CN106441574A - Minisize broadband spectrum spectrometer - Google Patents
Minisize broadband spectrum spectrometer Download PDFInfo
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- CN106441574A CN106441574A CN201610820759.3A CN201610820759A CN106441574A CN 106441574 A CN106441574 A CN 106441574A CN 201610820759 A CN201610820759 A CN 201610820759A CN 106441574 A CN106441574 A CN 106441574A
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- 230000011514 reflex Effects 0.000 claims description 8
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- 230000004044 response Effects 0.000 description 12
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- 238000012360 testing method Methods 0.000 description 8
- 238000005516 engineering process Methods 0.000 description 6
- 230000009102 absorption Effects 0.000 description 5
- 238000010521 absorption reaction Methods 0.000 description 5
- 230000008859 change Effects 0.000 description 5
- 230000003595 spectral effect Effects 0.000 description 5
- 238000010183 spectrum analysis Methods 0.000 description 5
- 238000009792 diffusion process Methods 0.000 description 3
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- 241000638935 Senecio crassissimus Species 0.000 description 1
- 238000000862 absorption spectrum Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
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- 238000007796 conventional method Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
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Abstract
The invention discloses a minisize broadband spectrum spectrometer including a light source, a plurality of tunable acousto-optic light filters, a first MEMS micromirror assembly, a first reflector assembly, a second reflector assembly, and a second MEMS micromirror assembly. The work light emitted by the light source successively enters into the plurality of tunable acousto-optic light filters after being reflected by the first MEMS micromirror assembly and the first reflector assembly, and the work light after being filtered by the tunable acousto-optic light filters is incident to the substance to be detected after being reflected by the second reflector assembly and the second MEMS micromirror assembly.
Description
Technical field
The present invention relates to a kind of miniature wide spectrum spectrometer.
Background technology
Spectral analysis technique utilizes the distinctive absorption of different material or luminescent spectrum, to realize the identification of material.Spectrum
Technology is due to being using optical detection mode, it is possible to achieve quick, online, Non-Destructive Testing, in identification, medical treatment and fire-fighting
In field, there is extensive utilization.
As the equipment of application spectral analysis technique, absorption-type spectroscopy instrument mainly comprises light source, beam splitter and detection
The elements such as element.Wherein light source produces the testing light source comprising test substance characteristic absorption peak wave band, in general mainly includes
Halogen white light LEDs, LED, tunable laser etc..Beam splitter mainly utilizes the technology such as interference or diffraction, by light wide in light source
The light of spectrum is selected by fixed frequency and is exported, and so can realize spectral absorption scanning.Detecting element mainly uses light electrical resistivity survey
Survey device and light intensity signal is changed into electric signal, then using filter circuit and signal processing circuit, detection signal is extracted
Come.
Mainly different according to light-dividing principle at present, absorption-type spectroscopy instrument can be divided into filter plate type, diffraction grating type, Fu
Vertical leaf transformation type, FP（Fabry-Perot）Interfere lumen type and acousto-optic turnable filter type.
Using Acousto-optic tunable filter（AOTF）Acousto-optic tunable type spectrometer compared with other spectrometers, there is pole
High light splitting precision（Within 1nm）, wider scanning optical spectrum scope（More than 300nm）And ultrafast spectral scan speed
（16000 wavelength points are per second）.Acousto-optic tunable filter principle is different with other light-dividing principles.Acousto-optic filter is to utilize RF
（Radio frequency）Circuit is input to PZT (piezoelectric transducer) so as to concussion produces sound wave.Sound wave transmits the dilatational wave producing material in crystal,
Form the different Bragg grating of dielectric constant, thus having the light splitting effect of grating.Frequency by control input RF signal
Realize controlling frequency of sound wave in crystal, to control the constant of Bragg grating, finally to realize thang-kng frequency tuning.Using RF signal
Tuned frequency is controlled not need frame for movement and large-scale optical device so that spectrometer is more easy to integrated, tuned speed more
Hurry up, install simpler.
The scanning optical spectrum frequency range of traditional acousto-optic tunable type spectrometer is limited by the tuning frequency range of acousto-optic crsytal, in response to belt
Width narrower it is difficult to widen response range.It is different because of the difference between product to be additionally, since explorer response curve, does not share the same light
Spectrometer needs to carry out calibration debugging before use, needs extra equipment to be calibrated in therefore using.Additionally, traditional acousto-optic can
The systematic comparison of tuning mode filter is complicated, the device comprising more it is difficult to realize integrated, miniaturization.
Content of the invention
An object of the present invention is to provide a kind of miniature wide spectrum light being capable of light splitting in the range of broader spectrum
Spectrometer.
An object of the present invention is to provide one kind can carry out self-alignment miniature wide spectrum spectrometer.
In some embodiments of the present invention, there is provided a kind of miniature wide spectrum spectrometer, including：Light source, first is tunable
Acousto-optic filter, the second Acousto-optic tunable filter, photodetector and：First MEMS micromirror assembly, a described MEMS
The light path of the working light that micromirror assemblies can send with respect to light source rotates to first angle and second angle；First speculum
Assembly, described first mirror assembly becomes third angle and fourth angle with respect to described light path；Second mirror assembly, described
Second mirror assembly becomes the 5th angle and hexagonal degree with respect to described light path；With the second MEMS micromirror assembly, described second
MEMS micromirror assembly can rotate to heptangle degree and eighth angle with respect to described light path；Wherein：When a described MEMS is micro-
Mirror assembly is in described first angle, described first mirror assembly is in described third angle, described second mirror assembly
It is in described 5th angle and when described second MEMS micromirror assembly is in described heptangle and spends, the work that described light source sends
Light is incided the described first adjustable pictophonetic characters after the reflection of described first MEMS micromirror assembly and described first mirror assembly
Optical filter, and by described second mirror assembly and described second after described first Acousto-optic tunable filter projects
Material to be detected is incided after the reflection of MEMS micromirror assembly；When described first MEMS micromirror assembly is in described second angle, institute
State that the first mirror assembly is in described fourth angle, described second mirror assembly is in described hexagonal degree and described
When two MEMS micromirror assemblies are in described eighth angle, the working light that described light source sends is by described first MEMS micromirror assembly
Described second Acousto-optic tunable filter is incided after reflection with described first mirror assembly, and adjustable from described second
Pictophonetic characters optical filter incides described after being reflected by described second mirror assembly and described second MEMS micromirror assembly after projecting
Material to be detected；Working light after described material to be detected for the wherein said photodetector detection；Wherein said first
The tuning range of Acousto-optic tunable filter is at least partly different from the tuning range of described second Acousto-optic tunable filter.
In some embodiments of the present invention, this spectrometer also includes the 3rd Acousto-optic tunable filter, and the described 3rd is adjustable
The tuning range of the tuning range of pictophonetic characters optical filter and described first Acousto-optic tunable filter and described second tunable
The tuning range of acousto-optic filter is at least partly different, wherein：Described first MEMS micromirror assembly can also be with respect to described light
Road rotates to the 9th angle；Described second MEMS micromirror assembly can also rotate to the tenth angle with respect to described light path；Work as institute
State the first MEMS micromirror assembly and be in described 9th angle and when described second MEMS micromirror assembly is in described ten angle,
The working light that described light source sends incides described 3rd Acousto-optic tunable filter, and from described 3rd tunable acousto-optic
Filter incides described material to be detected after projecting.
In some embodiments of the present invention, described first MEMS micromirror assembly includes：First MEMS micromirror, described first
MEMS micromirror can rotate to described first angle with respect to described light path；Second MEMS micromirror, described second MEMS micromirror energy
Enough rotate to described second angle with respect to described light path.
In some embodiments of the present invention, described first mirror assembly includes：First speculum, described first speculum
Become described third angle with respect to described light path；Second speculum, described second speculum becomes described with respect to described light path
Four angles.
In some embodiments of the present invention, described second mirror assembly includes：3rd speculum, described 3rd speculum
Become described 5th angle with respect to described light path；4th speculum, described 4th speculum becomes described with respect to described light path
Hexagonal degree.
In some embodiments of the present invention, described second MEMS micromirror assembly includes：3rd MEMS micromirror, the described 3rd
MEMS micromirror can rotate to described heptangle degree with respect to described light path；4th MEMS micromirror, described 4th MEMS micromirror energy
Enough rotate to described eighth angle with respect to described light path.
In some embodiments of the present invention, this spectrometer also includes：5th MEMS micromirror, described 5th MEMS micromirror can
Rotate to the 11st angle and the 12nd angle with respect to described light path, wherein：When described 5th MEMS micromirror is in described
During 11 angle, described 5th MEMS micromirror is by the working light projecting from described first Acousto-optic tunable filter, from described
Working light and the working light projecting from described 3rd Acousto-optic tunable filter that second Acousto-optic tunable filter projects
Reflex to described photodetector；When described 5th MEMS micromirror is in described 12 angle, tunable from described first
Working light that acousto-optic filter projects, the working light projecting from described second Acousto-optic tunable filter and from the described 3rd
The working light that Acousto-optic tunable filter projects incides described material to be detected.
In some embodiments of the present invention, this spectrometer also includes control circuit, and described control circuit controls described first
MEMS micromirror assembly and/or described second MEMS micromirror assembly rotate to desired angle.
In some embodiments of the present invention, this spectrometer also includes control circuit, and described control circuit controls described first
MEMS micromirror assembly, described second MEMS micromirror assembly and/or described 5th MEMS micromirror rotate to desired angle.
In some embodiments of the present invention, described photodetector is formed by black silicon PIN-type photodiode.
In some embodiments of the present invention, by having the multiple tunable acousto-optic of at least partly different tuning ranges
Between filter, switching carries out frequency sweep, increases the overall tuning range of spectrometer, it is possible to achieve in the range of broader spectrum
Light splitting, has widened the operation strategies of spectrometer.
In some embodiments of the present invention, make to penetrate after Acousto-optic tunable filter optical filtering by arranging the 5th MEMS micromirror
The monochromatic light going out directly reflexes to photodetector and is not incident on material to be detected, it is possible to obtain monochromatic light is without to be detected
Material and in the case of being directly incident on photodetector photodetector response data as spectrometer detection calibration base
Standard, and with it, test data is calibrated, so that spectrometer constitutes a self-calibration system, decrease light in spectrometer
The systematic error that electric explorer response causes with light source light spectrum.
Brief description
Fig. 1 be one embodiment of the invention miniature wide spectrum spectrometer in mode of operation structural representation once.
Fig. 2 is the structural representation under mode of operation two for the miniature wide spectrum spectrometer of one embodiment of the invention.
Fig. 3 is the structural representation under mode of operation three for the miniature wide spectrum spectrometer of one embodiment of the invention.
Fig. 4 is the structural representation under self calibration mode of operation for the miniature wide spectrum spectrometer of one embodiment of the invention
Figure.
Specific embodiment
Describe the concrete structure of the miniature wide spectrum spectrometer of some embodiments of the present invention below in conjunction with accompanying drawing in detail.
Fig. 1 is the structural representation of the miniature wide spectrum spectrometer of some embodiments of the invention.
With reference to Fig. 1, in some embodiments of the present invention, a kind of miniature wide spectrum spectrometer can include light source 1, first
MEMS（MEMS）Micromirror assemblies 3, the first mirror assembly 4, the first Acousto-optic tunable filter（AOTF）5th, second can
Tuning acousto-optic filter 6, the second mirror assembly 8, the second MEMS micromirror assembly 9 and photodetector 12.
Light source 1 can provide the working light of wide spectrum for this spectrometer.In embodiments of the invention, light source 1 can be
Any suitable light supply apparatus of wide spectrum light can be provided.For example, in some embodiments, light source 1 can be to have wide light
The broad-spectrum white-light LED of spectral limit.
Herein, described " working light " may refer to spectrometer normal work and make used light, and that is, light source is sent out
Go out is detected or the light for being calibrated for treating detection material.
First MEMS micromirror assembly 3 can be the MEMS micromirror assemblies using micro-electromechanical technology, a MEMS
Micromirror assemblies 3 can be in control circuit（In figure is not shown）Control under rotate, the A of the working light sending with respect to light source 1
Light path（For example, from the light path part of light source 1 to the first MEMS micromirror assembly 3 in Fig. 1）Rotate to first angle and second angle.
When this first MEMS micromirror assembly 3 is in this first angle or second angle, it can incide the light source 1 on it
The working light sending is fully reflective.But, this described " fully reflective " can not understand in absolute sense, i.e. institute here
" fully reflective " said it is not intended that definitely absolutely reflecting, but can include having a certain amount of due to scattering,
The situation of the fiber-loss that the factors such as diffusion, material absorption lead to.
MEMS micromirror in first MEMS micromirror assembly 3 can be speculum.
In some embodiments, the first MEMS micromirror assembly 3 can only include a MEMS micromirror, and this MEMS micromirror can
To rotate to aforesaid first angle and second angle under the control of control circuit.
In further embodiments, the first MEMS micromirror assembly 3 can also include multiple MEMS micromirror.For example, as Fig. 1 institute
Show, the first MEMS micromirror assembly 3 can include the first MEMS micromirror 30 and the second MEMS micromirror 31.First MEMS micromirror 30 is permissible
Rotate to aforesaid first angle under the control of control circuit, and the second MEMS micromirror 31 can be under the control of control circuit
Rotate to aforesaid second angle.In this case, it is in aforesaid first angle when referring to the first MEMS micromirror assembly 3
When, may refer to certain MEMS micromirror wherein comprising（For example, aforesaid first MEMS micromirror 30）It is in this first angle；Class
As, when referring to that the first MEMS micromirror assembly 3 is in aforesaid second angle, certain MEMS that may refer to wherein comprise is micro-
Mirror（For example, aforesaid second MEMS micromirror 31）It is in this second angle.
In embodiments of the invention, the concrete structure of the first MEMS micromirror assembly 3 and by control circuit control first
The method that MEMS micromirror assembly 3 is rotated or carried out other motions can be conventional method in MEMS micromirror field,
This no longer describes in detail.
The light path of the working light that the first mirror assembly 4 can send with respect to aforesaid light source 1 become third angle and
Fourth angle.
In some embodiments, the first mirror assembly 4 can only comprise a speculum.Now, this speculum can
Rotationally and/or translationally to be arrived the position becoming third angle and fourth angle with aforesaid light path.
In other embodiments, the first mirror assembly 4 can comprise multiple speculums.For example, as shown in figure 1, first
Mirror assembly 4 can include the first speculum 40 and the second speculum 41.First speculum 40 can be with respect to aforesaid light
Road becomes third angle, and the second speculum 41 can become fourth angle with respect to aforesaid light path.In this case, when referring to
When first mirror assembly 4 is in aforesaid third angle, may refer to certain speculum wherein comprising（For example, aforesaid
First speculum 40）It is in this third angle；Similarly, when referring to that the first mirror assembly 4 is in aforesaid fourth angle,
May refer to certain reflective micro-mirrors wherein comprising（For example, aforesaid second speculum 41）It is in this fourth angle.Additionally, one
In a little embodiments, the first speculum 40 and the second speculum 41 can be fixing（I.e. it is impossible to rotating or translating）.Other
In embodiment, the first speculum 40 and the second speculum 41 can be rotatable and/or translation.
In some embodiments of the present invention, the speculum in the first mirror assembly 4 can be MEMS micromirror speculum.Separately
In some embodiments, the speculum in the first mirror assembly 4 can be common speculum.
First Acousto-optic tunable filter 5 and the second Acousto-optic tunable filter 6 can be made up of tunable acousto-optic crsytal,
And the tuning range of the two is at least partly different.For example, in some embodiments, the tuning of the first Acousto-optic tunable filter 5
May range from 0.35-0.43 μm（Now measured with the wavelength of tunable light）, the second Acousto-optic tunable filter 6
Tuning range can be 0.43-0.65 μm（Equally, now measured with the wavelength of tunable light）.Those skilled in the art
Easy to understand, the tuning range of the first Acousto-optic tunable filter 5 and the second Acousto-optic tunable filter 6 can set as needed
It is set to any other suitable value.
The light path of the working light that the second mirror assembly 8 can send with respect to aforesaid light source 1 become the 5th angle and
Hexagonal degree.
In some embodiments, the second mirror assembly 8 can only comprise a speculum.Now, this speculum can
Rotationally and/or translationally to be arrived the position becoming the 5th angle and hexagonal degree with aforesaid light path.
In other embodiments, the second mirror assembly 8 can comprise multiple speculums.For example, as shown in figure 1, second
Mirror assembly 8 can include the 3rd speculum 80 and the 4th speculum 81.3rd speculum 80 can be with respect to aforesaid light
Lu Cheng five angle, and the 4th speculum 81 can become hexagonal degree with respect to aforesaid light path.In this case, when referring to
When second mirror assembly 8 is in aforesaid five angle, may refer to certain speculum wherein comprising（For example, aforesaid
3rd speculum 80）It is in the 5th angle；Similarly, when referring to that the second mirror assembly 8 is in aforesaid hexagonal and spends,
May refer to certain reflective micro-mirrors wherein comprising（For example, aforesaid 4th speculum 81）It is in this hexagonal degree.Additionally, one
In a little embodiments, the 3rd speculum 80 and the 4th speculum 81 can be fixing（I.e. it is impossible to rotating or translating）.Other
In embodiment, the 3rd speculum 80 and the 4th speculum 81 can be rotatable and/or translation.
In some embodiments of the present invention, the speculum in the second mirror assembly 8 can be MEMS micromirror speculum.Separately
In some embodiments, the speculum in the second mirror assembly 8 can be common speculum.
In each embodiment aforesaid, the first mirror assembly 4 and the second mirror assembly 8 can will incide them it
On working light fully reflective.Similar with previously described, " fully reflective " mentioned here here can not anticipate absolute
Understand in justice, i.e. " fully reflective " mentioned here is it is not intended that definitely absolutely reflect, but can include having
A certain amount of absorb etc. the situation of fiber-loss that factor leads to due to scattering, diffusion, material.
Second MEMS micromirror assembly 9 can be the MEMS micromirror assemblies using micro-electromechanical technology, the 2nd MEMS
Micromirror assemblies 9 can be in control circuit（In figure is not shown）Control under rotate, the light of the working light sending with respect to light source 1
Road rotates to heptangle degree and eighth angle.When this second MEMS micromirror assembly 9 is in this heptangle degree or eighth angle,
It can be fully reflective by inciding working light on it.But, similarly, " fully reflective " mentioned here can not be
Understand in absolute sense, i.e. " fully reflective " mentioned here is it is not intended that definitely absolutely reflect, but can wrap
Include and be there is a certain amount of fiber-loss being led to due to factors such as scattering, diffusion, material absorptions.
MEMS micromirror in second MEMS micromirror assembly 9 can be speculum.
In some embodiments, the second MEMS micromirror assembly 9 can only include a MEMS micromirror, and this MEMS micromirror can
To rotate to aforesaid heptangle degree and eighth angle under the control of control circuit.
In further embodiments, the second MEMS micromirror assembly 9 can also include multiple MEMS micromirror.For example, as Fig. 1 institute
Show, the second MEMS micromirror assembly 9 can include the 3rd MEMS micromirror 90 and the 4th MEMS micromirror 91.3rd MEMS micromirror 90 is permissible
Rotate to aforesaid heptangle degree under the control of control circuit, and the 4th MEMS micromirror 91 can be under the control of control circuit
Rotate to aforesaid eighth angle.In this case, it is in aforesaid heptangle degree when referring to the second MEMS micromirror assembly 9
When, may refer to certain MEMS micromirror wherein comprising（For example, aforesaid 3rd MEMS micromirror 90）It is in this heptangle degree；Class
As, when referring to that the second MEMS micromirror assembly 9 is in aforesaid eighth angle, certain MEMS that may refer to wherein comprise is micro-
Mirror（For example, aforesaid 4th MEMS micromirror 91）It is in this eighth angle.
Similarly, in embodiments of the invention, the concrete structure of the second MEMS micromirror assembly 9 and pass through control circuit control
Make the second MEMS micromirror assembly 9 being rotated or carried out the method for other motions can be conventional side in MEMS micromirror field
Method, will not be described in detail herein.
In some embodiments of the present invention, miniature wide spectrum spectrometer can also include light collimator assembly 2.This light is accurate
The working light that light source 1 sends can be collimated by straight assembly 2.The concrete structure of light collimator assembly 2 and operation principle can be
Well known in the art, will not be described in detail herein.
The working light that light source 1 sends, can be miniature from the present invention after at least a portion in aforementioned element
The light hole 11 of wide spectrum spectrometer projects.From light hole 11 project working light through test substance, inhaled by test substance
Receive and reflect, reflect, scattering etc..Photodetector 12 can detect the working light that have passed through test substance（I.e. to be measured
Material absorbing the working light after reflecting, reflect or scatter etc.）, photodetector 12 according to receive working light defeated
Go out electric signal, these electric signals can carry out spectrum analysis for processor, to obtain the relevant information of test substance（For example, treat
Survey composition and concentration of material etc.）.Spectrum analysis can be used using the concrete grammar that photodetector carries out spectrum analysis
The common method in field, will not be described in detail herein.
In some embodiments of the present invention, photodetector 12 can be formed by black silicon PIN-type photodiode.With tradition
Photodiode compare, black silicon PIN-type photodiode has broader response spectrum, thus greatly having widened spectrometer
Spectral response range.
The light path of the working light sending below with reference to light source 1 is carried out to the correlation between each element aforesaid
Describe in detail.
As shown in figure 1, in the case of Fig. 1, the first MEMS micromirror assembly 3 is in and aforesaid sends with respect to light source 1
The first angle of the light path of working light A, the first mirror assembly 4 is in aforesaid third angle, at the second mirror assembly 8
In aforesaid 5th angle, the second MEMS micromirror assembly 9 is in aforesaid heptangle degree.Now, the working light that light source 1 sends
A（In certain embodiments, after light collimator assembly 2 collimation）Incide the first MEMS micromirror assembly 3, be in first jiao
Incident working light A is reflexed to the first mirror assembly 4 by the first MEMS micromirror assembly 3 of degree.It is in the of third angle
Incident working light A is reflexed to the first Acousto-optic tunable filter 5 by one mirror assembly 4.Now, control circuit can be adjusted
Section is input to the radio frequency of the first Acousto-optic tunable filter 5（RF）Signal is so that the thang-kng ripple of the first Acousto-optic tunable filter 5
Change in Duan Qi tuning range, thus realize the frequency sweep in its tuning range.Filter through the first Acousto-optic tunable filter 5
Working light after light, after the injection of this first Acousto-optic tunable filter 5, is in the second mirror assembly 8 of the 5th angle
Reflex to the second MEMS micromirror assembly 9 being in heptangle degree（For example, the 3rd MEMS micromirror 90）On, it is in the of heptangle degree
Two MEMS micromirror assemblies 9（For example, it is in the 3rd MEMS micromirror 90 of heptangle degree）Incident working light is reflexed to thang-kng
Hole 11, so as to project from light hole 11, is incided on material to be detected.
In the process, it is input to RF signal on the first Acousto-optic tunable filter 5 by adjusting, can make first can
The thang-kng wave band of tuning acousto-optic filter 5 changes in its tuning range, so that defeated from the first Acousto-optic tunable filter 5
Go out and then the wave band from the working light of light hole 11 output becomes in the tuning range of this first Acousto-optic tunable filter 5
Change.
As shown in Fig. 2 in the case of Fig. 2, the first MEMS micromirror assembly 3 is in aforesaid second angle, the first reflection
Mirror assembly 4 is in aforesaid fourth angle, and the second mirror assembly 8 is in aforesaid hexagonal degree, the second MEMS micromirror assembly 9
It is in aforesaid eighth angle.Now, the working light A that light source 1 sends（In certain embodiments, through light collimator assembly 2
After collimation）Incide the first MEMS micromirror assembly 3, be in the first MEMS micromirror assembly 3 of second angle by incident work
Light A reflexes to the first mirror assembly 4.Incident working light A is reflected by the first mirror assembly 4 being in fourth angle
To the second Acousto-optic tunable filter 6.Now, control circuit can adjust the RF being input to the second Acousto-optic tunable filter 6
Signal is so that the thang-kng wave band of the second Acousto-optic tunable filter 6 changes in its tuning range, thus realizing tuning model at it
Frequency sweep in enclosing.Working light after the second Acousto-optic tunable filter 6 filters is from this second Acousto-optic tunable filter 6
After injection, the second mirror assembly 8 being in hexagonal degree reflexes to the second MEMS micromirror assembly 9 being in eighth angle
（For example, the 4th MEMS micromirror 91）On, it is in the second MEMS micromirror assembly 9 of eighth angle（For example, it is in the of eighth angle
Four MEMS micromirror 91）Incident working light is reflexed to light hole 11 so as to project from light hole 11, incides thing to be detected
In matter.
In the process, it is input to RF signal on the second Acousto-optic tunable filter 6 by adjusting, can make second can
The thang-kng wave band of tuning acousto-optic filter 6 changes in its tuning range, so that defeated from the second Acousto-optic tunable filter 6
Go out and then the wave band from the working light of light hole 11 output becomes in the tuning range of this second Acousto-optic tunable filter 6
Change.
Operationally, when the wave band frequency sweep in the tuning range of the first Acousto-optic tunable filter 5 completes（I.e. first is adjustable
The whole tuning range of pictophonetic characters optical filter 5 has been traversed and has completed）Afterwards, control circuit can control the first MEMS micromirror group
Part 3 rotates to second angle, and controls the second MEMS micromirror assembly 9 to rotate to eighth angle.Additionally, for the first speculum group
Part 4 and the second mirror assembly 8 be not to be realized by including fixing multiple speculums, but by can rotationally and/or translationally
The embodiment that single speculum is realized, also controls the first mirror assembly 4 to move to fourth angle and control by control circuit
Second mirror assembly 8 moves to hexagonal degree.So so that working light is from inciding the first Acousto-optic tunable filter 5
It has been switched to and incided the second Acousto-optic tunable filter 6 so that spectrometer can continue in the second Acousto-optic tunable filter 6
Tuning range in change.By described previously, the tune of the first Acousto-optic tunable filter 5 and the second Acousto-optic tunable filter 6
Humorous scope is at least partly different.Therefore, by from the first Acousto-optic tunable filter 5（It is properly termed as mode of operation one）It is switched to
Second Acousto-optic tunable filter 6（It is properly termed as mode of operation two）, increase the overall tuning range of spectrometer, it is possible to achieve
Light splitting in the range of broader spectrum, has widened the operation strategies of spectrometer.Additionally, employing MEMS in embodiments of the invention
Micromirror assemblies are realized, and are conducive to the miniaturization of spectrometer.
With reference to Fig. 1-Fig. 3, in other embodiments of the present invention, it is adjustable that miniature wide spectrum spectrometer can also include the 3rd
Pictophonetic characters optical filter 7.Additionally, the first MEMS micromirror assembly 3 can also rotate to respect to the light path of aforesaid working light
Nine angles, the second MEMS micromirror assembly 9 can also rotate to the tenth angle with respect to aforementioned light path.
With reference to Fig. 3, when the first MEMS micromirror assembly 3 is in the 9th angle, and the second MEMS micromirror assembly 9 be in this
During ten angles, the working light that light source 1 sends（In certain embodiments, after light collimator assembly 2 collimation）Incide this
3rd Acousto-optic tunable filter 7.Now, control circuit can adjust the RF letter being input to the 3rd Acousto-optic tunable filter 7
Number so that the thang-kng wave band of the 3rd Acousto-optic tunable filter 7 changes in its tuning range, thus realizing in its tuning range
Interior frequency sweep.Working light after the 3rd Acousto-optic tunable filter 7 filters is penetrated from the 3rd Acousto-optic tunable filter 7
After going out, directly project from light hole 11, incide on material to be detected.
In these embodiments, the first Acousto-optic tunable filter 5, the second Acousto-optic tunable filter 6 and the 3rd is tunable
The tuning range of acousto-optic filter 7 is different at least in part each other.For example, in some embodiments, the first tunable acousto-optic
The tuning range of filter 5 can be 0.35-0.43 μm, and the tuning range of the second Acousto-optic tunable filter 6 can be 0.51-
0.95 μm, the tuning range of the 3rd Acousto-optic tunable filter 7 can be 0.43-0.65 μm.So, by with previously described
In embodiment, similar method makes the working light A of light source 1 outgoing in the first Acousto-optic tunable filter 5（Now it is properly termed as
Mode of operation one）, the second Acousto-optic tunable filter 6（Now it is properly termed as mode of operation two）Filter with the 3rd tunable acousto-optic
Device 7（Now it is properly termed as mode of operation three）Between switch, the overall tuning range of spectrometer can effectively extend.For example, exist
The tuning range of the first Acousto-optic tunable filter 5 mentioned above is 0.35-0.43 μm, the second Acousto-optic tunable filter 6
Tuning range be 0.51-0.95 μm, the tuning range of the 3rd Acousto-optic tunable filter 7 be 0.43-0.65 μm of embodiment
In, the tuning range of spectrometer can expand in 0.35-0.95 μm of gamut.
Referring to figs. 1 to Fig. 4, in some embodiments of the present invention, miniature wide spectrum spectrometer can also include the 5th MEMS
Micro mirror 10.5th MEMS micromirror 10 can be the MEMS micro-mirror element using micro-electromechanical technology, and can be in control
Circuit processed（In figure is not shown）Control under rotate, the light path of the working light sending with respect to light source 1 rotates to the 11st jiao
Degree and the 12nd angle.When the 5th MEMS micromirror 10 is in 11 angle（With reference to Fig. 4）, the 5th MEMS micromirror 10 will
From the first Acousto-optic tunable filter 5 light projecting, the light and tunable from the 3rd projecting from the second Acousto-optic tunable filter 6
The working light that acousto-optic filter 7 projects directly reflexes to aforesaid photodetector 12 and does not project from light hole 11 and incide
On material to be detected.And when the 5th MEMS micromirror 10 is in 12 angle（Referring to figs. 1 to Fig. 3）, tunable from first
Working light that acousto-optic filter 5 projects, the working light and tunable from the 3rd projecting from the second Acousto-optic tunable filter 6
The working light that acousto-optic filter 7 projects passes through light hole 11 injection and incides material to be detected.That is, when the 5th MEMS micromirror 10
When being in 12 angle, the light that it does not project to each Acousto-optic tunable filter carries out deviation.
In these embodiments, by arranging the 5th MEMS micromirror 10 and being at aforesaid 11st position and make work
Make light according to similar mode in previous embodiment in the first Acousto-optic tunable filter 5, the second Acousto-optic tunable filter 6
And the 3rd switching frequency sweep between Acousto-optic tunable filter 7（Now it is properly termed as self calibration mode of operation）, can make through can
The monochromatic light that tuning acousto-optic filter projects after filtering directly reflexes to photodetector 12, and is not incident on material to be detected.
As such, it is possible to the monochromatic light obtaining and storing in wide spectral range is directly incident on photodetector without material to be detected
The response data of the photodetector 12 in the case of 12 is as the detection calibration benchmark of spectrometer.Treated using this spectrometer
When detection material is detected, it is possible to use in the case of photodetector 12 should being directly incident on without material to be detected
To treating detection material, response data is detected that obtained data is calibrated.Therefore, now this spectrometer constitutes one
Individual self-calibration system, this self-calibration system enable spectrometer to detect the photodetector light source light splitting in spectrometer after list
Coloured light directly in response to, should directly in response to processing together with test data, as the absorption spectra data of material, thus subtracting
The systematic error that in few spectrometer, photodetector response causes with light source light spectrum.
In embodiments of the invention, the occurrence of aforesaid all angles can need according to actual design and arrange, only
It is capable of aforesaid corresponding function, the present invention is not limited in this respect.
Hereinbefore, described all angles are described according to the light path with respect to working light A.Easy to understand, this
A little angles are not limited to define by this.Other definition modes can also use, as long as the orientation energy of each element accordingly
Enough realize aforesaid corresponding function.
Describe the present invention above by specific embodiment, but the present invention is not limited to these specifically implements
Example.It will be understood by those skilled in the art that the present invention can also be made with various modifications, equivalent, change etc., these conversion
Without departing from the spirit of the present invention, all should be within protection scope of the present invention.Additionally, " the reality described in above many places
Apply example " represent different embodiments naturally it is also possible to completely or partially combine in one embodiment it.
Claims (10)
1. a kind of miniature wide spectrum spectrometer is it is characterised in that include：Light source, the first Acousto-optic tunable filter, second adjustable
Pictophonetic characters optical filter, photodetector and：
First MEMS micromirror assembly, the light path rotation of the working light that described first MEMS micromirror assembly can send with respect to light source
Go to first angle and second angle；
First mirror assembly, described first mirror assembly becomes third angle and fourth angle with respect to described light path；
Second mirror assembly, described second mirror assembly becomes the 5th angle and hexagonal degree with respect to described light path；
Second MEMS micromirror assembly, described second MEMS micromirror assembly can rotate to heptangle degree and with respect to described light path
Anistree degree；
Wherein：
It is in described first angle when described first MEMS micromirror assembly, described first mirror assembly is in described the third angle
Spend, described second mirror assembly is in described 5th angle and described second MEMS micromirror assembly is in described heptangle degree
When, the working light that described light source sends is entered after the reflection of described first MEMS micromirror assembly and described first mirror assembly
It is mapped to described first Acousto-optic tunable filter, and anti-by described second after described first Acousto-optic tunable filter projects
Material to be detected is incided after penetrating mirror assembly and described second MEMS micromirror assembly reflection；
It is in described second angle when described first MEMS micromirror assembly, described first mirror assembly is in described fourth angle
Spend, described second mirror assembly is in described hexagonal degree and described second MEMS micromirror assembly is in described eighth angle
When, the working light that described light source sends is entered after the reflection of described first MEMS micromirror assembly and described first mirror assembly
It is mapped to described second Acousto-optic tunable filter, and anti-by described second after described second Acousto-optic tunable filter projects
Described material to be detected is incided after penetrating mirror assembly and described second MEMS micromirror assembly reflection；
Working light after described material to be detected for the wherein said photodetector detection；
The tuning range of wherein said first Acousto-optic tunable filter and the tuning model of described second Acousto-optic tunable filter
Enclose at least part of difference.
2. spectrometer as claimed in claim 1 is it is characterised in that also include the 3rd Acousto-optic tunable filter, and the described 3rd
The tuning range and described second of the tuning range of Acousto-optic tunable filter and described first Acousto-optic tunable filter can
The tuning range of tuning acousto-optic filter is at least partly different, wherein：
Described first MEMS micromirror assembly can also rotate to the 9th angle with respect to described light path；
Described second MEMS micromirror assembly can also rotate to the tenth angle with respect to described light path；
When described first MEMS micromirror assembly is in described 9th angle and described second MEMS micromirror assembly is in described
During ten angles, the working light that described light source sends incides described 3rd Acousto-optic tunable filter, and from the described 3rd
Acousto-optic tunable filter incides described material to be detected after projecting.
3. spectrometer as described in claim 1 or 2 is it is characterised in that described first MEMS micromirror assembly includes：
First MEMS micromirror, described first MEMS micromirror can rotate to described first angle with respect to described light path；
Second MEMS micromirror, described second MEMS micromirror can rotate to described second angle with respect to described light path.
4. spectrometer as described in claim 1 or 2 is it is characterised in that described first mirror assembly includes：
First speculum, described first speculum becomes described third angle with respect to described light path；
Second speculum, described second speculum becomes described fourth angle with respect to described light path.
5. spectrometer as described in claim 1 or 2 is it is characterised in that described second mirror assembly includes：
3rd speculum, described 3rd speculum becomes described 5th angle with respect to described light path；
4th speculum, described 4th speculum becomes described hexagonal degree with respect to described light path.
6. spectrometer as described in claim 1 or 2 is it is characterised in that described second MEMS micromirror assembly includes：
3rd MEMS micromirror, described 3rd MEMS micromirror can rotate to described heptangle degree with respect to described light path；
4th MEMS micromirror, described 4th MEMS micromirror can rotate to described eighth angle with respect to described light path.
7. the spectrometer as described in any one in claim 1 to 6 is it is characterised in that also include：
5th MEMS micromirror, described 5th MEMS micromirror can rotate to the 11st angle and the 12nd jiao with respect to described light path
Degree, wherein：
When described 5th MEMS micromirror is in described 11 angle, described 5th MEMS micromirror will be tunable from described first
Working light that acousto-optic filter projects, the working light projecting from described second Acousto-optic tunable filter and from the described 3rd
The working light that Acousto-optic tunable filter projects reflexes to described photodetector；Described in being in when described 5th MEMS micromirror
During 12 angle, from the working light of described first Acousto-optic tunable filter injection, from the described second tunable acousto-optic filter
Light device project working light and from described 3rd Acousto-optic tunable filter project working light incide described to be detected
Material.
8. it is characterised in that also including control circuit, described control circuit controls described spectrometer as claimed in claim 1
First MEMS micromirror assembly and/or described second MEMS micromirror assembly rotate to desired angle.
9. it is characterised in that also including control circuit, described control circuit controls described spectrometer as claimed in claim 7
First MEMS micromirror assembly, described second MEMS micromirror assembly and/or described 5th MEMS micromirror rotate to desired angle.
10. spectrometer as in one of claimed in any of claims 1 to 9 it is characterised in that：Described photodetector is by black silicon
PIN-type photodiode is formed.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110542403A (en) * | 2019-09-19 | 2019-12-06 | 上海兰宝传感科技股份有限公司 | MEMS (micro-electromechanical systems) measuring sensor and triangular area measuring method |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2241923A1 (en) * | 2004-09-27 | 2010-10-20 | QUALCOMM MEMS Technologies, Inc. | System and method of reducing color shift in a display |
| US8053730B2 (en) * | 2008-12-22 | 2011-11-08 | Electronics And Telecommunications Research Institute | Infrared sensor and method of fabricating the same |
| CN203350593U (en) * | 2013-08-02 | 2013-12-18 | 芮俊 | Pendulum type camera switching device having double optical filters |
| CN103717139A (en) * | 2011-07-29 | 2014-04-09 | 富士胶片株式会社 | Photoacoustic image-generating apparatus and acoustic unit |
-
2016
- 2016-09-13 CN CN201610820759.3A patent/CN106441574B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2241923A1 (en) * | 2004-09-27 | 2010-10-20 | QUALCOMM MEMS Technologies, Inc. | System and method of reducing color shift in a display |
| US8053730B2 (en) * | 2008-12-22 | 2011-11-08 | Electronics And Telecommunications Research Institute | Infrared sensor and method of fabricating the same |
| CN103717139A (en) * | 2011-07-29 | 2014-04-09 | 富士胶片株式会社 | Photoacoustic image-generating apparatus and acoustic unit |
| CN203350593U (en) * | 2013-08-02 | 2013-12-18 | 芮俊 | Pendulum type camera switching device having double optical filters |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110542403A (en) * | 2019-09-19 | 2019-12-06 | 上海兰宝传感科技股份有限公司 | MEMS (micro-electromechanical systems) measuring sensor and triangular area measuring method |
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