CN106525249A - Infrared temperature measurement device and temperature measurement method for mirror surfaces - Google Patents
Infrared temperature measurement device and temperature measurement method for mirror surfaces Download PDFInfo
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- CN106525249A CN106525249A CN201610948498.3A CN201610948498A CN106525249A CN 106525249 A CN106525249 A CN 106525249A CN 201610948498 A CN201610948498 A CN 201610948498A CN 106525249 A CN106525249 A CN 106525249A
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- 238000009529 body temperature measurement Methods 0.000 title claims abstract description 30
- 238000000034 method Methods 0.000 title claims abstract description 24
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- 238000005259 measurement Methods 0.000 claims description 55
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- 238000005516 engineering process Methods 0.000 claims description 8
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- 238000004026 adhesive bonding Methods 0.000 claims description 3
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- 238000012360 testing method Methods 0.000 description 2
- 206010037660 Pyrexia Diseases 0.000 description 1
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- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 201000009310 astigmatism Diseases 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/06—Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/06—Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity
- G01J2005/065—Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity by shielding
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- Spectroscopy & Molecular Physics (AREA)
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Abstract
The present invention discloses an infrared temperature measurement device and temperature measurement method for mirror surfaces. The infrared temperature measurement device and temperature measurement method for the mirror surfaces can accurately measure the temperature of the mirror surfaces. The infrared temperature measurement device includes a detection module, a spherical concave mirror cover and a connection body for connecting the detection module and the spherical concave mirror cover; the inner surface of the spherical concave mirror cover is a spherical reflecting surface, and the back surface of the vertex area of the spherical concave mirror cover is provided with a round seat which is fixedly connected with the connection body; a through hole which is shaped to match the probe of the detection module is formed at the center of the connection body; the probe of the detection module extends into the through hole of the connection body; a cut-through hole shaped to match the probe is formed at the center of the round seat; and the cut-through hole extends to the inner surface of the spherical concave mirror cover, so that an opening can be formed in the spherical concave mirror cover. With the infrared temperature measurement device and temperature measurement method adopted, the precision of mirror surface temperature measurement can be effectively improved.
Description
Technical field
The present invention relates to infrared measurement of temperature field, more particularly to a kind of minute surface infrared temperature measurement apparatus and temp measuring method.
Background technology
Temperature is to affect optical imaging apparatus as one of the key factor of matter, and the impact as matter is mainly included：Minute surface with
The temperature difference of air rises and falls and can form one layer of turbulent flow in air near minute surface, produces minute surface seeing（mirror seeing）；Light
Thermal deformation and variations in refractive index that component temperature change causes is learned, is made reflection or the corrugated after transmission deviate from preferable corrugated, is produced
Heat causes aberration；The change of the optical element other performance parameter that temperature causes.Temperature is studied and is eliminated to optical imaging apparatus
Impact, the temperature accurate measurement of optical mirror plane is the ring that can not be lacked.Optical mirror plane thermometry has contact to survey at present
Gentle two kinds of thermometric indirectly, but have certain limitation：Contact thermography is by arranging that temperature probe obtains temperature in minute surface, real
In the thermal environment of border, mirror temperature distribution is more complicated, it is necessary to have enough thermometric points reflect Temperature Distribution.Due to light
The superelevation for learning minute surface film layer dough-making powder shape precision is required, it is impossible to paste many temperature probes in minute surface.Thermometric is based on minute surface indirectly
Back contact thermometric, reflects mirror temperature indirectly by numerical computations.The thermal environment parameter of mirror body is difficult to survey, including mirror body with
The complicated conduction of heat of supporting construction, convection current complicated and changeable and radiation heat transfer etc., cause the mirror temperature for calculating inaccurate.
Non-contact temperature measuring does not interfere with minute surface film layer dough-making powder shape, has obvious advantage compared with contact thermography.Noncontact is surveyed
Temperature technique species is various, mainly includes near-infrared thermometric suitable for high temp objects, color comparison temperature measurement, brightness thermometric and multispectral spoke
Penetrate thermometric etc., the laser interference thermometric based on distortion measurement and holographic interference thermometry etc..The work operation shape of optical mirror plane
Being in room temperature scope state temperature more, the non-contact temperature measuring instrument for being adapted to room temperature object be in, LONG WAVE INFRARED temperature measuring equipment.Optical frames
Face is coated with the various film layers for improving reflection or transmission capacity, and surface infrared band reflectance is very high and thermal emissivity very little,
Surrounding enviroment have a strong reflected radiation in minute surface, severe jamming temperature measurement accuracy.Infrared temperature-test technology can be to unrestrained transmitting at present
Body（Lambert's body）Accurate thermometric is carried out, is considered as inaccurate to the infrared measurement of temperature of the high reflectivity surface such as optical mirror plane.Pass
System infrared measurement of temperature equipment and temp measuring method are difficult in terms of the reason for accurately measuring mirror temperature be mainly reflected in three below：
1）Environmental radiation of minute surface itself heat radiation much smaller than its reflection.The thermal emissivity of minute surface infrared band is extremely low, reflectance
Superelevation, up to more than 95%, thermal emissivity is less than 0.05 to the specular reflectivity of part gold-plated film.Itself heat radiation of room temperature minute surface is little
In surrounding enviroment even reflection of the Downward atmospheric long-wave radiation in minute surface.When traditional infrared temperature measuring equipment carries out minute surface thermometric, infrared spy
The infra-red radiation for surveying device acceptance is mainly the environmental radiation and non-specular surface itself heat radiation for reflecting.
2）Optical mirror plane thermal emissivity is low, and itself heat radiation of room temperature minute surface is weak, part ultrahigh-reflectivity minute surface from fever of the body
The actinometry lower limit that radiation is demarcated less than traditional infrared temperature measuring equipment.
3）Traditional infrared temperature measuring equipment, can only collect minute surface itself heat radiation into little angle, Duo Shuojing with mirror normal
The orientation thermal emissivity with normal in little angle in face is less, orients thermal emissivity less than its mitre.Infrared radiation thermometer is collected
Minute surface heat radiation only account for the total thermal-radiating sub-fraction of minute surface.
As the thermal emissivity of minute surface infrared band is extremely low, reflectance superelevation, traditional infrared temperature measuring equipment is to the infrared of its
Thermometric is inaccurate.In order to realize the infrared measurement of temperature of minute surface, metal surface, many backroom boys have done various grinding
Study carefully, be summarized as follows：
（1）The reflectance of body surface is relevant with temperature, incident angle, and scientific research personnel includes Chayan Mitra, Norman
Turnquist, Ayan Banerjee et al. have extensively studied the method for surveying that body surface reflectance obtains temperature.Reflectance is surveyed
Amount employs direct measurement incidence/reflected radiation, modulatedemodulate commissioning and measurement polarized component and calculates the methods such as reflectance.Instead
The rate thermometry of penetrating is presently available for high-temperature metal surface temperature measurement, and normal temperature metal surface measurement effect is poor, is not suitable for room temperature optics
Minute surface thermometric.
（2）The W. A. Ellingson of the Argonne National Laboratory material supply section department of the Chinese Academy of Sciences of the U.S. and C. K. of university of Florida
Hsieh proposes the design of multiband infrared imaging temperature measuring, and multiband infrared temperature measurement apparatus can be applicable to the survey of high-temperature metal surface
Temperature, but be not suitable for the room temperature minute surface thermometric with ultra-high reflectivity.
（3）German National measures institute（PTB）C.Monte, B.Gutschwager, J.Hollandt and full Russia's optics thing
Reason academy（VNIIOFI）S.P.Morozova co-design a kind of possess high accuracy infrared measurement of temperature and emissivity measurement
Equipment, represents the forward position level of current infrared measurement of temperature.In order to the reflected radiation for eliminating surrounding enviroment is disturbed, equipment key component
Liquid nitrogen cooling has been carried out all with light path, light path and chamber are in vacuum environment.The equipment can be to being positioned over its measurement within the chamber
Optical mirror plane carry out thermometric, it is impossible to measure the mirror temperature under running status.
（4）The vacuum infrared temperature standard equipment that China National Measuring Science Research Inst. develops（VRTSF）, it was developed in 2015
Work(.Device interior adopts liquid nitrogen refrigerating and vacuum design, is built-in with Fourier's red-light spectrum instrument（BrukerVERTEX80V）.
VRTSF represents the forward position level of domestic infrared radiation measurement, but can only measure the mirror temperature for being positioned over its measurement intracavity, no
Meet the minute surface thermometric requirement under running status.
The low grade fever emissivity such as optical mirror plane, infrared band high reflectance body surface are always treated as in infrared measurement of temperature field
Blind area, not yet find to accurately measure the optical mirror plane of room temperature scope under running status the research of temperature on current open source literature
Report.
The content of the invention
Instant invention overcomes deficiency of the existing infrared temperature-test technology in optical mirror plane thermometric, there is provided a kind of certainty of measurement
High minute surface infrared temperature measurement apparatus；Based on the temperature measuring equipment, present invention also offers a kind of minute surface infrared measurement of temperature method.
In order to solve deficiency during traditional infrared temperature measuring equipment measurement mirror temperature, the present invention is by the following technical programs
Realize：
A kind of minute surface infrared temperature measurement apparatus, including detecting module, spherical concave and convex mirrors cover and for connecting detecting module and sphere is recessed
The connector of face lens cover；The inner surface of the spherical concave and convex mirrors cover is sphere, and its apex region back side is arranged and fixed with connector
The circular seat of connection；The center of the connector is with through hole corresponding with the probe shape of detecting module, the spy of detecting module
Head is stretched in the through hole of connector；The centrally disposed through hole corresponding with probe shape of the circular seat, and through hole extension
To spherical concave and convex mirrors cover inner surface, formed in spherical concave and convex mirrors cover and be open.
Preferably, the light incidence end of the probe is concordant with the opening at spherical concave and convex mirrors cover inner surface.
Preferably, the connector includes the connecting plate being fixedly connected with detecting module, positioned at connecting plate side and even
The connecting seat that fishplate bar one and axis are overlapped with through-bore axis on connecting plate.
Preferably, detecting module of the detecting module for refrigeration mode thermal infrared imager.
Preferably, the spherical concave and convex mirrors cover material is the metal material with high thermal conductivity coefficient, spherical concave and convex mirrors cover
Inner surface is coated with golden film.
Preferably, the outer surface of the spherical concave and convex mirrors cover is provided with the temperature control layer based on semiconductor temperature technology.
Preferably, the opening of the spherical concave and convex mirrors cover is positioned at lens cover summit and the center of focus.
Preferably, the circular seat and connector is using gluing connection, clamping or is spirally connected.
A kind of method of minute surface infrared measurement of temperature, carries out mirror temperature measurement using measurement apparatus as above；It is concrete to wrap
Include following steps：
Step 1, the sample mirror calibration of measurement apparatus
The upper surface of cylinder sample mirror and the optical mirror plane for treating thermometric be coated with film layer, the thickness of sample mirror is less than the 1/ of diameter
50, mirror material is high thermal conductivity metal；Sample mirror post side and bottom surface are provided with high accurately temperature control equipment, for controlling sample
Mirror temperature.Temperature control equipment has rational temperature control scope, and temperature control scope covers the range of temperature of optical mirror plane to be measured；
Before the calibration of sample mirror, the temperature control value of the temperature control of the spherical concave and convex mirrors cover and connector of measurement apparatus is T_s, and T_s can
With free setting, for the ease of temperature control, T_s may be configured as the operating ambient temperature average of optical mirror plane to be measured；Measurement apparatus
Between spherical concave and convex mirrors cover and sample mirror minute surface, distance is set to constant space H_s, on the premise of touchless minute surface risk is ensured, H_
S should be as little as possible, e.g., less than the 1/50 of lens cover opening surface diameter；
When sample mirror is calibrated, sample mirror temperature control value is adjusted with fixed temperature variation T and the corresponding calibration of detection device is recorded and is surveyed
Value；The detector of detection device is infrared focal plane array seeker, and the calibration measured value is that infrared focal plane array is visited
Survey the meansigma methodss of each pixel output valve of device；The calibration data storehouse based on sample mirror temperature and calibration measured value is set up, it is every in data base
Individual sample mirror temperature value T（i）One calibration measured value Y of correspondence（i）；
Step 2：Measurement apparatus survey optics of telescope minute surface
The tested region of optical mirror plane is chosen, near the mirror sections, spacing is H_s to the spherical concave and convex mirrors cover of measurement apparatus；Ball
The temperature control of face concave surface lens cover and connector is T_s；After spherical concave and convex mirrors cover and connector constant temperature, measurement apparatus start measurement
Mirror temperature, obtains measured value；According to measured value and calibration data storehouse, corresponding mirror temperature value T is obtained（i）；Measured value position
When between two calibration measured values of data base, corresponding temperature value is obtained using linear interpolation method.
Compared with prior art, the invention has the advantages that：
（1）The present invention can improve minute surface radiation collection ability during infrared measurement of temperature.As shown in fig. 6, except collect be emitted directly toward it is red
The minute surface radiation of external detector, is reflected by spherical concave and convex mirrors cover inner surface, can also collect the minute surface in a certain angle with normal
Radiation, as shown in Figure 7.The minute surface radiation collection ability of the present invention is much larger than traditional infrared temperature measuring equipment.Illustrate, the U.S.
It is a short focus thermal infrared imager movement that the F numbers of FLIR companies production are 1 photo640 movements, is that photo series movements are produced
One of most strong model of testee surface emissivity ability is collected in product.Calculate and show, the spherical concave and convex mirrors cover inner surface of device
Infrared band reflectance is that 95%, spherical concave and convex mirrors cover diameter is equal to photo640 in the corresponding tested region of minimum focusing distance
During long side, the minute surface radiation collection ability of the present invention is about 10.9 times of photo640.
（2）This invention removes the surrounding enviroment of minute surface periphery are disturbed in the reflected radiation of minute surface.Invention is recessed using sphere
Face lens cover presses close to the thermometric design of minute surface, can effectively shield environment heat radiation, it is ensured that ring is not received in the radiation that Infrared Detectorss are collected
Border radiation interference.During thermometric, the lens cover of device presses close to tested minute surface, and on the premise of touchless minute surface risk is ensured, H_s should use up
Possibility is little, e.g., less than the 1/50 of lens cover opening surface diameter.Most environment heat radiations are shielded in outside lens cover, minimum portion
The logical gap between lens cover and minute surface of time-sharing environment radiation enters lens cover, is absorbed by lens cover inner surface Jing after multiple reflections.
（3）The present invention has the ability of cancellation element itself heat radiation interference of stray light.Heat radiation in thermometric light path is miscellaneous
Astigmatism is mainly derived from spherical concave and convex mirrors cover inwall, and inwall heat radiation can directly or the tested minute surfaces of Jing are reflected into detector shadow
Ring temperature measurement accuracy.For weakening heat radiation veiling glare, spherical concave and convex mirrors cover inner wall surface is coated with high to infrared band radiant reflectance
Film layer, the thermal emissivity of the thermal emissivity of film layer much smaller than virgin metal lens cover inwall.Optical mirror plane is particularly reflective optic
The thermal emissivity for having the film layers such as gold, silver, aluminum, minute surface thermal emissivity and lens cover institute film plating layer minute surface can be more or less the same more, institute's plated film
Itself heat radiation of layer can not be ignored.In order to eliminate film layer itself heat radiation interference, using semiconductor temperature technology to lens cover outside
Surface carries out temperature control.By after temperature control, the temperature and temperature control value of inner surface film layer are of substantially equal and stablize constant for lens cover.The heat of film layer
Radiant intensity and spatial distribution are basicly stable.The heat radiation veiling glare that detector is collected is basicly stable constant, is a constant, receives
The minute surface radiation of collection then becomes with mirror temperature.One constant, a parameter, allow temperature measuring equipment of the present invention to be provided with the hot spoke of elimination
Penetrate the ability of interference of stray light.With reference to the minute surface thermometric calibrating method of the present invention, the heat radiation veiling glare of temperature measuring equipment can be eliminated
Impact to minute surface thermometric.
（4）The present invention is designed for the Temperature Scaling method of minute surface infrared measurement of temperature, it is ensured that minute surface infrared measurement of temperature precision.Due to quilt
The directional emissivity and black matrix for surveying minute surface have marked difference, except traditional blackbody calibration, the suitable minute surface thermometric of Project design
Sample mirror scaling method.Under spherical concave and convex mirrors cover constant temperature, equitemperature interval adjusts sample mirror temperature, sets up sample mirror temperature with corresponding calibration
The calibration data storehouse of measured value.During minute surface thermometric, according to actual measured value, corresponding mirror temperature is obtained from calibration data storehouse
Value.Sample mirror Temperature Scaling method can ensure that the minute surface infrared measurement of temperature precision of invention.
Description of the drawings
In order to be illustrated more clearly that the embodiment of the present invention or technical scheme of the prior art, below will be to embodiment or existing
Accompanying drawing to be used needed for having technology description is briefly described, it should be apparent that, drawings in the following description are only this
Some embodiments of invention, for those of ordinary skill in the art, without having to pay creative labor, may be used also
To obtain other accompanying drawings according to these accompanying drawings.
Fig. 1 is the structural representation of the present invention.
Structural representations of the Fig. 2 for connector.
Structural representations of the Fig. 3 for detecting module.
Structural representations of the Fig. 4 for spherical concave and convex mirrors cover, enlightenment omit hatching.
Fig. 5 is the schematic diagram of spherical concave and convex mirrors cover gold-plated film and temperature control layer.
Schematic diagram when Fig. 6 is present invention measurement, wherein illustrate only the minute surface radiation for being emitted directly toward detector.
Schematic diagram when Fig. 7 is present invention measurement, wherein illustrate only the minute surface radiation for being reflected into detector.
Specific embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete
Site preparation is described, it is clear that described embodiment is only a part of embodiment of the invention, rather than the embodiment of whole.It is based on
Embodiment in the present invention, it is every other that those of ordinary skill in the art are obtained under the premise of creative work is not paid
Embodiment, belongs to the scope of protection of the invention.
Minute surface infrared temperature measurement apparatus shown in Fig. 1-5, including detecting module 1, spherical concave and convex mirrors cover 2 and for connecting detection mould
The connector 3 of block 1 and spherical concave and convex mirrors cover 2；The inner surface of the spherical concave and convex mirrors cover 2 is sphere, and its apex region back side sets
Put the circular seat 6 being fixedly connected with connector 3；The center of the connector 3 is with corresponding to 7 shape of probe of detecting module 1
Through hole, the probe 7 of detecting module 1 stretched in the through hole of connector 3；The circular seat 6 is centrally disposed corresponding to 7 shapes of probe
Through hole, and the through hole extends to 2 inner surface of spherical concave and convex mirrors cover, is formed in spherical concave and convex mirrors cover 2 and is open.
The light incidence end 8 of the probe 7 is concordant with the opening at spherical concave and convex mirrors cover inner surface, the probe of detecting module 17
Outer wall and circular block hole between gap be less than 0.05 millimeter, prevent itself heat radiation of connector through-hole inner surface from entering
In the probe 7 of Infrared Detectorss, measurement interference is reduced, certainty of measurement is improved.
The connector 3 includes the connecting plate 4 being fixedly connected with detecting module 1, positioned at 4 side of connecting plate and connecting plate 4
The connecting seat 5 that one and axis are overlapped with through-bore axis on connecting plate 4；Counter sink is set on the connecting plate of the present embodiment, is passed through
Bolt is connected with detecting module；
Detecting module of the detecting module 1 for refrigeration mode thermal infrared imager.Refrigeration mode infrared radiation thermometer is a kind of ripe work
Industry product, the detecting module 1 deduct the remainder of optical imaging lens in referring to refrigeration mode infrared radiation thermometer, mainly by red
External detector, control circuit, imaging circuit, reading circuit, refrigeration machine etc. are constituted.
2 material of spherical concave and convex mirrors cover is the metal material with high thermal conductivity coefficient, the plating of 2 inner surface of spherical concave and convex mirrors cover
There is golden film 10.
The outer surface of the spherical concave and convex mirrors cover 2 is provided with the temperature control layer 9 based on semiconductor temperature technology.It is recessed according to sphere
Lens cover 2 overall dimensions in face customize semiconductor temperature layer.
The opening of the spherical concave and convex mirrors cover 2 is located at opening for the center of lens cover summit and focus, i.e. spherical concave and convex mirrors cover
Mouth face is approximately 1/2nd of focal length with the distance on summit.
The circular seat 6 and connector 3 adopt gluing connection, it is clear that can also be clamping or are spirally connected and wait the connection of routine
Mode.
Spherical concave and convex mirrors cover substitutes the imaging lens component of traditional infrared temperature measuring equipment, and Infrared Detectorss are not only collected directly
The minute surface radiation of directive detector, moreover it is possible to the reflected collection minute surface radiation in a certain angle with normal.The measurement dress of the present invention
The temperature space resolution for not considering tested mirror sections is put, using the aggregate capabilities of spherical concave and convex mirrors cover, is greatly improved
The minute surface radiation collection ability of temperature measuring equipment.
A kind of method of minute surface infrared measurement of temperature, carries out mirror temperature measurement using measurement apparatus as above；It is concrete to wrap
Include following steps：
Step 1, the sample mirror calibration of measurement apparatus
The upper surface of cylinder sample mirror and the optical mirror plane for treating thermometric be coated with film layer, the thickness of sample mirror is less than the 1/ of diameter
50, mirror material is high thermal conductivity metal；Sample mirror post side and bottom surface are provided with high accurately temperature control equipment, for controlling sample
Mirror temperature.Temperature control equipment has rational temperature control scope, and temperature control scope covers the range of temperature of optical mirror plane to be measured；
Before the calibration of sample mirror, the temperature control value of the temperature control of the spherical concave and convex mirrors cover 2 and connector 3 of measurement apparatus is T_s, T_s
Freely can arrange, for the ease of temperature control, T_s may be configured as the operating ambient temperature average of optical mirror plane to be measured；Measurement apparatus
Spherical concave and convex mirrors cover 2 and sample mirror minute surface between distance be set to constant space H_s, in the premise for ensureing touchless minute surface risk
Under, H_s should be as little as possible, e.g., less than the 1/50 of lens cover opening surface diameter；
When sample mirror is calibrated, sample mirror temperature control value is adjusted with fixed temperature variation T and the corresponding calibration of detection device is recorded and is surveyed
Value；The detector of detection device is infrared focal plane array seeker, and the calibration measured value is that infrared focal plane array is visited
Survey the meansigma methodss of each pixel output valve of device；The calibration data storehouse based on sample mirror temperature and calibration measured value is set up, it is every in data base
Individual sample mirror temperature value T（i）One calibration measured value Y of correspondence（i）；
Step 2：Measurement apparatus survey optics of telescope minute surface
The tested region of optical mirror plane is chosen, near the mirror sections, spacing is H_s to the spherical concave and convex mirrors cover 2 of measurement apparatus；Ball
The temperature control of face concave surface lens cover 2 and connector 3 is T_s；After 3 constant temperature of spherical concave and convex mirrors cover 2 and connector, measurement apparatus start
Measurement mirror temperature, obtains measured value；According to measured value and calibration data storehouse, corresponding mirror temperature value T is obtained（i）；Measurement
When value is between two calibration measured values of data base, corresponding temperature value is obtained using linear interpolation method.
Presently preferred embodiments of the present invention is the foregoing is only, not to limit the present invention, all essences in the present invention
Within god and principle, any modification, equivalent substitution and improvements made etc. should be included within the scope of the present invention.
Claims (9)
1. a kind of minute surface infrared temperature measurement apparatus, it is characterised in that：Including detecting module, spherical concave and convex mirrors cover and for connecting detection
The connector of module and spherical concave and convex mirrors cover；The inner surface of the spherical concave and convex mirrors cover is spherical reflective surface, its apex region back of the body
Face arranges the circular seat being fixedly connected with connector；The center of the connector is with corresponding with the probe shape of detecting module
Through hole, the probe of detecting module are stretched in the through hole of connector；The centrally disposed insertion corresponding with probe shape of the circular seat
Hole, and the through hole extends to spherical concave and convex mirrors cover inner surface, is formed in spherical concave and convex mirrors cover and is open.
2. minute surface infrared temperature measurement apparatus according to claim 1, it is characterised in that：The light incidence end of the probe and sphere
Opening at concave mirror cover inner surface is concordant.
3. minute surface infrared temperature measurement apparatus according to claim 1, it is characterised in that：The connector includes solid with detecting module
The connecting plate of fixed connection, positioned at the connection that connecting plate side is overlapped with through-bore axis on connecting plate with connecting plate one and axis
Seat.
4. minute surface infrared temperature measurement apparatus according to claim 1 or claim 2, it is characterised in that：The detecting module is that refrigeration mode is red
The detecting module of outer thermal imaging system.
5. minute surface infrared temperature measurement apparatus according to claim 1 or claim 2, it is characterised in that：The spherical concave and convex mirrors cover material is
Metal material with high thermal conductivity coefficient, the inner surface of spherical concave and convex mirrors cover are coated with golden film.
6. minute surface infrared temperature measurement apparatus according to claim 1 or claim 2, it is characterised in that：The outside of the spherical concave and convex mirrors cover
Surface is provided with the temperature control layer based on semiconductor temperature technology.
7. minute surface infrared temperature measurement apparatus according to claim 1 or claim 2, it is characterised in that：The opening of the spherical concave and convex mirrors cover
Positioned at lens cover summit and the center of focus.
8. minute surface infrared temperature measurement apparatus according to claim 1 or claim 2, it is characterised in that：The circular seat and connector are adopted
Gluing connection, clamping are spirally connected.
9. a kind of method of minute surface infrared measurement of temperature, it is characterised in that：Mirror temperature survey is carried out using the measurement apparatus of claim 1
Amount；Specifically include following steps：
Step 1, the sample mirror calibration of measurement apparatus
The upper surface of cylinder sample mirror and the optical mirror plane for treating thermometric be coated with film layer, the thickness of sample mirror is less than the 1/ of diameter
50, mirror material is high thermal conductivity metal；Sample mirror post side and bottom surface are provided with high accurately temperature control equipment, for controlling sample
Mirror temperature；
Temperature control equipment has rational temperature control scope, and temperature control scope covers the range of temperature of optical mirror plane to be measured；
Before the calibration of sample mirror, the temperature control value of the temperature control of the spherical concave and convex mirrors cover and connector of measurement apparatus is T_s, and T_s can
With free setting, for the ease of temperature control, T_s may be configured as the operating ambient temperature average of optical mirror plane to be measured；Measurement apparatus
Between spherical concave and convex mirrors cover and sample mirror minute surface, distance is set to constant space H_s, on the premise of touchless minute surface risk is ensured, H_
S should be as little as possible；
When sample mirror is calibrated, sample mirror temperature control value is adjusted with fixed temperature variation T and the corresponding calibration of detection device is recorded and is surveyed
Value；The detector of detection device is infrared focal plane array seeker, and the calibration measured value is that infrared focal plane array is visited
Survey the meansigma methodss of each pixel output valve of device；The calibration data storehouse based on sample mirror temperature and calibration measured value is set up, it is every in data base
Individual sample mirror temperature value T（i）One calibration measured value Y of correspondence（i）；
Step 2：Measurement apparatus survey optics of telescope minute surface
The tested region of optical mirror plane is chosen, near the mirror sections, spacing is H_s to the spherical concave and convex mirrors cover of measurement apparatus；Ball
The temperature control of face concave surface lens cover and connector is T_s；After spherical concave and convex mirrors cover and connector constant temperature, measurement apparatus start measurement
Mirror temperature, obtains measured value；According to measured value and calibration data storehouse, corresponding mirror temperature value T is obtained（i）；Measured value position
When between two calibration measured values of data base, corresponding temperature value is obtained using linear interpolation method.
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