CN106017682A - Quarter-wave-plate-included depolarization spectrograph - Google Patents
Quarter-wave-plate-included depolarization spectrograph Download PDFInfo
- Publication number
- CN106017682A CN106017682A CN201610309088.4A CN201610309088A CN106017682A CN 106017682 A CN106017682 A CN 106017682A CN 201610309088 A CN201610309088 A CN 201610309088A CN 106017682 A CN106017682 A CN 106017682A
- Authority
- CN
- China
- Prior art keywords
- light
- port
- quarter
- wave plate
- diffraction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000028161 membrane depolarization Effects 0.000 title description 2
- 230000003287 optical effect Effects 0.000 claims abstract description 40
- 239000000835 fiber Substances 0.000 claims abstract description 24
- 230000003595 spectral effect Effects 0.000 claims abstract description 16
- 239000013307 optical fiber Substances 0.000 claims description 14
- 230000035945 sensitivity Effects 0.000 claims description 12
- 239000013078 crystal Substances 0.000 claims description 9
- 230000000694 effects Effects 0.000 claims description 3
- 239000000523 sample Substances 0.000 claims description 3
- 230000002147 killing effect Effects 0.000 claims 1
- 230000000149 penetrating effect Effects 0.000 claims 1
- 238000005259 measurement Methods 0.000 abstract description 5
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- 238000001228 spectrum Methods 0.000 abstract description 3
- 230000010287 polarization Effects 0.000 description 17
- 239000011248 coating agent Substances 0.000 description 6
- 238000000576 coating method Methods 0.000 description 6
- 238000007747 plating Methods 0.000 description 6
- 230000008901 benefit Effects 0.000 description 5
- 238000013461 design Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 238000010276 construction Methods 0.000 description 4
- 238000001514 detection method Methods 0.000 description 4
- 230000007246 mechanism Effects 0.000 description 4
- 239000010453 quartz Substances 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000005286 illumination Methods 0.000 description 3
- 238000004891 communication Methods 0.000 description 2
- 229910052500 inorganic mineral Inorganic materials 0.000 description 2
- 239000011707 mineral Substances 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 238000004186 food analysis Methods 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000007480 spreading Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/42—Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/42—Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry
- G01J2003/425—Reflectance
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Spectrometry And Color Measurement (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
The invention, which belongs to the spectral measurement instrument field, provides a spectrograph that has a small structure and a small size and can meet a high resolution ratio requirement. According to the technical scheme, the spectrograph is composed of a dual-port fiber array, an off-axis parabolic mirror, a plane diffraction grating, and an achromatism quarter-wave plate. A to-be-measured optical signal enters through an upper port of the fiber array; after collimation by the off-axis parabolic mirror, the signal is reflected to the plane diffraction grating; diffracted light perpendicular to the achromatism quarter-wave plate among the diffracted light from the plane diffraction grating is reflected by the rear surface and is returned to the plane diffraction grating according to an original path; diffracted light processed at the second time passes through the off-axis parabolic mirror and then is focused at a lower port of the dual-port fiber array; and then the light enters a receiving fiber and is detected by a detector. With rotation of the achromatism quarter-wave plate, light from different diffraction angles is detected respectively at different times to form spectrum scanning. The technical scheme is is mainly used for designing and manufacturing a spectral measurement instrument.
Description
Technical field
The invention belongs to spectrum measurement instruments field, relate to microelectron-mechanical, optical element, system, be specifically related to a kind of four points
One of wave plate depolarized light spectrometer.
Background technology
Spectrogrph is as a kind of important optical gauge, in space remote sensing, Atmospheric Survey, mineral and food analysis, and
The fields such as optical communication system detection all have a wide range of applications.General spectrogrph be all use prism or grating as beam splitter,
And owing to grating spectrograph has resolution height, the plurality of advantages of miniaturization relative to prism spectrometer, have developed into main
Spectrometric instrument.For, in the design of spectrogrph and research, being primarily upon its image quality and resolution, and for partially in the past
The sensitivity shaken is paid close attention to less.In actual application, either through the sunlight of atmosphere scattering, mineral excites
Fluorescence, or the flashlight of optic communication, all have certain degree of polarization, and the sound that the grating in spectrogrph is to different polarization light
Should be different, especially when grating constant reaches wavelength magnitude, this Polarization-Sensitive sex expression be clearly.In order to disappear
Except the polarization sensitivity of spectrogrph, generally there are two kinds of ways: one is the method using depolarizer；Two is to use special polarization to survey
Electricity testing device.Polarization measurement device itself is also the most complicated, and can treat light-metering and cause the biggest decay, the most depolarized
The method still adding depolarizer before entrance slit that the spectrogrph of sensitivity of shaking often uses.But depolarizer can cause double image, i.e.
The light of different polarization states separates, and finally forms two pictures separated in image planes.Double image makes system MTF decline, imaging
Quality and resolution reduce.
Along with the progress of manufacturing technology level, the design of achromatic waveplate and manufacturing technology have obtained quick development.Achromatic waveplate
Stable phase-delay quantity can be kept in the widest spectral region, be widely used in the high-precision polarizations such as stress measurement
Dependence test technical field.
The light path (United States Patent (USP): US 6690468 B1) of the spectrogrph of Karl Bezel et al., specifically includes that entrance slit,
Collimating lens, grating, half-wave plate, corner cube prism, condenser lens, exit slit and mechanical rotating mechanism.This light channel structure
To realize polychromatic light signal decomposition to be measured being each monochromatic light signal, and carry out spectral scan.Work process is: collimation unit
Part will be irradiated in grating top half for directional light from the polychromatic light collimation that dissipates of entrance slit outgoing, and polychromatic light is decomposed by grating
For monochromatic light, each monochromatic light is again reflexed to grating the latter half, and adds one in the light path return to grating by corner cube prism
Individual half-wave plate, the function of this half-wave plate is by incident light polarization state half-twist.After forming second time light splitting, only one tunnel is monochromatic
Light is focused element and focuses on and export on exit slit to detection circuit, drives corner cube prism and half-wave plate by mechanical rotating mechanism
Rotation completes to select light function.Only be applied to prismatic reflection light path due to half-wave plate, incident and reflection light path must be strictly separated.With
Time, twice diffraction needs to be irradiated to the upper and lower two parts of grating, it is therefore desirable to the area of grating is the biggest.
For drawbacks described above, developing simple in construction, volume is little, and the spectral instrument meeting again high-resolution requirement is the most necessary.
Summary of the invention
For overcoming the deficiencies in the prior art, it is desirable to provide a kind of simple in construction, volume is little, meets again high-resolution requirement
Spectral instrument.The technical solution used in the present invention is, quarter-wave plate depolarized light spectrometer, dual-port fiber array, from
Axis paraboloidal mirror, plane diffraction grating, achromatic quarter waveplate forms；Treat that light signal enters from the upper port of fiber array
Penetrate, by off axis paraboloidal mirror collimation back reflection on plane diffraction grating, with achromatism four points in the diffraction light of plane diffraction grating
One of the vertical diffraction light of wave plate can be by its rear surface reflection backtracking to plane diffraction grating, secondary diffraction light passes through
Focus on the lower port of dual-port fiber array after off axis paraboloidal mirror, detected by detector subsequently into receiving optical fiber；Pass through
Rotating achromatic quarter waveplate, the light at different diffraction angle is being detected the most respectively, forms spectral scan.
High sensitivity single-element detector is placed after fiber exit port, in achromatic quarter waveplate rotary course, different ripples
Long monochromatic light successively with the specific angle of diffraction through twice diffraction light splitting of grating, thus realize the monochromatic light of different wave length on the detector
Continuous scanning probe.
Collimation and focus lamp are same off axis paraboloidal mirror, and effect is both as collimating mirror, by treating of sending from incident optical port
Surveying signal collimation is directional light, again as focus lamp, is focused on incident optical port by the monochromatic collimated beam of return.
Collimation and focus lamp are double glued achromats.
Achromatic quarter waveplate, be the polylith major axes orientation birefringece crystal different with phase-delay quantity meet body, phase place
Postponing precision and reach as high as 1% wavelength, main shaft variable quantity is less than 1 °.
Outside treats that light signal is free space optical signal, and free space optical signal needs first coupled into optical fibres, then introduces letter through optical fiber
Number input port.
In the case of optical fiber core diameter in dual-port fiber array is relatively big, after incident optical port, additional slit is to incident beam
It is adjusted.
Plane diffraction grating is plane ruled grating or plane holographic grating.
The feature of the present invention and providing the benefit that:
1, the achromatic quarter waveplate using a rear surface plating reflectance coating reflects, and reflection light is relative to incident light polarization
There is the rotation of 90 ° in state, can eliminate the polarization sensitivity of spectrogrph.
2, twice optical diffraction height overlaps, and reduces the structure complexity of instrument, reduces the volume and weight of instrument, have
Significantly technical advantage.
3, through twice light splitting of grating, improve the optical resolution of this type of spectral instrument so that it is have relatively in wider spectral region
High spectral resolution, it is possible to be widely used in each spectral band.
4, this structure may be used for each wave band of spectrometric instrument, can use parameter designing flexibly according to specific needs.
Accompanying drawing illustrates:
Fig. 1 is the structure principle chart of the present invention: 1 is dual-port fiber array in figure, 2 is off axis paraboloidal mirror, 3 spreads out for plane
Penetrate grating, 4 for achromatic quarter waveplate；
Fig. 2 is system optics design drawing；
Fig. 3 receives analogous diagram for scanning；
Fig. 4 diffraction efficiency of grating curve；
Fig. 5 achromatic quarter waveplate meets the main shaft change curve with wavelength；
Fig. 6 achromatic quarter waveplate meets the phase-delay quantity change curve with wavelength；
Fig. 7 quarter-wave plate depolarized light spectrometer apparatus polarization sensitivity curve.
Detailed description of the invention
The present invention utilizes the method that optical grating diffraction light second incident light grid are carried out again diffraction, effectively increases optical path difference, improves and divides
Resolution, simultaneously in the overlapping light path that first time diffraction and second time are incident, introduces achromatic quarter waveplate, changes secondary
The polarization direction of incident illumination, reaches the purpose of depolarization sensitivity.
A kind of quarter-wave plate depolarized light spectrometer apparatus that the present invention provides is dual-port fiber array, off axis paraboloidal mirror,
Plane diffraction grating, achromatic quarter waveplate forms.Treat that light signal is incident from the upper port of fiber array, thrown off axis
Object plane mirror collimation back reflection is on plane diffraction grating, vertical with achromatic quarter waveplate in the diffraction light of plane diffraction grating
Diffraction light can be by its rear surface reflection backtracking on plane diffraction grating, secondary diffraction light is through off axis paraboloidal mirror
After focus on the lower port of dual-port fiber array, detected by detector subsequently into receiving optical fiber.By rotating achromatism four
/ mono-wave plate, the light at different diffraction angle is being detected the most respectively, forms spectral scan.
High sensitivity single-element detector is placed after fiber exit port, in achromatic quarter waveplate rotary course, different ripples
Long monochromatic light successively with the specific angle of diffraction through twice diffraction light splitting of grating, thus realize the monochromatic light of different wave length on the detector
Continuous scanning probe.
Collimation and focus lamp are same off axis paraboloidal mirror.
Present invention employs the optical spectroscopic system of new construction, utilize the achromatic quarter waveplate of rear surface plating reflectance coating to spreading out
Penetrate light and carry out second time diffraction, relative to common single diffraction spectrometers, there are the advantage that resolution is high, simultaneously achromatism four points
One of wave plate can realize incident illumination polarization state rotate, eliminate spectrogrph sensitivity.
Additionally, the optical texture of the present invention is also different from traditional raster scanning sub-ray spectrometer, traditional raster scanning spectrophotometric spectra
Instrument is that grating is arranged on servo control mechanism, realizes the monochromatic company of different wave length by rocking grating under the drive of servo control mechanism
Continuous detection.The achromatic quarter waveplate of the optical texture rear surface plating reflectance coating in the present invention is combined real with plane diffraction grating
Existing optical spectroscopic, realizes the monochromatic company of different wave length in the achromatic quarter waveplate rotary course of rear surface plating reflectance coating
Continuous detection.Additionally, because the achromatic quarter waveplate only one of which reflecting surface of the rear surface plating reflectance coating of the present invention, primary
Diffraction light and secondary optical path of incident light height overlap, the spectrogrph utilizing this kind of optical texture to be developed have simple in construction,
The advantages such as volume is little, lightweight, compact conformation.
Heretofore described achromatic quarter waveplate, its essence is two-fold different with phase-delay quantity of polylith major axes orientation
Penetrate the complex of crystal.Phase delay precision reaches as high as 1% wavelength, and main shaft variable quantity is less than 1 °.
In the present invention, light signal is treated in outside, can be free space optical signal, and free space optical signal needs first coupled into optical fibres, so
Signal input port is introduced by optical fiber.
In the present invention, the FC fiber port adapter of optical fiber splicing device both standards, again the SMA fiber port of standard
Adapter.
In the present invention, in the case of optical fiber core diameter is relatively big, additional slit can be adjusted by incident beam after incident optical port
Whole, to improve the spectral resolution of instrument.Optical fiber in optical fiber is dual-port fiber array herein, respectively as incident narrow with reception
Seam, in the case of core diameter is relatively big, it should be separately added into slit element, i.e. at array end after incident optical and before receiving optical fiber
A slit element is added at Kou.
The present invention is further described below in conjunction with the accompanying drawings with instantiation.
As in figure 2 it is shown, the achromatic quarter waveplate that described spectral scan device is plating reflectance coating, it is placed in plane diffraction grating
Optical diffraction on；Described light channel structure can realize the polarization direction of optical signal and rotate, and eliminates the polarization sensitivity of spectrogrph；
Treat that light signal, by plane diffraction grating diffraction twice, is effectively increased the resolution of spectrogrph；Collimation and the focusing of light path use
Same off axis paraboloidal mirror, simplifies light path；
Described dual-port fiber array (1) has upper and lower two ports, respectively as incidence and the exit slit of spectrogrph, and two
Individual port is symmetrical above and below about the focus of off axis paraboloidal mirror, it is achieved the light path of receiving and transmitting signal separates.
Described collimation and focus lamp (2) are off axis paraboloidal mirror, and effect is both as collimating mirror, will send out from incident optical port
The measured signal collimation gone out is directional light, again as focus lamp, is focused on by the monochromatic collimated beam of return on incident optical port,
This mirror can also be double glued achromats.
Described grating (3) is plane ruled grating or plane holographic grating.
The diffraction light of vertical incidence is reflected back grating by original optical path by described achromatic quarter waveplate (4), forms second time
Diffraction, is rotated the polarization state treating light-metering simultaneously, and grating is total for the s component of incident illumination and twice diffraction of p-component
Efficiency is identical, eliminates the polarization sensitivity of spectrogrph.
Achromatic quarter waveplate (4), can carry out the rotation of precision under the control of its driver, filter out satisfied difference and spread out
The light of the wavelength of firing angle, completes spectral scan function.
As in figure 2 it is shown, dual-port fiber array spacing used is 0.25mm, optical fiber core diameter is 9 μm.Off axis paraboloidal mirror mother is burnt
Away from for 20mm, y-axis measures 9.5mm off axis.Grating used is the plane diffraction grating of 1050 lines/mm, and its diffraction efficiency is bent
Fig. 4 is shown in by line.Achromatic quarter waveplate used is to choose 1250nm 1650nm optical communicating waveband, carries out three Dimensional Design institute
, material therefor can be represented by the formula without quartz crystal, the Phase delay that its birefringence causes:
ne-no=0.01436-2.63111 × 10-5λ+5.62427×10-8λ2
-6.73725×10-11λ3+4.75388×10-14λ4-1.96809
×10-17λ5+4.41564×10-21λ6-4.14135×10-25λ7
neFor Kristall optical index, noFor crystal o optical index, λ is a certain wavelength of the optical signal by crystal.If the
The phase-delay quantity of one piece and the 3rd piece quartz crystal is δ1, its main shaft is parallel with x-axis；The main shaft of second piece of quartz crystal and
The main shaft of one piece of quartz crystal is at an angle β, and phase-delay quantity is δ2.Then retardation δ of multiple phase delay device and equivalence main shaft square
Parallactic angle φ can be expressed as:
δ=2arccos [cos δ1cos(δ2/2)-sinδ1sin(δ2/2)cos2β]
φ=1/2arccot{csc2 β [sin δ1cot(δ2/2)+cosδ1cos2β]}
This is the process that a multiparameter seeks optimal solution, and last design result is:δ2=π,According to crystalline substance
Body birefringent phase retardation, with the difference of wavelength, can obtain in whole wave band multiple phase delay amount and equivalence azimuth with ripple
Long change, is shown in Fig. 5 and Fig. 6.The Polarization-Sensitive linearity curve of final designed 1/4th depolarized light spectrometer apparatus is shown in Fig. 7.
Claims (8)
1. a quarter-wave plate depolarized light spectrometer, is characterized in that, by dual-port fiber array, off axis paraboloidal mirror, plane is spread out
Penetrating grating, achromatic quarter waveplate forms；Treat that light signal is incident from the upper port of fiber array, by off axis paraboloid mirror
Mirror collimation back reflection is on plane diffraction grating, vertical with achromatic quarter waveplate in the diffraction light of plane diffraction grating
Diffraction light can be by its rear surface reflection backtracking to plane diffraction grating, and secondary diffraction light is through off axis paraboloidal mirror
After focus on the lower port of dual-port fiber array, detected by detector subsequently into receiving optical fiber；By rotating achromatism
Quarter-wave plate, the light at different diffraction angle is being detected the most respectively, forms spectral scan.
2. quarter-wave plate depolarized light spectrometer as claimed in claim 1, is characterized in that, places Gao Ling after fiber exit port
Sensitivity single-element detector, in achromatic quarter waveplate rotary course, the monochromatic light of different wave length is successively with the specific angle of diffraction
Through twice diffraction light splitting of grating, thus realize the monochromatic light of different wave length continuous scanning probe on the detector.
3. quarter-wave plate depolarized light spectrometer as claimed in claim 1, is characterized in that, collimation and focus lamp are same off-axis throwing
Object plane mirror, effect is both as collimating mirror, is directional light, again conduct by the measured signal collimation sent from incident optical port
Focus lamp, focuses on the monochromatic collimated beam of return on incident optical port.
4. quarter-wave plate depolarized light spectrometer as claimed in claim 1, is characterized in that, collimation and focus lamp are double glued colour killings
Aplanat.
5. quarter-wave plate depolarized light spectrometer as claimed in claim 1, is characterized in that, achromatic quarter waveplate, is many
The complex of the birefringece crystal that block major axes orientation is different with phase-delay quantity, Phase delay precision reaches as high as 1% wavelength,
Main shaft variable quantity is less than 1 °.
6. quarter-wave plate depolarized light spectrometer as claimed in claim 1, is characterized in that, outside treats that light signal is free space
Optical signal, free space optical signal needs first coupled into optical fibres, then introduces signal input port through optical fiber.
7. quarter-wave plate depolarized light spectrometer as claimed in claim 1, is characterized in that, the optical fiber in dual-port fiber array
In the case of core diameter is relatively big, after incident optical port, incident beam is adjusted by additional slit.
8. quarter-wave plate depolarized light spectrometer as claimed in claim 1, is characterized in that, plane diffraction grating is that plane delineates light
Grid or plane holographic grating.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610309088.4A CN106017682A (en) | 2016-05-10 | 2016-05-10 | Quarter-wave-plate-included depolarization spectrograph |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610309088.4A CN106017682A (en) | 2016-05-10 | 2016-05-10 | Quarter-wave-plate-included depolarization spectrograph |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106017682A true CN106017682A (en) | 2016-10-12 |
Family
ID=57099406
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610309088.4A Pending CN106017682A (en) | 2016-05-10 | 2016-05-10 | Quarter-wave-plate-included depolarization spectrograph |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106017682A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110632058A (en) * | 2019-11-04 | 2019-12-31 | 宁波源禄光电有限公司 | Small light splitting device for Raman spectrum analysis |
| CN113847985A (en) * | 2021-09-30 | 2021-12-28 | 上海交通大学烟台信息技术研究院 | Three-range grating spectrometer with two-dimensional grating |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030007148A1 (en) * | 2001-06-01 | 2003-01-09 | John Moon | Optical channel monitor |
| WO2003028266A2 (en) * | 2001-09-25 | 2003-04-03 | Cidra Corporation | Optical channel monitor having an array of micro-mirrors |
| US20030179990A1 (en) * | 2002-03-21 | 2003-09-25 | John Weber | High resolution tunable optical filter |
| CN102933944A (en) * | 2010-03-24 | 2013-02-13 | 耶达研究开发公司 | System and method for polarization measurement |
| CN103604501A (en) * | 2013-11-22 | 2014-02-26 | 中国科学院合肥物质科学研究院 | DOAS measurement system by means of polarizing beam splitting |
-
2016
- 2016-05-10 CN CN201610309088.4A patent/CN106017682A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030007148A1 (en) * | 2001-06-01 | 2003-01-09 | John Moon | Optical channel monitor |
| WO2003028266A2 (en) * | 2001-09-25 | 2003-04-03 | Cidra Corporation | Optical channel monitor having an array of micro-mirrors |
| US20030179990A1 (en) * | 2002-03-21 | 2003-09-25 | John Weber | High resolution tunable optical filter |
| CN102933944A (en) * | 2010-03-24 | 2013-02-13 | 耶达研究开发公司 | System and method for polarization measurement |
| CN103604501A (en) * | 2013-11-22 | 2014-02-26 | 中国科学院合肥物质科学研究院 | DOAS measurement system by means of polarizing beam splitting |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110632058A (en) * | 2019-11-04 | 2019-12-31 | 宁波源禄光电有限公司 | Small light splitting device for Raman spectrum analysis |
| CN110632058B (en) * | 2019-11-04 | 2022-05-03 | 宁波源禄光电有限公司 | Small light splitting device for Raman spectrum analysis |
| CN113847985A (en) * | 2021-09-30 | 2021-12-28 | 上海交通大学烟台信息技术研究院 | Three-range grating spectrometer with two-dimensional grating |
| CN113847985B (en) * | 2021-09-30 | 2024-03-12 | 上海交通大学烟台信息技术研究院 | Two-dimensional grating three-range grating spectrometer |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN211696676U (en) | Rotary spectral imaging-polarization measurement system | |
| CN106404713B (en) | A kind of miniature near infrared spectrometer of double detector of full spectral coverage 800nm-2500nm | |
| CN104568765B (en) | Miniature spectroscopic ellipsometer device and measuring method | |
| CN102944310B (en) | Spectral resolution adjustable interference imaging spectrometer | |
| CN1650151B (en) | Optical spectrometer | |
| CN102226716A (en) | Light path structure of echelle grating spectrometer | |
| CN102680098B (en) | A kind of spectral measurement device | |
| JP2013546000A (en) | Image map spectroscopic polarization | |
| CN106017673A (en) | MEMS-scanning-micromirror-based double-pass grating monochrometer optical path structure | |
| CN108332945A (en) | A kind of diffraction efficiency of grating test system and method | |
| CN103063304A (en) | Chromatic dispersion shear image surface interference hyper spectrum imaging device and method | |
| CN102879091B (en) | Echelle grating spectrometer, atomic emission spectrometer and spectrum testing method | |
| US20200116626A1 (en) | Snapshot Ellipsometer | |
| CN103308282A (en) | High-efficiency measuring system and method for transmittance of reflective telescopic system | |
| CN111208067A (en) | Spectrum-polarization imaging measurement system | |
| US3977787A (en) | High-resolution fourier interferometer-spectrophotopolarimeter | |
| US9638635B2 (en) | Spectrometer for analysing the spectrum of a light beam | |
| CN103575661A (en) | Optical measurement system with vertical and oblique incidence measurement functions | |
| US7221454B2 (en) | Photopolarimeters and spectrophotopolarimaters with multiple diffraction gratings | |
| US10495513B2 (en) | Multi-resolution optical spectrometer | |
| CN106017682A (en) | Quarter-wave-plate-included depolarization spectrograph | |
| CN109489579A (en) | A kind of Sagnac polarization imaging device and method based on high dencity grating | |
| CN110501074A (en) | The high-resolution relevant dispersed light spectrum imaging method of high-throughput wide spectrum and device | |
| JP3095167B2 (en) | Multi-channel Fourier transform spectrometer | |
| CN106940291B (en) | High-resolution double-grating monochromator light path device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20161012 |
|
| WD01 | Invention patent application deemed withdrawn after publication |