CN107070295B - U-shaped precision linear piezoelectric actuator and its motivational techniques - Google Patents
U-shaped precision linear piezoelectric actuator and its motivational techniques Download PDFInfo
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- CN107070295B CN107070295B CN201710245066.0A CN201710245066A CN107070295B CN 107070295 B CN107070295 B CN 107070295B CN 201710245066 A CN201710245066 A CN 201710245066A CN 107070295 B CN107070295 B CN 107070295B
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- 238000006073 displacement reaction Methods 0.000 claims description 14
- 230000003068 static effect Effects 0.000 claims description 12
- 230000005284 excitation Effects 0.000 claims description 6
- 230000002463 transducing effect Effects 0.000 claims description 6
- 230000036316 preload Effects 0.000 claims description 4
- 230000003111 delayed effect Effects 0.000 claims description 2
- MROJXXOCABQVEF-UHFFFAOYSA-N Actarit Chemical compound CC(=O)NC1=CC=C(CC(O)=O)C=C1 MROJXXOCABQVEF-UHFFFAOYSA-N 0.000 claims 34
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Classifications
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/021—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/026—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors by pressing one or more vibrators against the driven body
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
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Abstract
U-shaped precision linear piezoelectric actuator and its motivational techniques, belongs to Precision Piezoelectric actuation techniques field, in order to meet big stroke, high speed, intense loading that the technical fields such as micro-electronic manufacturing, nanometer manufacture, aerospace propose precision actuation, the demand of high precision performance.Two horizontally disposed energy converters of the present invention are mutually parallel, and two energy converters arranged vertically are symmetrical, and the axis for the energy converter arranged vertically is orthogonal with the axial space of horizontally disposed energy converter；Energy converter includes shell, piezoelectric stack, pre-tightens block, positioning pin, end cap, output shaft, and this energy converter can effectively reduce the moment of flexure that load acts directly on piezoelectric stack, plays the role of increasing straight line mover power output.The present invention takes into account high positioning accuracy while capable of realizing a wide range of, high-speed motion；The advantages such as, stroke big, output speed and power output adjustable, High power output high with positioning accuracy.
Description
Technical field
The invention belongs to Precision Piezoelectric actuation techniques fields.
Background technology
Piezoelectric actuator be it is a kind of utilize inverse piezoelectric effect, convert the electric energy of input in the device of mechanical energy and output.
Piezoelectric actuator has the characteristics that fast response time, anti-electromagnetic interference capability are strong, cuts off self-lock, torque density is high, at present
It is widely applied to the fields such as precision instrument, high-end equipment manufacturing, aerospace.
Piezoelectric actuator common at present can be divided into resonant mode piezoelectric actuator and disresonance type pressure according to driving principle
Electric drive.When using elastomer composite oscillator resonance occurs for resonant mode piezoelectric actuator, generated at surface of elastomer driving foot
Elliptical orbit, pass through mover and driving foot between frictional force, drive mover movement.The piezoresistive material of resonant mode piezoelectric actuator
Material encourages state in high-frequency ac voltage, and the movement speed of driver is fast at this time, displacement resolving power is low.Disresonance type piezoelectricity drives
Dynamic device is driven using the flexible deformation that piezoelectric material generates at a dc voltage drives foot to generate driving track, passes through mover and drive
Frictional force between action spot drives mover movement.Disresonance type piezoelectric actuator has resolving power height, the stroke of output displacement
Small, the features such as speed is slow.With the rapid development in the fields such as micro-electronic manufacturing, nanometer manufacture, aerospace, to precision actuation
Output performance proposes more stringent requirement.
Invention content
The purpose of the invention is to meet the technical fields such as micro-electronic manufacturing, nanometer manufacture, aerospace to drive precision
The dynamic big stroke proposed, high speed, intense loading, the demand of high precision performance, it is proposed that a kind of U-shaped accurate linear piezoelectric actuator and its
Motivational techniques.
U-shaped accurate linear piezoelectric actuator of the present invention, including straight line mover and four energy converters；
Four energy converters are respectively：First transducer, second transducer, third energy converter and 4th transducer；
The first transducer is horizontally disposed with 4th transducer, also, the axis and 4th transducer of first transducer
Axis be mutually parallel；
The second transducer is symmetrical arranged with third energy converter, also, the axis of second transducer is changed with first simultaneously
The axis of energy device and the axial space of 4th transducer are orthogonal；
Four energy converters include shell, piezoelectric stack, pre-tighten block, positioning pin, end cap and output shaft；
The shell is provided with centre bore；
The piezoelectric stack is fixed in the centre bore of shell；
The end that the end cap passes through threaded engagement heart hole in the shell；
The head end of the output shaft is stretched into across end cap in the centre bore of shell, also, output shaft passes through screw thread with end cap
Connection；
The preload block is arranged in the end of piezoelectric stack, and the head end of output shaft, which compresses, pre-tightens block, realizes to piezoelectric stack
Apply pretightning force, also, pre-tighten and be provided with positioning pin between block and end cap, positioning pin pre-tightens block rotation for limiting；
The output shaft end of first transducer and the output shaft end of 4th transducer are in contact with straight line mover respectively；
The output shaft end of second transducer is fixedly connected with the shell of first transducer；The output shaft end of third energy converter
End is fixedly connected with the shell of 4th transducer；The shell of second transducer is fixedly connected with the shell of third energy converter.
The motivational techniques of U-shaped accurate linear piezoelectric actuator of the present invention, which is to be based on U-shaped precise direct
What line piezoelectric actuator was realized, which includes the step motion motivational techniques, U-shaped of U-shaped accurate linear piezoelectric actuator
The motion-activated method of the quick motion-activated method of accurate linear piezoelectric actuator and U-shaped accurate linear piezoelectric actuator；
The step motion motivational techniques of the U-shaped accurate linear piezoelectric actuator be driving straight line mover realize upwards and to
The step motion method of lower both direction；
The quick motion-activated method of the U-shaped accurate linear piezoelectric actuator be driving straight line mover realize upwards and to
The quick movement technique of lower both direction；
The motion-activated method of the U-shaped accurate linear piezoelectric actuator be according to the target output speed of straight line mover and
Target output displacement selects motivational techniques.
The beneficial effects of the invention are as follows in four energy converters, the centre bore of output shaft and end cap is connected through a screw thread, end
Lid is connected through a screw thread with shell, and this structure can be substantially reduced outer load while not reducing energy converter maximum output displacement
Lotus acts on the moment of flexure on piezoelectric stack, plays the role of protecting piezoelectric stack, to improve the output shaft and straight line of energy converter
The maximum positive voltage power that can be acted between mover, and then improve the power output of U-shaped accurate linear piezoelectric actuator.Two horizontal cloth
The energy converter set and the energy converter arranged vertically arrange that the driving voltage by controlling energy converter is believed by the way of orthogonal space
Number realize driving straight line mover movement.U-shaped accurate linear piezoelectric actuator proposed by the present invention can be according to target output speed
Motivational techniques are selected with target output displacement, so that driver is had, impulse stroke is big, output speed is high, nanoscale positioning, loads
The strong feature of ability.U-shaped accurate linear piezoelectric actuator disclosed by the invention is simple in structure to be easily assembled to, stroke is big, positioning accurate
The features such as degree height, High power output, output speed be high, power output and output speed can be adjusted independently manufacture in electronic manufacture, nanometer,
The technical fields such as aerospace have preferable application.
Description of the drawings
Fig. 1 is the dimensional structure diagram of the U-shaped accurate linear piezoelectric actuator described in specific implementation mode one；
Fig. 2 is the plan cross-section structural schematic diagram of the U-shaped accurate linear piezoelectric actuator described in specific implementation mode one,
In, 3-1 is spring washer, and 3-2 is nut；
Fig. 3 is the driving principle figure that three cathetus mover of specific implementation mode steps up movement；
Fig. 4 is the driving principle figure that three cathetus mover of specific implementation mode is stepped down by movement；
Fig. 5 is the driving principle figure that four cathetus mover of specific implementation mode quickly moves upwards；
Fig. 6 is the driving principle figure that four cathetus mover of specific implementation mode quickly moves downwards.
Specific implementation mode
Specific implementation mode one：Illustrate present embodiment in conjunction with Fig. 1 and Fig. 2, the U-shaped accurate straight line described in present embodiment
Piezoelectric actuator, including straight line mover 1 and four energy converters；
Four energy converters are respectively：First transducer 2-1, second transducer 2-2, third energy converter 2-3 and the 4th transducing
Device 2-4；
The first transducer 2-1 and 4th transducer 2-4 are horizontally disposed, also, the axis of first transducer 2-1 and the
The axis of four energy converter 2-4 is mutually parallel；
The second transducer 2-2 and third energy converter 2-3 is symmetrical arranged, also, the axis of second transducer 2-2 is simultaneously
It is orthogonal with the axial space of the axis of first transducer 2-1 and 4th transducer 2-4；
Four energy converters include shell 2-11, piezoelectric stack 2-12, pre-tighten block 2-13, positioning pin 2-14, end cap 2-15
With output shaft 2-16；
The shell 2-11 is provided with centre bore；It is equipped with positioning column 2- in the centre bore of the shell 2-11 of four energy converters
11-1；The section of positioning column 2-11-1 is round or for the closed curve with two sections of isocentric circular arcs；Piezoelectric stack 2-12 is embedding
It is sleeved on positioning column 2-11-1；
The piezoelectric stack 2-12 is fixed in the centre bore of shell 2-11；
The end cap 2-15 is by threaded engagement in the end of shell 2-11 centre bores；
One end that the output shaft 2-16 of first transducer 2-1 and 4th transducer 2-4 is contacted with straight line mover 1 is both provided with
It is cylindrical or hemispherical to drive foot 2-16-1, the driving foot 2-16-1；
The head end of the output shaft 2-16 is stretched into across end cap 2-15 in the centre bore of shell 2-11, also, output shaft 2-
16 are connected through a screw thread with end cap 2-15；
The preload block 2-13 is arranged in the end of piezoelectric stack 2-12, and the head end of output shaft 2-16, which compresses, pre-tightens block 2-
13, it realizes and pretightning force is applied to piezoelectric stack 2-12, also, positioning pin 2- is provided between preload block 2-13 and end cap 2-15
14, positioning pin 2-14 pre-tighten block 2-13 rotations for limiting；
The ends output shaft 2-16 of first transducer 2-1 and the ends output shaft 2-16 of 4th transducer 2-4 respectively with directly
Line mover 1 is in contact；
The ends output shaft 2-16 of second transducer 2-2 are fixedly connected with the shell 2-11 of first transducer 2-1；Third is changed
The ends output shaft 2-16 of energy device 2-3 are fixedly connected with the shell 2-11 of 4th transducer 2-4；The shell of second transducer 2-2
2-11 is fixedly connected with the shell 2-11 of third energy converter 2-3.
In the present embodiment, the section of positioning column 2-11-1 is circle, and driving foot 2-16-1 is cylinder；Second transducing
The ends output shaft 2-16 of device 2-2 are fixedly connected with mode with the shell 2-11 of first transducer 2-1：Pass through second transducer 2-
The screw thread and nut 3-2 of 2 ends output shaft 2-16 are spun together, and spring washer 3-1 therein plays a part of to loosen；Third
The ends output shaft 2-16 of energy converter 2-3 are fixedly connected with mode with the shell 2-11 of 4th transducer 2-4：Pass through third transducing
The screw thread and nut 3-2 of the ends output shaft 2-16 of device 2-3 are spun together, and spring washer 3-1 therein plays a part of to loosen.
Specific implementation mode two：The motivational techniques of U-shaped accurate linear piezoelectric actuator described in present embodiment, the excitation
Method is that the U-shaped accurate linear piezoelectric actuator described in specific implementation mode one realizes that the motivational techniques include U-shaped precise direct
The step motion motivational techniques of line piezoelectric actuator, the quick motion-activated method of U-shaped accurate linear piezoelectric actuator and U-shaped essence
The motion-activated method of close linear piezoelectric actuator；
The step motion motivational techniques of the U-shaped accurate linear piezoelectric actuator be driving straight line mover 1 realize upwards and
The step motion method of downward both direction；
The quick motion-activated method of the U-shaped accurate linear piezoelectric actuator be driving straight line mover 1 realize upwards and
The quick movement technique of downward both direction；
The motion-activated method of the U-shaped accurate linear piezoelectric actuator is the target output speed according to straight line mover 1
Motivational techniques are selected with target output displacement.
Specific implementation mode three：Illustrate that present embodiment, present embodiment are to specific implementation mode in conjunction with Fig. 3 and Fig. 4
The motivational techniques of U-shaped accurate linear piezoelectric actuator described in two further limit, and in the present embodiment, drive straight line mover
1 realizes that the step motion method of both direction up and down includes that straight line mover 1 realizes the motivational techniques for stepping up movement
The motivational techniques for being stepped down by movement are realized with straight line mover 1；
The straight line mover 1 realizes that the motivational techniques for stepping up movement include the following steps：
When step 1 one, original state, the ends output shaft 2-16 of first transducer 2-1 and under the action of pretightning force
The ends output shaft 2-16 of four energy converter 2-4 are in contact with straight line mover 1, and straight line mover 1 is static；
Apply positive voltage in step 1 two, first transducer 2-1, output shaft 2-16 extends and compresses straight line mover 1, together
When 4th transducer 2-4 apply negative voltage, output shaft 2-16, which retracts, simultaneously to be detached with straight line mover 1, and straight line mover 1 keeps quiet
Only；
Apply positive voltage, the output of second transducer 2-2 on step 1 three, second transducer 2-2 and third energy converter 2-3
Axis 2-16 drives first transducer 2-1 to move up, the output shaft 2-16 of third energy converter 2-3 drive 4th transducer 2-4 to
The output shaft 2-16 of lower movement, first transducer 2-1 drives straight line mover 1 to move upwards under the action of frictional force；
Apply positive voltage in step 1 four, 4th transducer 2-4, output shaft 2-16 compresses straight line mover 1, straight line mover
1 is static；
Apply negative voltage in step 1 five, first transducer 2-1, output shaft 2-16 is detached with straight line mover 1, and straight line is dynamic
Sub 1 remains stationary；
Apply negative voltage, the output of second transducer 2-2 on step 1 six, second transducer 2-2 and third energy converter 2-3
Axis 2-16 drives first transducer 2-1 to move down, the output shaft 2-16 of third energy converter 2-3 drive 4th transducer 2-4 to
The output shaft 2-16 of upper movement, 4th transducer 2-4 drives straight line mover 1 to move upwards under the action of frictional force；
Apply positive voltage in step 1 seven, first transducer 2-1, output shaft 2-16 compresses straight line mover 1, straight line mover
1 is static；
Apply negative voltage in step 1 eight, 4th transducer 2-4, output shaft 2-16 is detached with straight line mover 1, and straight line is dynamic
Sub 1 remains stationary；
Step 1 nine repeats the above steps one or three to step 1 eight, to realize that straight line mover 1 steps up movement；
The straight line mover 1 realizes that the motivational techniques for being stepped down by movement include the following steps：
When step 2 one, original state, the ends output shaft 2-16 of first transducer 2-1 and under the action of pretightning force
The ends output shaft 2-16 of four energy converter 2-4 are in contact with straight line mover 1, and straight line mover 1 is static；
Applying negative voltage in step 2 two, first transducer 2-1, output shaft 2-16 retracts and is detached with straight line mover 1,
4th transducer 2-4 applies positive voltage simultaneously, and output shaft 2-16 extends and compress straight line mover 1, and straight line mover 1 keeps quiet
Only；
Apply positive voltage, the output of second transducer 2-2 on step 2 three, second transducer 2-2 and third energy converter 2-3
Axis 2-16 drives first transducer 2-1 to move up, the output shaft 2-16 of third energy converter 2-3 drive 4th transducer 2-4 to
The output shaft 2-16 of lower movement, 4th transducer 2-4 drives straight line mover 1 to move downward under the action of frictional force；
Apply positive voltage in step 2 four, first transducer 2-1, output shaft 2-16 compresses straight line mover 1, straight line mover
1 is static；
Apply negative voltage in step 2 five, 4th transducer 2-4, output shaft 2-16 is detached with straight line mover 1, and straight line is dynamic
Sub 1 remains stationary；
Apply negative voltage, the output of second transducer 2-2 on step 2 six, second transducer 2-2 and third energy converter 2-3
Axis 2-16 drives first transducer 2-1 to move down, the output shaft 2-16 of third energy converter 2-3 drive 4th transducer 2-4 to
The output shaft 2-16 of upper movement, first transducer 2-1 drives straight line mover 1 to move downward under the action of frictional force；
Apply positive voltage in step 2 seven, 4th transducer 2-4, output shaft 2-16 compresses straight line mover 1, straight line mover
1 is static；
Apply negative voltage in step 2 eight, first transducer 2-1, output shaft 2-16 is detached with straight line mover 1, and straight line is dynamic
Sub 1 remains stationary；
Step 2 nine repeats the above steps two or three to step 2 eight, to realize that straight line mover 1 is stepped down by movement.
During four energy converters of above-mentioned excitation realize that straight line mover 1 moves up and down, it should be ensured that each
At least one in the output shaft 2-16 of a moment first transducer 2-1 and 4th transducer 2-2 connects with the holding of straight line mover 1
It touches, to ensure that straight line mover 1 is not moved by the interference of external force.Applied in above-mentioned 1 motion process of driving straight line mover
Driving voltage signal can be rectangular wave, triangular wave or trapezoidal wave.In 1 motion process of straight line mover, the mobile speed of straight line mover 1
Degree and maximum output power can individually adjust, the movement speed of cathetus mover 1 can by control second transducer 2-2 and
The amplitude for the driving voltage signal that third energy converter 2-3 is applied is adjusted；The maximum output power of straight line mover 1 can pass through
The amplitude that control first transducer 2-1 and the 4th changes the driving voltage signal that energy converter 2-4 is applied is adjusted.
Specific implementation mode four：Illustrate that present embodiment, present embodiment are to specific implementation mode in conjunction with Fig. 5 and Fig. 6
The motivational techniques of U-shaped accurate linear piezoelectric actuator described in two further limit, and in the present embodiment, drive straight line mover
1 realizes that the specific method of both direction up and down quickly moved is：
Apply the identical ac-excited voltage of frequency to four energy converters, extensional vibration is generated with four energy converters of excitation；
Ensure that the phase difference between first transducer 2-1 and the driving voltage of 4th transducer 2-4 is 180 degree, second transducer 2-2's
Driving voltage phase is identical with the driving voltage phase of third energy converter 2-3, and with the phase of the driving voltage of first transducer 2-1
Potential difference is 90 degree, at this point, U-shaped precision linear piezoelectric actuator is in resonance state, four extensional vibrations are mutually compounded in first and change
The ends output shaft 2-16 of energy device 2-1 and 4th transducer 2-4 generate the elliptical orbit for continuing and stablizing, in first transducer 2-
Between the output shaft 2-16 and straight line mover 1 of 1 output shaft 2-16 or 4th transducer 2-4 under the action of frictional force, straight line is dynamic
Son 1 realizes movement；When the phase of the applied driving voltages of second transducer 2-2 is super than the phase that first transducer 2-1 is applied
At first 90 degree, straight line mover 1 moves downward；When the phase of the applied driving voltages of second transducer 2-2 is than first transducer 2-1
When 90 degree of the delayed phase applied, straight line mover 1 moves upwards.
During above-mentioned excitation energy converter realizes that straight line mover 1 moves up and down, the wave of the ac voltage signal applied
Shape can be sine wave, square wave, triangular wave or trapezoidal wave.
Specific implementation mode five：Present embodiment is to the U-shaped accurate straight line Piezoelectric Driving described in specific implementation mode two
The motivational techniques of device further limit, in the present embodiment, according to the target output speed and target carry-out bit of straight line mover 1
Move select encourage specific method for：When exporting target velocity more than the step motion motivational techniques attainable maximum value of institute,
High speed, larger displacement output are realized using quick motion-activated method first, using step motion to encourage close to after displacement of targets
Method realizes final precision positioning；When target output speed is attainable most less than or equal to step motion motivational techniques institute
When big value, directly step motion motivational techniques are used until reaching target output displacement.
Claims (10)
1.U type precision linear piezoelectric actuators, which is characterized in that including straight line mover (1) and four energy converters；
Four energy converters are respectively：First transducer (2-1), second transducer (2-2), third energy converter (2-3) and the 4th change
It can device (2-4)；
The first transducer (2-1) and 4th transducer (2-4) are horizontally disposed, also, the axis of first transducer (2-1) with
The axis of 4th transducer (2-4) is mutually parallel；
The second transducer (2-2) is symmetrical arranged with third energy converter (2-3), also, the axis of second transducer (2-2) is same
When it is orthogonal with the axial space of the axis of first transducer (2-1) and 4th transducer (2-4)；
Four energy converters include shell (2-11), piezoelectric stack (2-12), pre-tighten block (2-13), positioning pin (2-14), end cap
(2-15) and output shaft (2-16)；
The shell (2-11) is provided with centre bore；
The piezoelectric stack (2-12) is fixed in the centre bore of shell (2-11)；
The end cap (2-15) is by threaded engagement in the end of shell (2-11) centre bore；
The head end of the output shaft (2-16) is stretched into across end cap (2-15) in the centre bore of shell (2-11), also, output shaft
(2-16) is connected through a screw thread with end cap (2-15)；
In the end of piezoelectric stack (2-12), the head end of output shaft (2-16), which compresses, pre-tightens block for preload block (2-13) setting
(2-13) is realized and is applied pretightning force to piezoelectric stack (2-12), also, pre-tighten and be provided between block (2-13) and end cap (2-15)
Positioning pin (2-14), positioning pin (2-14) pre-tighten block (2-13) rotation for limiting；
The output shaft end (2-16) of first transducer (2-1) and the end output shaft (2-16) difference of 4th transducer (2-4)
It is in contact with straight line mover (1)；
The output shaft end (2-16) of second transducer (2-2) is fixedly connected with the shell (2-11) of first transducer (2-1)；The
The output shaft end (2-16) of three energy converters (2-3) is fixedly connected with the shell (2-11) of 4th transducer (2-4)；Second transducing
The shell (2-11) of device (2-2) is fixedly connected with the shell (2-11) of third energy converter (2-3).
2. U-shaped accurate linear piezoelectric actuator according to claim 1, which is characterized in that the shell (2- of four energy converters
11) positioning column (2-11-1) is equipped in centre bore；The section of positioning column (2-11-1) is round or is same with two sections
The closed curve of heart circular arc；Piezoelectric stack (2-12) is nested on positioning column (2-11-1).
3. U-shaped accurate linear piezoelectric actuator according to claim 1, which is characterized in that first transducer (2-1) and the
One end that the output shaft (2-16) of four energy converters (2-4) is contacted with straight line mover (1) is both provided with driving foot (2-16-1), described
Driving foot (2-16-1) is cylindrical or hemispherical.
The motivational techniques of 4.U type precision linear piezoelectric actuators, which is characterized in that the motivational techniques are to be based on claim 1 institute
What the U-shaped accurate linear piezoelectric actuator stated was realized, which includes the step motion of U-shaped accurate linear piezoelectric actuator
The movement of motivational techniques, the quick motion-activated method and U-shaped accurate linear piezoelectric actuator of U-shaped accurate linear piezoelectric actuator
Motivational techniques；
The step motion motivational techniques of the U-shaped accurate linear piezoelectric actuator be driving straight line mover (1) realize upwards and to
The step motion method of lower both direction；
The quick motion-activated method of the U-shaped accurate linear piezoelectric actuator be driving straight line mover (1) realize upwards and to
The quick movement technique of lower both direction；
The motion-activated method of the U-shaped accurate linear piezoelectric actuator be according to the target output speed of straight line mover (1) and
Target output displacement selects motivational techniques.
5. the motivational techniques of U-shaped accurate linear piezoelectric actuator according to claim 4, which is characterized in that driving straight line
Mover (1) realizes that the motivational techniques of the step motion of both direction up and down include that straight line mover (1) realization steps up
The motivational techniques and straight line mover (1) of movement realize the motivational techniques for being stepped down by movement；
The straight line mover (1) realizes that the motivational techniques for stepping up movement include the following steps：
When step 1 one, original state, the output shaft end (2-16) of first transducer (2-1) and under the action of pretightning force
End output shaft (2-16) of four energy converters (2-4) is in contact with straight line mover (1), and straight line mover (1) is static；
Applying positive voltage in step 1 two, first transducer (2-1), output shaft (2-16) extends and compresses straight line mover (1),
4th transducer (2-4) applies negative voltage simultaneously, and output shaft (2-16) is retracted and detached with straight line mover (1), straight line mover
(1) remains stationary；
Apply positive voltage on step 1 three, second transducer (2-2) and third energy converter (2-3), second transducer (2-2) it is defeated
Shaft (2-16) drives first transducer (2-1) to move up, and the output shaft (2-16) of third energy converter (2-3) drives the 4th to change
Energy device (2-4) moves down, and the output shaft (2-16) of first transducer (2-1) drives straight line mover under the action of frictional force
(1) it moves upwards；
Apply positive voltage in step 1 four, 4th transducer (2-4), output shaft (2-16) compresses straight line mover (1), and straight line is dynamic
Sub (1) is static；
Apply negative voltage in step 1 five, first transducer (2-1), output shaft (2-16) is detached with straight line mover (1), straight line
Mover (1) remains stationary；
Apply negative voltage on step 1 six, second transducer (2-2) and third energy converter (2-3), second transducer (2-2) it is defeated
Shaft (2-16) drives first transducer (2-1) to move down, and the output shaft (2-16) of third energy converter (2-3) drives the 4th to change
Energy device (2-4) moves up, and the output shaft (2-16) of 4th transducer (2-4) drives straight line mover under the action of frictional force
(1) it moves upwards；
Apply positive voltage in step 1 seven, first transducer (2-1), output shaft (2-16) compresses straight line mover (1), and straight line is dynamic
Sub (1) is static；
Apply negative voltage in step 1 eight, 4th transducer (2-4), output shaft (2-16) is detached with straight line mover (1), straight line
Mover (1) remains stationary；
Step 1 nine repeats the above steps one or three to step 1 eight, to realize that straight line mover (1) steps up movement；
The straight line mover (1) realizes that the motivational techniques for being stepped down by movement include the following steps：
When step 2 one, original state, the output shaft end (2-16) of first transducer (2-1) and under the action of pretightning force
End output shaft (2-16) of four energy converters (2-4) is in contact with straight line mover (1), and straight line mover (1) is static；
Apply negative voltage in step 2 two, first transducer (2-1), output shaft (2-16) is retracted and divided with straight line mover (1)
From, while 4th transducer (2-4) applies positive voltage, output shaft (2-16) extends and compresses straight line mover (1), straight line mover
(1) remains stationary；
Apply positive voltage on step 2 three, second transducer (2-2) and third energy converter (2-3), second transducer (2-2) it is defeated
Shaft (2-16) drives first transducer (2-1) to move up, and the output shaft (2-16) of third energy converter (2-3) drives the 4th to change
Energy device (2-4) moves down, and the output shaft (2-16) of 4th transducer (2-4) drives straight line mover under the action of frictional force
(1) it moves downward；
Apply positive voltage in step 2 four, first transducer (2-1), output shaft (2-16) compresses straight line mover (1), and straight line is dynamic
Sub (1) is static；
Apply negative voltage in step 2 five, 4th transducer (2-4), output shaft (2-16) is detached with straight line mover (1), straight line
Mover (1) remains stationary；
Apply negative voltage on step 2 six, second transducer (2-2) and third energy converter (2-3), second transducer (2-2) it is defeated
Shaft (2-16) drives first transducer (2-1) to move down, and the output shaft (2-16) of third energy converter (2-3) drives the 4th to change
Energy device (2-4) moves up, and the output shaft (2-16) of first transducer (2-1) drives straight line mover under the action of frictional force
(1) it moves downward；
Apply positive voltage in step 2 seven, 4th transducer (2-4), output shaft (2-16) compresses straight line mover (1), and straight line is dynamic
Sub (1) is static；
Apply negative voltage in step 2 eight, first transducer (2-1), output shaft (2-16) is detached with straight line mover (1), straight line
Mover (1) remains stationary；
Step 2 nine repeats the above steps two or three to step 2 eight, to realize that straight line mover (1) is stepped down by movement.
6. the motivational techniques of U-shaped accurate linear piezoelectric actuator according to claim 5, which is characterized in that four transducings
The waveform of the driving voltage signal applied on device is triangular wave, rectangular wave or trapezoidal wave, and any time the during driving
At least one output in the output shaft (2-16) of one energy converter (2-1) and the output shaft (2-16) of 4th transducer (2-4)
Axis (2-16) is kept in contact with straight line mover (1).
7. the motivational techniques of U-shaped accurate linear piezoelectric actuator according to claim 5, which is characterized in that straight line mover
(1) power output and output speed can be adjusted independently, wherein by controlling first transducer (2-1) and 4th transducer (2-
4) amplitude of the driving voltage applied can adjust the maximum output power of straight line mover (1)；By adjusting second transducer
The amplitude for the driving voltage that (2-2) and third energy converter (2-3) are applied, can adjust the output speed of straight line mover (1).
8. the motivational techniques of U-shaped accurate linear piezoelectric actuator according to claim 4, which is characterized in that driving straight line
Mover (1) realizes that the specific method of both direction up and down quickly moved is：
Apply the identical ac-excited voltage of frequency to four energy converters, extensional vibration is generated with four energy converters of excitation；Ensure
Phase difference between first transducer (2-1) and the driving voltage of 4th transducer (2-4) is 180 degree, second transducer (2-2)
Driving voltage phase it is identical with the driving voltage phase of third energy converter (2-3), and with the excitation of first transducer (2-1) electricity
The phase difference of pressure is 90 degree, at this point, U-shaped precision linear piezoelectric actuator is in resonance state, four extensional vibrations are mutually compounded in
End output shaft (2-16) of first transducer (2-1) and 4th transducer (2-4) generates the elliptical orbit for continuing and stablizing,
Between the output shaft (2-16) of first transducer (2-1) or the output shaft (2-16) of 4th transducer (2-4) and straight line mover (1)
Under the action of frictional force, straight line mover (1) realizes movement；When the phase of second transducer (2-2) applied driving voltage is than
When the phase that one energy converter (2-1) is applied is 90 degree advanced, straight line mover (1) moves downward；When second transducer (2-2) is applied
When adding 90 degree of delayed phase that the phase of driving voltage applied than first transducer (2-1), straight line mover (1) moves upwards.
9. the motivational techniques of U-shaped accurate linear piezoelectric actuator according to claim 8, which is characterized in that four transducings
The waveform of the ac-excited voltage signal applied on device is sine wave, triangular wave, rectangular wave or trapezoidal wave.
10. the motivational techniques of U-shaped accurate linear piezoelectric actuator according to claim 4, which is characterized in that according to straight line
The target output speed and target output displacement of mover (1) select the specific method of motivational techniques for：When output target velocity is big
When step motion motivational techniques institute's attainable maximum value, high speed, big displacement are realized using quick motion-activated method first
Output, final precision positioning is being realized close to after displacement of targets using step motion motivational techniques；When target output speed is small
When step motion motivational techniques institute's attainable maximum value, directly step motion motivational techniques are used until reaching
Target output displacement.
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| CN101262185A (en) * | 2008-04-29 | 2008-09-10 | 哈尔滨工业大学 | Bending layer energy converter round disk stator and ultrasonic electromotor using this stator |
| US7923898B2 (en) * | 2007-11-08 | 2011-04-12 | Taiyo Yuden Co., Ltd. | Piezo drive system |
| CN105048863A (en) * | 2015-07-31 | 2015-11-11 | 南京航空航天大学 | Bending vibration mode-based linear ultrasonic motor and electric excitation method thereof |
| CN105450081A (en) * | 2016-01-26 | 2016-03-30 | 哈尔滨工业大学 | Stepping peristalsis type driving and exciting method based on multi-piezoelectric-vibrator bending movement |
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| US7923898B2 (en) * | 2007-11-08 | 2011-04-12 | Taiyo Yuden Co., Ltd. | Piezo drive system |
| CN101262185A (en) * | 2008-04-29 | 2008-09-10 | 哈尔滨工业大学 | Bending layer energy converter round disk stator and ultrasonic electromotor using this stator |
| CN105048863A (en) * | 2015-07-31 | 2015-11-11 | 南京航空航天大学 | Bending vibration mode-based linear ultrasonic motor and electric excitation method thereof |
| CN105450081A (en) * | 2016-01-26 | 2016-03-30 | 哈尔滨工业大学 | Stepping peristalsis type driving and exciting method based on multi-piezoelectric-vibrator bending movement |
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