CN106282950A - A kind of method improving cathode of lithium battery aluminium foil colelctor electrode electrical property - Google Patents
A kind of method improving cathode of lithium battery aluminium foil colelctor electrode electrical property Download PDFInfo
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- CN106282950A CN106282950A CN201610664274.XA CN201610664274A CN106282950A CN 106282950 A CN106282950 A CN 106282950A CN 201610664274 A CN201610664274 A CN 201610664274A CN 106282950 A CN106282950 A CN 106282950A
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M4/00—Electrodes
- H01M4/02—Electrodes composed of, or comprising, active material
- H01M4/64—Carriers or collectors
- H01M4/66—Selection of materials
- H01M4/665—Composites
- H01M4/667—Composites in the form of layers, e.g. coatings
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/021—Cleaning or etching treatments
- C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
- C23C14/165—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon by cathodic sputtering
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M4/00—Electrodes
- H01M4/02—Electrodes composed of, or comprising, active material
- H01M4/04—Processes of manufacture in general
- H01M4/0402—Methods of deposition of the material
- H01M4/0421—Methods of deposition of the material involving vapour deposition
- H01M4/0423—Physical vapour deposition
- H01M4/0426—Sputtering
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M4/00—Electrodes
- H01M4/02—Electrodes composed of, or comprising, active material
- H01M4/13—Electrodes for accumulators with non-aqueous electrolyte, e.g. for lithium-accumulators; Processes of manufacture thereof
- H01M4/139—Processes of manufacture
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M4/00—Electrodes
- H01M4/02—Electrodes composed of, or comprising, active material
- H01M4/64—Carriers or collectors
- H01M4/66—Selection of materials
- H01M4/661—Metal or alloys, e.g. alloy coatings
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/10—Energy storage using batteries
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Abstract
The invention discloses a kind of method improving cathode of lithium battery aluminium foil colelctor electrode electrical property, the method is to be fixed in the substrate frame of Roll Roll vacuum magnetron sputtering coating film equipment after purifying in room the size being cut to need by aluminium foil to be processed;Opening Roll Roll vacuum magnetron sputtering coating film equipment, the equipment that adjusts extremely can coating process condition;Put into substrate frame aluminium foil to be coated;Utilize ion source that aluminium foil surface carries out plasma bombardment process, peel off aluminium foil surface oxide layer, remove surface spike;Direct-current vacuum magnetron sputtering technique is utilized to deposit thin film aluminum at aluminium foil surface;After aluminium foil surface deposition of aluminum film, carry out heating anneal process under vacuum conditions, eliminate the metal stresses within aluminium foil;Aluminium foil after plated film is unloaded, to its performance checking;It is vacuum-packed after inspection;The present invention utilizes magnetic control sputtering vacuum coating technology to deposit one layer of nano thin-film aluminum on negative collector electrode aluminium foil to improve the electric conductivity of cathode of lithium battery colelctor electrode aluminium foil and to reduce the roughness of aluminium foil.
Description
Technical field
The present invention relates to lithium battery device and lithium battery material manufacturing technology field, be specifically related to one utilize vacuum etc. from
Sub-coating technique improves the method for cathode of lithium battery aluminium foil colelctor electrode electrical property.
Background technology
Cathode of lithium battery colelctor electrode aluminium foil there is presently no international standard and national technical standard, and lithium battery industry is typically wanted
Seek aluminium foil surface roughness Rz 2.0um, the thickness 20um of aluminium foil, and use rolling aluminium foil.
The lithium ion battery negative colelctor electrode prescription to aluminium foil: the first, aluminium foil surface uniform color, clean, template
Smooth, without obvious roll marks, pit, pin hole, evidence of corrosion etc.;The second, aluminium foil surface lacks without rollings such as folding line, piebaldism, bright lines
Fall into;3rd, aluminium foil surface no color differnece;4th, surface oil-free, without severe oil abnormal smells from the patient, is visible by naked eyes oil mark;5th, surface is opened
Power, the test of dyne pen is not less than 32 dyne.
In sum, a kind of reduction is needed to roll cathode of lithium battery colelctor electrode aluminium foil roughness and improve its electric conductivity
Technical method.
Summary of the invention
Present invention aims to defect and the deficiency of prior art, it is provided that a kind of raising cathode of lithium battery aluminium foil collection
The method of electrode electrical property, it utilizes vacuum magnetron sputtering coating film technology reduce rolling aluminium foil roughness and improve its electric conductivity
Energy.
For achieving the above object, the technical solution used in the present invention is: a kind of raising cathode of lithium battery colelctor electrode electrical property
Method, it comprises the following steps:
A, aluminium foil to be processed is fixed on Roll-Roll vacuum magnetic control after purifying in room the size being cut to need spatters
Penetrate in the substrate frame of filming equipment, prepare magnetic control sputtering plating aluminum film;
B, unlatching Roll-Roll vacuum magnetron sputtering coating film equipment, the equipment that adjusts extremely can coating process condition;
C, put into substrate frame-aluminium foil to be coated;
D, utilize ion source that aluminium foil surface carries out plasma bombardment process, peel off aluminium foil surface oxide layer, remove table
Face spike;
E, direct-current vacuum magnetron sputtering technique is utilized to deposit thin film aluminum at aluminium foil surface;
After f, aluminium foil surface deposition of aluminum film, carry out heating anneal process under vacuum conditions, eliminate the metal within aluminium foil
Stress;
G, the aluminium foil after plated film is unloaded, to its performance checking;
It is vacuum-packed after h, inspection.
Preferably, the size after aluminium foil cuts in described step a is: 0.2-1.2m.
Preferably, described step b can coating process condition be: background vacuum 5x10-3Pa, processing atmosphere 3x10- 1Pa, heating-up temperature 80-200 DEG C, ion source power 0.2-3kw, magnetically controlled DC sputtering cathode power 1-20W, coating speed 0.1-
5m/s。
Preferably, the vacuum in described step h is 3x10-1-5x10-3Pa。
After using above-mentioned technology, present invention have the beneficial effect that
1, utilize ion source that aluminium foil surface is carried out plasma bombardment process so that the roughness of aluminium foil surface reduces,
The oxide layer on surface is removed, and improves the electric conductivity of aluminium foil colelctor electrode.
2, utilizing direct-current vacuum magnetron sputtering technique to deposit thin film aluminum at aluminium foil surface, rolling aluminium foil is through plasma deposition
After aluminum film, coarse surface crater is filled and led up, and reduce further aluminium foil surface roughness;The thin film aluminum of surface deposition, improves
The electric conductivity of aluminium foil.
3, after aluminium foil surface deposition of aluminum film, make annealing treatment under vacuum conditions, eliminate the metal stresses within aluminium foil,
Improve the mechanical performance of aluminium foil.
4, the aluminium foil after plated film unloads, and is vacuum-packed after its performance checking, prevents air oxidation.
Accompanying drawing explanation
Fig. 1 is the important technological parameters table of cathode of lithium battery colelctor electrode aluminium foil in prior art.
Detailed description of the invention
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete
Describe, it is clear that described embodiment is only a part of embodiment of the present invention rather than whole embodiments wholely.Based on
Embodiment in the present invention, it is every other that those of ordinary skill in the art are obtained under not making creative work premise
Embodiment, broadly falls into the scope of protection of the invention.
This detailed description of the invention uses step in detail below:
A, aluminium foil to be processed is fixed on Roll-Roll vacuum magnetic control after purifying in room the size being cut to need spatters
Penetrate in the substrate frame of filming equipment, prepare magnetic control sputtering plating aluminum film;
B, unlatching Roll-Roll vacuum magnetron sputtering coating film equipment, the equipment that adjusts extremely can coating process condition;
C, put into substrate frame-aluminium foil to be coated;
D, utilize ion source that aluminium foil surface carries out plasma bombardment process, peel off aluminium foil surface oxide layer, remove table
Face spike;
E, direct-current vacuum magnetron sputtering technique is utilized to deposit thin film aluminum at aluminium foil surface;
After f, aluminium foil surface deposition of aluminum film, carry out heating anneal process under vacuum conditions, eliminate the metal within aluminium foil
Stress;
G, the aluminium foil after plated film is unloaded, to its performance checking;
It is vacuum-packed after h, inspection.
Size after aluminium foil cuts in step a is: 0.2-1.2m;Step b can coating process condition be: background vacuum
5x10-3Pa, processing atmosphere 3x10-1Pa, heating-up temperature 80-200 DEG C, ion source power 0.2-3kw, magnetically controlled DC sputtering negative electrode
Power 1-20W, coating speed 0.1-5m/s;Vacuum in step h is 3x10-1-5x10-3Pa。
This detailed description of the invention utilizes ion source that aluminium foil surface is carried out plasma bombardment process so that aluminium foil surface
Roughness reduces, and the oxide layer on surface is removed, and improves the electric conductivity of aluminium foil colelctor electrode;Spattered by direct-current vacuum magnetic control again
Penetrating technique and deposit thin film aluminum at aluminium foil surface, rolling aluminium foil is after plasma deposition aluminum film, and coarse surface crater is filled and led up,
Reduce further aluminium foil surface roughness;The thin film aluminum of surface deposition, improves the electric conductivity of aluminium foil;Again at vacuum state
Under the aluminum film of aluminium foil surface deposition is made annealing treatment, eliminate metal stresses within aluminium foil, improve the mechanical performance of aluminium foil;
Aluminium foil after plated film unloads, and is vacuum-packed after its performance checking, prevents air oxidation.
Although an embodiment of the present invention has been shown and described, for the ordinary skill in the art, permissible
Understand and these embodiments can be carried out multiple change without departing from the principles and spirit of the present invention, revise, replace
And modification, the scope of the present invention be defined by the appended.
Claims (4)
1. the method improving cathode of lithium battery aluminium foil colelctor electrode electrical property, it is characterised in that it comprises the following steps:
A, aluminium foil to be processed is fixed on after purifying in room the size being cut to need the plating of Roll-Roll vacuum magnetic-control sputtering
In the substrate frame of film device, prepare magnetic control sputtering plating aluminum film;
B, unlatching Roll-Roll vacuum magnetron sputtering coating film equipment, the equipment that adjusts extremely can coating process condition;
C, put into substrate frame-aluminium foil to be coated;
D, utilize ion source that aluminium foil surface carries out plasma bombardment process, peel off aluminium foil surface oxide layer, remove surface point
Peak;
E, direct-current vacuum magnetron sputtering technique is utilized to deposit thin film aluminum at aluminium foil surface;
After f, aluminium foil surface deposition of aluminum film, carry out heating anneal process under vacuum conditions, eliminate the metal stresses within aluminium foil;
G, the aluminium foil after plated film is unloaded, to its performance checking;
It is vacuum-packed after h, inspection.
A kind of method improving cathode of lithium battery aluminium foil colelctor electrode electrical property the most according to claim 1, it is characterised in that
Size after aluminium foil cuts in described step a is: 0.2-1.2m.
A kind of method improving cathode of lithium battery aluminium foil colelctor electrode electrical property the most according to claim 1, it is characterised in that
Described step b can coating process condition be: background vacuum 5x10-3Pa, processing atmosphere 3x10-1Pa, heating-up temperature 80-200
DEG C, ion source power 0.2-3kw, magnetically controlled DC sputtering cathode power 1-20W, coating speed 0.1-5m/s.
A kind of method improving cathode of lithium battery aluminium foil colelctor electrode electrical property the most according to claim 1, it is characterised in that
Vacuum in described step h is 3x10-1-5x10-3Pa。
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CN201610664274.XA CN106282950A (en) | 2016-08-12 | 2016-08-12 | A kind of method improving cathode of lithium battery aluminium foil colelctor electrode electrical property |
CN201710666733.2A CN107452964A (en) | 2016-08-12 | 2017-08-07 | A kind of method for improving cathode of lithium battery copper foil colelctor electrode electrical property |
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CN201610664274.XA CN106282950A (en) | 2016-08-12 | 2016-08-12 | A kind of method improving cathode of lithium battery aluminium foil colelctor electrode electrical property |
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CN201710666733.2A Pending CN107452964A (en) | 2016-08-12 | 2017-08-07 | A kind of method for improving cathode of lithium battery copper foil colelctor electrode electrical property |
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Cited By (2)
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CN107768677A (en) * | 2017-09-18 | 2018-03-06 | 深圳市烯谷能源控股有限公司 | A kind of method for improving lithium ion cell positive colelctor electrode corrosion resisting property |
CN116751070A (en) * | 2023-07-03 | 2023-09-15 | 江苏富乐华功率半导体研究院有限公司 | Preparation method of ceramic aluminum-clad substrate and ceramic aluminum-clad substrate prepared by same |
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CN110190286A (en) * | 2019-05-24 | 2019-08-30 | 吉林大学 | A kind of vertical graphene-copper foil composite current collector and preparation method thereof based on growth in situ |
CN110993886B (en) * | 2019-12-26 | 2021-01-05 | 北京师范大学 | Preparation device for lithium battery current collector |
CN114351217B (en) * | 2022-01-12 | 2024-03-22 | 华中科技大学 | Metal electroplating composite film and preparation method thereof |
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US8526104B2 (en) * | 2010-04-30 | 2013-09-03 | Corning Incorporated | Plasma ion assisted deposition of Mo/Si multilayer EUV coatings |
CN103233199B (en) * | 2013-04-02 | 2015-10-14 | 中国科学院宁波材料技术与工程研究所 | A kind of method improving substrate surface nitride hard coating luminance brightness and hardness |
CN104164653B (en) * | 2013-05-17 | 2017-10-13 | 北京北方华创微电子装备有限公司 | A kind of magnetron sputtering apparatus and method |
CN105336912A (en) * | 2015-09-14 | 2016-02-17 | 哈尔滨工业大学 | Method for enhancing lithium ion battery current collector and active material adhesion |
CN106435494A (en) * | 2016-08-12 | 2017-02-22 | 深圳市第四能源科技有限公司 | Method for improving electrical performance of positive electrode collector electrode of lithium battery |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107768677A (en) * | 2017-09-18 | 2018-03-06 | 深圳市烯谷能源控股有限公司 | A kind of method for improving lithium ion cell positive colelctor electrode corrosion resisting property |
CN116751070A (en) * | 2023-07-03 | 2023-09-15 | 江苏富乐华功率半导体研究院有限公司 | Preparation method of ceramic aluminum-clad substrate and ceramic aluminum-clad substrate prepared by same |
CN116751070B (en) * | 2023-07-03 | 2023-11-17 | 江苏富乐华功率半导体研究院有限公司 | Preparation method of ceramic aluminum-clad substrate and ceramic aluminum-clad substrate prepared by same |
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