CN106546415A - A kind of quartz wafer（Block）The instrument of non-contact detection positive-negative polarity - Google Patents
A kind of quartz wafer（Block）The instrument of non-contact detection positive-negative polarity Download PDFInfo
- Publication number
- CN106546415A CN106546415A CN201610983050.5A CN201610983050A CN106546415A CN 106546415 A CN106546415 A CN 106546415A CN 201610983050 A CN201610983050 A CN 201610983050A CN 106546415 A CN106546415 A CN 106546415A
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- China
- Prior art keywords
- laser
- block
- quartz wafer
- support
- negative polarity
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Links
- 239000010453 quartz Substances 0.000 title claims abstract description 23
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 23
- 238000001514 detection method Methods 0.000 title claims abstract description 13
- 238000004891 communication Methods 0.000 claims description 5
- 239000004575 stone Substances 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- 238000012797 qualification Methods 0.000 abstract description 2
- 238000000034 method Methods 0.000 description 4
- 238000007689 inspection Methods 0.000 description 3
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
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- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Tests Of Electronic Circuits (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
A kind of instrument of quartz wafer (block) non-contact detection positive-negative polarity, it is related to quartz wafer positive-negative polarity detection technical field of tools, it includes base (1), for supporting the support (2) of quartz plate, bearing (3), laser stent (4), rotating shaft (5), generating laser (6), laser pickoff (7), Analog input mModule (8), microchip (9) and display screen (10), it is provided with the top of the support (2) for placing the groove of quartz wafer, it is provided with the groove for the through hole through laser beam, support (2) and bearing (3) are respectively and fixedly installed on base (1), the bearing (3) is provided with rotating shaft installing hole；The present invention has small volume, convenient, flexible, easily operated reliability and durability, contactless effectively to solve chip (block) fast polarity determination requirement, it is ensured that the production efficiency and qualification rate of product, with good practical reference value.
Description
Technical field
The present invention relates to quartz wafer positive-negative polarity detection technical field of tools, and in particular to a kind of quartz wafer (block) is non-
The instrument of contact measurement positive-negative polarity.
Background technology
To the polarity of chip (block), quartz wafer (block) will judge that traditional operation mode has two in production and processing
Kind：First method is that chip (block) is carried out physical compression to promote chip (block) release electric charge, then is entered by circuit amplifier
Judging polarity, this mode efficiency is low and easily damages chip (block) for row recognition detection.Second method is penetrated using X
Line irradiation produces diffraction to judge polarity, and this mode efficiency is also very low.In being desirable to a kind of easily operated detection efficiency of design
A kind of Check up polarity instrument high and that damage will not be caused to chip (block).
The content of the invention
The purpose of the present invention is exactly in order to solve above-mentioned technical problem, and provides a kind of quartz wafer (block) contactless inspection
Survey the instrument of positive-negative polarity.
The present invention include base, the support for supporting quartz plate, bearing, laser stent, rotating shaft, generating laser,
Laser pickoff, Analog input mModule, microchip and display screen, are provided with the top of the support for placing quartz wafer
Groove, be provided with the groove for the through hole through laser beam, support and bearing are respectively and fixedly installed on base, described
Bearing is provided with rotating shaft installing hole, and the laser stent is U-shaped, and laser stent is by the rotatably mounted sub- bearing of rotating shaft
At rotating shaft installing hole, the generating laser and laser pickoff are separately mounted on the both sides of laser stent, the laser
Receptor is connected with microchip communication by Analog input mModule, and the display screen is connected with microchip communication.
The base is provided with display screen mounting groove, and the display screen is arranged at the display screen mounting groove on base.
The support is "Ji" type.
The microchip is single-chip microcomputer.
The generating laser is laser diode.
The present invention has advantages below：The present invention is put in inspection by laser beam irradiation using by monitor station and support assorted
Chip (block) piece of scaffold tower is detecting the polarity of chip.Laser instrument adopts miniature laser diode as emission source, with volume
It is little, convenient, flexible, easily operated reliability and durability, it is contactless effectively to solve chip (block) fast polarity determination requirement, protect
The production efficiency and qualification rate of product are demonstrate,proved, with good practical reference value.
Description of the drawings
Fig. 1 is schematic structural view of the invention.
Fig. 2 is electrical schematic diagram of the present invention.
In figure：1st, base；2nd, support；3rd, bearing, 4, laser stent；5th, rotating shaft；6th, generating laser；7th, laser pick-off
Device；8th, Analog input mModule；9th, microchip；10th, display screen.
Specific embodiment
The present invention will be further described below in conjunction with the accompanying drawings.
As shown in Figure 1, 2, the present invention include base 1, the support 2 for supporting quartz plate, bearing 3, laser stent 4,
Rotating shaft 5, generating laser 6, laser pickoff 7, Analog input mModule 8, microchip 9 and display screen 10, the support 2
Top is provided with for placing the groove of quartz wafer, is provided with for the through hole through laser beam, support 2 and bearing in the groove
3 are respectively and fixedly installed on base 1, and the bearing 3 is provided with rotating shaft installing hole, and the laser stent 4 is U-shaped, laser instrument
At rotating shaft installing hole of the support 4 by the rotatably mounted sub- bearing of rotating shaft 53,7 points of the generating laser 6 and laser pickoff
An Zhuan not be on the both sides of laser stent 4, the laser pickoff 7 is communicated with microchip 9 by Analog input mModule 8
It is connected, the display screen 10 is connected with the communication of microchip 9.
The base 1 is provided with display screen mounting groove, and the display screen 10 is arranged on the display screen mounting groove on base 1
Place.
The support 2 is "Ji" type.
The microchip 9 is single-chip microcomputer.
The generating laser 6 is laser diode.
Working method and principle：Support is fixed on base, and laser diode is fixed on support, during detection, is rotated and is swashed
Light device support, makes the laser beam of laser diode transmitting relative to the angled irradiation of quartz wafer (block), and laser beam passes through
Quartz wafer (block) and for the through hole through laser beam, the strong and weak change of laser is detected by laser pickoff, and will inspection
Measured value is transferred to single-chip microcomputer process, and single-chip microcomputer will determine that, result is exported to display screen finally；Operator by show value be
The polarity of quartz wafer (block) can be learnt.
Embodiment of above is merely to illustrate the present invention, and not limitation of the present invention, about the common of technical field
Technical staff, without departing from the spirit and scope of the present invention, can also make a variety of changes and modification, therefore all
The technical scheme of equivalent falls within scope of the invention, and the scope of patent protection of the present invention should be defined by the claims.
Claims (5)
1. a kind of instrument of quartz wafer (block) non-contact detection positive-negative polarity, it is characterised in that it includes base (1), is used for
The support (2) of support quartz plate, bearing (3), laser stent (4), rotating shaft (5), generating laser (6), laser pickoff
(7), Analog input mModule (8), microchip (9) and display screen (10), are provided with for placing stone at the top of the support (2)
The groove of English chip, is provided with the groove for the through hole through laser beam, and support (2) and bearing (3) are fixedly mounted respectively
On base (1), the bearing (3) is provided with rotating shaft installing hole, and the laser stent (4) is U-shaped, laser stent (4)
At rotating shaft installing hole by the rotatably mounted sub- bearing (3) of rotating shaft (5), the generating laser (6) and laser pickoff (7)
Be separately mounted on the both sides of laser stent (4), the laser pickoff (7) by Analog input mModule (8) with it is miniature
Chip (9) communication is connected, and the display screen (10) is connected with microchip (9) communication.
2. the instrument of a kind of quartz wafer (block) non-contact detection positive-negative polarity according to claim 1, its feature exist
Display screen mounting groove, display screen mounting groove of the display screen (10) on base (1) are provided with the base (1)
Place.
3. the instrument of a kind of quartz wafer (block) non-contact detection positive-negative polarity according to claim 1, its feature exist
In the support (2) be "Ji" type.
4. the instrument of a kind of quartz wafer (block) non-contact detection positive-negative polarity according to claim 1, its feature exist
In the microchip (9) be single-chip microcomputer.
5. the instrument of a kind of quartz wafer (block) non-contact detection positive-negative polarity according to claim 1, its feature exist
In the generating laser (6) be laser diode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610983050.5A CN106546415A (en) | 2016-11-09 | 2016-11-09 | A kind of quartz wafer（Block）The instrument of non-contact detection positive-negative polarity |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610983050.5A CN106546415A (en) | 2016-11-09 | 2016-11-09 | A kind of quartz wafer（Block）The instrument of non-contact detection positive-negative polarity |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106546415A true CN106546415A (en) | 2017-03-29 |
Family
ID=58394316
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610983050.5A Pending CN106546415A (en) | 2016-11-09 | 2016-11-09 | A kind of quartz wafer（Block）The instrument of non-contact detection positive-negative polarity |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106546415A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107505257A (en) * | 2017-08-02 | 2017-12-22 | 北京石晶光电科技股份有限公司济源分公司 | A kind of quartz water chip X is to positive-negative polarity recognition detection instrument |
| CN107655658A (en) * | 2017-11-21 | 2018-02-02 | 沈宇杰 | A kind of optical fiber break-make device for fast detecting |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6446946A (en) * | 1987-07-22 | 1989-02-21 | Akira Matsushita | Semiconductor polarity discriminator |
| CN1571136A (en) * | 1998-09-28 | 2005-01-26 | 恩益禧电子股份有限公司 | Device and method for nondestructive inspection on semiconductor device |
| JP2007071747A (en) * | 2005-09-08 | 2007-03-22 | National Institute Of Advanced Industrial & Technology | Method of determining face polarity of polar semiconductor |
| CN200986562Y (en) * | 2006-07-14 | 2007-12-05 | 中国计量科学研究院 | Accelerameter high-frequency vibration amplitude phase behavior measuring device |
| CN101614685A (en) * | 2009-03-13 | 2009-12-30 | 北京大学 | Detect the method and the detection system of semiconductor crystal or epitaxial thin film material polarity |
| CN101619966A (en) * | 2009-08-17 | 2010-01-06 | 魏润杰 | Non-contact dynamic profile measuring method and measuring device |
| JP2010287712A (en) * | 2009-06-11 | 2010-12-24 | Nippon Telegr & Teleph Corp <Ntt> | Method of measuring characteristic of semiconductor |
| JP2012054467A (en) * | 2010-09-02 | 2012-03-15 | Napuson Kk | Pn-type determination device and pn-type determination method |
| CN103698681A (en) * | 2013-12-19 | 2014-04-02 | 江苏瑞新科技股份有限公司 | Novel non-contact test device for P-type semiconductor and N-type semiconductor |
-
2016
- 2016-11-09 CN CN201610983050.5A patent/CN106546415A/en active Pending
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6446946A (en) * | 1987-07-22 | 1989-02-21 | Akira Matsushita | Semiconductor polarity discriminator |
| CN1571136A (en) * | 1998-09-28 | 2005-01-26 | 恩益禧电子股份有限公司 | Device and method for nondestructive inspection on semiconductor device |
| JP2007071747A (en) * | 2005-09-08 | 2007-03-22 | National Institute Of Advanced Industrial & Technology | Method of determining face polarity of polar semiconductor |
| CN200986562Y (en) * | 2006-07-14 | 2007-12-05 | 中国计量科学研究院 | Accelerameter high-frequency vibration amplitude phase behavior measuring device |
| CN101614685A (en) * | 2009-03-13 | 2009-12-30 | 北京大学 | Detect the method and the detection system of semiconductor crystal or epitaxial thin film material polarity |
| JP2010287712A (en) * | 2009-06-11 | 2010-12-24 | Nippon Telegr & Teleph Corp <Ntt> | Method of measuring characteristic of semiconductor |
| CN101619966A (en) * | 2009-08-17 | 2010-01-06 | 魏润杰 | Non-contact dynamic profile measuring method and measuring device |
| JP2012054467A (en) * | 2010-09-02 | 2012-03-15 | Napuson Kk | Pn-type determination device and pn-type determination method |
| CN103698681A (en) * | 2013-12-19 | 2014-04-02 | 江苏瑞新科技股份有限公司 | Novel non-contact test device for P-type semiconductor and N-type semiconductor |
Non-Patent Citations (1)
| Title |
|---|
| 颜友钧 等: "基于虚拟仪器的动态非接触式硅片测试仪", 传感器与微***, no. 03, 20 March 2010 (2010-03-20), pages 59 - 61 * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107505257A (en) * | 2017-08-02 | 2017-12-22 | 北京石晶光电科技股份有限公司济源分公司 | A kind of quartz water chip X is to positive-negative polarity recognition detection instrument |
| CN107655658A (en) * | 2017-11-21 | 2018-02-02 | 沈宇杰 | A kind of optical fiber break-make device for fast detecting |
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