CN106738392A - Turn to multi-line cutting method and equipment - Google Patents
Turn to multi-line cutting method and equipment Download PDFInfo
- Publication number
- CN106738392A CN106738392A CN201611089672.XA CN201611089672A CN106738392A CN 106738392 A CN106738392 A CN 106738392A CN 201611089672 A CN201611089672 A CN 201611089672A CN 106738392 A CN106738392 A CN 106738392A
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- Prior art keywords
- wire saw
- line cutting
- line
- cut
- workpiece
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
- B28D5/042—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with blades or wires mounted in a reciprocating frame
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D7/00—Accessories specially adapted for use with machines or devices of the preceding groups
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D7/00—Accessories specially adapted for use with machines or devices of the preceding groups
- B28D7/02—Accessories specially adapted for use with machines or devices of the preceding groups for removing or laying dust, e.g. by spraying liquids; for cooling work
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
Multi-line cutting method and equipment are turned to the invention discloses one kind, the equipment is multi-line cutting machine, including square multi-wire saw substrate and workbench, cutting is combined by 2 or 2 above-described multi-line cutting machines, compared with common multi-line cutting method and equipment, fly-cutting is capable of achieving, the time of auxiliary link in the middle of saving, shorten the material cycling time on the whole, and reduce bad, the improve product quality being likely to result in during material cycling.
Description
Technical field
The invention belongs to field of machining, more particularly to a kind of steering multi-line cutting method and equipment.
Background technology
At present, multi-line cutting machine has been widely used for optical glass, quartz crystal, semi-conducting material, special cermacis, indigo plant
Hard crisp and precious materials the processing such as jewel, rare metal and alloy, compared with traditional inside and outside diameter slicer, because it has
Material less investment, surface damage is small, operating cost is low, it is high in machining efficiency the advantages of, at nearly 1 year, also progressively in magnetic material
Processing industry is carried out.
The initial blank of magnetic material is generally square, and workpiece is bonded in one by using 502 glue or other bonding agents
Rise be processed, need to carry out removing glue oil removing to workpiece in pyrosol after machining, therefore, magnetic material it is processed
Journey is generally:1 → removing glue of section oil removing 1 → grinding, 1 → section, 2 → removing glue oil removing 2 → grinding, 2 → section, 3 → removing glue oil removing 3 →
Grinding 3.The time that removing glue oil removal process needs is more long, and this results in the increase of material cycling time, meanwhile, because of magnetic material,
Especially NdFeB magnetic materials, with hard crisp physical characteristic, repeatedly flow between section, grinding, three operations of removing glue oil removing
Turn, cause to collapse, the probability of the bad order such as broken is greatly increased.
Therefore, needing offer one kind badly can both shorten the material cycling time, avoid material repeatedly to circulate so as to improve product again
The method of quality.
The content of the invention
It is an object of the invention to solve at least the above, and provide the advantage that at least will be described later.
Multi-line cutting method is turned to the invention provides one kind, it is comprised the following steps:
Step one provides a square multi-wire saw substrate, and bonding one is buffered on the square multi-wire saw substrate
Material plate;
The obtained square multi-wire saw substrate for being bonded with buffering material plate of step one is carried out first laterally by step 2
Being rotated by 90 ° after multi-wire saw carries out first longitudinal direction multi-wire saw, and the described first horizontal multi-wire saw depth, the first longitudinal direction are more
Thickness of the wire cutting depth no more than the buffering material plate;
Step 3 is bonded with buffering material plate by what the workpiece to be processed was bonded in that step 2 obtains by cutting
On square multi-wire saw substrate, and be rotated by 90 ° after the second horizontal multi-wire saw carrying out second longitudinal direction multi-wire saw, wherein
Described second horizontal multi-wire saw uses the first multi-line cutting machine with the described first horizontal multi-wire saw, and the second longitudinal direction is more
Wire cutting uses the second multi-line cutting machine with the first longitudinal direction multi-wire saw.
Preferably, in described steering multi-line cutting method, between the line of cut of first multi-line cutting machine away from
From the one of editing objective size equal to the workpiece to be processed;Between the line of cut of second multi-line cutting machine away from
From the other in which editing objective size equal to the workpiece to be processed.
Preferably, in described steering multi-line cutting method, by one of editing objective size and another processing
Being bonded with by cutting that the cut surface to be diverted of the workpiece to be processed where target size is obtained with the step 2
Buffer the square multi-wire saw substrate bonding of material plate.
Preferably, in described steering multi-line cutting method, in the step 3, the workpiece to be processed is in step 2
What is obtained is bonded with rectangular array distribution on the square multi-wire saw substrate of buffering material plate by cutting.
Preferably, in described steering multi-line cutting method, the thickness of the workpiece to be processed is 2mm-20mm.
Preferably, in described steering multi-line cutting method, the described first horizontal multi-wire saw, second transverse direction are more
Wire cutting, the first longitudinal direction multi-wire saw, the cutting speed of the second longitudinal direction multi-wire saw are 10mm/h-50mm/h.
Preferably, described steering multi-line cutting method also includes step 4, the preliminary working workpiece that step 3 is obtained
Be bonded on a multi-wire saw substrate after removing glue oil removing carrying out multi-wire saw again, secondary removing glue is carried out afterwards and is removed
Oil obtains finished product.
Preferably, in described steering multi-line cutting method, the workpiece to be processed is neodymium iron boron magnetic body, monocrystalline silicon
One kind in rod, monocrystal silicon, polycrystalline silicon rod, polycrystal silicon ingot.
Preferably, in described steering multi-line cutting method,
The obtained square multi-wire saw substrate for being bonded with buffering material plate of step one is placed in the step 2
The operating position of the first multi-line cutting machine be placed on transmission device after the first horizontal multi-wire saw making it be rotated by 90 ° and turn
The operating position for being transported to the second multi-line cutting machine carries out first longitudinal direction multi-wire saw;
The square multi-wire saw substrate that workpiece to be processed will be bonded with the step 3 obtained in step 3 is placed on
The operating position of the first multi-line cutting machine be placed on transmission device after the second horizontal multi-wire saw making it be rotated by 90 ° and turn
The operating position for being transported to the second multi-line cutting machine carries out second longitudinal direction multi-wire saw;
The transmission device includes two conveyer belts being arranged in a mutually vertical manner, and is separately positioned on two heads of conveyer belt
The square multi-wire saw substrate is placed on institute by the grasping mechanism at end, the grasping mechanism from after the crawl of the first multi-line cutting machine
State on conveyer belt, when the head end of another conveyer belt is sent to, another grasping mechanism is captured to the second multi-line cutting machine.
The present invention also provides a kind of steering multi-wire saw equipment, and it includes at least one multi-line cutting machine, the multi-wire cutting
Cutting mill includes:
It is wrapped in the parallel cut on sheave;
Workbench below the line of cut, its be used to fixing the square multi-wire saw substrate and drive its to
Upper motion carries out multi-wire saw;
Leakage box above the parallel cut, it is multi-thread more than the square that its bottom is provided with multiple length
The leakage seam of cutting substrate;
Leakage pipe above the leakage box, it is used to spray leakage, and the leakage is stitched by the leakage and flowed to
On the parallel cut.
Preferably, in described steering multi-wire saw equipment, a diameter of 0.1mm-0.3mm of the parallel cut,
The leakage pipe is 2-3 roots;
The parallel cut is steel wire, and the leakage is suspension mortar;Or the parallel cut is coated with for surface
The steel wire of diamond particles, the leakage is coolant.
Beneficial effects of the present invention:
The multi-line cutting method and multi-line cutting machine of the steering combination cutting that the present invention is provided, using square workbench and
Working plate, square workpiece is bonded on working plate, first processes the length direction of square workpiece, after the completion of length direction cutting,
Directly square working plate is turned to, the width of square workpiece is reprocessed, so, so that it may save in conventional cutting method
The removing glue oil removal process after length direction has been cut, the material cycling time saved during these, and reduce at these
During the bad probability that is caused to material, so as to realize shortening material cycling time, improve product quality.
Further advantage of the invention, target and feature embody part by following explanation, and part will also be by this
The research and practice of invention and be understood by the person skilled in the art.
Brief description of the drawings
Workpiece to be processed, buffering material plate in the steering multi-line cutting method that Fig. 1 is provided for the present invention, square are multi-thread
Position relationship schematic diagram between cutting substrate and workbench;
The multi-line cutting machine schematic diagram turned in multi-line cutting method that Fig. 2 is provided for the present invention;
Workpiece to be processed is multi-thread in square in the one embodiment for the steering multi-line cutting method that Fig. 3 is provided for the present invention
Schematic diagram on cutting substrate;
Workpiece to be processed is more in square in another embodiment for the steering multi-line cutting method that Fig. 4 is provided for the present invention
Schematic diagram on wire cutting substrate.
Specific embodiment
The present invention is described in further detail below in conjunction with the accompanying drawings, to make those skilled in the art with reference to specification text
Word can be implemented according to this.
It should be appreciated that it is used herein such as " have ", "comprising" and " including " term do not allot one or many
The presence or addition of individual other elements or its combination.
As shown in figure 1, the present invention provides a kind of steering multi-line cutting method, it is parallel using many be wound on sheave
Cutting wire cutting workpiece to be processed 1, workpiece to be processed 1 is located at line of cut lower section.The workpiece to be processed 1 is adhered to buffering
On material plate 2, it is to avoid line of cut switches to square multi-wire saw substrate 3 so that multi-wire saw substrate 3 is reusable.It is described
Buffering material plate 2 is adhered on square multi-wire saw substrate 3, and the square multi-wire saw substrate 3 is positioned over workbench 4
On.
Above-mentioned steering multi-line cutting method, the workpiece is NdFeB magnet pieces or silicon single crystal rod (ingot), polycrystalline silicon rod
(ingot).
Above-mentioned steering multi-line cutting method, workpiece rectangular array arrangement, the cutting thickness of the workpiece for 2mm~
20mm。
Above-mentioned steering multi-line cutting method, the buffering material plate is glass or asbestos board etc., and size is suitable with working plate.
Above-mentioned steering multi-line cutting method, the multi-wire saw substrate shape for square, material be metal, plastics or its
His material.
Above-mentioned steering multi-line cutting method, the cutting speed in cutting process keeps constant, and the cutting speed scope exists
10mm/h~50mm/h.
Above-mentioned steering multi-line cutting method is, it is necessary to 1 or more than 1 multi-line cutting machine combination realization cutting.
What is used in the multi-line cutting method that cutting is combined another object of the present invention is to provide a kind of above-mentioned steering is more
Wire cutting machine.
The technical scheme that the present invention is provided is as follows:
As shown in Fig. 2 the multi-line cutting machine, including:The parallel cut 6 on sheave 5 is wound in, positioned at the line of cut
The workbench of lower section, the leakage box 7 above the line of cut, the leakage pipe 8 above the leakage box.
Above-mentioned multi-line cutting machine, the sheave quantity is 3, and each sheave surface is polyurethane coating, the polyurethane
Multiple slot pitches are outputed on coating uniformly for the V-groove of line of cut motion.
Above-mentioned multi-line cutting machine, the steel wire that the line of cut is coated with diamond particles for steel wire or surface is (hereinafter referred to as golden
Firm line), a diameter of 0.1mm~0.3mm.
Above-mentioned multi-line cutting machine, the leakage pipe quantity 2~3, the leakage pipe can spray suspension mortar, coordinate steel wire
Use, or spraying cooling liquid, coordinate diamond wire to use.
There are multiple length in above-mentioned multi-line cutting machine, the leakage cassette bottom portion more than the gap 9 of the working plate width, makes institute
Flow on line of cut with stating mortar or coolant continuous uniform.
Above-mentioned multi-line cutting machine, the workbench need to agree with square multi-wire saw substrate, and move from bottom to top.
Embodiment 1
Multi-line cutting machine includes three sheaves, and several lines of cut arranged in parallel are wound on sheave, positioned at line of cut lower section
Workbench, the leakage pipe above line of cut.
Wherein, the surface of each sheave is coated with polyurethane coating, and the uniform V of multiple slot pitches is outputed on polyurethane coating
Type groove.The drive devices such as another guide wheel, swing rod, take-up pulley, actinobacillus wheel equipped with for line of cut motion.
Workbench is driven by screw mandrel and servomechanism installation, can from bottom to top be moved by the speed of setting.
Drawing liquid pump provides power, mortar or coolant is sprayed from leakage pipe, in flowing to leakage box, then by leakage box
Gap is flowed uniformly on line of cut.
Dimensional units as described below are mm, and multi-wire saw substrate size is 260*260*15, the size of square workpiece a with
As a example by 46*43*38, correspondingly-sized is 22*10*5 after cutting, and the present invention realizes that the multi-line cutting method for turning to combination cutting is specific
Implement as follows:1st, buffering material plate is bonded on multi-wire saw substrate, the use of cutting thickness is respectively the two of 22mm and 10mm
Platform multi-line cutting machine, the cut channel that depth is 1~2mm is cut out on buffering material plate;2nd, square workpiece a is glued according to Fig. 3 modes
It is connected on buffering material plate;3rd, by bonding workpiece, it is placed on the multi-wire saw working bench that cutting thickness is 22mm;4、
Cutting parameter is set, including when cutting-height, linear velocity, the new line amount of feeding, the workbench rate of climb, cutting line tension, extinguishing arc
Between etc.;5th, start multi-line cutting machine, workbench is moved upwards, until cutting is completed;6th, the workpiece for having cut 22 directions is taken out
And multi-wire saw substrate entirety, multi-wire saw substrate is turned to, unnecessary part before and after removing, such as Fig. 2 is placed on cutting thickness
On the multi-wire saw working bench of 10mm, to be cut according to step 4,5, until cutting is completed;7th, above-mentioned cutting is completed
Workpiece take out, carry out removing glue oil removing, grinding;8th, it is the above-mentioned workpiece of 22*10*38 by size, it is 5mm's to be placed on cutting thickness
On multi-wire saw working bench, 5 are cut into by 38, then removing glue oil removing, grinding.
Above example 1 completes three cuttings of direction size, it is necessary to three multi-line cutting machines.Above example 1 can be with
Any two of which direction size is first cut, then cuts last direction size.
Following table is that 15 block sizes are 46*43*38 squares work piece cut into 840 pieces of each operations of 22*10*5 by embodiment 1
Process time contrasts, it is known that embodiment 1 can time-consuming about 24%:
Embodiment 2
Embodiment 2 is essentially identical with the multi-line cutting method and multi-line cutting machine of embodiment 1, its difference such as Fig. 4 institutes
Show, the square two of which direction size after cutting is identical, as a example by the size 46*46*38 of square workpiece b, correspondence chi after cutting
Very little is 22*22*5, first cuts 22 and 22 direction sizes, then cut 5 direction sizes.
Above example 2 completes three cuttings of direction size, it is only necessary to two multi-line cutting machines.
Following table is that 9 block sizes are 46*46*38 squares work piece cut into 252 pieces of each operations of 22*22*5 by embodiment 2
Process time contrasts, it is known that embodiment 2 can time-consuming about 24%:
Embodiment 3
Embodiment 3 is essentially identical with the multi-line cutting method and multi-line cutting machine of embodiment 1, and its difference is:Side
One of direction size of block workpiece need not cut, and by taking 46*43*15 as an example, correspondingly-sized is 22*10*15 after cutting, only
Need to cut 22 and 10 direction sizes.
Above example 3 completes the cutting of both direction size, it is only necessary to two multi-line cutting machines.
Following table is that 15 block sizes are 46*43*15 squares work piece cut into 120 pieces of each operations of 22*10*15 by embodiment 3
Process time contrast, it is known that embodiment 3 can time-consuming about 33%:
Embodiment 4
Embodiment 4 is essentially identical with the multi-line cutting method and multi-line cutting machine of embodiment 2, and its difference is:Side
One of direction size of block workpiece need not cut, and by taking 46*46*15 as an example, correspondingly-sized is 22*22*15 after cutting, only
Need to cut 22 and 22 direction sizes.
Above example 4 completes the cutting of both direction size, it is only necessary to a multi-line cutting machine.
Following table is that 9 block sizes are 46*46*15 squares work piece cut into 36 pieces of each operations of 22*22*15 by embodiment 4
Process time contrasts, it is known that embodiment 4 can time-consuming about 33%:
Although embodiment of the present invention is disclosed as above, it is not restricted to listed in specification and implementation method
With, it can be applied to various suitable the field of the invention completely, for those skilled in the art, can be easily
Other modification is realized, therefore under the universal limited without departing substantially from claim and equivalency range, the present invention is not limited
In specific details and shown here as the legend with description.
Claims (10)
1. multi-line cutting method is turned to, it is characterised in that comprised the following steps:
Step one provides a square multi-wire saw substrate, and bonding one buffers material on the square multi-wire saw substrate
Plate;
It is laterally multi-thread that the obtained square multi-wire saw substrate for being bonded with buffering material plate of step one is carried out first by step 2
Being rotated by 90 ° after cutting carries out first longitudinal direction multi-wire saw, the described first horizontal multi-wire saw depth, the first longitudinal direction multi-wire cutting
Cut thickness of the depth no more than the buffering material plate;
The workpiece to be processed is bonded in the pros for being bonded with buffering material plate by cutting that step 2 is obtained by step 3
On shape multi-wire saw substrate, and be rotated by 90 ° after the second horizontal multi-wire saw carrying out second longitudinal direction multi-wire saw, wherein described
Second horizontal multi-wire saw uses the first multi-line cutting machine, the second longitudinal direction multi-wire cutting with the described first horizontal multi-wire saw
Cut and use the second multi-line cutting machine with the first longitudinal direction multi-wire saw.
2. it is as claimed in claim 1 to turn to multi-line cutting method, it is characterised in that the line of cut of first multi-line cutting machine
The distance between equal to the workpiece to be processed one of editing objective size;The line of cut of second multi-line cutting machine
The distance between equal to the workpiece to be processed other in which editing objective size.
3. it is as claimed in claim 2 to turn to multi-line cutting method, it is characterised in that by one of editing objective size and separately
The process cutting that the cut surface to be diverted of the workpiece to be processed where one editing objective size is obtained with the step 2
Be bonded with buffering material plate square multi-wire saw substrate bonding.
4. multi-line cutting method is turned to as claimed in claim 2 or claim 3, it is characterised in that described to be processed in the step 3
Workpiece is bonded with rectangular array on the square multi-wire saw substrate of buffering material plate what step 2 was obtained by cutting
Distribution.
5. it is as claimed in claim 4 to turn to multi-line cutting method, it is characterised in that the thickness of the workpiece to be processed is 2mm-
20mm。
6. it is as claimed in claim 5 to turn to multi-line cutting method, it is characterised in that the described first horizontal multi-wire saw, described
Second horizontal multi-wire saw, the first longitudinal direction multi-wire saw, the cutting speed of the second longitudinal direction multi-wire saw are 10mm/h-
50mm/h。
7. it is as claimed in claim 6 to turn to multi-line cutting method, it is characterised in that also including step 4, step 3 to be obtained
Preliminary working workpiece be bonded on a multi-wire saw substrate after removing glue oil removing carrying out multi-wire saw again, it is laggard
The secondary removing glue oil removing of row obtains finished product.
8. it is as claimed in claim 7 to turn to multi-line cutting method, it is characterised in that the workpiece to be processed is neodymium-iron-boron
One kind in body, silicon single crystal rod, monocrystal silicon, polycrystalline silicon rod, polycrystal silicon ingot.
It is 9. as claimed in claim 8 to turn to multi-line cutting method, it is characterised in that
The obtained square multi-wire saw substrate for being bonded with buffering material plate of step one is placed on first in the step 2
The operating position of multi-line cutting machine be placed on transmission device after the first horizontal multi-wire saw making it be rotated by 90 ° and be transported to
The operating position of the second multi-line cutting machine carries out first longitudinal direction multi-wire saw;
The square multi-wire saw substrate that workpiece to be processed will be bonded with the step 3 obtained in step 3 is placed on first
The operating position of multi-line cutting machine be placed on transmission device after the second horizontal multi-wire saw making it be rotated by 90 ° and be transported to
The operating position of the second multi-line cutting machine carries out second longitudinal direction multi-wire saw;
The transmission device includes two conveyer belts being arranged in a mutually vertical manner, and is separately positioned on two head ends of conveyer belt
The square multi-wire saw substrate is placed on the biography by grasping mechanism, the grasping mechanism from after the crawl of the first multi-line cutting machine
Send and take, when the head end of another conveyer belt is sent to, another grasping mechanism is captured to the second multi-line cutting machine.
10. multi-wire saw equipment is turned to, it is characterised in that
Including at least one multi-line cutting machine, the multi-line cutting machine includes:
It is wrapped in the parallel cut on sheave;
Workbench below the line of cut, it is used to fix the square multi-wire saw substrate and drives its upward fortune
It is dynamic to carry out multi-wire saw;
Leakage box above the parallel cut, its bottom is provided with multiple length more than the square multi-wire saw
The leakage seam of substrate;
Leakage pipe above the leakage box, it is used to spray leakage, and the leakage is flowed to described by leakage seam
On parallel cut;
Wherein, a diameter of 0.1mm-0.3mm of the parallel cut, the leakage pipe is 2-3 roots;
The parallel cut is steel wire, and the leakage is suspension mortar;Or the parallel cut is coated with Buddha's warrior attendant for surface
The steel wire of stone particle, the leakage is coolant.
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CN201611089672.XA CN106738392B (en) | 2016-12-01 | 2016-12-01 | Turn to multi-line cutting method and equipment |
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CN106738392B CN106738392B (en) | 2019-02-19 |
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
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CN108098550A (en) * | 2017-12-18 | 2018-06-01 | 沈阳中北真空技术有限公司 | A kind of cutting method of diamond wire saw process equipment and neodymium iron boron magnetic body |
CN108335817A (en) * | 2018-03-30 | 2018-07-27 | 廊坊京磁精密材料有限公司 | The processing method of sintered NdFeB |
CN109176929A (en) * | 2018-09-14 | 2019-01-11 | 中国航空工业集团公司北京长城航空测控技术研究所 | A method of segmentation chip being miniaturized using diamond wire saw machine |
CN113698083A (en) * | 2021-09-26 | 2021-11-26 | 浙江美迪凯光学半导体有限公司 | Thick glass accurate positioning cutting process |
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US4574769A (en) * | 1984-02-18 | 1986-03-11 | Ishikawa Ken Ichi | Multi-wire vibratory cutting method and apparatus |
CN102126261A (en) * | 2010-06-10 | 2011-07-20 | 常州天合光能有限公司 | Wire saw with cutting function |
CN104908165B (en) * | 2014-03-11 | 2017-06-20 | 晶科能源有限公司 | A kind of line cuts open machine and its mortar pad |
CN204019765U (en) * | 2014-07-22 | 2014-12-17 | 上海日进机床有限公司 | Multi-wire saw equipment |
CN105150397B (en) * | 2015-10-27 | 2017-06-06 | 天津英利新能源有限公司 | It is a kind of to reduce glass and technique for sticking that silico briquette cuts chipping |
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CN108098550A (en) * | 2017-12-18 | 2018-06-01 | 沈阳中北真空技术有限公司 | A kind of cutting method of diamond wire saw process equipment and neodymium iron boron magnetic body |
CN108098550B (en) * | 2017-12-18 | 2020-06-23 | 沈阳中北真空技术有限公司 | Diamond wire cutting machining equipment and cutting method of neodymium iron boron magnet |
CN108335817A (en) * | 2018-03-30 | 2018-07-27 | 廊坊京磁精密材料有限公司 | The processing method of sintered NdFeB |
CN109176929A (en) * | 2018-09-14 | 2019-01-11 | 中国航空工业集团公司北京长城航空测控技术研究所 | A method of segmentation chip being miniaturized using diamond wire saw machine |
CN109176929B (en) * | 2018-09-14 | 2020-08-07 | 中国航空工业集团公司北京长城航空测控技术研究所 | Method for micro-dividing wafer by using diamond wire cutting machine |
CN113698083A (en) * | 2021-09-26 | 2021-11-26 | 浙江美迪凯光学半导体有限公司 | Thick glass accurate positioning cutting process |
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