CN106298575B - A kind of separation grabbing device of integrated circuit board detection line - Google Patents

A kind of separation grabbing device of integrated circuit board detection line Download PDF

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Publication number
CN106298575B
CN106298575B CN201610865164.XA CN201610865164A CN106298575B CN 106298575 B CN106298575 B CN 106298575B CN 201610865164 A CN201610865164 A CN 201610865164A CN 106298575 B CN106298575 B CN 106298575B
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Prior art keywords
circuit board
integrated circuit
passage
feeding
sliding
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CN201610865164.XA
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CN106298575A (en
Inventor
李风浪
李舒歆
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Jiangsu Huibo Electromechanical Technology Co ltd
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Xuzhou Hui Bo Electromechanical Technology Co Ltd
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Priority to CN201610865164.XA priority Critical patent/CN106298575B/en
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/10Measuring as part of the manufacturing process
    • H01L22/12Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2221/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
    • H01L2221/67Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2221/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
    • H01L2221/67Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
    • H01L2221/683Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manipulator (AREA)

Abstract

The invention discloses a kind of separation grabbing device of integrated circuit board detection line, including feeding-passage, output mechanism and grasping mechanism, output mechanism is located at the top of feeding-passage, and grasping mechanism is located at the side of feeding-passage;The integrated circuit board of stacking promotes feeding-passage by pushing plate with heeling condition, feeding-passage includes feedboard, feedboard two sides are respectively arranged with rib, width between rib is more than or equal to the width of integrated circuit board, the end of feedboard is provided with gas hole, gas hole is uniformly distributed, and the lower part of gas hole, which has, provides the compression pump of aerodynamic force.The present invention is separated the integrated circuit board of stacking using the gas hole on feeding-passage one by one, gap is formed, to carry out the crawl of grasping mechanism, and then integrated circuit board is placed on output mechanism to carry out detection operation, the apparatus structure is simple, high degree of automation.

Description

A kind of separation grabbing device of integrated circuit board detection line
Technical field:
The present invention relates to integrated circuit board detection technique fields, and in particular to a kind of separation of integrated circuit board detection line is grabbed Take device.
Background technique:
Integrated circuit be later period the 1950s rise a new technology, use certain technique by transistor, The element wirings such as resistance, capacitor and inductance connect, and in order to ensure globality and leakproofness, can will also be collected using encapsulation technology At circuit board package in microstructure.In sciemtifec and technical sphere, every sci-tech product requires light, thin, short and small, the body of integrated circuit Product be it is smaller more ideal, comply with the demand of product.Therefore, a kind of encapsulation technology identical with wafer size, can make to integrate Volume-diminished after circuit package, and reach light and short demand.
Integrated circuit board is one piece of block silicon wafer after cutting, in the forming process of silicon wafer and in cutting process, easily Abrading section or slight crack, these defects are generated on silicon wafer can reduce the usability of integrated circuit board in subsequent use process Energy and service life.Silicon wafer is piled up by latter stacking form is cut, and how separating the silicon wafer of stacking and carrying out detection is ability The technical problem in domain.
Summary of the invention:
The purpose of the present invention is to the deficiencies in the prior art, provide a kind of separation crawl of integrated circuit board detection line Device.
Technology solution of the invention is as follows:
A kind of separation grabbing device of integrated circuit board detection line includes feeding-passage, output mechanism and grasping mechanism, Output mechanism is located at the top of feeding-passage, and grasping mechanism is located at the side of feeding-passage;The integrated circuit board of stacking is to tilt State promotes feeding-passage by pushing plate, and feeding-passage includes feedboard, and feedboard two sides are respectively arranged with rib, rib it Between width be more than or equal to the width of integrated circuit board, the end of feedboard is provided with gas hole, and gas hole is uniformly distributed, and blows The lower part in hole, which has, provides the compression pump of aerodynamic force, and compression pump is fixed by mounting base and feedboard, and the most end of feedboard is set It is equipped with barrier plate, barrier plate is made of elastic material;Grasping mechanism includes vertical fixed plate, and vertical fixed plate side is formed with One inverted T shaped track, sliding is provided with sliding block on the first inverted T shaped track, and sliding block lower part is formed with perpendicular to the first inverted T shaped track Second inverted T shaped track, sliding is provided with sliding support on the second inverted T shaped track, and sliding support side is connected with first flange, the One flange side is connected with telescopic rod, and telescopic rod end is rotatablely hinged with gripping head, and gripping head includes mounting plate, and the four of mounting plate Angle offers promptly sliding slot, and promptly sliding is provided with sliding bar in sliding slot, promptly hides in sliding slot and is provided with opening and closing cylinder, opening and closing The piston rod of cylinder is fixedly connected with sliding bar, and the end of sliding bar is provided with vacuum chuck.
Vacuum chuck includes that upper gas circuit portion, lower gas circuit portion and elastic disk body, lower gas circuit portion are located at the lower part in upper gas circuit portion, The two is connected by gas scattering component, and upper gas circuit portion includes upper body, main gas circuit and auxiliary air passage, and lower gas circuit portion includes Lower gas circuit, lower gas circuit extend outwardly from gas scattering component, and elastic disk body and upper body are tightly connected.
Elastic disk body is made of rubber, is horn-like.
Output mechanism includes roller and belt, and belt is set on roller, and belt two sides are provided with blend stop, belt Laterally homogeneous be provided with parting bead.
Belt is internally provided with wearing layer and protrusion, and the outer surface of roller is provided with engaging tooth, engaging tooth and raised phase Mutually cooperation.
The roller of output mechanism is bored roll, is internally provided with variable-frequency motor, speed reducer, motor sleeve, the second method Blue, third flange, variable-frequency motor are fixedly connected with speed reducer, and variable-frequency motor is arranged inside motor sleeve, and second flange passes through Screw is fixedly connected with speed reducer and motor sleeve respectively;The right part of speed reducer is provided with a flat key, speed reducer passes through flat Key and third flanged joint.
The beneficial effects of the present invention are: the present invention using the gas hole on feeding-passage by the integrated circuit board of stacking by One separation, forms gap, to carry out the crawl of grasping mechanism, and then integrated circuit board is placed on output mechanism to carry out Detection operation, the apparatus structure is simple, high degree of automation.
Detailed description of the invention:
Fig. 1 is the structural diagram of the present invention;
Fig. 2 is the structural schematic diagram of feeding-passage;
Fig. 3 is the side view of feeding-passage;
Fig. 4 is the structural schematic diagram of grasping mechanism;
Fig. 5 is the structural schematic diagram of vacuum chuck;
Fig. 6 is the structural schematic diagram of output mechanism.
Specific embodiment:
In order to keep the above objects, features and advantages of the present invention more obvious and easy to understand, with reference to the accompanying drawing to this hair Bright specific embodiment is described in detail.
As shown in figures 1 to 6, a kind of separation grabbing device of integrated circuit board detection line includes feeding-passage 1, output mechanism 3 And grasping mechanism 2, output mechanism 3 are located at the top of feeding-passage 1, grasping mechanism 2 is located at the side of feeding-passage 1;Stacking Integrated circuit board 4 with heeling condition by pushing plate 10 promote feeding-passage 1, feeding-passage 1 include feedboard 11, feedboard 11 Two sides are respectively arranged with rib 12, and the width between rib 12 is more than or equal to the width of integrated circuit board 4, the end of feedboard 11 End is provided with gas hole 14, and gas hole 14 is uniformly distributed, and the lower part of gas hole 14, which has, provides the compression pump 19 of aerodynamic force, compression Pump 19 is fixed by mounting base 15 and feedboard 11, and the most end of feedboard 11 is provided with barrier plate 13, and barrier plate 13 is elasticity Material is made;Grasping mechanism 2 includes vertical fixed plate 20, and vertical 20 side of fixed plate is formed with the first inverted T shaped track 201, the Sliding is provided with sliding block 21 on one inverted T shaped track 201, and 21 lower part of sliding block is formed with second perpendicular to the first inverted T shaped track 201 Inverted T shaped track 211, sliding is provided with sliding support 22 on the second inverted T shaped track 211, and 22 side of sliding support is connected with first Flange, first flange side are connected with telescopic rod 23, and 23 end of telescopic rod is rotatablely hinged with gripping head 24, and gripping head 24 includes peace Loading board 25, the quadrangle of mounting plate 25 offer promptly sliding slot 251, and promptly sliding is provided with sliding bar 26 in sliding slot 251, promptly slide It is hidden in slot 251 and is provided with opening and closing cylinder, the piston rod of opening and closing cylinder is fixedly connected with sliding bar 26, and the end of sliding bar 26 is set It is equipped with vacuum chuck 27.
Vacuum chuck 27 includes upper gas circuit portion 271, lower gas circuit portion 275 and elastic disk body 274, and lower gas circuit portion 275 is located at The lower part in upper gas circuit portion 271, the two are connected by gas scattering component 276, and upper gas circuit portion 271 includes upper body, main gas circuit 272 and auxiliary air passage 273, lower gas circuit portion 275 includes lower gas circuit 277, and lower gas circuit 277 is from gas scattering component 276 to extension It stretches, elastic disk body 274 is tightly connected with upper body.
Elastic disk body 274 is made of rubber, is horn-like.
Output mechanism 3 includes roller 31 and belt 32, and belt 32 is set on roller 31, and 32 two sides of belt are respectively provided with There is blend stop 34, the laterally homogeneous of belt 32 is provided with parting bead 33.
Belt 32 is internally provided with wearing layer and protrusion, and the outer surface of roller 31 is provided with engaging tooth, engaging tooth with it is convex It rises and cooperates.
The roller 31 of output mechanism 3 is bored roll, is internally provided with variable-frequency motor, speed reducer, motor sleeve, second Flange, third flange, variable-frequency motor are fixedly connected with speed reducer, and variable-frequency motor is arranged inside motor sleeve, and second flange is logical Screw is crossed to be fixedly connected with speed reducer and motor sleeve respectively;The right part of speed reducer is provided with a flat key, speed reducer passes through Flat key and third flanged joint.
The embodiment is to be illustrated the present invention, and is not intended to limit the present invention.Anyone skilled in the art Without departing from the spirit and scope of the present invention, it modifies to the embodiment, therefore rights protection model of the invention It encloses, should be as listed in the claims of the present invention.

Claims (6)

1. a kind of separation grabbing device of integrated circuit board detection line, it is characterised in that: including feeding-passage (1), output mechanism (3) and grasping mechanism (2), output mechanism (3) are located at the top of feeding-passage (1), and grasping mechanism (2) is located at feeding-passage (1) side;The integrated circuit board (4) of stacking promotes feeding-passage (1) by pushing plate (10) with heeling condition, feeding-passage It (1) include feedboard (11), feedboard (11) two sides are respectively arranged with rib (12), and the width between rib (12) is greater than etc. Width in integrated circuit board (4), the end of feedboard (11) are provided with gas hole (14), and gas hole (14) is uniformly distributed, and are blown The lower part of stomata (14), which has, provides the compression pump (19) of aerodynamic force, and compression pump (19) passes through mounting base (15) and feedboard (11) Fixed, the most end of feedboard (11) is provided with barrier plate (13), and barrier plate (13) is made of elastic material;Grasping mechanism (2) Including vertical fixed plate (20), vertical fixed plate (20) side is formed with the first inverted T shaped track (201), the first inverted T shaped track (201) on sliding be provided with sliding block (21), sliding block (21) lower part be formed with perpendicular to the first inverted T shaped track (201) second fall T Type track (211) is slided on the second inverted T shaped track (211) and is provided with sliding support (22), and sliding support (22) side is connected with First flange, first flange side are connected with telescopic rod (23), and telescopic rod (23) end is rotatablely hinged with gripping head (24), crawl Head (24) includes mounting plate (25), and the quadrangle of mounting plate (25) offers promptly sliding slot (251), promptly sliding in sliding slot (251) Sliding bar (26) are provided with, is promptly hidden in sliding slot (251) and is provided with opening and closing cylinder, the piston rod and sliding bar of opening and closing cylinder (26) it is fixedly connected, the end of sliding bar (26) is provided with vacuum chuck (27).
2. a kind of separation grabbing device of integrated circuit board detection line according to claim 1, it is characterised in that: vacuum is inhaled Disk (27) includes upper gas circuit portion (271), lower gas circuit portion (275) and elastic disk body (274), and lower gas circuit portion (275) is located at upper gas The lower part in road portion (271), the two are connected by gas scattering component (276), and upper gas circuit portion (271) includes upper body, main gas Road (272) and auxiliary air passage (273), lower gas circuit portion (275) include lower gas circuit (277), and lower gas circuit (277) is from gas scattering portion Part (276) extends outwardly, and elastic disk body (274) and upper body are tightly connected.
3. a kind of separation grabbing device of integrated circuit board detection line according to claim 1, it is characterised in that: output machine Structure (3) includes roller (31) and belt (32), and belt (32) is set on roller (31), and belt (32) two sides are provided with Blend stop (34), the laterally homogeneous of belt (32) are provided with parting bead (33).
4. a kind of separation grabbing device of integrated circuit board detection line according to claim 1, it is characterised in that: output machine The roller (31) of structure (3) is bored roll, is internally provided with variable-frequency motor, speed reducer, motor sleeve, second flange, third Flange, variable-frequency motor are fixedly connected with speed reducer, and variable-frequency motor is arranged inside motor sleeve, and second flange is distinguished by screw It is fixedly connected with speed reducer and motor sleeve;The right part of speed reducer is provided with a flat key, speed reducer passes through flat key and third Flanged joint.
5. a kind of separation grabbing device of integrated circuit board detection line according to claim 3, it is characterised in that: belt (32) be internally provided with wearing layer and protrusion, the outer surface of roller (31) is provided with engaging tooth, engaging tooth and raised phase interworking It closes.
6. a kind of separation grabbing device of integrated circuit board detection line according to claim 2, it is characterised in that: resilient disc Body (274) is made of rubber, is horn-like.
CN201610865164.XA 2016-09-25 2016-09-25 A kind of separation grabbing device of integrated circuit board detection line Active CN106298575B (en)

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CN201610865164.XA CN106298575B (en) 2016-09-25 2016-09-25 A kind of separation grabbing device of integrated circuit board detection line

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Application Number Priority Date Filing Date Title
CN201610865164.XA CN106298575B (en) 2016-09-25 2016-09-25 A kind of separation grabbing device of integrated circuit board detection line

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Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108674989A (en) * 2018-07-20 2018-10-19 芜湖新瑟安智能科技有限公司 A kind of vacuum cup carried for plate
CN109132544A (en) * 2018-07-20 2019-01-04 芜湖新瑟安智能科技有限公司 A kind of vacuum chuck for glass transporting device
CN111571713A (en) * 2020-05-13 2020-08-25 *** Perforating equipment is used in plastic products processing

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3737489B2 (en) * 2003-04-03 2006-01-18 株式会社トパック Powder packing machine
CN201140393Y (en) * 2007-12-05 2008-10-29 东莞彩显有机发光科技有限公司 Mechanical arm for grasping OLED device
CN203450833U (en) * 2013-08-15 2014-02-26 重庆朗正科技有限公司 Annular piece alternating feeding device

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101537568B (en) * 2009-04-21 2010-09-08 陈庆汉 Luminous character enclosing machine

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3737489B2 (en) * 2003-04-03 2006-01-18 株式会社トパック Powder packing machine
CN201140393Y (en) * 2007-12-05 2008-10-29 东莞彩显有机发光科技有限公司 Mechanical arm for grasping OLED device
CN203450833U (en) * 2013-08-15 2014-02-26 重庆朗正科技有限公司 Annular piece alternating feeding device

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Address after: 221300 Jiangsu Xuzhou Pizhou City Hall Town Industrial Park

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Address after: 221300 Jiangsu Xuzhou Pizhou City Hall Town Industrial Park

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Patentee before: XUZHOU HUIBO ELECTROMECHANICAL TECHNOLOGY Co.,Ltd.

CP01 Change in the name or title of a patent holder