CN106996937B - 一种玻璃基板内缺陷检测方法及装置 - Google Patents
一种玻璃基板内缺陷检测方法及装置 Download PDFInfo
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- CN106996937B CN106996937B CN201710453855.3A CN201710453855A CN106996937B CN 106996937 B CN106996937 B CN 106996937B CN 201710453855 A CN201710453855 A CN 201710453855A CN 106996937 B CN106996937 B CN 106996937B
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- 239000000758 substrate Substances 0.000 title claims abstract description 233
- 239000011521 glass Substances 0.000 title claims abstract description 219
- 230000007547 defect Effects 0.000 title claims abstract description 103
- 238000000034 method Methods 0.000 title claims abstract description 43
- 238000007689 inspection Methods 0.000 title claims abstract description 30
- 230000000007 visual effect Effects 0.000 claims abstract description 59
- 230000002950 deficient Effects 0.000 claims abstract description 11
- 230000003287 optical effect Effects 0.000 claims description 11
- 230000003068 static effect Effects 0.000 claims description 3
- 239000000571 coke Substances 0.000 claims 1
- 238000001514 detection method Methods 0.000 description 10
- 238000012360 testing method Methods 0.000 description 9
- 238000010586 diagram Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000011084 recovery Methods 0.000 description 2
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 230000004438 eyesight Effects 0.000 description 1
- 239000005357 flat glass Substances 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
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- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
Description
是否观测到缺陷 | 与缺陷距离近的基板板面 | |
测试实施例1 | 是 | 上板面 |
测试实施例2 | 是 | 上板面 |
Claims (7)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201710453855.3A CN106996937B (zh) | 2017-06-15 | 2017-06-15 | 一种玻璃基板内缺陷检测方法及装置 |
Applications Claiming Priority (1)
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CN201710453855.3A CN106996937B (zh) | 2017-06-15 | 2017-06-15 | 一种玻璃基板内缺陷检测方法及装置 |
Publications (2)
Publication Number | Publication Date |
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CN106996937A CN106996937A (zh) | 2017-08-01 |
CN106996937B true CN106996937B (zh) | 2019-09-06 |
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CN201710453855.3A Active CN106996937B (zh) | 2017-06-15 | 2017-06-15 | 一种玻璃基板内缺陷检测方法及装置 |
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CN (1) | CN106996937B (zh) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108061736B (zh) * | 2017-11-14 | 2020-11-13 | 东旭光电科技股份有限公司 | 使用反射电子探针对玻璃缺陷进行分析的方法 |
CN108982547B (zh) * | 2018-05-02 | 2020-12-29 | 芜湖立普德机械科技有限公司 | 一种用于检测玻璃基板凹陷的装置 |
CN113706468A (zh) * | 2021-07-27 | 2021-11-26 | 河北光兴半导体技术有限公司 | 基于bp神经网络的玻璃缺陷检测方法 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100535569B1 (ko) * | 2003-05-31 | 2005-12-08 | 삼성코닝정밀유리 주식회사 | 유리 기판에 존재하는 결함의 깊이방향 위치 검출방법 |
WO2012077542A1 (ja) * | 2010-12-09 | 2012-06-14 | 旭硝子株式会社 | ガラス基板 |
CN104081192B (zh) * | 2011-04-21 | 2017-02-22 | 艾悌亚信息技术(上海)有限公司 | 一种对玻璃多层面摄像的摄像装置及其方法 |
CN104634789A (zh) * | 2014-04-24 | 2015-05-20 | 东旭集团有限公司 | 一种对超薄玻璃基板的上表面进行异物检查的***及方法 |
CN105938107B (zh) * | 2016-06-27 | 2019-06-04 | 昆山国显光电有限公司 | 一种自动光学检测聚焦定位方法 |
CN106525869B (zh) * | 2016-11-09 | 2024-03-22 | 芜湖东旭光电科技有限公司 | 玻璃边部缺陷检测方法及其装置和*** |
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- 2017-06-15 CN CN201710453855.3A patent/CN106996937B/zh active Active
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Effective date of registration: 20190806 Address after: 350000 Fujian Province Fuzhou Bonded Port Area Processing Trade Zone Supervision Building 109 Room 072 Section (No. 9 Xinjiang Road, Xincuo Town, Fuqing City) (Free Trade Test Zone) Applicant after: FUZHOU DONGXU OPTOELECTRONICS TECHNOLOGY CO.,LTD. Applicant after: TUNGHSU GROUP Co.,Ltd. Address before: 350000 Fujian Province Fuzhou Bonded Port Area Processing Trade Zone Supervision Building 109 Room 072 Section (No. 9 Xinjiang Road, Xincuo Town, Fuqing City) (Free Trade Test Zone) Applicant before: FUZHOU DONGXU OPTOELECTRONICS TECHNOLOGY CO.,LTD. |
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Effective date of registration: 20230508 Address after: Room 109, Room 072, Supervision Building, Processing Trade Zone, Fuzhou Free Trade Port Zone, Fujian Province, 350311 (No. 9 Xinjiang Road, Xincuo Town, Fuqing City) (within the Pilot Free Trade Zone) Patentee after: FUZHOU DONGXU OPTOELECTRONICS TECHNOLOGY CO.,LTD. Patentee after: Beijing Yuanda Xinda Technology Co.,Ltd. Address before: 350000 section 072, room 109, supervision building, processing trade zone, Fuzhou free trade port, Fujian Province (No. 9, Xinjiang road, Xincuo Town, Fuqing City) (in the pilot Free Trade Zone) Patentee before: FUZHOU DONGXU OPTOELECTRONICS TECHNOLOGY CO.,LTD. Patentee before: TUNGHSU GROUP Co.,Ltd. |