CN106653530A - Novel broadband ion beam adjusting lens - Google Patents
Novel broadband ion beam adjusting lens Download PDFInfo
- Publication number
- CN106653530A CN106653530A CN201510741688.3A CN201510741688A CN106653530A CN 106653530 A CN106653530 A CN 106653530A CN 201510741688 A CN201510741688 A CN 201510741688A CN 106653530 A CN106653530 A CN 106653530A
- Authority
- CN
- China
- Prior art keywords
- lens
- ion beam
- coil
- electromagnet
- cooling water
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/10—Lenses
- H01J37/14—Lenses magnetic
- H01J37/141—Electromagnetic lenses
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/21—Means for adjusting the focus
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
- H01J37/3171—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation for ion implantation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/002—Cooling arrangements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/04—Means for controlling the discharge
- H01J2237/049—Focusing means
- H01J2237/0492—Lens systems
- H01J2237/04922—Lens systems electromagnetic
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention discloses a magnetic quadrupole lens applied to a broadband ion beam ion implantation machine. The magnetic quadrupole lens comprises four electromagnet units, an ion beam channel, four supporting plates and a base plate. Each electromagnet unit is formed by a coil, a cylindrical magnet yoke, a cooling water pipeline and a fixing plate, wherein the coil winds around the magnet yoke, the cooling water pipeline spirally winds around the coil, and the fixing plate positions and fixes the two ends of the magnet yoke. Exciting currents of the electromagnets can be adjusted individually, and generated magnetic fields enable adjacent two electrodes of every two adjacent electromagnets to have the same polarity. The novel broadband ion beam adjusting lens is great in magnetic induction intensity linear distribution. A contact area between each cooling water pipelines and the corresponding coil is large, and the heat dissipation efficiency is high. The lens has a simple structure, the vacuum channel is arranged inside the lens, and the lens is quite convenient to install and maintain.
Description
Technical field
The present invention relates to a kind of magnetic focusing lens of ion implantation apparatus, ion implantation apparatus is semiconductor manufacturing ion
Key equipment in injection technology, therefore the invention belongs to field of manufacturing semiconductor devices.
Background technology
With the high speed development of IC industry, higher wanting it is also proposed to the performance of semiconductor devices
Ask.Ion implantation apparatus is the key equipment in semiconductor ion injection technology, is had to the performance of semi-conducting material
Important impact.
Ion gun is the ion generating apparatus of ion implantation apparatus, is affected by its ion generation method, and it is produced
Raw ion often contains many other impurity, and the depth of parallelism and uniformity are also poor.In order to filter out
Need ion, the depth of parallelism of adjustment line and uniformity, enable line to be injected into semi-conducting material at a certain angle
In, ion beam has to the transmission through certain distance, and it is adjusted with leaving space.But due to sky
Between charge effect presence, ion beam can dissipate in transmitting procedure, lose can a big chunk ion beam
Fall, this is quite unfavorable to ion implantation process.Broadband ion beam is a kind of reasonable ion beam, it
The scanning process of spot beam is eliminated, directly be can be injected in semi-conducting material, but equally, in transmission
During it as diverging and produce loss.In order to solve this problem, it is necessary to design a kind of device
To make ion beam focusing.
Magnetic quadrupole lens is a kind of relatively common focusing arrangement, and it is gathered using magnetic field to ion beam
Jiao, will not change the energy of ion beam, only change the deflection angle of ion beam.This Wideband ion beam is adjusted
Section lens are exactly a kind of such novel magnetic quadrupole lens.
The content of the invention
The transmission performance good in order to ensure broadband ion beam, the present invention devises a kind of Wideband ion beam
Adjust lens.Its magnetic induction intensity linear distribution is good, can be not to the depth of parallelism and uniformity of ion beam
Ion beam is set substantially to focus in the case of producing considerable influence；Due to increasing connecing for cooling water pipeline and coil
Contacting surface is accumulated, and its radiating efficiency is also very high；Its ion beam path is designed in lens interior, very convenient peace
Dress and maintenance.
Specific technical scheme of the invention is as follows：
Wideband ion beam adjusts lens by four electromagnet units, ion beam path, four supports
Plate and base plate composition, electromagnet unit is distributed along surrounding, and ion beam path is located at lens interior, four
Gripper shoe is located at four angles of lens and electromagnet unit is play a part of fixed and positioned, and base plate is located at lens bottom
Support whole lens combination.
Electromagnet unit includes coil, cylindricality yoke, cooling water pipeline and fixed plate, and coil is wrapped in yoke
On, cooling water pipeline dish type is wrapped between coil, and fixed plate plays positioning and fixed coil at yoke two ends.
The exciting current that Wideband ion beam adjusts lens each electromagnet is independently adjustable, and the magnetic field of generation makes
The two neighboring pole polarity of two neighboring electromagnet is identical.
It is a kind of strong lens that this Wideband ion beam adjusts lens, when pole polarity is with shown in Fig. 2,
Its vertical direction will be focused when the ion beam of positively charged is projected from paper to outside paper, horizontal direction will
Can be defocused, but focus level is greater than defocusing degree.
Compared with prior art, the advantage of this Wideband ion beam regulation lens is：
1st, magnetic induction intensity linear distribution is good, there is good focussing force to broadband ion beam；
2nd, cooling water pipeline and coil contact area are big, and the radiating efficiency of coil is high；
3rd, lens arrangement is simple and ion beam path internally, make dismounting and keep in repair all very convenient.
Description of the drawings
Fig. 1 is the structure chart that this Wideband ion beam adjusts lens；
Fig. 2 is the front view of Fig. 1；
Description of reference numerals：
1- ion beam paths；2- cylindricality yokes；3- gripper shoes；4- base plates；5- fixed plates；6- coils；7 is cold
But waterpipe.
Specific embodiment
The present invention is described further below in conjunction with the accompanying drawings, probably the key point of the explanation present invention.
As illustrated in fig. 1 and 2, cylindricality yoke 2, coil 6, cooling water pipeline 7 and fixed plate 5 are constituted
One electromagnet unit, is wrapped in cylindricality yoke 2 in this unit coil 6, the disk of cooling water pipeline 7
Shape is wound between coil, and fixed plate 5 is arranged on yoke two ends to limit the position of coil.3 liang of gripper shoe
End connects respectively two electromagnet units, and they are played a part of to support and are positioned.Below lens
Two gripper shoes 3 have also been fixed on base plate 4, to support whole lens.Ion beam path 1 is installed on four
The centre of individual electromagnet unit, its Cross section Design rectangularity is conducive to the transmission of broadband ion beam.
The coolant of whole lens combination uses deionized water.
This Wideband ion beam adjusts lens and is installed on before the post analysis light bar of analyzer, is produced by it
Specific magnetic fields adjusting the height and width of broadband beam.
Cylindricality yoke 2 has certain thickness, and this thickness determines operating distance of the magnetic field to ion beam.
In all of electromagnet unit, coil 6 is all together in series, and their added senses of current should make phase
The two neighboring pole polarity of adjacent two electromagnet is identical.Under normal circumstances, this lens role is vertical poly-
Burnt horizontal defocus, but if all reversal connections of all coils electric current, then lens vertically level of defocus will gather
It is burnt.Depending on the visible working state ion beam conditions of concrete lens.Ion beam path 1 is vacuum pipe, its
Processing and installation should meet vacuum requirement.
Claims (3)
1. Wideband ion beam adjust lens, it is characterised in that it by four electromagnet units, one from
Beamlet passage, four gripper shoes and a base plate composition, magnet unit is distributed along surrounding, ion beam path position
In lens interior, gripper shoe positions the position of each electromagnet unit, the whole lens combination of backplanes support.
2. Wideband ion beam according to claim 1 adjusts lens, it is characterized in that, its electricity
Magnet unit includes coil, cylindricality yoke, cooling water pipeline and fixed plate, and coil is wrapped in yoke, cold
But waterpipe dish-type is wrapped between coil, and fixed plate plays positioning and fixed effect at yoke two ends.
3. the Wideband ion beam as described in claim 1 and 2 adjusts lens, it is characterised in that each
The exciting current of individual electromagnet is independently adjustable, and the magnetic field of generation makes the two neighboring pole polarity of two neighboring electromagnet
It is identical.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510741688.3A CN106653530A (en) | 2015-11-04 | 2015-11-04 | Novel broadband ion beam adjusting lens |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510741688.3A CN106653530A (en) | 2015-11-04 | 2015-11-04 | Novel broadband ion beam adjusting lens |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106653530A true CN106653530A (en) | 2017-05-10 |
Family
ID=58851013
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510741688.3A Pending CN106653530A (en) | 2015-11-04 | 2015-11-04 | Novel broadband ion beam adjusting lens |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106653530A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111192807A (en) * | 2018-11-15 | 2020-05-22 | 北京中科信电子装备有限公司 | Novel middle beam parallel lens magnet |
| CN111261477A (en) * | 2018-12-03 | 2020-06-09 | 北京中科信电子装备有限公司 | Double-outlet parallel lens |
-
2015
- 2015-11-04 CN CN201510741688.3A patent/CN106653530A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111192807A (en) * | 2018-11-15 | 2020-05-22 | 北京中科信电子装备有限公司 | Novel middle beam parallel lens magnet |
| CN111261477A (en) * | 2018-12-03 | 2020-06-09 | 北京中科信电子装备有限公司 | Double-outlet parallel lens |
| CN111261477B (en) * | 2018-12-03 | 2022-08-02 | 北京中科信电子装备有限公司 | Double-outlet parallel lens |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| WD01 | Invention patent application deemed withdrawn after publication | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20170510 |