CN107085015A - Wireless and passive gas, temperature biparameter sensor and preparation method thereof - Google Patents
Wireless and passive gas, temperature biparameter sensor and preparation method thereof Download PDFInfo
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- CN107085015A CN107085015A CN201710232914.4A CN201710232914A CN107085015A CN 107085015 A CN107085015 A CN 107085015A CN 201710232914 A CN201710232914 A CN 201710232914A CN 107085015 A CN107085015 A CN 107085015A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
- G01N27/227—Sensors changing capacitance upon adsorption or absorption of fluid components, e.g. electrolyte-insulator-semiconductor sensors, MOS capacitors
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
- G01K7/34—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using capacitative elements
- G01K7/343—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using capacitative elements the dielectric constant of which is temperature dependant
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/125—Composition of the body, e.g. the composition of its sensitive layer
- G01N27/127—Composition of the body, e.g. the composition of its sensitive layer comprising nanoparticles
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
- G01N27/221—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance by investigating the dielectric properties
- G01N2027/222—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance by investigating the dielectric properties for analysing gases
Abstract
The invention belongs to sensor technical field, for solve that existing gas sensor stability is poor, repeat usage is low and need power supply power cause the sensor life-time time limit it is short, can not hot operation technical problem, there is provided a kind of wireless and passive gas, temperature biparameter sensor and preparation method thereof, sensor includes medium substrate, the side of medium substrate sets gas test inductance coil and interdigital capacitor, interdigital capacitor is arranged on the inner side of gas test inductance coil, and interdigital capacitor is connected with the inner ring of gas test inductance coil, interdigital capacitor surface attachment GO/In2O3Air-sensitive film, the opposite side of medium substrate sets temperature test coil, temperature test coil and parasitic capacitance one LC resonant tank of formation of its own presence.The present invention is simple and reasonable, is measured using the method for wireless and passive, improves the stability of measurement, reduce power consumption, beneficial to gas, the integration of temperature biparameter sensor, miniaturization is realized, is easy to processing, with low cost.
Description
Technical field
The invention belongs to sensor technical field, and in particular to a kind of wireless and passive gas, temperature biparameter sensor and
Its preparation method.
Background technology
With the development of the social economy, industrialized carried out, increasing toxic gas continuously emerges, and threatens to people
The existence of class and health.Current most gas sensor is all metal-oxide gas transducer, with higher sensitive
Degree, the features such as response is rapid and uses simple, but its less stable, relatively low reusable rate etc., and traditional gas
Body sensor is all active, it is necessary to which power supply is powered, and this results in the sensor life-time time limit is short, it is impossible to works at high temperature,
Its application field is limited by very large.In recent years, with the promotion that the development and environmental protection of wireless and passive technology are lived, nothing
Line passive source gas sensor has become the new direction of future studies.
The content of the invention
To solve, existing gas sensor stability is poor, repeat usage is low and needs power supply to power causes sensing to the present invention
The device life-span time limit is short, can not there is provided a kind of wireless and passive gas, temperature biparameter sensor in the technical problem of hot operation
And preparation method thereof.
The technical solution adopted by the present invention is as follows：
A kind of wireless and passive gas, temperature biparameter sensor, are prepared from using magnetron sputtering technique, including use LTCC bases
The medium substrate that plate is made, the side of medium substrate sets gas test inductance coil and interdigital capacitor, and the interdigital capacitor is set
Put in the inner side of gas test inductance coil, and interdigital capacitor is connected with the inner ring of gas test inductance coil, interdigital capacitor table
GO/In is adhered in face2O3Air-sensitive film, the opposite side of the medium substrate sets temperature test coil, the temperature test coil with
Its own parasitic capacitance existed one LC resonant tank of formation.
A kind of wireless and passive gas, the preparation method of temperature biparameter sensor, comprise the following steps：First in LTCC bases
Metallic vias is processed on plate, the interconnection for gas test inductance coil and interdigital capacitor；Using the technology of magnetron sputtering by gold
Gold atom on target is splashed to the front and back of ltcc substrate, and gas test inductor wire is sputtered in the front of ltcc substrate
Circle and interdigital capacitor, temperature test coil is gone out in the back spatter of ltcc substrate；Graphene oxide is prepared using Hummers methods
GO；Pale yellow powder In is prepared using the method for collosol and gel2O3, obtained pale yellow powder is ground in agate mortar
The nanometer In refined2O3Particle；By the GO prepared and the nanometer In prepared2O3Particle is doped, and is coated to interdigital
On electric capacity, interdigital capacitor is completely covered.
The specific preparation process of wireless and passive gas, temperature biparameter sensor is：
（1）Metallic vias is processed on ltcc substrate first, for the interconnection of gas test inductance coil and interdigital capacitor, then profit
Two layers of ltcc substrate lamination is integrally formed with the technology of lamination；
（2）Positive even one layer of photoresist of integral ltcc substrate is being prepared first with sol evenning machine, by gas test inductance
Coil removes the photoresist on ltcc substrate using litho machine with interdigital capacitor mask plate, then with magnetic control sputtering device that gold is former
Son is splashed on substrate, and finally unnecessary photoresist is washed with acetone, leaves gas test inductance coil and interdigital electricity
Hold；The sputtering of temperature test coil is got at the ltcc substrate back side using the technique same with ltcc substrate front, gas is formd
The wireless sourceless sensor of body, temperature biparameter；
（3）The preparation of graphene oxide, takes the 100mL concentrated sulfuric acids and 10mL phosphoric acid to be added sequentially in three-necked bottle；Mixed acid is put
In ice-water bath, 0.8g crystalline flake graphites and 5g potassium permanganate are slow added into, 45min is stirred；Mixture is placed in 45 ~ 55 DEG C
Stirred in constant temperature water tank after 35min, be placed in 60 DEG C of constant temperature water tanks and react 16h, mixture is in blackish green；50mL5% is slowly added dropwise
Hydrogen peroxide, be stirred well to mixture and be presented golden yellow；Product is moved in beaker, normal temperature stands cooling, uses deionized water
Washing is repeatedly until neutral；Product after washing is placed in 60 DEG C of drying in drying box, products therefrom is graphene oxide；
（4）Weigh 1.5g InCl3•4H2O is dissolved among 20ml distilled water, adds 2% polyethylene glycol, mixes one
The section time；1mol/L NH is slowly added dropwise into solution at room temperature3•H2O and to be slowly stirred the pH value until solution be neutrality,
Jelly is obtained, sol solution is placed and is changed into gel within static 2 hours at room temperature；Repeatedly washed with deionized water after filtering,
Washed gel is placed in drying box 3 hours are dried at a temperature of 100 DEG C, then with 300 DEG C in high temperature furnace
Temperature calcination 1 hour, obtained pale yellow powder obtains a diameter of by obtained pale yellow powder in agate mortar grinding
15-45nm nano indium oxide particle；
（5）By the GO prepared and the nanometer In prepared2O3Particle is doped in 1.5% ratio, is ground using agate mortar
Mill is uniform, adds appropriate deionized water and is tuned into slurry；The slurry mixed up is coated on interdigital capacitor by the way of being coated with,
Interdigital capacitor is completely covered, it is ensured that thickness is uniform, places dry in the cool at room temperature；After being completely dried, it will sense
Device is placed on 2 h of sintering in 260 DEG C of high temperature furnaces；Finally by the sensor prepared the h of aging 24 in atmosphere.
Beneficial effects of the present invention：Compared with prior art, gas of the present invention, temperature biparameter sensor are used
LC resonance principles（Such as Fig. 1）, utilize gas sensitization layer GO/ In2O3Physical absorption object gas so that the electricity between interdigital capacitor
Hold, resistance changes with the difference of adsorbed gas concentration, so as to realize the wireless and passive measurement to gas, sensor base
The dielectric constant at bottom is temperature sensitive, and when extraneous temperature changes, the parasitic capacitance size of sensor also changes,
Ultimately result in sensor resonant frequency to change with temperature, realize the wireless and passive measurement to temperature.The present invention is by gas
Measurement and temperature survey combine, and two metering systems are measured using the method for wireless and passive, are improved
The stability of measurement, reduces power consumption, realizes the measurement to gas, temperature biparameter, and dimensionally have very
Big flexibility.
The present invention is simple and reasonable, beneficial to gas, the integration of temperature biparameter sensor, miniaturization is realized, is easy to
Processing, it is with low cost.
Brief description of the drawings
Fig. 1 is test philosophy figure of the invention；
Fig. 2 is that LTCC materials are laminated process flow diagram；
Fig. 3 is magnetron sputtering front schematic flow sheet；
Fig. 4 is magnetron sputtering back side schematic flow sheet；
Fig. 5 is concrete structure schematic diagram of the invention；
In figure：1- sensors；2- Network Analyzers；3- interrogation antennas；4- gas test inductance coils；5- interdigital capacitors；6- temperature
Degree test coil；7- medium substrates；8- punchings；9- is metal filled；10- is laminated；11- burns altogether；12- spin coatings；13- photoetching；14- splashes
Penetrate；15- removes photoresist；16-GO/ In2O3Air-sensitive film.
Embodiment
As shown in figure 5, a kind of wireless and passive gas, temperature biparameter sensor, are prepared from using magnetron sputtering technique,
Including medium substrate 7, the medium substrate 7 is made using ltcc substrate, and the side of medium substrate 7 sets gas test inductor wire
Circle 4 and interdigital capacitor 5, the interdigital capacitor 5 are arranged on the inner side of gas test inductance coil 4, and interdigital capacitor 5 is surveyed with gas
The inner ring for trying inductance coil 4 is connected, the surface attachment GO/In of interdigital capacitor 52O3Air-sensitive film 16, the medium substrate 7 it is another
Side sets temperature test coil 6, and the temperature test coil 6 and one LC resonance of parasitic capacitance formation of its own presence are returned
Road.
The wireless and passive gas of the present invention, the preparation method of temperature biparameter sensor, specifically include following steps：
（1）Metallic vias is processed on ltcc substrate first, for the interconnection of gas test inductance coil and interdigital capacitor, then profit
Two layers of ltcc substrate lamination is integrally formed with the technology of lamination, as shown in Figure 2.
（2）Positive even one layer of photoresist of integral ltcc substrate is being prepared first with sol evenning machine, will be designed
Gas test inductance coil, which removes the photoresist on ltcc substrate using litho machine with interdigital capacitor mask plate, obtains desired
Structure（That is the structure of gas test inductance coil and interdigital capacitor）, gold atom is then splashed to substrate with magnetic control sputtering device
On, finally unnecessary photoresist is washed with acetone, gas test inductance coil and interdigital capacitor is left, as shown in Figure 3；
The sputtering of temperature test coil is got at the ltcc substrate back side using the technique same with ltcc substrate front, as shown in figure 4, shape
Into gas, the wireless sourceless sensor of temperature biparameter.
（3）The preparation of graphene oxide, takes the 100mL concentrated sulfuric acids and 10mL phosphoric acid to be added sequentially in three-necked bottle；Will mixing
Acid is placed in ice-water bath, is slow added into 0.8g crystalline flake graphites and 5g potassium permanganate, stirs 45min；Mixture is placed in 45 ~
Stirred in 55 DEG C of constant temperature water tanks after 35min, be placed in 60 DEG C of constant temperature water tanks and react 16h, mixture is in blackish green；It is slowly added dropwise
50mL5% hydrogen peroxide, is stirred well to mixture and is presented golden yellow；Product is moved in beaker, normal temperature stands cooling, spends
Ion water washing is repeatedly until neutral；Product after washing is placed in 60 DEG C of drying in drying box, products therefrom is oxidation stone
Black alkene.
（4）Weigh 1.5g InCl3•4H2O is dissolved among 20ml distilled water, adds 2% polyethylene glycol, and mixing is stirred
Mix a period of time；1mol/L NH is slowly added dropwise into solution at room temperature3•H2O is simultaneously slowly stirred in the pH value of solution is
Property, jelly is obtained, sol solution is placed and is changed into gel within static 2 hours at room temperature；Repeatedly washed with deionized water after filtering
Wash, washed gel is placed in drying box 3 hours are dried at a temperature of 100 DEG C, then with 300 in high temperature furnace
DEG C temperature calcination 1 hour, obtained pale yellow powder obtains a diameter of by obtained pale yellow powder in agate mortar grinding
15-45nm nano indium oxide particle.
（5）By the GO prepared and the nanometer In prepared2O3Particle is doped in 1.5% ratio, is ground using agate
Alms bowl grinding is uniform, adds appropriate deionized water and is tuned into slurry；The slurry mixed up is coated to interdigital electricity by the way of being coated with
As shown in figure 5, interdigital capacitor is completely covered in appearance, it is ensured that thickness is uniform, places dry in the cool at room temperature, it is to avoid sunlight
Direct projection prevents air-sensitive film cracking from coming off；After being completely dried, 2 h of sintering in 260 DEG C of high temperature furnaces are placed a sensor at,
With the stability of reinforcement material and it is completely dried air-sensitive film；Finally by the sensor prepared the h of aging 24 in atmosphere,
To improve its performance.
Compared with prior art, gas of the present invention, temperature biparameter sensor use LC resonance principles（As schemed
1）, utilize gas sensitization layer GO/ In2O3Physical absorption object gas so that the electric capacity, resistance between interdigital capacitor are with adsorbed gas
The difference of bulk concentration and change, so as to realize that, to the measurement of the wireless and passive of gas, the dielectric constant of sensor base is to temperature
Degree is sensitive, and when extraneous temperature changes, the parasitic capacitance size of sensor also changes, and ultimately results in sensor humorous
Vibration frequency changes with temperature, realizes the wireless and passive measurement to temperature.The present invention is by gasmetry and temperature survey knot
Altogether, and two metering systems are measured using the method for wireless and passive, the stability of measurement is improved, reduced
Power consumption, realizes the measurement to gas, temperature biparameter, and dimensionally have very big flexibility.
The present invention is simple and reasonable, beneficial to gas, the integration of temperature biparameter sensor, miniaturization is realized, is easy to
Processing, it is with low cost.
Claims (3)
1. a kind of wireless and passive gas, temperature biparameter sensor, it is characterised in that：It is prepared from using magnetron sputtering technique,
Including the medium substrate being made of ltcc substrate（7）, medium substrate（7）Side set gas test inductance coil（4）With
Interdigital capacitor（5）, the interdigital capacitor（5）It is arranged on gas test inductance coil（4）Inner side, and interdigital capacitor（5）With gas
Body examination tries inductance coil（4）Inner ring be connected, interdigital capacitor（5）Surface attachment GO/In2O3Air-sensitive film（16）, the medium base
Bottom（7）Opposite side set temperature test coil（6）, the temperature test coil（6）With the parasitic capacitance shape of its own presence
Into a LC resonant tank.
2. a kind of wireless and passive gas, the preparation method of temperature biparameter sensor, it is characterised in that：Comprise the following steps：It is first
Metallic vias is first processed on ltcc substrate, the interconnection for gas test inductance coil and interdigital capacitor；Utilize magnetron sputtering
Technology the gold atom on gold target material is splashed to the front and back of ltcc substrate, sputter gas in the front of ltcc substrate
Inductance coil and interdigital capacitor are tested, temperature test coil is gone out in the back spatter of ltcc substrate；Prepared using Hummers methods
Graphene oxide GO；Pale yellow powder In is prepared using the method for collosol and gel2O3, by obtained pale yellow powder in agate
The nanometer In that Nao mortar grinders are refined2O3Particle；By the GO prepared and the nanometer In prepared2O3Particle is doped,
It is coated on interdigital capacitor, interdigital capacitor is completely covered.
3. a kind of wireless and passive gas according to claim 2, the preparation method of temperature biparameter sensor, its feature exist
It is in specific step：
（1）Metallic vias is processed on ltcc substrate first, for the interconnection of gas test inductance coil and interdigital capacitor, then profit
Two layers of ltcc substrate lamination is integrally formed with the technology of lamination；
（2）Positive even one layer of photoresist of integral ltcc substrate is being prepared first with sol evenning machine, by gas test inductance
Coil removes the photoresist on ltcc substrate using litho machine with interdigital capacitor mask plate, then with magnetic control sputtering device that gold is former
Son is splashed on substrate, and finally unnecessary photoresist is washed with acetone, leaves gas test inductance coil and interdigital electricity
Hold；The sputtering of temperature test coil is got at the ltcc substrate back side using the technique same with ltcc substrate front, gas is formd
The wireless sourceless sensor of body, temperature biparameter；
（3）The preparation of graphene oxide, takes the 100mL concentrated sulfuric acids and 10mL phosphoric acid to be added sequentially in three-necked bottle；Mixed acid is put
In ice-water bath, 0.8g crystalline flake graphites and 5g potassium permanganate are slow added into, 45min is stirred；Mixture is placed in 45 ~ 55 DEG C
Stirred in constant temperature water tank after 35min, be placed in 60 DEG C of constant temperature water tanks and react 16h, mixture is in blackish green；50mL5% is slowly added dropwise
Hydrogen peroxide, be stirred well to mixture and be presented golden yellow；Product is moved in beaker, normal temperature stands cooling, uses deionized water
Washing is repeatedly until neutral；Product after washing is placed in 60 DEG C of drying in drying box, products therefrom is graphene oxide；
（4）Weigh 1.5g InCl3•4H2O is dissolved among 20ml distilled water, adds 2% polyethylene glycol, mixes one
The section time；1mol/L NH is slowly added dropwise into solution at room temperature3•H2O and to be slowly stirred the pH value until solution be neutrality,
Jelly is obtained, sol solution is placed and is changed into gel within static 2 hours at room temperature；Repeatedly washed with deionized water after filtering,
Washed gel is placed in drying box 3 hours are dried at a temperature of 100 DEG C, then with 300 DEG C in high temperature furnace
Temperature calcination 1 hour, obtained pale yellow powder obtains a diameter of by obtained pale yellow powder in agate mortar grinding
15-45nm nano indium oxide particle；
（5）By the GO prepared and the nanometer In prepared2O3Particle is doped in 1.5% ratio, is ground using agate mortar
Mill is uniform, adds appropriate deionized water and is tuned into slurry；The slurry mixed up is coated on interdigital capacitor by the way of being coated with,
Interdigital capacitor is completely covered, it is ensured that thickness is uniform, places dry in the cool at room temperature；After being completely dried, it will sense
Device is placed on 2 h of sintering in 260 DEG C of high temperature furnaces；Finally by the sensor prepared the h of aging 24 in atmosphere.
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| CN108387610A (en) * | 2018-01-19 | 2018-08-10 | 上海交通大学 | marker detection device and detection method |
| CN108975920A (en) * | 2018-03-12 | 2018-12-11 | 中北大学 | A kind of high-temperature heat flux sensor and preparation method thereof based on HTCC |
| CN110174181A (en) * | 2019-06-05 | 2019-08-27 | 中北大学 | A kind of rotary part temperature/hot-fluid dynamic testing method |
| CN110426064A (en) * | 2019-07-18 | 2019-11-08 | 东南大学 | Wireless sourceless sensor and wireless and passive method for sensing |
| CN110542455A (en) * | 2019-09-16 | 2019-12-06 | 中北大学 | HTCC composite microsensor for pressure/vibration synchronous measurement and preparation method thereof |
| WO2020057080A1 (en) * | 2018-09-18 | 2020-03-26 | 东南大学 | Multi-parameter lc sensor for monitoring state of rotating structure |
| CN111238544A (en) * | 2020-03-12 | 2020-06-05 | 江苏林洋能源股份有限公司 | Microwave sensor based on LC type resonator and applied to temperature/humidity environment detection |
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| CN113092545A (en) * | 2021-04-13 | 2021-07-09 | 哈尔滨理工大学 | Based on CuO/In2O3Preparation method of modified graphene MEMS gas sensor |
| CN113418969A (en) * | 2021-06-07 | 2021-09-21 | 武汉大学 | High-sensitivity millimeter wave dielectric resonance sensor for biomedical detection |
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| CN107677707A (en) * | 2017-08-24 | 2018-02-09 | 中北大学 | A kind of substrate integration wave-guide formula wireless and passive gas sensor based on LTCC and preparation method thereof |
| CN107677707B (en) * | 2017-08-24 | 2020-02-18 | 中北大学 | LTCC-based substrate integrated waveguide type wireless passive gas sensor and preparation method thereof |
| CN108387610A (en) * | 2018-01-19 | 2018-08-10 | 上海交通大学 | marker detection device and detection method |
| CN108975920A (en) * | 2018-03-12 | 2018-12-11 | 中北大学 | A kind of high-temperature heat flux sensor and preparation method thereof based on HTCC |
| CN108975920B (en) * | 2018-03-12 | 2021-05-18 | 中北大学 | HTCC-based high-temperature heat flow sensor and preparation method thereof |
| WO2020057080A1 (en) * | 2018-09-18 | 2020-03-26 | 东南大学 | Multi-parameter lc sensor for monitoring state of rotating structure |
| CN110174181A (en) * | 2019-06-05 | 2019-08-27 | 中北大学 | A kind of rotary part temperature/hot-fluid dynamic testing method |
| CN110426064B (en) * | 2019-07-18 | 2021-07-20 | 东南大学 | Wireless passive sensor and wireless passive sensing method |
| CN110426064A (en) * | 2019-07-18 | 2019-11-08 | 东南大学 | Wireless sourceless sensor and wireless and passive method for sensing |
| CN110542455A (en) * | 2019-09-16 | 2019-12-06 | 中北大学 | HTCC composite microsensor for pressure/vibration synchronous measurement and preparation method thereof |
| CN110542455B (en) * | 2019-09-16 | 2021-11-05 | 中北大学 | HTCC composite microsensor for pressure/vibration synchronous measurement and preparation method thereof |
| CN111238544A (en) * | 2020-03-12 | 2020-06-05 | 江苏林洋能源股份有限公司 | Microwave sensor based on LC type resonator and applied to temperature/humidity environment detection |
| CN112378424A (en) * | 2020-11-13 | 2021-02-19 | 中北大学 | Wireless passive strain and temperature dual-parameter sensor and preparation method thereof |
| CN112378424B (en) * | 2020-11-13 | 2022-06-14 | 中北大学 | Wireless passive strain and temperature dual-parameter sensor and preparation method thereof |
| CN113092545A (en) * | 2021-04-13 | 2021-07-09 | 哈尔滨理工大学 | Based on CuO/In2O3Preparation method of modified graphene MEMS gas sensor |
| CN113418969A (en) * | 2021-06-07 | 2021-09-21 | 武汉大学 | High-sensitivity millimeter wave dielectric resonance sensor for biomedical detection |
| CN113418969B (en) * | 2021-06-07 | 2023-04-25 | 武汉大学 | High-sensitivity millimeter wave dielectric resonance sensor for biomedical detection |
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