CN106960690A - The cylindricity instrument horizontal guide rail drive device decoupled with multiple degrees of freedom is clamped based on circular arc hinge - Google Patents
The cylindricity instrument horizontal guide rail drive device decoupled with multiple degrees of freedom is clamped based on circular arc hinge Download PDFInfo
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- CN106960690A CN106960690A CN201610643765.6A CN201610643765A CN106960690A CN 106960690 A CN106960690 A CN 106960690A CN 201610643765 A CN201610643765 A CN 201610643765A CN 106960690 A CN106960690 A CN 106960690A
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- guide rail
- regulating member
- retainer
- hinge
- cartridge type
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- G—PHYSICS
- G12—INSTRUMENT DETAILS
- G12B—CONSTRUCTIONAL DETAILS OF INSTRUMENTS, OR COMPARABLE DETAILS OF OTHER APPARATUS, NOT OTHERWISE PROVIDED FOR
- G12B5/00—Adjusting position or attitude, e.g. level, of instruments or other apparatus, or of parts thereof; Compensating for the effects of tilting or acceleration, e.g. for optical apparatus
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Abstract
The cylindricity instrument horizontal guide rail drive device decoupled with multiple degrees of freedom is clamped based on circular arc hinge and belongs to accurate measurement and Instrument technology field；The device includes hold assembly, inclination angle regulating member and corner regulating member, and hold assembly clamps accurate air-float guide rail in four sides circulating type, and corner regulating member is arranged in the groove of driver part；Hold assembly includes rectangular frame, supporting direction hinge, guide direction hinge, deep-slotted chip breaker, antifriction piece, holding screw, supporting direction regulation jackscrew and guide direction regulation jackscrew；Inclination angle regulating member includes U-shaped framework, regulation hinge, retainer, limited post and sliding block；Corner regulating member includes gyroaxis, upper shell, switching boss, lower casing, lower retainer, holder, cartridge type framework, cartridge type retainer, adjustment cushion block and bottom head covers；The present invention solves interference and coupled problem in accurate air-float guide rail driving, can set up a kind of cylindricity instrument horizontal guide rail precise driving device.
Description
Technical field
The invention belongs to accurate measurement and Instrument technology field, it is more particularly to a kind of based on the clamping of circular arc hinge with it is how free
Spend the cylindricity instrument horizontal guide rail drive device of decoupling.
Background technology
In accurate measurement and Instrument technology field, linear datum is precision/ultra precise measurement instrument, rig for testing and manufacture
One of core technology in equipment.The factor of influence guide rail precision of rectilinear motion mainly has the dry of rigging error and drive mechanism
Disturb, this just proposes stern challenge to the assembling of guide rail, also proposes higher requirement to the transfer mode of driving force.
Tsing-Hua University proposes two-freedom mobile decoupling flexure hinge mechanism (patent publication No.：CN104895913A),
The device includes flexible hinge side chain and rigid connector, and rigid connector includes the end positioned at flexible hinge matrix center section
Hold rigid output stage and respectively positioned at the upper end of flexible hinge matrix upper and lower, left and right part, lower end, left end, right-hand member rigidity
Platform；It can realize that terminal is each to the solution between motion and power by the two-freedom mobile decoupling flexure hinge mechanism of the invention
Coupling, so that the kinematic accuracy of two-freedom mobile decoupling flexure hinge mechanism is favorably improved, but the invention can only solve two
Mobile decoupling problem in dimensional plane, is used with certain limitation.
Zhejiang Polytechnical University proposes a kind of full decoupling dynamic balancer (patent publication No.：CN103116362A), should
Device includes pedestal and workbench, and first straight line guide rail is installed in workbench bottom surface, and the top surface of moving platform installs second straight line guide rail,
The top surface of cross axle sliding block is slidably mounted on first straight line guide rail, and the bottom surface of cross axle sliding block is slidably mounted in
On two line slideways；The dynamic decoupling of 4 frees degree can be realized by the full decoupling dynamic balancer of the invention, contributed to
Improve the kinematic accuracy in mutually orthogonal both direction.But the invention is used as attachment means by cross axle sliding block, uses
Alignment error can be attached in the kinematic accuracy of guide rail during this kind of attachment means, and cross axle sliding block kinematic accuracy less than leading
The kinematic accuracy of rail and without regulatory function.
University Of Tianjin proposes a kind of dual spring pretension flexibility decoupling linear electric motors locating platform (patent publication No.：
CN103522079A), the device includes pedestal and workbench, and workbench is provided with X to drive mechanism and Y-direction drive mechanism, X
Be each attached to the linear motor stator electric of drive mechanism and the Y-direction drive mechanism on pedestal, Y-direction locating platform provided with X to
Workbench guide rail, X is provided with the workbench being slidably connected with it to workbench guide rail, and workbench passes through double bullets
Spring pretension flexibility decoupling mechanism is connected with X to locating platform.The invention uses linear motor direct drive moving component, by setting
The flexible decoupling mechanism of meter dual spring pretension realizes the mobile decoupling of locating platform, anti-using high-precision grating sensor as end
Element is presented to ensure the high speed and high accuracy of system motion.But the invention passes through the flexible decoupling mechanism of spring pre-tightening, although disappear
Except the X after alignment error, but spring pre-tightening is to workbench guide rail adaptivity useless, it is impossible to filter X to drive mechanism
Bounce interference.
Above-mentioned decoupling device platform can solve the decoupling problem in the direction of motion, but above-mentioned existing skill to a certain extent
The common problem that art is present is that the decoupling in the direction of motion is not complete enough.Alignment error and driving error etc. pair are only taken into account simultaneously
The influence of guide rail linearity, could solve multiple degrees of freedom decoupling problem under stable state and dynamical state.To solve the above problems, this hair
It is bright to propose a kind of cylindricity instrument horizontal guide rail drive device for clamping and being decoupled with multiple degrees of freedom based on circular arc hinge.
The content of the invention
The problem of purpose of the present invention exists aiming at above-mentioned prior art, propose it is a kind of based on the clamping of circular arc hinge with
The cylindricity instrument horizontal guide rail drive device of multiple degrees of freedom decoupling, while taking into account alignment error, the linear motion of drive mechanism is missed
The bounce that difference, driving force transfer tape are come disturbs three aspects to guide rail linearity influence factor, solves stable state and dynamical state
Lower multiple degrees of freedom decoupling problem, can realize the high kinematic accuracy of line slideway.Above-mentioned purpose is real by following technical scheme
It is existing：
It is a kind of that the cylindricity instrument horizontal guide rail drive device decoupled with multiple degrees of freedom, including clamping are clamped based on circular arc hinge
Part, inclination angle regulating member and corner regulating member, hold assembly clamp accurate air-float guide rail in four sides circulating type, and corner is adjusted
Part is saved to be arranged in the groove of the driver part of lower section.
Hold assembly includes rectangular frame, supporting direction hinge, guide direction hinge, deep-slotted chip breaker, antifriction piece, clamp screw
Nail, supporting direction regulation jackscrew, guide direction regulation jackscrew；Deep-slotted chip breaker is machined with the inside of rectangular frame, holding screw is to solid
Determine rectangular frame, antifriction piece is attached on 4 inwalls of rectangular frame, supporting direction regulation jackscrew acts on supporting direction hinge
On, guide direction regulation jackscrew is acted on guide direction hinge；Accurate air-float guide rail is arranged in rectangular frame, and accurate gas
4 working faces of floating guide rail are contacted with antifriction piece.
Inclination angle regulating member includes U-shaped framework, regulation hinge, retainer, limited post, sliding block, steel ball A；In U-shaped framework
Limited post is installed, the slip to limit sliding block is rolling friction between U-shaped framework and sliding block；Two are machined with retainer
Cylindrical hole is arranged, through hole embeds steel ball A；The upper end of regulating member at inclination angle, U-shaped framework passes through screw thread knot with rectangular frame
Structure is connected.
Corner regulating member includes gyroaxis, upper shell, switching boss, lower casing, lower retainer, holder, cartridge type
Framework, cartridge type retainer, steel ball B, adjustment cushion block, bottom head covers；Switching boss is machined with cartridge type framework, switching boss is with driving
Dynamic component is threadedly coupled；The outer concentric of cartridge type framework is provided with shell and lower casing；The inner side of cartridge type framework, from top to bottom
Holder, cartridge type retainer and lower retainer are installed with one heart successively；On holder, lower retainer and cartridge type retainer
Circumferential equally distributed cylindrical hole is machined with, through hole embeds steel ball B；In holder, cartridge type retainer and lower retainer
Side is provided with gyroaxis with one heart, is rolling friction between gyroaxis and cartridge type framework；It is provided between gyroaxis and bottom head covers
Adjust cushion block；In the upper end of corner regulating member, gyroaxis is connected with sliding block by helicitic texture.
Apparatus of the present invention have following distinguishing feature：
1st, in apparatus of the present invention in corner regulating member it is rolling friction on gyroaxis and cartridge type framework circumference, realizes rolling
The structure of dynamic friction is made up of cartridge type retainer and steel ball B, can eliminate the Y-direction disturbance in tractive force transmittance process.
2nd, it is rolling friction between the sliding block and U-shaped framework of inclination angle regulating member in apparatus of the present invention, realizes rolling friction
Structure be made up of retainer and steel ball A, can eliminate in tractive force transmittance process Z-direction disturbance.
3rd, in apparatus of the present invention in hold assembly, regulation supporting direction regulation jackscrew acts on pre- on supporting direction hinge
Clamp force, can adjust the XZ planar inclinations of air-float guide rail；Regulation guide direction regulation jackscrew acts on pre- on guide direction hinge
Clamp force, can adjust the X/Y plane inclination angle of air-float guide rail, can make the X of air-float guide rail and driver part to movement locus line in three-dimensional
It is parallel in space.
4th, driver part provides tractive force for accurate air-float guide rail in apparatus of the present invention；Driver part and accurate air-float guide rail
Between corner regulating member, inclination angle regulating member and the hold assembly installed can eliminate alignment error, drive mechanism it is straight
Influence of the bounce interference that line kinematic error, driving force transfer tape are come to guide rail linearity, is solved under stable state and dynamical state
Multiple degrees of freedom decoupling problem, can realize the high kinematic accuracy of line slideway.
Apparatus of the present invention are widely used, in the precision that is particularly suitable for use in/ultra precise measurement instrument, rig for testing and manufacturing equipment
The foundation of horizontal linear benchmark.
Brief description of the drawings
Fig. 1 is a kind of knot that the cylindricity instrument horizontal guide rail drive device decoupled with multiple degrees of freedom is clamped based on circular arc hinge
Structure schematic diagram；
Fig. 2 is the structural representation of hold assembly；
Fig. 3 is the structural representation of inclination angle regulating member (additional gyroaxis)；
Fig. 4 is the structural representation of corner regulating member (omission gyroaxis)；
In figure：A, hold assembly；B, inclination angle regulating member；C, corner regulating member；D, driver part；E, accurate air supporting
Guide rail；1st, rectangular frame；2nd, supporting direction hinge；3rd, guide direction hinge；4th, deep-slotted chip breaker；5th, antifriction piece；6th, holding screw；7、
Supporting direction adjusts jackscrew；8th, guide direction regulation jackscrew；9th, U-shaped framework；10th, hinge is adjusted；11st, retainer；12nd, it is spacing
Post；13rd, sliding block；14th, steel ball A；15th, gyroaxis；16th, upper shell；17th, switching boss；18th, lower casing；19th, lower retainer；20、
Holder；21st, cartridge type framework；22nd, cartridge type retainer；23rd, steel ball B；24th, cushion block is adjusted；25th, bottom head covers.
Embodiment
Embodiments of the invention are elaborated below in conjunction with the accompanying drawings.
As shown in figure 1, a kind of cylindricity instrument horizontal guide rail decoupled with multiple degrees of freedom that clamped based on circular arc hinge drives dress
Put, including hold assembly A, inclination angle regulating member B, corner regulating member C, hold assembly A are in four sides encircling type clamping precision
Air-float guide rail E, corner regulating member C are arranged in the driver part D of lower section groove；Driver part D is accurate air-float guide rail E
Tractive force is provided；Inclination angle regulating member B and corner regulating member C is arranged between precision air-float guide rail E and driver part D,
To eliminate influences of the driver part D to accurate air-float guide rail E precision of rectilinear motion；Disturbances of the driver part D in space is divided into Y
To disturbance and Z-direction disturbance；Inclination angle regulating member B can eliminate Z-direction disturbance, i.e. supporting direction and disturb；Corner regulating member C energy
Y-direction disturbance, i.e. guide direction is enough eliminated to disturb.
As shown in Fig. 2 hold assembly A include rectangular frame 1, supporting direction hinge 2, guide direction hinge 3, deep-slotted chip breaker 4,
Antifriction piece 5, holding screw 6, supporting direction regulation jackscrew 7, guide direction regulation jackscrew 8；4 right angles of the inner side of rectangular frame 1
Deep-slotted chip breaker 4 is machined with rib, holding screw 6 is attached on 4 inwalls of rectangular frame 1 to fixed rectangular frame 1, antifriction piece 5,
Supporting direction regulation jackscrew 7 is acted on supporting direction hinge 2, and guide direction regulation jackscrew 8 acts on guide direction hinge 3
On；Accurate air-float guide rail E is arranged in rectangular frame 1, and accurate air-float guide rail E 4 working faces are contacted with antifriction piece 5；
The space angle of X to movement locus lines of the air-float guide rail E relative to driver part D is divided into 2 planar inclinations, i.e. X/Y plane
It with the inclination angle of XZ planes, can be respectively adjusted by hold assembly A, make air-float guide rail E and driver part D X to motion rail
Trace is parallel；Change the pretightning force that supporting direction regulation jackscrew 7 is acted on supporting direction hinge 2, can adjust air-float guide rail E's
XZ planar inclinations；Change the pretightning force that guide direction regulation jackscrew 8 is acted on guide direction hinge 3, can adjust air-float guide rail E
X/Y plane inclination angle；Due to the torsional deformation of rectangular frame 1 that pretightning force changes and causes, cleared up at deep-slotted chip breaker 4；Rectangle
Antifriction piece 5 is mounted between the inner surface of framework 1 and accurate air-float guide rail E working face；Antifriction piece 5 uses polytetrafluoroethylene (PTFE)
Material.
As shown in figure 3, inclination angle regulating member B includes U-shaped framework 9, regulation hinge 10, retainer 11, limited post 12, cunning
Block 13, steel ball A14；Limited post 12 is installed in U-shaped framework 9, the slip to limit sliding block 13, U-shaped framework 9 and sliding block 13 it
Between use rolling friction mode；Two row's cylindrical holes are machined with retainer 11, through hole embeds steel ball A14；Adjusted at inclination angle
The upper end of part B is saved, U-shaped framework 9 is connected with rectangular frame 1 by helicitic texture；The lower end of bevel angle adjustment part B passes through sliding block
13 are rigidly connected with corner regulating member C gyroaxis 15；U-shaped framework 9 is provided with limited post 12, positioned at sliding block 13 X to
Both sides；The both sides of the Y-direction of sliding block 13 use rolling friction with U-shaped framework 9, realize the structure of rolling friction by retainer 11 and steel
Pearl A14 is constituted；The relative tilt that can only be produced between sliding block 13 and U-shaped framework 9 in XZ planes is rotated, to eliminate driver part D
Z-direction disturbance.
As shown in figure 4, corner regulating member C includes gyroaxis 15, upper shell 16, switching boss 17, lower casing 18, lower guarantor
Hold frame 19, holder 20, cartridge type framework 21, cartridge type retainer 22, steel ball B23, adjustment cushion block 24, bottom head covers 25；Cartridge type
Switching boss 17 is machined with framework 21, switching boss 17 is threadedly coupled with driver part D；The outer concentric peace of cartridge type framework 21
Equipped with upper shell 16 and lower casing 18；The inner side of cartridge type framework 21, is from top to bottom provided with holder 20, cartridge type with one heart successively
Retainer 22 and lower retainer 19；Circumferential uniform point is machined with holder 20, lower retainer 19 and cartridge type retainer 22
The cylindricality through hole of cloth, through hole embeds steel ball B23；Holder 20, cartridge type retainer 22 and the lower inner concentric of retainer 19 are installed
There is gyroaxis 15, rolling friction mode is used between gyroaxis 15 and cartridge type framework 21；Between gyroaxis 15 and bottom head covers 25
Adjustment cushion block 24 is installed；In corner regulating member C upper end, gyroaxis 15 is connected with sliding block 13 by helicitic texture.Turn
Angle regulating member C is arranged in the groove above driver part D, and is connected by the boss 17 and driver part D that transfers；Gyroaxis
15, with using rolling friction in the circumference of cartridge type framework 21, realize the structure of rolling friction by cartridge type retainer 22 and steel ball B23 structures
Into；Gyroaxis 15 realizes the structure of rolling friction by holder 20, lower guarantor with using rolling friction on the axial direction of cartridge type framework 21
Hold frame 19 and steel ball B23 is constituted, upper shell 16 can fix holder 20, and lower casing can fix lower retainer 19, revolution
Adjustment cushion block 24 is installed between axle 15 and bottom head covers 25, the axial location of gyroaxis 15 can be adjusted and fix；Gyroaxis
The relative gyration in X/Y plane can only be produced between 15 and cartridge type framework 21, is disturbed with the Y-direction for eliminating driver part D.
It is a kind of that the cylindricity instrument horizontal guide rail drive device decoupled with multiple degrees of freedom, its clamping part are clamped based on circular arc hinge
It is parallel that accurate air-float guide rail E and driver part D can be adjusted to space by part A；When the device works, hold assembly A, inclination angle are adjusted
Driver part D X can be passed to accurate air-float guide rail E by section part B and corner regulating member C to displacement, at the same time, be inclined
Bevel angle adjustment part B, corner regulating member C can eliminate Y-direction and the Z-direction disturbance of driver part D generations；Accurate air-float guide rail E
Driver part D X in the presence of tractive force, the kinematic accuracy of horizontal direction can be reached.
Claims (5)
1. a kind of clamp the cylindricity instrument horizontal guide rail drive device decoupled with multiple degrees of freedom based on circular arc hinge, its feature exists
In：The device includes hold assembly (A), inclination angle regulating member (B) and corner regulating member (C), and hold assembly (A) is in four sides
The accurate air-float guide rail (E) of circulating type clamping, corner regulating member (C) is arranged in the groove of driver part (D)；
Hold assembly (A) includes rectangular frame (1), supporting direction hinge (2), guide direction hinge (3), deep-slotted chip breaker (4), antifriction
Piece (5), holding screw (6), supporting direction regulation jackscrew (7), guide direction regulation jackscrew (8)；Processed on the inside of rectangular frame (1)
There is deep-slotted chip breaker (4), holding screw (6) is attached to 4 inwalls of rectangular frame (1) to fixed rectangular frame (1), antifriction piece (5)
On, supporting direction regulation jackscrew (7) is acted on supporting direction hinge (2), and guide direction regulation jackscrew (8) acts on guiding side
To on hinge (3)；Accurate air-float guide rail (E) is arranged in rectangular frame (1), and 4 working faces of accurate air-float guide rail (E) are equal
Compressed by antifriction piece (5)；
Inclination angle regulating member (B) includes U-shaped framework (9), regulation hinge (10), retainer (11), limited post (12), sliding block
(13), steel ball A (14)；Limited post (12) is installed in U-shaped framework (9), the slip to limit sliding block (13), U-shaped framework (9)
It is rolling friction between sliding block (13)；Two row's cylindrical holes are machined with retainer (11), through hole embeds steel ball A (14)；
The upper end of regulating member (B) at inclination angle, U-shaped framework (9) is connected with rectangular frame (1) by helicitic texture；
Corner regulating member (C) includes gyroaxis (15), upper shell (16), switching boss (17), lower casing (18), lower retainer
(19), holder (20), cartridge type framework (21), cartridge type retainer (22), steel ball B (23), adjustment cushion block (24), bottom head covers
(25)；Switching boss (17) is threadedly coupled with driver part (D)；The outer concentric of cartridge type framework (21) is provided with shell (16)
With lower casing (18)；The inner side of cartridge type framework (21) is from top to bottom provided with holder (20), cartridge type retainer with one heart successively
And lower retainer (19) (22)；It is machined with holder (20), lower retainer (19) and cartridge type retainer (22) circumferential equal
The cylindrical hole of even distribution, through hole embeds steel ball B (23)；Holder (20), cartridge type retainer (22) and lower retainer
(19) inner concentric is provided with gyroaxis (15), is rolling friction between gyroaxis (15) and cartridge type framework (21)；Gyroaxis
(15) adjustment cushion block (24) is installed between bottom head covers (25)；In corner regulating member (C) upper end, gyroaxis (15) with
Sliding block (13) is connected by helicitic texture.
2. the cylindricity instrument horizontal guide rail according to claim 1 that decoupled with multiple degrees of freedom that clamped based on circular arc hinge is driven
Device, it is characterised in that：The driver part (D) passes through corner regulating member (C), inclination angle regulating member (B) and clamping part
Part (A) is that accurate air-float guide rail (E) provides tractive force；Inclination angle regulating member (B) and corner regulating member (C) are arranged on precision
Between air-float guide rail (E) and driver part (D), to eliminate driver part (D) to accurate air-float guide rail (E) precision of rectilinear motion
Influence.
3. the cylindricity instrument horizontal guide rail according to claim 1 that decoupled with multiple degrees of freedom that clamped based on circular arc hinge is driven
Device, it is characterised in that：The upper end of the inclination angle regulating member (B) passes through U-shaped framework (9) and the rectangle of hold assembly (A)
Framework (1) is rigidly connected；The lower end of bevel angle adjustment part (B) passes through sliding block (13) and the gyroaxis of corner regulating member (C)
(15) it is rigidly connected；U-shaped framework (9) is provided with limited post (12), positioned at sliding block (13) X to both sides；The Y-direction of sliding block (13)
Both sides and U-shaped framework (9) between be rolling friction, realize the structure of rolling friction by retainer (11) and steel ball A (14) structure
Into.
4. the cylindricity instrument horizontal guide rail according to claim 1 that decoupled with multiple degrees of freedom that clamped based on circular arc hinge is driven
Device, it is characterised in that：The cunning that the upper end of the corner regulating member (C) passes through gyroaxis (15) and bevel angle adjustment part (B)
Block (13) is rigidly connected；Corner regulating member (C) is arranged on driver part (D), and passes through boss of transferring (17) and drive division
Part (D) is connected；Gyroaxis (15) realizes that the structure of rolling friction is protected by cartridge type with being rolling friction in cartridge type framework (21) circumference
Hold frame (22) and steel ball B (23) is constituted；Gyroaxis (15) realizes rolling friction with being rolling friction on cartridge type framework (21) axial direction
Structure be made up of holder (20) and lower retainer (19), the fixed holder (20) of upper shell (16), lower casing (18)
Fixed lower retainer (19), is provided with adjustment cushion block (24), for adjusting and consolidating between gyroaxis (15) and bottom head covers (25)
Determine the axial location of gyroaxis (15).
5. the cylindricity instrument horizontal guide rail according to claim 1 that decoupled with multiple degrees of freedom that clamped based on circular arc hinge is driven
Device, it is characterised in that：Installed between the inner surface of the rectangular frame (1) and the working face of accurate air-float guide rail (E)
Antifriction piece (5) is made using polytetrafluoroethylmaterial material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610643765.6A CN106960690B (en) | 2016-08-08 | 2016-08-08 | Cylindricity instrument horizontal guide rail driving device based on the clamping of circular arc hinge with multiple degrees of freedom decoupling |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610643765.6A CN106960690B (en) | 2016-08-08 | 2016-08-08 | Cylindricity instrument horizontal guide rail driving device based on the clamping of circular arc hinge with multiple degrees of freedom decoupling |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106960690A true CN106960690A (en) | 2017-07-18 |
| CN106960690B CN106960690B (en) | 2019-02-15 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610643765.6A Active CN106960690B (en) | 2016-08-08 | 2016-08-08 | Cylindricity instrument horizontal guide rail driving device based on the clamping of circular arc hinge with multiple degrees of freedom decoupling |
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| CN201133554Y (en) * | 2007-11-28 | 2008-10-15 | 北京清大天达光电科技有限公司 | Jiggling precision rotating platform device |
| JP4231486B2 (en) * | 2005-02-14 | 2009-02-25 | 住友重機械工業株式会社 | XY stage device |
| CN103604028A (en) * | 2013-11-25 | 2014-02-26 | 东莞华中科技大学制造工程研究院 | Superspeed precision positioning tandem one-dimensional platform |
| CN104464838A (en) * | 2014-12-16 | 2015-03-25 | 苏州大学 | One-dimensional precision positioning platform with Z axis enlarged in negative direction |
| CN105371794A (en) * | 2015-11-16 | 2016-03-02 | 长安大学 | Leveling and aligning micro displacement worktable |
-
2016
- 2016-08-08 CN CN201610643765.6A patent/CN106960690B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4231486B2 (en) * | 2005-02-14 | 2009-02-25 | 住友重機械工業株式会社 | XY stage device |
| CN201133554Y (en) * | 2007-11-28 | 2008-10-15 | 北京清大天达光电科技有限公司 | Jiggling precision rotating platform device |
| CN101190527A (en) * | 2007-12-06 | 2008-06-04 | 上海交通大学 | Two freedom mobile parallel connection decoupling mechanism |
| CN103604028A (en) * | 2013-11-25 | 2014-02-26 | 东莞华中科技大学制造工程研究院 | Superspeed precision positioning tandem one-dimensional platform |
| CN104464838A (en) * | 2014-12-16 | 2015-03-25 | 苏州大学 | One-dimensional precision positioning platform with Z axis enlarged in negative direction |
| CN105371794A (en) * | 2015-11-16 | 2016-03-02 | 长安大学 | Leveling and aligning micro displacement worktable |
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| Publication number | Publication date |
|---|---|
| CN106960690B (en) | 2019-02-15 |
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