CN106449494A - 晶圆专用储存架 - Google Patents

晶圆专用储存架 Download PDF

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Publication number
CN106449494A
CN106449494A CN201610877792.XA CN201610877792A CN106449494A CN 106449494 A CN106449494 A CN 106449494A CN 201610877792 A CN201610877792 A CN 201610877792A CN 106449494 A CN106449494 A CN 106449494A
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Prior art keywords
wafer
storage frame
carriage
cross member
head piece
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CN201610877792.XA
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English (en)
Inventor
吕耀安
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WUXI HI-NANO TECHNOLOGY Co Ltd
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WUXI HI-NANO TECHNOLOGY Co Ltd
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Priority to CN201610877792.XA priority Critical patent/CN106449494A/zh
Publication of CN106449494A publication Critical patent/CN106449494A/zh
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

本发明涉及一种晶圆专用储存架，包括顶横梁、底横梁及安装于所述顶横梁与底横梁之间的多个支撑框，所述支撑框间隔布置于顶横梁与底横梁之间，支撑框的上下两端均设有转轴，借助所述转轴与顶横梁及底横梁转动连接，支撑框上设有贯通的、可容晶圆置入的安放槽，所述安放槽的上下两端具有软垫。本发明中，间隔设置的支撑框，晶圆的安放操作简单，支撑框可调节角度，方便储存架根据需要置入包装箱中，使用方便。

Description

晶圆专用储存架
技术领域
本发明涉及集成电路技术领域，特别涉及晶圆的储存装置。
背景技术
现有的晶圆一般集装于储存箱中，由于放置不合理，晶圆之间会相互接触，还存在碰撞箱内壁的状况，从而存在一定的破损率。
发明内容
针对现有晶圆储存装置存在的上述问题，申请人进行研究及改进，提供一种晶圆专用储存架，晶圆放置于可一定角度范围内转动的支撑框中，避免晶圆碰撞，调节安放角度，方便储运。
为了解决上述问题，本发明采用如下方案：
一种晶圆专用储存架，包括顶横梁、底横梁及安装于所述顶横梁与底横梁之间的多个支撑框，所述支撑框间隔布置于顶横梁与底横梁之间，支撑框的上下两端均设有转轴，借助所述转轴与顶横梁及底横梁转动连接，支撑框上设有贯通的、可容晶圆置入的安放槽，所述安放槽的上下两端具有软垫。
本发明的技术效果在于：
本发明中，间隔设置的支撑框，晶圆的安放操作简单，支撑框可调节角度，方便储存架根据需要置入包装箱中，使用方便。
附图说明
图1为本发明的结构示意图。
图中：1、顶横梁；2、底横梁；3、支撑框；4、转轴；5、安放槽；6、软垫。
具体实施方式
下面结合附图对本发明的具体实施方式作进一步说明。
如图1所示，本实施例的晶圆专用储存架，包括顶横梁1、底横梁2及安装于顶横梁1与底横梁2之间的多个支撑框3，支撑框3间隔布置于顶横梁1与底横梁2之间，支撑框3的上下两端均设有转轴4，借助转轴4与顶横梁1及底横梁2转动连接，支撑框3上设有贯通的、可容晶圆置入的安放槽5，安放槽5的上下两端具有软垫6。使用时，将晶圆直接卡入安放槽5中，由于软垫6的设置，可防止晶圆脱离。晶圆放入后，可适当转动支撑框3的角度，以将其置入包装箱中。
本发明中，间隔设置的支撑框，晶圆的安放操作简单，支撑框可调节角度，方便储存架根据需要置入包装箱中，使用方便。
以上所举实施例为本发明的较佳实施方式，仅用来方便说明本发明，并非对本发明作任何形式上的限制，任何所属技术领域中具有通常知识者，若在不脱离本发明所提技术特征的范围内，利用本发明所揭示技术内容所作出局部改动或修饰的等效实施例，并且未脱离本发明的技术特征内容，均仍属于本发明技术特征的范围内。

Claims (1)

1.一种晶圆专用储存架，其特征在于：包括顶横梁(1)、底横梁(2)及安装于所述顶横梁(1)与底横梁(2)之间的多个支撑框(3)，所述支撑框(3)间隔布置于顶横梁(1)与底横梁(2)之间，支撑框(3)的上下两端均设有转轴(4)，借助所述转轴(4)与顶横梁(1)及底横梁(2)转动连接，支撑框(3)上设有贯通的、可容晶圆置入的安放槽(5)，所述安放槽(5)的上下两端具有软垫(6)。
CN201610877792.XA 2016-10-08 2016-10-08 晶圆专用储存架 Withdrawn CN106449494A (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201610877792.XA CN106449494A (zh) 2016-10-08 2016-10-08 晶圆专用储存架

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201610877792.XA CN106449494A (zh) 2016-10-08 2016-10-08 晶圆专用储存架

Publications (1)

Publication Number Publication Date
CN106449494A true CN106449494A (zh) 2017-02-22

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CN201610877792.XA Withdrawn CN106449494A (zh) 2016-10-08 2016-10-08 晶圆专用储存架

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5011041A (en) * 1988-09-14 1991-04-30 Kakizaki Mfg. Co., Ltd. Basket for processing thin plates
WO1998008754A1 (en) * 1996-08-29 1998-03-05 Scp Global Technologies, A Division Of Preco, Inc. Compliant process cassette
US6089377A (en) * 1996-08-26 2000-07-18 Nec Corporation Semiconductor wafer carrier
CN202503018U (zh) * 2012-03-02 2012-10-24 江苏泰氟隆科技有限公司 一种带有减震垫的太阳能硅片承载器
CN203690269U (zh) * 2014-01-17 2014-07-02 中芯国际集成电路制造(北京)有限公司 一种晶舟结构

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5011041A (en) * 1988-09-14 1991-04-30 Kakizaki Mfg. Co., Ltd. Basket for processing thin plates
US6089377A (en) * 1996-08-26 2000-07-18 Nec Corporation Semiconductor wafer carrier
WO1998008754A1 (en) * 1996-08-29 1998-03-05 Scp Global Technologies, A Division Of Preco, Inc. Compliant process cassette
CN202503018U (zh) * 2012-03-02 2012-10-24 江苏泰氟隆科技有限公司 一种带有减震垫的太阳能硅片承载器
CN203690269U (zh) * 2014-01-17 2014-07-02 中芯国际集成电路制造(北京)有限公司 一种晶舟结构

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Application publication date: 20170222