CN106547011A - A kind of isotope spectral line scanning means control system - Google Patents
A kind of isotope spectral line scanning means control system Download PDFInfo
- Publication number
- CN106547011A CN106547011A CN201610903301.4A CN201610903301A CN106547011A CN 106547011 A CN106547011 A CN 106547011A CN 201610903301 A CN201610903301 A CN 201610903301A CN 106547011 A CN106547011 A CN 106547011A
- Authority
- CN
- China
- Prior art keywords
- probe
- stepping motor
- isotope
- spectral line
- driving stepping
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/29—Measurement performed on radiation beams, e.g. position or section of the beam; Measurement of spatial distribution of radiation
- G01T1/2914—Measurement of spatial distribution of radiation
- G01T1/2921—Static instruments for imaging the distribution of radioactivity in one or two dimensions; Radio-isotope cameras
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/29—Measurement performed on radiation beams, e.g. position or section of the beam; Measurement of spatial distribution of radiation
- G01T1/2914—Measurement of spatial distribution of radiation
- G01T1/2964—Scanners
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Physics & Mathematics (AREA)
- High Energy & Nuclear Physics (AREA)
- Molecular Biology (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Measurement Of Radiation (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
Abstract
The invention belongs to Electromagnetic isotope separator technical field, and in particular to a kind of isotope spectral line scanning means control system.Including the PLC module for being connected with display control apparatus, PLC module is connected with the isotope spectral line scanning means being arranged on the receiver of Electromagnetic isotope separator；Isotope spectral line scanning means includes the probe of the current signal that can detect the ion beam after Electromagnetic isotope separator is separated, probe can be made to do three-dimensional mobile mechanical transmission mechanism；PLC module can gather, record the locus signal and current signal of probe；Display control apparatus be used for show mechanical transmission mechanism motion and position data, PLC module obtain signal data, be additionally operable to be input into control machinery transmission mechanism control instruction, by the operation of PLC module control machinery transmission mechanism.The control system can realize the precise control to probe positions, it is ensured that the certainty of measurement result；Realize to it is mutually wide it is wider in the case of line distribution process with show.
Description
Technical field
The invention belongs to Electromagnetic isotope separator technical field, and in particular to a kind of isotope spectral line scanning means control
System.
Background technology
Electromagnetism separation method has indispensable status in isotopic separation field, and electromagnetic separation is using energy phase
Same, quality different ions radius of turn difference in transverse magnetic field realizes isotopic separation.Electromagnetic isotope separator is just
It is using the isolated isotopic equipment of electromagnetism separation method.The ion of ion beam to be separated from Electromagnetic isotope separator
Project in source, the magnetic field in Jing Electromagnetic isotope separators separates, then received by reception device, complete isotopic separation work
Make.
Isotopic ion beam after Electromagnetic isotope separator is separated all will be collected, it is necessary to ion beam
The cross direction profiles of the beam current density on focussing plane are measured, so that receiver (receives the isotopic ion beam after separating
Device) optimal focusing surface can be directed at.Ion gun in Electromagnetic isotope separator is drawn by three electrode extraction systems
After ion beam, through magnetic core logical circuit deflection, the isotope of different quality can converge in the different spatial of focusing surface and realize separating,
The phenomenon is referred to as dispersion.Dispersion distance is bigger, is more conducive to isotopic separation.Spectral line scanning means exists for measuring ion beam
Separation and exposing condition after separating magnet, and for finding optimal focusing surface.So as to realize that receiver is being connect
Before receipts, the position of ion beam is corresponding with receiver to receive pocket position alignment, it is ensured that isotope abundance.
The present invention is for controlling the motion of spectral line scanning means and signal acquisition and the control system for processing.Spectrum can be realized
Line scanning device docking collects the on-line measurement of stream spectral profile.
The content of the invention
It is in order to realize the measurement of the cross direction profiles of ion beam internal beam current density on focussing plane, straight using Faraday cup measurement
The current density contours of a fluid stream.In measurement process, need to realize the position motion of Faraday cup, measure line spatial distribution,
And realize that the Two dimensional Distribution of measurement data shows.So as to realize receiver open gear door received before, the position of ion beam
Put and corresponding reception pocket position alignment, it is ensured that isotope abundance.
To reach object above, the technical solution used in the present invention is a kind of isotope spectral line scanning means control system,
Including the PLC module for being connected with display control apparatus, wherein the PLC module and the reception for being arranged on Electromagnetic isotope separator
Isotope spectral line scanning means on device is connected；
The isotope spectral line scanning means includes detecting the ion beam after the Electromagnetic isotope separator is separated
Current signal probe, the probe can be made to do three-dimensional mobile mechanical transmission mechanism；
The PLC module can gather, record the locus signal and the current signal of the probe；
The display control apparatus are used for motion and position data, the PLC module for showing the mechanical transmission mechanism
The signal data of acquisition, is additionally operable to be input into the control instruction of the control mechanical transmission mechanism, controls institute by the PLC module
State the operation of mechanical transmission mechanism.
Further, the isotope spectral line scanning means includes popping one's head in made by Faraday cup, and the probe can be detected
The current signal of the ion beam after the Electromagnetic isotope separator separation, the probe are arranged on probe plate, the probe
Plate is arranged on the framework of the receiver in the Electromagnetic isotope separator；
Also include that the probe plate that can make being arranged on the receiver does three-dimensional mobile mechanical transmission mechanism, also
Including the electronic circuit for connecting the PLC module and the probe.
Further, the scope that the mechanical transmission mechanism can provide the dynamic space of triple motion of the probe plate is 240mm
× 240mm × 240mm, the three-dimensional coordinate of three-dimensional mobile space include X-axis, Y-axis, Z axis, and the probe plate can be in the framework
On do rectilinear movement with the X-axis into 43 ° of angles.
Further, the mechanical transmission mechanism includes driving the cunning that the framework and the probe plate are moved forward and backward
Moving axis, what is be connected with each other move forward and backward Driving Stepping Motor and move forward and backward driving leading screw, described to move forward and backward driving stepping electricity
Machine is used to control moving forward and backward for the sliding axle with driving leading screw is moved forward and backward；
Also include pulley transmission structure and the scanning probe motion leading screw for interconnecting；
Also include the scanning head Driving Stepping Motor being connected with the pulley transmission structure by power transmission shaft, it is described to sweep
Retouching probe Driving Stepping Motor is used to drive scanning probe motion leading screw to enable the probe plate to do on said frame and institute
X-axis is stated into the rectilinear movement at 43 ° of angles.
Further, included by the control instruction that the display control apparatus are input into：
Arrange the scanning head Driving Stepping Motor and the target location coordinate for moving forward and backward Driving Stepping Motor,
The speed of service, step number；
Read the scanning head Driving Stepping Motor and it is described move forward and backward the current position coordinates of Driving Stepping Motor,
The speed of service；
Control scanning head Driving Stepping Motor and the Driving Stepping Motor that moves forward and backward are moved and are stopped.
Further, the motion of the mechanical transmission mechanism that the display control apparatus show and position data, institute
The signal data for stating PLC module acquisition includes：
The scanning head Driving Stepping Motor and the target location coordinate for moving forward and backward Driving Stepping Motor, operation
Speed, step number；
The scanning head Driving Stepping Motor and it is described move forward and backward the current position coordinates of Driving Stepping Motor, operation
Speed；
The current signal of the ion beam, the current signal are the current value of the ion beam；
It is being formed after processing to the current value, magnitude of voltage one a pair with the probe locus signal
The current density contours image answered.
Further, also include carrying out the scanning head Driving Stepping Motor and the Driving Stepping Motor that moves forward and backward
Shielding.
Further, the scanning head Driving Stepping Motor and the shielding mode for moving forward and backward Driving Stepping Motor
For magnetic screen.
Further, the access and observing and controlling to signal is realized using aviation plug, the signal includes：The electricity of the ion beam
The signal data that stream signal, the motion of the mechanical transmission mechanism and position data, the PLC module are obtained, to
The control instruction that the mechanical transmission mechanism sends.
The beneficial effects of the present invention is：
1. can pass through to control precise control of the stepper motor realization to probe positions, solve because probe positions are not smart
Probabilistic problem of the measurement result for really causing.
2. realize to it is mutually wide it is wider in the case of line distribution process with show.
3. pass through magnetic screen and the control to step motor position, solve the magnetic field pair in Electromagnetic isotope separator
The impact of stepper motor and the inaccurate problem of caused measurement.
4. the Two dimensional Distribution of the beam current density of ion beam intuitively can be shown.
(stepper motor includes " scanning head Driving Stepping Motor " and " moving forward and backward Driving Stepping Motor ").
Description of the drawings
Fig. 1 is the structured flowchart of the scanning means control system of isotope spectral line described in the specific embodiment of the invention；
Fig. 2 is the signal of the receiver that the isotope spectral line scanning means is provided with the specific embodiment of the invention
Figure；
Fig. 3 is that the installation on the receiver of the scanning means of isotope spectral line described in the specific embodiment of the invention is illustrated
Figure；
Fig. 4 is the section view of the receiver that the isotope spectral line scanning means is provided with the specific embodiment of the invention
Figure；
Fig. 5 is the front view of probe plate described in the specific embodiment of the invention；
Fig. 6 is the spectral line scan method schematic diagram of rubidium elemental isotope described in the specific embodiment of the invention；
Fig. 7 is that the current signal produced by the ion beam of rubidium elemental isotope described in the specific embodiment of the invention is illustrated
Figure (i.e. current density contours schematic diagram)；
In figure：1- scanning head Driving Stepping Motors, 2- pulley transmission structures, 3- scanning probe motion leading screws, 4- are slided
Moving axis, 5- move forward and backward Driving Stepping Motor, and 6- moves forward and backward driving leading screw, 7- adpting flanges, 8- frameworks, 9- drive links, 10-
Probe plate, 11- probes, 12- fixing screws, 13- vacuum-chamber walls, 14- power transmission shafts.
Specific embodiment
The invention will be further described with reference to the accompanying drawings and examples.
The operation principle of isotope spectral line scanning means is introduced first, by taking rubidium (Rb) element as an example.Due to rubidium, unit have two
Individual isotope (85Rb、87Rb), two ion beams can be produced in separation process.The mid-plane of z=0 is chosen first, is being received
Device nearby has85Rb,87Two ion beams of Rb, as shown in fig. 6, P is the probe of measurement, the coordinate of initial position A points is (XA, YA),
Edge is moved to B (XB, YB) into the direction at 43 ° of angles with x-axis by it, and exports the locus signal of probe at any time (including position
Coordinate), pop one's head in moving process inswept successively85Rb,87Rb ion beams, and have signal output (the current signal signal of electric current
As shown in Figure 7).The locus signal of probe can plot current density distributing figure with the current signal for receiving, and record storage
Deposit.After completing a surface sweeping, by the position of probe be transferred to A1, A2 ... ..An, complete a series of surface sweeping measurement, complete
After the measurement of Z=0 mid-planes, then the above-mentioned measurement that completes Z=-100mm～+100mm Different Planes in the same way.
This completes85Rb and87The measurement of the spatial distribution of Rb ion beams, according to the spatial distribution of beam can obtain image width, height,
The data such as distance between shape, two pictures.Data processing adopts usual way, take at the 1/2 of peak height for beam width (see Fig. 6,
In figure, J1, J2 are respectively85Rb and87The current density contours peak height of Rb ion beams), b1 is85Rb image widths, b2 is87Rb image widths, d is
The dispersion of rubidium isotope, works as b1, and the value of b2 is exactly focus point herein when being minimum.
A kind of isotope spectral line scanning means control system that the present invention is provided is (as shown in figure 1, isotope spectral line scanning dress
Put and be arranged on Electromagnetic isotope separator by adpting flange 7, framework 8 within vacuum-chamber wall 13 and its installed above its
His part is in vacuum environment), including the PLC module for being connected with display control apparatus, wherein, PLC module be arranged on it is same
Isotope spectral line scanning means on the receiver of the plain electromagnetic separator in position is connected；Can realize to isotope spectral line scanning means
The tracking of motion and position, signal acquisition and signal transacting.
Wherein, isotope spectral line scanning means includes the electricity that can detect the ion beam after Electromagnetic isotope separator is separated
Flow the probe 11 of signal, probe 11 can be made to do three-dimensional mobile mechanical transmission mechanism,
PLC module can gather, record the locus signal (including position coordinates) and current signal of probe 11；
Display control apparatus are used for the motion for showing mechanical transmission mechanism and position data (including position coordinates), PLC moulds
The signal data that block is obtained, is additionally operable to be input into the control instruction of control machinery transmission mechanism and by PLC module to machine driving
Mechanism sends control instruction, the operation of control machinery transmission mechanism.In this example it is shown that control device adopts touch-screen,
By the location parameter (including position coordinates) of the mechanical transmission mechanism of touch-screen accurate adjustment spectral line scanning means, and accurately survey
The beam parameters of amount ion beam.
Isotope spectral line scanning means includes popping one's head in 11 made by Faraday cup, and probe 11 can detect isotope electromagnetism point
The current signal of the ion beam after device separation, probe 11 are arranged on probe plate 10 (as shown in Figure 5), and probe plate 10 is arranged on
On the framework 8 of the receiver in Electromagnetic isotope separator (as shown in Figure 3)；
Isotope spectral line scanning means also includes that the probe plate 10 that can make for arranging on the receiver makees three-dimensional mobile machine
Tool transmission mechanism, also includes the electronic circuit being connected with probe 11, and the PLC module being connected with electronic circuit, PLC module energy
The current signal of the ion beam that enough collections, the locus signal of record probe 11 and 11 measurement of probe are obtained.
Mechanical transmission mechanism can provide the scope in the dynamic space of triple motion of probe plate 10 be 240mm × 240mm ×
240mm, the three-dimensional coordinate of three-dimensional mobile space include X-axis, Y-axis, Z axis, and probe plate 10 can be done on framework 8 with X-axis into 43 °
The rectilinear movement at angle.
As shown in figs 2-4, mechanical transmission mechanism includes driving the sliding axle that framework 8 and probe plate 10 are moved forward and backward
4, moving forward and backward Driving Stepping Motor 5 and moving forward and backward for being connected with each other drives leading screw 6, moves forward and backward 5 He of Driving Stepping Motor
Moving forward and backward driving leading screw 6 is used to control moving forward and backward for sliding axle 4；
Also include pulley transmission structure 2 and the scanning probe motion leading screw 3 for interconnecting；
Also include the scanning head Driving Stepping Motor 1 being connected with pulley transmission structure 2 by power transmission shaft 14, scanning is visited
Head Driving Stepping Motor 1 is used to drive scanning probe motion leading screw 3 to enable probe plate 10 to do on framework 8 with X-axis into 43 ° of angles
Rectilinear movement.
Display control apparatus input, and included to the control instruction that mechanical transmission mechanism sends by PLC module：
Scanning head Driving Stepping Motor 1 is set and the target location coordinate of Driving Stepping Motor 5, operation speed is moved forward and backward
Degree, step number；
Read scanning head Driving Stepping Motor 1 and move forward and backward the current position coordinates of Driving Stepping Motor 5, operation speed
Degree；
Control scanning head Driving Stepping Motor 1 and move forward and backward the motion of Driving Stepping Motor 5 and stop.
The signal data that the motion of the mechanical transmission mechanism that display control apparatus show and position data, PLC module are obtained
Including：
Scanning head Driving Stepping Motor 1 and move forward and backward the target location coordinate of Driving Stepping Motor 5, the speed of service,
Step number；
Scanning head Driving Stepping Motor 1 and move forward and backward the current position coordinates of Driving Stepping Motor 5, the speed of service；
The current signal of ion beam, current value of the current signal for ion beam；
It is being formed after processing to current value, magnitude of voltage with probe 11 locus signal (include position coordinates)
One corresponding current density contours image (as shown in Figure 7).
Because there is high-intensity magnetic field in Electromagnetic isotope separator, (stepper motor includes " sweeping to produce impact to stepper motor
Retouch probe Driving Stepping Motor " and " moving forward and backward Driving Stepping Motor "), and then affect the measurement of isotope spectral line scanning means
Effect, therefore present invention additionally comprises to scanning head Driving Stepping Motor 1 and move forward and backward Driving Stepping Motor 5 and adopt magnetic cup
Cover, be controlled by magnetic screen and to the position of stepper motor, solve impact of the high-intensity magnetic field to stepper motor, it is ensured that same to position
The measurement effect of plain spectral line scanning means is interference-free.(as stepper motor is moved according to live wire cutting magnetic line, by force
Magnetic field can change original magnetic field size and Orientation in stepper motor, prevent stepper motor from running well.Magnetic screen can keep away
Exempt from external magnetic line and ensure stepper motor normal work into stepper motor；The position of control stepper motor and electromagnet, can
Make stepper motor faint to the position work for being not enough to generation interference in magnetic field.)
Isotope spectral line scanning means control system provided by the present invention realizes the access to signal using aviation plug
And observing and controlling, the signal includes：The current signal of ion beam, the motion of mechanical transmission mechanism and position data, PLC module are obtained
Signal data, the control instruction etc. sent to mechanical transmission mechanism.
Device of the present invention is not limited to the embodiment described in specific embodiment, those skilled in the art according to
Technical scheme draws other embodiments, also belongs to the technological innovation scope of the present invention.
Claims (9)
1. a kind of isotope spectral line scanning means control system, including the PLC module for being connected with display control apparatus, its feature
It is：
The PLC module is connected with the isotope spectral line scanning means being arranged on the receiver of Electromagnetic isotope separator；
The isotope spectral line scanning means includes the electricity that can detect the ion beam after the Electromagnetic isotope separator is separated
Flow the probe (11) of signal, the probe (11) can be made to do three-dimensional mobile mechanical transmission mechanism；
The PLC module can gather, record the locus signal and the current signal of the probe (11)；
The display control apparatus are used for the motion for showing the mechanical transmission mechanism and position data, the PLC module are obtained
Signal data, be additionally operable to be input into the control instruction of the control mechanical transmission mechanism, the machine controlled by the PLC module
The operation of tool transmission mechanism.
2. isotope spectral line scanning means control system as claimed in claim 1, is characterized in that：
The isotope spectral line scanning means includes popping one's head in (11) made by Faraday cup, and the probe (11) can detect described
The current signal of the ion beam after Electromagnetic isotope separator separation, the probe (11) is arranged on probe plate (10), described
Probe plate (10) is arranged on the framework (8) of the receiver in the Electromagnetic isotope separator；
Also include that probe plate (10) that can make being arranged on the receiver does three-dimensional mobile mechanical transmission mechanism, also
Including the electronic circuit for connecting the PLC module and the probe (11).
3. isotope spectral line scanning means control system as claimed in claim 2, is characterized in that：The mechanical transmission mechanism energy
The scope for enough providing the dynamic space of triple motion of probe plate (10) is 240mm × 240mm × 240mm, three-dimensional mobile space
Three-dimensional coordinate includes X-axis, Y-axis, Z axis, and the probe plate (10) can be done with the X-axis on the framework (8) into 43 ° of angles
Rectilinear movement.
4. isotope spectral line scanning means control system as claimed in claim 3, is characterized in that：
The mechanical transmission mechanism includes driving the sliding axle that the framework (8) and probe plate (10) move forward and backward
(4) moving forward and backward Driving Stepping Motor (5) and moving forward and backward for, being connected with each other drives leading screw (6), described to move forward and backward driving step
Stepper motor (5) and move forward and backward driving leading screw (6) for controlling moving forward and backward for the sliding axle (4)；
Also include pulley transmission structure (2) and scanning probe motion leading screw (3) for interconnecting；
Also include the scanning head Driving Stepping Motor (1) being connected with the pulley transmission structure (2) by power transmission shaft (14),
The scanning head Driving Stepping Motor (1) makes probe plate (10) can be for driving scanning probe motion leading screw (3)
The rectilinear movement with the X-axis into 43 ° of angles is done on the framework (8).
5. isotope spectral line scanning means control system as claimed in claim 4, is characterized in that, set by the display control
The control instruction of standby input includes：
The scanning head Driving Stepping Motor (1) is set and the target location for moving forward and backward Driving Stepping Motor (5) is sat
Mark, the speed of service, step number；
Read the scanning head Driving Stepping Motor (1) and the current position of Driving Stepping Motor (5) that moves forward and backward is sat
Mark, the speed of service；
Control scanning head Driving Stepping Motor (1) and the Driving Stepping Motor (5) that moves forward and backward are moved and are stopped.
6. isotope spectral line scanning means control system as claimed in claim 4, is characterized in that, the display control apparatus show
The signal data that the motion of the mechanical transmission mechanism for showing and position data, the PLC module are obtained includes：
The scanning head Driving Stepping Motor (1) and the target location coordinate for moving forward and backward Driving Stepping Motor (5), fortune
Scanning frequency degree, step number；
The scanning head Driving Stepping Motor (1) and it is described move forward and backward the current position coordinates of Driving Stepping Motor (5), fortune
Scanning frequency degree；
The current signal of the ion beam, the current signal are the current value of the ion beam；
It is being formed after processing to the current value, magnitude of voltage one a pair with the probe (11) the locus signal
The current density contours image answered.
7. isotope spectral line scanning means control system as claimed in claim 4, is characterized in that：Also include visiting the scanning
Head Driving Stepping Motor (1) and the Driving Stepping Motor (5) that moves forward and backward are shielded.
8. isotope spectral line scanning means control system as claimed in claim 7, is characterized in that：The scanning head drives step
Stepper motor (1) and the shielding mode for moving forward and backward Driving Stepping Motor (5) are magnetic screen.
9. isotope spectral line scanning means control system as claimed in claim 1, is characterized in that, it is right to be realized using aviation plug
The access and observing and controlling of signal, the signal include：The motion of the current signal of the ion beam, the mechanical transmission mechanism
The signal data obtained with position data, the PLC module, the control sent to the mechanical transmission mechanism refer to
Order.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610903301.4A CN106547011B (en) | 2016-10-18 | 2016-10-18 | A kind of isotope spectral line scanning means control system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610903301.4A CN106547011B (en) | 2016-10-18 | 2016-10-18 | A kind of isotope spectral line scanning means control system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106547011A true CN106547011A (en) | 2017-03-29 |
| CN106547011B CN106547011B (en) | 2017-11-21 |
Family
ID=58369023
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610903301.4A Active CN106547011B (en) | 2016-10-18 | 2016-10-18 | A kind of isotope spectral line scanning means control system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106547011B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109709887A (en) * | 2018-12-25 | 2019-05-03 | 中国原子能科学研究院 | Control system for Electromagnetic isotope separator |
| CN111913209A (en) * | 2020-08-13 | 2020-11-10 | 中国原子能科学研究院 | Ray beam energy measuring system and method for measuring ray beam energy |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6163033A (en) * | 1997-09-10 | 2000-12-19 | Applied Materials, Inc. | Method and apparatus for controlling a workpiece in a vacuum chamber |
| JP2004101252A (en) * | 2002-09-06 | 2004-04-02 | Canon Inc | Electronic measuring apparatus |
| CN102124538A (en) * | 2008-06-25 | 2011-07-13 | 艾克塞利斯科技公司 | System and method of controlling broad beam uniformity |
| CN102279301A (en) * | 2010-06-08 | 2011-12-14 | 江苏天瑞仪器股份有限公司 | Ion flow size detection apparatus of sample in mass spectrometer vacuum cavity |
| CN102867722A (en) * | 2011-07-05 | 2013-01-09 | 北京中科信电子装备有限公司 | Device for detecting ion beam profile density distribution and ion beam uniformity distribution in real time |
| CN103794447A (en) * | 2013-11-08 | 2014-05-14 | 北京中科信电子装备有限公司 | Ion beam collection system and ion beam collection method |
| CN103792566A (en) * | 2013-07-18 | 2014-05-14 | 北京中科信电子装备有限公司 | Faraday device for measuring beam current |
-
2016
- 2016-10-18 CN CN201610903301.4A patent/CN106547011B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6163033A (en) * | 1997-09-10 | 2000-12-19 | Applied Materials, Inc. | Method and apparatus for controlling a workpiece in a vacuum chamber |
| JP2004101252A (en) * | 2002-09-06 | 2004-04-02 | Canon Inc | Electronic measuring apparatus |
| CN102124538A (en) * | 2008-06-25 | 2011-07-13 | 艾克塞利斯科技公司 | System and method of controlling broad beam uniformity |
| CN102279301A (en) * | 2010-06-08 | 2011-12-14 | 江苏天瑞仪器股份有限公司 | Ion flow size detection apparatus of sample in mass spectrometer vacuum cavity |
| CN102867722A (en) * | 2011-07-05 | 2013-01-09 | 北京中科信电子装备有限公司 | Device for detecting ion beam profile density distribution and ion beam uniformity distribution in real time |
| CN103792566A (en) * | 2013-07-18 | 2014-05-14 | 北京中科信电子装备有限公司 | Faraday device for measuring beam current |
| CN103794447A (en) * | 2013-11-08 | 2014-05-14 | 北京中科信电子装备有限公司 | Ion beam collection system and ion beam collection method |
Non-Patent Citations (2)
| Title |
|---|
| 罗宗南等: "《片状气体放电电子束强度与能量分布的实验研究》", 《东南大学学报》 * |
| 韦宇祥等: "《行波管电子注测量***探头的热分析》", 《微波学报》 * |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109709887A (en) * | 2018-12-25 | 2019-05-03 | 中国原子能科学研究院 | Control system for Electromagnetic isotope separator |
| CN111913209A (en) * | 2020-08-13 | 2020-11-10 | 中国原子能科学研究院 | Ray beam energy measuring system and method for measuring ray beam energy |
| CN111913209B (en) * | 2020-08-13 | 2023-03-07 | 中国原子能科学研究院 | Ray beam energy measuring system and method for measuring ray beam energy |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106547011B (en) | 2017-11-21 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| TWI709745B (en) | X-ray inspection system for inspecting semiconductor wafers | |
| CN102782797B (en) | The System and method for of the skew of ion beam is controlled in classification electrostatic lens | |
| US10002742B2 (en) | Composite scan path in a charged particle microscope | |
| CN106547011B (en) | A kind of isotope spectral line scanning means control system | |
| TWI479532B (en) | Ion beam angle calibration and emittance measurement system for ribbon beams | |
| CN102270557B (en) | Ion implantation apparatus | |
| CN106512726B (en) | A kind of Electromagnetic isotope separator | |
| KR102597427B1 (en) | Systems and methods for focusing charged particle beams | |
| US10121632B2 (en) | Charged particle beam apparatus | |
| CN105668514A (en) | Focused ion beam-electron beam fused controllable micro-nano machining method | |
| CN109298001A (en) | Electron beam imaging module, Electron-beam measuring equipment and its image-pickup method | |
| Zoletnik et al. | Two-dimensional density and density fluctuation diagnostic for the edge plasma in fusion devices | |
| CN102779713B (en) | With the particle beams instrument of detector means | |
| CN206147110U (en) | Isotope register for easy reference line scanning head | |
| CN206147109U (en) | Ion source is emittance appearance for beam diagnostics | |
| CN106547012B (en) | A kind of isotope spectral line scanning means and method | |
| US20060124867A1 (en) | Method and apparatus for ion beam profiling | |
| TWI404107B (en) | Determining ion beam parallelism using refraction method | |
| CN106547013A (en) | A kind of ion source beam diagnostics subtended angle measuring instrument | |
| CN106547278A (en) | A kind of ion source beam diagnostics subtended angle measuring instrument control system | |
| JP2014528154A (en) | Scanning electron microscope and primary electron current measurement method using the same | |
| EP3749065B1 (en) | Electron radiation system | |
| CN106353787B (en) | A kind of isotope spectral line scanning head | |
| CN103513265A (en) | Movable time slice three-dimensional imaging detecting method and device for charged particle beams or clusters | |
| JP5548244B2 (en) | Inspection measurement device and inspection measurement method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |