CN106323541A - Method for detecting vacuum degree of X-ray tube - Google Patents
Method for detecting vacuum degree of X-ray tube Download PDFInfo
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- CN106323541A CN106323541A CN201610676742.5A CN201610676742A CN106323541A CN 106323541 A CN106323541 A CN 106323541A CN 201610676742 A CN201610676742 A CN 201610676742A CN 106323541 A CN106323541 A CN 106323541A
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- China
- Prior art keywords
- ray tube
- ammeter
- vacuum
- power supply
- titanium pump
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L21/00—Vacuum gauges
- G01L21/30—Vacuum gauges by making use of ionisation effects
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
The invention discloses a method for detecting the vacuum degree of an X-ray tube, and the method comprises the following steps: 1, enabling an ammeter and a titanium pump to be connected in series, and then to be connected with a power supply, wherein an exhaust pipe of the titanium pump is communicated with the internal vacuum space of the X-ray tube; 2, adjusting the level of the ammeter to the microamp level, and adjusting the output voltage of the power supply to 2-4kV, recording the reading of the ammeter as I0, and obtaining the background current I0 of the X-ray tube; 3, respectively setting magnetic pieces at marking positions at two sides of the titanium pump, adjusting the level of the ammeter to the milliampere level, adjusting the output voltage of the power supply to 3.8-4.2kV, and recording the reading of the ammeter as Ii. If Ii-I0=0, P<=3*10<-5>Pa, wherein P is the vacuum degree of the X-ray tube with the unit Pa, and Ii is an ionic current with the unit microamp. The method can judge whether the vacuum degree of the X-ray tube meets the requirement or not through measuring the ionic current of the X-ray tube, and carries out the control of the production technology and quality of the X-ray tube.
Description
Technical field
The present invention relates to the detection technique of X-ray tube vacuum, be specifically related to the detection method of X-ray tube vacuum.
Background technology
X-ray tube is as electron tube, and the vacuum in its pipe directly affects the High-Voltage Insulation performance of pipe, vacuum
Gas ionization when spending the lowest also can affect the transmitting of X-ray.
Because traditional vacuum gauge cannot be introduced into the inside detection of X-ray tube, in current industry, the most directly detect X
The instrument of vacuum in ray tube pipe so that the vacuum degree measurement of homogeneous tube has certain difficulty.
For this reason, it may be desirable to seek a kind of technical scheme, at least to alleviate the problems referred to above.
Summary of the invention
The technical problem to be solved in the present invention is to provide the detection method of a kind of X-ray tube vacuum.
For solving technical problem on the one hand, the present invention adopts the following technical scheme that.
The detection method of a kind of X-ray tube vacuum, comprises the following steps:
Step 1, is connected with power supply after being connected with titanium pump by ammeter, the exhaustor of this titanium pump and X-ray tube to be detected
Vacuum space connection in pipe；
Step 2, is adjusted to μ A shelves by the gear of described ammeter, regulates the output voltage of described power supply to 2-4kV, reads
Take the reading I of described ammeter0, obtain the background current I of described X-ray tube0；And
Step 3, in described titanium pump both sides, mark position is respectively provided with magnetic sheet, and the gear of described ammeter is adjusted to mA
Shelves, regulate the output voltage of described power supply to 3.8-4.2kV, read the reading I of described ammeteriIf, Ii-I0When=0, then P
≤3×10-5Pa；
Wherein, P is the vacuum of X-ray tube, and unit is Pa；IiFor ion current, unit is μ A.
In described step 3, if Ii-I0During ＞ 0, according to formula Ii-I0=K (P-3 × 10-5) obtain P ＞ 3 × 10-5Pa, its
In, K is positive constant.
In described step 3, if the reading I of described ammeteri＜ 0.1mA, then be adjusted to μ A shelves by the gear of this ammeter.
The present invention has following Advantageous Effects.
The present invention utilizes and is respectively provided with magnetic sheet in titanium pump both sides mark position, and applies high pressure to titanium pump, so in magnetic field
With under the effect of highfield, the charged ion in the vacuum space of X-ray tube to be detected makees high-speed motion, and with this X-ray
Gas molecule in the vacuum space of pipe collides ionization, and under electric field action, produced ion current is close with residual gas
Degree i.e. vacuum is approximated to proportional relationship, just can judge by measuring its ion current whether the vacuum of this X-ray tube accords with
Close requirement, so that the production technology of X-ray tube, quality to be controlled.
Accompanying drawing explanation
Device connection diagram when Fig. 1 schematically shows the detection that the present invention relates to.
Detailed description of the invention
For technical characteristic and effect of the present invention can be described in detail, and can realize according to the content of this specification, below
In conjunction with accompanying drawing, embodiments of the present invention are further illustrated.
Device connection diagram during a kind of detection in device connection diagram when Fig. 1 illustrates the numerous detection that the present invention relates to
Embodiment.The structure presented from Fig. 1 is it can be seen that the negative terminal of ammeter 2 electrically connects with the anode terminal of titanium pump 3
Connecing, the positive terminal of ammeter 2 is electrically connected with the positive pole of power supply 1, and the negative pole of power supply 1 is electrically connected with the exhaustor of titanium pump 3,
The exhaustor of titanium pump 3 is managed interior vacuum space with X-ray tube 5 to be detected and is connected.
Embodiment 1
The detection method of a kind of X-ray tube vacuum of the present invention, comprises the following steps:
Step 1, is connected with power supply 1 after being connected with titanium pump 3 by ammeter 2, and the exhaustor of this titanium pump 3 is penetrated with X to be detected
Spool 5 manages the connection of interior vacuum space；
Step 2, is adjusted to μ A shelves by the gear of ammeter 2, regulates the output voltage of power supply 1 to 2kV, reads ammeter
The reading I of 20=2 μ A, obtain the background current I of X-ray tube 50=2 μ A；
Step 3, is respectively arranged at titanium pump 3 both sides mark position by magnetic sheet 4, and the gear of ammeter 2 is adjusted to mA shelves, will
The output voltage regulation of power supply 1, to 3.8kV, reads the reading I of ammeter 2i=2 μ A, Ii-I0When=0, then P≤3 × 10-5Pa；
Wherein, P is the vacuum of X-ray tube 5, and unit is Pa；IiFor ion current, unit is μ A.
Embodiment 2
The detection method of a kind of X-ray tube vacuum of the present invention, comprises the following steps:
Step 1, is connected with power supply 1 after being connected with titanium pump 3 by ammeter 2, and the exhaustor of this titanium pump 3 is penetrated with X to be detected
Spool 5 manages the connection of interior vacuum space；
Step 2, is adjusted to μ A shelves by the gear of ammeter 2, regulates the output voltage of power supply 1 to 3kV, reads ammeter
The reading I of 20=3 μ A, obtain the background current I of X-ray tube 50=3 μ A；
Step 3, is respectively arranged at titanium pump 3 both sides mark position by magnetic sheet 4, and the gear of ammeter 2 is adjusted to mA shelves, will
The output voltage regulation of power supply 1, to 4.0kV, reads the reading I of ammeter 2i=3 μ A, Ii-I0When=0, then P≤3 × 10-5Pa；
Wherein, P is the vacuum of X-ray tube 5, and unit is Pa；IiFor ion current, unit is μ A.
Embodiment 3
The detection method of a kind of X-ray tube vacuum of the present invention, comprises the following steps:
Step 1, is connected with power supply 1 after being connected with titanium pump 3 by ammeter 2, and the exhaustor of this titanium pump 3 is penetrated with X to be detected
Spool 5 manages the connection of interior vacuum space；
Step 2, is adjusted to μ A shelves by the gear of ammeter 2, regulates the output voltage of power supply 1 to 4kV, reads ammeter
The reading I of 20=5 μ A, obtain the background current I of X-ray tube 50=5 μ A；
Step 3, is respectively arranged at titanium pump 3 both sides mark position by magnetic sheet 4, and the gear of ammeter 2 is adjusted to mA shelves, will
The output voltage regulation of power supply 1, to 4.2kV, reads the reading I of ammeter 2i=50 μ A, according to formula Ii-I0=K (P-3 × 10-5), Ii-I0=45=1 × 106(P-3×10-5) obtain P=7.5 × 10-5Pa, therefore P ＞ 3 × 10-5；
Wherein, P is the vacuum of X-ray tube 5, and unit is Pa；IiFor ion current, unit is μ A.
As can be seen here, in step 3 based on above-described embodiment 3, if Ii-I0During ＞ 0, according to formula Ii-I0=K (P-3 ×
10-5) obtain P ＞ 3 × 10-5Pa, wherein, K is positive constant.
Being shown by above-described embodiment, the charged ion in the vacuum space of X-ray tube 5 to be detected makees high-speed motion,
And collide ionization with the gas molecule in the vacuum space of this X-ray tube, produced ion current under electric field action,
By measuring this ion current it may determine that whether the vacuum of this X-ray tube 5 meets the requirements, with the production to X-ray tube
Technique, quality are controlled.
In certain embodiments, in the step 3 of above-described embodiment, if the reading I of described ammeteri＜ 0.1mA then should
The gear of ammeter is adjusted to μ A shelves.
Above-mentioned K is positive constant, has different value according to the difference of X-ray tube cast, such as in certain cast, K=1 ×
106μA/Pa。
It should be noted that each the concrete technical characteristic described in above-mentioned detailed description of the invention, in reconcilable feelings
Under condition, can by any applicable by the way of be combined.In order to avoid unnecessary repetition, the present invention is to various possible groups
Conjunction mode is not described further.
Above with reference to embodiment to the present invention have been described in detail, it is illustrative and not restrictive, is not taking off
Changing and modifications under present general inventive concept, all within protection scope of the present invention.
Claims (3)
1. the detection method of an X-ray tube vacuum, it is characterised in that comprise the following steps:
Step 1, is connected with power supply after being connected with titanium pump by ammeter, in the exhaustor of this titanium pump and X-ray tube pipe to be detected
Vacuum space connects；
Step 2, is adjusted to μ A shelves by the gear of described ammeter, regulates the output voltage of described power supply to 2-4kV, reads institute
State the reading I of ammeter0, obtain the background current I of described X-ray tube0；And
Step 3, in described titanium pump both sides, mark position is respectively provided with magnetic sheet, and the gear of described ammeter is adjusted to mA shelves, will
The output voltage of described power supply regulates to 3.8-4.2kV, reads the reading I of described ammeteriIf, Ii-I0When=0, then P≤3 ×
10-5Pa；
Wherein, P is the vacuum of X-ray tube, and unit is Pa；IiFor ion current, unit is μ A.
The detection method of X-ray tube vacuum the most according to claim 1, it is characterised in that in described step 3, if Ii-
I0During ＞ 0, according to formula Ii-I0=K (P-3 × 10-5) obtain P ＞ 3 × 10-5Pa, wherein, K is positive constant.
The detection method of X-ray tube vacuum the most according to claim 1 and 2, it is characterised in that in described step 3, if
The reading I of described ammeteri＜ 0.1mA, then be adjusted to μ A shelves by the gear of this ammeter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610676742.5A CN106323541B (en) | 2016-08-17 | 2016-08-17 | The detection method of X-ray tube vacuum degree |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610676742.5A CN106323541B (en) | 2016-08-17 | 2016-08-17 | The detection method of X-ray tube vacuum degree |
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| Publication Number | Publication Date |
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| CN106323541A true CN106323541A (en) | 2017-01-11 |
| CN106323541B CN106323541B (en) | 2019-01-08 |
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| CN201610676742.5A Active CN106323541B (en) | 2016-08-17 | 2016-08-17 | The detection method of X-ray tube vacuum degree |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111024305A (en) * | 2019-12-10 | 2020-04-17 | 云南电网有限责任公司玉溪供电局 | Method for detecting vacuum degree by using THz signal |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2192032Y (en) * | 1993-10-14 | 1995-03-15 | 电子工业部第十二研究所 | Device for measuring superhigh vacuum small-size ionic pump |
| US20040240617A1 (en) * | 2003-03-31 | 2004-12-02 | Josef Deuringer | Device to detect pressure in an x-ray tube |
| CN103742386A (en) * | 2013-12-27 | 2014-04-23 | 中国兵器工业集团第二一一研究所 | Exhaust method for obtaining ultrahigh vacuum |
| CN105517314A (en) * | 2015-12-01 | 2016-04-20 | 沈阳东软医疗***有限公司 | Accelerating tube vacuum degree detection device for linear accelerator |
-
2016
- 2016-08-17 CN CN201610676742.5A patent/CN106323541B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2192032Y (en) * | 1993-10-14 | 1995-03-15 | 电子工业部第十二研究所 | Device for measuring superhigh vacuum small-size ionic pump |
| US20040240617A1 (en) * | 2003-03-31 | 2004-12-02 | Josef Deuringer | Device to detect pressure in an x-ray tube |
| CN103742386A (en) * | 2013-12-27 | 2014-04-23 | 中国兵器工业集团第二一一研究所 | Exhaust method for obtaining ultrahigh vacuum |
| CN105517314A (en) * | 2015-12-01 | 2016-04-20 | 沈阳东软医疗***有限公司 | Accelerating tube vacuum degree detection device for linear accelerator |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111024305A (en) * | 2019-12-10 | 2020-04-17 | 云南电网有限责任公司玉溪供电局 | Method for detecting vacuum degree by using THz signal |
| CN111024305B (en) * | 2019-12-10 | 2021-07-13 | 云南电网有限责任公司玉溪供电局 | Method for detecting vacuum degree by using THz signal |
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| CN106323541B (en) | 2019-01-08 |
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Effective date of registration: 20211223 Address after: 610000 floor 1, building 3, No. 99, Huanghe Road, Xindu street, Xindu District, Chengdu, Sichuan Patentee after: Chengdu kaisaier Technology Co.,Ltd. Address before: No. 99, Huanghe Road, Xindu Industrial East District, Chengdu, Sichuan 610500 Patentee before: CHENGDU KAISAIER ELECTRONICS Co.,Ltd. |