CN106571378B - Organic memory, press monitoring system and preparation method thereof - Google Patents

Organic memory, press monitoring system and preparation method thereof Download PDF

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CN106571378B
CN106571378B CN201510653906.8A CN201510653906A CN106571378B CN 106571378 B CN106571378 B CN 106571378B CN 201510653906 A CN201510653906 A CN 201510653906A CN 106571378 B CN106571378 B CN 106571378B
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monitoring system
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CN106571378A (en
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董桂芳
李晶
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Tsinghua University
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K19/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic element specially adapted for rectifying, amplifying, oscillating or switching, covered by group H10K10/00
    • H10K19/10—Integrated devices, or assemblies of multiple devices, comprising at least one organic element specially adapted for rectifying, amplifying, oscillating or switching, covered by group H10K10/00 comprising field-effect transistors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/04—Friction generators
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
    • H10K10/40—Organic transistors
    • H10K10/46—Field-effect transistors, e.g. organic thin-film transistors [OTFT]
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10—OLED displays

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Abstract

The invention relates to an organic memory, a press monitoring system and a preparation method thereof. The fully flexible wearable press monitoring system includes an organic friction memory for sensing and storing contact signals and a light emitting diode for reading the signals. Unlike the traditional memory which needs an electric signal of an external power supply for writing and erasing, the writing and erasing signals of the organic friction memory device are mechanical stress. On the basis, the invention provides a wearable full-flexible pressing monitoring system which can monitor confidential objects in real time, record contact of outsiders on the confidential objects and send out warning. The invention has wide application prospect in the fields of safety monitoring, intelligent devices, man-machine interaction systems and the like.

Description

Organic memory, press monitoring system and preparation method thereof
Technical Field
The invention relates to the field of photoelectronics, in particular to an organic memory, a pressing monitoring system and a preparation method thereof.
Background
An organic memory is an organic electronic device, which is one of functional electronic devices. The ferroelectric memory, the polymer electret memory, the floating gate memory and other memories are mainly classified according to different materials of the memory function layer and different corresponding memory mechanisms. The ferroelectric memory uses ferromagnetic material as memory material, and the polarization of ferroelectric material under the action of voltage realizes the writing and memory state of the device; the polymer electret device uses polymer as an insulating layer of a memory, and the polymer electret is polarized by grid voltage to achieve the storage purpose; the floating gate memory device is based on a transistor structure and generally comprises two layers of insulating layers, wherein the thicker layer far away from a semiconductor is an isolating layer, the layer close to the semiconductor is a tunneling layer, a metal layer or metal nano particles are arranged between the two layers and serve as a floating gate layer, and current carriers penetrate through the tunneling layer through the tunneling principle under the action of gate voltage to be captured and reserved by the floating gate layer, so that the size of channel current is influenced, and storage is realized. The organic memory uses organic materials, has wide material selection range and low cost, and can be used for preparing light-weight and flexible devices, thereby receiving wide attention.
At present, electronic devices are moving toward miniaturization, portability, and functionalization. But since the organic memory usually requires an external power input voltage to realize storage, this undoubtedly hinders its development toward small-sized portability.
The friction generator is one of the research hotspots in recent years, and the principle of friction electrification and static induction which is seen everywhere in daily life is applied to actual power generation. The charge separation and the potential difference formation are achieved by means of a contact separation of two materials having different electronegativity. The electrode is used for leading out, mechanical signals can be converted into electric signals, and a new direction is opened for the development of the electronic field.
Disclosure of Invention
The invention aims to solve the technical problems that a friction power generation layer is used for replacing an external source input voltage, a novel organic electronic storage device which can be written and erased without an external source voltage is prepared, and meanwhile, the characteristic of a photosensitive semiconductor is utilized to realize a portable multifunctional storage device with highly integrated functions.
The present invention provides an organic memory, comprising: the functional area A is a friction power generation layer for receiving and transmitting an input mechanical signal, and the functional area B is a storage layer for storing the signal.
The invention also provides a full-flexible wearable pressing monitoring system, which comprises: the organic memory is used for sensing and storing the pressing signal; the flexible organic light emitting diode is coupled with the organic memory and used for reading and displaying the stored signals; the pressed signal is induced by a friction power generation layer (functional area A) of the organic memory, converted into electrostatic potential and applied to the organic memory layer (functional area B), the signal is stored by the organic memory layer, and the stored signal influences the magnitude of source-drain channel current of the organic memory layer (functional area B), so that the brightness change of the diode is influenced.
The invention also provides a preparation method of the organic memory with the flexible floating gate structure, which comprises the following steps: two sheets of flexible PET substrate were first cleaned, with two sheets of flexible PET substrate therebetweenOne surface of a PET substrate, which is an upper substrate, is sputtered with a 150nm ITO layer, the other surface is prepared with 100nm Cu, and the ITO layer is prepared with a grid electrode by a photoetching method; preparing a 100nm Cu layer on another PET substrate, and covering a 100um polyvinyl chloride (PVC) layer on the Cu layer; the PVC is opposite to the Cu layer of the first substrate; magnetron sputtering Ta on the ITO layer of the upper substrate2O5The ratio of oxygen to argon is 3: 7; spin-coating a layer of PMMA (polymethyl methacrylate) layer with the thickness of 20 nanometers by a wet method, then sputtering metal Ta with the thickness of 2 nanometers, and then spin-coating a layer of PMMA layer with the thickness of 20 nanometers; after heat treatment for 1 hour at 70 ℃, a layer of 45nm pentacene is evaporated in vacuum; gold electrodes of 45nm were vacuum evaporated as source and drain electrodes using a mask.
The invention also provides a preparation method of the organic photosensitive friction memory, which comprises the following steps: cleaning two pieces of organic glass, wherein one organic glass substrate is an upper substrate; sputtering a 150nm ITO layer on one surface of the substrate, preparing 100nm Cu on the other surface of the substrate, and preparing a grid electrode on the ITO layer by using a photoetching method; preparing a 100nm Cu layer on another organic glass substrate, and covering a 100um polyvinyl chloride (PVC) layer on the 100nm Cu layer; the PVC is opposite to the Cu layer of the first substrate; magnetron sputtering Ta on the ITO layer of the upper substrate2O5The oxygen-argon gas ratio is 1: 1; a45 nm layer of pentacene was vacuum evaporated. Then, 45nm gold electrodes were vacuum-evaporated as source and drain electrodes using a mask.
The invention also provides a preparation method of the full-flexible wearable pressing monitoring system, which comprises the following steps: preparing an organic memory by using the method; photoetching an ITO electrode on a flexible PET substrate, and then depositing a 50nm NPB (N-propyl-beta) serving as a hole carrier transport layer on the substrate by using a vacuum evaporation method; then, the vacuum co-evaporation method is continuously utilized to evaporate and plate 50nm Alq3(ii) a Then, 50nm of Mg-Ag (10:1) electrode was evaporated by vacuum evaporation, and then 150nm of Ag electrode was evaporated.
The organic friction memory and the organic photosensitive friction memory based on the floating gate structure are novel devices, different from the traditional memory which needs external voltage to write and erase, the organic friction memory and the organic photosensitive friction memory realize storage by replacing grid voltage with external mechanical pressing signals, do not need external voltage, and are active self-driven devices. The preparation process is simple, large-area high-density functional integration can be greatly realized, the cost can be greatly reduced while the functional integration is realized, the miniaturization and the portability can be realized, in addition, the flexible device can be prepared, the flexible device is applied to full-flexible wearable equipment, and the flexible device has wide application prospects in future intelligent devices, wearable electronic equipment and human-computer interaction equipment.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and other drawings can be obtained by those skilled in the art without creative efforts.
FIG. 1 is a schematic diagram of an organic friction memory (two connection methods);
FIG. 2 is a schematic view of a functional region A (triboelectric layer);
FIG. 3 is a schematic view of the floating gate structure of the organic memory layer in the functional region B;
FIG. 4 is a schematic view of an organic photosensitive memory layer in the functional region B;
FIG. 5 shows the push-to-store characteristics of a floating gate structure organic friction memory;
FIG. 6 is a graph of photosensitive and push-to-light memory characteristics of an organic photosensitive tribological memory;
FIG. 7 is a schematic circuit diagram of a fully flexible wearable compression monitoring system;
Detailed Description
The technical solutions of the present invention will be described clearly and completely with reference to the accompanying drawings, and it should be understood that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; the two elements may be directly connected or indirectly connected through an intermediate medium, or may be communicated with each other inside the two elements, or may be wirelessly connected or wired connected. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
In addition, the technical features involved in the different embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.
Example 1
The organic friction memory of the invention is shown in figure 1, and comprises a functional area A and a functional area B. The functional area A is a friction power generation layer, and the functional area B is an organic storage layer. Two electrode layers of the friction power generation layer are respectively connected with a grid electrode and a source electrode of the organic storage layer, and the left and right images are respectively in two connection modes.
The functional region a triboelectric generation layer has two substrates, two electrodes, and two friction layers (one of which may be an electrode at the same time), as shown in fig. 2.
21 and 26 are substrates, and a hard substrate such as plexiglass or a flexible substrate such as polyethylene terephthalate PET;
22 and 25 are electrode layers, and Cu and the like can be adopted as the material;
the rubbing layers 23 and 24 are made of metals having different electronegativities, such as Ag, and polymer materials, such as polyvinyl chloride (PVC). Wherein, if one is metal, one of the 22 or 25 electrode layers mentioned above can be omitted;
the organic memory layer of the functional region B of fig. 1 may be a floating gate structure organic memory layer or an organic photosensitive memory layer;
the schematic diagram of the organic memory layer with the floating gate structure in the functional region B is shown in fig. 3, and includes a substrate with a gate electrode, an isolation insulating layer, a floating gate, a tunneling insulating layer, an organic semiconductor layer, and source and drain electrodes.
The substrate 31 is a substrate with a gate electrode, and may be an ITO-plated glass substrate or an ITO-plated flexible substrate, such as a PET substrate.
32 is a barrier insulating layer, and a single material, such as polymethyl methacrylate (PMMA), or a composite insulating layer, using a metal oxide and polymer composite, such as Ta tantalum pentoxide, can be used2O5Compounding with PMMA;
33 is a floating gate layer, which can be metal such as Ta, Au, etc.;
34, a tunneling insulating layer, and a polymer material, such as polymethyl methacrylate (PMMA), Polystyrene (PS), etc.;
35 is an organic semiconductor layer, and P-type or N-type organic semiconductor, such as pentacene, C60Etc.;
36 is a source electrode and a drain electrode, and a metal such as gold or silver, or a transparent electrode material such as ITO;
example 2
Fig. 4 is a schematic view of an organic photosensitive memory layer in the functional region B, which includes a substrate with a gate electrode, an insulating layer, an organic photosensitive semiconductor layer, and source and drain electrodes.
The substrate 41 is a substrate with a gate electrode, and can be an ITO-plated glass substrate or an ITO-plated flexible substrate, such as a PET substrate.
42 is an insulating layer, and can be made of polymer material polymethyl methacrylateEsters (PMMA), etc., or with metal oxides, e.g. Ta pentoxide2O5；
43 an organic photosensitive semiconductor layer, pentacene or the like can be used;
44 is a source electrode and a drain electrode, and a metal such as gold or silver, or a transparent electrode material such as ITO;
fig. 5 shows the push-to-read memory characteristic of the organic friction memory with floating gate structure, and the working principle is as follows (taking P-type semiconductor, floating gate trapping electrons as an example):
when no external force is applied, the friction layers are separated from each other, and the voltage between the grid source and the grid source is zero. When an external acting force exists, the friction layers are in contact friction with each other, one layer is provided with positive charges and the other layer is provided with negative charges due to the electrostatic action to generate electrostatic potential energy, at the moment, the positive voltage is equal to a positive grid voltage applied to the memory layer, electrons in the semiconductor enter the floating grid layer to be captured under the action of the positive electric field, redundant holes are reserved in the semiconductor, channel current rises, signal writing is realized, and at the moment, a current curve is shifted to the right. After the external force is removed, the electrostatic potential can be lost, but electrons still remain in the floating gate layer and can be stored for a certain time. By changing the connection mode of the electrode layer of the friction power generation functional region and the gate and the source of the organic memory functional region (as can be understood by those skilled in the art, there are various means for changing the connection mode, for example, the connection terminal can be changed by manually operating a double-pole double-throw switch to switch the connection mode), a reverse electric field is applied by pressing again, so that the captured electrons return to the semiconductor layer to be recombined with holes, the channel current is reduced, the current curve returns to the original position, and signal erasure is realized.
Fig. 6 shows the photosensitive and push-to-light memory characteristics of the organic photosensitive tribo-memory, which operate according to the following principle (taking a P-type photosensitive semiconductor as an example):
when no light acts, the source and drain channels are not opened, and the source and drain currents (I)DS) Is smaller. Under irradiation, the organic semiconductor layer with photosensitive property absorbs photons to generate photogenerated excitons, the excitons are rapidly split into electron-hole pairs, and the split electrons are absorbed by the insulating layer, the insulating layer and the organic semiconductor layerCapturing defects in the interface of the organic semiconductor layer or the organic semiconductor, increasing the carrier concentration in the conductive channel by the residual holes, opening the source and drain channels, and IDSThus, the device completes the optical writing process, and the current can be maintained for a certain time. If an external force is applied, the friction layers are contacted with each other to generate an electrostatic potential, electrons are more easily captured by the defects under the action of the electric field, more holes are left in the semiconductor, and I is at the momentDSAnd the current curve has larger right shift amplitude. Changing the connection mode between the friction electricity generating layer and the memory layer, applying acting force in dark room, applying a reverse electric field to re-release the trapped carriers, and recombining the carriers with holes, IDSThus decreasing, the current curve reverts, i.e., the erase process is completed. Therefore, the multi-signal storage process of optical signal writing and pressing auxiliary optical signal writing is realized.
Example 4
Fig. 7 is a schematic circuit diagram of a fully flexible wearable compression monitoring system including a sensing and write storage (and reset) system of compression signals, this portion being assumed by the organic friction memory, and an output portion of the stored signals, this portion being assumed by a light emitting diode. The pressed signal is induced by the friction power generation layer (function area A) of the organic friction memory, converted into electrostatic potential and applied to the organic memory layer (function area B), the signal is stored by the latter, and the stored signal can influence the magnitude of the source-drain channel current of the organic memory layer (function area B), thereby influencing the brightness change of the light-emitting diode connected with the organic memory layer (function area B) and giving warning action. A switch converter (double-pole double-throw switch) is connected between the functional area A and the functional area B and used for converting two connection modes between two electrodes of the functional area A and a grid electrode and a source electrode of the functional area B.
Example 5
The preparation method of the organic friction memory with the flexible floating gate structure comprises the following steps:
firstly, cleaning two flexible PET substrates, sputtering a 150nm ITO layer on one surface of one PET substrate as an upper substrate, and sputtering 100nm Cu (as a function)One electrode in the region a), the ITO layer is used to prepare a gate electrode using a photolithography method. A layer of 100nm Cu (as the other electrode in functional region a) was prepared on another PET substrate, over which a 100um polyvinyl chloride (PVC) layer was overlaid. The PVC faces the Cu layer of the first substrate. Thereby completing the triboelectric nanogenerator layer. Magnetron sputtering Ta on the ITO layer of the upper substrate2O5The ratio of oxygen to argon is 3: 7. And then spin-coating a layer of PMMA with a thickness of 20 nanometers by a wet method, then sputtering metal Ta with a thickness of 2 nanometers, and then spin-coating a layer of PMMA with a thickness of 20 nanometers. After heat treatment at 70 ℃ for 1 hour, a 45nm layer of pentacene was vacuum evaporated. Then, 45nm gold electrodes were vacuum-evaporated as source and drain electrodes using a mask. Thus, a flexible floating gate structure organic friction memory is completed.
The memory characteristics are shown in fig. 5.
Example 6
The preparation method of the organic photosensitive friction memory comprises the following steps:
firstly, two pieces of organic glass are cleaned, wherein one organic glass substrate is an upper substrate. An ITO layer with the thickness of 150nm is sputtered on one surface of the substrate, Cu with the thickness of 100nm (serving as an electrode in the functional area A) is prepared on the other surface of the substrate, and the ITO layer is used for preparing a grid electrode by utilizing a photoetching method. A layer of 100nm Cu (as the other electrode in functional region a) was prepared on another organic glass substrate, over which a 100um polyvinyl chloride (PVC) layer was overlaid. The PVC faces the Cu layer of the first substrate. Thereby completing the triboelectric nanogenerator layer. Magnetron sputtering Ta on the ITO layer of the upper substrate2O5The oxygen-argon gas ratio is 1: 1. then a 45nm layer of pentacene was vacuum evaporated. Then, 45nm gold electrodes were vacuum-evaporated as source and drain electrodes using a mask. Thus, an organic photo-sensitive friction memory is completed.
The memory characteristics are shown in fig. 6.
Example 7
A full-flexible wearable pressing monitoring system is prepared, and the preparation process comprises the following steps:
first, a flexible organic tribomemory was prepared, which was prepared as in example 1.
Secondly, preparing flexible organic luminescenceThe diode (OLED) is characterized in that an ITO electrode is photoetched on a flexible PET substrate, and then a 50nm NPB is deposited on the substrate to serve as a hole carrier transport layer by a vacuum evaporation method; then, the vacuum co-evaporation method is continuously utilized to evaporate and plate 50nm Alq3. Then, 50nm of Mg-Ag (10:1) electrode was evaporated by vacuum evaporation, and then 150nm of Ag electrode was evaporated. Such a flexible OLED device is completed.
The organic tribomemory and the organic light-emitting diode are connected by the following circuit (schematic fig. 7). A switch converter (double-pole double-throw switch) is connected between the functional area A and the functional area B of the organic memory and is used for converting two connection modes between two electrodes of the functional area A and a grid electrode and a source electrode of the functional area B. The organic memory can be placed in confidential documents to be protected, and the organic light emitting diode as a detection system can be worn on a human body. Any touch on the confidential document will be recorded, and the organic light emitting diode is turned on to emit light, thereby providing warning effect. Since the stored signal can be maintained for a period of time, the light emission will be maintained. When the system needs to be reset, the connection mode is changed through the double-pole double-throw switch in the figure, the organic memory is pressed again, the written-in signal can be erased, the diode is closed, and the system can be reset and can be used again.
It should be understood that the above examples are only for clarity of illustration and are not intended to limit the embodiments. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. And are neither required nor exhaustive of all embodiments. And obvious variations or modifications therefrom are within the scope of the invention.

Claims (28)

1. A fully flexible wearable press monitoring system, comprising:
the organic memory comprises a functional area A and a functional area B, and is used for sensing and storing a pressing signal, wherein the functional area A is a friction power generation layer for receiving and transmitting an input mechanical signal, and the functional area B is a storage layer for storing the signal;
the flexible organic light emitting diode is coupled with the organic memory and used for reading and displaying the stored signals;
the pressed signal is induced by a friction power generation layer (functional area A) of the organic memory, converted into electrostatic potential and applied to the organic memory layer (functional area B), the signal is stored by the organic memory layer, and the stored signal influences the magnitude of source-drain channel current of the organic memory layer (functional area B), so that the brightness change of the diode is influenced.
2. The fully flexible wearable compression monitoring system according to claim 1, wherein the functional region a comprises two substrates, two electrodes and two friction layers, wherein one substrate, one electrode and one friction layer are sequentially arranged to form a first power generation layer, and the other friction layer, the other electrode and the other substrate are sequentially arranged to form a second power generation layer, the friction layer in the first power generation layer is adjacent to the friction layer in the second power generation layer, and the first power generation layer and the second power generation layer can perform relative friction motion.
3. The fully flexible wearable press monitoring system according to claim 2, wherein the functional region B is provided with a substrate with a gate electrode, an isolation insulating layer, a source electrode and a drain electrode, a floating gate, a tunneling insulating layer and an organic semiconductor layer in this order.
4. The fully flexible wearable press monitoring system according to claim 2, wherein the functional area B is provided with a substrate with a gate electrode, an insulating layer, an organic photosensitive semiconductor layer, a source electrode and a drain electrode in this order.
5. The fully flexible wearable compression monitoring system according to claim 2 or 3, wherein each electrode in the organic memory comprises two connection modes, wherein the first connection mode is that an electrode in a first power generation layer in the functional region A is connected with a source electrode in the functional region B, and an electrode in a second power generation layer in the functional region A is connected with a gate electrode in the functional region B; in a second connection mode, an electrode in the first power generation layer in the functional region a is connected to a gate electrode in the functional region B, and an electrode in the second power generation layer in the functional region a is connected to a source electrode in the functional region B.
6. The fully flexible wearable compression monitoring system of claim 5, further comprising: and the switching converter is used for switching the two connection modes of the electrodes in the organic memory.
7. The fully flexible wearable compression monitoring system of claim 2, one of the two friction layers acting as both an electrode and a friction layer.
8. The fully flexible wearable compression monitoring system of claim 2, wherein the substrate is a rigid substrate.
9. The fully flexible wearable compression monitoring system of claim 8 wherein the material of the hard substrate is plexiglass.
10. The fully flexible wearable compression monitoring system of claim 2, wherein the substrate is a soft substrate.
11. The fully flexible wearable compression monitoring system of claim 10, wherein the material of the soft substrate is polyethylene terephthalate (PET).
12. The fully flexible wearable compression monitoring system of claim 2, wherein the material of the electrode is Cu.
13. The fully flexible wearable compression monitoring system of claim 2, wherein the two friction layers are each made of a material having a different electronegativity.
14. The fully flexible wearable compression monitoring system of claim 13, wherein the material of the friction layer includes a metal and a polymer.
15. The fully flexible wearable compression monitoring system of claim 14, wherein the polymer comprises polyvinyl chloride and the metal comprises Ag.
16. The fully flexible wearable press monitoring system according to claim 3 or 4, wherein the substrate with the gate electrode is one of an ITO-coated glass substrate or an ITO-coated flexible substrate.
17. The fully flexible wearable compression monitoring system of claims 3 or 4 wherein the substrate with gate electrodes is a PET substrate.
18. The fully flexible wearable compression monitoring system of claim 3, wherein the insulating layer is made of a single material that is polymethyl methacrylate.
19. The fully flexible wearable compression monitoring system of claim 3, wherein the insulating layer is made of a composite material comprising a metal oxide and a polymer, wherein the metal oxide is tantalum pentoxide and the polymer is polymethylmethacrylate.
20. The fully flexible wearable compression monitoring system of claim 3, wherein the floating gate layer is made of a metal material.
21. The fully flexible wearable compression monitoring system of claim 3, wherein the tunneling insulation layer is made of a polymer material including polymethylmethacrylate, polystyrene.
22. The fully flexible wearable compression monitoring system of claim 3, wherein the organic semiconductor layer is an organic semiconductor.
23. The fully flexible wearable compression monitoring system of claim 3 or 4, wherein the source and drain electrodes are made of a metallic material.
24. The fully flexible wearable compression monitoring system of claim 3 or 4, wherein the source and drain electrodes are made of a transparent electrode material.
25. The fully flexible wearable compression monitoring system of claim 4, wherein the insulating layer is made of polymethylmethacrylate or made of metal oxide.
26. The fully flexible wearable compression monitoring system of claim 4, wherein the organic photosensitive semiconductor layer is made of pentacene.
27. A preparation method of a full-flexible wearable pressing monitoring system is characterized by comprising the following steps:
preparing an organic memory, wherein the preparing of the organic memory comprises the following steps: cleaning two flexible PET substrates, sputtering a 150nm ITO layer on one surface of one PET substrate serving as an upper substrate, sputtering 100nm Cu on the other surface of the one PET substrate, and preparing a grid electrode on the ITO layer by using a photoetching method; preparing a 100nm Cu layer on another PET substrate, and covering a 100um polyvinyl chloride (PVC) layer on the Cu layer; the PVC is opposite to the Cu layer of the first substrate; performing magnetron sputtering on the ITO layer of the upper substrate to obtain Ta2O5, wherein the oxygen-argon ratio is 3: 7; spin-coating a layer of PMMA (polymethyl methacrylate) layer with the thickness of 20 nanometers by a wet method, then sputtering metal Ta with the thickness of 2 nanometers, and then spin-coating a layer of PMMA layer with the thickness of 20 nanometers; after heat treatment for 1 hour at 70 ℃, a layer of 45nm pentacene is evaporated in vacuum; vacuum evaporating a 45nm gold electrode as a source electrode and a drain electrode by using a mask;
photoetching an ITO electrode on a flexible PET substrate, and then depositing a 50nm NPB (N-propyl-beta) serving as a hole carrier transport layer on the substrate by using a vacuum evaporation method; then, the vacuum co-evaporation method is continuously utilized to evaporate and plate 50nm Alq3(ii) a Then, 50nm of Mg-Ag (10:1) electrode was evaporated by vacuum evaporation, and then 150nm of Ag electrode was evaporated.
28. A preparation method of a full-flexible wearable pressing monitoring system is characterized by comprising the following steps:
preparing an organic memory, wherein the preparing of the organic memory comprises the following steps: cleaning two pieces of organic glass, wherein one organic glass substrate is an upper substrate; sputtering an ITO layer with the thickness of 150nm on one surface of the substrate, sputtering Cu with the thickness of 100nm on the other surface of the substrate, and preparing a grid electrode by the ITO layer by using a photoetching method; preparing a 100nm Cu layer on another organic glass substrate, and covering a 100um polyvinyl chloride (PVC) layer on the 100nm Cu layer; the PVC is opposite to the Cu layer of the first substrate; magnetron sputtering Ta on the ITO layer of the upper substrate2O5The oxygen-argon gas ratio is 1: 1; vacuum evaporating a 45nm pentacene layer; vacuum evaporating a 45nm gold electrode as a source electrode and a drain electrode by using a mask;
photoetching an ITO electrode on a flexible PET substrate, and then depositing a 50nm NPB (N-propyl-beta) serving as a hole carrier transport layer on the substrate by using a vacuum evaporation method; then, evaporating 50nm Alq3 by using a vacuum co-evaporation method; then, 50nm of Mg-Ag (10:1) electrode was evaporated by vacuum evaporation, and then 150nm of Ag electrode was evaporated.
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