workbench is provided with first sensor corresponding with bump position, and through hole corresponding with jaw position, through hole provided with the
Two sensors.
By using above-mentioned technical proposal, when manipulator blowing on the table, the projection of manipulator fixed plate bottom
Reaching the machinery cylinder that control claw unclamps on hand when in the range of the perceived distance of first sensor can just start, first sensor
It can be range sensor；When second sensor perceives claw action, the control centre of equipment could allow telescoping cylinder up,
Lift manipulator.
It is preferred that, limiting plate is provided between push pedal and automatic cutoff device, two pieces of limiting plates are symmetrically set in bar hole both sides,
Limiting plate is provided with the groove passed through for semi-finished product semiconductor chip；Casing is provided with by workbench, bottom half, which is provided with, drives it
The 5th telescoping cylinder is provided with 4th telescoping cylinder of lifting, casing, the 5th telescoping cylinder includes the 5th expansion link, and the 5th expansion link is parallel
In bar hole and stretch out outside casing and be fixedly connected with depression bar, depression bar is parallel with bar hole and stretches between two pieces of limiting plates, depression bar end
Portion is provided with the catch for being used for promoting semi-finished product semiconductor chip.
By using above-mentioned technical proposal, automatic pusher is pushed into semi-finished product semiconductor chip the groove of limiting plate
Interior, a semi-finished product semiconductor chip part is stayed in groove, and another part, which stretches out, to be cut, due to the spacing work of limiting plate groove
With semi-finished product semiconductor chip being kept to be aligned with the cutting knife of automatic cutoff device, it is ensured that proper slices；Pushed away by the first oil cylinder
Dynamic casing lifting, is stretched depression bar by the second oil cylinder, because depression bar is fixed on casing, thus can realize by depression bar be pressed on half into
On product semiconductor chip, and semi-finished product semiconductor chip is promoted along bar hole direction using depression bar, shift onto and depression bar is lifted behind position
And depression bar is withdrawn into original position, then depression bar continues to push the semi-finished product semiconductor chip sent by automatic pusher, so follows
Ring is reciprocal.
It is preferred that, automatic cutoff device includes the 6th telescoping cylinder on workbench, and is fixed on the 6th telescoping cylinder
Under briquetting, be fixed with buffering sleeve in workbench both sides in frame and contradict post, briquetting both sides are fixed with insertion buffering
Buffering suspension column in sleeve.
By using above-mentioned technical proposal, reach that certain buffering is imitated using sleeve is buffered with the cooperation of buffering suspension column
Really, the 3rd oil cylinder is pushed briquetting and deceleration buffer state is in when post is contacted to contradicting, slow section can be not only reduced to knife
The damage of tool, can also lift cut-out effect, make cut-off port neat；Because depression bar pushes down semi-finished product semiconductor core in slicing processes
Piece, so the adhesion of cutter and semi-finished product semiconductor chip in cutting-off process can be avoided.
In summary, the invention has the advantages that：
Two manipulators are driven using same drive device, synchronization is both can guarantee that, energy consumption is saved again, is made up of two manipulators
Double substantially increases the speed of production of slicer, is suitable for more allegro production line balance；Need not during reloading
Manipulator is shut down or closed down, the speed of production of half is still retained during reloading, it is ensured that the continuous feeding of production line balance；
The controlling switch of changing mechanically touched controls corresponding manipulator, manipulator, away from station, has been ensured what is reloaded when reloading
Security；Reload fast power-saving, reduces workman's amount of labour, shortens the time of reloading.
Brief description of the drawings
Fig. 1 is the structural representation of the semi-finished product semiconductor chip described in background technology；
Fig. 2 is the overall structure diagram of the special slicer of semi-finished product semiconductor chip processing in embodiment 1；
Fig. 3 is A portions enlarged drawing in Fig. 2；
Fig. 4 is the material storing box internal structure schematic diagram of hiding side side plate in embodiment 1；
Fig. 5 is the middle orbit mobile device of embodiment 1 and the attachment structure schematic diagram of manipulator；
Fig. 6 is B portions enlarged drawing in Fig. 2；
Fig. 7 is baffle arrangement schematic diagram in embodiment 1；
Fig. 8 is C portions enlarged drawing in Fig. 5；
Fig. 9 is manipulator and workbench, automatic pusher, the attachment structure schematic diagram of automatic cutoff device in embodiment 1；
Figure 10 is D portions enlarged drawing in Fig. 9；
Figure 11 is the material storing box internal structure schematic diagram of hiding side side plate in embodiment 2.
Reference：100th, semi-finished product semiconductor chip；1st, frame；1a, horizontal rail；2nd, workbench；2a, bar hole；
2b, through hole；3rd, material storing box；31st, baffle plate；31a, groove；32nd, side plate；33rd, pulley；34th, the second telescoping cylinder；34a, second stretch
Bar；4th, storing bracket；41st, bottom plate is lifted；41a, sliding block；41b, guide rail；42nd, bottom plate；43rd, gusset；5th, installing plate；It is 5a, perpendicular
Straight rail；6th, slide plate；6a, limited block；7th, travel switch；8th, the first telescoping cylinder；8a, the first expansion link；9th, link；10th, it is electric
Cylinder；10a, mounting seat；11st, manipulator；111st, fixed plate；112nd, rotating shaft；113rd, claw；114th, the 3rd telescoping cylinder；114a, the 3rd
Expansion link；115th, spur rack；116th, gear；117th, projection；12nd, hinged seat；13rd, block；14th, controlling switch；15th, casing；16、
4th telescoping cylinder；16a, the 4th expansion link；17th, the 5th telescoping cylinder；17a, the 5th expansion link；18th, push pedal；19th, limiting plate；19a、
Groove；20th, depression bar；20a, catch；21st, the 6th telescoping cylinder；21a, the 6th expansion link；22nd, briquetting；23rd, post is contradicted；24th, buffer
Suspension column；25th, sleeve is buffered；26th, inductor；27th, first sensor；28th, second sensor；29th, impact bag.
Embodiment
The present invention is described in further detail below in conjunction with accompanying drawing.
Embodiment 1
A kind of semi-finished product semiconductor chip processes special slicer, as shown in Figure 2 and Figure 3, and the type slicer includes frame 1, frame
Level frame is provided with workbench 2 in 1, and workbench 2 is long plate shape, and frame 1 is provided with crossbeam, crossbeam and work directly over workbench 2
The length direction of platform 2 is vertical, is machined with crossbeam on horizontal rail 1a, horizontal rail 1a and is provided with track mobile device, track
It is fixed with mobile device under the first telescoping cylinder 8, the first telescoping cylinder 8 and is fixed with two groups of lowering or hoisting gears, lowering or hoisting gear is electric cylinders
10, electric cylinders 10 have mounting seat 10a, and manipulator 11 is fixedly mounted on the mounting seat 10a of two electric cylinders 10.On workbench 2
Provided with blowing area, blank area, the blowing area of workbench 2 is provided with automatic pusher, and blank area is provided with automatic cutoff device,
Limiting plate 19 is further fixed on workbench 2 between automatic pusher and automatic cutoff device, the bottom of limiting plate 19 is provided with logical
Groove 19a, semi-finished product semiconductor chip 100（Material is referred to as below）Need first cut into slices after from groove 19a.
With reference to Fig. 2, Fig. 4, the both sides of workbench 2 are fixed with material storing box 3, and two material storing box 3 are symmetrically set on workbench 2
Put, the bottom that each material storing box 3 is built-in with the storing bracket 4 that can be taken off, material storing box 3, which is additionally provided with, to be used for storing bracket 4
The second telescoping cylinder 34 that interior material is above pushed away.Substantially workflow is：Second telescoping cylinder 34 slowly above pushes up material, two machineries
Hand 11 takes material to be positioned in turn on workbench 2 out of both sides material storing box 3 respectively, and the automatic pusher on workbench 2 does not stop
Material is pushed into blank area by ground, and is cut into slices by automatic cutoff rotary device；When one of material storing box 3 lacks material, respective side is controlled
Electric cylinders 10 corresponding manipulator 11 is increased, while the second telescoping cylinder 34 the second expansion link 34a withdraw so that storing bracket 4
It is easy to take out, reinstalls fully charged another storing bracket 4 in material storing box 3 after taking out storing bracket 4.
As shown in fig. 6, the track mobile device installed on horizontal rail 1a includes one piece of square installing plate 5, installing plate 5
Vertical slide rail is protruding with as vertical rail 5a, installing plate 5 is sliding provided with the slide plate 6 with vertical rail 5a form fits
Plate 6 can be moved up and down along vertical rail 5a, be integrally formed with by slide plate 6 on limited block 6a, installing plate 5 and be fixed with two strokes
Switch 7, two travel switches 7 are located at limited block 6a stroke two ends respectively.The first telescoping cylinder 8 is fixed with slide plate 6, is installed
The top of plate 5, which is fixed with the top of one piece of top plate, the first expansion link 8a of the first telescoping cylinder 8, to be fixed on top plate, the first telescoping cylinder 8
A link 9 is fixedly connected with first expansion link 8a, each fix in an electric cylinders 10, electric cylinders 10 in the bottom two ends of link 9 is driven
Dynamic connection manipulator 11, two manipulators 11 are moved horizontally or vertical shift simultaneously, but their grasping movement is opposite.Two machines
The distance between tool hand 11 is equal on material storing box 3 at feeding and distance between blowing on workbench 2.When left side mechanical hand in figure
11 at left side material storing box 3 during feeding, and right side mechanical hand 11 can be in blowing on workbench 2；After left side mechanical hand 11 takes material
When blowing on workbench 2, right side mechanical hand 11 can at right side material storing box 3 feeding.Can with cylinder as the first telescoping cylinder 8,
Then the piston rod of cylinder is the first expansion link 8a, and the climb of manipulator 11 is equal to the distance between two travel switches 7, will
Travel switch 7 is electrically connected with the first telescoping cylinder 8, can be achieved to stop rising immediately when manipulator 11 rises to top stroke end,
And the first telescoping cylinder 8 is declined after being delayed, limited block 6a drops to after the travel switch 7 below touching under stopping immediately therewith
Drop, rises, so moves in circles again after delay, so as to constantly complete feeding, the blowing action of manipulator 11.
With reference to Fig. 2, Fig. 6, the purposes of above-mentioned electric cylinders 10 is that will be lifted when reloading on manipulator 11 thereon to disengaging station,
Sense of current suspension control switch 14 in electric cylinders 10 is controlled, and controlling switch 14 in the form of button to be arranged on by the bottom of material storing box 3.
When controlling switch 14 is pressed, the electric current being passed through in electric cylinders 10 makes the mounting seat 10a of electric cylinders 10 move straight up, and mechanical
Hand 11 is fixed on mounting seat 10a, so as to which manipulator 11 is removed；When stopping the pressing to controlling switch 14, electricity is passed through
Electric current in cylinder 10 is that the mounting seat 10a in reverse current, electric cylinders 10 is moved down, so that manipulator 11 is moved into former work again
Position.The general structure of electric cylinders 10 is motor driving leading screw rotation, and the nut seat coordinated with leading screw by screw thread can be along leading screw
Length direction is moved, and the mounting seat 10a of electric cylinders 10 is integrally fixed on nut seat, leads to the electric current opposite to motor so working as
When, leading screw can be inverted, and the nut seat being connected with leading screw can be moved round about, and pressing controlling switch 14 can connect line
Road, release control switch 14 can open-circuit line, and control the electricity in circuit by way of pressing or release control switch 14
Direction is flowed, can be realized by ball bearing made.
As shown in figure 4, material storing box 3 is is surrounded by two blocks of side plates 32 parallel to each other with two pieces of baffle plates 31 parallel to each other,
Material storing box 3 can be just laid flat to the baffle plate 31 at tablet press machine outboard end, and bottom of baffle plate 31 is hinged in side plate 32 by mandrel rod at this, will
Baffle plate 31 can pull out the storing bracket 4 in material storing box 3 after being pulled outwardly and being laid flat.Storing bracket 4 includes bottom plate 42 and stands on bottom
Four gussets 43 at plate corner, material is laminated in storing bracket 4.The frame of the bottom of material storing box 3 is provided with opening 1b, second
Telescoping cylinder 34 is fixed under frame 1, and the second expansion link 34a of the second telescoping cylinder 34, which is stretched into, withstands storing bracket 4 in material storing box 3
Bottom plate 42, makes storing bracket 4 is overall to move up, and the material so as to the top of storing bracket 4 is always positioned at sustained height, so as to machinery
Hand 11 is captured.Can be with oil cylinder as the second telescoping cylinder 34, then the piston rod of oil cylinder is the second expansion link 34a, is connected on oil cylinder
Magnetic valve, choke valve, can be achieved the control to oil cylinder movement speed, and install corresponding inductor 26 in the top of material storing box 3, will
The control centre of inductor 26, magnetic valve and equipment electrically connects, once sensed device 26 perceives the material quilt at the top of material storing box 3
Take away, then inductor 26 sends signal to the control centre of equipment, control centre's control magnetic valve changes hydraulic pressure by choke valve
Oily flow, so that control cylinder pushes up the responsiveness of storing bracket 4.
With reference to Fig. 4, Fig. 6, each bottom of material storing box 3 and the fixed hinged seat 12 in the outside of baffle plate 31 that can be laid flat, hinged seat 12
On be hinged with a block 13, hinged seat 12 sets above-mentioned controlling switch 14 on the symmetrical opposite side of baffle plate 31, by block
13 turn to when pushing down controlling switch 14, and now the baffle plate 31 of material storing box 3 is blocked and can not be laid flat, and when block 13 turn to it is another
During side, the baffle plate 31 of material storing box 3 can be laid flat, and now controlling switch 14 is released and the state that restores to the original state.By where controlling switch 14
The control centre of circuit and equipment electrically connects, using the place circuit of controlling switch 14 as input, by certain medium element to equipment
Control centre's output signal, it is assumed that when the place circuit of controlling switch 14 connects forward current, export and give control centre's high level,
And when 14 place circuit turn-on reversal electric current of controlling switch, export and give control centre's low level, if controlling switch 14 disconnects（Control
System switch 14 is released）Correspondence output high level, then when control centre receives high level, control centre's control second is stretched
Bar 34a is withdrawn, i.e., by the control connection magnetic valve of oil cylinder, check valve come hydraulic fluid flow rate in control cylinder, so that by oil cylinder
Piston rod withdraw below the bottom opening 1b of material storing box 3 so that convenient haul out storing bracket 4 out of material storing box 3.And work as and reload
After finishing, block 13, which is flipped to, pushes down controlling switch 14（Controlling switch 14 is closed）, then output low level is corresponded to, and when control
When center receives low level, control centre controls the second expansion link 34a elongations, will be pushed up again on storing bracket 4 to its highest
The material at place be induced that device 26 perceives in a flash untill.Above-mentioned medium element can be to include the components such as triode, relay
Integrated circuit.
As shown in fig. 7, processing multiple groove 31a in the inner side of baffle plate 31, pulley 33 is installed in groove 31a, so that
Effortlessly storing bracket 4 can be pulled out along baffle plate 31.
With reference to Fig. 2, Fig. 8, the upper face center of workbench 2 is machined with elongated slot 2c, elongated slot 2c width and half along its length
Quite, elongated slot 2c bottom land digs to have to stretch in bar hole 2a, bar hole 2a to be pushed away the center section width of completed semiconductor chip 100
Plate 18, push pedal 18 can move back and forth under the driving of linear moving mechanism in bar hole 2a, and the linear moving structure can be gas
The executive components such as cylinder, electric cylinders, and center controlled by the device control.Manipulator 11 includes the fixed plate 111 of a block length plate shape,
Crawl structure, driving element on manipulator 11 etc. are all arranged in fixed plate 111, the long side edge of 111 upper surface of fixed plate two
Place is each to fix a rotating shaft 112, and rotating shaft 112 is connected with driving element, and controllable two rotating shafts 112 of driving element are in opposite directions or dorsad
Claw 113 is fixed with rotation, rotating shaft 112, two claws 113 are symmetrical arranged.When driving element controls two rotating shafts 112 opposite
During rotation, two claws 113 can close up and capture material；When driving element controls two rotating shafts 112 dorsad to rotate, two cards
Pawl 113 can separate and put down material.Above-mentioned driving element can be the 3rd telescoping cylinder 114 being fixed in fixed plate 111, the 3rd
Spur rack 115 is fixed with 3rd expansion link 114a of telescoping cylinder 114, and is arranged what is engaged with spur rack 115 in rotating shaft 112
Gear 116, the 3rd telescoping cylinder 114 can be cylinder, when the piston rod of cylinder is flexible, spur rack 115 can be pulled to drive back and forth
Gear 116, rotating shaft 112 rotate.The opposite side of two rotating shafts 112 is coordinated with the spur rack 115 on cylinder piston rod, or will be even
It is asynchronous to connect the stretching of two cylinders of two rotating shafts 112, contracting action control（When the piston rod of one cylinder is stretched, another gas
The piston rod contracting of cylinder）Two the synchronous of rotating shaft 112 can be achieved to reversely rotate towards or away from ground.
As shown in figure 9, claw 113 stretches in the lower section of installing plate 5, the bottom of installing plate 5 is further fixed on multiple projections 117, works
First sensor 27 is installed corresponding to projection 117 on platform 2, also digging has through hole that is corresponding with the position of claw 113, being square
Be fixed with second sensor 28 in 2b, through hole 2b, first sensor 27 can perceived distance, second sensor 28 can perceive motion shape
State, both of which is electrically connected with control centre, and when manipulator 11 drops to stroke lowest part, projection 117 can be by first sensor
27 sense, first sensor 27 sends signal to control centre, and control centre controls the 3rd telescoping cylinder 114 to act, makes claw
113 decontrol material；When claw 113 decontrols material, the snap action of claw 113 is felt by the second sensor 28 in through hole 2b
Know, second sensor 28 sends signal to control centre, control centre's the first telescoping cylinder 8 of control is up, i.e., manipulator 11 rises,
Make the linear moving mechanism action that control push pedal 18 is moved simultaneously, material is pushed after being put down by claw 113 by push pedal 18.
With reference to Fig. 3, Fig. 9, material is pushed into the groove 19a of limiting plate 19 by push pedal 18, and limiting plate 19 has two pieces, respectively
Symmetrically it is fixed between bar hole 2a both sides, two pieces of limiting plates 19 provided with one piece of depression bar 20, depression bar 20 is pressed on semi-finished product and partly led
On the center section of body chip 100, one end bottom of depression bar 20, which is protruding with, can promote the catch 20a of material.The side of workbench 2 is provided with one
The individual casing 15 for driving lifting by the 4th telescoping cylinder 16, casing 15 is fixed at the top of the 4th expansion link 16a of the 4th telescoping cylinder 16,
The 5th telescoping cylinder 17 is fixed with 4th telescoping cylinder 16, the 5th expansion link 17a of the 5th telescoping cylinder 17 is extended outside casing 15, the 5th
One end compression column with fixed 20 that expansion link 17a is stretched out outside casing 15, depression bar 20 is stretched between two pieces of limiting plates 19.It can be made using oil cylinder
For the 4th telescoping cylinder 16, the 5th telescoping cylinder 17, then the 4th expansion link 16a, the 5th expansion link 17a are the piston rod of oil cylinder.
As shown in Figure 9, Figure 10, automatic disconnecting device include being fixed in frame 1, the directly over workbench 2 the 6th
Telescoping cylinder 21, the 6th expansion link 21a of the 6th telescoping cylinder 21 downwards, and is fixed with briquetting 22, and the 6th telescoping cylinder 21 can be
Oil cylinder, the 6th expansion link 21a is the piston rod of oil cylinder.The lower surface of briquetting 22 is protruding with blade, can partly lead rows of semi-finished product
Body chip 100 is blocked to be single.The both sides of workbench 2 are symmetrically fixed with conflict post 23 and buffering sleeve 25, when the piston rod of oil cylinder
When pushing briquetting 22 to extreme lower position, contradict post 23 and prop up briquetting 22, the two ends of briquetting 22, which are also fixed with, is inserted in buffering sleeve 25
Filled with fluid in interior buffering suspension column 24, buffering sleeve 25, the top of buffering sleeve 25, which is provided with, accommodates fluid, deformable buffering
Capsule 29, the fluid for acting as storing the gap spilling between buffering sleeve 25 and buffering suspension column 24 of impact bag 29.
Embodiment 2
A kind of semi-finished product semiconductor chip processes special slicer, and as different from Example 1, the bottom of storing bracket 4 is not set
Fixed bottom plate 42 is put, but as shown in figure 11, in the lifting bottom plate 41 of the bottom setting activity of storing bracket 4, and at lifting bottom
Vertical sliding block 41a is welded and fixed at 41 4 jiaos of plate, sliding block 41a is shaped as shorter cylinder, and smooth outer surface, storage rack
The inner side of gusset 43 at corner is machined with the deep-slotted chip breaker with sliding block 41a form fits as guide rail 41b, the second telescoping cylinder 34
Second expansion link 34a pushes directly on lifting bottom plate 41.
Integrated embodiment 1 and embodiment 2, specific work process of the invention are as follows：
Keep the inventory in two material storing box 3 different, the time of reloading of two material storing box 3 is staggered, by the second expansion link 34a
Upward stroke（Bottom plate or the height for lifting bottom plate 41）It is adjusted to and only sets low a material than the appreciable lowest order of inductor 26
Thickness unit, when material is finished in one of material storing box 3, the second expansion link 34a reaches upward stroke terminal and can not be after
It is continuous to rise, therefore inductor 26 can not sense material, then the second expansion link 34a withdraws the bottom of material storing box 3 and opening 1b is neat
Flat place, the block 13 that now workman will bear against in controlling switch 14 manually is allocated to another side, does not stop storage when block 13 is allocated to
During the position of the baffle plate 31 of hopper 3, homonymy manipulator 11 rises in the presence of electric cylinders 10 and departs from station；
Workman is reloaded finish after block 13 be allocated to again be pressed in controlling switch 14, now homonymy manipulator 11 is in electric cylinders 10
The material at the former top of station crawl material storing box 3 is back under effect, inductor 26 perceives material and is removed, and passes through control centre
The second expansion link of indirect control 34a slowly rises liftout；
When left side mechanical hand 11 captures material on left side material storing box 3, right side mechanical hand 11 blowing, manipulator on workbench 2
When 11 bottom projections 117 are sensed by the first sensor 27 on workbench 2, the 3rd telescoping cylinder 114 control blowing of claw 113, and
Claw 113 is acted when being sensed by second sensor 28, and the action of the first telescoping cylinder 8 rises two manipulators 11, while making push pedal
Material is pushed into blank area by 18, is now had on left side mechanical hand 11 without material on material, right side mechanical hand 11, the first telescoping cylinder 8 is moved
During to stroke highest point, limited block 6a touchings top travel switch 7, the now stopping of the first telescoping cylinder 8 is acted and is delayed（During delay
Between in section installing plate 5 moved right on horizontal rail 1a）, counteragent after delay（Manipulator 11 declines）, make left side mechanical
Hand 11 is in blowing on workbench 2, and right side mechanical hand 11 is in feeding on right side material storing box 3.
This specific embodiment is only explanation of the invention, and it is not limitation of the present invention, people in the art
Member can make the modification without creative contribution to the present embodiment as needed after this specification is read, but as long as at this
All protected in the right of invention by Patent Law.
Claims (10)
1. a kind of semi-finished product semiconductor chip processes special slicer, including frame（1）, frame（1）It is provided with workbench（2）,
Workbench（2）Both sides are arranged with material storing box（3）, frame（1）On in workbench（2）Top is additionally provided with track mobile device, rail
Manipulator is connected with road mobile device（11）, workbench（2）On be sequentially provided with automatic pusher, automatic cutoff device,
It is characterized in that：The track mobile device includes installing plate（5）, installing plate（5）It is provided with the first telescoping cylinder（8）, first stretches
Contracting cylinder（8）Under be fixed with link（9）, link（9）On be fixed with two groups of lowering or hoisting gears, every group of lowering or hoisting gear and be respectively connected with
Manipulator（11）, two manipulators（11）Distance correspond to material storing box（3）Feeding at and workbench（2）Blowing between
Distance, manipulator（11）Including fixed plate（111）, fixed plate（111）Both sides are arranged with for capturing semi-finished product semiconductor
Chip（100）Claw（113）.
2. semi-finished product semiconductor chip according to claim 1 processes special slicer, it is characterised in that：The material storing box
（3）Towards frame（1）Outer side is provided with the baffle plate that can be laid flat（31）, material storing box（3）It is interior to be provided with storing bracket（4）, material storing box
（3）Bottom, which is provided with, to be used to above push away storing bracket（4）The second telescoping cylinder（34）, baffle plate（31）Towards material storing box（3）Interior side
Provided with for storing bracket（4）Slide turnover material storing box（3）Rail structure, frame（1）On be additionally provided with for stopping baffle plate（31）
Baffle limiting device.
3. semi-finished product semiconductor chip according to claim 1 processes special slicer, it is characterised in that：The track is moved
Dynamic device also includes being located at frame（1）On horizontal rail（1a）, installing plate（5）With horizontal rail（1a）It is connected, installs
Plate（5）It is provided with vertical rail（5a）, and and vertical rail（5a）The slide plate of cooperation（6）, the first telescoping cylinder（8）It is fixed at
Slide plate（6）On, the first telescoping cylinder（8）Including the first expansion link（8a）, the first expansion link（8a）It is fixed on installing plate（5）Top,
Slide plate（6）Side is fixed with limited block（6a）, installing plate（5）On in limited block（6a）The stroke two ends of motion are fixed with travel switch
（7）.
4. semi-finished product semiconductor chip according to claim 1 processes special slicer, it is characterised in that：The fixed plate
（111）Both sides are provided with rotating shaft（112）, the claw（113）It is fixed on rotating shaft（112）On, and both sides claw（113）Symmetrically set
Put, link（9）On be additionally provided with drive shaft（112）The claw control device of rotation.
5. semi-finished product semiconductor chip according to claim 4 processes special slicer, it is characterised in that：The claw control
Device processed includes the 3rd telescoping cylinder（114）, the 3rd telescoping cylinder（114）Including the 3rd expansion link（114a）, the 3rd expansion link
（114a）On be fixed with spur rack（115）, rotating shaft（112）On be fixed with and spur rack（115）Meshed gears（116）.
6. semi-finished product semiconductor chip according to claim 2 processes special slicer, it is characterised in that：The baffle plate limit
Position device includes being located at baffle plate（31）Other hinged seat（12）, hinged seat（12）On be rotatably connected and have block（13）, frame（1）
On be additionally provided with and supply block（13）The controlling switch touched when pushing（14）；The lowering or hoisting gear includes electric cylinders（10）, electric cylinders（10）
Vertically drive connection manipulator（11）, the controlling switch of homonymy（14）With electric cylinders（10）Electrically connect.
7. semi-finished product semiconductor chip according to claim 2 processes special slicer, it is characterised in that：The material storing box
（3）Bottom is provided with opening, the second telescoping cylinder（34）Below opening, the second telescoping cylinder（34）Including stretching into material storing box（3）It is interior
The second expansion link（34a）, storing bracket（4）Frame is in opening（1b）On, storing bracket（4）Including lifting bottom plate（41）, lifting
Bottom plate（41）Corner Strapped is provided with sliding block（41a）, storing bracket（4）It is provided with interior angle and sliding block（41a）The guide rail agreed with
（41b）.
8. semi-finished product semiconductor chip according to claim 1 processes special slicer, it is characterised in that：It is described to push away automatically
Expect that device includes push pedal（18）, workbench（2）Have driving push pedal（18）Linear moving mechanism, workbench（2）It is provided with
Bar hole（2a）, push pedal（18）Insert in bar hole（2a）It is interior and protrude from workbench（2）Upper surface, manipulator（11）Fixed plate
（111）Bottom is provided with projection（117）, workbench（2）It is provided with and projection（117）The corresponding first sensor in position（27）, with
And and claw（113）The corresponding through hole in position（2b）, through hole（2b）It is interior to be provided with second sensor（28）.
9. semi-finished product semiconductor chip according to claim 8 processes special slicer, it is characterised in that：The push pedal
（18）Limiting plate is provided between the automatic cutoff device（19）, two pieces of limiting plates（19）It is symmetrically set in bar hole（2a）Two
Side, limiting plate（19）It is provided with and supplies semi-finished product semiconductor chip（100）The groove passed through（19a）；Workbench（2）Side is provided with casing
（15）, casing（15）Bottom is provided with the 4th telescoping cylinder for driving its lifting（16）, casing（15）Inside it is provided with the 5th telescoping cylinder（17）,
5th telescoping cylinder（17）Including the 5th expansion link（17a）, the 5th expansion link（17a）Parallel to bar hole（2a）And stretch out casing
（15）It is fixedly connected with depression bar outside（20）, depression bar（20）With bar hole（2a）It is parallel and stretch in two pieces of limiting plates（19）Between, depression bar
（20）End, which is provided with, to be used to promote semi-finished product semiconductor chip（100）Catch（20a）.
10. semi-finished product semiconductor chip according to claim 9 processes special slicer, it is characterised in that：It is described automatic
Cutoff device includes being located at workbench（2）On the 6th telescoping cylinder（21）, and it is fixed on the 6th telescoping cylinder（21）Under briquetting
（22）, frame（1）On in workbench（2）Both sides are fixed with buffering sleeve（25）With conflict post（23）, briquetting（22）Both sides are consolidated
It is fixed to buffer sleeve provided with insertion（25）Interior buffering suspension column（24）.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710279423.5A CN107086192B (en) | 2017-04-25 | 2017-04-25 | Semi-finished product semiconductor chip processes dedicated slicer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710279423.5A CN107086192B (en) | 2017-04-25 | 2017-04-25 | Semi-finished product semiconductor chip processes dedicated slicer |
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| Publication Number | Publication Date |
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| CN107086192A true CN107086192A (en) | 2017-08-22 |
| CN107086192B CN107086192B (en) | 2019-11-19 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110265336A (en) * | 2019-06-28 | 2019-09-20 | 日月光半导体（昆山）有限公司 | Integrated circuit device |
| CN111037757A (en) * | 2019-12-31 | 2020-04-21 | 重庆市耀城玻璃制品有限公司 | Intelligent punching system for glass pot cover |
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|---|---|---|---|---|
| CN202917530U (en) * | 2012-11-29 | 2013-05-01 | 江苏爱动力自动化设备有限公司 | Solar cell module long frame automatic forming machine |
| CN204289413U (en) * | 2014-12-29 | 2015-04-22 | 昆山工研院新型平板显示技术中心有限公司 | Automatic loading and unloading mechanism and automatic material changing mechanism |
| CN106558504A (en) * | 2016-11-15 | 2017-04-05 | 江苏智石科技有限公司 | A kind of loading and unloading method for chip package |
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2017
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202917530U (en) * | 2012-11-29 | 2013-05-01 | 江苏爱动力自动化设备有限公司 | Solar cell module long frame automatic forming machine |
| CN204289413U (en) * | 2014-12-29 | 2015-04-22 | 昆山工研院新型平板显示技术中心有限公司 | Automatic loading and unloading mechanism and automatic material changing mechanism |
| CN106558504A (en) * | 2016-11-15 | 2017-04-05 | 江苏智石科技有限公司 | A kind of loading and unloading method for chip package |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110265336A (en) * | 2019-06-28 | 2019-09-20 | 日月光半导体（昆山）有限公司 | Integrated circuit device |
| CN110265336B (en) * | 2019-06-28 | 2024-05-24 | 日月新半导体(昆山)有限公司 | Integrated circuit device |
| CN111037757A (en) * | 2019-12-31 | 2020-04-21 | 重庆市耀城玻璃制品有限公司 | Intelligent punching system for glass pot cover |
| CN111037757B (en) * | 2019-12-31 | 2021-09-07 | 重庆市耀城玻璃制品有限公司 | Intelligent punching system for glass pot cover |
Also Published As
| Publication number | Publication date |
|---|---|
| CN107086192B (en) | 2019-11-19 |
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