CN106409706B - The detection method of dispensing situation and the testing agency of dispensing situation - Google Patents
The detection method of dispensing situation and the testing agency of dispensing situation Download PDFInfo
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- CN106409706B CN106409706B CN201510446549.8A CN201510446549A CN106409706B CN 106409706 B CN106409706 B CN 106409706B CN 201510446549 A CN201510446549 A CN 201510446549A CN 106409706 B CN106409706 B CN 106409706B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
- H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
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Abstract
The embodiment of the invention discloses the detection methods and its mechanism of a kind of dispensing situation, the colloid situation at the place to be glued to detect a workpiece, including at least the following steps: extracting one first image along positive place to be glued in face of the workpiece；One second image is extracted by the tangential direction at the place to be glued around the workpiece；And first image and second image at the same place to be glued are compared, to detect the situation of colloid.The present invention also provides a kind of testing agencies of dispensing situation, including a carrying platform, to carry one there is the workpiece at place to be glued, one first camera lens forward direction to extract the tangential direction of one first image and one second camera lens around the workpiece by the place to be glued in face of the workpiece to extract one second image in face of to be glued sentence of the workpiece.The technical solution of the embodiment of the present invention can confirm that whether the glue point situation at the place to be glued of workpiece seals really.
Description
Technical field
The present invention is the testing agency of the detection method and dispensing situation about a kind of dispensing situation, especially with regard to one
Kind of detection has the workpiece positioned at the place to be glued of side, in the attachment of colloid after horizontally injection glue drop and close
Envelope situation.
Background technique
Technology is stacked using solid to manufacture Three-dimensional wafer (3D IC), there is small encapsulation volume, high electrical efficiency and cost
Three kinds of advantages such as factor, it will drive the electronic product of next generation to make with Three-dimensional wafer technique, in the structure of Three-dimensional wafer
In dress technology, (Stacking) technology that stacks between chip is important key.
In the structure dress technology of Three-dimensional wafer, the joining technique between chip is important key.By specifically in succession
Mode and wafer thinning technology, can effectively increase space and closeness, and shorten transmission range, improve the efficiency of circuit system
With reduction energy consumption.Wafer is bonded to chip to wafer (Chip to Wafer；C2W), wafer to wafer (Chip to Chip；
C2C), wafer is to wafer (Wafer to Wafer；Three kinds of patterns such as W2W).
Two wafers engagement method briefly, including oxide fusion engagement (Oxide Fusion Bonding),
Metal to metal engages (Metal-Metal Bonding) and polymer adhesion engagement (Polymer Adhesive
The technologies such as Bonding).Later, the surrounding gap of two wafers is sealed to carry out the technique of next step using dispenser.
The place to be glued of two wafers after engagement be entirely it is horizontal, need with the dispensing of positive side, previously controlled
The mobile lifting device of Glue dripping head only adjusts the position of Glue dripping head from vertical direction, and traditional dispensing mode can not be applicable in, difficult
To deal with the demand of Three-dimensional wafer.Not only vertical mode dispensing can not be applicable in, and skewed point glue equipment is also difficult to deal with.Inclination
Shape dispensing can only oblique ejection glue drop, slightly deviation may be such that adhesive falls on wafer, and influence dispensing quality, or even damage
Bad wafer sub-assembly.
Suitably to light colloid in the place to be glued of two wafers, applicant has proposed TaiWan, China new patent
" point glue equipment " of notification number M480428, the surrounding gap of two wafers is sealed to carry out the technique of next step.Dispensing is complete
Cheng Hou, how the glue point situation at the place to be glued of certain two wafer of detection, be the new issue that industry faces.
Summary of the invention
The technical problems to be solved by the invention are to provide a kind of detection method of dispensing situation, to confirm workpiece
The glue point situation at place to be glued whether seal really.Further, the present invention is more suitable for integrating the crystalline substance of structure dress with solid
Wafer (substrate) sub-assembly of circle joining technique, has and is in after dispensing positioned at the to be glued of periphery, and whether detection colloid is true
It is real to seal above-mentioned place to be glued.
In order to achieve the above object, the present invention provides a kind of detection method of dispensing situation, to detect a workpiece to glue
Colloid situation at conjunction, including at least the following steps:
One first image is extracted along positive place to be glued in face of the workpiece；
One second image is extracted by the tangential direction at the place to be glued around the workpiece；And compare it is same should be to
First image and second image at gluing, to detect the situation of colloid.
It further comprise that a man-machine interface mould group is provided in an embodiment, which includes a display,
The first image and second image are sent to the display.
In an embodiment, including the use of one first camera lens forward direction in face of the workpiece this it is to be glued sentence extraction this
One image extracts second image along the tangential direction using one second camera lens.
In an embodiment, including the use of one first camera lens forward direction in face of the workpiece this it is to be glued sentence extraction this
One image, using a light emitting receiving module to obtain second image, wherein the light emitting receiving module is by strong light along institute
Tangential direction is stated to emit and receive shadow to become second image.
In an embodiment, including the use of one first camera lens forward direction in face of the workpiece this it is to be glued sentence extraction this
One image；And mobile first camera lens and towards second figure is extracted around the workpiece along the tangential direction
Picture.
In an embodiment, comprising steps of
Forward direction in face of the workpiece and cooperating rotate whole circle of the workpiece one circle to extract the workpiece multiple the
One image；
Cooperation records the coordinate of each the first image of the workpiece；
Mobile first camera lens to the tangential direction around the workpiece by place to be glued faces the workpiece, cooperation
The workpiece one circle is rotated to extract multiple second images of the whole circle of the workpiece；
Cooperation records the coordinate of each the second image of the workpiece；And
Whether the first image and the second image for taking out same position or angle coordinate, be compared certain to detect colloid
Fully it is attached to each place to be glued around the workpiece.
In an embodiment, including the use of one first camera lens forward direction in face of the workpiece this it is to be glued sentence extraction this
One image；And one second camera lens second image is extracted along the tangential direction, wherein second image by reflection
And light splitting is transmitted to an imaging sensor together with first image.
In an embodiment, comprising steps of
Forward direction in face of the workpiece and cooperating rotate whole circle of the workpiece one circle to extract the workpiece multiple the
One image；
Cooperation records the coordinate of each the first image of the workpiece；
Mobile first camera lens to the tangential direction around the workpiece by place to be glued faces the workpiece, cooperation
The workpiece one circle is rotated to extract multiple second images of the whole circle of the workpiece；
Cooperation records the coordinate of each the second image of the workpiece；And
Whether the first image and the second image for taking out same position or angle coordinate, be compared certain to detect colloid
Fully it is attached to each place to be glued around the workpiece.
In an embodiment, including the following steps:
One masking dodge gate of setting is between first camera lens and second camera lens；
The masking dodge gate is closed to cover the light come from the second camera lens；And
Multiple first images that the workpiece one encloses are extracted again.
In order to achieve the above object, the present invention one of scheme according to the present invention, provides a kind of detection machine of dispensing situation
Structure, including a carrying platform, one first camera lens and one second camera lens.Above-mentioned carrying platform carries a workpiece to be detected, should
Workpiece has at least one place to be glued.Above-mentioned first camera lens forward direction extracts one first in face of to be glued sentence of the workpiece
Image.Above-mentioned second camera lens extracts one the in face of the workpiece by the tangential direction at the place to be glued around the workpiece
Two images.
It further comprise a man-machine interface mould group in an embodiment, which includes a display to connect
Receive the first image and second image.
In an embodiment, the view direction of first camera lens and second camera lens is mutually perpendicular to, and is located at same water
In plane.
In an embodiment, which further includes a front mirror and a back mirror, which includes one
Spectroscope and an imaging sensor；Wherein second image passes through the front mirror and the back mirror, invests the spectroscope
And it is partially reflected to the imaging sensor.
Further include a masking dodge gate in an embodiment, setting first camera lens and second camera lens it
Between.
In order to achieve the above object, the present invention one of scheme according to the present invention, provides a kind of detection machine of dispensing situation
Structure, including a carrying platform and one first camera lens.Above-mentioned carrying platform carries a workpiece to be detected, which has extremely
A few place to be glued.Above-mentioned first camera lens forward direction extracts one first image in face of to be glued sentence of the workpiece；Wherein should
First camera lens is movable to around the workpiece by the tangential direction at the place to be glued in face of the workpiece to extract one the
Two images.
The invention has the following advantages: the detection method of dispensing situation of the invention is by extracting above-mentioned workpiece
The first image after the dispensing of place front to be glued, plus the place to be glued of above-mentioned workpiece is extracted along tangential direction dispensing after
Second image.First image and second image at the same place to be glued are compared, to detect the situation of colloid.Two images
Comparison cooperation, can avoid single image because out-of-flatness is so that focusing misalignment and image are fuzzy, and influence inspection around workpiece
The yield of survey.By front detection and the detection of tangential direction, it can be ensured that whether each place to be glued has been sealed by glue point really,
And then promote the accuracy that product quality is examined.
In order to be further understood that the present invention to reach technology, method and effect that set purpose is taken, please refers to
Below in connection with detailed description of the invention, attached drawing, it is believed that the purpose of the present invention, feature and feature, when can thus be able to deeply and
It is specific to understand, however appended attached drawing is only for reference and description with attachment, the person of being not intended to limit the present invention.
Detailed description of the invention
Fig. 1 is the perspective view of the point glue equipment 100 according to TaiWan, China new patent notification number M480428.
Fig. 2 is the flow chart of the detection method of dispensing situation of the invention.
Fig. 3 is the schematic top plan view of testing agency's first embodiment of dispensing situation of the invention.
Fig. 4 is the front-view schematic diagram of testing agency's first embodiment of dispensing situation of the invention.
Fig. 5 is the schematic top plan view of testing agency's second embodiment of dispensing situation of the invention.
Fig. 6 is the schematic top plan view of testing agency's 3rd embodiment of dispensing situation of the invention.
Fig. 7 is the schematic top plan view of testing agency's fourth embodiment of dispensing situation of the invention.
Fig. 8 is the schematic top plan view of the 5th embodiment of testing agency of dispensing situation of the invention.
Wherein, the reference numerals are as follows:
Point glue equipment 100
Workpiece 9,9 '
Wafer 9a, 9b
Place 90 to be glued
Starting point 90B
Identify notch 92
Pedestal 10
Man-machine interface mould group 12
Display 121
Keyboard 122
Mouse 123
Record and control device 14
Carrying platform 20
Camera module 30
Overlook camera lens 31
Side view camera lens 32
First camera lens 35
Second camera lens 33
First image Pa
Second image Pb, Pc
Spray Glue dripping head 40
First camera lens 51
Convex lens 511
Spectroscope 512
Imaging sensor 514
Second camera lens 52
Convex lens 521
Front mirror 522
Collector lens 523
Back mirror 524
Cover dodge gate 53
Colloid G
Mechanical arm R
The testing agency 200,300,400,500 of dispensing situation
Light emitting receiving module L
Specific embodiment
Embodiments described below refers to quantity or its fellow, unless otherwise noted, application of the invention
Scope should not be limited by its quantity or its fellow.The direction term that the present invention refers to, such as: it is left and right, front or rear etc., only
It is the direction with reference to attached drawings, is not intended to limit the invention for illustrating.
Fig. 1 is the perspective view of the point glue equipment 100 according to TaiWan, China new patent notification number M480428.The present embodiment
It is illustrated using wafer (substrate) sub-assembly that solid integrates two wafer of engagement of structure dress as workpiece 9.But the present invention is simultaneously
It is not limited to wafer sub-assembly, also can be applied to other workpieces with side gluing.It is stitched around wafer after engagement
Gap needs to carry out glued, groove (notch) or pingbian (Flat) including wafer.
Point glue equipment 100 has a pedestal 10, and the side of pedestal 10 is equipped with a man-machine interface mould group 12.Man-machine interface mould group
12 include display 121, keyboard 122 and mouse 123, but is not limited to this.Such as it is also possible to Touch Screen.Process for dispensing glue
Outline is as follows, firstly, the carrying platform 20 that workpiece 9 for dispensing glue will be needed to move point glue equipment 100 to.For the workpiece 9
Carry out visual scanning, it is therefore an objective to be the location information that the place to be glued 90 of workpiece 9 is obtained before dispensing.
The present embodiment passes through camera module 30, the location information at the place to be glued 90 to extract above-mentioned workpiece.Wherein
Camera module 30 includes a vertical view mirror for being set to above the workpiece 9 and extracting the multiple 90 horizontal position information of place to be glued
First 31 and one be placed in 9 side of workpiece side view camera lens 32, it is vertical which extracts the multiple place to be glued 90
Location information.Extract position process include rotated on carrying platform 20 workpiece 9 one enclose and be recorded in a record and
Control device 14 (as shown in Figure 3).
Referring to Fig. 1, then using one injection Glue dripping head 40, in the horizontal direction towards the workpiece 9 it is the multiple to
The multiple glue drops of 90 injections at gluing.Wherein the starting point 90B of glue spraying can be according to the turning point of the identification notch 92 of wafer.Process
In, it is rotated according to the center of workpiece 9 (for example, substrate in batch component), continues to rotate above-mentioned workpiece 9 and spray the multiple colloid
G stops above-mentioned injection Glue dripping head 40 until the workpiece 9 has been rotated by 360 °.So far, the dispensing stream of above-mentioned workpiece 9 is completed
Journey.
[testing agency's first embodiment]
Please refer to figs. 2 and 3, and Fig. 2 is the flow chart of the detection method of dispensing situation of the invention, and Fig. 3 is of the invention
The schematic top plan view of testing agency's first embodiment of dispensing situation.The detection method of dispensing situation of the invention step before this
S10 is loaded into the workpiece 9 at a place to be glued 90 after dispensing.Wherein the testing agency of dispensing situation of the invention can be with
It is the horizontal point glue equipment 100 being incorporated into Fig. 1, in this condition, workpiece 9 remains in above-mentioned after dispensing
Carrying platform 20.Another way, the testing agency of dispensing situation of the invention can be an independent detection board.Such
Situation, the workpiece 9 at the place to be glued 90 after dispensing are being loaded in another independent detection board.
As shown in Fig. 2, the detection method of dispensing situation of the invention further includes step S20, above-mentioned processing is faced along forward direction
Extract one first image in the place to be glued 90 of part 9；And step S30, along above-mentioned 9 surrounding of workpiece cutting by place 90 to be glued
Extract one second image in line direction.
The testing agency of the dispensing situation of Fig. 3 according to the present invention, above-mentioned first image, which can be, is placed in processing using above-mentioned
The side view camera lens 32 of 9 side of part is as the first camera lens to extract image.In addition, the testing agency of dispensing situation of the invention also sets
Have along 9 surrounding of the workpiece by the tangential direction at the place 90 to be glued in face of the second camera lens 33 of the workpiece 9 to extract the
Two images.
It please cooperate with reference to Fig. 4, be the front-view schematic diagram of testing agency's first embodiment of dispensing situation of the invention.Worked as
The the first image Pa for making the extraction of side view camera lens 32 of the first camera lens is exported to the display 121 of man-machine interface mould group 12.Pass through
The second image Pb that two camera lenses 33 extract is exported to the display 121 of man-machine interface mould group 12.Wherein first camera lens (that is, side
Visor head 32) and the view direction of second camera lens 33 be mutually perpendicular to, and be located at same level on.Supplementary explanation, first
Camera lens (that is, side view camera lens 32) and the second camera lens 33 can be photosensitive coupling element (CCD, Charge Coupled Device)
Or Complimentary Metal-Oxide semiconductor (CMOS, Complementary Metal-Oxide Semiconductor).In addition, being
Obtain clear image, it usually needs cooperation supplement light is to illuminate above-mentioned workpiece 9.
Later, cooperate Fig. 4 and step S40 shown in Fig. 2, compare the same place to be glued the first image Pa and
Second image Pb, to detect the situation of colloid G.The advantages of the present embodiment detection method, is as follows.For two wafers 9a, 9b
Wafer (substrate) sub-assembly, around wafer 9a, 9b, as shown in the second image Pb, it is however generally that can't be substantially flat, it may
Irregular arc-shaped is presented, therefore is easy to cause the light of light filling by outward diffusion, and leads to the paste mould for being not easy clear focusing
Image.Especially the first image Pa, the upper and lower surface of wafer 9a, 9b in the situation of above-mentioned wafer 9a, 9b, the first image Pa
Boundary, which possibly can not understand, to be imaged, therefore is not easy clearly to judge whether colloid G has been invested between wafer 9a, 9b by point really.
Therefore the present embodiment especially cooperate the second image Pb, the second image Pb to be extracted by the tangential direction of wafer 9a, 9b, can be mutual
Whether auxiliary detection has colloid G in the outer most edge of two wafer 9a, 9b really.
[testing agency's second embodiment]
Referring to Fig. 5, the schematic top plan view of testing agency's second embodiment for dispensing situation of the invention.This embodiment
Illustrate, the testing agency 200 of dispensing situation is an independent detection board, is separated with point glue equipment 100.Implement similar to upper one
Example, the testing agency 200 of dispensing situation include the first camera lens 35 and the second camera lens 33, to extract the first image Pa and the respectively
Two image Pb.
After the completion of above-mentioned 9 dispensing of workpiece, the present embodiment can use a mechanical arm R and transfer load to workpiece 9 a little
The testing agency 200 of gluey condition.Point glue equipment 100 can continue the dispensing process of another workpiece 9 '.It can divide whereby
Work and the process for accelerating dispensing and detection.Generally, the process of detection is slightly faster than process for dispensing glue, therefore the present invention can also be set
The testing agency 200 for setting one dispensing situation cooperates the point glue equipment 100 of multi-section.
[testing agency's 3rd embodiment]
Referring to Fig. 6, the schematic top plan view of testing agency's 3rd embodiment for dispensing situation of the invention.This embodiment
Illustrate, the testing agency 300 of dispensing situation be equipped with the first camera lens 35 it is positive in face of the workpiece 9 this it is to be glued sentence extraction should
First image Pa.It is with the difference of above-described embodiment, this embodiment is using a light emitting receiving module L to obtain second figure
As Pc, wherein strong light is emitted along above-mentioned tangential direction and receives shadow to become above-mentioned second by the light emitting receiving module L
Image Pc.Light emitting receiving module L can be a Laser emission and receiving module, using strong light along the tangent line side of workpiece 9
To being projeced on workpiece 9, and then form the shadow that work piece 9 covers, and receive above-mentioned shadow and as the second image Pc,
As shown in the second image Pc of Fig. 6.If not adhering to the image of colloid really, will not have in the outer ledge of two wafer 9a, 9b
Image for dispensing glue, to assist the first image Pa to judge whether to adhere to colloid really.The radiated element and receiving element of above-mentioned light
It can be and be incorporated into light emitting receiving module L, or be also possible to separated, be located at two sides of workpiece 9.
[testing agency's fourth embodiment]
Referring to Fig. 7, the schematic top plan view of testing agency's fourth embodiment for dispensing situation of the invention.With above-mentioned reality
The difference for applying example is that the present embodiment sentences extraction in face of the to be glued of the workpiece 9 using same first camera lens 35 is positive
First image Pa；And mobile first camera lens 35 and towards around the workpiece 9 along above-mentioned tangential direction to extract this
Second image Pb.In other words, on one side, the positive place to be glued for facing workpiece 9 of the first camera lens 35, in addition, the first camera lens 35 can
It is moved to and faces workpiece 9 by the tangential direction at place to be glued along 9 surrounding of workpiece to extract the second image Pb.
The present embodiment extracts the process of image, can be first forward direction and faces workpiece 9 and cooperate to rotate the workpiece 9 one circle
To extract multiple first image Pa of the whole circle of above-mentioned workpiece 9, in the process, each the first image Pa can cooperate record to add
The position of workpiece 9 or angle coordinate, such as the point on the basis of the identification notch 92 of wafer.Then, then it is the first camera lens 35 is mobile
The second image is extracted in face of workpiece 9 by the tangential direction at place to be glued to along 9 surrounding of workpiece, cooperation rotates the processing
Part 9 one is enclosed to extract multiple second image Pb of the whole circle of above-mentioned workpiece 9.Likewise, in the process, each the second image Pb
Position or the angle coordinate of record workpiece 9, such as the point on the basis of the identification notch 92 of wafer can be cooperated.Then, it takes out
Whether the first image Pa and the second image Pb of same position or angle coordinate are compared really fully attached to detect colloid
Around workpiece 9 each place to be glued.
[the 5th embodiment of testing agency]
Referring to Fig. 8, the schematic top plan view of the 5th embodiment of testing agency for dispensing situation of the invention.With above-mentioned reality
The difference for applying example is that the second camera lens 52 further includes a front mirror 522 and a back mirror 524, and the first camera lens 51 includes one
Spectroscope 512 and an imaging sensor 514.First image Pa can be imaged on imaging sensor 514 by spectroscope 512.
Second image Pb passes through front mirror 522 and back mirror 524, invests above-mentioned spectroscope 512 and is partially reflected to the image
Sensor 514.First camera lens 51 can further include a convex lens 511.Second camera lens 52 can further include a convex lens
521 and a collector lens 523.
In other words, the present embodiment extracts the first image using positive to be glued sentence in face of workpiece 9 of the first camera lens 51
Pa is to be imaged to imaging sensor 514；And the second image Pb is extracted along above-mentioned tangential direction using the second camera lens 52, wherein
The second image Pb is transmitted to an imaging sensor 514 together with first image Pa by reflection and light splitting.The present embodiment is only
Need to be arranged the i.e. recordable first image Pa and the second image Pb of an imaging sensor 514.
Separately to extract the first image Pa and the second image Pb, the present embodiment can be further in the first camera lens 51 and
A masking dodge gate 53 can be set between two camera lenses 52.First extract multiple first image Pa that above-mentioned workpiece 9 one encloses, process
In can close above-mentioned masking dodge gate 53, to cover from the light of the second camera lens 52.Then above-mentioned workpiece 9 one is extracted again
Multiple second image Pb of circle.In the process, each image can cooperate record workpiece 9 relative to the position of identification notch 92
Or angle coordinate.Then, the first image Pa and the second image Pb for taking out same position or angle coordinate are compared to detect
Whether colloid is fully attached to each place to be glued around workpiece 9 really.
The foregoing is merely preferable possible embodiments of the invention, all impartial changes done according to scope of the present invention patent
Change and modify, is all covered by the present invention.
Claims (8)
1. a kind of detection method of dispensing situation, the colloid situation at the place to be glued to detect a workpiece, which is characterized in that
Including at least the following steps:
Using one first camera lens forward direction in face of the place to be glued of the workpiece along positive place to be glued for facing the workpiece
Extract one first image；
One second image is extracted by the tangential direction at the place to be glued around the workpiece using one second camera lens, wherein should
Second image is transmitted to an imaging sensor together with first image by reflection and light splitting；And
First image and second image at the same place to be glued are compared, to detect the situation of the colloid at the place to be glued.
2. the detection method of dispensing situation as described in claim 1, which is characterized in that further comprise providing a man-machine interface
Mould group, the man-machine interface mould group include a display, and the first image and second image are sent to the display.
3. the detection method of dispensing situation as described in claim 1, which is characterized in that comprising steps of
The workpiece one circle is rotated to extract multiple first images of the whole circle of the workpiece；
Cooperation records the coordinate of each the first image of the workpiece；
The workpiece one circle is rotated to extract multiple second images of the whole circle of the workpiece；
Cooperation records the coordinate of each the second image of the workpiece；And
Whether the first image and the second image for taking out same position or angle coordinate are compared really complete to detect colloid
Ground is attached to each place to be glued around the workpiece.
4. the detection method of dispensing situation as claimed in claim 3, characterized in that it comprises the following steps:
One masking dodge gate of setting is between first camera lens and second camera lens；
The masking dodge gate is closed to cover the light come from the second camera lens；And
Multiple first images that the workpiece one encloses are extracted again.
5. a kind of testing agency of dispensing situation characterized by comprising
One carrying platform, to carry a workpiece to be detected, which has at least one place to be glued；
One first camera lens, forward direction extract one first image in face of to be glued sentence of the workpiece；And
One second camera lens, the tangential direction around the workpiece by the place to be glued is in face of the workpiece to extract one second
Image；
Wherein second camera lens further includes a front mirror and a back mirror, which includes a spectroscope and a figure
As sensor；Wherein second image pass through the front mirror and the back mirror, invest the spectroscope and be partially reflected to
The imaging sensor.
6. the testing agency of dispensing situation as claimed in claim 5, which is characterized in that further comprise a man-machine interface mould
Group, the man-machine interface mould group include a display to receive the first image and second image.
7. the testing agency of dispensing situation as claimed in claim 5, which is characterized in that first camera lens and second camera lens
View direction is mutually perpendicular to, and is located in same level.
8. the testing agency of dispensing situation as claimed in claim 5, which is characterized in that further include a masking dodge gate, set
It sets between first camera lens and second camera lens.
Priority Applications (1)
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|---|---|---|---|
| CN201510446549.8A CN106409706B (en) | 2015-07-27 | 2015-07-27 | The detection method of dispensing situation and the testing agency of dispensing situation |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510446549.8A CN106409706B (en) | 2015-07-27 | 2015-07-27 | The detection method of dispensing situation and the testing agency of dispensing situation |
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| CN106409706B true CN106409706B (en) | 2019-04-05 |
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Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5834757B2 (en) * | 2011-10-18 | 2015-12-24 | 大日本印刷株式会社 | Glue inspection device |
| TW201517192A (en) * | 2013-10-23 | 2015-05-01 | Macronix Int Co Ltd | Image inspection method of die to database |
| CN103644957B (en) * | 2013-12-03 | 2015-10-14 | 华中科技大学 | A kind of some colloid quantity measuring method based on machine vision |
| CN203750775U (en) * | 2014-01-14 | 2014-08-06 | 鸿骐新技股份有限公司 | Dispensing device |
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