CN106525249B - Mirror surface infrared temperature measuring device and method - Google Patents
Mirror surface infrared temperature measuring device and method Download PDFInfo
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- CN106525249B CN106525249B CN201610948498.3A CN201610948498A CN106525249B CN 106525249 B CN106525249 B CN 106525249B CN 201610948498 A CN201610948498 A CN 201610948498A CN 106525249 B CN106525249 B CN 106525249B
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- G—PHYSICS
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- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
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- G01J2005/065—Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity by shielding
Abstract
The invention discloses a mirror surface infrared temperature measuring device and a mirror surface infrared temperature measuring method, and aims to provide a mirror surface infrared temperature measuring device and a mirror surface infrared temperature measuring method which can accurately measure the temperature of a mirror surface. The infrared temperature measuring device comprises a detection module, a spherical concave mirror cover and a connecting body for connecting the detection module and the spherical concave mirror cover; the inner surface of the spherical concave mirror cover is a spherical reflecting surface, and the back of the vertex area of the spherical concave mirror cover is provided with a circular seat fixedly connected with the connecting body; the center of the connecting body is provided with a through hole corresponding to the shape of the probe of the detection module, and the probe of the detection module extends into the through hole of the connecting body; the center of the circular base is provided with a through hole corresponding to the shape of the probe, and the through hole extends to the inner surface of the spherical concave mirror cover to form an opening on the spherical concave mirror cover. The invention can effectively improve the precision of mirror surface temperature measurement.
Description
Technical Field
The invention relates to the field of infrared temperature measurement, in particular to a mirror surface infrared temperature measurement device and a temperature measurement method.
Background
Temperature is one of the key factors affecting the image quality of the optical imaging device, and the influence on the image quality mainly comprises: the temperature difference fluctuation between the mirror surface and the air can form a layer of turbulent flow in the air near the mirror surface to generate mirror surface seeing (mirrorseeing); the thermal deformation and refractive index change caused by the temperature change of the optical element enable the wave surface after reflection or transmission to deviate from an ideal wave surface, and thermal aberration is generated; temperature induced changes in other performance parameters of the optical element. The influence of temperature on the optical imaging equipment is researched and eliminated, and the accurate measurement of the temperature of the optical mirror is an undeletable ring. The existing optical mirror surface temperature measurement method has two types, namely contact temperature measurement and indirect temperature measurement, but has certain limitations: the contact temperature measurement obtains the temperature through arranging the temperature probe at the mirror surface, and in the actual thermal environment, the mirror surface temperature distribution is more complicated, must have enough temperature measurement points to reflect the temperature distribution. Due to the ultra-high requirements of the optical mirror surface film layer and the surface shape precision, a plurality of temperature measuring probes cannot be adhered to the mirror surface. The indirect temperature measurement is based on the contact temperature measurement of the back of the mirror surface, and the mirror surface temperature is indirectly reflected through numerical calculation. The thermal environment parameters of the mirror body are difficult to measure actually, and the calculated mirror surface temperature is inaccurate due to the fact that the mirror body and a supporting structure are complex in heat conduction, complex and changeable in convection, radiation heat exchange and the like.
The non-contact temperature measurement does not affect the mirror film layer and the surface shape, and has obvious advantages compared with the contact temperature measurement. The non-contact temperature measurement technology has various types, and mainly comprises a laser interference temperature measurement and holographic interference temperature measurement technology and the like based on deformation measurement, wherein the laser interference temperature measurement and holographic interference temperature measurement technology is suitable for near-infrared temperature measurement, colorimetric temperature measurement, luminance temperature measurement, multispectral radiation temperature measurement and the like of high-temperature objects. The working operating state temperature of the optical mirror surface is mostly in a normal temperature range, and a non-contact temperature measuring instrument suitable for normal temperature objects is medium-wave and long-wave infrared temperature measuring equipment. The optical mirror surface is plated with various film layers for improving the reflection or transmission capability, the surface infrared band reflectivity is very high, the thermal emissivity is very low, and the peripheral environment has strong reflection radiation on the mirror surface, thereby seriously interfering the temperature measurement precision. At present, the infrared temperature measurement technology can accurately measure the temperature of a diffuse emitter (Lambert body), and the infrared temperature measurement of a high-reflectivity surface such as an optical mirror surface is considered to be inaccurate. The reason that the traditional infrared temperature measurement equipment and the traditional temperature measurement method are difficult to accurately measure the mirror surface temperature is mainly embodied in the following three aspects:
1) The mirror surface itself radiates much less heat than the ambient radiation it reflects. The thermal emissivity of the mirror surface infrared band is extremely low, the reflectivity is ultrahigh, the mirror surface reflectivity of part of the gold-plated film can reach more than 95%, and the thermal emissivity is less than 0.05. The heat radiation of the normal temperature mirror surface is smaller than the reflection of the ambient environment and even the downward radiation of the atmosphere on the mirror surface. When the traditional infrared temperature measuring equipment carries out mirror surface temperature measurement, infrared radiation received by the infrared detector is mainly reflected environment radiation rather than mirror surface self-thermal radiation.
2) The optical mirror surface has low thermal emissivity, the normal-temperature mirror surface has weak self thermal radiation, and the self thermal radiation of part of the ultrahigh reflection mirror surface is smaller than the lower limit of radiation measurement calibrated by the traditional infrared temperature measurement equipment.
3) The traditional infrared temperature measuring equipment can only collect the self thermal radiation of the mirror surface forming a small included angle with the normal line of the mirror surface, and the directional thermal emissivity of most mirror surfaces forming a small included angle with the normal line is smaller than the directional thermal emissivity of most mirror surfaces with a large included angle. The heat radiation of the mirror surface collected by the infrared thermometer only accounts for a small part of the total heat radiation of the mirror surface.
Because the thermal emissivity of the mirror surface infrared band is extremely low and the reflectivity is ultrahigh, the traditional infrared temperature measurement equipment cannot accurately measure the infrared temperature of the mirror surface infrared band. In order to realize the infrared temperature measurement of the mirror surface and the metal surface, various scientific and technical personnel conduct various researches, which are summarized as follows:
(1) The reflectivity of the surface of the object is related to the temperature and the incident angle, and researchers including Chayan Mitra, norman Turnquist, ayan Banerjee and the like deeply research the method for measuring the reflectivity of the surface of the object to obtain the temperature. The reflectivity measurement adopts methods of directly measuring the incident/reflected radiation intensity, modulating and demodulating, measuring polarization components, calculating the reflectivity and the like. The reflectivity thermometry method can be used for measuring the temperature of the surface of high-temperature metal at present, has poor measurement effect on the surface of normal-temperature metal, and is not suitable for measuring the temperature of a normal-temperature optical mirror surface.
(2) The design of multiband infrared imaging temperature measurement is proposed by W.A. Ellingson and C.K. Hsieh of florida university of national laboratory materials department of attorney, USA, and the multiband infrared temperature measurement device can be applied to high-temperature metal surface temperature measurement, but is not suitable for normal-temperature mirror surface temperature measurement with ultrahigh reflectivity.
(3) C.Monte, B.Gutschwager and J.Hollandt of German national metrology institute (PTB) and S.P.Morozova of all-Russian optical physics research institute (VNIIOFI) jointly design equipment with high-precision infrared temperature measurement and emissivity measurement, and represent the frontier level of current infrared temperature measurement. In order to eliminate the interference of reflected radiation in the surrounding environment, the key parts of the equipment and the optical path are both cooled by liquid nitrogen, and the optical path and the chamber are in a vacuum environment. The device can measure the temperature of the optical mirror placed in the measuring chamber, and the mirror temperature in the running state cannot be measured.
(4) Vacuum infrared temperature standard equipment (VRTSF) developed by Chinese metrological scientific research institute was successfully developed in 2015. The inside of the device adopts liquid nitrogen refrigeration and vacuum design, and a Fourier red spectrometer (BrukerVERTEX 80V) is arranged in the device. VRTSF represents the leading edge level of domestic infrared radiation measurement, but can only measure the temperature of the mirror placed in the measurement cavity of the VRTSF, and does not meet the requirement of mirror temperature measurement in a running state.
The surfaces of objects with low thermal emissivity, high reflectivity in infrared band, such as optical mirrors and the like are always regarded as blind areas in the field of infrared temperature measurement, and no research report on the accurate temperature measurement of the optical mirrors in a normal temperature range in an operating state is found in the current published documents.
Disclosure of Invention
The invention overcomes the defects of the existing infrared temperature measurement technology in optical mirror surface temperature measurement, and provides a mirror surface infrared temperature measurement device with high measurement precision; based on the temperature measuring device, the invention also provides a mirror surface infrared temperature measuring method.
In order to solve the defects of the traditional infrared temperature measuring equipment when the mirror surface temperature is measured, the invention is realized by the following technical scheme:
a mirror surface infrared temperature measuring device comprises a detection module, a spherical concave mirror cover and a connecting body for connecting the detection module and the spherical concave mirror cover; the inner surface of the spherical concave mirror cover is a spherical surface, and the back of the vertex area of the spherical concave mirror cover is provided with a circular seat fixedly connected with the connecting body; the center of the connecting body is provided with a through hole corresponding to the shape of the probe of the detection module, and the probe of the detection module extends into the through hole of the connecting body; the center of the circular base is provided with a through hole corresponding to the shape of the probe, and the through hole extends to the inner surface of the spherical concave mirror cover to form an opening on the spherical concave mirror cover.
Preferably, the light incident end of the probe is flush with the opening at the inner surface of the spherical concave mirror cover.
Preferably, the connecting body comprises a connecting plate fixedly connected with the detection module and a connecting seat which is positioned on one side of the connecting plate, integrated with the connecting plate and the axis of which is coincident with the axis of the through hole on the connecting plate.
Preferably, the detection module is a detection module of a refrigeration type thermal infrared imager.
Preferably, the spherical concave mirror cover is made of a metal material with high heat conductivity, and the inner surface of the spherical concave mirror cover is plated with a gold film.
Preferably, the outer side surface of the spherical concave mirror cover is provided with a temperature control layer based on a semiconductor temperature control technology.
Preferably, the opening of the spherical concave mirror housing is located at the center of the apex and focal point of the mirror housing.
Preferably, the circular seat and the connecting body are connected by gluing, clamping or screwing.
A mirror surface infrared temperature measurement method adopts the measurement device to measure the temperature of the mirror surface; the method specifically comprises the following steps:
The upper surface of the cylindrical sample mirror and the optical mirror surface to be measured are plated with the same film layer, the thickness of the sample mirror is less than 1/50 of the diameter, and the mirror embryo is made of high-thermal-conductivity metal; the side surface and the bottom surface of the sample lens column are provided with high-precision temperature control devices for controlling the temperature of the sample lens. The temperature control device has a reasonable temperature control range, and the temperature control range covers the temperature change range of the optical mirror surface to be measured;
before the sample mirror is calibrated, the temperature control value of the temperature control layer of the spherical concave mirror cover and the connecting body of the measuring device is T _ s, the T _ s can be freely set, and for the convenience of temperature control, the T _ s can be set as the working environment temperature mean value of the optical mirror surface to be measured; the distance between the spherical concave mirror cover and the sample mirror surface of the measuring device is set as a constant distance H _ s, and the H _ s is as small as possible on the premise of ensuring no risk of touching the mirror surface, for example, less than 1/50 of the diameter of the opening surface of the mirror cover;
when the sample mirror is calibrated, adjusting the temperature control value of the sample mirror according to the fixed temperature change amount T and recording the calibration measurement value corresponding to the detection device; the detector of the detection device is an infrared focal plane array detector, and the calibration measurement value is the average value of the output values of all pixels of the infrared focal plane array detector; establishing a calibration database based on the sample mirror temperature and a calibration measured value, wherein each sample mirror temperature value T (i) in the database corresponds to one calibration measured value Y (i);
and 2, step: telescope optical mirror of measuring device
Selecting a measured area of the optical mirror surface, wherein a spherical concave mirror cover of the measuring device is close to the mirror surface area, and the distance is H _ s; controlling the temperature of the spherical concave mirror cover and the connecting body to be T _ s; after the spherical concave mirror cover and the connecting body are at constant temperature, the measuring device starts to measure the mirror surface temperature to obtain a measured value; acquiring a corresponding mirror surface temperature value T (i) according to the measured value and the calibration database; and when the measured value is positioned between two calibration measured values of the database, acquiring a corresponding temperature value by using a linear interpolation method.
Compared with the prior art, the invention has the following advantages:
(1) The invention can improve the mirror radiation collection capability during infrared temperature measurement. As shown in fig. 6, in addition to collecting the specular radiation that is directed towards the infrared detector, which is reflected by the inner surface of the spherical concave mirror housing, it is also possible to collect specular radiation that forms an angle with the normal, as shown in fig. 7. The mirror radiation collection capability of the invention is far greater than that of the traditional infrared temperature measurement equipment. For example, the photo640 movement with the F number of 1, manufactured by the company FLIR in usa, is a short-focus thermal infrared imager movement, and is one of models with the strongest radiation capability for collecting the surface of the object to be measured in photo series movement products. The calculation shows that when the reflectivity of the infrared band on the inner surface of the spherical concave mirror cover of the device is 95 percent, and the diameter of the spherical concave mirror cover is equal to the long edge of the measured area corresponding to the minimum focusing distance of the photo640, the mirror surface radiation collecting capacity of the device is about 10.9 times of that of the photo 640.
(2) The invention eliminates the interference of the reflected radiation of the surrounding environment around the mirror surface on the mirror surface. The invention adopts the temperature measurement design that the spherical concave mirror cover is close to the mirror surface, can effectively shield the environmental heat radiation and ensure that the radiation collected by the infrared detector is not interfered by the environmental radiation. During temperature measurement, the mirror cover of the device is close to the measured mirror surface, and H _ s is as small as possible, for example, less than 1/50 of the diameter of the opening surface of the mirror cover, on the premise of ensuring no risk of touching the mirror surface. Most of the environmental heat radiation is shielded outside the mirror cover, and the extremely small part of the environmental heat radiation enters the mirror cover through a gap between the mirror cover and the mirror surface and is absorbed by the inner surface of the mirror cover after being reflected for many times.
(3) The invention has the capability of eliminating the self thermal radiation stray light interference of the device. Heat radiation stray light in a temperature measurement light path mainly comes from the inner wall of the spherical concave mirror cover, and heat radiation of the inner wall can directly enter the detector or be reflected by the measured mirror surface to influence the temperature measurement precision. In order to weaken heat radiation stray light, the surface of the inner wall of the spherical concave mirror cover is plated with a film layer with high infrared band radiation reflectivity, and the thermal emissivity of the film layer is far smaller than that of the inner wall of the original metal mirror cover. The optical mirror surface, especially the reflection type optical mirror surface, is provided with films of gold, silver, aluminum and the like, the thermal emissivity of the mirror surface is not greatly different from that of a film coating layer coated on the mirror cover, and the self thermal radiation of the film coating layer cannot be ignored. In order to eliminate the self thermal radiation interference of the film layer, the temperature of the outer surface of the mirror cover is controlled by adopting a semiconductor temperature control technology. After the temperature of the mirror cover is controlled, the temperature and the temperature control value of the inner surface film layer are basically equal and stable. The heat radiation intensity and the spatial distribution of the film layer are basically stable. The stray light of the thermal radiation collected by the detector is basically stable and constant, and the collected mirror radiation changes along with the temperature of the mirror. A constant and a variable, so that the temperature measuring device has the capability of eliminating the interference of heat radiation stray light. The mirror surface temperature measurement calibration method can eliminate the influence of the heat radiation stray light of the temperature measuring device on the mirror surface temperature measurement.
(4) The invention designs a temperature calibration method for mirror surface infrared temperature measurement, and ensures the precision of mirror surface infrared temperature measurement. Because the directional emissivity of the measured mirror surface is obviously different from the blackbody, a sample mirror calibration method suitable for mirror surface temperature measurement is designed for the project except for the traditional blackbody calibration. And (3) under the constant temperature of the spherical concave mirror cover, adjusting the temperature of the sample mirror at equal temperature intervals, and establishing a calibration database of the temperature of the sample mirror and a corresponding calibration measured value. And when the mirror surface temperature is measured, acquiring a corresponding mirror surface temperature value from the calibration database according to the actual measurement value. The mirror surface infrared temperature measurement precision can be ensured by the sample mirror temperature calibration method.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without inventive exercise.
FIG. 1 is a schematic structural diagram of the present invention.
FIG. 2 is a schematic view of the structure of the linker.
Fig. 3 is a schematic structural diagram of the detection module.
FIG. 4 is a schematic view of the structure of the concave spherical mirror housing, with hatching omitted.
FIG. 5 is a schematic diagram of the gold plating film and the temperature control layer of the spherical concave mirror cover.
Fig. 6 is a schematic representation of the invention during measurement, showing only the specular radiation directed to the detector.
Fig. 7 is a schematic representation of the invention during measurement, showing only specular radiation reflected into the detector.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be obtained by a person skilled in the art without inventive effort based on the embodiments of the present invention, are within the scope of the present invention.
The infrared temperature measuring device for the mirror surface shown in fig. 1-5 comprises a detection module 1, a spherical concave mirror cover 2 and a connecting body 3 for connecting the detection module 1 and the spherical concave mirror cover 2; the inner surface of the spherical concave mirror cover 2 is a spherical surface, and the back of the vertex area is provided with a circular seat 6 fixedly connected with the connecting body 3; the center of the connecting body 3 is provided with a through hole corresponding to the shape of the probe 7 of the detection module 1, and the probe 7 of the detection module 1 extends into the through hole of the connecting body 3; the center of the circular seat 6 is provided with a through hole corresponding to the shape of the probe 7, and the through hole extends to the inner surface of the spherical concave mirror cover 2 to form an opening on the spherical concave mirror cover 2.
The light incident end 8 of the probe 7 is flush with the opening on the inner surface of the spherical concave mirror cover, and the gap between the outer wall of the probe 7 of the detection module 1 and the through hole of the circular base is less than 0.05 mm, so that the self heat radiation on the inner surface of the through hole of the connecting body is prevented from entering the probe 7 of the infrared detector, the measurement interference is reduced, and the measurement precision is improved.
The connecting body 3 comprises a connecting plate 4 fixedly connected with the detection module 1 and a connecting seat 5 which is positioned on one side of the connecting plate 4, is integrated with the connecting plate 4 and has an axis coincident with the axis of the through hole on the connecting plate 4; the connecting plate of the embodiment is provided with a counter bore which is connected with the detection module through a bolt;
the detection module 1 is a detection module of a refrigeration type thermal infrared imager. The refrigeration type infrared thermometer is a mature industrial product, and the detection module 1 refers to the residual part of the refrigeration type infrared thermometer with an optical imaging lens deducted, and mainly comprises an infrared detector, a control circuit, an imaging circuit, a reading circuit, a refrigerator and the like.
The spherical concave mirror cover 2 is made of metal with high heat conductivity coefficient, and the inner surface of the spherical concave mirror cover 2 is plated with a gold film 10.
And a temperature control layer 9 based on a semiconductor temperature control technology is arranged on the outer side surface of the spherical concave mirror cover 2. And customizing the semiconductor temperature control layer according to the overall dimension of the spherical concave mirror cover 2.
The opening of the spherical concave mirror cover 2 is positioned at the vertex of the mirror cover and the center of the focal point, namely the distance between the opening surface of the spherical concave mirror cover and the vertex is about one half of the focal distance.
The circular seat 6 and the connecting body 3 are connected by gluing, obviously, the connection can be conventional connection methods such as clamping connection or screw connection.
The spherical concave mirror cover replaces an imaging lens component of the traditional infrared temperature measuring equipment, and the infrared detector not only collects the mirror radiation directly emitted to the detector, but also can collect the mirror radiation forming a certain included angle with the normal line through reflection. The measuring device does not consider the temperature spatial resolution of the measured mirror surface area, and greatly improves the mirror surface radiation collection capacity of the temperature measuring device by utilizing the convergence capacity of the spherical concave mirror cover.
A mirror surface infrared temperature measurement method adopts the measurement device to measure the temperature of the mirror surface; the method specifically comprises the following steps:
The upper surface of the cylindrical sample mirror and the optical mirror surface to be measured are plated with the same film layer, the thickness of the sample mirror is less than 1/50 of the diameter, and the mirror embryo is made of high-thermal-conductivity metal; the side surface and the bottom surface of the sample lens column are provided with high-precision temperature control devices for controlling the temperature of the sample lens. The temperature control device has a reasonable temperature control range, and the temperature control range covers the temperature change range of the optical mirror surface to be measured;
before the sample lens is calibrated, the temperature control values of the temperature control layers of the spherical concave lens cover 2 and the connecting body 3 of the measuring device are T _ s, the T _ s can be freely set, and for facilitating temperature control, the T _ s can be set to be the mean value of the temperature of the working environment of the optical lens surface to be measured; the distance between the spherical concave mirror cover 2 of the measuring device and the mirror surface of the sample mirror is set as a constant distance H _ s, and the H _ s is as small as possible on the premise of ensuring no risk of touching the mirror surface, for example, less than 1/50 of the diameter of the opening surface of the mirror cover;
when the sample mirror is calibrated, adjusting the temperature control value of the sample mirror by the fixed temperature change amount T and recording a calibration measurement value corresponding to the detection device; the detector of the detection device is an infrared focal plane array detector, and the calibration measurement value is the average value of the output values of all pixels of the infrared focal plane array detector; establishing a calibration database based on the sample mirror temperature and a calibration measured value, wherein each sample mirror temperature value T (i) in the database corresponds to one calibration measured value Y (i);
and 2, step: measuring telescope optical mirror surface
Selecting a measured area of an optical mirror surface, wherein a spherical concave mirror cover 2 of the measuring device is close to the area of the optical mirror surface, and the distance is H _ s; the temperature of the spherical concave mirror cover 2 and the connecting body 3 is controlled to be T _ s; after the spherical concave mirror cover 2 and the connecting body 3 are at constant temperature, the measuring device starts to measure the mirror surface temperature to obtain a measured value; acquiring a corresponding mirror surface temperature value T (i) according to the measured value and the calibration database; and when the measured value is positioned between two calibration measured values of the database, acquiring a corresponding temperature value by using a linear interpolation method.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents, improvements and the like that fall within the spirit and principle of the present invention are intended to be included therein.
Claims (8)
1. A mirror surface infrared temperature measurement method is characterized in that: the mirror surface temperature measuring device comprises a detection module, a spherical concave mirror cover and a connecting body for connecting the detection module and the spherical concave mirror cover; the inner surface of the spherical concave mirror cover is a spherical reflecting surface, and the back of the vertex area of the spherical concave mirror cover is provided with a circular seat fixedly connected with the connecting body; the center of the connecting body is provided with a through hole corresponding to the shape of the probe of the detection module, and the probe of the detection module extends into the through hole of the connecting body; a through hole corresponding to the shape of the probe is arranged in the center of the circular seat, extends to the inner surface of the spherical concave mirror cover and forms an opening on the spherical concave mirror cover;
the mirror surface temperature measurement comprises the following steps:
step 1, sample mirror calibration of measuring device
The upper surface of the cylindrical sample mirror and the optical mirror surface to be measured are plated with the same film layer, the thickness of the sample mirror is less than 1/50 of the diameter, and the mirror embryo is made of high-thermal-conductivity metal; the side surface and the bottom surface of the sample lens column are provided with high-precision temperature control devices for controlling the temperature of the sample lens; the temperature control device has a reasonable temperature control range, and the temperature control range covers the temperature change range of the optical mirror surface to be measured;
before the sample mirror is calibrated, the temperature control values of the temperature control layers of the spherical concave mirror cover and the connecting body of the measuring device are T _ s, the T _ s is freely set, and for the convenience of temperature control, the T _ s is set as the working environment temperature mean value of the optical mirror surface to be measured; the distance between the spherical concave mirror cover of the measuring device and the mirror surface of the sample mirror is set as a constant distance H _ s, and the H _ s is required to be as small as possible on the premise of ensuring no risk of touching the mirror surface;
when the sample mirror is calibrated, adjusting the temperature control value of the sample mirror according to the fixed temperature change amount T and recording the calibration measurement value corresponding to the detection device; the detector of the detection device is an infrared focal plane array detector, and the calibration measurement value is the average value of the output values of all pixels of the infrared focal plane array detector; establishing a calibration database based on the sample mirror temperature and a calibration measured value, wherein each sample mirror temperature value T (i) in the database corresponds to a calibration measured value Y (i);
step 2: measuring telescope optical mirror surface
Selecting a measured area of the optical mirror surface, wherein a spherical concave mirror cover of the measuring device is close to the mirror surface area, and the distance is H _ s; controlling the temperature of the spherical concave mirror cover and the connecting body to be T _ s; after the spherical concave mirror cover and the connecting body are at constant temperature, the measuring device starts to measure the mirror surface temperature to obtain a measured value; acquiring a corresponding mirror surface temperature value T (i) according to the measured value and the calibration database; and when the measured value is positioned between two calibration measured values of the database, acquiring a corresponding temperature value by using a linear interpolation method.
2. The method of claim 1, wherein: the light incident end of the probe is flush with the opening on the inner surface of the spherical concave mirror cover.
3. The method of claim 1, wherein: the connecting body comprises a connecting plate fixedly connected with the detection module and a connecting seat which is positioned on one side of the connecting plate, integrated with the connecting plate and the axis of which coincides with the axis of the through hole in the connecting plate.
4. The method according to claim 1 or 2, characterized in that: the detection module is a detection module of the refrigeration type thermal infrared imager.
5. The method according to claim 1 or 2, characterized in that: the spherical concave mirror cover is made of metal with high heat conductivity coefficient, and the inner surface of the spherical concave mirror cover is plated with a gold film.
6. The method according to claim 1 or 2, characterized in that: and a temperature control layer based on a semiconductor temperature control technology is arranged on the outer side surface of the spherical concave mirror cover.
7. The method according to claim 1 or 2, characterized in that: the opening of the spherical concave mirror cover is positioned at the vertex of the mirror cover and the center of the focus.
8. The method according to claim 1 or 2, characterized in that: the circular seat and the connector are in adhesive connection, clamping connection or screw connection.
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| CN109959454B (en) * | 2019-04-11 | 2020-06-02 | 中国科学院云南天文台 | Infrared temperature measuring device for strong light irradiation surface, temperature measuring method and application |
| CN113074819B (en) * | 2021-04-02 | 2022-03-29 | 北京理工大学 | High-precision infrared temperature measurement system and method |
| CN113739933B (en) * | 2021-09-06 | 2023-04-18 | 中国科学院宁波材料技术与工程研究所 | High-precision high-spatial-resolution infrared temperature measurement method |
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| CA1319832C (en) * | 1988-07-11 | 1993-07-06 | Jean-Claude Krapez | Infrared radiation probe for measuring the temperature of low-emissivity materials in a production line |
| US5483350A (en) * | 1993-10-25 | 1996-01-09 | Kazuhiro Kawasaki | Optical system for infrared spectroscopy having an aspherical concave mirror |
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| CN2304113Y (en) * | 1997-08-30 | 1999-01-13 | 戴景民 | Infrared radiation type thermometer |
| DE102004030418A1 (en) * | 2004-06-24 | 2006-01-19 | Robert Bosch Gmbh | Microstructured infrared sensor and a method for its production |
| KR101303599B1 (en) * | 2011-11-11 | 2013-09-11 | 한국기초과학지원연구원 | Vacuum blackbody chamber for calibration of the IR optical system |
| CN102735346B (en) * | 2012-07-16 | 2014-03-12 | 中国船舶重工集团公司第七一七研究所 | Refrigeration thermal infrared imager and power supply management method thereof |
| CN105043558B (en) * | 2015-06-06 | 2017-11-28 | 中国科学院云南天文台 | A kind of screen method and device for high reverse side infrared radiation measurement |
| CN206114120U (en) * | 2016-10-26 | 2017-04-19 | 中国科学院云南天文台 | Infrared temperature measuring device of mirror surface |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CA1319832C (en) * | 1988-07-11 | 1993-07-06 | Jean-Claude Krapez | Infrared radiation probe for measuring the temperature of low-emissivity materials in a production line |
| US5483350A (en) * | 1993-10-25 | 1996-01-09 | Kazuhiro Kawasaki | Optical system for infrared spectroscopy having an aspherical concave mirror |
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