CN107032298A - The method and device of circular nano particle micro-structural is prepared based on ultrahigh-order mode - Google Patents
The method and device of circular nano particle micro-structural is prepared based on ultrahigh-order mode Download PDFInfo
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- CN107032298A CN107032298A CN201710235478.6A CN201710235478A CN107032298A CN 107032298 A CN107032298 A CN 107032298A CN 201710235478 A CN201710235478 A CN 201710235478A CN 107032298 A CN107032298 A CN 107032298A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00206—Processes for functionalising a surface, e.g. provide the surface with specific mechanical, chemical or biological properties
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00349—Creating layers of material on a substrate
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C3/00—Assembling of devices or systems from individually processed components
- B81C3/001—Bonding of two components
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
Abstract
The present invention provides a kind of method that circular nano particle micro-structural is prepared based on ultrahigh-order mode, comprises the following steps：Step one, waveguiding structure sample is prepared；On step 2, the turntable that waveguiding structure sample prepared by step one is fixed on to the θ steering angle instruments of θ/2, excitation source is used as from laser, the calibration of light path waveguiding structure sample is carried out；Step 3, rotating table changes the incidence angle that laser beam is got on waveguiding structure sample, while recording intensity of reflected light, and draws intensity of reflected light incident angle curve map, Best Point is found out on the graph；Step 4, adjusts turntable, and the incidence angle for making laser beam is the incidence angle of Best Point, keeps other conditions constant, solvent is injected into waveguiding structure sample, treats that solvent volatilization completely can obtain the nano particle in circular distribution.The present invention also provides a kind of device that circular nano particle micro-structural is prepared based on ultrahigh-order mode in addition.
Description
Technical field
The present invention relates to a kind of method and device that circular nano particle micro-structural is prepared based on ultrahigh-order mode, belong to
Wave Guiding Optics and nanoscale micro Process field.
Background technology
Waveguide mould field may act on colloidal solid, be derived from the gradient force produced by mould field strength distribution.With it is widely studied
Optical tweezer effect it is different, optical tweezer effect mainly uses the laser field of convergence to capture and mobile single or many particles；And
What this project was proposed is the mould field that is excited with waveguiding structure to capture the particle in colloid in large quantities.If imagination success,
It will be that one kind is dirt cheap and effective new method, the regular distribution of metal nanoparticle in space can be obtained rapidly.This
The micro-structural of metal nanoparticle is planted, with its unique optical characteristics, has great application prospect in micro-nano photonics,
It such as may be used as the Plasmonics elements in integrated optical circuit, small optical grating construction and SERS substrate etc..
In the prior art, it is general that micro-structural is done using the method for build-up of particles, and build-up of particles just only has self assembly
And optical tweezer.The self assembly of noble metal nano particles can be divided into chemistry, biological and three kinds of assembling modes of physics.Chemical assembly is by solution
The influence of pH value, temperature, metal ion, polypeptide and salt.Optical tweezer effect mainly use the laser field of convergence capturing and
Mobile single or many particles, if being moved with optical tweezers, take, and can only assemble the particle of minority very much.
The content of the invention
The present invention is based on ultrahigh-order mode to solve drawbacks described above present in prior art and deficiency there is provided one kind
The method and device of circular nano particle micro-structural is prepared, the apparatus structure is simple, and cost is low, and this method is simple to operate, holds
Easily realize.
In order to solve the above technical problems, the present invention provides a kind of based on the micro- knot of the circular nano particle of ultrahigh-order mode preparation
The method of structure, it is characterised in that comprise the following steps：
Step one, waveguiding structure sample is prepared；First, triplex glass cutting is carried out, triplex glass is respectively upper strata glass, centre
Layer glass and lower floor's glass, wherein, intermediate layer glass centre position offers through hole, edge and is provided with the sample introduction connected with through hole
Hole, the glass of well cutting is bonded together using optical cement technology, and the cavity of through hole is referred to as miniflow body cavity, and upper strata glass is guided wave
Layer；Secondly, using magnetron sputtering method ducting layer upper surface sputter coating formation coupling layer, in lower floor, lower glass surface is splashed
Penetrate plated film formation substrate；
On step 2, the turntable that waveguiding structure sample prepared by step one is fixed on to the θ steering angle instruments of θ/2, made from laser
For excitation source, wavelength is visible ray and ultraviolet light, then carries out light path-waveguiding structure sample calibration, and the process of calibration is：Swash
It is calibration point when reflected light is overlapped with incident light, now turntable angle is referred to as zero on beam orthogonal incidence waveguiding structure sample
Point；
Step 3, rotating table changes the incidence angle that laser beam is got on waveguiding structure sample, while intensity of reflected light is recorded,
And intensity of reflected light-incident angle curve map is drawn, Best Point is found out on the graph；
Step 4, adjusts turntable, and the incidence angle for making laser beam is the incidence angle of Best Point, keeps other conditions constant, to waveguide
Solvent is injected in structure sample, treats that solvent volatilization completely can obtain the nano particle in circular distribution.
Further, the condition that Best Point is met is that intensity of reflected light is less than the 10% of incident intensity, and incident angle is 0-
15 degree, if there are several points to be satisfied by this condition, the minimum point of firing angle is selected into as Best Point.
Further, the coupling layer is silverskin, and the substrate is golden film or silverskin.
Further, the thickness of the coupling layer is 30-40nm.
Further, the thickness of the substrate is more than 100nm.
The present invention also provides a kind of device that circular nano particle micro-structural is prepared based on ultrahigh-order mode, including laser
The θ steering angle instruments of device, aperture, polarizer, θ/2, waveguiding structure, photodiode and under be loaded with processing reflected light APP calculating
Machine；The waveguiding structure sample is fixed on the turntable on the θ steering angle instruments of θ/2, Laser emission mouthful and polarizer, the aperture of laser
In the same horizontal line, the aperture is two, is respectively placed in the both sides of polarizer for the hole of diaphragm, waveguiding structure sample,
The reflected light reflected on waveguiding structure is sent to computer by photodiode；The laser is that 785nm is partly led
Body laser, luminous power is 100mW；
The waveguiding structure includes coupling layer, ducting layer, substrate and miniflow body cavity, and the coupling layer is the side using magnetron sputtering
Method sputters at the film of the ducting layer upper surface, and the ducting layer is upper strata glass, upper strata glass and middle level glass, lower floor's glass
It is bonded together using optical cement technology, wherein, middle level glass middle position is provided with what is connected with through hole provided with through hole, edge
Cavity where sample holes, through hole is miniflow body cavity, and the lower surface of lower floor's glass sputters one by the method for magnetron sputtering
Tunic formation substrate.
Further, the coupling layer is silverskin, and the substrate is golden film or silverskin.
Further, the thickness of the coupling layer is 30-40nm.
Further, the thickness of the substrate is more than 100nm.
The advantageous effects that the present invention is reached：What the present invention was provided prepares circular nanometer based on ultrahigh-order mode
Grain micro-structural method, using metal film natural irregularity degree promote pattern mode-coupling resonat with being coupled in mould, by Ultra-High Order
Exciting for guided mode realizes the extensive capture to the nano particle in liquid, and is assembled into special micro- knot of concentric ring-shaped
Structure.
Brief description of the drawings
The waveguiding structure schematic diagram of Fig. 1 present invention；
The structural representation of the device that circular nano particle micro-structural is prepared based on ultrahigh-order mode of Fig. 2 present invention；
Annular arrangement of the gold goal nano particle under ultrahigh-order mode excited state in Fig. 3 embodiments of the present invention；
Gold goal nano particle is without the arrangement under ultrahigh-order mode excited state in Fig. 4 embodiments of the present invention.
Embodiment
With reference to specific embodiment, the invention will be further described.Following examples are only used for clearly illustrating
Technical scheme, and can not be limited the scope of the invention with this.
Patent of the present invention is further illustrated with reference to the accompanying drawings and examples.
The present invention provides a kind of method that circular nano particle micro-structural is prepared based on ultrahigh-order mode, including following step
Suddenly：
Step one, waveguiding structure sample is prepared；First, triplex glass cutting is carried out, triplex glass is respectively upper strata glass, centre
Layer glass and lower floor's glass, wherein, intermediate layer glass centre position offers through hole, edge and is provided with the sample introduction connected with through hole
Hole, the glass of well cutting is bonded together using optical cement technology, and the cavity of through hole is referred to as miniflow body cavity, and upper strata glass is guided wave
Layer；Secondly, using magnetron sputtering method ducting layer upper surface sputter coating formation coupling layer, in lower floor, lower glass surface is splashed
Penetrate plated film formation substrate；
The coupling layer is the silverskin that thickness is 30-40nm, and the substrate is the golden film or silverskin that thickness is more than 100nm.
On step 2, the turntable that waveguiding structure sample prepared by step one is fixed on to the θ steering angle instruments of θ/2, from laser
Device is as excitation source, and wavelength is visible ray and ultraviolet light, then carries out light path-calibration of waveguiding structure sample, the process of calibration
For：It is calibration point when reflected light is overlapped with incident light on laser beam vertical incidence waveguiding structure sample, now turntable angle
Referred to as zero point；
Step 3, rotating table changes the incidence angle that laser beam is got on waveguiding structure sample, while intensity of reflected light is recorded,
And intensity of reflected light-incident angle curve map is drawn, Best Point is found out on the graph；The condition that Best Point is met is to reflect
Luminous intensity is less than the 10% of incident intensity, and incident angle is 0-15 degree, if there is several points to be satisfied by this condition, is selected into and penetrates
The minimum point in angle is used as Best Point.
Step 4, adjusts turntable, and the incidence angle for making laser beam is the incidence angle of Best Point, keeps other conditions constant, to
Solvent is injected in waveguiding structure sample, treats that solvent volatilization completely can obtain the nano particle in circular distribution.
The present invention also provides a kind of device that circular nano particle micro-structural is prepared based on ultrahigh-order mode, including laser
Device 001b, aperture 002b, the θ steering angle instruments 005b of polarizer 003b, θ/2, waveguiding structure 006b, photodiode 007b and under
It is loaded with processing reflected light APP computer 008b；The waveguiding structure 006b samples are fixed on turning on the θ steering angle instruments 005b of θ/2
On platform, laser 001b Laser emission mouthful is with polarizer 003b, aperture 002b hole, waveguiding structure 006b samples same
On one horizontal line, the aperture 002b is two, is respectively placed in polarizer 003b both sides, anti-on waveguiding structure 006b
The reflected light shot out is sent to computer 008b by photodiode；The laser 001b is 785nm semiconductor lasers
Device, luminous power is 100mW；
The waveguiding structure includes coupling layer 1, ducting layer 4, substrate 3 and miniflow body cavity 2, and the coupling layer 1 is to be splashed using magnetic control
The method penetrated sputters at the film of the upper surface of ducting layer 4, and the ducting layer 4 is upper strata glass, upper strata glass 4 and middle level glass
5th, lower floor's glass 6 is bonded together using optical cement technology, wherein, the middle position of middle level glass 5 is provided with provided with through hole, edge
The sample holes 7 connected with through hole, the cavity where through hole is miniflow body cavity 2, and the lower surface of lower floor's glass 6 is splashed by magnetic control
The method penetrated sputters tunic formation substrate 3.
The coupling layer 1 is the silverskin that thickness is 30-40nm, and substrate 3 is the golden film or silverskin that thickness is more than 100nm.
The present invention excites the mechanism for preparing annular nano particle to be using ultrahigh-order mode：Waveguide allows by free sky
Between the mode that couples directly incident light is coupled into ducting layer and ultrahigh-order mode is excited；Superelevation is also illustrate that from another point of view
Rank guided mode has the characteristic of tunnelling ray.When the intrinsic loss of waveguide is identical with leakage loss, the energy and reflected energy of leakage
Can perfect coherent subtraction, therefore energy can coupled into waveguide completely.
Ultrahigh-order mode is the oscillation mode of standing wave type, and pattern density is very big, and the difference very little between neighboring modes causes difference
The energy of pattern can intercouple.The mechanism of coupling is the scattering produced by the natural irregularity degree using ultrathin metallic film.
The wave vector coupling for only changing transmission direction is referred to as coupling in mould by we, and the coupling of change wave vector size is called mode-coupling resonat.
Ultrahigh-order mode is excited for the low-angle of 0-15 degree in incidence angle, using produced by the natural nonparallelism of metal film
Mode-coupling resonat and mould in couple, the optical field distribution formed be circular, different pattern due to its transmission range not
Together, centered on incidence point, its energy highest point is located on the annulus of distance center different radii, therefore the not same order excited
The final optical field distribution of ultrahigh-order mode be one group of donut.
Using wave guide mode field action on the nano metal particles in microfluid, the mutual of light field and gold nano grain is utilized
Effect, spatially realize the capture to a large amount of golden nanometer particles so that in colloid the concentration distribution of golden nanometer particle with
The intensity distribution of ultrahigh-order mode mould field is consistent.
The gold nano grain being captured is assembled on the premise of waveguide energy coupling is ensured using solvent evaporation construction from part, is treated
After solvent natural evaporation is completed, the golden nanometer particle being captured is finally assembling to the intensity distribution shape of ultrahigh-order mode mould field
Shape, this is entirely different with the situation without ultrahigh-order mode.There is no the effect of waveguide mould field, nano particle will be assembled into miscellaneous
The random pattern without chapter.
Embodiment
The technique effect that annular nano particle is prepared using the above method is illustrated with specific embodiment below, is prepared
Each parameter setting of process：Laser beam wavelength 785nm, luminous power is 100mw；The colloidal solution that is excited is that gold goal nano particle is molten
Liquid, gold goal nanoparticles solution is obtained by trisodium citrate reduction HAuCl4, under a length of 785nm laser irradiation of incident light wave
Tested.
Excite after end, the arrangement of gold goal nano particle is observed under SEM (SEM), as shown in figure 3, can
Clearly to observe, gold goal nano particle is arranged in annular.
In order to be contrasted with above-described embodiment, keep parameters constant, simply no laser beam irradiation, obtained gold
The arrangement of ball nano particle, as shown in figure 4, it can be seen that no laser beam excites waveguiding structure formation Ultra-High Order to lead
During mould, the arrangement of gold goal nano particle is rambling.It therefore, it can explanation, in the presence of ultrahigh-order mode, gold goal is received
Rice grain can form annular micro-structural.
The present invention is disclosed with preferred embodiment above, so it is not intended to limiting the invention, all to take equivalent substitution
Or the technical scheme that the scheme of equivalent transformation is obtained, all fall within protection scope of the present invention.
Claims (9)
1. a kind of method that circular nano particle micro-structural is prepared based on ultrahigh-order mode, it is characterised in that including following step
Suddenly：
Step one, waveguiding structure sample is prepared；First, triplex glass cutting is carried out, triplex glass is respectively upper strata glass, centre
Layer glass and lower floor's glass, wherein, intermediate layer glass centre position offers through hole, edge and is provided with the sample introduction connected with through hole
Hole, the glass of well cutting is bonded together using optical cement technology, and the cavity of through hole is referred to as miniflow body cavity, and upper strata glass is guided wave
Layer；Secondly, using magnetron sputtering method ducting layer upper surface sputter coating formation coupling layer, in lower floor, lower glass surface is splashed
Penetrate plated film formation substrate；
On step 2, the turntable that waveguiding structure sample prepared by step one is fixed on to the θ steering angle instruments of θ/2, made from laser
For excitation source, wavelength is visible ray and ultraviolet light, then carries out light path-waveguiding structure sample calibration, and the process of calibration is：Swash
It is calibration point when reflected light is overlapped with incident light, now turntable angle is referred to as zero on beam orthogonal incidence waveguiding structure sample
Point；
Step 3, rotating table changes the incidence angle that laser beam is got on waveguiding structure sample, while intensity of reflected light is recorded,
And intensity of reflected light-incident angle curve map is drawn, Best Point is found out on the graph；
Step 4, adjusts turntable, and the incidence angle for making laser beam is the incidence angle of Best Point, keeps other conditions constant, to waveguide
Solvent is injected in structure sample, treats that solvent volatilization completely can obtain the nano particle in circular distribution.
2. the method according to claim 1 that circular nano particle micro-structural is prepared based on ultrahigh-order mode, its feature
It is：The condition that Best Point is met is that intensity of reflected light is less than the 10% of incident intensity, and incident angle is 0-15 degree, if having
Several points are satisfied by this condition, then are selected into the minimum point of firing angle as Best Point.
3. the method according to claim 1 that circular nano particle micro-structural is prepared based on ultrahigh-order mode, its feature
It is：The coupling layer is silverskin, and the substrate is golden film or silverskin.
4. the method according to claim 1 that circular nano particle micro-structural is prepared based on ultrahigh-order mode, its feature
It is：The thickness of the coupling layer is 30-40nm.
5. the method according to claim 1 that circular nano particle micro-structural is prepared based on ultrahigh-order mode, its feature
It is：The thickness of the substrate is more than 100nm.
6. a kind of device that circular nano particle micro-structural is prepared based on ultrahigh-order mode, it is characterised in that：Including laser,
The θ steering angle instruments of aperture, polarizer, θ/2, waveguiding structure, photodiode and under be loaded with processing reflected light APP computer；
The waveguiding structure sample is fixed on the turntable on the θ steering angle instruments of θ/2, Laser emission mouthful and polarizer, the aperture light of laser
Door screen hole, waveguiding structure sample in the same horizontal line, the aperture be two, be respectively placed in the both sides of polarizer, by
The reflected light reflected on waveguiding structure is sent to computer by photodiode；The laser is 785nm semiconductors
Laser, luminous power is 100mW；
The waveguiding structure includes coupling layer, ducting layer, substrate and miniflow body cavity, and the coupling layer is the side using magnetron sputtering
Method sputters at the film of the ducting layer upper surface, and the ducting layer is upper strata glass, upper strata glass and middle level glass, lower floor's glass
It is bonded together using optical cement technology, wherein, middle level glass middle position is provided with what is connected with through hole provided with through hole, edge
Cavity where sample holes, through hole is miniflow body cavity, and the lower surface of lower floor's glass sputters one by the method for magnetron sputtering
Tunic formation substrate.
7. the device according to claim 6 that circular nano particle micro-structural is prepared based on ultrahigh-order mode, its feature
It is：The coupling layer is silverskin, and the substrate is golden film or silverskin.
8. the device according to claim 6 that circular nano particle micro-structural is prepared based on ultrahigh-order mode, its feature
It is：The thickness of the coupling layer is 30-40nm.
9. the device according to claim 6 that circular nano particle micro-structural is prepared based on ultrahigh-order mode, its feature
It is：The thickness of the substrate is more than 100nm.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110737046A (en) * | 2019-11-21 | 2020-01-31 | 南通大学 | light trap for manipulating silica microspheres |
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| CN103885003A (en) * | 2014-03-20 | 2014-06-25 | 河海大学常州校区 | Tiny magnetic field sensor based on metal-clad magnetic fluid waveguide, and measuring system |
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| CN106018273A (en) * | 2016-05-13 | 2016-10-12 | 河海大学常州校区 | Light beam transverse micro-displacement generation system based on spin Hall effect of light and MIM structure |
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Patent Citations (6)
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| JPH03174306A (en) * | 1989-11-30 | 1991-07-29 | Chiyoudendou Hatsuden Kanren Kiki Zairyo Gijutsu Kenkyu Kumiai | Production of oxide superconductor |
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