CN106568518B - Integrated temperature and humidity pressure flexible sensor based on wet sensitive hose and preparation method thereof - Google Patents
Integrated temperature and humidity pressure flexible sensor based on wet sensitive hose and preparation method thereof Download PDFInfo
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- CN106568518B CN106568518B CN201610941049.6A CN201610941049A CN106568518B CN 106568518 B CN106568518 B CN 106568518B CN 201610941049 A CN201610941049 A CN 201610941049A CN 106568518 B CN106568518 B CN 106568518B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
- G01K7/02—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using thermoelectric elements, e.g. thermocouples
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
- G01N27/223—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity
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Abstract
The present invention provides a kind of warm and humid pressure sensors of the flexible integration based on wet sensitive hose and preparation method thereof, sensor includes: wetness sensitive polymer hose substrate, and the capacitance type humidity sensor, temperature sensor and the piezoresistive pressure sensor that are set on wetness sensitive polymer hose substrate；Capacitance type humidity sensor is made of mesh electrode and using wetness sensitive polymer hose substrate as capacitor dielectric；Temperature sensor is the thermocouple being made of platinum electrode and platinum rhodium electrode, and a part of platinum rhodium electrode covers a part of platinum electrode to constitute the hot junction of thermocouple；Piezoresistive pressure sensor is made of platinum filament, and platinum filament is looped around on the lateral surface of wetness sensitive polymer hose substrate.The resistance type humidity sensor structure of mesh electrode of the present invention is simple, precision is high, and wetness sensitive polymer medium and air contact area is made to be conducive to moisture absorption more greatly；Film thermocouple structure is simple, and measurement accuracy is high, can effectively detect the variation of multiple directions pressure.
Description
Technical field
The present invention relates to sensor technical fields, specifically, be related to it is a kind of using MEMS technology production one kind be based on it is wet
Photosensitive polymerization object hose substrate temperature, humidity and the integrated flexible sensor of pressure and preparation method thereof.
Background technique
Hot spot of the Internet of Things as generation information technology, there is boundless prospect.Sensor technology is Internet of Things
The basis of realization.Current sensor is mostly split type sensor, that is, needs individually to install measurement temperature, pressure and wet
The sensor of degree, therefore area needed for installation product is big, at high cost, it is particularly disadvantageous stringent in being mounted on some pairs of sizes requirements
Occasion.Therefore integrated transducer is the inexorable trend of future development.It is integrated to refer to the identical (phase of (multiple) function
Sensor or integrated circuit together) is integrated in a module, has reached feature-richization, miniaturization, device miniaturization
The characteristics of.
Flexible wearable equipment is more more and more universal in people's lives, needs using flexible material as substrate.Traditional
Integrated sensor, be mostly based on hard planar substrate, by sensor production on a silicon or glass planar, this biography
The compatibility of sensor and flexible substrates is very poor.And it is produced on the sensor of flexible base material at present, it is by flexible substrates mostly
It is affixed in planar substrate, then removes, be made based on flexible substrates from planar substrates after then making sensor on substrate
Sensor, but the flexible sensor made in this way cannot have big bending, cannot save very large space,
Therefore certain small spaces be cannot be used for.Need the occasion of substrate material large deformation.And programmable ultraviolet photolithographic technology is utilized, in circle
Directly graphical production sensor, the flexible sensor of production can be bent on pipe, and large deformation, and volume very little occurs, can
It is widely used in a variety of occasions, pushes the development of wearable device.
Traditional piezoresistive pressure sensor primary structure is maximum on plane silicon thin film with the method for plating or diffusion
The position of strain forms resistance, Lai Tigao sensitivity.The pressure drag actual measurement of these sensors be film edge strain；This
It is outer also to use metal strain plate, the variation of pressure is detected using the strain effect of metal.But this kind of piezoresistive transducer is
Increase output signal and be arranged by the way of bridge, and generally requires to etch below film to increase strain rate
A cavity out, therefore process complexity and technology difficulty are increased, and this sensor can only detect the pressure in a direction
Power.And novel platinum wire ring around pressure sensor structure do not need out cavity simply yet, simple process and detectable torsion,
Stretching, bending and the variation of multiple directions power, can be widely applied to multiple fields and occasion.
Current temperature sensor studies comparative maturity, the thermocouple made with platinum and platinum rhodium, performance rock-steady structure
It simply, and can be with high temperature resistant.
Mainly there are ceramics, porous silicon and high molecular polymer for preparing the wet sensory material of humidity sensor.Macromolecule electricity
After solving material moisture absorption, the presence of hydrone dipole moment makes its dielectric constant be greatly improved.Also due to high molecular polymerization
Object has preferable flexible and mechanical performance, is commonly used to preparation flexible humidity sensor.Wetness sensitive polymer itself is also a kind of property
The good wet sensory material of energy makes structure more using wetness sensitive polymer hose substrate itself as the capacitor dielectric of humidity sensor
Add simple, saving space.
Summary of the invention
The present invention integrates the deficiency of warm and humid pressure sensor for current plane formula, provides a kind of integrated based on wet sensitive hose
Temperature and humidity pressure flexible sensor and preparation method thereof has manufacture craft simple, and with higher sensitivity feature can use hose and answer
Field for multiple complexity.
The present invention is achieved by the following technical solutions:
According to an aspect of the present invention, a kind of integrated temperature and humidity pressure flexible sensor based on wet sensitive hose is provided, comprising:
Wetness sensitive polymer hose substrate, and be set on the wetness sensitive polymer hose substrate capacitance type humidity sensor, temperature
Sensor and piezoresistive pressure sensor；Wherein:
The capacitance type humidity sensor is made of mesh electrode and using wetness sensitive polymer hose substrate as capacitor dielectric,
The mesh electrode is symmetrically distributed on the side wall of wetness sensitive polymer hose substrate, forms the upper and lower of capacitance type humidity sensor
Pole plate；
The temperature sensor is the thermocouple being made of platinum electrode and platinum rhodium electrode, and a part of platinum rhodium electrode covers one
Part platinum electrode is to constitute the hot junction of thermocouple；Platinum electrode and platinum rhodium electrode sputter at the side wall of wetness sensitive polymer hose substrate
On, the variation for monitoring temperature；
The piezoresistive pressure sensor is made of platinum filament, and the platinum filament is looped around the outside of wetness sensitive polymer hose substrate
On face, the variation of the multiple directions power of stretching, bending, torsion for detecting wetness sensitive polymer hose substrate.
Preferably, the wetness sensitive polymer hose substrate uses wetness sensitive polymer material, and the wetness sensitive polymer includes simultaneously
It is not limited to the capacitive polymer material of polyimides, polyacetylene benzene, cellulose acetate.
It is highly preferred that the outer diameter of the wetness sensitive polymer hose substrate is 2-4 millimeters, internal diameter is 1-3 millimeters, length is
20-30 millimeters, smaller size can be applied to more more accurate occasions.
Preferably, two of the mesh electrode symmetrical upper and lower pole plates are wrapped in the outer of wetness sensitive polymer hose substrate
On wall, and between upper and lower pole plate leaving gap to prevent short-circuit between plates.
It is highly preferred that the material of the mesh electrode is one kind of platinum, silver and copper.
Preferably, the thermocouple: platinum electrode and platinum rhodium electrode are two pieces of symmetrical T font thin film metal layers, two pieces of T words
The tail portion of type thin film metal layer is stacked together to form the hot junction of thermocouple, and in addition to area is 0.01-0.1 square micron
Hot junction outside, two pieces of T font thin film metal layers of rest part mutually insulate.
Preferably, the platinum filament makes platinum loop be wound on wetness sensitive polymer by sputtering platinum on wetness sensitive polymer hose substrate
On hose substrate side wall, to form piezoresistive pressure sensor；
When wetness sensitive polymer hose substrate is generated bend tension torsional deflection by the effect of external force, platinum filament occurs simultaneously
Deformation, causes the resistance of platinum filament to change, to realize the pressure change of detection multiple directions and torsion.
Preferably, the platinum filament of the mesh electrode of the humidity sensor and the pressure sensor is located at by platinum electrode
The thermocouple formed with platinum rhodium electrode, the i.e. two sides of temperature sensor, to prevent that short circuit occurs between each sensor.
The present invention uses wetness sensitive polymer hose as substrate, and the capacitor dielectric as capacitance type humidity sensor, wet
Photosensitive polymerization object material itself has the characteristic of moisture absorption, to substantially change the dielectric constant of medium, keeps capacitance variation bigger；Together
When can effectively reduce production humidity sensor volume and process complexity；It additionally can use wetness sensitive polymer hose
Small in size, flexible advantage application Various Complex occasion.
The electrode of capacitance type humidity sensor of the present invention is mesh electrode, and mesh electrode can effectively increase wet sensitive
The contact area of polymer capacitor dielectric and external environment, to increase hygroscopicity.
According to another aspect of the present invention, a kind of preparation of integrated temperature and humidity pressure flexible sensor based on wet sensitive hose is provided
Method, the method by wetness sensitive polymer hose substrate pass through multiple curved surface whirl coating, rotation photoetching, sputtering technology, from
And form the integrated temperature and humidity pressure flexible sensor based on wetness sensitive polymer hose substrate；
Described method includes following steps:
The first step sprays photoresist on wetness sensitive polymer hose substrate, by programmable EUV lithographic apparatus and uses
Photoetching technique is rotated, the mesh electrode of humidity sensor is patterned, sputters chromium adhesion layer, copper, platinum or silver electrode layer are gone
Except photoresist, the upper bottom crown of moisture sensor mesh electrode is formed；
Second step, on the wetness sensitive polymer hose substrate for the moisture sensor mesh electrode that completes spray photoresist with
Cover netted electrode layer, general rotation photoetching technique, using different mask plates respectively to the platinum of thermocouple and pressure sensing
The platinum filament of device is patterned, sputtered titanium adhesive layer, platinum electrode layer；Then photoresist is removed, the platinum filament of pressure sensor is formed
And the platinum electrode of thermocouple；
Third step, the covering of spraying photoresist is made on the wetness sensitive polymer hose substrate by first two steps processing
The platinum electrode of thermocouple, graphical platinum rhodium electrode, after development, sputtered titanium adhesive layer, platinum rhodium electrode layer finally remove photoresist,
Form the platinum rhodium electrode of thermocouple；
So far, the integrated temperature and humidity pressure flexible sensor based on wet sensitive hose is obtained.
Compared with prior art, the present invention have it is following the utility model has the advantages that
By the present invention in that using wet sensory material wetness sensitive polymer hose as substrate, capacitance type humidity sensor can be used as
Capacitor dielectric, the effective volume and process complexity for reducing production humidity sensor；Around the platinum filament resistance pressure type pressure of hose
Force snesor is used to detect the variation of the multiple directions power such as round tube stretching, bending, torsion.In addition, manufacture craft of the present invention is simple,
Sensitivity is higher, can use the field that hose is applied to multiple complexity.
Detailed description of the invention
Upon reading the detailed description of non-limiting embodiments with reference to the following drawings, other feature of the invention,
Objects and advantages will become more apparent upon:
Fig. 1 is the structure front view of one embodiment of the present invention；
In figure: PI hose substrate 1, mesh electrode 2, platinum electrode 3, platinum rhodium electrode 4, platinum filament 5；
Fig. 2 is the perspective view of one embodiment of the present invention；
Fig. 3 is the right view of one embodiment of the present invention；
Fig. 4 is the top view of one embodiment of the present invention.
Specific embodiment
It elaborates below to the embodiment of the present invention, the present embodiment carries out under the premise of the technical scheme of the present invention
Implement, the detailed implementation method and specific operation process are given, but protection scope of the present invention is not limited to two of subordinate
Embodiment.
Embodiment 1
As Figure 1-Figure 4, a kind of integrated temperature and humidity pressure flexible sensor based on wet sensitive hose, by PI hose substrate 1, net
Thermocouple, the platinum filament 5 of humidity sensor, platinum electrode 3 and the composition of platinum rhodium electrode 4 that shape electrode 2 and PI hose substrate 1 are constituted form
Pressure sensor composition；Wherein:
For the humidity sensor using PI hose substrate 1 as capacitor dielectric, the mesh electrode is symmetrically distributed in PI hose
On the side wall of substrate 1, the upper and lower pole plate of capacitance type humidity sensor is formed；
The platinum electrode 3 and platinum rhodium electrode 4 sputter on the side wall of PI hose substrate 1, for the variation of monitoring temperature, and
A part of platinum rhodium electrode 4 covers a part of platinum electrode 3 to constitute the hot junction of thermocouple；
The platinum filament 5 is looped around on the lateral surface of PI hose substrate 1, when PI hose substrate 1 is generated by the effect of external force
When bend tension torsional deflection, platinum filament 5 deforms simultaneously, and the resistance of platinum filament 5 is caused to change, to realize that detection is multiple
The pressure change of direction and torsion.
As a preferred embodiment, the diameter of the PI hose substrate 1 is 3 microns.
As a preferred embodiment, the mesh of the mesh electrode 2 is 100 microns a length of, width is 50 microns, between mesh
Spacing be 70 microns；The mesh electrode 2 can effectively increase the contact area of PI hose substrate 1 Yu external environment, thus
Increase hygroscopicity.
As a preferred embodiment, the platinum electrode 3 and platinum rhodium electrode 4 are two pieces of symmetrical T font film metals
Layer, the tail portion of two pieces of T font thin film metal layers are stacked together to form the hot junction of thermocouple, and in addition to area is 0.01-
Outside the hot junction of 0.1 square micron, two pieces of T font thin film metal layers of rest part mutually insulate.
Further, the thickness of the platinum electrode 3 is 1 micron；The thickness of the platinum rhodium electrode 4 is 1 micron.
As a preferred embodiment, the width of the platinum filament 5 is that 70 micron, are divided into 50 microns, totally 50 circle.
The present embodiment, as substrate, can be used as the capacitor dielectric of capacitance type humidity sensor, have by using PI hose
The volume and process complexity of the reduction production humidity sensor of effect；Compared to traditional plane pressure sensor, around soft
The platinum filament pressure drag type pressure capsule of pipe is used to detect the variation of the multiple directions power such as round tube stretching, bending, torsion.In addition, this
Embodiment manufacture craft is simple, and sensitivity is higher, can use the field that hose is applied to multiple complexity.
Embodiment 2
A kind of preparation method of the integrated temperature and humidity pressure flexible sensor based on wet sensitive hose, the method includes walking as follows
It is rapid:
The first step, the photoresist that 1-3 microns are sprayed on PI hose substrate are used by may be programmed EUV lithographic apparatus
Rotation photoetching technique is patterned the mesh electrode of humidity sensor, 30-50 nanometers of chromium adhesion layers of sputtering, 1 micron thick
Copper electrode layer removes photoresist, forms the upper bottom crown of moisture sensor mesh electrode；
Second step, spraying photoresist cover netted electrode layer, and general rotation photoetching technique is distinguished using different mask plates
The platinum filament of platinum and pressure sensor to thermocouple is patterned, the titanium adhesive layer of 30 nanometers of sputtering and 1 micron
Then platinum electrode layer removes photoresist, form the platinum filament of pressure sensor and the platinum electrode of thermocouple；
Third step, spraying photoresist cover the platinum electrode for the thermocouple made, and graphical platinum rhodium electrode sputters after development
30 nanometers of titanium adhesive layer, 1 micron of platinum rhodium electrode layer, finally remove photoresist, form the platinum rhodium electrode of thermocouple.
Above embodiments are on the basis of process flow is simple, by making temperature and humidity pressure flexible sensing on PI hose substrate
Device keeps the structure of sensor simpler, and volume is smaller, is applied to more complicated occasions.
The resistance type humidity sensor of mesh electrode of the present invention has structure simple, the high advantage of measurement accuracy, netted electricity
Pole makes wetness sensitive polymer medium and air contact area be conducive to moisture absorption more greatly；Film thermocouple structure is simple, and measurement accuracy is high；
Annular platinum filament structure using rotation photoetching technique production is simple, can effectively detect the variation of multiple directions pressure.
It should be pointed out that above-described embodiment is two embodiments of the invention using micro-processing method, can also change
Type, the size of metal structure and the type for becoming polymer, are not limited solely to the description of examples detailed above, and the present invention can be achieved
Purpose.
Above examples describe advantages of the present invention and micro-processing methods, It should be understood by those skilled in the art that not
The present invention also has various improvement and optimization under the premise of being detached from spirit and scope of the invention, these are improved and optimization both falls within and wants
It asks in the scope of the invention of protection, the claimed scope of the invention is defined by appended claims and its equivalent.
Claims (9)
1. a kind of integrated temperature and humidity pressure flexible sensor based on wet sensitive hose characterized by comprising wetness sensitive polymer hose lining
Bottom, and the capacitance type humidity sensor, temperature sensor and the pressure resistance type pressure that are set on the wetness sensitive polymer hose substrate
Force snesor；Wherein:
The capacitance type humidity sensor is made of mesh electrode and using wetness sensitive polymer hose substrate as capacitor dielectric, described
Mesh electrode is symmetrically distributed on the side wall of wetness sensitive polymer hose substrate, forms the upper and lower pole plate of capacitance type humidity sensor；
The temperature sensor is the thermocouple being made of platinum electrode and platinum rhodium electrode, and the covering of a part of platinum rhodium electrode is a part of
Platinum electrode is to constitute the hot junction of thermocouple；Platinum electrode and platinum rhodium electrode sputter on the side wall of wetness sensitive polymer hose substrate,
Variation for monitoring temperature；
The piezoresistive pressure sensor is made of platinum filament, and the platinum filament is looped around the outside of the wetness sensitive polymer hose substrate
On face, the variation of the multiple directions power of stretching, bending, torsion for detecting wetness sensitive polymer hose substrate.
2. a kind of integrated temperature and humidity pressure flexible sensor based on wet sensitive hose according to claim 1, which is characterized in that institute
Wetness sensitive polymer hose substrate is stated using wetness sensitive polymer material, the wetness sensitive polymer material is capacitive polymer material.
3. a kind of integrated temperature and humidity pressure flexible sensor based on wet sensitive hose according to claim 2, which is characterized in that institute
The outer diameter for stating wetness sensitive polymer hose substrate is 2-4 millimeters, internal diameter is 1-3 millimeters, length is 20-30 millimeters.
4. a kind of integrated temperature and humidity pressure flexible sensor based on wet sensitive hose according to claim 1, which is characterized in that institute
Two of mesh electrode symmetrical upper and lower pole plates are stated to be wrapped on the outer wall of wetness sensitive polymer hose substrate, and upper and lower pole plate it
Between leaving gap to prevent short-circuit between plates.
5. a kind of integrated temperature and humidity pressure flexible sensor based on wet sensitive hose according to claim 4, which is characterized in that institute
The material for stating mesh electrode is one kind of platinum, silver and copper.
6. a kind of integrated temperature and humidity pressure flexible sensor based on wet sensitive hose according to claim 1, which is characterized in that institute
State thermocouple: platinum electrode and platinum rhodium electrode are two pieces of symmetrical T font thin film metal layers, the tail of two pieces of T font thin film metal layers
Portion is stacked together to form the hot junction of thermocouple, and other than area is the hot junction of 0.01-0.1 square micron, remaining
Two pieces of partial T font thin film metal layers mutually insulate.
7. a kind of integrated temperature and humidity pressure flexible sensor based on wet sensitive hose according to claim 1, which is characterized in that institute
Platinum filament is stated by sputtering platinum on wetness sensitive polymer hose substrate, is wound on platinum loop on wetness sensitive polymer hose substrate side wall, with
Form piezoresistive pressure sensor；
When wetness sensitive polymer hose substrate is generated bend tension torsional deflection by the effect of external force, platinum filament becomes simultaneously
Shape causes the resistance of platinum filament to change, to realize the pressure change of detection multiple directions and torsion.
8. a kind of integrated temperature and humidity pressure flexible sensor based on wet sensitive hose according to claim 1-7, special
Sign is that the platinum filament of the mesh electrode of the humidity sensor and the pressure sensor is located at by platinum electrode and platinum rhodium electricity
The thermocouple of pole composition, the i.e. two sides of temperature sensor, to prevent that short circuit occurs between each sensor.
9. a kind of preparation of the integrated temperature and humidity pressure flexible sensor according to claim 1-8 based on wet sensitive hose
Method, which is characterized in that described method includes following steps:
The first step sprays photoresist on wetness sensitive polymer hose substrate, by programmable EUV lithographic apparatus and with rotation
Photoetching technique is patterned the mesh electrode of humidity sensor, sputters chromium adhesion layer, and copper, platinum or silver electrode layer remove light
Photoresist forms the upper bottom crown of moisture sensor mesh electrode；
Second step sprays photoresist on the wetness sensitive polymer hose substrate for the moisture sensor mesh electrode that completes to cover
Mesh electrode layer, general rotation photoetching technique, using different mask plates respectively to the platinum of thermocouple and pressure sensor
Platinum filament is patterned, sputtered titanium adhesive layer, platinum electrode layer；Then remove photoresist, formed pressure sensor platinum filament and
The platinum electrode of thermocouple；
Third step, spraying photoresist covers the thermocouple made on the wetness sensitive polymer hose substrate by first two steps processing
Platinum electrode, graphical platinum rhodium electrode, after development, sputtered titanium adhesive layer, platinum rhodium electrode layer finally remove photoresist, form heat
The platinum rhodium electrode of galvanic couple；
So far, the integrated temperature and humidity pressure flexible sensor based on wet sensitive hose is obtained.
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| CN201610941049.6A CN106568518B (en) | 2016-10-25 | 2016-10-25 | Integrated temperature and humidity pressure flexible sensor based on wet sensitive hose and preparation method thereof |
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| CN111714734A (en) * | 2020-06-20 | 2020-09-29 | 冯孝强 | Medical intelligent atomization device for pediatrics |
| CN112683956B (en) * | 2021-01-13 | 2022-08-23 | 山东交通学院 | Gas humidity detection system based on potential difference |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH088170A (en) * | 1994-06-23 | 1996-01-12 | Fujitsu Ltd | Method of forming polyimide resin film, and device for forming polyimide resin film |
| CN1802552A (en) * | 2003-06-06 | 2006-07-12 | M.B.T.L.有限公司 | Environmental sensor |
| CN1845327A (en) * | 2005-04-07 | 2006-10-11 | 中国科学院电子学研究所 | Single slice integration temperature, humidity, pressure sensor chip based on polymer material |
| WO2014150093A1 (en) * | 2013-03-15 | 2014-09-25 | Robert Bosch Gmbh | Trench based capacitive humidity sensor |
| CN203940940U (en) * | 2014-06-13 | 2014-11-12 | 江苏多维科技有限公司 | A kind of sensor chip for many physical quantities |
-
2016
- 2016-10-25 CN CN201610941049.6A patent/CN106568518B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH088170A (en) * | 1994-06-23 | 1996-01-12 | Fujitsu Ltd | Method of forming polyimide resin film, and device for forming polyimide resin film |
| CN1802552A (en) * | 2003-06-06 | 2006-07-12 | M.B.T.L.有限公司 | Environmental sensor |
| CN1845327A (en) * | 2005-04-07 | 2006-10-11 | 中国科学院电子学研究所 | Single slice integration temperature, humidity, pressure sensor chip based on polymer material |
| WO2014150093A1 (en) * | 2013-03-15 | 2014-09-25 | Robert Bosch Gmbh | Trench based capacitive humidity sensor |
| CN203940940U (en) * | 2014-06-13 | 2014-11-12 | 江苏多维科技有限公司 | A kind of sensor chip for many physical quantities |
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