CN106908505A - For the novel chip of NOx sensor - Google Patents
For the novel chip of NOx sensor Download PDFInfo
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- CN106908505A CN106908505A CN201710131688.0A CN201710131688A CN106908505A CN 106908505 A CN106908505 A CN 106908505A CN 201710131688 A CN201710131688 A CN 201710131688A CN 106908505 A CN106908505 A CN 106908505A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/416—Systems
- G01N27/4162—Systems investigating the composition of gases, by the influence exerted on ionic conductivity in a liquid
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Abstract
The present invention relates to a kind of novel chip for NOx sensor, its chips is by the first substrate, second substrate, 3rd substrate, 4th substrate is stacked gradually and formed, second substrate is the slotted substrate of tool, including the first area being separated at intervals and second area, first substrate be provided with one through the first area of the second substrate through hole, axis is provided with cylinder shape groove of the through hole in first area, cylinder shape groove is outwards disposed with the first diffusion barrier layer by axis of through hole, second diffusion barrier layer, top between first diffusion barrier layer and the second diffusion barrier layer is provided with the first oxygen pump electrode, top between second diffusion barrier layer and the cell wall of cylinder shape groove is provided with the second oxygen pump electrode, bottom between second diffusion barrier layer and the cell wall of cylinder shape groove is provided with test electrode.Novel chip in the invention is employed, electrode is concentric structure, and simple structure can be greatly lowered technology difficulty.
Description
Technical field
The present invention relates to the design field of auto-emission control system, more particularly to sensor chip, specifically refer to one
Plant the novel chip for NOx sensor.
Background technology
With the acceleration of China's Development of China's Urbanization, Fossil fuel consumption increases sharply, many poisonous, harmful gas quilts
Discharge into the atmosphere pollution environment, wherein a most typical class, is exactly NOx gases, it not only result in photochemical fog and
Acid rain, damage the ozone layer, can also produce side effect to the respiratory system of the mankind, alopecia, throat inflammation occur, visual impairment, exhale
The symptoms such as desorption system resistance decline.Therefore nitrogen oxides emission reduction is listed in one of requirement of environmental protection.Many toxicitys with
And epidemiological study is found that the side effect of NOx.NO2And NO gases (being collectively referred to as NOx) are now subjected to larger concern.It is this
Concentration of the gas in the residential area of some roads particularly high population density is higher, and this just seems that problem is more serious.Research
Show, 75% NOx gases are produced by motor vehicle emission, only about half of among these is that the vehicle transported by non-rice habitats is produced
, such as engineering machinery, agricultural machinery, while these mechanical life-spans to be far longer than road transport vehicle, to these machineries
The discharge of vehicle reduction NOx just becomes more efficient.Therefore people have put into very big energy and financial resources to reduce this gas
Body is generated by more severe regulation limiting the discharge of this kind of gas.
The method of NOx is reduced in automobile industry mainly two kinds, and NOx gas entrapments and NOx are reduced.But no matter which
The method of kind, the concentration for accurately determining NOx is the problem for first having to solve.
The method of testing of NOx has a many kinds, such as resonance ionization spectroscopy method, fourier transform infrared spectrometry method, gas-chromatography/
Mass spectrography, chemiluminescence analysis etc., these methods can accurately determine the concentration of NOx very much, but also have the shortcomings that it is a lot, such as
It is unable to on-line testing, test equipment is bulky etc..These shortcomings cause to may not apply to the treatment of vehicle exhaust.
The electrochemical source of current method of testing NOx sensor for being currently based on oxidation zirconium base is using 6 layers of zirconium oxide substrate lamination
Burn altogether and form, centre adds calandria, test electrode, oxygen pump electrode etc..It is first by reducing the O in vehicle exhaust2's
Content, by O in tail gas2Content falls below very low degree (10~3ppm), and NOx gases resolve into N in test electrode surface2With
O2Gas, by determining O2The current strength that gas is produced, tests the concentration of NOx.The advantage of this device is to survey online
The concentration of NOx is tried, small volume is easy for installation.But shortcoming is also, it will be apparent that this chip preparing process is complicated, there is a lot
Preparation process, have up to 8 electrodes, can all cause that all that has been achieved is spoiled if the error of any step in these steps.If simple
Change if the structure of NOx sensor, the yield rate of product can be improved.
The present invention proposes to simplify the novel chip for NOx sensor of structure for such case.
The content of the invention
The purpose of the present invention is the shortcoming for overcoming above-mentioned prior art, there is provided a kind of simple structure, be greatly lowered
Technology difficulty, the novel chip for NOx sensor for ensureing the catalysis activity for testing electrode.
To achieve these goals, the novel chip for NOx sensor of the invention has following composition：
Described chip is stacked gradually and formed by the first substrate, the second substrate, the 3rd substrate, the 4th substrate,
The second described substrate is the slotted substrate of tool, including the first area that is separated at intervals and second area, described
The first substrate be provided with one through the first area of the second described substrate through hole, it is logical with this in described first area
Hole is provided with cylinder shape groove for axis, and described cylinder shape groove is outwards disposed with the first diffusion barrier by axis of through hole
Hinder layer, the second diffusion barrier layer, the top between the first described diffusion barrier layer and the second diffusion barrier layer is provided with the first oxygen pump electricity
Pole, the top between the second described diffusion barrier layer and the cell wall of cylinder shape groove is provided with the second oxygen pump electrode, described second
Bottom between diffusion barrier layer and the cell wall of cylinder shape groove is provided with test electrode, and described second area is provided with reference gas
Passage, reference electrode is provided with described reference gas passage,
Calandria is provided between the 3rd described substrate and the 4th substrate, the upper and lower surface of described calandria is equipped with
Insulating barrier.
It is preferred that a diameter of 0.01~0.5mm of described through hole, described through hole is connected with vehicle exhaust.
It is preferred that, the through hole of the outer surface of described the first substrate is provided with external electrode.
It is preferred that described external electrode and test electrode surface are all covered with porous protective layer.
More preferably, the porous protective layer of the surface covering of described external electrode is porous alumina layer, described test electricity
The porous protective layer of the surface covering of pole is porous spinelle layer.
It is preferred that described insulating barrier is dense oxide aluminium lamination.
It is preferred that the first described oxygen pump electrode, the second oxygen pump electrode include Pt and 1%Au, described test electrode,
Reference electrode and external electrode are Pt.
It is preferred that described substrate is zirconium oxide substrate.
Employ the novel chip for NOx sensor in the invention, all of oxygen pump electrode, test electrode,
And external electrode all concentrates on the positive and negative of ground floor substrate, and it is concentric structure, simple structure, processing step is simple, can
Significantly to reduce technology difficulty.And the surface protective mulch of electrode is tested, when can prevent from sintering in oxygen pump electrode
The volatilization of Au is to testing the pollution of electrode, so as to ensure that the catalysis activity of test electrode is unaffected, need to once sintered be only
Can complete, manufacture difficulty is reduced so as to simplify manufacturing process.
Brief description of the drawings
Fig. 1 is the structural representation of the novel chip for NOx sensor of the invention.
Fig. 2 is the top view of the concentric structure in the novel chip for NOx sensor of the invention.
Reference
1 first substrate
2 second substrates
3 the 3rd substrates
4 the 4th substrates
5 calandrias
6 calandria surface insulation layers
7 first oxygen pump electrodes
8 second oxygen pump electrodes
9 test electrodes
10 porous alumina layers
11 external electrodes
12 first diffusion barrier layer
13 second diffusion barrier layer
14 reference electrodes
15 reference gas passages
Specific embodiment
In order to more clearly describe technology contents of the invention, carried out with reference to specific embodiment further
Description.
Novel chip for NOx sensor of the invention is by the first substrate, the second substrate, the 3rd substrate, the 4th
Substrate is stacked gradually and formed, and the second described substrate is have slotted substrate, including the first area and second being separated at intervals
Region, the first described substrate be provided with one through the first area of the second described substrate through hole, the firstth described area
Axis is provided with cylinder shape groove of the through hole in domain, described cylinder shape groove is outwards disposed with by axis of through hole
First diffusion barrier layer, the second diffusion barrier layer, the top between the first described diffusion barrier layer and the second diffusion barrier layer are provided with
First oxygen pump electrode, the top between the second described diffusion barrier layer and the cell wall of cylinder shape groove is provided with the second oxygen pump electrode,
Bottom between the second described diffusion barrier layer and the cell wall of cylinder shape groove is provided with test electrode, and described second area is set
Have reference gas passage, be provided with reference electrode in described reference gas passage, the 3rd described substrate and the 4th substrate it
Between be provided with calandria, the upper and lower surface of described calandria is equipped with insulating barrier.
Wherein, a diameter of 0.01~0.5mm of described through hole, described through hole is connected with vehicle exhaust；Described
The through hole of the outer surface of the first substrate is provided with external electrode；Described external electrode and test electrode surface is all covered with porous guarantor
Sheath；The porous protective layer of the surface covering of described external electrode is porous alumina layer, and the surface of described test electrode is covered
The porous protective layer of lid is porous spinelle layer；Described insulating barrier is dense oxide aluminium lamination；Described the first oxygen pump electrode,
Dioxy pump electrode includes Pt and 1%Au, and described test electrode, reference electrode and external electrode are Pt；Described substrate
It is zirconium oxide substrate.
In a specific embodiment of the invention as shown in Figure 1, chip is by the first substrate 1, the second substrate 2, the 3rd base
Piece 3, the 4th substrate 4 are stacked gradually and formed, and the second substrate 2 is the slotted substrate of tool, including the first area being separated at intervals and
Second area, the first described substrate 1 is provided with the through hole of a first area through the second described substrate, described
Axis is provided with cylinder shape groove of the through hole in one region, described cylinder shape groove outwards sets successively by axis of through hole
The first diffusion barrier layer 12, the second diffusion barrier layer 13 are equipped with, between the first described diffusion barrier layer and the second diffusion barrier layer
Top is provided with the first oxygen pump electrode 7, and the top between the second described diffusion barrier layer and the cell wall of cylinder shape groove is provided with second
Oxygen pump electrode 8, the bottom between the second described diffusion barrier layer and the cell wall of cylinder shape groove is provided with test electrode 9, described
Second area is provided with reference gas passage 15, and reference electrode 14, the described the 3rd are provided with described reference gas passage
Calandria 5 is provided between the substrate 4 of substrate 3 and the 4th, the upper and lower surface of described calandria is equipped with insulating barrier 6.
A diameter of 0.01~0.5mm of through hole, described through hole is connected with vehicle exhaust；The outer surface of the first substrate
Through hole is provided with external electrode 11.External electrode and test electrode surface are all covered with porous protective layer.The table of described external electrode
The porous protective layer of face covering is porous alumina layer 10, and the porous protective layer that the surface of described test electrode covers is porous
Spinel layer.
The cell wall of the first test chamber, the second diffusion barrier layer and groove is constituted between first diffusion barrier layer and the second diffusion barrier layer
Between constitute the second test chamber.Employ the novel chip for NOx sensor in the invention, all of oxygen pump electricity
Pole, test electrode and external electrode all concentrate on the positive and negative of ground floor substrate, and are concentric structure, simple structure, technique
Step is simple, can significantly reduce technology difficulty.And the surface protective mulch of electrode is tested, when can prevent sintering
The volatilization of Au, so as to ensure that the catalysis activity of test electrode is unaffected, is only needed to testing the pollution of electrode in oxygen pump electrode
It is once sintered to complete, reduce manufacture difficulty so as to simplify manufacturing process.
In this description, the present invention is described with reference to its specific embodiment.But it is clear that can still make
Various modifications and alterations are without departing from the spirit and scope of the present invention.Therefore, specification and drawings are considered as illustrative
And it is nonrestrictive.
Claims (8)
1. a kind of novel chip for NOx sensor, it is characterised in that described chip is by the first substrate, the second base
Piece, the 3rd substrate, the 4th substrate are stacked gradually and formed,
The second described substrate is the slotted substrate of tool, including the first area that is separated at intervals and second area, described the
One substrate be provided with one through the first area of the second described substrate through hole, be with the through hole in described first area
Axis is provided with cylinder shape groove, and described cylinder shape groove is outwards disposed with the first Diffusion Barrier by axis of through hole
Layer, the second diffusion barrier layer, the top between the first described diffusion barrier layer and the second diffusion barrier layer are provided with the first oxygen pump electrode,
Top between the second described diffusion barrier layer and the cell wall of cylinder shape groove is provided with the second oxygen pump electrode, the second described diffusion
Bottom between barrier layer and the cell wall of cylinder shape groove is provided with test electrode, and described second area is provided with reference gas and leads to
Road, reference electrode is provided with described reference gas passage,
Calandria is provided between the 3rd described substrate and the 4th substrate, the upper and lower surface of described calandria is equipped with insulation
Layer.
2. the novel chip for NOx sensor according to claim 1, it is characterised in that described through hole
A diameter of 0.01~0.5mm, described through hole is connected with vehicle exhaust.
3. the novel chip for NOx sensor according to claim 1, it is characterised in that the first described base
The through hole of the outer surface of piece is provided with external electrode.
4. the novel chip for NOx sensor according to claim 3, it is characterised in that described external electrode
Porous protective layer is all covered with test electrode surface.
5. the novel chip for NOx sensor according to claim 4, it is characterised in that described external electrode
The porous protective layer of surface covering be porous alumina layer, the porous protective layer that the surface of described test electrode covers is many
Hole spinel layer.
6. the novel chip for NOx sensor according to claim 1, it is characterised in that described insulating barrier
It is dense oxide aluminium lamination.
7. the novel chip for NOx sensor according to claim 1, it is characterised in that the first described oxygen
Pump electrode, the second oxygen pump electrode include Pt and 0.5wt%~1.5wt%Au, described test electrode, reference electrode and outer
Electrode is Pt.
8. the novel chip for NOx sensor according to claim 1, it is characterised in that described substrate is equal
It is zirconium oxide substrate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710131688.0A CN106908505A (en) | 2017-03-07 | 2017-03-07 | For the novel chip of NOx sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710131688.0A CN106908505A (en) | 2017-03-07 | 2017-03-07 | For the novel chip of NOx sensor |
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| Publication Number | Publication Date |
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| CN106908505A true CN106908505A (en) | 2017-06-30 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
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| CN201710131688.0A Pending CN106908505A (en) | 2017-03-07 | 2017-03-07 | For the novel chip of NOx sensor |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108490058A (en) * | 2018-04-09 | 2018-09-04 | 江苏奥力威传感高科股份有限公司 | A kind of NOx sensor towards vehicle energy saving environmental protection |
| CN109298057A (en) * | 2018-09-03 | 2019-02-01 | 上海长园维安电子线路保护有限公司 | A kind of nitrogen oxide sensor ceramic chip |
| CN109507262A (en) * | 2018-11-21 | 2019-03-22 | 温州百岸汽车零部件有限公司 | A kind of NOx sensor chip pumping current adjustment |
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| CN205643237U (en) * | 2016-03-29 | 2016-10-12 | 武汉科技大学 | Wide territory of piece formula car oxygen sensor chip structure |
| CN205786465U (en) * | 2016-05-23 | 2016-12-07 | 武汉科技大学 | A kind of external heat chip of sheet oxygen sensor structure |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108490058A (en) * | 2018-04-09 | 2018-09-04 | 江苏奥力威传感高科股份有限公司 | A kind of NOx sensor towards vehicle energy saving environmental protection |
| CN109298057A (en) * | 2018-09-03 | 2019-02-01 | 上海长园维安电子线路保护有限公司 | A kind of nitrogen oxide sensor ceramic chip |
| WO2020048300A1 (en) * | 2018-09-03 | 2020-03-12 | 上海长园维安电子线路保护有限公司 | Nitrogen oxide sensor ceramic chip |
| CN109507262A (en) * | 2018-11-21 | 2019-03-22 | 温州百岸汽车零部件有限公司 | A kind of NOx sensor chip pumping current adjustment |
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Application publication date: 20170630 |