CN106475272A - Possess the nozzle assembly of air-breathing chamber and utilize its slit type coater - Google Patents
Possess the nozzle assembly of air-breathing chamber and utilize its slit type coater Download PDFInfo
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- CN106475272A CN106475272A CN201610701870.0A CN201610701870A CN106475272A CN 106475272 A CN106475272 A CN 106475272A CN 201610701870 A CN201610701870 A CN 201610701870A CN 106475272 A CN106475272 A CN 106475272A
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- nozzle
- air
- main body
- lower edge
- jet
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
- B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
- B05C5/0254—Coating heads with slot-shaped outlet
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- Details Or Accessories Of Spraying Plant Or Apparatus (AREA)
- Nozzles (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Theoretical Computer Science (AREA)
- Coating Apparatus (AREA)
Abstract
The present invention, based on the nozzle assembly on substrate by medicinal liquid coating, provides a kind of nozzle assembly and using its coating machine it is characterised in that including：Nozzle body, is configured with first jet main body and second nozzle main body, and described second nozzle main body is corresponding with described first jet main body, and has been collectively forming nozzle flow path with described first jet main body；Spray nozzle part, including first jet and second nozzle, described first jet extends to bottom direction from the lower end of described first jet main body, and a part from described second nozzle main body lower end for the described second nozzle extends to bottom direction, and configuration corresponding with described first jet；And air-breathing chamber, configure in the front of described second nozzle, be connected with outside suction unit simultaneously, and in order to extract the medicinal liquid being placed between described substrate and described nozzle thus providing inspiratory force；At least a portion in described suction muffler chamber outer wall includes the lateral surface of described second nozzle.
Description
Technical field
The present invention relates to a kind of have the nozzle assembly of air-breathing chamber and utilize its coating machine, in detail, it is related to one
Plant the nozzle assembly possessing air-breathing chamber and utilize its slit type coater, this coating function improves the coating safety of medicinal liquid
Property, and can be with hoisting device earning rate.
Background technology
Flat board marker elements substrate manufacture operation includes the coating procedure on various liquid medicine paintings to real estate, this
Used in coating procedure, plater is mainly using the slit type coater (slit possessing gap nozzle (Slit nozzle)
coater).
While slit type coater is to be discharged medicinal liquid by gap nozzle, suitable with the lateral opposite side from substrate
Secondary movement is by liquid medicine painting to real estate.Now, in order to the nozzle segment preventing high price damages, to exceed specific interval
The distance between and maintain above substrate to nozzle, smeared with this state.
Now, if making the coat speeds of described slit type coater increase or carry out film coating, according to medicinal liquid
Viscosity, the coating magnetic bead (coating bead) of the medicinal liquid being applied on substrate elapses to the rightabout smearing direction, occurs
The different problem of the medicinal liquid thickness smeared.
As a result, in conventional slit type coater, due to limiting the coat speeds of slit type coater, thus there occurs
Slit type coater equips the problem that earning rate declines.
Content of the invention
(problem to be solved)
The problem to be solved in the present invention is, in order to, under medicinal liquid high speed coating or film coating situation, be applied by improving
Layer safety, is provided with to be coated with the nozzle assembly of the air-breathing chamber of the earning rate of hoisting device and using its slit
Machine.
(means of solve problem)
Described in order to solve the problems, such as, the present invention provides a kind of nozzle assembly, for by liquid medicine painting, in substrate, it is special
Levy and be, including：
Nozzle body, is configured with first jet main body and second nozzle main body, described second nozzle main body and described first
Nozzle body is corresponding, and has been collectively forming nozzle flow path with first jet main body；
Spray nozzle part, including first jet and second nozzle, described first jet from the lower end of described first jet main body to
Bottom direction extends, and a part from described second nozzle main body lower end for the described second nozzle extends to bottom direction, and with
Described first jet is corresponding and configures；And
Air-breathing chamber, configuration, in the front of described second nozzle, is connected with outside suction unit simultaneously, and in order to incite somebody to action
The medicinal liquid being placed between described substrate and described spray nozzle part extracts thus providing inspiratory force,
At least a portion in described suction muffler chamber outer wall includes the lateral surface of described second nozzle；
If according to other embodiments of the present invention, the slit type coater providing is it is characterised in that include：
Workbench, places the substrate that will use liquid medicine painting；
Nozzle assembly, for by liquid medicine painting on the substrate；
Nozzle chuck, supports described nozzle assembly；
Nozzle mobile unit, described nozzle assembly is moved and makes liquid medicine painting in described substrate；And
First blade, for after liquid medicine painting is to described substrate, by the foreign substances of contamination on described first jet surface
Remove, and
Second blade, for the foreign substances of contamination on described second nozzle surface are removed, and
Nozzle cleaner, has the purifier main body in order to support described first blade and described second blade.
Brief description
Fig. 1 is the axonometric chart of slit type coater according to an embodiment of the invention.
Fig. 2 is the axonometric chart of the nozzle assembly of Fig. 1 slit type coater.
Fig. 3 is the sectional view of the coating state according to Fig. 2 nozzle assembly.
Fig. 4 is the axonometric chart of the lower area by nozzle cleaner configuration in Fig. 2 nozzle assembly.
Fig. 5 is the accompanying drawing of configuration nozzle cleaner and nozzle assembly relation in state before the nozzle cleaner cleaning of Fig. 4.
Fig. 6 is state configuration nozzle cleaner and the nozzle assembly relation after the nozzle cleaner washer jet of Fig. 4
Accompanying drawing.
Fig. 7 is the axonometric chart of Fig. 2 nozzle assembly bottom surface.
Specific implementation method
Hereinafter, the preferred embodiment of the invention accompanying drawing with reference to the problem described to be solved implementing illustrates.
Based on the explanation to the present embodiment, constitute the same name using and same symbol for same, omit attached according to it herein
Plus explanation.
If with reference to Fig. 1, slit type coater according to an embodiment of the invention includes workbench 100, nozzle sets
Part 200, nozzle mobile unit 300, air chamber 800, nozzle cleaner 400, depurator mobile unit 500, depurator cleaning unit
600th, scraper bowl unit 700 and nozzle clamp 900.
The substrate of liquid medicine painting is placed on described workbench 100, described nozzle assembly 200 is by above described substrate
While partly movement, by described liquid medicine painting on the substrate.
Described nozzle mobile unit 300 is arranged on the both sides of described nozzle clamp 900, and so that described nozzle assembly 200 is moved
Dynamic.
Described nozzle cleaner 400 is used for removing contamination in the medicinal liquid of described nozzle, the knife of described nozzle cleaner 400
Piece is to wipe described medicinal liquid off in the state of the surface with described nozzle contacts.
Specifically, if with reference to Fig. 3, Fig. 5 and Fig. 6, described nozzle cleaner 400 includes：First blade 420, its work
With being in liquid medicine painting after described substrate 10, foreign substances on first jet 230 surface for the contamination are removed；And second blade
430, its effect is to remove the foreign substances of contamination on second nozzle 240 surface；And the 3rd blade 440, its effect is will be described
On the nozzle of the terminal part of first jet 230 and described second nozzle 240, the foreign substances of contamination remove；And purifier main body 410,
Its effect is to support described first blade 420 and described second blade 430 and described 3rd blade 440.
Described depurator mobile unit 500 is the length side making described nozzle cleaner 400 along described nozzle assembly 200
To and move.That is, in the case of maintaining resting state, described depurator mobile unit 500 is passed through will for described nozzle assembly 200
Described nozzle cleaner 400 is mobile so that the medicinal liquid being infected with described nozzle is removed by described nozzle cleaner 400.
Described depurator cleaning unit 600 is arranged on the one end of described depurator mobile unit 500, and cleans in institute
The described nozzle cleaner 400 using during stating the medicinal liquid removal of nozzle.
And, at least a portion configuration of described scraper bowl unit 700 is clear in described nozzle cleaner 400 and described depurator
Wash the bottom of unit 600.
Described air chamber 800 is the place housing before nozzle using described nozzle assembly, when not using described nozzle, is
Prevent the liquid medicine jet dry mouth of described nozzle, so often there is cleanout fluid in described air chamber 800.
In addition, if with reference to Fig. 2 and Fig. 3, described nozzle assembly 200 includes：Nozzle body, and spray nozzle part, in described spray
Extend in the lower area of mouth main body and formed, and air-breathing chamber 270, in order to will be configured at described substrate 10 and described spray nozzle part it
Between medicinal liquid lead and inspiratory force is provided.
Specifically, described nozzle body includes：First jet main body 210, and second nozzle main body 220, second nozzle
Main body 220 is corresponding with described first jet main body 210 and arrange, and together with described first jet main body 210 formed spray
Mouth stream 280.
Described spray nozzle part, including：First jet 230, described first jet 230 is from described first jet main body 210
Hold and extend to bottom direction；And second nozzle 240, described second nozzle 240 is from the lower end of described second nozzle main body 220 one
Point extend to bottom direction, and corresponding with described first jet 230 and while configure, be formed with the medicinal liquid discharging medicinal liquid
Outlet (not shown).Herein, described medical liquid discharge port is constituted by groove or for shape of slit.
Described air-breathing chamber 270 configures while the front of described second nozzle 240, with outside suction unit (not
Diagram) connect, in order to the medicinal liquid lead that will configure between described substrate 10 and described spray nozzle part is thus provide inspiratory force.
The lateral surface of described second nozzle 240 is included at least partially in the outer wall of described air-breathing chamber 270.
Specifically, described air-breathing chamber 270 includes：Above described substrate 10 relative to have the first of patent part
Air-breathing chamber 271, and the second air-breathing chamber 273 of formation is buried on the lateral wall of described second nozzle main body 220, and in institute
State being internally formed of second nozzle main body 220, and described first air-breathing chamber 217 and described second air-breathing chamber 273 are connected
The air-breathing stream 272 connecing.
In the upper inside wall of described first air-breathing chamber 271, form the connecting with the side of described air-breathing stream 272
One air-breathing groove 271a, on the inwall of described second air-breathing chamber 273, is formed and is connected with the opposite side of described air-breathing stream 272
The second air-breathing groove 273a.
Described first air-breathing groove 271a and described second air-breathing groove 273a, along the length direction of described nozzle body, with
Certain intervals are formed with multiple grooves, and introduce the inspiratory force of described medicinal liquid, can be along the length direction of described nozzle body
Stable.
Herein, the height of described first air-breathing chamber 271 is equal with the height of described nozzle and is formed, described nozzle
Portion, i.e. described second nozzle 240 becomes a part for the outer wall of the first air-breathing chamber 271.
The outer wall of described first air-breathing chamber 271 include to the bottom direction of described second nozzle main body 220 prominent
Two nozzle body lower edge 221.Herein, the prominent length at described second nozzle lower body part edge 221 and described spray nozzle part
Height identical.
Certainly, the invention is not limited in this, the prominent length at described second nozzle lower body part edge 221 also can be formed
It is bigger than the height of described nozzle or little.
As a result, described air-breathing chamber 270 is arranged on the front in the direction that medicinal liquid 1 is smeared, by the coating magnetic bead 1a of medicinal liquid
Forwards drag, and smear safety when medicinal liquid 1 high speed is smeared or smeared with thin film it is also possible to improve.
Thus, improve to smear and uniform coating thickness can also be smeared while speed, and improve the same of product quality
The earning rate of Shi Zengjia equipment is thus improve productivity.Particularly, even in coating starting point, the coating magnetic bead 1a of medicinal liquid also to
Front is dragged, and is stablized and significantly reduced by the thickness of this coating the fraction defective of coating starting point.
In addition, the described nozzle assembly with reference to Fig. 2 to Fig. 7 is described as follows, herein, Fig. 4 is to join nozzle cleaner
Put the accompanying drawing of the lower area state of nozzle assembly in Fig. 2, Fig. 5 is the shape before washer jet for the nozzle cleaner of Fig. 4
The accompanying drawing of nozzle cleaner and nozzle assembly configuration relation in state, Fig. 6 is the shape after washer jet for the nozzle cleaner of Fig. 4
The accompanying drawing of nozzle cleaner and nozzle assembly configuration relation in state, Fig. 7 is the bottom isometric view of the nozzle assembly of Fig. 2.
Described nozzle assembly 200 configures in the both sides of described nozzle body, and includes forming described air-breathing chamber 270
The first side wall block 250 of a part and second sidewall block 260 in outer wall.
Described the first side wall block 250 includes the first side wall block main body 250a, and to described the first side wall block main body 250a
The first side wall block lower edge 250b that bottom direction projects.
Described the first side wall block lower edge 250b, including：First lower edge 251, the first lower edge 251 with described
Second nozzle lower body part edge 221 is adjacent and arrange along lower edge 221 length direction；And second lower edge 252, second
Lower edge 252 and described spray nozzle part are adjacent and arrange along spray nozzle part degree direction, and the 3rd lower edge 253, the 3rd lower edge
Edge 253 connects described first lower edge 251 and described second lower edge 252 and in the first lower edge 251 and described
Extend between two lower edge 252.
Therefore, described the first side wall block lower edge 250b is dashed forward to the bottom direction of described the first side wall block main body 250a
Go out, and form the part in the space of described first air-breathing chamber 271.
Identical, described second sidewall block 260 includes：Second sidewall block main body 261, and to described second sidewall block main body
The second sidewall block lower edge 263 that 261 bottom direction projects.
Described second sidewall block lower edge 263 is identical with above-mentioned the first side wall block lower edge 250b reality, related
Describe in detail and omit.
Described the first side wall block 250 and described the first side wall block 260 are according to the others method of attachment of described nozzle body
To combine.Certainly, the invention is not limited in this, described the first side wall block 250 and described second sidewall block 260 can with described
Nozzle body forms one.
As a result, the outer wall of described first air-breathing chamber 271 is based on described second nozzle lower body part edge 221 and institute
State the first side wall block lower edge 250b and the outside of described second sidewall block lower edge 263 and described second nozzle 240
Face and formed.
In addition, as shown in Fig. 5 (b), for the I-I section of Fig. 5 (a), if started on the left of accompanying drawing the side view seen
See nozzle cleaner 400 and nozzle assembly 200 together, described first air-breathing chamber 271 has the form of lower open, described spray
In cleaning, at least a portion of described second blade 430 configures in described first air-breathing chamber 271 mouth depurator 400
Inner space on.
And although possessing the outer wall in order to the first air-breathing chamber 271 is formed on nozzle body according to the present invention, make
A part in outer wall is made up of the lateral surface of nozzle, and described first air-breathing chamber 271 is in described nozzle cleaner 400
When cleaning starts, a part for described nozzle cleaner 400, as the space role housing, makes the same of space degree of applying flexibly raising
When, so that the weight of nozzle assembly itself is minimized.
And, described nozzle cleaner 400 is with the cleaning operation of related described nozzle for the state terminating, i.e. such as Fig. 6
Shown in (b), for II-II section of Fig. 6 (a), if starting to see nozzle cleaner together the side view seen on the right side of accompanying drawing
400 and nozzle assembly 200, described second lower edge 252 is in order to avoid described first blade 420 and described second blade 430
To the interference during cleaning operation of described spray nozzle part, start adjacent along its length from the flanking central of described spray nozzle part and join
Put, so that the second lower edge 252 has the width narrower than described spray nozzle part.
In order to form described first air-breathing chamber 271 outer wall, the width of the second lower edge is formed at than described nozzle
The little width of the width in portion, to avoid when terminating the cleaning operation with regard to described spray nozzle part by simple construction, by described
The interference that first blade 420 and described second blade 430 bring.
And, described second lower edge 252 is in order to avoid terminating with regard to described spray nozzle part with described 3rd blade 440
Cleaning operation when between interference, prominent length is shorter than the length that described spray nozzle part projects.
As a result, described second lower edge 252 has the width narrower than spray nozzle part simultaneously as prominent ratio spray nozzle part
Prominent length is narrow, so the nozzle assembly with the first air-breathing chamber 271 that is adjacent with described spray nozzle part and being formed, and described spray
Do not interfere between mouth depurator 400.
There is the air-breathing chamber nozzle assembly according to the present invention and had the effect that using its slit type coater.
First, by air-breathing chamber being arranged on the front in medicinal liquid coating direction, before the coating magnetic bead of medicinal liquid is just pulled to
Side, even if thus smeared with medicinal liquid high speed or thin film is smeared, it may have the advantage that can improve safety.
Thus, improve while coat speeds it is also possible to smear uniform coating thickness, while improving product quality,
There is increase equipment earning rate and improve productive advantage.Especially since from the starting point of coating by coating magnetic bead forward
Fang La, makes coating layer thickness stable, and has the advantages that the fraction defective substantially reducing coating starting point.
Second although possess the outer wall in order to form the first air-breathing chamber in nozzle body, the part in outer wall is by spraying
The lateral surface of mouth is constituted, described first air-breathing chamber when the cleaning of nozzle cleaner operates, a part for nozzle cleaner
Play the role of receiving space, have the advantages that to improve while the degree of applying flexibly of space by the weight minimum of nozzle assembly itself.
3rd, in order to form the outer wall of the first air-breathing chamber in air-breathing chamber, configuration nozzle body a side the
In one side wall block, it is formed with the first side wall block lower edge to bottom is prominent, in described the first side wall block lower edge, from spray
The second lower edge that the side of mouth is adjacent to length direction and configures, the width of spray nozzle part described in its width ratio is little, described
First blade and described second blade, when terminating the cleaning operation with regard to described spray nozzle part, have and can simply avoid its interference
Advantage.
As above told, the present invention is not limited to specific preferred embodiment as described above, required without departing from claim
Idea of the invention, the people possessing general knowledge according to belonging in invention in technical scope can implement various deformation and this
Deformation belongs in the scope of the invention.
Claims (10)
1. a kind of nozzle assembly, for by liquid medicine painting on substrate it is characterised in that include：
Nozzle body, is configured with first jet main body and second nozzle main body, described second nozzle main body and described first jet
The corresponding configuration of main body, and it has been collectively forming nozzle flow path with described first jet main body；
Spray nozzle part, including first jet and second nozzle, described first jet is from the lower end of described first jet main body to bottom
Direction extend, a part from described second nozzle main body lower end for the described second nozzle to bottom direction extend, and with described
The corresponding configuration of first jet；And
Air-breathing chamber, configuration, in the front of described second nozzle, is connected with outside suction unit simultaneously, and in order to place
Medicinal liquid between described substrate and described spray nozzle part extracts thus providing inspiratory force；
At least a portion in the outer wall of described air-breathing chamber includes the lateral surface of described second nozzle.
2. nozzle assembly according to claim 1 is it is characterised in that described air-breathing chamber includes：
First air-breathing chamber, has the patent part towards described thereon,
Second air-breathing chamber, on the lateral wall of described second nozzle main body, depression is formed, and
Air-breathing stream, is formed at the inside of described second nozzle main body, and described first air-breathing chamber and described second are inhaled
Gas chamber connects.
3. nozzle assembly according to claim 2 it is characterised in that
The the first air-breathing groove being connected with the side of described air-breathing stream is formed on the inwall of described first air-breathing chamber；Described
The the second air-breathing groove being connected with the opposite side of described air-breathing stream is formed on the inwall of the second air-breathing chamber；Along described nozzle
The length direction of main body, is formed with multiple described first air-breathing grooves and described second air-breathing groove at certain intervals.
4. nozzle assembly according to claim 2 is it is characterised in that also include：
The first side wall block and second sidewall block, configuration in the both sides of described nozzle body and with described suction muffler chamber outer wall in
A part forms one,
Described the first side wall block, including the first side wall block main body and to the bottom direction of described the first side wall block main body prominent
One side wall block lower edge；Described second sidewall block, including second sidewall block main body with described second sidewall block main body
The second sidewall block lower edge that portion direction projects.
5. nozzle assembly according to claim 4 is it is characterised in that the outer wall of described first air-breathing chamber includes：
The second nozzle lower body part edge prominent to the bottom direction of described second nozzle main body；
Described the first side wall block lower edge；
Described second sidewall block lower edge；And
The lateral surface of described second nozzle.
6. nozzle assembly according to claim 5 is it is characterised in that described the first side wall block lower edge includes：
First lower edge, it is adjacent with described second nozzle lower body part edge and configures along its length；
Second lower edge, its adjacent with described second nozzle and along described second nozzle length direction configuration；And
3rd lower edge, described first lower edge and described second lower edge are connected and extend under described first by it
Between portion edge and described second lower edge.
7. a kind of coating machine is it is characterised in that include：
Workbench, places the substrate that will use liquid medicine painting；
The nozzle assembly on the substrate by liquid medicine painting according to any one in claim 1 to 6；
Nozzle chuck, supports described nozzle assembly；
Nozzle mobile unit, makes liquid medicine painting on the substrate and mobile described nozzle assembly；And include：
First blade, for, after liquid medicine painting is to described substrate, the foreign substances of contamination on described first jet surface being removed,
Second blade, for the foreign substances of contamination on described second nozzle surface are removed, and
Nozzle cleaner, has the purifier main body in order to support described first blade and described second blade.
8. coating machine according to claim 7 it is characterised in that
In the cleaning operation of described nozzle cleaner, at least a portion of described second blade configures in described air-breathing chamber
The inner space of the first air-breathing chamber on.
9. coating machine according to claim 7 it is characterised in that
The first side wall block lower edge on the first side wall block of a side being configured at nozzle body to bottom is prominent and shape
Become the outer wall of described first air-breathing chamber, and second in the first side wall block lower edge described in the width ratio of described spray nozzle part
The narrow width of lower edge, to avoid described first blade and described second blade terminating the cleaning with regard to described spray nozzle part
Interference during operation.
10. coating machine according to claim 9 it is characterised in that
Described nozzle cleaner also includes remove foreign substances on the spray nozzle part belonging to described nozzle end portion for the contamination the
Three blades,
For avoiding the interference with described 3rd blade, the prominent length of described second lower edge is more prominent than described spray nozzle part
Length is short.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR10-2015-0120999 | 2015-08-27 | ||
| KR1020150120999A KR101666865B1 (en) | 2015-08-27 | 2015-08-27 | Nozzzle assembly including suction chamber and Slit coater using the same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106475272A true CN106475272A (en) | 2017-03-08 |
| CN106475272B CN106475272B (en) | 2019-05-07 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610701870.0A Active CN106475272B (en) | 2015-08-27 | 2016-08-22 | Have the nozzle assembly of air-breathing chamber and the slit type coater using it |
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| Country | Link |
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| KR (1) | KR101666865B1 (en) |
| CN (1) | CN106475272B (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101990704B1 (en) | 2017-11-24 | 2019-06-18 | 고려대학교 산학협력단 | Slot coating equipment with improved coating bead region |
| EP3560427A1 (en) * | 2018-04-24 | 2019-10-30 | Gecko Biomedical | Applicator for depositing a layer of adhesive or sealant composition on a biological and/or prosthetic tissue |
| KR102232036B1 (en) * | 2019-08-27 | 2021-03-25 | 세메스 주식회사 | Apparatus for discharging chemical |
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| US20060204663A1 (en) * | 2005-03-11 | 2006-09-14 | Fuji Photo Film Co., Ltd. | Method, and apparatus for producing recording sheet |
| JP2009106867A (en) * | 2007-10-30 | 2009-05-21 | Clean Technology Kk | Thin film coating machine |
| CN102029242A (en) * | 2009-09-28 | 2011-04-27 | 松下电器产业株式会社 | Die head and liquid coater |
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| JPH10188962A (en) * | 1996-12-27 | 1998-07-21 | Fuji Film Selltec Kk | Manufacture of sheetlike plate and nonaqueous electrolyte battery |
| JP2006167508A (en) * | 2004-12-13 | 2006-06-29 | Toray Ind Inc | Method and device for cleaning die for coating application and method and apparatus for manufacturing member for display |
| KR100867893B1 (en) | 2007-08-10 | 2008-11-10 | 주식회사 디엠에스 | Slit nozzle and coating apparatus having the same |
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2015
- 2015-08-27 KR KR1020150120999A patent/KR101666865B1/en active IP Right Grant
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- 2016-08-22 CN CN201610701870.0A patent/CN106475272B/en active Active
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|---|---|---|---|---|
| CN1147217A (en) * | 1994-04-29 | 1997-04-09 | 美国3M公司 | Multiple layer and slide die coating method and apparatus |
| US20060204663A1 (en) * | 2005-03-11 | 2006-09-14 | Fuji Photo Film Co., Ltd. | Method, and apparatus for producing recording sheet |
| JP2009106867A (en) * | 2007-10-30 | 2009-05-21 | Clean Technology Kk | Thin film coating machine |
| US20120032157A1 (en) * | 2009-06-18 | 2012-02-09 | Konica Minolta Holdings, Inc. | Coating method, and organic electroluminescence element |
| CN102029242A (en) * | 2009-09-28 | 2011-04-27 | 松下电器产业株式会社 | Die head and liquid coater |
| CN102343321A (en) * | 2010-08-03 | 2012-02-08 | 三星Sdi株式会社 | Vacuum chamber system of coating apparatus and coating method using the same |
| CN102674702A (en) * | 2011-03-07 | 2012-09-19 | 东丽工程株式会社 | Cleaning component, cleaning method of coater, cleaning device and manufacture method of component for display |
Also Published As
| Publication number | Publication date |
|---|---|
| KR101666865B1 (en) | 2016-10-18 |
| CN106475272B (en) | 2019-05-07 |
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