CN106295811A - Equipment time-based maintenance effect analysis method - Google Patents
Equipment time-based maintenance effect analysis method Download PDFInfo
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- CN106295811A CN106295811A CN201610613017.3A CN201610613017A CN106295811A CN 106295811 A CN106295811 A CN 106295811A CN 201610613017 A CN201610613017 A CN 201610613017A CN 106295811 A CN106295811 A CN 106295811A
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- G—PHYSICS
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- G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
- G06Q10/00—Administration; Management
- G06Q10/20—Administration of product repair or maintenance
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
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Abstract
The invention provides a kind of equipment time-based maintenance effect analysis method, including: obtain board equipment time-based maintenance information within a predetermined period of time；Obtain each product white pixel value in predetermined amount of time；Before and after carrying out equipment time-based maintenance based on two way classification, white pixel value is grouped；Before and after each processes the equipment time-based maintenance of step, MR value is contrasted by HC formula calculator platform；Relative analysis before and after board equipment time-based maintenance is carried out based on HC formula；The comprehensive condition of board many secondary devices time-based maintenance in this predetermined amount of time is judged based on Apriori algorithm.
Description
Technical field
The present invention relates to field of semiconductor manufacture and areas of information technology, it is more particularly related to one sets
Standby time-based maintenance effect analysis method.
Background technology
For Mu Qian, it is generally required to technique board is carried out time-based maintenance.For the analysis of time-based maintenance effect, existing machine
The analysis only carrying out equipment time-based maintenance effect quality according to simple equipment index, such analysis side are analyzed in platform time-based maintenance
Formula can only be conceived to the maintenance whether Analysis to reach standard of single board, for the quality of product processing procedure without reference to meaning.With
Time, the analytical model of this single cannot meet the management and control that engineer analyzes for board long-time stability.
Accordingly, it is desirable to can provide a kind of be capable of the long-time stability of board are effectively analyzed set
Standby time-based maintenance effect analysis method.
Summary of the invention
The technical problem to be solved is for there is drawbacks described above in prior art, it is provided that one is capable of
The equipment time-based maintenance effect analysis method that the long-time stability of board are effectively analyzed.
In order to realize above-mentioned technical purpose, according to the present invention, it is provided that a kind of equipment time-based maintenance effect analysis method, bag
Include:
First step: obtain board equipment time-based maintenance information within a predetermined period of time；
Second step: obtain each product white pixel value in predetermined amount of time；
Third step: before and after carrying out equipment time-based maintenance based on two way classification, white pixel value is grouped；
4th step: contrast MR before and after each processes the equipment time-based maintenance of step by HC formula calculator platform
Value；
5th step: judge the comprehensive of board many secondary devices time-based maintenance in this predetermined amount of time based on Apriori algorithm
Situation.
Preferably, board equipment within a predetermined period of time is obtained at first step from equipment time-based maintenance information database
Time-based maintenance information.
Preferably, each product white pixel value in predetermined amount of time is obtained at second step from white pixel Value Data storehouse.
Preferably, in the 4th step, according to white pixel characteristic, it is grouped into the equipment time-based maintenance that white pixel average is minimum
Benchmark, remaining is with reference to group；
Calculate:
MR1=ABS (Avg (Y)-Avg (X))/Std (X)
MR2=Std (Y)/Std (X)
Wherein, X, Y are grouped before and after being respectively equipment time-based maintenance, and Avg (X) < Avg (Y).
Preferably, in the 4th step, at MR1 > 100% or MR2 > 1.5 time judge board periodically protect at this step equipment
Instability after supporting, otherwise judges that board is stable after this step equipment time-based maintenance.
Preferably, in the 5th step, calculate support supp (X)=occur (X)/count (D)=P (X)；Wherein supp
(X)∈[-1,1]；In units of board, Occur (X)=Bad PM Cnt Good PM Cnt；Bad PM Cnt represents equipment
The time-based maintenance frequency of failure, Good PM Cnt represents equipment time-based maintenance number of success；Count (D)=Total PM Cnt；
Total PM Cnt represents equipment time-based maintenance total degree.
Preferably, in the 6th step, if supp (X) > 0, then judge that this board integral device in this predetermined amount of time is fixed
Phase maintenance effect is deteriorated, otherwise for judging that this board integral device time-based maintenance effect in this predetermined amount of time improves.
Preferably, in the 6th step, generate the report of board long-time stability.
The present invention solves the problem that existing equipment time-based maintenance cannot be carried out the monitoring of long-term board stability.The present invention is led to
Cross the correlation analysis between processing procedure index and the equipment of each product, obtain the board equipment time-based maintenance impact on product, side
Control product quality and board long-time stability are helped to judge.The present invention effectively solves existing equipment maintenance analysis method cannot
The shortcoming meeting the monitoring of board long-time stability, is grouped before and after carrying out equipment time-based maintenance based on two way classification, it is not necessary to carry out artificial
Division operation；And change before and after automatically carrying out board equipment time-based maintenance based on HC formula, improve system reliability.Based on
Apriori algorithm judges board long-time stability, compensate for the defect of existing analysis maneuver.
Accompanying drawing explanation
In conjunction with accompanying drawing, and by with reference to detailed description below, it will more easily the present invention is had more complete understanding
And its adjoint advantage and feature is more easily understood, wherein:
Fig. 1 schematically shows the flow process of equipment time-based maintenance effect analysis method according to the preferred embodiment of the invention
Figure.
It should be noted that accompanying drawing is used for illustrating the present invention, and the unrestricted present invention.Note, represent that the accompanying drawing of structure can
Can be not necessarily drawn to scale.Further, in accompanying drawing, same or like element indicates same or like label.
Detailed description of the invention
In order to make present disclosure more clear and understandable, below in conjunction with specific embodiments and the drawings in the present invention
Appearance is described in detail.
The present invention carries out the association of equipment time-based maintenance with WP (white Pixel, white pixel) parameter as reference index
Analyze.By obtaining the equipment time-based maintenance situation in board a period of time, by two way classification by the packet of white pixel value to corresponding
Board equipment time-based maintenance before and after；Single board equipment time-based maintenance fore-and-aft stability relative analysis is carried out by HC formula,
Judge the board equipment time-based maintenance impact on product, help to control product quality.Finally, board based on Apriori algorithm
Long-time stability discriminatory analysis.
Fig. 1 schematically shows the flow process of equipment time-based maintenance effect analysis method according to the preferred embodiment of the invention
Figure.
Specifically, as it is shown in figure 1, according to the preferred embodiment of the invention equipment time-based maintenance effect analysis method include:
First step S1: obtain board equipment time-based maintenance information in predetermined amount of time (paying close attention to the time period)；Such as,
Board equipment time-based maintenance information within a predetermined period of time is obtained from equipment time-based maintenance information database at first step S1.
Second step S2: obtain each product white pixel value in predetermined amount of time；Such as, at second step S2 from white pixel value
Data base is each product white pixel value in obtaining predetermined amount of time.
Third step S3: before and after carrying out equipment time-based maintenance based on two way classification, white pixel value is grouped；
4th step S4: contrast MR before and after each processes the equipment time-based maintenance of step by HC formula calculator platform
Value；
Preferably, can the board equipment time-based maintenance information of only single data before and after first sweep equipment time-based maintenance.
In the 4th step S4, carry out relative analysis before and after board equipment time-based maintenance based on HC formula；
According to white pixel characteristic, being grouped into benchmark with the equipment time-based maintenance that white pixel average is minimum, remaining is with reference to group；
HC formula is one the more commonly used formula of semicon industry, and it is defined as foloows computing formula:
MR1=ABS (Avg (Y)-Avg (X))/Std (X)
MR2=Std (Y)/Std (X)
Wherein, X, Y are grouped before and after being respectively equipment time-based maintenance, and Avg (X) < Avg (Y).Wherein function ABS is used for asking
Taking absolute value, function Avg is used for averaged, and function Std is used for asking for standard deviation (identical with the function in Excel).
Such as, in the 4th step S4, equipment time-based maintenance effectiveness is judgement basis by industry standard: at MR1 > 100%
Or judge during MR2 > 1.5 that board is unstable after this step equipment time-based maintenance, otherwise judge that board is fixed at this step equipment
Stablize after phase maintenance.
Thus, the report of board single plant time-based maintenance stability can be generated；
5th step S5: judge combining of board many secondary devices time-based maintenance in this predetermined amount of time based on Apriori algorithm
Conjunction situation.
In the 5th step S5, calculate support supp (X)=occur (X)/count (D)=P (X)；Wherein supp (X) ∈
[-1,1]；In units of board, Occur (X)=Bad PM Cnt Good PM Cnt；Bad PM Cnt represents that equipment is periodically protected
Supporting the frequency of failure, Good PM Cnt represents equipment time-based maintenance number of success；Count (D)=Total PM Cnt；Total
PM Cnt represents equipment time-based maintenance total degree.
Specifically, in the 6th step S6, if supp (X) > 0, then judge this board integral device in this predetermined amount of time
Time-based maintenance effect is deteriorated, otherwise for judging that this board integral device time-based maintenance effect in this predetermined amount of time improves.
Thus, the report of board long-time stability can be generated.
The present invention solves the problem that existing equipment time-based maintenance cannot be carried out the monitoring of long-term board stability.The present invention is led to
Cross the correlation analysis between processing procedure index and the equipment of each product, obtain the board equipment time-based maintenance impact on product, side
Control product quality and board long-time stability are helped to judge.The present invention effectively solves existing equipment maintenance analysis method cannot
The shortcoming meeting the monitoring of board long-time stability, is grouped before and after carrying out equipment time-based maintenance based on two way classification, it is not necessary to carry out artificial
Division operation；And change before and after automatically carrying out board equipment time-based maintenance based on HC formula, improve system reliability.Based on
Apriori algorithm judges board long-time stability, compensate for the defect of existing analysis maneuver.
Furthermore, it is necessary to explanation, unless stated otherwise or point out, otherwise the term in description " first ", " the
Two ", " the 3rd " etc. describe be used only for distinguishing in description each assembly, element, step etc. rather than for representing each
Logical relation between assembly, element, step or ordering relation etc..
Although it is understood that the present invention discloses as above with preferred embodiment, but above-described embodiment being not used to
Limit the present invention.For any those of ordinary skill in the art, without departing under technical solution of the present invention ambit,
Technical solution of the present invention is made many possible variations and modification by the technology contents that all may utilize the disclosure above, or is revised as
Equivalent embodiments with change.Therefore, every content without departing from technical solution of the present invention, according to the technical spirit pair of the present invention
Any simple modification made for any of the above embodiments, equivalent variations and modification, all still fall within the scope of technical solution of the present invention protection
In.
Claims (8)
1. an equipment time-based maintenance effect analysis method, it is characterised in that including:
First step: obtain board equipment time-based maintenance information within a predetermined period of time；
Second step: obtain each product white pixel value in predetermined amount of time；
Third step: before and after carrying out equipment time-based maintenance based on two way classification, white pixel value is grouped；
4th step: contrast MR value before and after each processes the equipment time-based maintenance of step by HC formula calculator platform；
5th step: judge the comprehensive condition of board many secondary devices time-based maintenance in this predetermined amount of time based on Apriori algorithm.
Equipment time-based maintenance effect analysis method the most according to claim 1, it is characterised in that at first step from equipment
Time-based maintenance information database obtains board equipment time-based maintenance information within a predetermined period of time.
Equipment time-based maintenance effect analysis method the most according to claim 1 and 2, it is characterised in that second step from
White pixel Value Data storehouse obtains each product white pixel value in predetermined amount of time.
Equipment time-based maintenance effect analysis method the most according to claim 1 and 2, it is characterised in that at the 4th step, root
According to white pixel characteristic, being grouped into benchmark with the equipment time-based maintenance that white pixel average is minimum, remaining is with reference to group；
Calculate:
MR1=ABS (Avg (Y)-Avg (X))/Std (X)
MR2=Std (Y)/Std (X)
Wherein, X, Y are grouped before and after being respectively equipment time-based maintenance, and Avg (X) < Avg (Y).
Equipment time-based maintenance effect analysis method the most according to claim 1 and 2, it is characterised in that in the 4th step,
Judge during MR1 > 100% or MR2 > 1.5 that board is unstable after this step equipment time-based maintenance, otherwise judge that board is in this step
Stablize after rapid equipment time-based maintenance.
Equipment time-based maintenance effect analysis method the most according to claim 1 and 2, it is characterised in that at the 5th step, meter
Calculate support supp (X)=occur (X)/count (D)=P (X)；Wherein supp (X) ∈ [-1,1]；In units of board,
Occur (X)=Bad PM Cnt Good PM Cnt；Bad PM Cnt represents the equipment time-based maintenance frequency of failure, Good PM
Cnt represents equipment time-based maintenance number of success；Count (D)=Total PM Cnt；Total PM Cnt represents that equipment is periodically protected
Support total degree.
Equipment time-based maintenance effect analysis method the most according to claim 1 and 2, it is characterised in that in the 6th step, if
Supp (X) > 0, then judge that this board integral device time-based maintenance effect in this predetermined amount of time is deteriorated, otherwise for judging this machine
Platform integral device time-based maintenance effect in this predetermined amount of time improves.
Equipment time-based maintenance effect analysis method the most according to claim 1 and 2, it is characterised in that in the 6th step, raw
Become the report of board long-time stability.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610613017.3A CN106295811B (en) | 2016-07-29 | 2016-07-29 | Equipment time-based maintenance effect analysis method |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201610613017.3A CN106295811B (en) | 2016-07-29 | 2016-07-29 | Equipment time-based maintenance effect analysis method |
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| CN106295811A true CN106295811A (en) | 2017-01-04 |
| CN106295811B CN106295811B (en) | 2019-08-23 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111125166A (en) * | 2018-10-31 | 2020-05-08 | 长鑫存储技术有限公司 | Online product information acquisition method and device |
| CN114397125A (en) * | 2022-01-11 | 2022-04-26 | 长鑫存储技术有限公司 | Machine running state detection method and device, electronic equipment and storage medium |
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| CN101901230A (en) * | 2009-05-31 | 2010-12-01 | 国际商业机器公司 | Information retrieval method, user comment processing method and system thereof |
| CN103325072A (en) * | 2013-06-18 | 2013-09-25 | 国家电网公司 | Equipment condition maintenance fuzzy decision-making method of servers in power distribution system and power system |
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| CN111125166A (en) * | 2018-10-31 | 2020-05-08 | 长鑫存储技术有限公司 | Online product information acquisition method and device |
| CN114397125A (en) * | 2022-01-11 | 2022-04-26 | 长鑫存储技术有限公司 | Machine running state detection method and device, electronic equipment and storage medium |
| CN114397125B (en) * | 2022-01-11 | 2024-01-05 | 长鑫存储技术有限公司 | Method and device for checking running state of machine, electronic equipment and storage medium |
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| CN106295811B (en) | 2019-08-23 |
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