CN106746591A - A kind of method that PCVD depositions make optical fiber prefabricated rod mandrel - Google Patents
A kind of method that PCVD depositions make optical fiber prefabricated rod mandrel Download PDFInfo
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- CN106746591A CN106746591A CN201611219873.7A CN201611219873A CN106746591A CN 106746591 A CN106746591 A CN 106746591A CN 201611219873 A CN201611219873 A CN 201611219873A CN 106746591 A CN106746591 A CN 106746591A
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/018—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/018—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
- C03B37/01853—Thermal after-treatment of preforms, e.g. dehydrating, consolidating, sintering
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
- Y02P40/57—Improving the yield, e-g- reduction of reject rates
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- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
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- General Life Sciences & Earth Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Manufacture, Treatment Of Glass Fibers (AREA)
Abstract
The present invention relates to the method that a kind of PCVD depositions make optical fiber prefabricated rod mandrel, it is characterized in that the sectional area distribution according to a upper deposited prefabricated rod mandrel, index distribution and refractive index profile, a upper prefabricated rod mandrel different time is by the flow of control reacting gas, calculate the sectional area distribution for needing, the flow by control reacting gas of the different time that index distribution and refractive index profile are actually needed, in the different radial and axial position of plug deposition, Accurate Data Flow Control is carried out to a kind of and various of reacting gas with fast flow control module and flow measurement module, so as to realize the refractive index of sandwich layer, the precise control of deposition in refractive index profile and sectional area pipe.The present invention can improve microwave plasma CVD optical fiber prefabricated rod mandrel parameter, improve the uniformity of deposition bushing pipe parameter distribution, increase plug effective length, reduce cost of manufacture.
Description
Technical field
The present invention relates to a kind of PCVD（MPCVD method）Deposition makes optical fiber prefabricated rod mandrel
Method, belong to optical fiber processing technical field.
Background technology
The preparation of fibre-optical mandrel is the first step of fiber manufacturing, and the transmission characteristic of optical fiber depends primarily on the part of plug,
Therefore plug preparation technology is considered as the core of optical fiber preparation technology.The method for preparing quartz optical fibre core can be divided into pipe
Interior method and the outer method of pipe, wherein method mainly includes improved chemical vapor deposition method (MCVD) and plasma enhanced chemical vapor in pipe
Depositing operation (PCVD), managing outer method mainly includes outside chemical vapor deposition technique (OVD) and axial chemical vapor deposition method
(VAD).The deposition process of PCVD techniques is close under the environment under low pressure of vacuum, to participate in the mixed gas of reaction in high frequency power
Direct effect under be ionized into and carry huge energy there is the plasma of high activity, plasma reacts to be formed rapidly
Pure silicon or the high-temperature oxide of doping, in quartz liner inwall with glassy state Direct precipitation.The mechanism of PCVD depositing operations is determined
It has following more apparent feature：1, the reaction energy compared to MCVD techniques is transmitted to inner reaction tube gas, PCVD by bushing pipe
Technique is the conversion zone being directly coupled to by the microwave of resonator generation in quartz liner, therefore deposition process does not receive bushing pipe
Heat transfer influence；The reaction mechanism of 2, PCVD technique negative pressure plasmas is different from the reaction of other gas-phase deposition chlorides hydrolysis
Mechanism, is easier to realize highly doped multi-component coating deposition, and is that Direct precipitation is glassy state, before having lacked dehydration sintering compared to the outer method of pipe
Transition state, the bushing pipe conduct energy compared to MCVD techniques gathers, and PCVD reaction rates are exceedingly fast；3, PCVD process gas are ionized
Do not influenceed by bushing pipe heat transfer, high-frequency resonant cavity can be moved quickly, so that each layer of deposit thickness can be controlled
Micron order, therefore can be distributed with point-device control refractive index profile；In 4, PCVD techniques ionize after plasma it is anti-
Depositional environment temperature needed for answering temperature influence very little, thus relative other techniques is relatively low, and bushing pipe is unlikely to deform.Therefore,
PCVD depositing operations are multicomponent is highly doped, in terms of the fibre-optical mandrel preparation of accurate refraction rate Soil profile and high reaction rate
With significant advantage.
During plasma activated chemical vapour deposition prepares preform, plasma area surrounding environment is influenced whether
The component of deposit and the quantity of deposit, surrounding environment include reacting gas temperature, and microwave is burst into energy, gas stream in bushing pipe
Amount, flow velocity and pressure.Temperature such as near gas end reacting gas is relatively low, when the back-turning section resonator stop of bushing pipe two ends is deposited
Between it is long, in stove with the presence of microwave standing wave etc. adverse effect cause deposition plug it is uneven in radial and axial parameter distribution,
Parameter distribution fluctuation especially at deposition bushing pipe two ends is larger, causes to deposit the decline of plug quality and effectively uses length
Reduce, generally deposition bushing pipe effective length accounts for the 50%-80% of liner conduit length, the utilization rate of bushing pipe is low, cause optical fiber cost to increase.
In order to reduce prefabricated rods parameter along the fluctuation on axis, United States Patent (USP) US2009/0022906 is disclosed holding furnace
Moved axially along bushing pipe.Result shows that the method has improvement to prefabricated rods axial direction uniformity, but when sedimentation rate increases or presents
When entering power increase, long to the effective rod of prefabricated rods can impact, this will increase optical fiber cost.And this method equipment compares
It is complicated.
Chinese patent CN103011576 and United States Patent (USP) US2013/0167593 are disclosed using extra-pulse reacting gas
Mode improve optical fiber uniformity, the patent reacting gas control mode is opened loop control, and gas pulses article on plasma area
The influence of gas component is not easily controlled.
The content of the invention
The technical problems to be solved by the invention are that a kind of PCVD of deficiency offer existed for above-mentioned prior art sinks
The method that product makes optical fiber prefabricated rod mandrel, it can improve microwave plasma CVD optical fiber prefabricated rod mandrel ginseng
Number, improves the uniformity of deposition bushing pipe parameter distribution, increases plug effective length, reduces cost of manufacture.
The present invention is to solve the problems, such as that used technical scheme set forth above is：It is base tube with pure quartz glass bushing pipe,
Through corrosion be cleaned and dried after, be clamped in PCVD deposition lathe on, bushing pipe is placed in holding furnace through microwave cavity, two ends by
Rotary chuck clamping, holding furnace provides 800 ~ 1200 DEG C of depositional environment temperature, and microwave cavity produces high frequency power along bushing pipe
Axial reciprocating movement carries out PCVD depositions, realizes the layer by layer deposition in bushing pipe inwall, participates in the mixed reaction gas of deposition from lining
One end of pipe enters in pipe, and the other end of bushing pipe is exhaust end, and exhaust end connects vavuum pump by pipeline, it is characterised in that according to
The sectional area distribution of a upper deposited prefabricated rod mandrel, index distribution and refractive index profile, a upper prefabricated rod mandrel
Different time calculates sectional area distribution, index distribution and the refractive index profile reality for needing by the flow of control reacting gas
The flow by control reacting gas of the different time of needs, in the different radial and axial position of plug deposition, with quick stream
Amount control module and flow measurement module carry out Accurate Data Flow Control to a kind of and various of reacting gas, so as to realize sandwich layer
The precise control of deposition in refractive index, refractive index profile and sectional area pipe.Until deposition is completed, the bushing pipe for finishing will be finally deposited
Collapsing is carried out on electric smelting contracting stove obtain solid mandrel.
By such scheme, while Accurate Data Flow Control is carried out, speed of the control resonator in the axially different position of plug
Degree, carries out precise control and then precise control plug deposition parameter that resonator moves back and forth speed.
By such scheme, described fast flow control module is made up of flow control meter concatenation immediate action valve.
By such scheme, described fast flow control module by after flow control meter concatenation immediate action valve again with a flow
Control is counted and connects composition.
By such scheme, described flow-control module and flow measurement module realize accurate negative feedback control jointly, lead to
The final flow rate that excessively stream measurement module is detected, control function is instead released needs the action of flow-control module, including flow
Control meter aperture and immediate action valve opening time ratio, it is however generally that immediate action valve opening time ratio is a discrete function,
The spacing of discrete function depends on the reaction time of immediate action valve.
By such scheme, the reaction time of described immediate action valve is small equal to 500ms, preferably small equal to 100ms.It is simultaneously
The discrete function is tried one's best continuously, as far as possible the reaction time of immediate action valve should be made as short as possible.
By such scheme, the length of the bushing pipe is 1.0~2.5 meters, the translational speed of microwave cavity for 10~30 meters/
Min, the high frequency power 6KW~20KW of microwave cavity.
By such scheme, described reacting gas includes C2F6, C4F8, GeCl4, SiCl4One or more, Yi Jichun
Oxygen O2.
The beneficial effects of the present invention are：1st, during plasma activated chemical vapour deposition prepares preform, instead
The component of gas is answered to directly influence the component of deposit, the present invention controls control module and flow measurement module with fast flow
The accurate negative feedback control for realizing the interior each gas component of pipe and then the precise control for realizing sediment composition in bushing pipe；2nd, wait from
Daughter chemical vapor deposition is prepared during preform, can control resonator in the speed of the axially different position of plug,
Control resonator controls deposition, and then the axial direction distribution that each layer cross section of control plug is accumulated, together in the residence time of diverse location
When the number of plies of each layer of plug deposition can be controlled to control each layer radial dimension.The present invention while Accurate Data Flow Control is carried out,
Precise control and then precise control deposition parameter that resonator moves back and forth speed are carried out, makes the control essence of sediment composition in pipe
Degree is further improved；3rd, can realize depositing the radial and axial parameter of plug by sediment composition in precise control pipe
The precise control including plug sandwich layer diameter, core refractive rate, core refractive rate section etc. is distributed, deposition bushing pipe parameter point is improved
The uniformity of cloth；4th, invention increases the effective length 10% or so of deposition bushing pipe, improve microwave plasma chemical gas phase
The utilization rate of bushing pipe, reduces cost in deposition optical fiber prefabricated rod mandrel technique, increased production capacity.
Brief description of the drawings
Fig. 1 is the connection diagram of fast flow control module and flow measurement module in one embodiment of the invention.
Fig. 2 is the connection diagram of fast flow control module and flow measurement module in another embodiment of the present invention.
Fig. 3 compares figure for the core diameter distribution of one embodiment of the invention, and lower curve is core diameter of the invention distribution in figure
Curve.
Fig. 4 compares figure for the index distribution of one embodiment of the invention, and lower curve is refractive index of the invention in figure
Distribution curve.
Specific embodiment
The present invention is described in further details below in conjunction with accompanying drawing.
It is base tube with pure quartz glass bushing pipe, after being cleaned and dried through corrosion, is clamped on PCVD deposition lathes, bushing pipe is passed through
Microwave cavity is placed in holding furnace, and two ends provide 800 ~ 1200 DEG C of depositional environment temperature by rotary chuck clamping, holding furnace
Degree, microwave cavity produces high frequency power to be moved along bushing pipe axial reciprocating and carries out PCVD depositions, realizes in bushing pipe inwall successively
Deposition, the mixed reaction gas for participating in deposition enter in pipe from one end of bushing pipe, and the other end of bushing pipe is exhaust end, and exhaust end leads to
Piping connects vavuum pump.Sectional area distribution, index distribution and refractive index according to a upper deposited prefabricated rod mandrel
Section, a upper prefabricated rod mandrel different time calculates sectional area distribution, the refractive index for needing by the flow of control reacting gas
The flow by control reacting gas of the different time that distribution and refractive index profile are actually needed, in the different radial directions of plug deposition
And axial location, exact flow rate is carried out to a kind of and various of reacting gas with fast flow control module and flow measurement module
Control, so as to the precise control deposited in refractive index, refractive index profile and the sectional area pipe of realizing sandwich layer.
Embodiment one：Fig. 1 shows and a kind of prepares the accurate of preform equipment for PCVD
The air supply system schematic diagram of reaction gas flow is controlled, in the embodiment shown in fig. 1,1 is flow control meter, and 2 is quick valve,
3 is flow measuring meter, and fast gas flow-control module wherein flowmeter flow is collectively constituted according to upper by three above element
A piece plug refractive index radial distribution is adjusted, and quick valve opens ratio, and according to a upper plug refractive index, axially distribution is adjusted
Whole, fast flow valve is, plus a fast quickly, small disturbance adjusting flow on MFC output flows, to increase plug axial direction
Uniformity, aperture, actual measurement flow according to flowmeter, required flow, calculates the flowmeter that flow needed for obtaining needs
（MFC）Aperture, and immediate action valve opening time ratio, precise control final flow rate.Single-mode fiber is controlled with quick control unit
As a example by GeCl4, MFC ranges are 100 ~ 300sccm, and open range is 5% ~ 70%, the opening time scope of quick valve for 60% ~
95%, MFM range and MFC correspondent equals.
Embodiment two：Fig. 2 shows another essence that preform equipment is prepared for PCVD
The air supply system schematic diagram of reaction gas flow is really controlled, in the embodiment shown in Figure 2, the choosing of fast gas flow-control module
Meter one flow control meter, one immediate action valve of series connection in parallel is controlled to constitute with a main flow, flow measurement module is from stream
Measuring meter（MFM）, according to the aperture of flowmeter, reality measures flow, and required flow calculates the secondary of flow needs needed for obtaining
Flowmeter（MFC）Aperture, and immediate action valve opening time ratio, precise control final flow rate.With fast flow control unit control
As a example by multimode fibre GeCl4 processed, the range of main road MFC shown in figure is 100 ~ 400sccm, and open range is 5% ~ 70%, 1 institute in figure
Show MFC branch roads range for main road MFC corresponding 10% ~ 60%, the opening time scope of quick valve is 60% ~ 95%, the MFM amounts of main road
Journey and main road MFC correspondent equals
Fig. 3 shows the distribution map that plug core diameter is deposited using PCVD before and after the present invention, such as first can basis using the present invention
Deposition plug size calculates resonator in each position and speed size, it is ensured that the core diameter distribution of deposition plug is as far as possible uniform, and core diameter is closed
Lattice length is tried one's best length, when adjusting resonator speed and core diameter is distributed in place, the index distribution of plug without in place, figure
The length of the qualified plug of core diameter is 950mm before 3 vision-controls, and the core diameter Qualified Length of plug is changed into 1060mm after adjustment.
Fig. 4 shows that PCVD deposits plug refractive index distribution curve before and after using the present invention, can basis using the present invention
The index distribution tested after deposition plug calculates the flow aperture that adjustment is needed in plug diverse location, then by quick stream
, in the flow of diverse location, Fig. 4 displays are using index distribution Qualified Length before the present invention for amount control module negative feedback control
It is 940mm, index distribution Qualified Length is 1060mm after adjustment.Using the increase 120mm long of qualified rod after the present invention, increase
About 10% or so.
Understand that, if not using the present invention, core diameter and plug refractive index have certain relation, for germnium doped core with reference to Fig. 3,4
Rod, the big local plug refractive index of core diameter is low, and the small local plug refractive index of core diameter is high, while increasing core diameter, can reduce plug
Refractive index, reducing core diameter can increase plug refractive index, can be construed to increase core diameter and increased the deposition of SiO2, and mix miscellaneous
The amount of matter GeO2 does not change, it is believed that comparatively impurity be diluted, and all refractive indexes meeting step-downs, fluorine doped plug has
Same change, i.e., plug core diameter and refractive index are related.Plug refractive index is influenced whether during all regulation plug core diameters, is adopted
With the present invention, plug refractive index can independently be changed by the control of flow, compensate this influence.
Claims (9)
1. a kind of method that PCVD depositions make optical fiber prefabricated rod mandrel, is base tube with pure quartz glass bushing pipe, is cleaned through corrosion
After drying, it is clamped on PCVD deposition lathes, bushing pipe is placed in holding furnace through microwave cavity, and two ends are filled by rotary chuck
Folder, holding furnace provides 800 ~ 1200 DEG C of depositional environment temperature, and microwave cavity produces high frequency power to be moved along bushing pipe axial reciprocating
It is dynamic to carry out PCVD depositions, the layer by layer deposition in bushing pipe inwall is realized, the mixed reaction gas for participating in deposition are entered from one end of bushing pipe
Enter in pipe, the other end of bushing pipe is exhaust end, and exhaust end connects vavuum pump by pipeline, it is characterised in that sunk according to upper one
The sectional area distribution of long-pending prefabricated rod mandrel, index distribution and refractive index profile, upper prefabricated rod mandrel different time quilt
The flow of reacting gas is controlled, the difference that the sectional area for needing distribution, index distribution and refractive index profile are actually needed is calculated
The flow by control reacting gas of time, in the different radial and axial position of plug deposition, uses fast flow control module
Accurate Data Flow Control is carried out to a kind of and various of reacting gas with flow measurement module, so as to realize refractive index, the folding of sandwich layer
Penetrate the precise control of deposition in rate section and sectional area pipe；Until deposition is completed, will finally deposit the bushing pipe for finishing and contracted in electric smelting
Collapsing is carried out on stove and obtains solid mandrel.
2. the method that the PCVD depositions as described in claim 1 make optical fiber prefabricated rod mandrel, it is characterised in that carrying out accurately
While flow is controlled, control resonator carries out the essence that resonator moves back and forth speed in the speed of the axially different position of plug
Really control and then precise control plug deposition parameter.
3. the method that the PCVD depositions as described in claim 1 or 2 make optical fiber prefabricated rod mandrel, it is characterised in that described is fast
Fast flow-control module is made up of flow control meter concatenation immediate action valve.
4. the method that the PCVD depositions as described in claim 1 or 2 make optical fiber prefabricated rod mandrel, it is characterised in that described is fast
Fast flow-control module with a flow control meter and connecing by constituting again after flow control meter concatenation immediate action valve.
5. the method that the PCVD depositions as described in claim 3 make optical fiber prefabricated rod mandrel, it is characterised in that described flow
Control module and flow measurement module realize accurate negative feedback control jointly, the final stream detected by flow measurement module
Amount, control function is instead released needs the action of flow-control module, including flow control meter aperture and immediate action valve opening time
Ratio.
6. the method that the PCVD depositions as described in claim 4 make optical fiber prefabricated rod mandrel, it is characterised in that described flow
Control module and flow measurement module realize accurate negative feedback control jointly, the final stream detected by flow measurement module
Amount, control function is instead released needs the action of flow-control module, including flow control meter aperture and immediate action valve opening time
Ratio.
7. the method that the PCVD depositions as described in claim 5 or 6 make optical fiber prefabricated rod mandrel, it is characterised in that described is fast
The reaction time of fast valve is small equal to 500ms.
8. the method that the PCVD depositions as described in claim 1 or 2 make optical fiber prefabricated rod mandrel, it is characterised in that the bushing pipe
Length be 1.0~2.5 meters, the translational speed of microwave cavity is 10~30 meters/min, the high frequency power 6KW of microwave cavity
~20KW.
9. the method that the PCVD depositions as described in claim 1 or 2 make optical fiber prefabricated rod mandrel, it is characterised in that described is anti-
Answering gas includes C2F6, C4F8, GeCl4, SiCl4One or more, and pure oxygen O2.
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| CN201611219873.7A CN106746591A (en) | 2016-12-26 | 2016-12-26 | A kind of method that PCVD depositions make optical fiber prefabricated rod mandrel |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108046583A (en) * | 2017-12-14 | 2018-05-18 | 长飞光纤光缆股份有限公司 | A kind of method for improving PCVD process deposits uniformities |
| CN110002738A (en) * | 2019-03-28 | 2019-07-12 | 上海至纯洁净***科技股份有限公司 | A kind of collapsing method improving prefabricated rod mandrel uniformity |
| CN111676468A (en) * | 2020-06-10 | 2020-09-18 | 长飞光纤光缆股份有限公司 | Optical fiber prefabricated part, multimode optical fiber and preparation method thereof |
| CN112408776A (en) * | 2020-11-24 | 2021-02-26 | 江苏亨通光导新材料有限公司 | Control method for improving parameter uniformity of optical fiber preform |
| CN112408775A (en) * | 2020-11-13 | 2021-02-26 | 烽火通信科技股份有限公司 | Optical fiber perform manufacture equipment |
| CN113292240A (en) * | 2021-06-17 | 2021-08-24 | 长飞光纤光缆股份有限公司 | Deposition method of core layer of graded-index profile optical fiber preform |
| CN114199517A (en) * | 2021-12-10 | 2022-03-18 | 中国电子科技集团公司第四十六研究所 | Device and method for testing axial absorption uniformity of rare earth-doped optical fiber preform |
| CN115490418A (en) * | 2022-09-06 | 2022-12-20 | 烽火通信科技股份有限公司 | Gas sealing device and gas sealing method for smelting-shrinkage furnace |
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Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108046583A (en) * | 2017-12-14 | 2018-05-18 | 长飞光纤光缆股份有限公司 | A kind of method for improving PCVD process deposits uniformities |
| CN110002738A (en) * | 2019-03-28 | 2019-07-12 | 上海至纯洁净***科技股份有限公司 | A kind of collapsing method improving prefabricated rod mandrel uniformity |
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| CN111676468A (en) * | 2020-06-10 | 2020-09-18 | 长飞光纤光缆股份有限公司 | Optical fiber prefabricated part, multimode optical fiber and preparation method thereof |
| CN111676468B (en) * | 2020-06-10 | 2022-03-18 | 长飞光纤光缆股份有限公司 | Optical fiber prefabricated part, multimode optical fiber and preparation method thereof |
| CN112408775A (en) * | 2020-11-13 | 2021-02-26 | 烽火通信科技股份有限公司 | Optical fiber perform manufacture equipment |
| CN112408776A (en) * | 2020-11-24 | 2021-02-26 | 江苏亨通光导新材料有限公司 | Control method for improving parameter uniformity of optical fiber preform |
| CN113292240A (en) * | 2021-06-17 | 2021-08-24 | 长飞光纤光缆股份有限公司 | Deposition method of core layer of graded-index profile optical fiber preform |
| CN113292240B (en) * | 2021-06-17 | 2022-06-17 | 长飞光纤光缆股份有限公司 | Deposition method of core layer of graded-index profile optical fiber preform |
| CN114199517A (en) * | 2021-12-10 | 2022-03-18 | 中国电子科技集团公司第四十六研究所 | Device and method for testing axial absorption uniformity of rare earth-doped optical fiber preform |
| CN115490418A (en) * | 2022-09-06 | 2022-12-20 | 烽火通信科技股份有限公司 | Gas sealing device and gas sealing method for smelting-shrinkage furnace |
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