CN106441137A - Three-dimensional laser scanning probe - Google Patents
Three-dimensional laser scanning probe Download PDFInfo
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- CN106441137A CN106441137A CN201610883422.7A CN201610883422A CN106441137A CN 106441137 A CN106441137 A CN 106441137A CN 201610883422 A CN201610883422 A CN 201610883422A CN 106441137 A CN106441137 A CN 106441137A
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- laser
- photodetector
- support base
- measuring staff
- laser beam
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/16—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
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- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention relates to a three-dimensional laser scanning probe. The three-dimensional laser scanning probe comprises a first laser source which is used for emitting a first laser beam, a laser reflection plane which is used for reflecting the first laser beam to a measurement ball, a spectroscope which transmitting the laser beam, which is reflected by the laser reflection plane, of the measurement ball to a first photodetector, a processing system which acquires the displacement change value of a measurement bar according to the position change value of the laser beam received by the first photodetector, and a measurement assembly which is used for measuring the three-dimensional displacement change of the measurement ball. The measurement assembly comprises the measurement bar and the measurement ball. The three-dimensional laser scanning probe provided by the embodiment of the invention can measure the direct displacement change of a support base and the deformation of the measurement bar. Compared with a conventional three-dimensional probe, the three-dimensional laser scanning probe provided by the embodiment of the invention has the advantages of higher measurement accuracy, simple structure, easy mass production and low cost.
Description
Technical field
The present invention relates to Technology of Precision Measurement field, more particularly, to a kind of 3 D laser scanning testing head.
Background technology
Gauge head is one of critical component of precision measurement instrument, provides the geometric position information of measured workpiece as sensor, surveys
The level of development of head directly affects certainty of measurement and the measurement efficiency of precision measurement instrument.Precision feeler is generally divided into contact measuring head
Survey first two with contactless, wherein contact measuring head is divided into mechanical type gauge head, touch trigger probe and scanning probe again.
Mechanical type gauge head is because be manual measurement, and precision is not high, and measurement efficiency is low, is therefore currently rarely used for Industrial Measurement
Amount field.The widely used precision feeler in current industrial field is touch trigger probe, and its principle is when gauge head surveys end and tested work
During part contact, precision measurement instrument sends sampling pulse signal, and latches the coordinate now surveying the end centre of sphere by the processing system of instrument
Value, to determine the coordinate surveying end and measured workpiece contact point with this.It is simple, easy to use and higher that such gauge head has structure
The advantages of triggering precision, its shortcoming is that there is anisotropy (triangle effect), or contact measuring head is when contacting measured workpiece
Producing micro-displacement because of resistance thus leading to the offset deviation of gauge head, limiting the raising further of its certainty of measurement,
High accuracy can only reach several microns of zero point.Current application gauge head type the widest is scanning probe, and its principle is that gauge head survey end exists
After contact measured workpiece, gauge head is subjected to displacement due to the effect of contact force, and the conversion equipment output of gauge head is small inclined with measuring staff
Move into the signal of direct ratio, the superposition of the respective coordinate value of this signal and precision measurement instrument just can get more accurately sitting of point on measured workpiece
Mark.If not considering the deformation of measuring staff, scanning probe is isotropic, therefore its precision is significantly larger than touch trigger probe.But,
The deformation of measuring staff is objective reality, and current gauge head only accounts for surveying the direct displacement of ball, and does not consider the deformation of measuring staff,
Therefore, even the precision of scanning probe is also not high enough.Additionally, scanning probe also has complex structure, manufacturing cost height
The shortcomings of.
Content of the invention
It is an object of the invention to the certainty of measurement in the presence of improving prior art not high it is difficult to measurement measuring staff deflection
Deficiency, a kind of 3 D laser scanning testing head improving certainty of measurement is provided.
In order to realize foregoing invention purpose, embodiments provide technical scheme below：
A kind of 3 D laser scanning testing head, including the measurement assembly for measuring the change of measuring staff three-D displacement, described measurement
Assembly includes described measuring staff and surveys ball,
Described measuring staff is hollow measuring staff, and described survey ball is arranged at one end of described hollow measuring staff, and described survey ball with described
The sphere that hollow measuring staff connects is provided with laser-bounce plane, and the laser-bounce plane of described survey ball is located at described hollow measuring staff
Internal；Described 3 D laser scanning testing head also includes：
First laser source, for launching first laser bundle；
Spectroscope, is obliquely installed in the other end of described hollow measuring staff, for described first laser source is launched first
Laser beam reflexes to the described laser-bounce plane surveying ball, and the laser beam transmission by the described laser-bounce plane reflection surveying ball
To the first photodetector；
Described first photodetector, is 2 D photoelectric detector, for receiving the described survey through described spectroscope transmission
The laser beam of the laser-bounce plane reflection of ball；
Processing system, the change in location value of the laser beam according to received by described first photodetector, obtain described
The deflection of measuring staff.
According to embodiments of the present invention, described measurement assembly also includes：
Three sides of described support base be respectively arranged with the first laser plane of reflection, the second laser plane of reflection, the 3rd
Laser-bounce plane；
Second laser source, the 3rd lasing light emitter, the 4th lasing light emitter, be respectively used to launch second laser bundle, the 3rd laser beam, the
Four laser beams, and described second laser bundle, described 3rd laser beam are incident to described support base respectively with described 4th laser beam
The first laser plane of reflection, the second laser plane of reflection and the 3rd laser-bounce plane；
Second photodetector, the 3rd photodetector, the 4th photodetector, are respectively used to receive described support base
The first laser plane of reflection, the second laser plane of reflection, the laser beam of the 3rd laser-bounce plane reflection；
Member of translational, is used for making described support base move along a straight line；
Reset components, for being reset to initial position by described support base；
Described processing system be additionally operable to according to described second photodetector, described 3rd photodetector, the described 4th
The change in location value of laser beam received by photodetector difference, is calculated the described change in displacement value surveying ball.
As another embodiment, described measurement assembly also includes：
Support base, described hollow measuring staff is arranged at described support base, described support base be additionally provided with second laser source, the 3rd swash
Light source and the 4th lasing light emitter；
Described second laser source, the 3rd lasing light emitter, the 4th lasing light emitter, are respectively used to launch second laser bundle, the 3rd laser
Bundle, the 4th laser beam；
Second photodetector, the 3rd laser instrument, the 4th laser instrument, be respectively used to receive described second laser source, the 3rd
Lasing light emitter, the second laser bundle of the 4th lasing light emitter transmitting, the 3rd laser beam, the 4th laser beam；
Member of translational, is used for making described support base move along a straight line；
Reset components, for being reset to initial position by described support base；
Described processing system be additionally operable to according to described second photodetector, described 3rd photodetector, the described 4th
The change in location value of laser beam received by photodetector difference, is calculated the described change in displacement value surveying ball.
As another embodiment, described measurement assembly also includes：
Support base, described hollow measuring staff is arranged at described support base, described support base be additionally provided with the second photodetector,
Three photodetectors and the 4th photodetector；
Second laser source, the 3rd lasing light emitter, the 4th lasing light emitter, be respectively used to launch second laser bundle, the 3rd laser beam, the
Four laser beams；
Described second photodetector, the 3rd laser instrument, the 4th laser instrument, be respectively used to receive described second laser source,
3rd lasing light emitter, the second laser bundle of the 4th lasing light emitter transmitting, the 3rd laser beam, the 4th laser beam；
Member of translational, is used for making described support base move along a straight line；
Reset components, for being reset to initial position by described support base；
Described processing system is additionally operable to according to described second photodetector, described 3rd photodetector, the 4th photoelectricity
The change in location value of laser beam received by detector difference, is calculated the described change in displacement value surveying ball.
According to embodiments of the present invention, described support base is hollow support seat, and described hollow support seat is provided with for described hollow
The through hole that measuring staff passes through, described hollow measuring staff deviates from described one end surveying ball and is arranged in described hollow support seat.
According to embodiments of the present invention, the plane of incidence of described second photodetector, the incidence of described 3rd photodetector
Face, the plane of incidence of described 4th photodetector are arranged in a mutually vertical manner, and described member of translational is used for described hollow support seat edge
Relatively described second photodetector, described 3rd photodetector, the vertical plane of described 4th photodetector are taken exercises.
According to embodiments of the present invention, described member of translational includes at least one first gathering sill, described at least one first
Vertically it is provided with least one second gathering sill, along Vertical Square at least one second gathering sill two described between gathering sill
To being provided with least one the 3rd gathering sill, at least one the 3rd gathering sill three described is slidably connected described hollow support seat.
According to embodiments of the present invention, described 3 D laser scanning testing head also includes housing, and described reset components are spring, institute
The one end stating spring is connected to described hollow support seat, and the other end is connected to described housing.
According to embodiments of the present invention, described second photodetector and/or the rotatable installation of described 4th photodetector
In described housing.
According to embodiments of the present invention, described survey ball is segment, and the bottom surface of segment is as the laser-bounce plane surveying ball.
The present invention can measure measuring staff deflection in the horizontal direction using 2 D photoelectric detector, due to along measuring staff direction
Rigidity big, therefore ignore the deformation along measuring staff direction.
Compared with prior art, beneficial effects of the present invention：3 D laser scanning testing head provided in an embodiment of the present invention, no
Only include the measurement assembly of the three-dimensional directly change in displacement for measuring support base, also include for measure measuring staff deformation first
Lasing light emitter, spectroscope, first photodetector etc., not only measure the direct change in displacement of support base, also measure measuring staff
Deformation, therefore compared with traditional three dimensional probe, 3-D probe, the certainty of measurement of 3 D laser scanning testing head provided in an embodiment of the present invention is more
Height, and structure is simply it is easy to produce in batches, low cost.
Brief description
In order to be illustrated more clearly that the technical scheme of the embodiment of the present invention, below will be attached to use required in embodiment
Figure is briefly described it will be appreciated that the following drawings illustrate only certain embodiments of the present invention, and it is right to be therefore not construed as
The restriction of scope, for those of ordinary skill in the art, on the premise of not paying creative work, can also be according to this
A little accompanying drawings obtain other related accompanying drawings.
Fig. 1 is for measuring the structural representation of the measurement assembly two of measuring staff change in displacement in the embodiment of the present invention.
Fig. 2 is the light path schematic diagram measuring measuring staff change in displacement in the embodiment of the present invention.
Fig. 3 is the structural representation of 3 D laser scanning testing head provided in an embodiment of the present invention.
Fig. 4 (a) is the top view that member of translational, reset components and hollow support seat use cooperatively；Fig. 4 (b) is Fig. 4 (a)
Front view.
Fig. 5 is the light path schematic diagram that in the embodiment of the present invention, displacement of ball change is surveyed in measurement.
Fig. 6 be Fig. 5 in the second photodetector rotate to an angle after light path schematic diagram.
Fig. 7 is the structural representation of another kind 3 D laser scanning testing head provided in an embodiment of the present invention.
Fig. 8 is the structural representation of another 3 D laser scanning testing head provided in an embodiment of the present invention.
Main element symbol description
Spring leaf 1；Spring leaf 2 52；Spring leaf 3 53；Gathering sill 1；Gathering sill 2 82；Gathering sill 3 83；Sliding
Block 84；First laser bundle 100；First laser source 101；Hollow measuring staff 102；Survey ball 103；Spectroscope 104；First photodetector
105；Second laser source 106；Second photodetector 107；Hollow support seat 108；Housing 111；Contiguous block 112；3rd photoelectricity
Detector 115；3rd lasing light emitter 116；4th lasing light emitter 117；4th photodetector 118；Survey the laser-bounce plane of ball
200；Second laser bundle 300；The first laser plane of reflection 400 of hollow support seat；3rd laser beam 500, the 4th laser beam
600.
Specific embodiment
Below in conjunction with accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete
Ground description is it is clear that described embodiment is only a part of embodiment of the present invention, rather than whole embodiments.Generally exist
The assembly of the embodiment of the present invention described and illustrated in accompanying drawing can be arranged with various different configurations and design herein.Cause
This, be not intended to limit claimed invention to the detailed description of the embodiments of the invention providing in the accompanying drawings below
Scope, but it is merely representative of the selected embodiment of the present invention.Based on embodiments of the invention, those skilled in the art are not doing
The every other embodiment being obtained on the premise of going out creative work, broadly falls into the scope of protection of the invention.
3 D laser scanning testing head provided in an embodiment of the present invention is included for measuring measuring staff (it can be appreciated that supporting
Seat, survey ball) measurement assembly one of three-dimensional directly change in displacement, also include the measurement assembly two for measuring measuring staff deformation.
As a kind of embodiment, Fig. 1 shows and is used in the present embodiment measuring the measurement assembly of measuring staff change in displacement
Two structure, refers to Fig. 1, in the present embodiment, the measurement assembly two for measuring measuring staff deformation include measuring staff, survey ball 103, the
One lasing light emitter 101, spectroscope 104, the first photodetector 105 and processing system；Wherein, measuring staff is hollow measuring staff 102, surveys ball
103 one end being arranged at hollow measuring staff 102, and surveying the sphere that is connected with hollow measuring staff 102 of ball 103, to be provided with laser-bounce flat
Face, the laser-bounce plane 200 surveying ball is located at the inside of hollow measuring staff 102；As a kind of easy embodiment, survey ball 103
For segment, the bottom surface of segment is as the laser-bounce plane surveying ball.
First laser source 101, for launching first laser bundle 100；
Spectroscope 104, is obliquely installed in the other end of described hollow measuring staff 102, for by 101, described first laser source
The first laser bundle 100 penetrated reflexes to the laser-bounce plane 200 surveying ball, and the laser-bounce plane 200 surveying ball is reflected
Laser beam transmission is to one first photodetector 105；
Described first photodetector 105, is 2 D photoelectric detector, for receiving through the transmission of described spectroscope 104
Survey the laser beam of laser-bounce plane 200 reflection of ball；
Processing system, the change in location value of the laser beam according to received by described first photodetector 105, obtain institute
State the deflection of measuring staff.
3 D laser scanning testing head is arranged on precision measuring instrument, when surveying ball 103 with measured workpiece directly contact, surveys ball
103 can be produced displacement by resistance, and hollow measuring staff 102 is connected with surveying ball 103, and hollow measuring staff 102 also can deform.Fig. 1 shows
Go out the light path before hollow measuring staff 102 deformation, Fig. 2 shows the light path after hollow measuring staff 102 deformation.Refer to Fig. 1, Fig. 2, empty
Before heart measuring staff 102 deformation, the first laser bundle 100 (collimated light beam) that first laser source 101 sends incides spectroscope 104, point
This first laser bundle 100 is reflexed to the laser-bounce plane 200 surveying ball by light microscopic 104, and the laser beam of spectroscope 104 reflection is through surveying
The laser-bounce plane 200 of ball reflexes to spectroscope 104 in reverse direction along former road, and the laser-bounce surveying ball is put down by spectroscope 104
The laser beam transmission of face 200 reflection is to the first photodetector 105.After hollow measuring staff 102 deformation, first laser source 101 sends
First laser bundle 100 incide spectroscope 104, spectroscope 104 by this first laser bundle 100 reflex to survey ball laser-bounce
Plane 200, now compared with the light path before the deformation of hollow measuring staff 102, input path does not change, but spectroscope 104 reflexes to
The laser beam surveying the laser-bounce plane 200 of ball falls and is subjected to displacement in the drop point of laser-bounce plane 200 surveying ball；Spectroscope
The laser-bounce plane 200 through surveying ball for the laser beam of 104 reflections reflexes to spectroscope 104, and spectroscope 104 will be anti-for the laser surveying ball
The laser beam transmission penetrating plane 200 reflection is to the first photodetector 105, the light path phase before now deforming with hollow measuring staff 102
Reflected light path changes ratio, and the laser beam surveying laser-bounce plane 200 reflection of ball falls in the drop point generation of spectroscope 104
Displacement, correspondingly, the drop point that spectroscope 104 is transmitted to the laser beam of the first photodetector 105 is subjected to displacement, as illustrated,
Displacement is L0；Because the change in location of the laser beam received by the first photodetector 105 is by the deformation of hollow measuring staff 102
Cause, therefore pass through to measure the position of the laser beam received by the first photodetector 105 before and after hollow measuring staff 102 deforms
Change, can obtain the change in displacement of hollow measuring staff 102, i.e. the deformation of hollow measuring staff 102.
The change in location value of the laser beam according to received by the first photodetector 105, obtains hollow measuring staff 102 two
(X-direction and Y-direction, the displacement of Z-direction is excessively small negligible, and the therefore first photodetector 105 adopts 2 D photoelectric to visit for dimension
Survey device) the mode of change in displacement value can have multiple, for example calculate the geometrical relationship before and after hollow measuring staff 102 deforms,
Obtain reflecting the mathematical expression of hollow measuring staff 102 deformation, for example can be by formulaCalculate；As one kind
Simple and effective way, it is possible to use statistics (i.e. test of many times measurement) set up the change in displacement value of hollow measuring staff 102 and the
The relation table of the change in location value of the laser beam received by one photodetector 105, table look at during actual measurement
Deformation values to hollow measuring staff 102.
It should be noted that because measuring staff is hollow measuring staff 102, therefore, the laser beam of spectroscope 104 reflection can pass through
Hollow measuring staff 102 incides the laser-bounce plane 200 surveying ball, and the laser beam surveying laser-bounce plane 200 reflection of ball also can
Incide spectroscope 104 through hollow measuring staff 102.Because hollow measuring staff 102 is caused with measured workpiece directly contact because surveying ball 103
Deflection be also limited, the aperture of therefore hollow measuring staff 102 be enough to ensure that the laser beam of spectroscope 104 reflection can pass through
Hollow measuring staff 102 incides the laser-bounce plane 200 surveying ball, and the laser beam surveying laser-bounce plane 200 reflection of ball also can
Incide spectroscope 104 through hollow measuring staff 102.
The 3 D laser scanning testing head providing in the present embodiment, not only can measure the three-dimensional directly position of hollow measuring staff 102
Move change, the deformation of measuring staff can also be measured, it is possible to obtain survey the more accurate displacement of ball 103, revise gauge head due to measuring staff change
The displacement variable that shape causes, therefore compared with traditional three dimensional probe, 3-D probe, certainty of measurement is higher, and structure simple it is easy to batch
Produce, low cost.
Measurement assembly one for measuring the three-dimensional directly change in displacement of hollow measuring staff 102 can have numerous embodiments,
For example with traditional trigger-type structure, scan-type structure etc., as a kind of citing of simple embodiment, Fig. 3 illustrates
A kind of structure of the 3 D laser scanning testing head providing in the present embodiment.Refer to Fig. 3, in the present embodiment, survey for measurement
The measurement assembly one of the three-dimensional directly change in displacement of ball includes described survey ball 103, described hollow measuring staff 102, described processing system, also
Including：
Support base, hollow measuring staff 102 is arranged at described support base, in the present embodiment, hollow of support base bit length cube shape
Support seat, three sides of hollow support seat be respectively arranged with the first laser plane of reflection 400, the second laser plane of reflection, the 3rd
Laser-bounce plane；Second laser source 106, for launching second laser bundle 300, and described second laser bundle 300 is incident to sky
The first laser reflection flat 400 of heart support base；3rd lasing light emitter 116, for launching the 3rd laser beam 500, and the described 3rd swashs
Light beam 500 is incident to the second laser reflecting surface of described support base；4th lasing light emitter 117, for launching the 4th laser beam 600,
And described 4th laser beam 600 is incident to the 3rd laser-bounce plane of described support base；
Second photodetector 107, is incident to the first laser reflection of described support base for receiving second laser bundle 300
The laser beam of plane reflection；3rd photodetector 115, for receive that the 3rd laser beam 500 is incident to described support base the
The laser beam of dual-laser plane of reflection reflection；4th photodetector 118, is incident to described for reception the 4th laser beam 600
The laser beam of the 3rd laser-bounce plane reflection of support base；In the present embodiment, the second photodetector 107, the 3rd smooth electrical resistivity survey
Survey device 115, the 4th photodetector 118 is arranged in a mutually vertical manner two-by-two；
Member of translational, is used for making described support base move along a straight line；
Reset components, for being reset to initial position by described support base；
Described processing system is used for according to described second photodetector 107, described 3rd photodetector the 115, the 4th
The change in location value of laser beam received by photodetector 118 difference, is calculated the described change in displacement value surveying ball 103.
Second photodetector 107, the 3rd photodetector 115, the 4th photodetector 118 can be to be one-dimensional photodetection
Device, gathers the change in location value in a direction respectively, collects survey ball three-dimensional by the cooperation of three photodetectors
Directly change in displacement value.
Hollow measuring staff 102 is arranged at support base, drives hollow measuring staff 102 mobile, hollow survey when moving in order to support base
Bar 102 can be arranged at the side wall (i.e. the outside of support base) of support base, in order to reduce the body of whole 3 D laser scanning testing head
Long-pending, it is preferred that hollow measuring staff 102 is arranged at the inside of support base.As shown in figure 3, as a kind of citing of embodiment,
Support base is hollow support seat 108, and described hollow support seat 108 is provided with to pass through for described hollow measuring staff 102 and (includes hollow measuring staff
102 deformation before and after all can pass through) through hole, described hollow measuring staff 102 deviate from described survey ball 103 one end be arranged at described sky
In heart support base 108.In addition, hollow support seat 108 is designed as hollow rectangular structure, tactical rule is it is easy to produce.
In the present embodiment, 3 D laser scanning testing head also includes housing 111, the second photodetector 107 and/or the 4th light
Electric explorer 118 is rotatably mounted in housing 111.Member of translational is used for translating hollow support seat 108 so as in two differences
Direction moves along a straight line.As a kind of embodiment, specifically, such as shown in Fig. 4 (a), Fig. 4 (b), positioned at the two of horizontal direction
Individual gathering sill 1, between two gathering sills 1, vertically level is slided and is provided with a gathering sill 2 82, gathering sill 2 82
It is provided with a gathering sill 3 83, on gathering sill 3 83, perpendicular slides up and down the described hollow support seat 108 of connection.Due to this
Member of translational includes gathering sill 1, gathering sill 2 82 and gathering sill 3 83 respectively, and wherein gathering sill 2 82 can respective guide slot
One 81 levels are slided, and gathering sill 3 83 can the slip of respective guide slot 2 82 level, the glide direction of gathering sill 1 and gathering sill
2 82 glide direction is mutually perpendicular to, and the glide direction of gathering sill 2 82 is mutually perpendicular to the glide direction of gathering sill 3 83, leads
Vertically it is slidably connected hollow support seat 108 to groove 3 83 by slide block 84, hollow support seat 108 can be carried out on gathering sill 3 83
Slide up and down, be that three mutually orthogonal directions carry out displacement therefore, it is possible to realize hollow support seat 108 respectively in three-dimensional.
As in Fig. 4, four-headed arrow is direction of displacement.
As shown in Fig. 4 (a), Fig. 4 (b), above-mentioned reset components include spring leaf 1, spring leaf 2 52, spring leaf 3 53,
Wherein spring leaf 1 and is used for being directed to groove 2 82 returning back to initial position, spring leaf at least one gathering sill 1
2 52 at least one gathering sill 2 82 and for returning back to initial position by described gathering sill 3 83, and spring leaf 3 53 sets
On gathering sill 3 83 and for hollow support seat 108 is returned back to initial position.This spring leaf 1, spring leaf 2 52, bullet
Reed 3 53 can be directed to groove 2 82, gathering sill 3 83 and hollow support seat 108 respectively and return back to initial position, will three
The position being incident on three (second, third, the 4th) photodetectors of laser beam returns back to original position, is easy to three-dimensional swash
The measurement next time of photoscanning gauge head.
The position of second laser source 106 and the second photodetector 107 immobilizes, and member of translational can make hollow support
Seat 108 moves along a straight line, when hollow support seat 108 position changes, second laser source 106, the 3rd lasing light emitter the 116, the 4th
Second laser bundle 300 that lasing light emitter 117 is launched respectively, the 3rd laser beam 500, the 4th laser beam 600 incide hollow respectively
The first laser plane of reflection of support seat, the second laser plane of reflection, the position of the 3rd laser-bounce plane change, warp respectively
Laser after the first laser plane of reflection 400 of hollow support seat, the second laser plane of reflection, the 3rd laser-bounce plane reflection
Bundle incides the second photodetector 107, the 3rd photodetector 115, the position also phase on the 4th photodetector 118 respectively
Should change, by processing system to the second photodetector 107, the 3rd photodetector 115, the 4th photodetector
The changing value of 118 pairs of different laser beam incoming positions, is calculated and is analyzed, can be obtained hollow support seat 108 positioned at it
The change in displacement value in straight-line displacement direction.
As shown in Fig. 5 (only illustrating the optical path change of second laser bundle), during hollow support seat 108 moves horizontally, false
If the second photodetector 107 vertical direction is arranged, second laser source 106 is obliquely installed upper in the second photodetector 107
Side, and the second laser bundle 300 of second laser transmitting is α with the angle of vertical curve, when 3 D laser scanning testing head is in level
When direction translation distance is x, the second photodetector 107 measurement distance is y, then, measured by the second photodetector 107
To hollow support seat 108 displacement equations multiple be
This 3 D laser scanning testing head is arranged on precision measurement instrument, when surveying ball 103 with measured workpiece directly contact, is subject to
Produce displacement to resistance, survey ball 103 and drive hollow support seat 108 that straight-line displacement is occurred on member of translational, swash by second
Light source 106, the 3rd lasing light emitter 116, the second photodetector 107, the 3rd photodetector 115, processing system cooperation, Neng Gouji
Calculate the direct displacement obtaining surveying ball 103, survey the measured workpiece positioning that when ball 103 contacts measured workpiece, displacement leads to partially to compensate
Difference, the displacement of the hollow support seat 108 by being obtained on the second photodetector 107, the 3rd photodetector 115, that is,
Can obtain measured workpiece hollow support seat 108 straight-line displacement direction more accurately measure coordinate, improve the essence of measurement
Degree.Compared to traditional scanning probe, the 3 D laser scanning testing head in the present embodiment simplifies structure, reduces and produce into
This is it is easy to batch machining manufacture.
Measure the amplification of this 3 D laser scanning testing head displacement, this enforcement in order to adjust the second photodetector 107
In example, setting the second photodetector 107 is rotatable on the side positioned at housing 111.
Rotatable second photodetector 107 can change its position of rotation according to practically necessary certainty of measurement, changes
Become the second photodetector 107 and second laser source 106 transmitting the relative position of second laser bundle 300 and angle, thus changing
Become the amplification that the second photodetector 107 measures this 3 D laser scanning testing head displacement, satisfaction is actually needed.
As shown in fig. 6, rotating and tilt certain angle the second photodetector 107, after such as β, can adjust again and put
Big multiple, in figure substantially can be seen that when hollow support seat 108 translation identical is apart from x, the second photodetector after inclination
On 107, the incoming position of two incoming laser beams there occurs change, and now, the spacing of the two is
The displacement equations multiple of the hollow support seat 108 then obtaining measured by the second photodetector 107 isThis angle can be adjusted according to different needs.
The first photodetector 105 used in the present embodiment, the second photodetector 107, the 3rd photodetector
115th, the 4th photodetector 118 can be selected for conventional Position-Sensitive Detector (Position Sensitive Detector,
Abbreviation PSD), belong to semiconductor device, typically make PN, its operation principle is based on lateral photo effect, can be used in
The accurate measurement of position coordinateses, has the advantages that high sensitivity, high-resolution, fast response time and configuration circuit are simple.Position
Sensing detector is divided into One Dimensional Position Sensitive Detectors and two-dimensional position-sensitive detector, for cost-effective, the present embodiment choosing
With One Dimensional Position Sensitive Detectors.One Dimensional Position Sensitive Detectors, abbreviation one-dimensional PSD, detectable go out a bright spot at it
The surface in a unique direction movement.One-dimensional PSD is arranged on X-axis, Y-axis or the Z axis of housing 111, or other directions,
To obtain its shift value in the direction, and compensated on the measured value of measured workpiece, more accurate to obtain this one-dimensional square
True measured value.
Refer to Fig. 7, Fig. 7 shows the knot of the 3 D laser scanning testing head of another kind of structure providing in the present embodiment
Structure, compared with the structure of the 3 D laser scanning testing head shown in Fig. 3, in structure shown in Fig. 7, the side of hollow support seat 108
It is not laser-bounce plane, that is, this side is not provided with laser reflective film, the second photodetector 107, the 4th photodetector
118 branches are arranged at two sides of hollow support seat 108, second laser source 106, the 4th lasing light emitter 117 launch respectively
Dual-laser bundle 300, the 4th laser beam 600 are directly transmitted to the second photodetector 107, the 4th photodetector 118 respectively.
It is assumed that the second photodetector 107 is (only with the second photodetector during hollow support seat 108 moves horizontally
Illustrate as a example 107) vertical direction setting, the second laser bundle 300 of second laser transmitting and the angle of vertical curve are α,
When translation distance is x to 3 D laser scanning testing head in the horizontal direction, the second photodetector 107 measurement distance is y, then,
The hollow support seat 108 displacement equations multiple obtaining measured by second photodetector 107 isIf the second smooth electrical resistivity survey
Survey device 107 to rotate and tilt certain angle, after such as β, when hollow support seat 108 translation identical is apart from x, second after inclination
On photodetector 107, the incoming position of two incoming laser beams there occurs change, and now, the spacing of the two is x tan α
Cos β+x tan α sin β cot (alpha-beta), then the position of the hollow support seat 108 obtaining measured by the second photodetector 107
Shifting amplification is tan α cos β+tan α sin β cot (alpha-beta).
Second, third, the 4th photodetector can be respectively relative to second, third, the 4th lasing light emitter rotary setting, in the same manner
, second, third, the 4th lasing light emitter also can be respectively relative to second, third, the 4th photodetector rotary setting, with meet
It is actually needed.
Refer to Fig. 8, Fig. 8 shows the knot of the 3 D laser scanning testing head of another structure providing in the present embodiment
Structure, compared with the structure of the 3 D laser scanning testing head shown in Fig. 7, in structure shown in Fig. 8, second laser source the 106, the 3rd is swashed
Light source 116, the 4th lasing light emitter 117 are respectively arranged at three sides of hollow support seat 108, and the of second laser source 106 transmitting
Dual-laser bundle 300 is directly transmitted to the second photodetector 107, and the 3rd laser beam 500 of the 3rd lasing light emitter 116 transmitting directly enters
It is incident upon the 3rd photodetector 115, the 4th laser beam 600 of the 4th lasing light emitter 117 transmitting is directly transmitted to the 4th photodetection
Device 118.The principle of structure shown in Fig. 8 is identical with the principle of structure shown in Fig. 7, therefore repeats no more.
Skilled addressee readily understands that, in the present embodiment, with regard to second, third, the 4th photodetector and
2nd, the arrangement of the three, the 4th lasing light emitters has only enumerated 3 kinds, can also have other a lot of embodiments, be not easy to one herein
One enumerates.
It should be noted that：Similar label and letter represent similar terms in following accompanying drawing, therefore, once a certain Xiang Yi
It is defined in individual accompanying drawing, then do not need it to be defined further and explains in subsequent accompanying drawing.Meanwhile, the present invention's
In description, term " first ", " second ", " the 3rd " etc. are only used for distinguishing description, and it is not intended that instruction or hint are relatively heavy
The property wanted.
The foregoing is only the preferred embodiments of the present invention, be not limited to the present invention, for the skill of this area
For art personnel, the present invention can have various modifications and variations.All within the spirit and principles in the present invention, made any repair
Change, equivalent, improvement etc., should be included within the scope of the present invention.
In describing the invention, it should be noted that term " on ", D score, "left", "right", " interior ", the instruction such as " outward "
Orientation or position relationship be based on orientation shown in the drawings or position relationship, or this invention product use when usually put
Orientation or position relationship, be for only for ease of description the present invention and simplify description, rather than instruction or hint indication device
Or element must have specific orientation, with specific azimuth configuration and operation, be therefore not considered as limiting the invention.
In describing the invention in addition it is also necessary to explanation, unless otherwise clearly defined and limited, term " setting ",
" installation ", " being connected ", " connection " should be interpreted broadly, for example, it may be being fixedly connected or being detachably connected, or one
Body ground connects；For the ordinary skill in the art, above-mentioned term tool in the present invention can be understood with concrete condition
Body implication.
The above, the only specific embodiment of the present invention, but protection scope of the present invention is not limited thereto, and any
Those familiar with the art the invention discloses technical scope in, change or replacement can be readily occurred in, all should contain
Cover within protection scope of the present invention.
Claims (10)
1. a kind of 3 D laser scanning testing head, including the measurement assembly for measuring the change of measuring staff three-D displacement, described measurement group
Part include described measuring staff and survey ball it is characterised in that
Described measuring staff is hollow measuring staff, and described survey ball is arranged at one end of described hollow measuring staff, and described survey ball is hollow with described
The sphere that measuring staff connects is provided with laser-bounce plane, and the laser-bounce plane of described survey ball is located at the interior of described hollow measuring staff
Portion；Described 3 D laser scanning testing head also includes：
First laser source, for launching first laser bundle；
Spectroscope, is obliquely installed in the other end of described hollow measuring staff, for the first laser launching described first laser source
Bundle reflexes to the described laser-bounce plane surveying ball, and by the laser beam transmission of the described laser-bounce plane reflection surveying ball to one
First photodetector；
Described first photodetector, is 2 D photoelectric detector, for the described survey ball through described spectroscope transmission for the reception
The laser beam of laser-bounce plane reflection；
Processing system, the change in location value of the laser beam according to received by described first photodetector, obtain described hollow
The deflection of measuring staff.
2. 3 D laser scanning testing head according to claim 1 is it is characterised in that described measurement assembly also includes：
Support base, described hollow measuring staff is arranged at described support base, and three sides of described support base are respectively arranged with first and swash
The light plane of reflection, the second laser plane of reflection, the 3rd laser-bounce plane；
Second laser source, the 3rd lasing light emitter, the 4th lasing light emitter, be respectively used to launch second laser bundle, the 3rd laser beam, the 4th swash
Light beam, and described second laser bundle, described 3rd laser beam and described 4th laser beam are incident to the of described support base respectively
One laser-bounce plane, the second laser plane of reflection and the 3rd laser-bounce plane；
Second photodetector, the 3rd photodetector, the 4th photodetector, are respectively used to receive the first of described support base
Laser-bounce plane, the second laser plane of reflection, the laser beam of the 3rd laser-bounce plane reflection；
Member of translational, is used for making described support base move along a straight line；
Reset components, for being reset to initial position by described support base；
Described processing system is additionally operable to according to described second photodetector, described 3rd photodetector, described 4th photoelectricity
The change in location value of laser beam received by detector difference, is calculated the described change in displacement value surveying ball.
3. 3 D laser scanning testing head according to claim 1 is it is characterised in that described measurement assembly also includes：
Support base, described hollow measuring staff is arranged at described support base, and described support base is additionally provided with second laser source, the 3rd lasing light emitter
With the 4th lasing light emitter；
Described second laser source, the 3rd lasing light emitter, the 4th lasing light emitter, be respectively used to launch second laser bundle, the 3rd laser beam, the
Four laser beams；
Second photodetector, the 3rd laser instrument, the 4th laser instrument, are respectively used to receive described second laser source, the 3rd laser
Source, the second laser bundle of the 4th lasing light emitter transmitting, the 3rd laser beam, the 4th laser beam；
Member of translational, is used for making described support base move along a straight line；
Reset components, for being reset to initial position by described support base；
Described processing system is additionally operable to according to described second photodetector, described 3rd photodetector, described 4th photoelectricity
The change in location value of laser beam received by detector difference, is calculated the described change in displacement value surveying ball.
4. 3 D laser scanning testing head according to claim 1 is it is characterised in that described measurement assembly also includes：
Support base, described hollow measuring staff is arranged at described support base, and described support base is additionally provided with the second photodetector, the 3rd light
Electric explorer and the 4th photodetector；
Second laser source, the 3rd lasing light emitter, the 4th lasing light emitter, be respectively used to launch second laser bundle, the 3rd laser beam, the 4th swash
Light beam；
Described second photodetector, the 3rd laser instrument, the 4th laser instrument, be respectively used to receive described second laser source, the 3rd
Lasing light emitter, the second laser bundle of the 4th lasing light emitter transmitting, the 3rd laser beam, the 4th laser beam；
Member of translational, is used for making described support base move along a straight line；
Reset components, for being reset to initial position by described support base；
Described processing system is additionally operable to according to described second photodetector, described 3rd photodetector, the 4th photodetection
The change in location value of laser beam received by device difference, is calculated the described change in displacement value surveying ball.
5. according to the arbitrary described 3 D laser scanning testing head of claim 2-4 it is characterised in that described support base is hollow
Support seat, described hollow support seat is provided with the through hole passing through for described hollow measuring staff, and described hollow measuring staff deviates from the one of described survey ball
End is arranged in described hollow support seat.
6. 3 D laser scanning testing head according to claim 5 is it is characterised in that the incidence of described second photodetector
Face, the plane of incidence of described 3rd photodetector, the plane of incidence of described 4th photodetector are arranged in a mutually vertical manner, described translation
Part be used for by described hollow support seat along relatively described second photodetector, described 3rd photodetector, the described 4th
The vertical plane of photodetector is taken exercises.
7. 3 D laser scanning testing head according to claim 6 is it is characterised in that described member of translational includes at least one
First gathering sill, is vertically provided with least one second gathering sill between at least one first gathering sill described, described extremely
Vertically it is provided with least one the 3rd gathering sill, at least one the 3rd gathering sill three described on few second gathering sill
Be slidably connected described hollow support seat.
8. the 3 D laser scanning testing head according to claim 7 it is characterised in that described 3 D laser scanning testing head also
Including housing, described reset components are spring, and one end of described spring is connected to described hollow support seat, and the other end is connected to institute
State housing.
9. 3 D laser scanning testing head according to claim 2 it is characterised in that described second photodetector and/or
Described 4th photodetector is rotatably mounted in described housing.
10. 3 D laser scanning testing head according to claim 1 it is characterised in that described survey ball be segment, segment
Bottom surface is as the laser-bounce plane surveying ball.
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Effective date of registration: 20191225 Address after: No.11 Fengxiang Road, genggeng industrial concentration zone, Baoying County, Yangzhou City, Jiangsu Province 225800 Patentee after: Yangzhou Chuangyuan Laser Technology Co.,Ltd. Address before: 750021 No. 204, Wenchang North Street, Xixia District, the Ningxia Hui Autonomous Region, Yinchuan Patentee before: BEIFANG MINZU University |
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Address after: 225800 No.11 Fengxiang Road, genggeng industrial concentration zone, Baoying County, Yangzhou City, Jiangsu Province Patentee after: Jiangsu Chuangyuan Laser Technology Co.,Ltd. Address before: 225800 No.11 Fengxiang Road, genggeng industrial concentration zone, Baoying County, Yangzhou City, Jiangsu Province Patentee before: Yangzhou Chuangyuan Laser Technology Co.,Ltd. |