CN106731611A - 一种多晶硅废气处理与余热利用装置及工艺 - Google Patents
一种多晶硅废气处理与余热利用装置及工艺 Download PDFInfo
- Publication number
- CN106731611A CN106731611A CN201710016760.5A CN201710016760A CN106731611A CN 106731611 A CN106731611 A CN 106731611A CN 201710016760 A CN201710016760 A CN 201710016760A CN 106731611 A CN106731611 A CN 106731611A
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- waste gas
- eluting column
- heat
- alkali lye
- pipe
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Links
- 229910021420 polycrystalline silicon Inorganic materials 0.000 title claims abstract description 39
- 229920005591 polysilicon Polymers 0.000 title claims abstract description 35
- 238000000034 method Methods 0.000 title claims abstract description 20
- 239000002912 waste gas Substances 0.000 claims abstract description 141
- 239000003513 alkali Substances 0.000 claims abstract description 63
- 238000006243 chemical reaction Methods 0.000 claims abstract description 44
- 239000007789 gas Substances 0.000 claims abstract description 44
- 230000007246 mechanism Effects 0.000 claims abstract description 19
- 238000009833 condensation Methods 0.000 claims abstract description 17
- 230000005494 condensation Effects 0.000 claims abstract description 17
- 238000004064 recycling Methods 0.000 claims abstract description 14
- 239000005046 Chlorosilane Substances 0.000 claims abstract description 13
- KOPOQZFJUQMUML-UHFFFAOYSA-N chlorosilane Chemical compound Cl[SiH3] KOPOQZFJUQMUML-UHFFFAOYSA-N 0.000 claims abstract description 13
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 claims abstract description 8
- 239000003546 flue gas Substances 0.000 claims abstract description 8
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 60
- 238000004519 manufacturing process Methods 0.000 claims description 23
- 238000009413 insulation Methods 0.000 claims description 8
- 239000007788 liquid Substances 0.000 claims description 5
- 239000002918 waste heat Substances 0.000 claims description 4
- 239000000203 mixture Substances 0.000 claims description 3
- 239000000376 reactant Substances 0.000 claims description 3
- 238000011084 recovery Methods 0.000 claims description 3
- 238000005406 washing Methods 0.000 claims description 3
- 238000012546 transfer Methods 0.000 claims description 2
- 238000003912 environmental pollution Methods 0.000 abstract description 5
- 238000005265 energy consumption Methods 0.000 abstract description 3
- 229910003818 SiH2Cl2 Inorganic materials 0.000 description 9
- 230000008569 process Effects 0.000 description 8
- 229910003910 SiCl4 Inorganic materials 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 230000009467 reduction Effects 0.000 description 5
- 229910003822 SiHCl3 Inorganic materials 0.000 description 4
- SLLGVCUQYRMELA-UHFFFAOYSA-N chlorosilicon Chemical compound Cl[Si] SLLGVCUQYRMELA-UHFFFAOYSA-N 0.000 description 4
- 238000004880 explosion Methods 0.000 description 4
- 238000005984 hydrogenation reaction Methods 0.000 description 4
- FDNAPBUWERUEDA-UHFFFAOYSA-N silicon tetrachloride Chemical compound Cl[Si](Cl)(Cl)Cl FDNAPBUWERUEDA-UHFFFAOYSA-N 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 239000000498 cooling water Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- 239000002671 adjuvant Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- FFBHFFJDDLITSX-UHFFFAOYSA-N benzyl N-[2-hydroxy-4-(3-oxomorpholin-4-yl)phenyl]carbamate Chemical compound OC1=C(NC(=O)OCC2=CC=CC=C2)C=CC(=C1)N1CCOCC1=O FFBHFFJDDLITSX-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010828 elution Methods 0.000 description 1
- 239000002360 explosive Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 231100000614 poison Toxicity 0.000 description 1
- 230000007096 poisonous effect Effects 0.000 description 1
- 239000002893 slag Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 229910052882 wollastonite Inorganic materials 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
- B01D53/77—Liquid phase processes
- B01D53/78—Liquid phase processes with gas-liquid contact
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/002—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by condensation
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/08—Compounds containing halogen
- C01B33/107—Halogenated silanes
- C01B33/1071—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28B—STEAM OR VAPOUR CONDENSERS
- F28B1/00—Condensers in which the steam or vapour is separate from the cooling medium by walls, e.g. surface condenser
- F28B1/02—Condensers in which the steam or vapour is separate from the cooling medium by walls, e.g. surface condenser using water or other liquid as the cooling medium
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28C—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA COME INTO DIRECT CONTACT WITHOUT CHEMICAL INTERACTION
- F28C3/00—Other direct-contact heat-exchange apparatus
- F28C3/06—Other direct-contact heat-exchange apparatus the heat-exchange media being a liquid and a gas or vapour
- F28C3/08—Other direct-contact heat-exchange apparatus the heat-exchange media being a liquid and a gas or vapour with change of state, e.g. absorption, evaporation, condensation
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P20/00—Technologies relating to chemical industry
- Y02P20/10—Process efficiency
- Y02P20/129—Energy recovery, e.g. by cogeneration, H2recovery or pressure recovery turbines
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Environmental & Geological Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Mechanical Engineering (AREA)
- Analytical Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Inorganic Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Biomedical Technology (AREA)
- Treating Waste Gases (AREA)
Abstract
Description
Claims (6)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201710016760.5A CN106731611A (zh) | 2017-01-10 | 2017-01-10 | 一种多晶硅废气处理与余热利用装置及工艺 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201710016760.5A CN106731611A (zh) | 2017-01-10 | 2017-01-10 | 一种多晶硅废气处理与余热利用装置及工艺 |
Publications (1)
Publication Number | Publication Date |
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CN106731611A true CN106731611A (zh) | 2017-05-31 |
Family
ID=58948769
Family Applications (1)
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---|---|---|---|
CN201710016760.5A Pending CN106731611A (zh) | 2017-01-10 | 2017-01-10 | 一种多晶硅废气处理与余热利用装置及工艺 |
Country Status (1)
Country | Link |
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CN (1) | CN106731611A (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109678158A (zh) * | 2017-10-19 | 2019-04-26 | 新特能源股份有限公司 | 多晶硅生产过程中的尾气处理方法及*** |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN201680393U (zh) * | 2010-08-18 | 2010-12-22 | 肖成三 | 高效节能烟囱 |
CN102168888A (zh) * | 2011-02-25 | 2011-08-31 | 清华大学 | 一种接触式低温烟气余热深度回收利用*** |
CN201988383U (zh) * | 2011-01-21 | 2011-09-28 | 潍坊泉鑫化工有限公司 | 反应釜防回流放空装置 |
CN203090730U (zh) * | 2012-11-23 | 2013-07-31 | 昆明冶研新材料股份有限公司 | 一种疏通放空管内积渣的装置 |
CN105084369A (zh) * | 2014-04-23 | 2015-11-25 | 新特能源股份有限公司 | 一种含氯硅烷废气的回收处理装置 |
CN206424773U (zh) * | 2017-01-10 | 2017-08-22 | 乐山职业技术学院 | 一种多晶硅废气处理与余热利用装置 |
-
2017
- 2017-01-10 CN CN201710016760.5A patent/CN106731611A/zh active Pending
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN201680393U (zh) * | 2010-08-18 | 2010-12-22 | 肖成三 | 高效节能烟囱 |
CN201988383U (zh) * | 2011-01-21 | 2011-09-28 | 潍坊泉鑫化工有限公司 | 反应釜防回流放空装置 |
CN102168888A (zh) * | 2011-02-25 | 2011-08-31 | 清华大学 | 一种接触式低温烟气余热深度回收利用*** |
CN203090730U (zh) * | 2012-11-23 | 2013-07-31 | 昆明冶研新材料股份有限公司 | 一种疏通放空管内积渣的装置 |
CN105084369A (zh) * | 2014-04-23 | 2015-11-25 | 新特能源股份有限公司 | 一种含氯硅烷废气的回收处理装置 |
CN206424773U (zh) * | 2017-01-10 | 2017-08-22 | 乐山职业技术学院 | 一种多晶硅废气处理与余热利用装置 |
Non-Patent Citations (2)
Title |
---|
戚恒瑜主编, 西安:西北工业大学出版社 * |
戚桓瑜主编: "《光伏材料制备与加工》", 30 April 2015, 西安:西北工业大学出版社 * |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109678158A (zh) * | 2017-10-19 | 2019-04-26 | 新特能源股份有限公司 | 多晶硅生产过程中的尾气处理方法及*** |
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SE01 | Entry into force of request for substantive examination | ||
CB03 | Change of inventor or designer information | ||
CB03 | Change of inventor or designer information |
Inventor after: Hu Xiaodong Inventor after: Jiang Ximeng Inventor after: Cui Mingxian Inventor after: Jia Xi Inventor after: Zhang Dong Inventor before: Hu Xiaodong Inventor before: Jiang Ximeng Inventor before: Cui Mingxian Inventor before: Jia Xi Inventor before: Zhang Dong |
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RJ01 | Rejection of invention patent application after publication | ||
RJ01 | Rejection of invention patent application after publication |
Application publication date: 20170531 |