CN103513265A - Movable time slice three-dimensional imaging detecting method and device for charged particle beams or clusters - Google Patents
Movable time slice three-dimensional imaging detecting method and device for charged particle beams or clusters Download PDFInfo
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- CN103513265A CN103513265A CN201210224944.8A CN201210224944A CN103513265A CN 103513265 A CN103513265 A CN 103513265A CN 201210224944 A CN201210224944 A CN 201210224944A CN 103513265 A CN103513265 A CN 103513265A
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Abstract
The invention belongs to the field of charged particle beam generation and application, and relates to a three-dimensional spatial structure imaging detecting method of charged particle beams (clusters) in vacuum equipment. According to the method, MCPs and a fluorescent screen are adopted to form an imaging detecting unit, a stepping motor is used for controlling the imaging detecting unit to move back and forth in the flying path of the charged particle beams, and imaging detecting on the cross sections of the charged particle beams is realized by recording the number of the charged particles reaching the front surface of an imaging detector within a period of time and the two-dimensional distribution situation of the charged particles. By exerting direct-current pulse voltages on the MCP, time slice images of the charged particle beams can be obtained and the charged particle change conditions in a short period of time (the shortest time can reach 10ns level) can be obtained; through restoration and reconstruction of the slice images, the three-dimensional spatial structure of the charged particle beams (clusters) can be obtained.
Description
Technical field
The present invention relates to detection of charged particles and space distribution determination and evaluation technology in molecular beam, ion beam and electron beam test, particularly on molecular-beam apparatus, utilize aspect the negative ions and the detection of Cyberspace structure of the ultralow temperature plasma that photoionization or photolysis experiments produce, the present invention can also relate to for molecular beam epitaxy plated film, magnetron sputtering plating, surface treatment, study of surfaces etc. experimental study or the production field of ion beam or electron beam.
Background technology
The space exploration of charged particle beam (electronics or negative ions bundle) and assay are very important for the photodissociation of carrying out in molecular-beam apparatus or photoionization experiment, in molecular beam epitaxy plated film, magnetron sputtering plating, material surface modifying and correlative study, also play key effect, for other, use the experiment of ion beam (electron beam) also very necessary.Charged particle detection technical method for this class experiment mainly contains following several at present: 1) adopt the electron detectors such as MCP or photomultiplier, electrical signal intensity and the time of in conjunction with oscillograph, surveying charged particle distribute, but these technology or can not realize two-dimensional detection, can only be in the velocity distribution of a certain ad-hoc location observation charged particle; 2) adopt imaging-type MCP to survey the speed of particle and strength information, but this technology can only be in the Two dimensional Distribution situation of a certain ad-hoc location observation charged particle; 3) the absorption imaging technique of ion, is applicable to the detection of the charged particle group of central stationary, is not suitable for the particle of flight, and is limited to available laser wavelength at present, and only applicable for part ion, follow-up data treatment technology is complicated in addition; 4) Imaging-PAM of ion, this technology is equally applicable to the detection of the charged particle group of central stationary, is not suitable for the particle of flight, and technical characterstic and Ions Absorption imaging technique are similar; The defect of these technology or the limitation of the scope of application are very unfavorable for the detection of charged particle beam.The present invention is directed to the problems referred to above, propose a kind of slice imaging method that is generally applicable to the various beam of charged ions (group) in motion in one dimension state, solve the three-D space structure detection problem of the charged particle beam (or group) along one dimension flight.Summary of the invention:
The present invention is directed to one-dimensional square to the three-D space structure detection problem of the charged particle beam (or group) of flight, propose a kind of removable time slice formula three-D imaging method, and designed detecting devices based on the method.The present invention can be for the quality assessment of ion (electronics) electron gun, and ion sprays the quality control of plated film, and in molecular beam, the three-dimensional imaging of number of charged particles, density and space distribution and evolution situation detects.
The present invention solves the method that its technical matters adopts: in the flight path of the charged particle beam along one-dimensional square to high-speed motion or charged particle group, place one can one-dimensional movement time slice imaging-type detector.When imager is during in a certain position, by adjusting slice voltage starting point, can carry out slice imaging to different parts in charged particle beam (group), by each sectioning image of the collections such as CCD and to sectioning image, reduce reconstruct, can obtain the interior spatial structure temporal evolution situation of this position charged particle beam (group).Mobile imaging detector in the flight path of charged particle beam (group), carries out slice imaging at diverse location, can obtain the three-D space structure of diverse location place charged particle beam (group).
The present invention controls slice thickness by the cut into slices width of pulse voltage of adjusting, and section pulsewidth can be low to moderate 10-2000ns magnitude, and the charged particle that can realize micron order precision distributes and surveys, and the one-dimensional space resolution on heading is high.In addition, the present invention can, by changing the alive polarity of MCP, realize the three-dimensional slice imaging detection to all kinds of negative ions or electronics; By the beginning and ending time of outside source gating pulse voltage, the movement in conjunction with detector on charged particle beam or group's heading, can survey any position charged particle beam or roll into a ball situation over time.
The present invention also comprises corresponding charged particle beam or group's three-dimensional imaging sniffer, comprises airtight vacuum cavity, stepper motor and mobile platform, stepper motor and mobile platform are placed in vacuum cavity, between stepper motor and mobile platform, be in transmission connection, imaging-type detector is placed on mobile platform, imaging-type detector is comprised of tabular MCP and the video screen of parallel placement, MCP and mobile platform are perpendicular, charged particle electron gun is placed in a side in vacuum cavity, the exit face of charged particle electron gun is to MCP, MCP is connected with the pulse dc power of vacuum cavity outside by wire, video screen is connected with the direct supply of vacuum cavity outside by wire, video screen is close to away from MCP side and optical fiber image transmission beam input end face, the output end face of optical fiber image transmission beam is close to one end end face of film viewing screen, film viewing screen is arranged on the sidewall of vacuum cavity, the other end end face outside of film viewing screen is provided with CCD, the camera lens of CCD parallels with the end face of film viewing screen, CCD is connected with computing machine by data line, be placed on the imaging-type detector on mobile platform, can drive in the flight path of charged particle beam or group and move back and forth by stepper motor, can carry out imaging observation to Density Distribution and differentiation situation in charged particle beam or group's flight course.
Between the tabular MCP of the three-dimensional imaging sniffer that the present invention comprises and video screen, be also provided with the assistant flat-plate shape MCP of a parallel placement, can improve the sensitivity of this imaging detecting device, wherein assistant flat-plate shape MCP is connected with the direct supply of vacuum cavity outside by wire.
In this imaging detecting device, adopt flexible optical fiber image transmitting beam to realize being of coupled connections of video screen and view window, image, by being transferred in vacuum chamber outside vacuum chamber, can have been improved to transfer efficiency, reduced the distortion in image transmitting process simultaneously.
The present invention is a kind of three-D space structure imaging detection method for charged particle beam (group) in charged particle beam generation and application vacuum equipment.The method adopts microchannel plate (MCP) and video screen to form imaging detection unit, by step motor control imaging detection unit, in the flight path of charged particle beam, move forward and backward, by recording number of charged particles and the Two dimensional Distribution situation thereof that arrives imaging detector front surface in certain hour, realize the imaging detection to charged particle area of beam.By add DC pulse voltage on MCP, can obtain the time slice imaging of charged particle beam, obtain the charged particle situation of change in the short time (the shortest can to 10ns level); Adopting the flexibilities such as optical fiber image transmission beam to pass is transferred to the sectioning image on video screen on the film viewing screen outside vacuum chamber as device, again with each sectioning images of collection such as CCD, by the reduction reconstruct to sectioning image, can obtain the three-D space structure of charged particle beam (group); By stepper motor, drive probe unit to move in charged particle flight path, can obtain the situation of change of diverse location place charged particle beam (group) three-D space structure.The invention has the advantages that the three-dimensional slice imaging that can realize charged particle beam (group), obtain intuitively the three-D space structure of charged particle beam (group) and in time or the situation of change in space.
Accompanying drawing explanation
Fig. 1 is the imaging detecting device principle schematic the present invention relates to.In figure: 1-MCP1,2-MCP2,3-video screen, 4-imager fixture, 5-flexible coherent fiber bundle, 6-film viewing screen, 7-vacuum chamber sidewall seal flange, 8-base, 9-stepper motor or linear actuator, 10-pulse power, 11-DC high-voltage power supply, 12-imaging lens, 13-CCD, 14-graphics processing unit, A is charged particle beam or group.
Fig. 2 is mobile imaging probe unit schematic diagram along one-dimensional square to movement under stepper motor drives, in figure, stepper motor 9 drives 1,2,3, the 4 imaging detection unit one-dimensional movements that form by base 8, at diverse location, complete the slice imaging to charged particle beam, a in figure, b represents different positions.
Fig. 3 adopts the present invention to survey bulk and the time dependent method schematic diagram of Density Distribution with the plasma of molecular beam motion, a in figure, b represents different positions, and stepper motor 9 can drive 1,2,3, the 4 imaging detection unit one-dimensional movements that form by base 8.
Fig. 4 is the 3-D view reconstructing method schematic diagram that the present invention adopts.In figure, sectioning image is the sectioning image on the film viewing screen being collected by CCD, represent the Two dimensional Distribution of flying to the charged particle of imaging detector front end face in the slice voltage pulsewidth time, by different filling patterns, distinguished the sectioning image not obtaining in the same time, the charged particle densities detecting in i.e. this time of pattern intensity token image intensity, image size characterizes charged particle distribution space.The implications such as in figure, below ellipsoid represents the space distribution of the charged ion group obtaining after 3-D view retrieving algorithm is processed, and it is spliced by a plurality of sectioning images, intensity size are consistent with sectioning image.
Embodiment
The a whole set of imaging detecting device that the method relates to is comprised of following components: 1. microchannel plate (Micro channel plate-MCP) 1; 2. microchannel plate (MCP) 2; 3. video screen; 4.MCP and fluoroscopic fixed cell; 5. flexible coherent fiber bundle; 6. film viewing screen; 7. vacuum chamber sidewall seal flange; 8. base; 9. stepper motor or linear actuator; 10. direct current pulse power source; 11. DC high-voltage power supply; 12. camera lenses, 13.CCD, 14. graphics processing units etc.; Totally ten four parts form, in detail as shown in Figure 1.The pulse power 10 in the imaging detecting device of this invention, DC high-voltage power supply 11, camera lens 12, CCD13 and graphics processing unit are all positioned at outside vacuum chamber, film viewing screen 6 is fixed on the end face of vacuum system by mounting flange 7, remainder is all positioned at the vacuum chamber that produces or use charged particle beam.
Wherein, 1 and 2 is MCP that micropore diameter is identical, bulk resistor is approaching, is used for receiving belt electrochondria subsignal, and 1mm gap is left to vacuumize in centre.The 3rd, useful area and 1,2 two video screen that MCP area is consistent, be used for to 1 generation of charged particle shock and through 1 and 2 electronic imagings that amplify.The 4th, fixedly MCP1,2 and the machine assembly of video screen 3 with base 8 combinations, being fixed on stepper motor 9 by 1,2, the 3 imaging detection unit that form, realizes one-dimensional movement under the driving of stepper motor 9.The 5th, flexible coherent fiber bundle, by fibre bundle, formed, input end and video screen 3 couplings, output terminal and film viewing screen 6 couplings, can be by the image transmitting on video screen to film viewing screen 6, film viewing screen 6 is fibre faceplate, adopts the bonding mode of vacuum seal to be fixed on flange 7, and seal with vacuum chamber by 7, image transmitting is arrived to the outside of vacuum chamber to observe or take record.10 is the pulse power, by cable a, DC pulse slice voltage is carried in to MCP1 upper, and 11 is DC high-voltage power supply, by cable b, c, respectively high direct voltage is carried on MCP2 and video screen.The 12nd, imaging lens, on the light-sensitive surface of CCD13, records sectioning image by CCD by the image focal imaging on film viewing screen, and is transferred to graphics processing unit 14, by graphics processing unit, sectioning image is reassembled into three-dimension space image.
Fig. 2 is mobile imaging probe unit schematic diagram along one-dimensional square to movement under stepper motor drives, when needing surveying tape beam of charged particles in flight course during with the situation of change of diverse location, can drive 1,2,3, the 4 probe units front and back one-dimensional movements that form by stepper motor, at diverse location, become sectioning image.
Movable three-dimensional imaging type charged particle detector uses in vacuum environment, and under duty, DC high-voltage power supply 11 is stablized output dc voltage, and MCP2 and video screen are always in opening; 10 voltage pulse outputs, when the pulse voltage of 10 outputs is carried on MCP1, MCP1 starts working, and the electronics that charged particle beam produces at MCP1 front surface is amplified successively by MCP1 and MCP2, produces image on video screen; When end-of-pulsing, MCP1 quits work, and the electronics that now charged particle and the collision of MCP1 front surface produce can not pass through MCP1, and imaging finishes.By controlling the pulse voltage width of 10 generations, can realize the slice imaging to beam of charged ions, by controlling the pulse voltage amplitude of 10 generations and the DC voltage amplitude that MCP2 loads, may be controlled to the intensity of picture.Whole equipment can manually be controlled detection time and position by operating personnel, also can be by source of synchronising signal as the synchro control of the realizations such as SRS DG645 and charged particle generating means.
Embodiment 1: in surveying tape beam of charged particles, the three-dimensional density of positive ion distributes and differentiation situation.
When charged particle beam flies the end face of MCP1, the end face Bing relevant position that can clash into MCP1 produces electronics, when need to survey a certain position sometime in charged particle when the three-dimensional density of positive ion and space distribution information, can control stepper motor the front end face of MCP1 is moved to this position, in the starting point of this time period, by the pulse power 10, add certain width (10-2000ns level to MCP1 front surface simultaneously, take 100ns as example) the amplitude direct current negative pulse voltage (according to the section determine precision of wishing) that is V1, at MCP2 front surface, add amplitude V2 simultaneously, video screen front surface adds the negative DC voltage of amplitude V 3, the representative value of V1 is-1500V, the representative value of V2 is-800V, the representative value of V3 is-100V, now just can on video screen 3, obtain 100ns and in the time, fly to the positive ion of MCP1 perpendicular to the two-dimentional intensity image of heading.This image is transferred on film viewing screen 6 through flexible coherent fiber bundle, by CCD13 or other picture pick-up device records, be the piece image that section precision is 100ns, the intensity of this image characterizes the density information of positive ion, and the Two dimensional Distribution of image intensity just represents the two-dimentional Density Distribution of positive ion.By changing the start time of pulse voltage, can obtain the situation of change that this position positive ion density distributes; Change the width of pulse voltage, can obtain the sectioning image of different accuracy.The sectioning image not obtaining more in the same time, just can obtain the Density Distribution temporal evolution situation of this position positive ion.
When needing surveying tape beam of charged particles in the density at diverse location place and spatial variations situation,---this point is for the ion in plated film, plasma or study of surfaces (electronics) bundle particular importance---can move by control step motor in charged particle beam flight path, at a plurality of diverse locations, place repeats above-mentioned imaging process, can obtain the intrafascicular positive ion of charged particle three dimensions Density Distribution and differentiation situation in the same time not in flight course.
Embodiment 2: the three-dimensional density of negative ion or electronics and differentiation situation in surveying tape beam of charged particles.
When need to survey a certain position sometime in charged particle when the three-dimensional density of negative ion or electronics and space distribution information, can control stepper motor the front end face of MCP1 is moved to this position, in the starting point of this time period, by the pulse power 10, add certain width (10-2000ns level to MCP1 front surface simultaneously, take 100ns as example) the amplitude direct current positive pulse voltage (according to the section determine precision of wishing) that is V1, at MCP2 front surface, add amplitude V2 simultaneously, video screen front surface adds the direct-flow positive voltage of amplitude V3, the representative value of V1 is 1500V, the representative value of V2 is 800V, the representative value of V3 is-100V, now just can on video screen 3, obtain 100ns flies to MCP1 negative ion (or electronics) in the time perpendicular to the two-dimentional intensity image of heading.This image is transferred on film viewing screen 6 through flexible coherent fiber bundle, by CCD13 or other equipment records, be the piece image that section precision is 100ns, the intensity of this image characterizes the density information of negative ion (or electronics), and the Two dimensional Distribution of image intensity just represents the two-dimentional Density Distribution of negative ion (or electronics).By changing the start time of pulse voltage, can obtain the situation of change that this position positive ion density distributes; Change the width of pulse voltage, can obtain the sectioning image of different accuracy; The sectioning image not obtaining more in the same time, just can obtain the Density Distribution temporal evolution situation that particle is born in this position.
When needing surveying tape beam of charged particles in the density at diverse location place and spatial variations situation, same control step motor moves in charged particle beam flight path, at a plurality of diverse locations, place repeats above-mentioned imaging process, can obtain the intrafascicular negative ion of charged particle (or electronics) three dimensions Density Distribution and differentiation situation in the same time not in flight course.
Embodiment 3: the three-dimensional density of surveying positive ion in plasma ellipsoid distributes.
In molecular-beam apparatus, adopt the method for photodissociation or photoionization can produce ion and the electric molecular plasma of some, this class experiment general employing short-pulse laser and molecular beam effect, it is generally a spheroid or close solid that the initial space of the plasma of generation distributes.Also can there is the phenomenons such as recombination loss or volatilization along with molecular beam continues high-speed motion forward in this class plasma generation, cause the volume of plasma constantly to expand simultaneously, and density constantly reduces, and Density Distribution also may change thereupon simultaneously.
In the time of need to surveying the three-dimensional dimension of this plasma and Density Distribution situation of change, probe unit of the present invention is placed in molecular beam flight path, refers to accompanying drawing 3.First near position 1 mobile detection imaging unit to the generation region of plasma, by regulating slice voltage start time and width, positive corpusc(u)le or negative particle in 1 plasma of position carry out slice imaging, through the three-dimensional reconstruction process to sectioning image, what just can obtain 1 place, position just (bears) Spatial Density Distribution of particle, namely the three-dimensional density of plasma ellipsoid distributes and size, refers to accompanying drawing 4.Control step motor moves imaging detector backward along molecular beam heading subsequently, and the three-dimensional density that obtains position 2 place's plasma ellipsoids distributes and size.By the position of continuous mobile imaging detector, the three-dimensional density that just can obtain each position plasma ellipsoid distributes and size, situation of change that plasma causes because of a variety of causes such as expansion, evaporation, recombination loss that hence one can see that.
In above-mentioned example, can regulate slice thickness by regulating impulse voltage width.In the process moving at stepper motor, flexible optical fiber image transmitting beam can crookedly also move thereupon, does not affect biography image quality; Flexible coherent fiber bundle also can reduce the distortion in image transmitting process in addition, improves transfer efficiency.
Claims (7)
1. charged particle beam or roll into a ball removable time slice three-dimensional imaging detection method, it is characterized in that the imaging-type detector of the tabular MCP of parallel placement and video screen composition to be placed in the flight path of charged particle beam or group, MCP end face is vertical with the heading of charged particle beam or group; On MCP, apply DC pulse voltage, charged particle beam or group slice imaging on video screen, by the heading mobile detector along charged particle beam or group, realizes the three-dimensional detection to charged particle beam or group.
2. charged particle beam according to claim 1 or group's three-dimensional imaging detection method, it is characterized in that controlling slice thickness by the cut into slices width of pulse voltage of adjusting, section pulsewidth can be low to moderate 10-1000ns magnitude, the charged particle that can realize micron order precision distributes and surveys, and the one-dimensional space resolution on heading is high.
3. charged particle beam according to claim 1 or group's three-dimensional imaging detection method, is characterized in that by changing the alive polarity of MCP, realizing the three-dimensional slice imaging detection to all kinds of negative ions or electronics.
4. charged particle beam according to claim 1 or group's three-dimensional imaging detection method, it is characterized in that passing through the beginning and ending time of outside source gating pulse voltage, movement in conjunction with detector on charged particle beam or group's heading, surveys any position charged particle beam or rolls into a ball situation over time.
5. charged particle beam claimed in claim 1 or group's three-dimensional imaging sniffer, comprise airtight vacuum cavity, stepper motor and mobile platform, stepper motor and mobile platform are placed in vacuum cavity, between stepper motor and mobile platform, be in transmission connection, imaging-type detector is placed on mobile platform, imaging-type detector is comprised of tabular MCP and the video screen of parallel placement, MCP and mobile platform are perpendicular, charged particle electron gun is placed in a side in vacuum cavity, the exit face of charged particle electron gun is to MCP, MCP is connected with the pulse dc power of vacuum cavity outside by wire, video screen is connected with the direct supply of vacuum cavity outside by wire, video screen is close to away from MCP side and optical fiber image transmission beam input end face, the output end face of optical fiber image transmission beam is close to one end end face of film viewing screen, film viewing screen is arranged on the sidewall of vacuum cavity, the other end end face outside of film viewing screen is provided with CCD, the camera lens of CCD parallels with the end face of film viewing screen, CCD is connected with computing machine by data line, be placed on the imaging-type detector on mobile platform, can drive in the flight path of charged particle beam or group and move back and forth by stepper motor, can carry out imaging observation to Density Distribution and differentiation situation in charged particle beam or group's flight course.
6. charged particle beam according to claim 5 or group's three-dimensional imaging sniffer, it is characterized in that the parallel assistant flat-plate shape MCP that is provided with between tabular MCP and video screen, can improve the sensitivity of this imaging detecting device, assistant flat-plate shape MCP is connected with the direct supply of vacuum cavity outside by wire.
7. charged particle beam according to claim 5 or group's three-dimensional imaging sniffer, it is characterized in that adopting flexible optical fiber image transmitting beam to realize being of coupled connections of video screen and view window, by image by being transferred in vacuum chamber outside vacuum chamber, can improve transfer efficiency, reduce the distortion in image transmitting process simultaneously.
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| CN107505646A (en) * | 2017-10-18 | 2017-12-22 | 哈尔滨工程大学 | A kind of optical fiber three-dimensional array type accelerator field of radiation analyzer |
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Application publication date: 20140115 |