CN106637141B - A kind of solar battery coated graphite boat piece and graphite boat - Google Patents
A kind of solar battery coated graphite boat piece and graphite boat Download PDFInfo
- Publication number
- CN106637141B CN106637141B CN201710048030.3A CN201710048030A CN106637141B CN 106637141 B CN106637141 B CN 106637141B CN 201710048030 A CN201710048030 A CN 201710048030A CN 106637141 B CN106637141 B CN 106637141B
- Authority
- CN
- China
- Prior art keywords
- graphite boat
- solar battery
- boat piece
- card slot
- spring card
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 61
- 229910002804 graphite Inorganic materials 0.000 title claims abstract description 61
- 239000010439 graphite Substances 0.000 title claims abstract description 61
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 28
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 28
- 239000010703 silicon Substances 0.000 claims abstract description 28
- 238000000576 coating method Methods 0.000 claims abstract description 7
- 238000001727 in vivo Methods 0.000 claims description 2
- 238000007747 plating Methods 0.000 claims 1
- 230000009471 action Effects 0.000 abstract description 3
- 230000002950 deficient Effects 0.000 abstract description 3
- 230000008602 contraction Effects 0.000 abstract description 2
- 230000006872 improvement Effects 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 230000008569 process Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000007888 film coating Substances 0.000 description 1
- 238000009501 film coating Methods 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 210000004209 hair Anatomy 0.000 description 1
- 235000008216 herbs Nutrition 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 210000002268 wool Anatomy 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
- C23C16/4581—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber characterised by material of construction or surface finish of the means for supporting the substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1876—Particular processes or apparatus for batch treatment of the devices
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Photovoltaic Devices (AREA)
Abstract
The invention discloses a kind of solar battery coated graphite boat pieces, including graphite boat piece ontology, several spring card slots are provided in the graphite boat piece ontology, one is correspondingly provided in each spring card slot can be attracted spring card slot to the electromagnet of silicon wafer in fixed solar battery coating process.Compared with prior art, in artificial inserted sheet or machine inserted sheet, electromagnet is not powered the present invention, and spring card slot is opened, and biggish card slot space avoids the friction between silicon wafer and graphite boat piece；After the completion of inserted sheet, electromagnet is powered, and silicon wafer is fixed in graphite boat piece ontology by spring card slot contraction under the action of electromagnet suction, has the advantages of surface for avoiding silicon wafer generates scratch, reduces the fraction defective of solar battery product.The invention patent also provides a kind of a kind of solar battery coated graphite boat with foregoing graphites boat piece.
Description
Technical field
The present invention relates to solar battery film coating jig technical field more particularly to a kind of solar battery coated graphite boats
Piece and graphite boat.
Background technique
In photovoltaic solar industry, the manufacture of solar battery will pass through making herbs into wool, spread, etching, plated film, silk-screen printing and
It is sintered six big processes.Wherein, the purpose of filming process is the method using plasma reinforced chemical vapour deposition in front side of silicon wafer
Silicon nitride film is plated, sunlight reflection is reduced and passivation is risen to silicon chip surface.
Currently, photovoltaic industry mostly uses greatly tubular type PECVD to silicon chip film-coated, silicon wafer is by manually or machine power insertion
In graphite boat, graphite boat is then put into plated film in boiler tube.The unit boat on piece of graphite boat is provided with several fixed card slots, will
Silicon wafer is fixed.Since the slot inside dimension of card slot is smaller, during inserted sheet, the surface of silicon wafer is easy to be scratched, and is formed and is drawn
Trace causes to generate more substandard product.
Summary of the invention
It can be reduced solar battery silicon chip surface during coating process the purpose of the present invention is to provide one kind to scratch
Graphite boat piece.
To achieve the above object, the technical scheme adopted by the invention is as follows: a kind of solar battery coated graphite boat piece, packet
Graphite boat piece ontology is included, several spring card slots are provided in the graphite boat piece ontology, are accordingly set in each spring card slot
There is one can be attracted spring card slot to the electromagnet of silicon wafer in fixed solar battery coating process.
Compared with prior art, the present invention in graphite boat piece ontology by being provided with several spring card slots, each bullet
One is correspondingly provided in spring card slot can fix spring card slot actuation the electromagnet of silicon wafer in solar battery coating process,
When artificial inserted sheet or machine inserted sheet, electromagnet is not powered, and spring card slot is opened, and biggish card slot space avoids silicon wafer and graphite boat
Friction between piece；After the completion of inserted sheet, electromagnet is powered, and silicon wafer is fixed in spring card slot contraction under the action of electromagnet suction
In graphite boat piece ontology, there is the advantages of surface for avoiding silicon wafer generates scratch, reduces the fraction defective of solar battery product.
As an improvement of the present invention, the graphite boat piece ontology is hollow structure.
As an improvement of the present invention, the spring card slot includes that two brackets and both ends are connect with the bracket respectively
Spring.
As an improvement of the present invention, the bracket is L-type.
As an improvement of the present invention, the electromagnet is located between two brackets.
As an improvement of the present invention, the spring is arranged in inside the hollow structure of the graphite boat piece ontology, institute
State the outside that bracket is partially located at the graphite boat piece ontology.
It is improved as another kind of the invention, length, width and the height of the bracket are 2 to 5 millimeters.
It is improved as another kind of the invention, the quantity of the electromagnet and the spring card slot is three.
The present invention also proposes a kind of graphite boat, including several solar battery coated graphite boat pieces above-mentioned, several
The solar battery coated graphite boat piece is evenly distributed in solar battery coated graphite boat.
Improved as another kind of the invention, the solar battery coated graphite boat piece with a thickness of 8-10 millimeters.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of graphite boat piece of the present invention.
Fig. 2 is the structural schematic diagram of graphite boat of the present invention.
The embodiments will be further described with reference to the accompanying drawings for the realization, the function and the advantages of the object of the present invention.
Specific embodiment
In the description of the present invention, it is to be understood that, term " center ", " transverse direction ", "upper", "lower", "left", "right",
The orientation or positional relationship of the instructions such as "vertical", "horizontal", "top", "bottom", "inner", "outside" be orientation based on the figure or
Positional relationship is merely for convenience of description of the present invention and simplification of the description, rather than the device or element of indication or suggestion meaning must
There must be specific orientation, be constructed and operated in a specific orientation, therefore be not considered as limiting the invention.In addition, art
Language " first ", " second " are used for descriptive purposes only and cannot be understood as indicating or suggesting relative importance or implicitly indicate institute
The quantity of the technical characteristic of instruction." first " is defined as a result, the feature of " second " can explicitly or implicitly include one
Or more this feature.In the description of the present invention, unless otherwise indicated, the meaning of " plurality " is two or more.
In addition, term " includes " and its any deformation, it is intended that cover and non-exclusive include.
In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, term " installation ", " phase
Even ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or be integrally connected；It can
To be mechanical connection, it is also possible to be electrically connected；It can be directly connected, can also can be indirectly connected through an intermediary
Connection inside two elements.For the ordinary skill in the art, above-mentioned term can be understood at this with concrete condition
Concrete meaning in invention.
The invention will be further described with preferred embodiment with reference to the accompanying drawing.
As shown in Figure 1, a kind of solar battery coated graphite boat piece, for loading silicon chip of solar cell, the graphite
Boat piece includes graphite boat piece ontology 1, several spring card slots 3, the spring card slot are provided in the graphite boat piece ontology 1
It is fixed for the silicon wafer in solar battery coating process.One is correspondingly provided in each spring card slot 3 to be attracted spring card slot 3
To the electromagnet 2 of silicon wafer in fixed solar battery coating process.Its working principles are as follows: in artificial inserted sheet or machine inserted sheet
When, electromagnet 2 is not powered, and spring card slot 3 is opened, and biggish card slot space avoids the friction between silicon wafer and graphite boat piece；It inserts
After the completion of piece, electromagnet 2 is powered, and spring card slot 3, which is shunk, under the action of 2 suction of electromagnet is fixed on graphite boat piece sheet for silicon wafer
In vivo, after the completion of filming process, electromagnet 2 powers off again, unloads lower silicon slice, completes the plated film of silicon wafer.With the surface for avoiding silicon wafer
The advantages of generating scratch, reducing the fraction defective of solar battery product.
Preferably, the graphite boat piece ontology 1 is hollow structure.
Preferably, the spring 31 that the spring card slot 3 is connect with the bracket 32 respectively including two brackets 32 and both ends,
The both ends of the i.e. described spring 31 are connect with the bracket 32 respectively.The effect of spring 31 is after electromagnet 2 is not powered or is powered
When powering off again, two brackets 32 are strutted, so that the distance between two brackets 32 is greater than silicon wafer width, to guarantee silicon chip surface
It generates scratch and is easy to take out silicon wafer.
Preferably, the bracket is L-type, and length, width and the height of the bracket are 2 to 5 millimeters, and above-mentioned size is set
Meter rationally, saves use space.
Preferably, the electromagnet 2 is located between two brackets 32, close to the spring 31, makes the electromagnet 2
Play maximum magneticaction.
Preferably, the spring 31 is arranged in inside the hollow structure of the graphite boat piece ontology 1,32 part of bracket
Positioned at the outside of the graphite boat piece ontology 1.The quantity of the electromagnet 2 and the spring card slot 31 is three.Structure ratio
It is relatively firm, reasonable quantity setting, manufacture easy to produce.
As shown in Fig. 2, a kind of solar battery coated graphite boat 4, including multiple solar battery coated graphite boat pieces 41,
The multiple solar battery coated graphite boat piece 41 is evenly distributed in solar battery coated graphite boat 4；Graphite boat piece 41
With a thickness of 8-10 millimeters,
The above is only a preferred embodiment of the present invention, is not intended to limit the scope of the invention, all to utilize this hair
Equivalent structure or equivalent flow shift made by bright specification and accompanying drawing content is applied directly or indirectly in other relevant skills
Art field, is included within the scope of the present invention.
Claims (6)
1. a kind of solar battery coated graphite boat piece, it is characterised in that: including graphite boat piece ontology, in the graphite boat piece sheet
It is provided with several spring card slots in vivo, one is correspondingly provided in each spring card slot can be attracted spring card slot to the fixed sun
The electromagnet of silicon wafer in energy battery coating process, the graphite boat piece ontology are hollow structure, and the spring card slot includes two
The spring that bracket and both ends are connect with the bracket respectively, the electromagnet are located between two brackets, and spring setting exists
Inside the hollow structure of the graphite boat piece ontology, the bracket is partially located at the outside of the graphite boat piece ontology.
2. a kind of solar battery coated graphite boat piece described in accordance with the claim 1, it is characterised in that: the bracket is L-type.
3. a kind of solar battery coated graphite boat piece according to claim 2, it is characterised in that: the length of the bracket
Degree, width and height are 2 to 5 millimeters.
4. a kind of solar battery coated graphite boat piece described in accordance with the claim 1, it is characterised in that: the electromagnet and institute
The quantity for stating spring card slot is three.
5. a kind of solar battery coated graphite boat, it is characterised in that: including several such as any one of Claims 1-4
The solar battery coated graphite boat piece, several described solar battery coated graphite boat pieces are evenly distributed on solar-electricity
In the coated graphite boat of pond.
6. a kind of solar battery coated graphite boat according to claim 5, it is characterised in that: the solar battery plating
Film graphite boat piece with a thickness of 8-10 millimeters.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710048030.3A CN106637141B (en) | 2017-01-20 | 2017-01-20 | A kind of solar battery coated graphite boat piece and graphite boat |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710048030.3A CN106637141B (en) | 2017-01-20 | 2017-01-20 | A kind of solar battery coated graphite boat piece and graphite boat |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106637141A CN106637141A (en) | 2017-05-10 |
| CN106637141B true CN106637141B (en) | 2019-08-27 |
Family
ID=58841169
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710048030.3A Active CN106637141B (en) | 2017-01-20 | 2017-01-20 | A kind of solar battery coated graphite boat piece and graphite boat |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106637141B (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107658257A (en) * | 2017-08-14 | 2018-02-02 | 罗博特科智能科技股份有限公司 | A kind of graphite boat silicon chip batch suction means |
| CN111755564B (en) * | 2018-04-28 | 2023-08-11 | 拉普拉斯新能源科技股份有限公司 | Production process of passivation film on surface of solar cell |
| CN109148343B (en) * | 2018-08-15 | 2020-02-18 | 横店集团东磁股份有限公司 | Graphite boat for coating film on solar cell silicon wafer |
| CN113838948B (en) * | 2021-09-27 | 2023-11-10 | 平煤隆基新能源科技有限公司 | Process for reducing scratch of tubular PERC battery |
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| CN1239063A (en) * | 1998-04-02 | 1999-12-22 | 莱博德***股份有限公司 | Device for clamping and griping a flat substrate |
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| CN202308005U (en) * | 2011-10-25 | 2012-07-04 | 无锡绿波新能源设备有限公司 | Graphite boat |
| CN202323023U (en) * | 2011-11-18 | 2012-07-11 | 青岛赛瑞达电子科技有限公司 | PECVD (Plasma Enhanced Chemical Vapor Deposition) equipment with new-structure graphite boat |
| KR101218576B1 (en) * | 2011-11-18 | 2013-01-21 | 한국과학기술원 | Back contact solar cell and method for manufacturing the same |
| CN203807554U (en) * | 2014-03-06 | 2014-09-03 | 上海理想万里晖薄膜设备有限公司 | Heterojunction solar cell tray for film formation of PECVD (Plasma Enhanced Chemical Vapor Deposition) equipment |
| CN204130510U (en) * | 2014-10-27 | 2015-01-28 | 浙江晶科能源有限公司 | For graphite boat piece and the graphite boat of double-sided coating |
| CN205789907U (en) * | 2016-06-29 | 2016-12-07 | 苏州阿特斯阳光电力科技有限公司 | A kind of graphite boat piece and graphite boat |
| CN206570408U (en) * | 2017-01-20 | 2017-10-20 | 广东爱康太阳能科技有限公司 | A kind of solar cell coated graphite boat piece and graphite boat |
-
2017
- 2017-01-20 CN CN201710048030.3A patent/CN106637141B/en active Active
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1239063A (en) * | 1998-04-02 | 1999-12-22 | 莱博德***股份有限公司 | Device for clamping and griping a flat substrate |
| CN101417427A (en) * | 2008-08-04 | 2009-04-29 | 北京理工大学 | Large-range multi-dimension integrated micro-power detection and wireless feedback twin-lamella micro clamping device |
| CN101685791A (en) * | 2008-09-25 | 2010-03-31 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Substrate supporting device and method for discharging static electricity by using same |
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Also Published As
| Publication number | Publication date |
|---|---|
| CN106637141A (en) | 2017-05-10 |
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Address after: 528000 No.3, Qili Avenue South, Leping Town, Sanshui District, Foshan City, Guangdong Province Patentee after: Guangdong aixu Technology Co.,Ltd. Address before: No.69, C District, Sanshui Industrial Park, Foshan, Guangdong 528000 Patentee before: GUANGDONG AIKO SOLAR ENERGY TECHNOLOGY Co.,Ltd. Address after: No.69, C District, Sanshui Industrial Park, Foshan, Guangdong 528000 Patentee after: GUANGDONG AIKO SOLAR ENERGY TECHNOLOGY Co.,Ltd. Address before: 528100 No. 69, C District, Sanshui Industrial Park, Foshan, Guangdong. Patentee before: GUANGDONG AIKO SOLAR ENERGY TECHNOLOGY Co.,Ltd. |
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