CN106670149B - Cleaning brush driving shaft structure of post-CMP cleaning equipment and use method - Google Patents
Cleaning brush driving shaft structure of post-CMP cleaning equipment and use method Download PDFInfo
- Publication number
- CN106670149B CN106670149B CN201611208175.7A CN201611208175A CN106670149B CN 106670149 B CN106670149 B CN 106670149B CN 201611208175 A CN201611208175 A CN 201611208175A CN 106670149 B CN106670149 B CN 106670149B
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- China
- Prior art keywords
- pressure spring
- cleaning brush
- drive shaft
- driving
- unit
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000004140 cleaning Methods 0.000 title claims abstract description 54
- 238000000034 method Methods 0.000 title claims abstract description 14
- 230000005540 biological transmission Effects 0.000 claims abstract description 6
- 238000010276 construction Methods 0.000 claims description 14
- 230000008878 coupling Effects 0.000 claims description 12
- 238000010168 coupling process Methods 0.000 claims description 12
- 238000005859 coupling reaction Methods 0.000 claims description 12
- 239000007787 solid Substances 0.000 claims 1
- 239000003638 chemical reducing agent Substances 0.000 abstract 2
- 230000004888 barrier function Effects 0.000 abstract 1
- 238000002955 isolation Methods 0.000 abstract 1
- 230000000149 penetrating effect Effects 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 5
- 230000035515 penetration Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 230000008595 infiltration Effects 0.000 description 1
- 238000001764 infiltration Methods 0.000 description 1
- 238000003032 molecular docking Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B1/00—Cleaning by methods involving the use of tools
- B08B1/30—Cleaning by methods involving the use of tools by movement of cleaning members over a surface
- B08B1/32—Cleaning by methods involving the use of tools by movement of cleaning members over a surface using rotary cleaning members
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B1/00—Cleaning by methods involving the use of tools
- B08B1/10—Cleaning by methods involving the use of tools characterised by the type of cleaning tool
- B08B1/12—Brushes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16D—COUPLINGS FOR TRANSMITTING ROTATION; CLUTCHES; BRAKES
- F16D3/00—Yielding couplings, i.e. with means permitting movement between the connected parts during the drive
- F16D3/16—Universal joints in which flexibility is produced by means of pivots or sliding or rolling connecting parts
- F16D3/20—Universal joints in which flexibility is produced by means of pivots or sliding or rolling connecting parts one coupling part entering a sleeve of the other coupling part and connected thereto by sliding or rolling members
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Cleaning In General (AREA)
Abstract
A cleaning brush driving shaft structure of post-CMP cleaning equipment and a using method thereof are provided, the structure comprises a driving unit and a driving shaft unit which is in sleeved combination with the driving unit. The driving unit comprises a motor and a speed reducer, a motor base, a straight joint and a fixed sleeve. The drive shaft unit comprises a drive shaft, a pressure spring, a lock pin and a centering clamping sleeve. The front part of the driving shaft penetrates into the centering clamping sleeve, the centering clamping sleeve and the driving shaft are positioned in a shaft hole sliding mode and are in a regular quadrilateral shaft hole penetrating type uniform force transmission mode, and the rear part of the driving shaft penetrates into a fixing sleeve and a motor base of the driving unit and is connected with an output shaft of the motor and the reducer in series to be integrated and locked. The invention directly integrates the telescopic centering clamping function with the driving unit, has compact and simple structure and is convenient for clamping. The four-direction uniform force transmission and the axial sliding of the driving shaft unit can obviously improve the clamping concentricity of the driving shaft unit. The drive unit introduces a gas barrier isolation function to ensure the tightness. The comprehensive advantages of the measures can effectively and conveniently carry out telescopic centering clamping on the cleaning brush.
Description
Technical field
The present invention relates in cleaning equipment after a kind of CMP cleaning brush driving axle construction and the driving axle construction make
Use method.
Background technique
CMP (chemical mechanical Polishing) cleaning equipment afterwards is carried out in electronic device wafer surface
After high-precision polishing treatment, the equipment of progress surface accurate cleaning.After CMP in cleaning process, pass through brush combination spray medium
It is cleaned, is the effective means for removing wafer surfaces of contaminant.
Cleaning equipment prototype after current visible foreign countries CMP, drive shaft is to the telescopic snap fit of cleaning brush are as follows: with it is clear
It scrubs the clamping of lazy axis and infiltration channel is integrally realized, cause that structure is complicated, function is excessively concentrated, it is especially telescopic with cleaning brush
The drive shaft of docking causes concentricity bias larger using four directions positioning, bad to cleaning brush snap effect, and cleaning brush is replaced not
It is convenient.
Summary of the invention
The present invention provides cleaning equipment cleaning brush driving axle construction and application method after a kind of CMP, after solving existing CMP
Structure is complicated for the cleaning brush drive shaft of cleaning equipment, concentricity bias is big, poor sealing, causes cleaning brush snap effect not
Technical problem good, cleaning brush replacement is inconvenient.
The technical solution adopted by the present invention to solve the technical problems is:
After this CMP cleaning equipment cleaning brush drive axle construction, including driving unit and with driving unit be in socket group
The driving axle unit of conjunction.
The driving unit includes motor+retarder, motor cabinet, straight coupling and fixing sleeve；The fixing sleeve rear portion with
Motor cabinet front is socketed in hole axle positioning method, and motor cabinet rear portion is bonded with motor+retarder in hole axle positioning method, described straight
Pass joint is screwed on motor cabinet side in engagement thread, and straight coupling introduces atmosphere and is connected with motor cabinet inner cavity.
The driving axle unit includes drive shaft, pressure spring, pinning and centering cutting ferrule, and drive shaft front penetrates centering cutting ferrule
Interior, centering cutting ferrule and drive shaft in axis hole sliding positioning and are in the even property power transmission of regular quadrangle axis hole penetration type, and drive shaft rear portion is worn
Enter in the fixing sleeve and motor cabinet of driving unit, and concatenates one with motor+retarder output shaft and lock.
The drive shaft front is rectangular slide-bar, and drive shaft rear portion is the main shaft with motor+retarder output axis connection,
With the pressure spring annular groove facing forward that is open between rectangular slide-bar and main shaft.
The centering cutting ferrule, which is equipped with from front to back with the bellmouth of cleaning brush centering, with cleaning brush, slides the square hole concatenated
A, the square hole b concatenated is slided with rectangular slide-bar.
The pressure spring is placed in drive shaft, and pressure spring rear portion is positioned in the pressure spring annular groove of drive shaft, and pressure spring front is positioned at
It feels relieved on cutting ferrule.
The pinning is screwed with rectangular slide-bar front end in engagement thread, and pinning head is in front of the square hole b of centering cutting ferrule
Clamping is limited, the pretightning force of pressure spring is applied.
The centering cutting ferrule shape is cylindrical shape.
The centering cutting ferrule rear portion also has pressure spring bayonet, and pressure spring bayonet is placed on the outside of pressure spring annular groove.
The pressure spring bayonet inner hole is the round hole being adapted with pressure spring annular groove shape.
The spindle outer wall interval of the drive shaft is provided with annular groove.
Steps are as follows for the use of cleaning equipment cleaning brush driving axle construction after this CMP:
Step 1: connecting gas source, through introducing atmosphere in the straight coupling that engagement thread is screwed on motor cabinet；
Step 2: the centering cutting ferrule for driving axle unit and cleaning brush are completed into telescopic centering and are clamped.
Beneficial effects of the present invention are as follows:
Driving unit of the invention can linkage driving axle unit with one heart, and introduce atmosphere through straight coupling.
The external operating environment of driving axle unit of the invention is in spray medium, drives axle unit linkage cleaning brush
It rotates and extension type centering clamping is provided.The drive shaft front for driving axle unit is rectangular slide-bar, and centering cutting ferrule passes through rectangular
Hole b is concatenated with the sliding of rectangular slide-bar.Spring is axially arranged, and by making pressure spring in the pinning that engagement thread screws with drive shaft
Pretightning force is applied, while centering cutting ferrule being prevented to be ejected.Drive drive shaft and the centering cutting ferrule of axle unit fixed in axis hole sliding
Position and be in the even property power transmission of regular quadrangle axis hole penetration type.
The present invention directly merges telescopic centering clamping function with driving unit, compact-sized terse, facilitates clamping.It drives
The even property power in four directions of shaft unit is transmitted and slides axially, and can be obviously improved its and be clamped concentricity.By the comprehensive of above-mentioned several measures
Conjunction advantage effectively convenient can carry out telescopic centering to cleaning brush and be clamped.
Detailed description of the invention
Present invention will be further explained below with reference to the attached drawings and examples.
Fig. 1 is structure axonometric schematic diagram of the invention.
Fig. 2 is structural profile illustration of the invention.
Fig. 3 is the schematic diagram of the section structure of driving unit.
Fig. 4 is the schematic diagram of the section structure for driving axle unit.
Fig. 5 is the structural schematic diagram of drive shaft.
Fig. 6 is the structural schematic diagram of centering cutting ferrule.
Appended drawing reference: 1- driving unit, 2- driving axle unit, 3- motor+retarder, 4- motor cabinet, 5- lead directly to and connect
Head, 6- fixing sleeve, 7- drive shaft, the rectangular slide-bar of 7.1-, 7.2- pressure spring annular groove, 7.3- main shaft, 8- pressure spring, 9- pinning,
10- centering cutting ferrule, 10.1- bellmouth, 10.2- square hole a, 10.3- square hole b, 10.4- pressure spring bayonet.
Specific embodiment
Embodiment is referring to shown in Fig. 1, Fig. 2, and cleaning equipment cleaning brush drives axle construction, including driving unit 1 after this CMP
And with driving unit 1 in the combined driving axle unit 2 of socket.
Shown in Figure 3, the driving unit 1 includes motor+retarder 3, motor cabinet 4, straight coupling 5 and fixing sleeve 6；
6 rear portion of fixing sleeve and 4 front of motor cabinet are socketed in hole axle positioning method, and 4 rear portion of motor cabinet and motor+retarder 3 are in hole
The fitting of axis positioning method, the straight coupling 5 is screwed on 4 side of motor cabinet in engagement thread, the introducing atmosphere of straight coupling 5 and with
4 inner cavity of motor cabinet is connected.
Shown in Figure 4, the driving axle unit 2 includes drive shaft 7, pressure spring 8, pinning 9 and centering cutting ferrule 10, drive shaft
7 fronts penetrate in centering cutting ferrule 10, and centering cutting ferrule 10 and drive shaft 7 in axis hole sliding positioning and are in regular quadrangle axis hole penetration type
Even property power transmission, 7 rear portion of drive shaft penetrates in the fixing sleeve 6 and motor cabinet 4 of driving unit 1, and the output with motor+retarder 3
Axis concatenation one simultaneously locks.
Referring to fig. 4, shown in 5,7 front of drive shaft is rectangular slide-bar 7.1, and 7 rear portion of drive shaft is and motor+retarder
Output axis connection main shaft 7.3,7.3 outer wall of main shaft, which can be spaced, is provided with annular groove.Between rectangular slide-bar 7.1 and main shaft 7.3
With the pressure spring annular groove 7.2 facing forward that is open.
Referring to fig. 4, shown in 6,10 shape of centering cutting ferrule is cylindrical shape.Cutting ferrule 10 of feeling relieved is equipped with and cleaning from front to back
Brush centering bellmouth 10.1, with cleaning brush sliding concatenate square hole a10.2, with rectangular slide-bar 7.1 slide concatenate it is rectangular
Hole b10.3.Centering 10 rear portion of cutting ferrule also has pressure spring bayonet 10.4, and pressure spring bayonet 10.4 is placed on 7.2 outside of pressure spring annular groove.Pressure spring
10.4 inner hole of bayonet is the round hole being adapted with 7.2 shape of pressure spring annular groove.
Shown in Figure 4, the pressure spring 8 is placed in drive shaft 7, and 8 rear portion of pressure spring is positioned at the pressure spring annular groove of drive shaft 7
In 7.2,8 front of pressure spring is positioned on centering cutting ferrule 10.
The pinning 9 is screwed with rectangular 7.1 front end of slide-bar in engagement thread, and 9 head of pinning is rectangular centering cutting ferrule 10
Clamping is limited in front of the b10.3 of hole, is applied the pretightning force of pressure spring.
Steps are as follows for the use of cleaning equipment cleaning brush driving axle construction after this CMP:
Step 1: connecting gas source, through introducing atmosphere in the straight coupling 5 that engagement thread is screwed on motor cabinet 4；
Step 2: the centering cutting ferrule 10 for driving axle unit 2 and cleaning brush are completed into telescopic centering and are clamped.
Claims (6)
1. after a kind of CMP cleaning equipment cleaning brush drive axle construction, it is characterised in that: including driving unit (1) and with driving
Unit (1) the driving axle unit (2) combined in socket；
The driving unit (1) includes motor+retarder (3), motor cabinet (4), straight coupling (5) and fixing sleeve (6)；It is described solid
Fixed set (6) rear portion and motor cabinet (4) front are socketed in hole axle positioning method, and motor cabinet (4) rear portion is in motor+retarder (3)
The fitting of hole axle positioning method, the straight coupling (5) are screwed on motor cabinet (4) side in engagement thread, and straight coupling (5) introduces
Atmosphere is simultaneously connected with motor cabinet (4) inner cavity；
The driving axle unit (2) includes drive shaft (7), pressure spring (8), pinning (9) and feels relieved cutting ferrule (10), before drive shaft (7)
Portion penetrates in centering cutting ferrule (10), and centering cutting ferrule (10) is passed through in axis hole sliding positioning and with drive shaft (7) in regular quadrangle axis hole
Wear the even property power transmission of formula, drive shaft (7) rear portion penetrates in the fixing sleeve (6) and motor cabinet (4) of driving unit (1), and with motor+subtract
The output shaft concatenation one of fast device (3) simultaneously locks；
Drive shaft (7) front is rectangular slide-bar (7.1), and drive shaft (7) rear portion is and motor+retarder output axis connection
Main shaft (7.3), with the pressure spring annular groove (7.2) facing forward of being open between rectangular slide-bar (7.1) and main shaft (7.3)；It is described fixed
Heart cutting ferrule (10) is equipped with the bellmouth (10.1) felt relieved with cleaning brush from front to back, slides the square hole a concatenated with cleaning brush
(10.2), the square hole b(10.3 concatenated is slided with rectangular slide-bar (7.1))；
The pressure spring (8) is placed on drive shaft (7), and pressure spring (8) rear portion is positioned in the pressure spring annular groove (7.2) of drive shaft (7), pressure
Spring (8) front is positioned in centering cutting ferrule (10)；
The pinning (9) screws with rectangular slide-bar (7.1) front end in engagement thread, and pinning (9) head is in centering cutting ferrule (10)
Square hole b(10.3) front limit clamping, it is applied the pretightning force of pressure spring.
2. cleaning equipment cleaning brush drives axle construction after CMP according to claim 1, it is characterised in that: the centering card
Covering (10) shape is cylindrical shape.
3. cleaning equipment cleaning brush drives axle construction after CMP according to claim 1, it is characterised in that: the centering card
Set (10) rear portion also has pressure spring bayonet (10.4), and pressure spring bayonet (10.4) is placed on the outside of pressure spring annular groove (7.2).
4. cleaning equipment cleaning brush drives axle construction after CMP according to claim 3, it is characterised in that: the pressure spring card
Mouth (10.4) inner hole is the round hole being adapted with pressure spring annular groove (7.2) shape.
5. cleaning equipment cleaning brush drives axle construction after CMP according to claim 1, it is characterised in that: the drive shaft
(7) main shaft (7.3) outer wall interval is provided with annular groove.
6. the application method of cleaning equipment cleaning brush driving axle construction after a kind of CMP as described in Claims 1 to 5 any one,
It is characterized by the following steps:
Step 1: connecting gas source, through introducing atmosphere in the straight coupling (5) that engagement thread is screwed on motor cabinet (4)；
Step 2: the centering cutting ferrule (10) for driving axle unit (2) and cleaning brush are completed into telescopic centering and are clamped.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611208175.7A CN106670149B (en) | 2016-12-23 | 2016-12-23 | Cleaning brush driving shaft structure of post-CMP cleaning equipment and use method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611208175.7A CN106670149B (en) | 2016-12-23 | 2016-12-23 | Cleaning brush driving shaft structure of post-CMP cleaning equipment and use method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106670149A CN106670149A (en) | 2017-05-17 |
| CN106670149B true CN106670149B (en) | 2019-05-17 |
Family
ID=58870464
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201611208175.7A Active CN106670149B (en) | 2016-12-23 | 2016-12-23 | Cleaning brush driving shaft structure of post-CMP cleaning equipment and use method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106670149B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108374869A (en) * | 2018-03-09 | 2018-08-07 | 天津朗硕机器人科技有限公司 | A kind of epicyclic reducer for robot plane rotation |
| US11318506B2 (en) * | 2018-08-16 | 2022-05-03 | Taiwan Semiconductor Manufacturing Company Ltd. | Apparatus for cleaning semiconductor equipment |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07230680A (en) * | 1994-02-17 | 1995-08-29 | Hitachi Ltd | Brush attaching and detaching mechanism for washing device |
| US5745945A (en) * | 1996-06-28 | 1998-05-05 | International Business Machines Corporation | Brush conditioner for a semiconductor cleaning brush |
| JPH11625A (en) * | 1997-06-13 | 1999-01-06 | Mitsubishi Materials Corp | Apparatus for washing wafer |
| CN2871036Y (en) * | 2005-12-29 | 2007-02-21 | 林珍如 | Spindle device of crystal wafer cleaner |
| CN2912837Y (en) * | 2005-12-19 | 2007-06-20 | 林珍如 | Cleaning brush holding device for wafer cleaning equipment |
| CN204885113U (en) * | 2015-09-06 | 2015-12-16 | 中芯国际集成电路制造（天津）有限公司 | Wafer cleaning brush and wafer belt cleaning device |
| CN106024580A (en) * | 2015-03-31 | 2016-10-12 | 台湾积体电路制造股份有限公司 | Method and system for cleansing wafer in cmp process of semiconductor manufacturing fabrication |
-
2016
- 2016-12-23 CN CN201611208175.7A patent/CN106670149B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07230680A (en) * | 1994-02-17 | 1995-08-29 | Hitachi Ltd | Brush attaching and detaching mechanism for washing device |
| US5745945A (en) * | 1996-06-28 | 1998-05-05 | International Business Machines Corporation | Brush conditioner for a semiconductor cleaning brush |
| JPH11625A (en) * | 1997-06-13 | 1999-01-06 | Mitsubishi Materials Corp | Apparatus for washing wafer |
| CN2912837Y (en) * | 2005-12-19 | 2007-06-20 | 林珍如 | Cleaning brush holding device for wafer cleaning equipment |
| CN2871036Y (en) * | 2005-12-29 | 2007-02-21 | 林珍如 | Spindle device of crystal wafer cleaner |
| CN106024580A (en) * | 2015-03-31 | 2016-10-12 | 台湾积体电路制造股份有限公司 | Method and system for cleansing wafer in cmp process of semiconductor manufacturing fabrication |
| CN204885113U (en) * | 2015-09-06 | 2015-12-16 | 中芯国际集成电路制造（天津）有限公司 | Wafer cleaning brush and wafer belt cleaning device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106670149A (en) | 2017-05-17 |
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| TR01 | Transfer of patent right |
Effective date of registration: 20230307 Address after: 100176 101, floor 2, building 2, No. 1, Taihe Third Street, economic and Technological Development Zone, Daxing District, Beijing Patentee after: Beijing Jingyi Precision Technology Co.,Ltd. Address before: 100176 No. 1, Taihe 3rd Street, Beijing Economic and Technological Development Zone, Daxing District, Beijing Patentee before: BEIJING SEMICONDUCTOR EQUIPMENT INSTITUTE (THE 45TH Research Institute OF CETC) |
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| TR01 | Transfer of patent right |