CN106292580A - A kind of intelligent integrated formula semiconductor manufacturing performs system - Google Patents
A kind of intelligent integrated formula semiconductor manufacturing performs system Download PDFInfo
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- CN106292580A CN106292580A CN201610649152.3A CN201610649152A CN106292580A CN 106292580 A CN106292580 A CN 106292580A CN 201610649152 A CN201610649152 A CN 201610649152A CN 106292580 A CN106292580 A CN 106292580A
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- 230000003993 interaction Effects 0.000 claims abstract description 10
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
- G05B19/41865—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by job scheduling, process planning, material flow
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- G—PHYSICS
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- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/32—Operator till task planning
- G05B2219/32252—Scheduling production, machining, job shop
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- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
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Abstract
The invention provides a kind of intelligent integrated formula semiconductor manufacturing and perform system, including: MES manufacturing process model library, MES manufacturing process information repository, manufacture streaming server, Internet of Things model library, produce and control end work station, data interaction interface, implement the embodiment of the present invention, have the advantages that the embodiment of the present invention uses SAAS pattern, build semiconductor fabrication process model, use based on the data mining algorithm manufacturing big data, file-sharing by device data acquisition and the mobile interchange mode across operating platform access system, design abundant expansion interface to order taking system &, financial system, SPC system, multimode massing, plug-in unitization can industry portability function intelligent integrated formula semiconductor manufacturing perform system.
Description
Technical field
The present invention relates to Producing Process of Processing Industry control field, particularly relate to a kind of intelligent integrated formula semiconductor manufacturing and hold
Row system.
Background technology
Existing Semiconductor enterprises manufactures execution system can provide best performance for a certain specific environment, the most often
Often being difficult to and other application integration, whole system reconstruction property is weak, is difficult to carry out function with the change of business procedure and joins
Put and dynamically change.
Summary of the invention
The present invention is to solve problems of the prior art, it is proposed that a kind of intelligent integrated formula semiconductor manufacturing performs
System.
According to an aspect of the invention, it is proposed that a kind of intelligent integrated formula semiconductor manufacturing performs system, including:
MES manufacturing process model library, is used for storing MES manufacturing process Link Model and describing MES manufacturing process link
The MES entirety manufacturing process model of topological structure between model；
MES manufacturing process information repository, performs data for storing the manufacture of MES manufacturing process links；
Manufacture streaming server, be used for calling described MES manufacturing process model library and MES manufacturing process information database,
To perform MES manufacture stream task；
Internet of Things model library, for building the production scene model manufacturing stream, and collects manufacture field data, as described
The incision manufacturing streaming server connects；
Producing and control end work station, and described manufacture streaming server interactive communication, to each procedure links in manufacturing process
Operator provide production real time information, and perform information by man machine interface feedback behaviour people employee；
Data interaction interface, is used for making described manufacture streaming server and MES manufacturing process model library, MES manufacturing process letter
Breath thesaurus, Internet of Things model library or outer application system carry out data interaction transmission, and are used for producing control end work station
And the data interaction transmission between Internet of Things model library.
Preferably, described MES manufacturing process model library includes Manufacturing Data Management model library, production scheduling administrative model
Storehouse, Production scheduling management model library, inventory control model storehouse, quality management model storehouse, producers' administrative model storehouse, work set
Standby administrative model storehouse, frock clamp administrative model storehouse, project kanban system model library, production process Controlling model storehouse, bottom number
According to Integrated Analysis Model storehouse, upper layer data integrated decomposition model storehouse.
Preferably, described MES manufacturing process information repository includes the system corresponding with described MES manufacturing process model library
Make data management information thesaurus, production scheduling management information repository, Production scheduling management information repository, stock control letter
Breath thesaurus, quality management information repository, producers manage information repository, work equipment management information repository, work
Clamps management information repository, project kanban system information repository, production process control information repository, bottom data collection
Become to analyze information repository, upper layer data integrated decomposed information thesaurus.
Preferably, described Internet of Things model library also includes the big data-mining module of Internet of Things and algoritic module, described Internet of Things
Net big data-mining module for gather production scene produce process data, by described process data through described algoritic module
Treatment Analysis, obtain the data of different dimensions.
Preferably, the data of described different dimensions include goods analysis, the analysis of defective products Intelligent statistical, aberrant batches intelligence
Analysis, intelligence scheduling.
Preferably, the big data-mining module of described Internet of Things includes bar code read module, to read mould by bar code
Block reads process data and the device status data that production scene produces.
Preferably, described bar code read module includes that bar code scanner, two-dimensional bar code scanner, RFID scan
Rifle, adapts with the process data on-the-spot with Expression product and the bar code of device status data, two-dimensional bar code, RFID.
Preferably, described intelligent integrated formula semiconductor manufacturing execution system also includes remote intelligent terminal, described long-range intelligence
Can terminal be connected with described MES manufacturing process information repository, described Internet of Things model library by VPN or mobile Internet.
Preferably, described remote intelligent terminal is to install wechat public number on the mobile apparatus or App or Pad.
The embodiment of the present invention uses SAAS pattern, builds semiconductor fabrication process model, uses based on manufacturing big data
Data mining algorithm, the file-sharing by device data acquisition and the mobile interchange mode across operating platform access system, if
Count out abundant expansion interface to order taking system &, financial system, SPC system, multimode massing, plug-in unitization can industry portability function
Intelligent integrated formula semiconductor manufacturing perform system.
By detailed description to the exemplary embodiment of the present invention referring to the drawings, the further feature of the present invention and
Advantage will be made apparent from.
Accompanying drawing explanation
The accompanying drawing of the part constituting description describes embodiments of the invention, and is used for together with the description solving
Release the principle of the present invention.
Fig. 1 is the functional block diagram of the intelligent integrated formula semiconductor manufacturing execution system of the present invention.
Fig. 2 is the schematic flow sheet of a preferred embodiment of the present invention.
Fig. 3 is the schematic flow sheet of another preferred embodiment of the present invention.
Detailed description of the invention
The various exemplary embodiments of the present invention are described in detail now with reference to accompanying drawing.It should also be noted that unless additionally have
Body illustrates, the parts illustrated the most in these embodiments and positioned opposite, the numerical expression of step and numerical value are not intended to this
The scope of invention.
Description only actually at least one exemplary embodiment is illustrative below, never as to the present invention
And any restriction applied or use.
May be not discussed in detail for technology and equipment known to person of ordinary skill in the relevant, but in suitable situation
Under, described technology and equipment should be considered a part for description.
It is shown here that any occurrence should be construed as merely exemplary with in all examples discussed, and not
It is as restriction.Therefore, other example of exemplary embodiment can have different values.
It should also be noted that similar label and letter represent similar terms, therefore, the most a certain Xiang Yi in following accompanying drawing
Individual accompanying drawing is defined, then need not it is further discussed in accompanying drawing subsequently.
Seeing Fig. 1, a kind of intelligent integrated formula semiconductor manufacturing performs system, including: MES manufacturing process model library, it is used for
The MES entirety manufacture stream of topological structure between storage MES manufacturing process Link Model and description MES manufacturing process Link Model
Journey model；
MES manufacturing process information repository, performs data for storing the manufacture of MES manufacturing process links；
Manufacture streaming server, be used for calling described MES manufacturing process model library and MES manufacturing process information database,
To perform MES manufacture stream task；
Internet of Things model library, for building the production scene model manufacturing stream, and collects manufacture field data, as described
The incision manufacturing streaming server connects；
Producing and control end work station, and described manufacture streaming server interactive communication, to each procedure links in manufacturing process
Operator provide production real time information, and perform information by man machine interface feedback behaviour people employee；
Data interaction interface, is used for making described manufacture streaming server and MES manufacturing process model library, MES manufacturing process letter
Breath thesaurus, Internet of Things model library or outer application system carry out data interaction transmission, and are used for producing control end work station
And the data interaction transmission between Internet of Things model library.
Model construction of the present invention uses " MES+APP+RFID+ cloud service, BIGDATA present magnanimity index ", " equipment and number
According to, the connection of people " and industry production manage a line FactoryWorks core logic, these three advanced person the Internet development technique sets
Meter product.
Patent of the present invention obtains also by the online monitoring management system of equipment built-in in intelligent integrated formula manufacturing execution system
Take OEE overall equipment efficiency.comprehensive efficiency of equipment form, equipment casebook and operation conditions catalog, shutdown reason automatically analyzes, e-PM equipment is pre-
The maintenance management of anti-property, device predicted maintenance.MES manufacturing process model library is the neutral net of system, and Internet of Things model library is to be
The ear nose dispute body of system is used for performing function interconnection and function perception, and manufacturing equipment is that hands and foot are for performing instruction.Respectively
The blood of transmission in individual system, it is simply that include the process data of production scene and the big data of device status data.
Further, described MES manufacturing process model library includes Manufacturing Data Management model library, production scheduling administrative model
Storehouse, Production scheduling management model library, inventory control model storehouse, quality management model storehouse, producers' administrative model storehouse, work set
Standby administrative model storehouse, frock clamp administrative model storehouse, project kanban system model library, production process Controlling model storehouse, bottom number
According to Integrated Analysis Model storehouse, upper layer data integrated decomposition model storehouse.
Further, described MES manufacturing process information repository includes the system corresponding with described MES manufacturing process model library
Make data management information thesaurus, production scheduling management information repository, Production scheduling management information repository, stock control letter
Breath thesaurus, quality management information repository, producers manage information repository, work equipment management information repository, work
Clamps management information repository, project kanban system information repository, production process control information repository, bottom data collection
Become to analyze information repository, upper layer data integrated decomposed information thesaurus.
Such as, by project kanban system information repository it is recognized that every part of order, each part, every procedure,
Often organize station task status, plan node, actually accomplish node, scrap quantity, test manufacture quantity, input quantity, output quantity
Deng real time information.By graphical representations intuitively, and color is reminded so that enterprise's leaders, Production Supervisor, scheduling etc.
Production task practice condition can be grasped in real time, easily.
The most such as, by the figure intuitively in Production scheduling management information repository, numeral, thin red line, hence it is evident that
The work centre of the task that identifies over loading, work equipment, department or teams and groups, work post etc., help plan and traffic department enter
The outer consonance equilibrium of row task, optimizes Production Planning Scheduling.
Further, described Internet of Things model library also includes the big data-mining module of Internet of Things and algoritic module, described Internet of Things
Net big data-mining module for gather production scene produce process data, by described process data through described algoritic module
Treatment Analysis, obtain the data of different dimensions.
By the big data-mining module of Internet of Things carry out manufacturing shop whole process review, produce and quality process control,
Order progress implements tracking, the online control of equipment, makes the production logistics link producing order more transparent, reduces production WIP, carry
High product is handed over the phase, and sustained improvement product quality, Employees' achievement real-time statistics, and equipment OEE data automatically generate, and set up whole process
Traceability system, meets technological requirement, abnormal follows the tracks of in time, has filled up production scene to " telecoms gap " between planning system, has beaten
Opening " production black box ", the Real-time Feedback production schedule produces the detailed implementation status of links at each, in time, on time, in real time
Change, on-demand are held in ground, improve management granularity, improve the efficiency of decision-making.
Further, the data of described different dimensions include goods analysis, the analysis of defective products Intelligent statistical, aberrant batches intelligence
Analysis, intelligence scheduling.
Further, the big data-mining module of described Internet of Things includes bar code read module, to read mould by bar code
Block reads process data and the device status data that production scene produces.
Further, described bar code read module includes that bar code scanner, two-dimensional bar code scanner, RFID scan
Rifle, adapts with the process data on-the-spot with Expression product and the bar code of device status data, two-dimensional bar code, RFID.
The information such as production batch, based on barcode technology, are encoded by patent of the present invention, utilize barcode scanner, mobile terminal etc.
Internet of Things is forged into, to production status implementing monitoring by inside manufacturing industry.
By bar code, two-dimensional bar code or RFID, to manufacture process each production factors carry out information coding,
Centered by order, each factor using manufacture process carries out Internet of Things.The combination of each key element needs with certain rule
Then carry out, field condition could be reflected factually.System carries out Model Abstraction whole semiconductor manufacturing scene accordingly.With technique road
Line main line, with operation as website, records order manufacture between each operation and transfer case and analyzes.To technique
Route, material, personnel, equipment, yield, yield, progress, review, a series of production such as WIP, C/T, D/T KPI index is done automatically
Monitoring.
System data acquisition with batch operation as core, relate generally to function batch move down, do over again, kill number, kill number give for change,
Locking batch, unblock, quantity adjust, anxious single, segmentation batch, merge batch, batch annotation, batch historical query, divide R-Lot,
Point mantissa, work order printing, label printing, employee such as reckon by the piece at the functional device.
Further, described intelligent integrated formula semiconductor manufacturing execution system also includes remote intelligent terminal, described long-range intelligence
Can terminal be connected with described MES manufacturing process information repository, described Internet of Things model library by VPN or mobile Internet.
Further, described remote intelligent terminal is to install wechat public number on the mobile apparatus or App or Pad.
Traditional visual decision analysis system, inquiry and when analytical statement, need to use PC, log in client or
The mode of WEB is carried out.Along with smart mobile phone/LED can screen universal, utilize the fragmentation time to pay close attention in real time and analyze and produced
Relevant information in journey becomes to be highly desirable to.
Patent of the present invention, the mode using cloud service platform and APP to combine, allow data go directly anywhere or anytime enterprise
On policymaker's mobile phone, the most convenient and convenient, it is that domestic real employing mobile phone A PP, LED display, operation terminal service machine show
Display screen provides the company of visual decision service.Present system framework at Cloud Server, can with slitless connection computer, mobile phone,
App, wechat, Pad etc. operate terminal so that whole manufacture process information tentacle at any time can obtain, enterprise management level, each functional department
Take line data at any time, carry out decision-making in real time.Such as: first realizes utilizing the scanning of wechat public number to replace general at home for we
Logical scanner obtains manufacturing process data information.
Patented technology of the present invention uses and produces modeling technique, technology of Internet of things, big data mining technology, mobile Internet pair
Connect, produce modeling accurately, describe each KPI data of manufacture process comprehensively, there is not management dead angle.
Existing Semiconductor enterprises manufacturing execution systems soft ware is all based on CS (Client-Server) framework and sets
Meter, based on server or terminal server, it is impossible to realize many number of users and access, will appear from system crash time serious simultaneously.
Critical constraints in design is added at customization of individual character and functional module.
Multinomial technical barrier has been captured in order to improve above weak point patent of the present invention:
(1) latest generation SNA mode is developed: system sing on web framework, B/S mode is developed.Support browses
Device accesses, and to accessing the quantity of user and number of times is unrestricted, and can reach thing, machine, the interconnecting of people, and one-stop browses reading
All information.
(2) breaking through modularized design to limit: use the exploitation of MVC three-tier architecture, modularized design, system development is abundant
Feature card is optionally selected or individually redesigns exploitation.
Such as the equipment management system workflow embodiment schematic diagram that Fig. 2 is the application present invention.Manipulation flow process is: starts and sets
Standby, log in EMS terminal, capture apparatus service data, and be uploaded to remote server, if equipment normal operation, then continuous service
To terminating, and exit EMS terminal, if equipment runs abnormal, then equipment downtime, enter EMS detection and shut down, if shutting down less than 1
Minute, operator presses initiating key and runs machine, continues properly functioning, if equipment downtime was more than 1 minute, then opens disablement device and starts fortune
Row signal, is judged to select to shut down reason by maintainer, and is uploaded to remote server, properly functioning to terminating after maintenance.
Such as the process control management working-flow embodiment schematic flow sheet that Fig. 3 is the application present invention.According to
The wafer batch that client provides carrys out processing, operates normal flow according to the job description of this batch, synchronizes flow process and includes
Material loads and abnormality processing.
Operating process is as follows:
S01: produce new order according to the wafer batch that client provides；
If fruit product is new technological process, need newly-built technological process model, including material, equipment, operation, yield rate
Lower limit, workshop attribute etc.；
S02: if fruit product is new product, need newly-built product BOM, including product code, chip size, chip title,
Chip supplier, frame size, batch basis quantity etc.；
Automatically generate order number, generate new order；
S03: order audit by rear, can issuance of materials to production line；
When order is provided, the sub-work order of automatic printing batch can be chosen, according to order Dice quantity and product basis quantity,
Automatically generate some orders by the gross and tail is criticized；
S04: batch carries out operation transfer；
After completing an operation, need to load some materials, such as: the elargol etc. that bonding die operation loads；
System calculates yield rate automatically, and when yield rate is less than setting value, locking batch is in current station automatically；
S05: needs are done over again if batch makes sad work of it, then click on any one work that i.e. can return to before this operation of doing over again
Sequence；
S06: when batch size is excessive, or in order to production management needs batch is carried out dividing processing；
S07: meet some lower crowdes of merging condition and merge, focus on, reduces WIP and operator's workload, closes
After and, again print with work order to refresh the information such as work order quantity；
S08:QC carries out online or off-line inspection to certain working procedure, as pinpointed the problems, can lock batch, wait to ask
Topic processes, and after risk is controlled, can tighten, and continues to produce；
S09: be deducted defective products in this operation, defective products deduction is wrong, after recalculating, mistake can be killed number
Give for change；
S10: semiconductor test is more complicated, needs batch powder BIN according to different test parameters, if yields is low
In setting value, need to be isolated by defective products and resurvey；
S11: if the discontented whole box of the batch of packaging process, need to find existing mantissa to merge in mantissa's shelf or
Unnecessary quantity is separated a new mantissa and criticizes by person.
Although by example, some specific embodiments of the present invention have been described in detail, but the skill of this area
Art personnel are it should be understood that above example is merely to illustrate rather than in order to limit the scope of the present invention.The skill of this area
Art personnel are it should be understood that can modify to above example without departing from the scope and spirit of the present invention.This
Bright scope is defined by the following claims.
Claims (9)
1. an intelligent integrated formula semiconductor manufacturing performs system, it is characterised in that including:
MES manufacturing process model library, is used for storing MES manufacturing process Link Model and describing MES manufacturing process Link Model
Between the MES entirety manufacturing process model of topological structure；
MES manufacturing process information repository, performs data for storing the manufacture of MES manufacturing process links；
Manufacture streaming server, be used for calling described MES manufacturing process model library and MES manufacturing process information database, to hold
Row MES manufactures stream task；
Internet of Things model library, for building the production scene model manufacturing stream, and collects manufacture field data, as described manufacture
The incision of streaming server connects；
Produce and control end work station, with described manufacture streaming server interactive communication, operate to each procedure links in manufacturing process
Personnel provide production real time information, and perform information by man machine interface feedback behaviour people employee；
Data interaction interface, is used for making described manufacture streaming server deposit with MES manufacturing process model library, MES manufacturing process information
Bank, Internet of Things model library or outer application system carry out data interaction transmission, and are used for producing control end work station and thing
Data interaction transmission between networking model storehouse.
2. intelligent integrated formula semiconductor manufacturing as claimed in claim 1 performs system, it is characterised in that described MES manufactures stream
Journey model library includes Manufacturing Data Management model library, production scheduling administrative model storehouse, Production scheduling management model library, stock control
Model library, quality management model storehouse, producers' administrative model storehouse, work equipment administrative model storehouse, frock clamp administrative model
Storehouse, project kanban system model library, production process Controlling model storehouse, bottom data Integrated Analysis Model storehouse, upper layer data are integrated
Decomposition model storehouse.
3. intelligent integrated formula semiconductor manufacturing as claimed in claim 2 performs system, it is characterised in that described MES manufactures stream
Journey information repository includes the Manufacturing Data Management information repository corresponding with described MES manufacturing process model library, the row of production
Thread management information repository, Production scheduling management information repository, inventory management information thesaurus, quality management information store
Storehouse, producers manage information repository, work equipment management information repository, frock clamp management information repository, project
Kanban system information repository, production process control information repository, bottom data integrated analysis information repository, upper layer data
Integrated decomposed information thesaurus.
4. intelligent integrated formula semiconductor manufacturing as claimed in claim 1 performs system, it is characterised in that described Internet of Things model
It is existing that storehouse also includes that the big data-mining module of Internet of Things and algoritic module, the big data-mining module of described Internet of Things are used for gathering production
The process data that field produces, by described process data through the Treatment Analysis of described algoritic module, obtains the data of different dimensions.
5. intelligent integrated formula semiconductor manufacturing as claimed in claim 4 performs system, it is characterised in that described different dimensions
Data include goods analysis, the analysis of defective products Intelligent statistical, aberrant batches intellectual analysis, intelligence scheduling.
6. intelligent integrated formula semiconductor manufacturing as claimed in claim 4 performs system, it is characterised in that the big number of described Internet of Things
According to excavate module include bar code read module, with by bar code read module read production scene produce process data and
Device status data.
7. intelligent integrated formula semiconductor manufacturing as claimed in claim 1 performs system, it is characterised in that described bar code reads
Module includes bar code scanner, two-dimensional bar code scanner, RFID scanner, with the process data on-the-spot with Expression product and
The bar code of device status data, two-dimensional bar code, RFID adapt.
8. intelligent integrated formula semiconductor manufacturing as claimed in claim 1 performs system, it is characterised in that described intelligent integrated formula
Semiconductor manufacturing performs system and also includes remote intelligent terminal, and described remote intelligent terminal is by VPN or mobile Internet and institute
State MES manufacturing process information repository, described Internet of Things model library connects.
9. intelligent integrated formula semiconductor manufacturing as claimed in claim 8 performs system, it is characterised in that described long-distance intelligent is eventually
End is for installing wechat public number on the mobile apparatus or App or Pad.
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|---|---|---|---|---|
| CN107527154A (en) * | 2017-08-31 | 2017-12-29 | 四川航天***工程研究所 | A kind of management planning and scheduling and executing system for being used for the scene of manufacturing |
| CN107544449A (en) * | 2017-09-30 | 2018-01-05 | 四川长虹电器股份有限公司 | A kind of flat panel TV intelligence wire body automatic charging monitoring system and method |
| CN108229782A (en) * | 2017-10-26 | 2018-06-29 | 北京航天智造科技发展有限公司 | A kind of visual production management platform based on cloud |
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| CN116679641A (en) * | 2023-06-01 | 2023-09-01 | 盐城工学院 | Multi-objective optimization method of automatic assembly production line considering process rigidity constraint |
| CN117434871A (en) * | 2023-12-07 | 2024-01-23 | 成都芯极客科技有限公司 | Dynamic process parameter management method for experimental batch |
| CN117434871B (en) * | 2023-12-07 | 2024-06-21 | 成都芯极客科技有限公司 | Dynamic process parameter management method for experimental batch |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1577731A (en) * | 2003-07-14 | 2005-02-09 | 株式会社日立高新技术 | Semiconductor production system |
| US20050251365A1 (en) * | 2004-03-29 | 2005-11-10 | Hiroshi Matsushita | System and method for identifying a manufacturing tool causing a fault |
| CN101266486A (en) * | 2008-05-08 | 2008-09-17 | 上海交通大学 | Semiconductor manufacture flow path assistant decision-making system |
| CN102880123A (en) * | 2012-08-28 | 2013-01-16 | 浙江大学 | System and method for controlling production process of petrochemical enterprise on basis of manufacturing execution system (MES) workflow |
| CN102945512A (en) * | 2012-06-20 | 2013-02-27 | 苏州江山软件科技有限公司 | Manufacturing execution system |
| CN105005885A (en) * | 2015-08-14 | 2015-10-28 | 柴津龙 | Industrial automatic identification and data acquisition platform |
-
2016
- 2016-08-10 CN CN201610649152.3A patent/CN106292580A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1577731A (en) * | 2003-07-14 | 2005-02-09 | 株式会社日立高新技术 | Semiconductor production system |
| US20050251365A1 (en) * | 2004-03-29 | 2005-11-10 | Hiroshi Matsushita | System and method for identifying a manufacturing tool causing a fault |
| CN101266486A (en) * | 2008-05-08 | 2008-09-17 | 上海交通大学 | Semiconductor manufacture flow path assistant decision-making system |
| CN102945512A (en) * | 2012-06-20 | 2013-02-27 | 苏州江山软件科技有限公司 | Manufacturing execution system |
| CN102880123A (en) * | 2012-08-28 | 2013-01-16 | 浙江大学 | System and method for controlling production process of petrochemical enterprise on basis of manufacturing execution system (MES) workflow |
| CN105005885A (en) * | 2015-08-14 | 2015-10-28 | 柴津龙 | Industrial automatic identification and data acquisition platform |
Non-Patent Citations (2)
| Title |
|---|
| 丁兴良: "《丁兴良讲工业4.0一本书读懂工业4.0》", 31 December 2015 * |
| 深圳市益普科技有限公司SMES项目部: "《半导体智能制造执行***》", 3 July 2013, HTTPS://WENKU.BAIDU.COM/VIEW/2AAE07E604A1B0717FD5DD5E.HTML * |
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| CN107544449A (en) * | 2017-09-30 | 2018-01-05 | 四川长虹电器股份有限公司 | A kind of flat panel TV intelligence wire body automatic charging monitoring system and method |
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| CN108229782B (en) * | 2017-10-26 | 2020-11-03 | 北京航天智造科技发展有限公司 | Cloud-based visual production management platform |
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| CN110376994A (en) * | 2019-08-01 | 2019-10-25 | 西安奕斯伟硅片技术有限公司 | A kind of wafer automated production control system and method |
| CN110609527B (en) * | 2019-09-03 | 2021-06-25 | 江苏泰治科技股份有限公司 | MES interface rapid operation method and system |
| CN110609527A (en) * | 2019-09-03 | 2019-12-24 | 南京泰治自动化技术有限公司 | MES interface rapid operation method and system |
| CN110580026A (en) * | 2019-09-18 | 2019-12-17 | 工业云制造(四川)创新中心有限公司 | intelligent manufacturing MES system |
| CN110675084A (en) * | 2019-10-08 | 2020-01-10 | 东莞长城开发科技有限公司 | LED wafer test management system based on MES system |
| CN113126573A (en) * | 2019-12-31 | 2021-07-16 | 华润微电子（重庆）有限公司 | Control method and equipment of MES production system |
| CN112488266A (en) * | 2020-12-10 | 2021-03-12 | 北京卫星制造厂有限公司 | Structural slab assembly complete management system and method based on RFID |
| CN112767188A (en) * | 2020-12-22 | 2021-05-07 | 浙江工业大学 | MES system for mold manufacturing |
| CN113034027A (en) * | 2021-04-12 | 2021-06-25 | 湖南紫竹科技有限公司 | Intelligent manufacturing execution system for electronic components |
| CN113034027B (en) * | 2021-04-12 | 2023-12-15 | 湖南紫竹科技有限公司 | Intelligent manufacturing execution system of electronic component |
| CN113485263A (en) * | 2021-06-30 | 2021-10-08 | 科尔比乐(广州)智能装备有限公司 | MES intelligent manufacturing production execution system |
| CN116679641A (en) * | 2023-06-01 | 2023-09-01 | 盐城工学院 | Multi-objective optimization method of automatic assembly production line considering process rigidity constraint |
| CN117434871A (en) * | 2023-12-07 | 2024-01-23 | 成都芯极客科技有限公司 | Dynamic process parameter management method for experimental batch |
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