CN106960690B - Cylindricity instrument horizontal guide rail driving device based on the clamping of circular arc hinge with multiple degrees of freedom decoupling - Google Patents
Cylindricity instrument horizontal guide rail driving device based on the clamping of circular arc hinge with multiple degrees of freedom decoupling Download PDFInfo
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- CN106960690B CN106960690B CN201610643765.6A CN201610643765A CN106960690B CN 106960690 B CN106960690 B CN 106960690B CN 201610643765 A CN201610643765 A CN 201610643765A CN 106960690 B CN106960690 B CN 106960690B
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- hinge
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- G—PHYSICS
- G12—INSTRUMENT DETAILS
- G12B—CONSTRUCTIONAL DETAILS OF INSTRUMENTS, OR COMPARABLE DETAILS OF OTHER APPARATUS, NOT OTHERWISE PROVIDED FOR
- G12B5/00—Adjusting position or attitude, e.g. level, of instruments or other apparatus, or of parts thereof; Compensating for the effects of tilting or acceleration, e.g. for optical apparatus
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Abstract
Belong to accurate measurement and Instrument technology field based on the clamping of circular arc hinge and the cylindricity instrument horizontal guide rail driving device of multiple degrees of freedom decoupling；The device includes hold assembly, inclination angle regulating member and corner regulating member, and hold assembly clamps accurate air-float guide rail in four sides circulating type, and corner regulating member is mounted in the groove of driving part；Hold assembly includes rectangular frame, supporting direction hinge, guide direction hinge, arc groove, antifriction piece, holding screw, supporting direction adjusts jackscrew and guide direction adjusts jackscrew；Inclination angle regulating member includes U-shaped framework, adjusts hinge, retainer, limited post and sliding block；Corner regulating member includes rotating shaft, upper shell, switching boss, lower casing, lower retainer, holder, cartridge type frame, cartridge type retainer, adjustment cushion block and bottom head covers；The present invention solves interference and coupled problem in accurate air-float guide rail driving, can establish a kind of cylindricity instrument horizontal guide rail precise driving device.
Description
Technical field
It is the invention belongs to accurate measurement and Instrument technology field, in particular to a kind of based on the clamping of circular arc hinge and mostly free
Spend the cylindricity instrument horizontal guide rail driving device of decoupling.
Background technique
In accurate measurement and Instrument technology field, linear datum is precision/ultra precise measurement instrument, rig for testing and manufacture
One of core technology in equipment.The factor for influencing guide rail precision of rectilinear motion mainly has the dry of rigging error and driving mechanism
It disturbs, this just proposes stern challenge to the assembly of guide rail, and also to the transfer mode of driving force, more stringent requirements are proposed.
Tsinghua University proposes two-freedom mobile decoupling flexure hinge mechanism (patent publication No.: CN104895913A),
The device includes flexible hinge branch and rigid connector, and rigid connector includes the end positioned at flexible hinge matrix middle section
It holds rigid output stage and is located at the upper end, lower end, left end, right end rigidity of flexible hinge matrix upper and lower, left and right part
Platform；Terminal may be implemented respectively to the solution between movement and power by the two-freedom mobile decoupling flexure hinge mechanism of the invention
Coupling, so that the kinematic accuracy of two-freedom mobile decoupling flexure hinge mechanism is helped to improve, but the invention can only solve two
Mobile decoupling problem in dimensional plane, uses with certain limitation.
Zhejiang Polytechnical University proposes a kind of full decoupling dynamic balancer (patent publication No.: CN103116362A), should
Device includes pedestal and workbench, and first straight line guide rail is installed in workbench bottom surface, and second straight line guide rail is installed in the top surface of moving platform,
The top surface of cross axle sliding block is slidably mounted on first straight line guide rail, and the bottom surface of cross axle sliding block is slidably mounted in
In two linear guides；The dynamic decoupling that 4 freedom degrees may be implemented by the full decoupling dynamic balancer of the invention, facilitates
Improve the kinematic accuracy in mutually orthogonal both direction.But the invention passes through cross axle sliding block as attachment device, uses
Installation error can be attached in the kinematic accuracy of guide rail when this kind of attachment device, and the kinematic accuracy of cross axle sliding block is lower than leading
The kinematic accuracy of rail and do not have regulatory function.
University Of Tianjin propose a kind of dual spring pre-tighten flexible decoupling linear motor locating platform (patent publication No.:
CN103522079A), which includes pedestal and workbench, and workbench is equipped with X to driving mechanism and Y-direction driving mechanism, X
Be each attached on pedestal to the linear motor stator electric of driving mechanism and the Y-direction driving mechanism, Y-direction locating platform be equipped with X to
Workbench guide rail, X are equipped with the workbench being slidably connected with it to workbench guide rail, and workbench passes through double bullets
Spring pre-tightens flexible decoupling mechanism and X is connected to locating platform.The invention uses linear motor direct drive moving component, by setting
It counts dual spring and pre-tightens the mobile decoupling that flexible decoupling mechanism realizes locating platform, grating sensor with high precision is anti-as end
Element is presented to guarantee the high speed and high-precision of system motion.But the invention passes through spring pre-tightening flexibility decoupling mechanism, although disappearing
X in addition to installation error, but after spring pre-tightening can not filter out X to driving mechanism to workbench guide rail adaptivity useless
Bounce interference.
Above-mentioned decoupling device platform can solve the decoupling problem in the direction of motion, but above-mentioned existing skill to a certain extent
Common problem existing for art is that the decoupling in the direction of motion is not complete enough.Only combine installation error and driving error etc. pair
The influence of guide rail linearity just can solve multiple degrees of freedom decoupling problem under stable state and dynamical state.To solve the above problems, this hair
It is bright to propose a kind of cylindricity instrument horizontal guide rail driving device based on the clamping of circular arc hinge with multiple degrees of freedom decoupling.
Summary of the invention
The purpose of the present invention is to above-mentioned prior art there are the problem of, propose it is a kind of based on the clamping of circular arc hinge with
The cylindricity instrument horizontal guide rail driving device of multiple degrees of freedom decoupling combines installation error, the linear motion of driving mechanism misses
Difference, driving force transmitting bring bounce three aspects of interference solve stable state and dynamical state to guide rail linearity influence factor
Lower multiple degrees of freedom decoupling problem can be realized the high kinematic accuracy of linear guide.Above-mentioned purpose is real by technical solution below
It is existing:
A kind of cylindricity instrument horizontal guide rail driving device based on the clamping of circular arc hinge with multiple degrees of freedom decoupling, including clamping
Component, inclination angle regulating member and corner regulating member, hold assembly clamp accurate air-float guide rail, corner tune in four sides circulating type
In the groove for the driving part that section component is mounted on lower section.
Hold assembly includes rectangular frame, supporting direction hinge, guide direction hinge, arc groove, antifriction piece, clamp screw
Nail, supporting direction adjust jackscrew, guide direction adjusts jackscrew；Arc groove is machined on the inside of rectangular frame, holding screw is to solid
Determine rectangular frame, antifriction piece is attached on 4 inner walls of rectangular frame, and supporting direction adjusts jackscrew and acts on supporting direction hinge
On, guide direction adjusts jackscrew and acts on guide direction hinge；Accurate air-float guide rail is mounted in rectangular frame, and accurate gas
4 working faces of floating guide rail are contacted with antifriction piece.
Inclination angle regulating member includes U-shaped framework, adjusts hinge, retainer, limited post, sliding block, steel ball A；In U-shaped framework
Limited post is installed, is rolling friction between U-shaped framework and sliding block to limit the sliding of sliding block；Two are machined on retainer
Cylindrical hole is arranged, through-hole embeds steel ball A；The upper end of regulating member at inclination angle, U-shaped framework and rectangular frame pass through screw thread knot
Structure connection.
Corner regulating member includes rotating shaft, upper shell, switching boss, lower casing, lower retainer, holder, cartridge type
Frame, cartridge type retainer, steel ball B, adjustment cushion block, bottom head covers；Switching boss, switching boss and drive are machined on cartridge type frame
Dynamic component is threadedly coupled；The outer concentric of cartridge type frame is equipped with shell and lower casing；The inside of cartridge type frame, from top to bottom
Holder, cartridge type retainer and lower retainer are successively installed with one heart；On holder, lower retainer and cartridge type retainer
It is machined with circumferential equally distributed cylindrical hole, through-hole embeds steel ball B；In holder, cartridge type retainer and lower retainer
Side is equipped with rotating shaft with one heart, is rolling friction between rotating shaft and cartridge type frame；It is equipped between rotating shaft and bottom head covers
Adjust cushion block；In the upper end of corner regulating member, rotating shaft is connect with sliding block by helicitic texture.
Apparatus of the present invention have following distinguishing feature:
1, it is rolling friction in the rotating shaft in apparatus of the present invention in corner regulating member and cartridge type frame circumferential direction, realizes rolling
The structure of dynamic friction is made of cartridge type retainer and steel ball B, can eliminate the Y-direction disturbance in tractive force transmittance process.
2, it is rolling friction between the sliding block and U-shaped framework of inclination angle regulating member in apparatus of the present invention, realizes rolling friction
Structure be made of retainer and steel ball A, can eliminate in tractive force transmittance process Z-direction disturbance.
3, in apparatus of the present invention in hold assembly, adjusting supporting direction adjusting jackscrew acts on pre- on supporting direction hinge
The XZ planar inclination of air-float guide rail is adjusted in clamp force；Adjusting guide direction adjusting jackscrew acts on pre- on guide direction hinge
Clamp force is adjusted the X/Y plane inclination angle of air-float guide rail, can make the X of air-float guide rail and driving part to motion profile line in three-dimensional
It is parallel in space.
4, driving part for accurate air-float guide rail provides tractive force in apparatus of the present invention；Driving part and accurate air-float guide rail
Between corner regulating member, inclination angle regulating member and the hold assembly installed can eliminate installation error, driving mechanism it is straight
The influence of line kinematic error, driving force transmitting bring bounce interference to guide rail linearity, solves under stable state and dynamical state
Multiple degrees of freedom decoupling problem can be realized the high kinematic accuracy of linear guide.
Apparatus of the present invention are widely used, are particularly suitable in precision/ultra precise measurement instrument, rig for testing and manufacturing equipment
The foundation of horizontal linear benchmark.
Detailed description of the invention
Fig. 1 is a kind of knot based on the clamping of circular arc hinge with the cylindricity instrument horizontal guide rail driving device of multiple degrees of freedom decoupling
Structure schematic diagram；
Fig. 2 is the structural schematic diagram of hold assembly；
Fig. 3 is the structural schematic diagram of inclination angle regulating member (additional rotating shaft)；
Fig. 4 is the structural schematic diagram of corner regulating member (omitting rotating shaft)；
In figure: A, hold assembly；B, inclination angle regulating member；C, corner regulating member；D, driving part；E, accurate air bearing
Guide rail；1, rectangular frame；2, supporting direction hinge；3, guide direction hinge；4, arc groove；5, antifriction piece；6, holding screw；7,
Supporting direction adjusts jackscrew；8, guide direction adjusts jackscrew；9, U-shaped framework；10, hinge is adjusted；11, retainer；12, it limits
Column；13, sliding block；14, steel ball A；15, rotating shaft；16, upper shell；17, switching boss；18, lower casing；19, lower retainer；20,
Holder；21, cartridge type frame；22, cartridge type retainer；23, steel ball B；24, cushion block is adjusted；25, bottom head covers.
Specific embodiment
It elaborates with reference to the accompanying drawing to the embodiment of the present invention.
As shown in Figure 1, a kind of cylindricity instrument horizontal guide rail based on the clamping of circular arc hinge and multiple degrees of freedom decoupling drives and fills
It sets, including hold assembly A, inclination angle regulating member B, corner regulating member C, hold assembly A are in four sides encircling type clamping precision
Air-float guide rail E, corner regulating member C are mounted in the groove of the driving part D of lower section；Driving part D is accurate air-float guide rail E
Tractive force is provided；Inclination angle regulating member B and corner regulating member C are mounted between accurate air-float guide rail E and driving part D,
To eliminate influence of the driving part D to accurate air-float guide rail E precision of rectilinear motion；Disturbance of the driving part D in space is divided into Y
To disturbance and Z-direction disturbance；Inclination angle regulating member B can eliminate Z-direction disturbance, i.e. supporting direction disturbs；Corner regulating member C energy
Y-direction disturbance is enough eliminated, i.e. guide direction disturbs.
As shown in Fig. 2, hold assembly A include rectangular frame 1, supporting direction hinge 2, guide direction hinge 3, arc groove 4,
Antifriction piece 5, holding screw 6, supporting direction adjust jackscrew 7, guide direction adjusts jackscrew 8；4 right angles of 1 inside of rectangular frame
Arc groove 4 is machined at rib, holding screw 6 is attached on 4 inner walls of rectangular frame 1 to fixed rectangular frame 1, antifriction piece 5,
Supporting direction adjusts jackscrew 7 and acts on supporting direction hinge 2, and guide direction adjusts jackscrew 8 and acts on guide direction hinge 3
On；Accurate air-float guide rail E is mounted in rectangular frame 1, and 4 working faces of accurate air-float guide rail E are contacted with antifriction piece 5；
The air-float guide rail E is divided into 2 planar inclinations, i.e. X/Y plane to the space angle of motion profile line relative to the X of driving part D
It with the inclination angle of XZ plane, can be adjusted separately by hold assembly A, make the X of air-float guide rail E and driving part D to movement rail
Trace is parallel；Change supporting direction adjusting jackscrew 7 and act on the pretightning force on supporting direction hinge 2, is adjusted air-float guide rail E's
XZ planar inclination；Change guide direction adjusting jackscrew 8 and act on the pretightning force on guide direction hinge 3, air-float guide rail E is adjusted
X/Y plane inclination angle；1 torsional deformation of rectangular frame caused by as pretightning force change, is cleared up at arc groove 4；Rectangle
Antifriction piece 5 is mounted between 1 inner surface of frame and the working face of accurate air-float guide rail E；Antifriction piece 5 uses polytetrafluoroethylene (PTFE)
Material.
As shown in figure 3, inclination angle regulating member B includes U-shaped framework 9, adjusts hinge 10, retainer 11, limited post 12, slides
Block 13, steel ball A14；Limited post 12 is installed in U-shaped framework 9, to limit the sliding of sliding block 13, U-shaped framework 9 and sliding block 13 it
Between use rolling friction mode；Two rows of cylindrical holes are machined on retainer 11, through-hole embeds steel ball A14；In inclination angle tune
The upper end of part B is saved, U-shaped framework 9 is connect with rectangular frame 1 by helicitic texture；The lower end of inclination angle regulating member B passes through cunning
The rotating shaft 15 of block 13 and corner regulating member C are rigidly connected；U-shaped framework 9 is equipped with limited post 12, positioned at sliding block 13 X to
Two sides；The two sides of the Y-direction of sliding block 13 and U-shaped framework 9 use rolling friction, realize the structure of rolling friction by 11 He of retainer
Steel ball A14 is constituted；The relative tilt rotation in XZ plane can only be generated between sliding block 13 and U-shaped framework 9, to eliminate driving part
The Z-direction of D disturbs.
As shown in figure 4, corner regulating member C includes rotating shaft 15, upper shell 16, switching boss 17, lower casing 18, lower guarantor
Hold frame 19, holder 20, cartridge type frame 21, cartridge type retainer 22, steel ball B23, adjustment cushion block 24, bottom head covers 25；Cartridge type
Switching boss 17 is machined on frame 21, switching boss 17 is threadedly coupled with driving part D；The outer concentric of cartridge type frame 21 is pacified
Equipped with upper shell 16 and lower casing 18；The inside of cartridge type frame 21 is from top to bottom successively equipped with holder 20, cartridge type with one heart
Retainer 22 and lower retainer 19；Circumferential uniform point is machined on holder 20, lower retainer 19 and cartridge type retainer 22
The cylindricality through-hole of cloth, through-hole embed steel ball B23；Holder 20, cartridge type retainer 22 and the installation of lower 19 inner concentric of retainer
There is rotating shaft 15, rolling friction mode is used between rotating shaft 15 and cartridge type frame 21；Between rotating shaft 15 and bottom head covers 25
Adjustment cushion block 24 is installed；In the upper end of corner regulating member C, rotating shaft 15 is connect with sliding block 13 by helicitic texture.Turn
Angle regulating member C is mounted in the groove above driving part D, and is connected by switching boss 17 and driving part D；Rotating shaft
15 with 21 circumferential direction of cartridge type frame on use rolling friction, realize the structure of rolling friction by cartridge type retainer 22 and steel ball B23 structure
At；Rolling friction is used on rotating shaft 15 and 21 axial direction of cartridge type frame, realizes the structure of rolling friction by holder 20, lower guarantor
It holds frame 19 and steel ball B23 is constituted, upper shell 16 is capable of fixing holder 20, and lower casing is capable of fixing lower retainer 19, revolution
Adjustment cushion block 24 is installed between axis 15 and bottom head covers 25, can adjust and fix the axial position of rotating shaft 15；Rotating shaft
The opposite rotary motion in X/Y plane can only be generated between 15 and cartridge type frame 21, to eliminate the Y-direction disturbance of driving part D.
A kind of cylindricity instrument horizontal guide rail driving device based on the clamping of circular arc hinge with multiple degrees of freedom decoupling, clamping part
It is parallel that accurate air-float guide rail E can be adjusted to space with driving part D by part A；When the device works, hold assembly A, inclination angle tune
The X of driving part D can be passed to accurate air-float guide rail E to displacement and inclined at the same time by section part B and corner regulating member C
Bevel angle adjustment part B, corner regulating member C can eliminate the Y-direction and Z-direction disturbance of driving part D generation；Accurate air-float guide rail E
Under the action of the X of driving part D is to tractive force, the kinematic accuracy of horizontal direction can be reached.
Claims (5)
1. a kind of cylindricity instrument horizontal guide rail driving device based on the clamping of circular arc hinge with multiple degrees of freedom decoupling, feature exist
In: the device includes hold assembly (A), inclination angle regulating member (B) and corner regulating member (C), and hold assembly (A) is in four sides
Circulating type clamps accurate air-float guide rail (E), and corner regulating member (C) is mounted in the groove of driving part (D)；
Hold assembly (A) includes rectangular frame (1), supporting direction hinge (2), guide direction hinge (3), arc groove (4), antifriction
Piece (5), holding screw (6), supporting direction adjust jackscrew (7), guide direction adjusts jackscrew (8)；Processing on the inside of rectangular frame (1)
Have arc groove (4), holding screw (6) is attached to 4 inner walls of rectangular frame (1) to fixed rectangular frame (1), antifriction piece (5)
On, supporting direction adjusts jackscrew (7) and acts on supporting direction hinge (2), and guide direction adjusts jackscrew (8) and acts on guiding side
To on hinge (3)；Accurate air-float guide rail (E) is mounted in rectangular frame (1), and 4 working faces of accurate air-float guide rail (E) are equal
It is compressed by antifriction piece (5)；
Inclination angle regulating member (B) includes U-shaped framework (9), adjusts hinge (10), retainer (11), limited post (12), sliding block
(13), (14) steel ball A；Limited post (12) are installed in U-shaped framework (9), to limit the sliding of sliding block (13), U-shaped framework (9)
It is rolling friction between sliding block (13)；Two rows of cylindrical holes are machined on retainer (11), through-hole embeds steel ball A (14)；
The upper end of regulating member (B) at inclination angle, U-shaped framework (9) are connect with rectangular frame (1) by helicitic texture；
Corner regulating member (C) includes rotating shaft (15), upper shell (16), switching boss (17), lower casing (18), lower retainer
(19), holder (20), cartridge type frame (21), cartridge type retainer (22), steel ball B (23), adjustment cushion block (24), bottom head covers
(25)；Switching boss (17) is threadedly coupled with driving part (D)；The outer concentric of cartridge type frame (21) is equipped with shell (16)
With lower casing (18)；The inside of cartridge type frame (21) is from top to bottom successively equipped with holder (20), cartridge type retainer with one heart
(22) and lower retainer (19)；It is machined on holder (20), lower retainer (19) and cartridge type retainer (22) circumferential equal
The cylindrical hole of even distribution, through-hole embed steel ball B (23)；Holder (20), cartridge type retainer (22) and lower retainer
(19) inner concentric is equipped with rotating shaft (15), is rolling friction between rotating shaft (15) and cartridge type frame (21)；Rotating shaft
(15) adjustment cushion block (24) is installed between bottom head covers (25)；In the upper end of corner regulating member (C), rotating shaft (15) with
Sliding block (13) is connected by helicitic texture.
2. according to claim 1 driven based on the clamping of circular arc hinge and the cylindricity instrument horizontal guide rail of multiple degrees of freedom decoupling
Device, it is characterised in that: the driving part (D) passes through corner regulating member (C), inclination angle regulating member (B) and clamping part
Part (A) is that accurate air-float guide rail (E) provides tractive force；Inclination angle regulating member (B) and corner regulating member (C) are mounted on precision
Between air-float guide rail (E) and driving part (D), to eliminate driving part (D) to accurate air-float guide rail (E) precision of rectilinear motion
It influences.
3. according to claim 1 driven based on the clamping of circular arc hinge and the cylindricity instrument horizontal guide rail of multiple degrees of freedom decoupling
Device, it is characterised in that: the upper end of the inclination angle regulating member (B) passes through the rectangle of U-shaped framework (9) and hold assembly (A)
Frame (1) rigid connection；The lower end of inclination angle regulating member (B) passes through the rotating shaft of sliding block (13) and corner regulating member (C)
(15) it is rigidly connected；U-shaped framework (9) is equipped with limited post (12), be located at sliding block (13) X to two sides；The Y-direction of sliding block (13)
Two sides and U-shaped framework (9) between be rolling friction, realize the structure of rolling friction by retainer (11) and steel ball A (14) structure
At.
4. according to claim 1 driven based on the clamping of circular arc hinge and the cylindricity instrument horizontal guide rail of multiple degrees of freedom decoupling
Device, it is characterised in that: the upper end of the corner regulating member (C) passes through rotating shaft (15) and inclination angle regulating member (B)
Sliding block (13) rigid connection；Corner regulating member (C) is mounted on driving part (D), and passes through switching boss (17) and driving
Component (D) is connected；It is rolling friction on rotating shaft (15) and cartridge type frame (21) circumferential direction, realizes the structure of rolling friction by cartridge type
Retainer (22) and steel ball B (23) are constituted；It is rolling friction on rotating shaft (15) and cartridge type frame (21) axial direction, realizes to roll and rub
The structure of wiping is made of holder (20) and lower retainer (19), and upper shell (16) is fixed holder (20), lower casing
(18) fixed lower retainer (19), are equipped with adjustment cushion block (24), for adjusting between rotating shaft (15) and bottom head covers (25)
With the axial position of fixed rotating shaft (15).
5. according to claim 1 driven based on the clamping of circular arc hinge and the cylindricity instrument horizontal guide rail of multiple degrees of freedom decoupling
Device, it is characterised in that: installed between the inner surface of the rectangular frame (1) and the working face of accurate air-float guide rail (E)
Antifriction piece (5) is made of polytetrafluoroethylene material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610643765.6A CN106960690B (en) | 2016-08-08 | 2016-08-08 | Cylindricity instrument horizontal guide rail driving device based on the clamping of circular arc hinge with multiple degrees of freedom decoupling |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610643765.6A CN106960690B (en) | 2016-08-08 | 2016-08-08 | Cylindricity instrument horizontal guide rail driving device based on the clamping of circular arc hinge with multiple degrees of freedom decoupling |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106960690A CN106960690A (en) | 2017-07-18 |
| CN106960690B true CN106960690B (en) | 2019-02-15 |
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|---|---|---|---|
| CN201610643765.6A Active CN106960690B (en) | 2016-08-08 | 2016-08-08 | Cylindricity instrument horizontal guide rail driving device based on the clamping of circular arc hinge with multiple degrees of freedom decoupling |
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| CN101190527A (en) * | 2007-12-06 | 2008-06-04 | 上海交通大学 | Two freedom mobile parallel connection decoupling mechanism |
| CN201133554Y (en) * | 2007-11-28 | 2008-10-15 | 北京清大天达光电科技有限公司 | Jiggling precision rotating platform device |
| JP4231486B2 (en) * | 2005-02-14 | 2009-02-25 | 住友重機械工業株式会社 | XY stage device |
| CN103604028A (en) * | 2013-11-25 | 2014-02-26 | 东莞华中科技大学制造工程研究院 | Superspeed precision positioning tandem one-dimensional platform |
| CN104464838A (en) * | 2014-12-16 | 2015-03-25 | 苏州大学 | One-dimensional precision positioning platform with Z axis enlarged in negative direction |
| CN105371794A (en) * | 2015-11-16 | 2016-03-02 | 长安大学 | Leveling and aligning micro displacement worktable |
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2016
- 2016-08-08 CN CN201610643765.6A patent/CN106960690B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4231486B2 (en) * | 2005-02-14 | 2009-02-25 | 住友重機械工業株式会社 | XY stage device |
| CN201133554Y (en) * | 2007-11-28 | 2008-10-15 | 北京清大天达光电科技有限公司 | Jiggling precision rotating platform device |
| CN101190527A (en) * | 2007-12-06 | 2008-06-04 | 上海交通大学 | Two freedom mobile parallel connection decoupling mechanism |
| CN103604028A (en) * | 2013-11-25 | 2014-02-26 | 东莞华中科技大学制造工程研究院 | Superspeed precision positioning tandem one-dimensional platform |
| CN104464838A (en) * | 2014-12-16 | 2015-03-25 | 苏州大学 | One-dimensional precision positioning platform with Z axis enlarged in negative direction |
| CN105371794A (en) * | 2015-11-16 | 2016-03-02 | 长安大学 | Leveling and aligning micro displacement worktable |
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| CN106960690A (en) | 2017-07-18 |
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