CN106323541B - The detection method of X-ray tube vacuum degree - Google Patents
The detection method of X-ray tube vacuum degree Download PDFInfo
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- CN106323541B CN106323541B CN201610676742.5A CN201610676742A CN106323541B CN 106323541 B CN106323541 B CN 106323541B CN 201610676742 A CN201610676742 A CN 201610676742A CN 106323541 B CN106323541 B CN 106323541B
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- ray tube
- ammeter
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- vacuum degree
- power supply
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L21/00—Vacuum gauges
- G01L21/30—Vacuum gauges by making use of ionisation effects
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- General Physics & Mathematics (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
The present invention discloses a kind of detection method of X-ray tube vacuum degree, comprising the following steps: step 1, connects to power supply after ammeter is connected with titanium pump, the exhaust pipe of the titanium pump is connected to vacuum space in X-ray tube pipe to be detected；Step 2, the gear of the ammeter is adjusted to A grades of μ, the output voltage of the power supply is adjusted to 2-4kV, read the reading I of the ammeter0, obtain the background current I of the X-ray tube0；And step 3, in the titanium pump two sides, magnetic sheet is respectively set in mark position, and the gear of the ammeter is adjusted to mA grades, and the output voltage of the power supply is adjusted to 3.8-4.2kV, reads the reading I of the ammeteriIf Ii‑I0When=0, then P≤3 × 10‑5Pa；P is the vacuum degree of X-ray tube, unit Pa；IiFor ionic current, unit is μ A.It can judge whether the vacuum degree of the X-ray tube meets the requirements by measuring its ionic current, be controlled with production technology, the quality to X-ray tube.
Description
Technical field
The present invention relates to the detection techniques of X-ray tube vacuum degree, and in particular to the detection method of X-ray tube vacuum degree.
Background technique
For X-ray tube as electron tube, the vacuum degree in pipe directly affects the high-voltage isulation performance of pipe, vacuum
Gas ionization when spending too low also will affect the transmitting of X-ray.
Because traditional vacuum gauge cannot be introduced into the inside detection of X-ray tube, no directly detection X in current industry
The instrument of vacuum degree in ray tube pipe, so that the vacuum degree measurement of homogeneous tube has certain difficulty.
For this reason, it may be desirable to seek a kind of technical solution, at least to mitigate the above problem.
Summary of the invention
The technical problem to be solved by the present invention is to provide a kind of detection method of X-ray tube vacuum degree.
The technical issues of to solve one side, the present invention adopts the following technical scheme that.
A kind of detection method of X-ray tube vacuum degree, comprising the following steps:
Step 1, it is connected to power supply after ammeter being connected with titanium pump, the exhaust pipe of the titanium pump and X-ray tube to be detected
Vacuum space connection in managing；
Step 2, the gear of the ammeter is adjusted to A grades of μ, the output voltage of the power supply is adjusted to 2-4kV, read
Take the reading I of the ammeter0, obtain the background current I of the X-ray tube0；And
Step 3, in the titanium pump two sides, magnetic sheet is respectively set in mark position, and the gear of the ammeter is adjusted to mA
Shelves, are adjusted to 3.8-4.2kV for the output voltage of the power supply, read the reading I of the ammeteriIf Ii-I0When=0, then P
≤3×10-5Pa；
Wherein, P is the vacuum degree of X-ray tube, unit Pa；IiFor ionic current, unit is μ A.
In the step 3, if Ii-I0When > 0, according to formula Ii-I0(P-3 × 10=K-5) obtain P > 3 × 10-5Pa,
In, constant that K is positive.
In the step 3, if the reading I of the ammeteriThe gear of the ammeter is then adjusted to A grades of μ by < 0.1mA.
The present invention has following advantageous effects.
The present invention utilizes and magnetic sheet is respectively set in titanium pump two sides mark position, and applies high pressure to titanium pump, in this way in magnetic field
Under the action of strong electrical field, the charged ion in the vacuum space of X-ray tube to be detected makees high-speed motion, and with the X-ray
Gas molecule in the vacuum space of pipe collides ionization, and generated ionic current and residual gas are close under electric field action
Degree is vacuum degree approximation direct proportionality, can judge whether the vacuum degree of the X-ray tube accords with by measuring its ionic current
It closes and requires, controlled with production technology, the quality to X-ray tube.
Detailed description of the invention
Device connection diagram when Fig. 1 schematically shows detection of the present invention.
Specific embodiment
For can the technical characteristic that the present invention will be described in detail and effect, and can be realized according to the content of this specification, below
Embodiments of the present invention are further illustrated in conjunction with attached drawing.
Device connection diagram when one of device connection diagram detects when Fig. 1 illustrates numerous detections of the present invention
Embodiment.The anode terminal of negative terminal and titanium pump 3 that the structure presented from Fig. 1 can be seen that ammeter 2 electrically connects
It connecing, the positive terminal of ammeter 2 and the anode of power supply 1 are electrically connected, and the cathode of power supply 1 and the exhaust pipe of titanium pump 3 are electrically connected,
The exhaust pipe of titanium pump 3 is managed interior vacuum space with X-ray tube 5 to be detected and is connected to.
Embodiment 1
A kind of detection method of X-ray tube vacuum degree of the invention, comprising the following steps:
Step 1, it is connect after ammeter 2 being connected with titanium pump 3 with power supply 1, the exhaust pipe of the titanium pump 3 is penetrated with X to be detected
Spool 5 manages interior vacuum space connection；
Step 2, the gear of ammeter 2 is adjusted to A grades of μ, the output voltage of power supply 1 is adjusted to 2kV, reads ammeter
2 reading I0=2 μ A obtain the background current I of X-ray tube 50=2 μ A；
Step 3, magnetic sheet 4 is respectively arranged at 3 two sides mark position of titanium pump, the gear of ammeter 2 is adjusted to mA grades, it will
The output voltage of power supply 1 is adjusted to 3.8kV, reads the reading I of ammeter 2i=2 μ A, Ii-I0When=0, then P≤3 × 10-5Pa；
Wherein, P is the vacuum degree of X-ray tube 5, unit Pa；IiFor ionic current, unit is μ A.
Embodiment 2
A kind of detection method of X-ray tube vacuum degree of the invention, comprising the following steps:
Step 1, it is connect after ammeter 2 being connected with titanium pump 3 with power supply 1, the exhaust pipe of the titanium pump 3 is penetrated with X to be detected
Spool 5 manages interior vacuum space connection；
Step 2, the gear of ammeter 2 is adjusted to A grades of μ, the output voltage of power supply 1 is adjusted to 3kV, reads ammeter
2 reading I0=3 μ A obtain the background current I of X-ray tube 50=3 μ A；
Step 3, magnetic sheet 4 is respectively arranged at 3 two sides mark position of titanium pump, the gear of ammeter 2 is adjusted to mA grades, it will
The output voltage of power supply 1 is adjusted to 4.0kV, reads the reading I of ammeter 2i=3 μ A, Ii-I0When=0, then P≤3 × 10-5Pa；
Wherein, P is the vacuum degree of X-ray tube 5, unit Pa；IiFor ionic current, unit is μ A.
Embodiment 3
A kind of detection method of X-ray tube vacuum degree of the invention, comprising the following steps:
Step 1, it is connect after ammeter 2 being connected with titanium pump 3 with power supply 1, the exhaust pipe of the titanium pump 3 is penetrated with X to be detected
Spool 5 manages interior vacuum space connection；
Step 2, the gear of ammeter 2 is adjusted to A grades of μ, the output voltage of power supply 1 is adjusted to 4kV, reads ammeter
2 reading I0=5 μ A obtain the background current I of X-ray tube 50=5 μ A；
Step 3, magnetic sheet 4 is respectively arranged at 3 two sides mark position of titanium pump, the gear of ammeter 2 is adjusted to mA grades, it will
The output voltage of power supply 1 is adjusted to 4.2kV, reads the reading I of ammeter 2i=50 μ A, according to formula Ii-I0(P-3 × 10=K-5), Ii-I0=45=1 × 106(P-3×10-5) obtain P=7.5 × 10-5Pa, therefore P > 3 × 10-5；
Wherein, P is the vacuum degree of X-ray tube 5, unit Pa；IiFor ionic current, unit is μ A.
It can be seen that based on the above embodiment in 3 step 3, if Ii-I0When > 0, according to formula Ii-I0=K (P-3 ×
10-5) obtain P > 3 × 10-5Pa, wherein the constant that K is positive.
Show that the charged ion in the vacuum space of X-ray tube 5 to be detected makees high-speed motion through the foregoing embodiment,
And collide ionization with the gas molecule in the vacuum space of the X-ray tube, the generated ionic current under electric field action,
By measuring the ionic current it may determine that whether the vacuum degree of the X-ray tube 5 meets the requirements, with the production to X-ray tube
Technique, quality are controlled.
In some embodiments, in the step 3 of above-described embodiment, if the reading I of the ammeteri< 0.1mA then should
The gear of ammeter is adjusted to A grades of μ.
The constant that above-mentioned K is positive has in different value, such as certain cast according to the difference of X-ray tube cast, and K=1 ×
106μA/Pa。
It should be noted that each particular technique feature described in above-mentioned specific embodiment, in reconcilable feelings
Under condition, it can be combined by any suitable mode.In order to avoid unnecessary repetition, the present invention is to various possible groups
Conjunction mode is not described.
Above with reference to embodiment to the present invention have been described in detail, be it is illustrative rather than restrictive, do not taking off
It is within the scope of the present invention from the change and modification under present general inventive concept.
Claims (3)
1. a kind of detection method of X-ray tube vacuum degree, which comprises the following steps:
Step 1, it is connected to power supply after ammeter being connected with titanium pump, in the exhaust pipe of the titanium pump and X-ray tube pipe to be detected
Vacuum space connection；
Step 2, the gear of the ammeter is adjusted to A grades of μ, the output voltage of the power supply is adjusted to 2-4kV, reads institute
State the reading I of ammeter0, obtain the background current I of the X-ray tube0；And
Step 3, in the titanium pump two sides, magnetic sheet is respectively set in mark position, and the gear of the ammeter is adjusted to mA grades, will
The output voltage of the power supply is adjusted to 3.8-4.2kV, reads the reading I of the ammeteriIf Ii-I0When=0, then P≤3 ×
10-5Pa；
Wherein, P is the vacuum degree of X-ray tube, unit Pa；IiFor ionic current, unit is μ A.
2. the detection method of X-ray tube vacuum degree according to claim 1, which is characterized in that in the step 3, if Ii-
I0When > 0, according to formula Ii-I0(P-3 × 10=K-5) obtain P > 3 × 10-5Pa, wherein the constant that K is positive.
3. the detection method of X-ray tube vacuum degree according to claim 1 or 2, which is characterized in that in the step 3, if
The reading I of the ammeteriThe gear of the ammeter is then adjusted to A grades of μ by < 0.1mA.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610676742.5A CN106323541B (en) | 2016-08-17 | 2016-08-17 | The detection method of X-ray tube vacuum degree |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201610676742.5A CN106323541B (en) | 2016-08-17 | 2016-08-17 | The detection method of X-ray tube vacuum degree |
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| CN106323541A CN106323541A (en) | 2017-01-11 |
| CN106323541B true CN106323541B (en) | 2019-01-08 |
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| CN111024305B (en) * | 2019-12-10 | 2021-07-13 | 云南电网有限责任公司玉溪供电局 | Method for detecting vacuum degree by using THz signal |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2192032Y (en) * | 1993-10-14 | 1995-03-15 | 电子工业部第十二研究所 | Device for measuring superhigh vacuum small-size ionic pump |
| CN103742386A (en) * | 2013-12-27 | 2014-04-23 | 中国兵器工业集团第二一一研究所 | Exhaust method for obtaining ultrahigh vacuum |
| CN105517314A (en) * | 2015-12-01 | 2016-04-20 | 沈阳东软医疗***有限公司 | Accelerating tube vacuum degree detection device for linear accelerator |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10314538A1 (en) * | 2003-03-31 | 2004-10-28 | Siemens Ag | X-ray tube pressure monitoring method in which the pressure inside the tube is measured, based on measurements of heating and tube currents and their comparison with calibration values, to predict remaining tube service life |
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2016
- 2016-08-17 CN CN201610676742.5A patent/CN106323541B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2192032Y (en) * | 1993-10-14 | 1995-03-15 | 电子工业部第十二研究所 | Device for measuring superhigh vacuum small-size ionic pump |
| CN103742386A (en) * | 2013-12-27 | 2014-04-23 | 中国兵器工业集团第二一一研究所 | Exhaust method for obtaining ultrahigh vacuum |
| CN105517314A (en) * | 2015-12-01 | 2016-04-20 | 沈阳东软医疗***有限公司 | Accelerating tube vacuum degree detection device for linear accelerator |
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